JPH08330203A - Charged beam drawing data creation device and drawing system - Google Patents

Abstract

PURPOSE: To prevent dimension accuracy from deteriorating by reducing the occurrence of a small figure when creating drawing data to be inputted to a charged beam drawing device. CONSTITUTION: Design layout db are divided in drawing data processing region units (S1) and overlapping elimination/black and white inversion processing for X and Y directions is executed (S2A and S2B). Further, a function for judging and selecting a figure data processing result for X and Y directions is executed (S3). When the dimension of a basic figure after the overlapping elimination/black and white inversion processing is equal to or less than a small figure dimension value, it is judged to be a small figure, for example, the total of such small figure is obtained for X and Y directions and both are compared, and figure data where the overlapping elimination/black and white inversion processing is executed are selected for a smaller total. Further, specific treatments (S4 and S5) are executed to the figure data, thus completing the creation of the drawing data.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a charged beam drawing data creating apparatus and a charged beam drawing system for significantly reducing the generation of minute figures which cause deterioration of dimensional accuracy.

[0002]

2. Description of the Related Art Electron beam drawing is widely used for manufacturing masks used for manufacturing semiconductor devices, particularly large-scale integrated circuits (LSI circuits) because of its fine processing performance and high controllability.

When the electron beam writing methods are classified,
It can be divided into two types: raster scan type and vector scan type. The raster scan type has been widely used for mask making than before because of the simplicity of the apparatus configuration and the ease of creating drawing data. However, the raster scan type has a problem that the drawing speed largely depends on the size of the drawing figure and the minimum grid size (address unit size) for designating the drawing position. actually,
64Mbit dynamic random access memory (D
When this raster scan type is applied to the mask fabrication when a minute address unit (corresponding to the smallest unit capable of expressing a drawing figure) such as RAM) is required, the drawing time is too long. Drawing may not be possible with the raster scan type.

Therefore, in recent years, a variable molding type, which is one of the vector scan types, has been receiving attention. In this variable shaping type drawing method, an electron beam is formed according to the size of a drawing figure, and the electron beam is irradiated only to a necessary area. Therefore, according to this drawing method, the drawing speed can be increased and the address unit size can be set to a smaller size. Therefore, it is considered that the variable-molding type becomes the mainstream for the electron beam direct writing used for the mask making of the device after 64M DRAM and the device development after 1G DRAM.

While the variable shaping type drawing system has the above-mentioned preferable features, the process of creating drawing data is more complicated than that of the raster scan type, and therefore the processing time becomes long. There is a problem.

The drawing data creating procedure and the drawing procedure used in the variable shaping drawing method will be described below.

FIG. 26 shows a part of design pattern data (design layout data) of an LSI circuit.
Usually, it is represented by a polygon (a row of coordinate data of each vertex). As described above, in order to draw this design pattern data with the variable shaping type electron beam drawing apparatus, first,
Basic patterns such as rectangles, squares, triangles, and trapezoids (hereinafter collectively referred to as basic figures or trapezoids)
Need to be divided into 27 and 28 show an example in which a dividing line is inserted in each of the vertices of the polygon of FIG. 26 in the horizontal and vertical directions to divide the polygon of FIG. 26 into two basic figures. .

Next, a procedure for actually drawing using the drawing data divided into the basic figures and processed as described above will be described below.

First, when the hatched pattern data shown in the drawing data of FIG. 27 divided in the horizontal direction is input to the electron beam drawing apparatus, the electron beam drawing apparatus uses the electron beam shaping deflector to set the width WS1, An electron beam having a size of height HS1 is formed.

Next, the electron beam is deflected by the deflector for designating the electron beam irradiation position in the electron beam drawing apparatus as shown in FIG.
Is moved to the irradiation position (x1, y1) shown in (1), and the resist applied on the sample such as the mask substrate or the silicon wafer is irradiated for the time corresponding to the exposure amount required for resist exposure. Next, the figure in the broken line portion of the drawing data shown in FIG. 27 is input to the electron beam drawing apparatus, and similarly electron beam drawing is executed. By sequentially repeating this for all patterns in the LSI circuit, all patterns in the LSI circuit are drawn.

[0011]

The variable shaping type drawing system described above has the following two problems in creating drawing data.

(1) One of them is a process of dividing the design layout data into basic figures that can be drawn by the variable-shaped electron beam drawing apparatus (hereinafter referred to as trapezoidal division processing).
This is a problem that occurs in the case of. The details of this problem will be described below.

The design layout data shown in FIG. 26 is
Electron beam drawing data (hereafter simply called drawing data)
FIG. 29 shows a resist pattern on the mask which is converted into a pattern and is drawn on the mask using this drawing data, and then resist development is performed. Therefore, attention is paid to the pattern dimension accuracy of the portion defined by the width Wm of the resist pattern, and the factor of the accuracy deterioration will be considered. However, here, factors related to the pattern forming process conditions such as resist development are not considered.

The design layout data shown in FIG. 26 is
In the case of being divided by a horizontal dividing line as shown in FIG. 27, the factor affecting the dimension of the width Wm of FIG. 29 is the shaping of the electron beam formed in accordance with the shaded portion of FIG. The accuracy is only the dimensional accuracy of the electron beam in the portion corresponding to the width WS1.

On the other hand, when the design layout data is divided by dividing lines in the vertical direction as shown in FIG. 28, the factors affecting the dimension of the width Wm in FIG. 29 are:
The accuracy of the irradiation position (x1, y1) of the electron beam corresponding to the shaded portion shown in FIG. 28, the accuracy of the irradiation position (x2, y2) of the electron beam corresponding to the broken portion, and the molding accuracy thereof (width WS2). is there. In this case, the shaping accuracy (width WS1) of the electron beam corresponding to the shaded portion does not become the above factor. Therefore, in the case of FIG.
There are two factors that affect the resist pattern dimensional accuracy as compared with the case of dividing by a horizontal dividing line as shown in FIG.
The points increase.

Actually, a plurality of resist patterns are formed using drawing data having different division methods as shown in FIGS. 27 and 28, and the result of measuring the dimensions of the resist pattern on the obtained mask is shown in FIG. 30, shown in FIG. Of these, FIG. 31 shows the case of using the drawing data shown in FIG. 27, that is, FIG.
The variation of the resist pattern dimension when the resist pattern of the width Wm portion shown in FIG. On the other hand, FIG. 31 shows the case where the drawing data shown in FIG. 28 is used, that is, the irradiation position of the resist pattern in the width Wm portion of FIG. 29 is different ((x1, y1), (x2, y2)).
The results are obtained when the electron beam irradiation of two shots is performed. In both figures, Wd indicates the central value.

As can be seen from FIGS. 30 and 31, 1
When the resist pattern is formed by shot electron beam irradiation, the variation of the resist pattern size is about ± 0.025 μm, whereas when the pattern is formed by two shot electron beam irradiation, the resist pattern The variation in pattern dimension is about ± 0.075 μm. Therefore, it can be seen that in the case of two-shot electron beam irradiation, the variation in register pattern dimensions, that is, in the deterioration of dimensional accuracy is more remarkable than in the case of one-shot electron beam irradiation. In other words, the accuracy of the resist pattern size largely depends on how the design layout data is divided when drawing data is created. This is one of the problems in creating variable shaped drawing data.

(2) A second problem is that when a resist pattern is formed by irradiating two or more shots at different shot positions with an electron beam, the edges of the resist pattern are formed among the plurality of shots. When the shot to be performed has a minute size, the accuracy of the formed resist pattern dimension is further deteriorated.
This point will be described with reference to FIGS. 32 to 35.

FIG. 32 shows an example of position data of a drawing figure when drawing with one electron beam.
The graph shown in FIG. 33 shows the intensity distribution of an electron beam whose beam shape is shaped as shown in FIG.
As shown in FIG. 33, the intensity distribution of the electron beam is not a perfect rectangle, but at its edge portions x1 and x2,
The tail is pulled. The slope of the intensity distribution (hereinafter referred to as beam sharpness) at the edge portion changes depending on the size of the shaped beam. Generally, as the size of the shaped beam is larger, the Coulomb repulsion in the electron beam is larger, which causes the beam sharpness to be smaller and the intensity distribution at the edge portion to be blunt.

When a pattern having the same size as the drawing figure shown in FIG. 32 is irradiated with two shots of the electron beam, and the portion formed by one shot of the left electron beam has a very small size. The electron beam intensity distribution in the case (see FIG. 34) is shown in FIG. In the case shown in FIG. 35, the intensity distribution at the edge portion (the portion corresponding to x1 on the left side) is different as compared with the case of writing with one shot (FIG. 33), and as a result, there is a difference in the dimension of the formed resist pattern. Occurs. In this case, in addition to these problems, it is not easy to shape an electron beam of a minute size from the viewpoint of controlling the current, and the shape of the electron beam becomes unstable. There is also an accompanying problem that the deterioration of the accuracy of the pattern dimension is further accelerated.

As shown in FIG. 34, a plurality of resist patterns are formed by two shots including minute figures, and the dimension of each resist pattern is measured. Equivalent) as Figure 3
6 is shown. Results when drawing with one shot (Fig. 30)
In this case, in addition to the large dimensional variation, there is a difference in the average value. This difference in average value is due to the above-mentioned irradiation of the minute figure with the electron beam.

As described above, the size of the minute figure in which the dimensional accuracy of the resist pattern is significantly deteriorated, that is, the dimension value of the minute figure is determined by the electron beam drawing apparatus used, the type of resist, and the pattern forming process method. In general, it is 0.5 μm or less, although it depends largely on the conditions.
Therefore, when the dimension value of the minute figure is set to 0.5 μm, the minute figure means that the length of either side in the width direction or the height direction is 0.5 μm or less. It will be.

Next, the above-mentioned two problems (1),
Based on (2), we will examine the creation method in the drawing data creation device of the conventional variable-shaped electron beam drawing device, and clarify the technical problems that the conventional drawing data creation device has. To do.

FIG. 37 shows a data processing flow in the conventional drawing data creating apparatus.

First, in the design layout data, the duplication between the figures is removed by the duplication removal function of the drawing data creation device (step T1). This is performed to prevent the electron beam from being overlapped and irradiated on the same region (OR process), and is an essential process for writing drawing data of the variable shaping type electron beam drawing apparatus.

In this case, the duplication removal method is as follows:
Although various methods are conceivable, a method generally used is a method of dividing a figure into stripes (hereinafter referred to as a stripe method) as shown in FIGS. 38 and 39. Here, a case where the stripe method is applied to step T1 of FIG. 37 will be described.

First, a dividing line is inserted in the fixed direction (horizontal direction or vertical direction) from each vertex of each figure over the entire surface of the processing area to form a stripe. Next, each figure is divided at stripe boundaries. 38 and 39 show the case of division in the horizontal direction.

Next, a direction is given to each side of each divided figure (vectorization). The direction is determined by looking at each vertex along the side, clockwise or counterclockwise. 38 and 39 are the cases of looking to the right (clockwise).

Next, unnecessary vectors (graphic overlapping portions) are deleted. The method of deletion will be described below.

First, each vector is sorted by coordinate value for each stripe. Next, a numerical value is given to each vector corresponding to the direction of the vector. For example, the upward vector is 1, and the downward vector is -1. This example
It shows about the stripe 5 of FIG.

Next, for each stripe, the numerical value (vector direction value) given to each vector is sequentially added from the left when the stripe is formed horizontally,
A vector whose sum is 0 is searched. Then, one vector is configured by the vector that has started the addition and the vector in which the addition result of the vector direction values is zero.

An example of such processing will be described below with reference to the stripe 5 in FIG. That is, starting the addition from the leftmost vector, the addition result of the vector direction value is 2 at the addition stage of the second vector, and the addition result of the vector direction value is 1 at the addition stage of the third vector, At the vector addition stage, the vector direction value addition result becomes zero. Therefore, the vector at the left end of the stripe 5 and the fourth vector counted from that form a figure, and the second and third vectors are deleted as unnecessary vectors. The processing result is
As shown in FIG. 39.

By performing the above processing on the vectors in all stripes, duplication of all figures is removed.

When this method is used, it can be seen that the data as the processing result is all divided into basic figures. However, as is apparent from the division result of FIG. 39, regarding the above-mentioned problems, that is, (1) division of a portion requiring high dimensional accuracy, and (2) generation of a figure of a minute size, No measures have been taken into consideration. Therefore, step T1 of FIG. 37 may result in deterioration of dimensional accuracy due to the above-mentioned two problems (1) and (2).

The next step is two flows (T2), as shown in FIG. 37, depending on the type of resist used (positive or negative) and the layout at the time of design.
Branch to (T2A, T2B).

That is, when it is necessary to irradiate an area other than the area input at the time of designing with the electron beam, black-and-white reversal processing (step T2) is required. This black-and-white reversal processing can also be processed by the same method as the above-described method for removing duplication between figures. Therefore, a method of reversing the figure in black and white will be described below with reference to FIGS. 40 and 41.

The processing is started from the state where each side after the duplication of the figure is removed is divided into vectors. First, set the area (frame) to be reversed in black and white, and the figure (rectangle) corresponding to this frame.
Is vector-divided according to each stripe, and a vector direction value is set for each vector as in the case of the duplicate elimination processing.

Next, the direction of the vector included in the black / white inversion area is inverted. With respect to the relationship with FIG. 38 and FIG. 39, the vector set upward is set downward and the vector set downward is set upward during duplicate removal. This state is shown in FIG.

The subsequent processing is the same as the duplicate elimination processing. For each stripe, the addition of vector values is started from the vector on the black-and-white inversion frame, the pair of vectors for which the added value is 0 is searched, and the figure is formed. FIG. 41 shows a state in which the black and white inversion processing has been performed.

When the black-and-white reversal process is performed, as in the case of the overlap removal process, (1) division of a portion requiring high dimensional accuracy, and (2) generation of a figure having a minute size are performed. It can be seen that taking measures is not considered.

On the other hand, when the black and white reversal processing is not necessary,
It is possible to take the above measures. That is, as a method that takes into consideration the division of parts requiring high dimensional accuracy and the generation of figures of small size, as shown in FIG. A method of dividing into polygons (step T2A) and dividing each polygon into parts that require high dimensional accuracy and generation of minute figures is taken again (step T2A).
B) is possible.

However, this processing method (T2A, T2
2B) cannot be applied even when the black-and-white reversal process described above is required. This is because when the figure group that has undergone the black-and-white reversal process is re-polygonized, all the figures are connected and become one polygon with an enormous number of vertices. This is because division processing becomes impossible.

Therefore, in the conventional method, when black-and-white reversal processing is required, no measures are taken against the problems of (1) figure division and (2) deterioration of dimensional accuracy due to the generation of minute figures. Was not done.

Referring again to FIG. 37, when the basic figure data is generated and stored (step T3), the drawing field boundary dividing function of step T4 is executed next. This function is a function of dividing the area into which the electron beam drawing apparatus can draw by only deflecting the electron beam (hereinafter referred to as a drawing field area). After that, the electron beam drawing data formatting function of formatting into a data structure that can be input to the various drawing devices in step T5 is executed, and thereby electron beam drawing data is generated. In the variable-shaped electron beam drawing apparatus given as an example here, the size of the drawing field area can be set to an arbitrary value which is usually 2.5 mm or less.

The present invention is a factor causing such deterioration of the dimensional accuracy, focusing on the point that the dimensional accuracy is remarkably deteriorated according to the prior art especially when the black-and-white reversal process is required. An object of the present invention is to provide a drawing data creation device capable of significantly reducing the generation of minute figures.

Further, the present invention can be applied only to the solution of the problem caused by the duplicate elimination processing. Further, the present invention is a preferable new technique even when the black-and-white inversion processing is unnecessary. Is to provide.

[0047]

The invention according to claim 1 is
A charged beam drawing data creating apparatus for creating a drawing data signal to be inputted to a charged beam drawing apparatus from a design layout data signal, the input means for inputting a signal for giving a size of a graphic data processing area, and the design layout data signal. And a graphic data processing area dividing means for dividing the defined area into one area with the graphic data processing area determined by the graphic data processing area size given by the input means as one unit.

According to a second aspect of the present invention, in the charged beam drawing data creating apparatus according to the first aspect, the input means further inputs a signal for giving a minute figure dimension value, and the figure data processing area is provided with the signal. A graphic that performs a predetermined graphic calculation process on the design layout data signal in each of the horizontal direction and the vertical direction of the area given by the design layout data signal, and gives the data signal of the basic graphic in the graphic data processing area. A graphic data processing result generating means for generating a data processing result; and a data signal of the basic graphic included in the graphic data processing result for each of the graphic data processing regions in the horizontal direction and the vertical direction. Based on the signal of the dimension value of the minute figure provided by the input means, the one giving the minute figure is judged and the minute figure is loaded. A figure data process for obtaining a minute figure evaluation value representing the degree of influence on beam drawing, comparing the minute figure evaluation values in the horizontal direction and the vertical direction, and selecting the figure data processing result in the direction having the smaller value. Result determination / selection means is further provided.

According to a third aspect of the present invention, in the charged beam drawing data producing apparatus according to the second aspect, the graphic data processing result producing means performs the predetermined graphic operation processing as an overlapping portion in the design layout data signal. It is provided with an overlap removal / black and white reversal processing means for executing the removal processing and the black and white reversal processing.

According to a fourth aspect of the present invention, in the charged beam drawing data generating apparatus according to the third aspect, the graphic data processing result judging / selecting means is a side of the basic graphic in each of the horizontal direction and the vertical direction. When at least one of the dimension values is less than or equal to the minute figure dimension value, there is provided a minute figure determining means for determining that the data signal of the basic figure gives the minute figure.

According to a fifth aspect of the present invention, in the charged beam drawing data creating apparatus according to the fourth aspect, the graphic data processing result judging / selecting means is configured to determine the minute graphic judging means in each of the horizontal direction and the vertical direction. Further, there is further provided a minute figure evaluation value calculation means for accumulating the number of the minute figures according to the judgment result of (1) and outputting the total as the minute figure evaluation value.

According to a sixth aspect of the present invention, in the charged beam drawing data generating apparatus according to the fourth aspect, the graphic data processing result judging / selecting means is configured to determine the minute graphic judging means in each of the horizontal direction and the vertical direction. Further, there is further provided a minute figure evaluation value calculation means for accumulating the lengths of the long sides of the minute figures in accordance with the judgment result and outputting the sum as the minute figure evaluation value.

According to a seventh aspect of the present invention, in the charged beam drawing data creating apparatus according to the fourth aspect, the graphic data processing result judging / selecting means is configured to select the minute graphic judging means in each of the horizontal direction and the vertical direction. Further, there is further provided a fine figure evaluation value calculation means for calculating the area of the fine figure according to the determination result of (1), accumulating the values, and outputting the total area of the fine figure as the fine figure evaluation value.

According to an eighth aspect of the present invention, in the charged beam drawing data creating apparatus according to the fourth aspect, the graphic data processing result judging / selecting means is configured to determine the minute graphic judging means in each of the horizontal direction and the vertical direction. The aspect ratio given as the ratio of the length of the long side of the minute figure to the length of the short side of the minute figure is calculated according to the result of the judgment, and the value of the aspect ratio is accumulated. It further comprises a minute graphic evaluation value calculation means for outputting as a graphic evaluation value.

According to a ninth aspect of the present invention, in the charged beam drawing data creating apparatus according to the third aspect, the input means specifies a signal giving the minute figure dimension value over a plurality of minute figure dimension value areas. At the same time, a signal is set for each of the plurality of regions, which gives a weighting indicating the degree of importance of the dimension of the minute figure, and the figure data processing result determining / selecting means, in each of the horizontal direction and the vertical direction, A minute figure determining means for determining whether or not the figure is a minute figure by determining to which of the plurality of minute figure dimension value areas at least one of the side dimension values of the basic figure corresponds; For each of the direction and the vertical direction, it is set in the corresponding minute figure dimension value area in accordance with the result of the minute figure judging means judging that the minute figure is the minute figure. And a micro graphic evaluation value calculating means for calculating the micro graphic evaluation value based on a signal providing the weighting.

According to a tenth aspect of the present invention, in the charged beam drawing data producing apparatus according to the second aspect, the graphic data processing result producing means performs the predetermined graphic operation processing as an overlapping portion in the design layout data signal. And a duplicate elimination processing means for executing the elimination treatment.

According to the eleventh aspect of the present invention, there is provided a charged beam drawing data creating apparatus for creating a drawing data signal to be inputted to the charged beam drawing apparatus from a design layout data signal. Means for performing the predetermined graphic operation processing on the design layout data signal in each of the horizontal direction and the vertical direction of the area given by the design layout data signal, and the data of the basic graphic in the graphic data processing area. A graphic data processing result generating means for generating a graphic data processing result for giving a signal, and a minute graphic in the data signal of the basic graphic included in the graphic data processing result for each of the horizontal direction and the vertical direction. An object is judged based on the signal of the dimension value of the minute figure, and the minute figure is used for charged beam drawing. Of a figure data processing result that determines a figure evaluation value indicating the degree of influence, compares the minute figure evaluation values in the horizontal direction and the vertical direction, and selects the figure data processing result in the direction having the smaller value.・ Has selection means.

According to a twelfth aspect of the present invention, in a charged beam drawing system, a charged beam drawing data creating device for creating a drawing data signal from a given design layout data signal, and a charged beam drawing process based on the drawing data signal to create a resist pattern. A charged particle beam drawing apparatus for forming the charged particle beam drawing apparatus, wherein the charged particle beam drawing data creation apparatus is provided with an input unit for inputting a signal giving a figure data processing area size and a signal giving a minute figure dimension value, and the design layout data signal. A graphic data processing area dividing unit that divides the created area into a unit of a graphic data processing area determined by a signal that gives the graphic data processing area size; and the design layout data signal for each graphic data processing area. For each of the horizontal and vertical regions, the design layer Graphic data processing result generating means for generating a graphic data processing result for giving a data signal of a basic graphic in the graphic data processing area by executing a predetermined graphic calculation processing on the graphic data processing area; , For each of the horizontal direction and the vertical direction, the one which gives a minute figure among the data signals of the basic figure included in the figure data processing result is determined based on the signal of the minute figure dimension value provided by the input means. Then, a minute figure evaluation value indicating the degree of influence of the minute figure on charged beam drawing is calculated, the minute figure evaluation values in the horizontal direction and the vertical direction are compared, and the figure data processing in the direction having the smaller value is performed. Graphic data processing result judging / selecting means for selecting / outputting results, and the figure output by the graphic data processing result judging / selecting means And a drawing data signal generating means for generating the drawing data signal based on the data processing result.

[0059]

According to the first aspect of the present invention, the drawing data signal is created from the design layout data signal in each graphic data processing area generated by the division performed by the graphic data processing area dividing means.

In the invention according to claim 2, the following processing is executed for each figure data processing area. That is, the graphic data processing result generation means performs graphic calculation processing in the horizontal direction to generate a graphic data processing result in the horizontal direction, and also performs graphic calculation processing in the vertical direction to generate a graphic data processing result in the vertical direction. To do. Further, the graphic data processing result judging / selecting means judges whether or not a micro graphic is included in the graphic data processing result in the horizontal direction to obtain the micro graphic evaluation value, and the micro graphic data processing result in the vertical direction. It is determined whether or not a figure is included, the minute figure evaluation value is obtained, and the minute figure evaluation value in the horizontal direction and the minute figure evaluation value in the vertical direction are compared and the magnitude relationship is determined. At this time, when the minute figure evaluation value in the vertical direction is smaller, the figure data processing result determination / selection unit selects the figure data processing result in the vertical direction. The drawing data created from the selected graphic data processing result is of high quality with little influence of minute graphics.

According to the third aspect of the present invention, the graphic data processing result judging / selecting means selects the graphic data processing result in which the generation of minute graphics during duplication removal / black / white inversion processing is less.

In the invention according to claim 4, the figure data processing result judging / selecting means uses the relationship of (at least one of the dimension values of the sides of the basic figure) ≦ (minute figure dimension value) as a criterion for the minute figure. Or not.

In the invention according to claim 5, the graphic data processing result judging / selecting means evaluates the degree of influence of the micro graphic by using the total sum of the numbers of the micro graphic.

In the invention according to claim 6, the graphic data processing result judging / selecting means evaluates the influence degree of the micro graphic by using the sum of the lengths of the long sides of the micro graphic.

In the invention according to claim 7, the graphic data processing result judging / selecting means evaluates the influence degree of the micro graphic by using the area of the micro graphic.

According to the eighth aspect of the invention, the graphic data processing result judging / selecting means evaluates the degree of influence of the micro graphic by using the sum of the aspect ratios of the micro graphic.

According to the ninth aspect of the present invention, a finer fine figure evaluation value is calculated by weighting set for each fine figure dimension value area.

According to the tenth aspect of the present invention, the graphic data processing result determining / selecting means selects a graphic data processing result in which the number of micro graphics generated by the duplication elimination processing is smaller.

In the eleventh aspect of the present invention, the graphic data processing result judging / selecting means selects the graphic data processing result in which the generation of minute graphics is smaller.

According to the twelfth aspect of the invention, the graphic data processing result is generated by the graphic data processing result generating means in the horizontal and vertical directions for each graphic data processing area, and which graphic data processing result is used is very small. It is selected by the graphic data processing result judging / selecting means on the basis of the graphic evaluation value. Then, drawing data is created for each figure data processing area from the selected high quality figure data processing result, and charged beam drawing is performed based on this drawing data.

[0071]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a block diagram showing a system configuration of a charged beam drawing data creating apparatus common to each of the first to fifth embodiments described below.

In the figure, 1 is a charged beam drawing apparatus, for example, an electron beam drawing apparatus is a typical example.
The charged beam drawing apparatus uses charged beam drawing data (signal)
Drawing is performed in response to the input of V1. The charged beam drawing data (signal) V1 will be simply referred to as the drawing data (signal) V1 hereinafter.
Called.

The charged beam drawing data creating apparatus 2 uses the CP
It is composed of a computer mainly composed of U3 and an external memory 7 provided outside the computer. The computer includes, in addition to the CPU 3, a display device 4, an input device 5 such as a keyboard and a mouse, a ROM and an RA.
An internal memory 6 composed of M is provided.

The functions described in each of the following embodiments are mainly the functions of the CPU 3. An apparatus composed of the above-mentioned two apparatuses 1 and 2 is generically called a charged beam drawing system.

(First Embodiment) A first embodiment of the present invention will be described below with reference to FIG.

FIG. 2 shows a charged beam drawing data creating apparatus 2 (mainly a CP for explaining the first embodiment of the present invention.
This is a data processing flow performed by U3). The feature of the first embodiment is that the graphic data processing area dividing function (step S1) for dividing the input design layout data (signal) into graphic data processing area units and the duplication removal / black-and-white inversion processing for the graphic data processing area are performed. A graphic data processing result generation function (steps S2A and S2B) that is executed for each stripe in the horizontal (X) direction and vertical (Y) direction in units.
And a graphic data processing result judging / selecting function (step) for comparing, judging, and selecting the result (graphic data processing result) of the duplication removal / black-and-white reversal processing carried out on the stripes in the X and Y directions in units of the graphic data processing area. S3) is provided. Steps S4 and S5 are the same as in the conventional example (FIG. 37). Hereinafter, a specific processing flow will be described for each function.

First, regarding the function of step S1. As described in the problems of the prior art, the overlap removal / black-and-white inversion processing is performed as one of the graphic operation processing, and it is generally performed by the stripe method. However, since this method generates a dividing line for each vertex of each figure in the design layout data, the placement status of each vertex affects the quality of the figure data after processing (generation of minute figures). Become. Specific examples are shown in FIGS.

First, as an example, consider a case where the design layout data as shown in FIG. 3 is subjected to duplicate elimination / black-and-white inversion processing. In this case, in the conventional technique, either the stripe in the X direction (see FIG. 4) or the stripe in the Y direction (see FIG. 5) is selected. In such a method, as is clear from FIGS. 4 and 5, the arrangement of the vertices greatly affects the quality of the processed graphic data,
Furthermore, it causes a situation in which the generation of minute figures is unavoidable.

Therefore, in order to solve this problem, in the first embodiment, in step S1 of FIG. 2, the design layout data (signal giving position coordinate data) and the graphic data processing input by the input device 5 are processed. Based on the data (signal) giving the area size, the CPU 3 executes the figure data processing area dividing function. For example, the CPU 3
As shown in FIG. 6, the design layout data area 11 which is an area given by the design layout data (signal) is
It is divided into 12 units of arbitrary graphic data processing areas defined by the size of the graphic data processing areas. Then, the CPU 3 performs the overlap removal / black-and-white inversion processing in units of the graphic data embedding area 12 as described below. By providing the CPU 3 with the function of step S1, it is possible to suppress the area in which each vertex of the figure affects the division of other figure data during the duplication removal / black-and-white inversion processing, thus reducing the number of minute figures generated. As a result, the quality of drawing data can be improved.

Next, the CPU 3 removes duplication in stripes in the X direction in units of the graphic data processing area 12 described above.
The black-and-white inversion process (step S2A) and the overlap removal / black-and-white inversion process in the stripes in the Y direction (step S2B) are performed. At this time, the processing method is based on both steps S2A and S2.
In both 2B, the stripe method is used, which is the method described in the prior art. 7 to 9 show an example of the result of performing the above-mentioned processing in each of the X and Y directions on one graphic data processing area 12.

Then, for each of the duplicate elimination / black-and-white inversion processing results (hereinafter, also referred to as a graphic data processing result which gives a position data signal of the basic graphic in the graphic data processing area), the following graphic data processing is performed. With the result judgment / selection function, an evaluation value for a minute figure can be calculated, and the number of occurrences of the minute figure can be reduced by comparing / selecting, and higher quality drawing data can be created.

Therefore, next, the graphic data processing result determination / selection function of step S3 will be specifically described. FIG.
0 to 12 are flowcharts showing the processing procedure of the graphic data processing result determination / selection function of FIG. However, in FIG.
BL1 in 0 is a boundary line for convenience of creating a flowchart in which FIGS. 11 and 12 are completed in succession.

First, in step S31, the input device 5
Inputs data (signal) giving a minute figure dimension value, and in response to this, the CPU 3 stores the data giving the value in the internal memory 6. The minute figure dimension value is as described above.
In this example, it is set to a value of 0.5 μm as a general value, although it largely depends on the drawing apparatus and process conditions used. Therefore, if the value of at least one side of the basic figure is 0.5 μm or less, it is recognized as a minute figure.

Next, the CPU 3 divides the graphic data processing result in the X direction obtained in step S2A, that is, by dividing a certain graphic data processing area 12 in the X direction, and performing black-and-white inversion processing. The obtained position coordinate data of each basic figure (the data is referred to as basic figure data 1) is stored in the external memory 7 with the area 12 as a file unit (step S32). Similarly, C
The PU 3 uses the graphic data processing result in the Y direction obtained in step S2B as basic graphic data 2 in the external memory 7
(Step S33).

Next, the CPU 3 shifts to the execution of the program forming the core of the graphic data processing result judging / selecting function. First, in step S34, the CPU 3 reads the basic graphic data 1 and the basic graphic data 2 relating to one graphic data processing area 12 to be the judgment target of the graphic data processing result from the external memory 7, respectively, and reads them out. To store.

Then, the CPU 3 fetches the necessary data in the internal memory 6 and calculates the minute figure evaluation value with the minute figure dimension value as the criterion for each of the basic figure data 1 and the basic figure data 2. (Step S35
A, S35B). Here, the minute figure evaluation value is a numerical value of the degree of influence of the minute figure on the drawing, and the larger the value, the greater the degree of influence of the minute figure on the drawing. The method of calculating the minute figure evaluation value will be described later.

Next, the CPU 3 executes steps S35A and S3.
Small figure evaluation value VAL obtained by 5B
1 and VAL2 are compared (step S36), the graphic data processing result with the smaller minute graphic evaluation value is selected, and the selected graphic data processing result is output to the internal memory 6 (steps S37A, S37).
B). Then, the CPU 3 performs these processes (S34 to S34).
37A, S37B) is the unprocessed graphic data processing area 12
It is carried out until there is no more (step S38).

Next, the above-mentioned minute figure evaluation value VAL1,
A method of calculating VAL2 will be described with reference to the flowchart shown in FIG. That is, the CPU 3 determines whether or not each of the input basic figures has a dimension of which the width dimension or the height dimension is equal to or smaller than the given minute figure dimension value (S351 to S353). ), When it is determined that the basic figure has such dimensions, the basic figure is recognized as a minute figure, and the number of minute figures is accumulated for all the basic figures in the figure data processing area (step S3).
54), the total number of the obtained minute figures is the minute figure evaluation value (V
Output as AL1, VAL2) (step S35)
5).

A concrete example of this processing is shown in FIGS.
An example will be described below. Assuming that one of the graphic data processing areas 12 divided in FIG. 6 is FIG.
Hereinafter, description will be made focusing on the graphic data processing area 12. This data is duplicated with stripes in the X and Y directions /
When the black-and-white inversion process is performed, the results are as shown in FIGS. 8 and 9, respectively. Next, determine the graphic data processing result
First, the minute figure evaluation value is calculated by the selection function. In the case of FIG. 8, there are ten minute figures 13 as shown in FIG.
In the case of, there is no minute figure. As a result, the minute figure evaluation values VAL1 and VAL2 are 10, 0, respectively, and the data (basic figure data 2) in FIG. 9 regarding the stripe in the Y direction is selected as the output data.

As described above, according to the first embodiment, it is possible to suppress the area in which each vertex of the figure affects the division of the other figure data during the duplication removal / black-and-white inversion processing, and X,
It has a function to perform overlap removal / black-and-white reversal processing on each stripe in the Y direction and to compare, judge, and select the results, which significantly reduces the generation of minute figures and results in high quality. It is possible to create various drawing data.

(Application Example 1 of Embodiment 1) As one application example of Embodiment 1, the graphic data processing area dividing function described as step S1 in FIG. It is also possible to add it as a separate function in the processing procedure of the conventional drawing data creating apparatus as shown in FIG. 37, separately from 1) 2). Such an application example is shown in the drawing data creation flow of FIG. In the figure, steps T1 to T5, T2A and T2B are the same steps as in the conventional example.

Thus, it is possible to reduce the generation of minute figures that occur during the overlap removal processing. Therefore, even if step T2 is carried out when black-and-white inversion processing is required, the generation of minute figures caused by it is suppressed. As a result, the deterioration of the resist pattern dimensional accuracy can be reduced. In addition, steps T2A and T2 performed when the black and white reversal process is not required
The processing of 2B also has an advantage that it can be performed more easily because step S1 is performed before that and the number of minute figures generated in step T1 is reduced in advance.

(Application Example 2 of Embodiment 1) The present embodiment 1 is particularly effective when black-and-white inversion processing is required, and although it has been described as an example in that case, black-and-white inversion processing is not required. Even in such a case, the generation of minute figures can be reduced by processing the processing after the duplicate elimination processing by the figure data processing result determination / selection function of step S3 of FIG. That is, in the application example 2, step T2 in FIG.
This corresponds to the replacement of the portions A and T2B in step S3 of FIG. 2, and an example of a specific processing procedure of this application example 2 is shown in FIG.

The processing of FIG. 15 is performed in step T2 of FIG.
Compared with A and T2B, it has the following advantages. In other words, the application example 2 has the advantage that the processing time can be further shortened because the processing procedure can be simplified and the method that has been conventionally used can be applied without any change.

(Application Example 3 of Embodiment 1) Further, the technical idea of Embodiment 1 is that not only the above-mentioned black-and-white reversal processing and overlap removal processing but also various graphic operation processing using the stripe method, for example, overlap portion The same effect as that of the first embodiment can be obtained by applying the graphic data processing area dividing function and the graphic data processing result judging / selecting function to only the output processing (AND processing) and the like.

(Embodiment 2) In the graphic data processing result judgment / selection function described in Embodiment 1, the micro graphic evaluation value is given by the total number of micro graphics. Instead, as shown in the flowchart of FIG. 16, the minute figure evaluation value is calculated as the sum of the lengths of the long sides of the minute figure (step S354).
A, S355A). The other points are similar to those of the first embodiment.

As a result, it is possible to carry out the evaluation of minute figures with higher accuracy, and as a result, it is possible to obtain higher quality drawing data as compared with the first embodiment. The reason is as schematically described in FIG. That is, 2 in FIG.
Of the two figure data, the one shown on the upper side has two minute figures 3A, 3B, and four minute figures 3C,
The number of minute figures is smaller than the figure data shown on the lower side having 3D, 3E, 3F. However, in the former case, the long sides of the minute figures 3A and 3B are longer than the long sides of the minute figures 3C to 3F. This means that the dimensional accuracy is further deteriorated due to the expansion of the area where the minute figure exists. Therefore, it is possible to select and output appropriate figure data by obtaining the minute figure evaluation value using the sum of the long sides of the minute figure as a scale, rather than using the total number of minute figures as a scale. According to this method, since the latter graphic data is selected in the case of FIG. 17, a more preferable result is obtained.

(Third Embodiment) In the second embodiment, in the above-mentioned figure data processing result judgment / selection function, the minute figure evaluation value is calculated by the sum of the lengths of the long sides of the minute figure. In Example 3, as shown in the flowchart of FIG.
The minute figure evaluation value is calculated as the sum of the areas of the minute figures (steps S354B and S355B).
As a result, the same effect as that of the second embodiment can be obtained.

(Fourth Embodiment) In the third embodiment, the fine graphic evaluation value is calculated as the sum of the areas of the fine graphics in the graphic data processing result judging / selecting function, but in the fourth embodiment, FIG. As shown in the flowchart of FIG. 5, the minute figure evaluation value is calculated as the sum of aspect ratios (long side length / short side length) of minute figures (steps S354C and S355C). As a result, the same or higher effects as those of the above-described second and third embodiments can be obtained.

Here, FIG. 20 is a view for schematically showing that the fourth embodiment has one surface superior to those of the second and third embodiments. In FIG. 20, d is a minute figure dimension value. . According to the second embodiment, the graphic data having the height h1 and the height h2 are evaluated equally. In addition, according to the third embodiment, the area of the minute figure having the height h1 is smaller, so that the figure data is selected, but a narrower area is formed by expanding in the horizontal direction. Since the accuracy of dimensional accuracy of the formed resist pattern increases as the thickness increases, it is not appropriate to select the graphic data of the height h1. In this case, the graphic data of height h2 should be selected. In this respect, according to the fourth embodiment, which is determined by the aspect ratio, the height h
Since the second graphic data is selected, the fourth embodiment is the second embodiment.
And 3 is better.

(Supplementary Note) At least two combinations of the first to fourth embodiments may be used to calculate the minute figure evaluation value.

(Fifth Embodiment) In the first to fourth embodiments, in the figure data processing result judgment / selection function, a basic figure having a dimension equal to or smaller than the minute figure dimension value given as a fixed value is determined to be a minute figure. However, from the viewpoint of difficulty in controlling the shape of the electron beam, it becomes more difficult to control the size of the actual drawing pattern for a basic pattern having a size equal to or smaller than the size of the minute pattern and having a smaller size.

Therefore, in the fifth embodiment, FIGS.
As shown in the flowchart of FIG. 7, the minute graphic dimension value is designated by a plurality of dimension areas, and weighting indicating the degree of importance of the dimension value of the minute figure is set for each area (step S31A). Thereby, the first embodiment
As compared with the fourth embodiment, it is possible to carry out the evaluation of minute figures with higher accuracy, and as a result, higher quality drawing data can be obtained.

The steps S35AD and S35BD are
Any of those described in Examples 1 to 4 may be used, or a combination thereof may be used. For example, when the method of the first embodiment is used, the number, that is, 1, is multiplied by weighting and accumulated (see FIG. 24), and when each of the second to fourth embodiments is used, the length and area are respectively ,
The aspect ratio is multiplied by weighting and accumulated to calculate a minute figure evaluation value.

FIG. 24 shows an example of the method of designating the minute figure dimension value area and the method of designating the weighting. Here, 0.1
Below, larger than 0.1 and below 0.2, larger than 0.2 and below 0.3, larger than 0.3 and below 0.4, 0.
Five areas greater than 4 and less than or equal to 0.5 are given as the minute figure dimension value areas. In the figure, L indicates the length of the side of the basic figure recognized as a minute figure. For example, the basic figure is placed within the area of the minute figure dimension value specified in the range of 0.2 to 0.3. If there is a side length L, the weight is 3.

(Summary) As described above, according to each embodiment of the present invention, by having the figure data processing area dividing function, each vertex of the figure is different from the other figure in the conventional overlap removal / black-and-white inversion processing. The area that affects the division of data can be suppressed. In addition, duplicate removal / black-and-white inversion processing is performed for each stripe in the X and Y directions, and the results are compared / judged / selected. Since it has the selection function, it is possible to significantly reduce the generation of minute figures, and as a result, it is possible to create high-quality drawing data.

[0107]

According to the first aspect of the present invention, it is possible to create drawing data capable of suppressing deterioration in dimensional accuracy of a pattern formed by a charged beam drawing apparatus.

According to the second aspect of the present invention, it is possible to reduce the generation of minute figures that occur during a predetermined figure calculation process, and it is possible to create high-quality drawing data that can prevent deterioration of dimensional accuracy. .

According to the third aspect of the present invention, the area in which each vertex of the figure affects the division of the other figure data in the duplication removal / black-and-white inversion process is divided by the figure data processing area unit. In addition, it is possible to suppress, and it is possible to significantly reduce the generation of minute figures that occur during the overlap removal / black-and-white inversion processing, and as a result, it is possible to create high-quality drawing data.

According to the fourth aspect of the invention, it is possible to determine the presence or absence of a minute figure in the figure data processing result.

According to the fifth aspect of the present invention, it is possible to carry out highly accurate evaluation of minute figures, and as a result, it is possible to suppress the deterioration of dimensional accuracy. Can be created.

According to the sixth aspect of the present invention, it is possible to carry out highly accurate evaluation of minute figures, and as a result, it is possible to significantly suppress deterioration of dimensional accuracy. High quality drawing data can be created.

According to the invention of claim 7, it is possible to carry out highly precise evaluation of a minute figure, and as a result, it is possible to significantly suppress deterioration of dimensional accuracy. High quality drawing data can be created.

According to the eighth aspect of the present invention, it is possible to carry out the evaluation of minute figures with higher accuracy, and as a result, it is possible to significantly suppress the deterioration of the dimensional accuracy. Therefore, it is possible to create higher quality drawing data.

According to the invention of claim 9, it is possible to carry out the evaluation of minute figures with higher accuracy, and as a result, it is possible to significantly suppress the deterioration of the dimensional accuracy. Therefore, it is possible to create higher quality drawing data.

According to the tenth aspect of the present invention, even when the black-and-white reversal process is unnecessary, the generation of minute figures that occur during the duplication removal process can be reduced, and deterioration of the dimensional accuracy can be prevented. Allows creation.

According to the eleventh aspect of the present invention, it is possible to reduce the generation of minute figures that occur during predetermined figure calculation processing, and it is possible to create high-quality drawing data that can prevent deterioration of dimensional accuracy. .

According to the twelfth aspect of the invention, it is possible to obtain a preferable graphic data processing result in which the generation of minute graphics is significantly reduced, and it is possible to create high-quality drawing data. As a result, the dimensional accuracy of the resist pattern can be improved.

[Brief description of drawings]

FIG. 1 is a block diagram showing a system configuration of a charged particle beam drawing data creation apparatus according to each embodiment of the present invention.

FIG. 2 is a diagram showing a charged beam drawing data creation flow of the charged beam drawing data creating apparatus according to the first embodiment of the present invention.

FIG. 3 is a diagram showing a specific example for explaining the first embodiment of the present invention.

FIG. 4 is a diagram showing a specific example for explaining the first embodiment of the present invention.

FIG. 5 is a diagram showing a specific example for explaining the first embodiment of the present invention.

FIG. 6 is a diagram showing a specific example for explaining the first embodiment of the present invention.

FIG. 7 is a diagram showing a specific example for explaining the first embodiment of the present invention.

FIG. 8 is a diagram showing a specific example for explaining the first embodiment of the present invention.

FIG. 9 is a diagram showing a specific example for explaining the first embodiment of the present invention.

FIG. 10 is a flow chart for explaining a graphic data processing result judgment / selection function according to the first embodiment of the present invention.

FIG. 11 is a flowchart for explaining a graphic data processing result determination / selection function according to the first embodiment of the present invention.

FIG. 12 is a flowchart for explaining a graphic data processing result determination / selection function according to the first embodiment of the present invention.

FIG. 13 is a flow chart for explaining a method for calculating a minute graphic evaluation value in the graphic data processing result judging / selecting function in the first embodiment of the present invention.

FIG. 14 is a flowchart showing a modified example of the first embodiment.

FIG. 15 is a flowchart showing a modification of the first embodiment.

FIG. 16 is a flowchart for explaining a minute figure evaluation value calculation method according to the second embodiment of the present invention.

FIG. 17 is a diagram for explaining the effect of the second embodiment.

FIG. 18 is a flow chart for explaining a minute figure evaluation value calculation method according to the third embodiment of the present invention.

FIG. 19 is a flowchart for explaining a minute figure evaluation value calculation method according to Example 4 of the present invention.

FIG. 20 is a diagram for explaining the effect of the fourth embodiment.

FIG. 21 is a flow chart for explaining a graphic data processing result judgment / selection function according to the fifth embodiment of the present invention.

FIG. 22 is a flow chart for explaining a graphic data processing result judgment / selection function according to the fifth embodiment of the present invention.

FIG. 23 is a flow chart for explaining a graphic data processing result judgment / selection function according to the fifth embodiment of the present invention.

FIG. 24 is a flow chart for explaining a minute figure evaluation value calculation method according to the fifth embodiment of the present invention.

FIG. 25 is a diagram showing a relationship between a region of small graphic dimension values and weighting.

FIG. 26 is a diagram showing design layout data for explaining a conventional variable-shaped drawing data generation procedure.

FIG. 27 is a diagram showing electron beam drawing data for explaining a conventional variable shaping type drawing procedure.

FIG. 28 is a diagram showing electron beam drawing data for explaining a conventional variable shaping type drawing procedure.

FIG. 29 is a diagram showing a resist pattern on a mask for explaining a problem in conventional drawing data of a variable shaping type.

FIG. 30 is a diagram showing a variation in resist pattern size on a mask when writing is performed with one shot of an electron beam, for explaining a problem in conventional writing of variable shaping type writing data.

FIG. 31 is a diagram showing variations in resist pattern size on a mask when writing is performed with a two-shot electron beam, for explaining a problem in the conventional variable-shaped writing data generation.

FIG. 32 is a diagram showing a drawing figure in the case of drawing with a one-shot electron beam for explaining a problem in the conventional variable-shaped drawing data generation.

FIG. 33 is a diagram showing an electron beam intensity distribution corresponding to FIG. 32.

FIG. 34 is a diagram showing a drawing figure in the case of drawing with a two-shot electron beam, for explaining a problem in the conventional variable-shaped drawing data creation.

FIG. 35 is a diagram showing an electron beam intensity distribution corresponding to FIG. 34.

FIG. 36 is a resist pattern on a mask in the case of writing with a two-shot electron beam and for writing with a small size electron beam for explaining the problem in the conventional variable-shaped writing data generation; It is a figure which shows the variation of dimensions.

FIG. 37 is a diagram showing a flow of creating electron beam drawing data in a conventional electron beam drawing data creating apparatus.

FIG. 38 is a diagram for explaining a duplication removal process between figures.

FIG. 39 is a diagram for explaining a duplication removal process between figures.

FIG. 40 is a diagram for explaining the black / white reversal process between figures.

FIG. 41 is a diagram for explaining a black-and-white reversal process between figures.

[Explanation of symbols]

1 Charged Beam Drawing Device, 2 Charged Beam Drawing Data Creation Device, 3 CPU, 5 Input Device, 6 Internal Memory, 7
External memory, 11 Design layout data area, 12
Figure data processing area, 13 minute figures.

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Hiroshi Taoka 4-1-1 Mizuhara, Itami City, Hyogo Prefecture Mitsubishi Electric Corporation Kita Itami Works

Claims (12)

[Claims] 1. A charged beam drawing data creating apparatus for creating a drawing data signal to be inputted to a charged beam drawing apparatus from a design layout data signal, and input means for inputting a signal for giving a size of a graphic data processing region, said design Charged beam drawing data creating apparatus comprising: graphic data processing area dividing means for dividing an area given by a layout data signal into a unit of a graphic data processing area determined by the graphic data processing area size given by the input means. . 2. The charged particle beam drawing data creating apparatus according to claim 1, wherein the input means further inputs a signal for giving a minute graphic dimension value, and gives the design layout data signal for each graphic data processing area. Predetermined graphic operation processing is performed on the design layout data signal in each of the horizontal direction and the vertical direction of the defined area, and a graphic data processing result for giving the data signal of the basic graphic in the graphic data processing area is generated. Graphic data processing result generation means, and for each of the graphic data processing areas, a means for giving a minute graphic in the data signal of the basic graphic included in the graphic data processing result in each of the horizontal direction and the vertical direction. Judgment based on the signal of the dimension value of the minute figure given by the input means, the minute figure is given to the charged beam drawing. Obtaining a figure evaluation value indicating the degree of influence, comparing the figure evaluation values in the horizontal direction and the vertical direction, and selecting the figure data processing result in the direction with the smaller value. A charged beam drawing data creating apparatus further comprising: 3. The charged particle beam drawing data creating apparatus according to claim 2, wherein the graphic data processing result creating means performs, as the predetermined graphic operation processing, removal processing of overlapping portions in the design layout data signal and black-and-white inversion. A charged beam drawing data creating apparatus comprising a duplication removal / black-and-white inversion processing means for executing processing. 4. The charged particle beam drawing data creation apparatus according to claim 3, wherein the graphic data processing result judging / selecting means is at least one of dimension values of sides of the basic graphic in each of the horizontal direction and the vertical direction. 2. A charged beam drawing data creating apparatus comprising: a minute figure determining means for determining that a data signal of the basic figure gives the minute figure when one of the dimension values is equal to or smaller than the dimension value of the minute figure. 5. The charged particle beam drawing data creating apparatus according to claim 4, wherein the graphic data processing result judging / selecting means is responsive to a judgment result of the minute graphic judging means in each of the horizontal direction and the vertical direction. The charged beam drawing data creation apparatus further comprising: a minute figure evaluation value calculation means for accumulating the number of the minute figures and outputting the total sum as the minute figure evaluation value. 6. The charged particle beam drawing data creation apparatus according to claim 4, wherein the graphic data processing result judging / selecting means is responsive to a judgment result of the minute graphic judging means in each of the horizontal direction and the vertical direction. The charged beam drawing data creation apparatus further comprising: a minute figure evaluation value calculation means for accumulating the lengths of the long sides of the minute figures and outputting the total sum as the minute figure evaluation value. 7. The charged particle beam drawing data creating apparatus according to claim 4, wherein the graphic data processing result judging / selecting means is responsive to a judgment result of the minute graphic judging means in each of the horizontal direction and the vertical direction. The charged beam drawing data creating apparatus further comprising: a minute figure evaluation value calculation means for calculating the area of the minute figure, accumulating the values, and outputting the total area of the minute figures as the minute figure evaluation value. 8. The charged particle beam drawing data creating apparatus according to claim 4, wherein the graphic data processing result judging / selecting means is responsive to a judgment result of the minute graphic judging means in each of the horizontal direction and the vertical direction. The aspect ratio given as the ratio of the length of the long side of the minute figure to the length of its short side is calculated, the value of the aspect ratio is accumulated, and the sum of the aspect ratios is output as the minute figure evaluation value. A charged beam drawing data creating apparatus further comprising a minute figure evaluation value calculating means. 9. The charged particle beam drawing data generating apparatus according to claim 3, wherein the input unit specifies a signal giving the minute figure dimension value over a plurality of minute figure dimension value areas, and the plurality of areas. A signal for giving a weighting indicating the degree of importance of the size of the minute graphic to each of the above, and the graphic data processing result determining / selecting means is configured to detect the sides of the basic graphic with respect to the horizontal direction and the vertical direction. A fine figure determining means for determining whether or not the figure is the fine figure by determining which of the plurality of fine figure dimension value areas at least one of the dimension values corresponds, and each of the horizontal direction and the vertical direction. With respect to the above, the minute figure determination means gives the weighting set to the corresponding minute figure dimension value area in accordance with the result of determination that the minute figure is the minute figure. And a micro graphic evaluation value calculating means for calculating the micro graphic evaluation value based on the signal, a charged particle beam drawing data production apparatus. 10. The charged particle beam drawing data creating apparatus according to claim 2, wherein the graphic data processing result creating means executes a removal processing of an overlapping portion in the design layout data signal as the predetermined graphic operation processing. A charged beam drawing data creating apparatus, which is provided with an overlap removing processing means. 11. A charged beam drawing data creating apparatus for creating a drawing data signal to be inputted to a charged beam drawing apparatus from a design layout data signal, said input means inputting a signal giving a minute graphic dimension value, said design layout. For each of the horizontal direction and the vertical direction of the area given by the data signal, a predetermined graphic operation process is executed on the design layout data signal,
Graphic data processing result generating means for generating a graphic data processing result for giving a data signal of a basic graphic in the graphic data processing area; and the basic data included in the graphic data processing result for each of the horizontal direction and the vertical direction. Among the data signals of the figure, the one giving the minute figure is judged based on the signal of the dimension value of the minute figure, and the minute figure evaluation value representing the degree of influence of the minute figure on the drawing of the charged beam is obtained. A charged beam drawing data creating apparatus comprising: a graphic data processing result determining / selecting unit that compares the minute graphic evaluation values in the vertical direction with each other and selects the graphic data processing result in the direction having the smaller value. 12. A charged beam drawing data creating apparatus for creating a drawing data signal from a given design layout data signal, and a charged beam drawing apparatus for carrying out charged beam drawing based on the drawing data signal to form a resist pattern. The charged beam drawing data creating apparatus is configured to input an input unit for inputting a signal giving a figure data processing area size and a signal giving a minute figure size value, and an area given by the design layout data signal for the figure data processing area. Graphic data processing area dividing means for dividing the graphic data processing area defined by a signal giving a dimension as one unit, and each of the graphic data processing areas in the horizontal direction and the vertical direction of the area given by the design layout data signal. With respect to the design layout data signal, And a horizontal direction and a vertical direction in each of the graphic data processing areas, for performing graphic processing to generate a graphic data processing result for giving a data signal of a basic graphic in the graphic data processing area. With respect to the above, with respect to the data signal of the basic figure included in the figure data processing result, the one giving the minute figure is judged based on the signal of the minute figure dimension value provided by the input means, and the minute figure is charged beam drawing. Data processing for obtaining a minute graphic evaluation value representing the degree of influence on the above, comparing the small graphic evaluation values in the horizontal direction and the vertical direction, and selecting and outputting the graphic data processing result in the direction having the smaller value. Result drawing / selecting means, and the drawing data based on the graphic data processing result output by the graphic data processing result judging / selecting means. And a drawing data signal creating means for creating a data signal.