JPH08192341A - Production support system - Google Patents

Abstract

PURPOSE: To extensively cope with the various kinds of abnormal events taking place at lines without modifying the normal operating function of lines by letting each subsystem exclusively functioning as a recovery means for abnormal conditions, act as a client of each subsystem executing the normal operations of lines, and also letting each subsystem execute appropriate recovery operations. CONSTITUTION: The system is provided with a real time control server 2-6 wherein operations are executed, which are accompanied with high load required by instantly arresting warnings from a great number of abnormality detecting monitors disposed at necessary places for lines and the like upon receiving a command from a production control system. By commands from respective high rank systems such as an information control system, a production control system 2-5, a real time control server 2-6 and the like, the control of individual equipment 2-14 through 2-17 is executed, data required for controlling production actual data and the physical condition of equipment, is collected so as to be controlled, and furthermore, each intelligent I/F 2-10 through 2-13 is also provided in order to quickly inform to high rank systems as an alarm of a abnormalities taking place in the equipment.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a production support system for managing and controlling a production line.

[0002]

2. Description of the Related Art There are many proposals for the basic structure of a system for efficiently performing normal operation of a production line. For example,
A semiconductor device manufacturing system of JP-A-3-214743,
There is a factory automation system disclosed in Japanese Patent Laid-Open No. 60-263208.

[0003]

[Problems to be Solved by the Invention] The production support system has a function of promptly detecting or predicting an abnormal event occurring during production line operation, minimizing damage to the line, and promptly recovering the original state. Required. However, there are very few proposals for production support systems that fully support this function. Compared with the normal line operation function, this is because the abnormal event processing function that occurs in the line is very complicated, and after the production support system is operating,
This is because there are many cases where an abnormal event that needs to be dealt with is identified.

[0004]

[Means for Solving the Problems] Regarding a production support system, in order to sufficiently support the function of processing various abnormal events occurring in a production line, complicated abnormality processing is required without modification of a normal line operation function. Functions need to be added later.

In order to solve the above problems, the present invention provides
It provides the basic structure of the system, as shown in FIG. 1
-1 is a subsystem that executes normal operation of the line. Reference numeral 1-2 is a subsystem that specializes in the abnormality recovery processing when an abnormal event occurs in the line. When an abnormal event occurs in the line, the subsystem that executes the abnormal recovery process of the 1-2 line operates as a client of the subsystem that executes the normal operation of the 1-1 line and executes an appropriate recovery process. .

[0006]

In the production support system of the present invention, the normal line operation function and the function of processing an abnormal event are completely separated.

[0007]

EXAMPLE An example in which the present invention is applied to a semiconductor manufacturing line will be described below.

FIG. 2 shows the configuration of this system. 2-1
This is a line anomaly management system that, when an event occurs that causes a fatal failure in the line, minimizes the damage and manages the line appropriately until it can be restored to the original state. 2-2 is a progress management system that manages the progress and process flow of the work on all lines, 2-3 is a process management system that manages the manufacturing conditions and quality data of the work, 2
-4 is an equipment diagnostic system for managing the health condition of the equipment. 2-5 is a process management system that normally executes advanced scheduling and equipment operation linked to the health condition of the equipment group. The reference numeral 2-6 controls the work transfer hardware 2-7, the automatic pollution control isolation shutter 2-8 and the pollution control device 2-9 provided in the line, and is arranged at a required position in the line. Error from a large number of anomaly detection monitors
It is a real-time control server that executes processing with a high load such as instantly grasping the system according to an instruction from the process management system. 2-10 to 2-13 execute control of individual equipments 2-14 to 2-17 according to instructions of a host system such as an information management system, a process management system, and a real-time control server, and also start construction data and equipment It collects and manages the data necessary for managing the health condition, provides this data in response to the requests of the host system and workers in the line, and promptly notifies the host system of any abnormalities in equipment as an alarm. It is an intelligent I / F. (2-
As shown in 15, the intelligent I / F is 2-15
It may be incorporated as a device main body specification. ) Table 1 shows the process management system, intelligent I / F, control commands, events, alarms of the real-time control server and their formats.

[0009]

[Table 1]

The control commands for the intelligent I / F are standardized, and the actual I / F controls and operates individual equipment. Further, the control command supports the operation of file data managed in the intelligent I / F and the transfer of the file data to the host system. Events and alarms are prepared in order to transfer the status of equipment to multiple host systems at high speed. The intelligent I / F and real-time control server control commands, events, and alarms are used by the process management system and information system management system, but other systems,
For example, the man-machine / system 2-18 dedicated to issuing control commands can also be used.

First, a basic system operation executed in normal operation will be described, and then a system operation when an abnormal event occurs in a line will be described.

First, regarding the operation of the system, the following four normal operations will be described.

(1) Grasping all equipment tracking data (Fig. 3 shows the outline of operation) (1) From the process management system to the real-time control server,
Issue the following command.

Command_AllEquipment_TrackingData () (2) The real-time control server is an intelligent I / F
To, issue the following command.

Command_TrackingData (event3) (event3 is an event for notifying the loader status of the equipment) (3) The intelligent I / F issues a loader status notification request to the equipment and acquires the current loader status of the equipment.

(4) The intelligent I / F issues the following event to the real-time control server.

Event_loader_status ('94: 23: 45, loadno1, on, work1) event_loader_status ('94: 23: 45, loadno2, off,) (5) The real-time control server records the equipment tracking data in its own tracking data file.

(6) The real-time control server executes the work of (2) to (5) at high speed in parallel for all the facilities.

(7) The real-time control server notifies the process management system of the ID of the file recording all the tracking data of the in-line equipment as a response to the control command of (1).

Answer_AllEquipment_TrackingData ('94: 2
3: 51, file_t1) (8) The process management system issues the following command to the real-time control server.

Command_FileData_get (file_t1) (9) The real-time control server sends the process management system file_
Transfer t1.

(10) The process management system merges the data of file_t1 and the equipment event acquired by the process management system itself after '94: 23: 51 to complete the tracking data collection work for all lines.

(2) Work transfer control (an outline of operation is shown in FIG. 4) (1) The process management system instructs the real-time control server to transfer work 1 from Equipment 1 to Equipment 2.

Command_transport (work1, Equipment1, Equipment2) (Equipment1: 3-12 wafer processing equipment 2 here. Equipment2: 3-11 wafer processing equipment 1 here.) (2) Real-time control server The job ID is set to the instructed transfer, and it is returned to the process control system to start the transfer process.

[Answer_transport (work1, Equipment1, Equ
ipment2, job1) The real-time control server has the ability to manage the transportation so that the interference of each transportation is minimized even when receiving multiple transportation instructions, but if the transportation fails due to some failure, Acquires tracking data and notifies process control system or man-machine system of alarm. The process control system or the operator takes appropriate measures for this. (3) When a lot is loaded on the loader of the equipment due to the execution of transportation, the intelligent I / F from the equipment
To that effect.

(4) The intelligent I / F notifies this as an event to the real-time control server, the process management system and the progress management system.

Event_loader_status ('94: 09: 12: 24: 17, lo
ad1, on, work1) (5) The real-time control server completes the work transfer process and notifies the process management system.

Event_transport_complete ('94: 09: 12: 24: 20, job1) (3) Workpiece processing in equipment (operation outline is shown in Fig. 5) (1) From process management system to intelligent I / F,
Issue the following command.

Command_WorkFile_create (work1, type1, n) type1: Work processing type (file type of single wafer processing equipment in this example) n: number of wafers (2) Intelligent I / F creates a work file of type1 shown in FIG. It is generated and the file number is returned to the process control system.

Answer_WorkFile_create (workID, file_W1) (3) The process management system requests the intelligent I / F to transfer detailed data to the file No. acquired in (2).

Command_FileData_set (file_W1, sendFile_W1) command_FileData_set (file_w1, sendFile_w1) command_FileData_set (file1_w2, sendFile_w2) ・ ・ ・ command_FileData_set (file1_n, sendFile_w4) sendFile_W1: Work detail data_w file_end in file w_end file_w4 File in progress management that holds data (4) The intelligent I / F sets the required data in file1 and sends the next command to the process control system.

Answer_FileData_set (file_W1, OK) answer_FileData_set (file_w1, OK) answer_FileData_set (file1_w2, OK) ・ ・ ・ answer_FileData_set (file1_wn, OK) (5) The process management system uses intelligent I / F to process wafers and recipes. To set. The intelligent I / F creates a process file, which is an execution file of the master recipe file registered in its own system, and links it with the work files file_w1 to file1_wn. As an example, FIG. 6 shows a file management form for single-wafer processing equipment.

There are the following types of process file generation and work file connection instructions.

(A) In the case of processing equipment for each work unit command_Process_select (resipe1, workW1) answer_Process_select (recipe1, workW1, process1) (b) In the case of batch processing equipment command_Process_select (resipe1, workW1, workW2, ...
・ WorkWm) answer_Process_select (resipe1, workW1, workW2, ・ ・ ・
workWm, process1) (c) In case of split batch processing command_Process_select (resipe1, workw1, workw2, ...
・, Workwi) (i <n) answer_Process_select (resipi1, work1w1, work1w2, ・ ・
・, Workwi, process1) command_Process_select (resipe1, workwi + 1, workwi + 2,
・ ・ ・ Workwn) answer_Process_select (resipe1, workwi + 1, workwi + 2, ・
・ ・ Workwn, process2) (d) In case of single wafer processing equipment command_Process_select (resipe1, workw1) answer_Process_select (resipe1, workw1, process1) command_Process_select (resipe1, workw2) answer_Process_select (resipe1, woekw2, process2) command_Process_select (resipe2, workw3) answer_Process_select (resipe2, work1_3, process3) ... command_Process_select (resipe5, workwn) answer_Process_select (resipe5, workwn, processn) The intelligent I / F automatically manages these complicated files. Also, the state history (log) file of the equipment, the data file of the equipment attached to the equipment such as a sensor, and the process files are automatically associated.

(6) The intelligent I / F notifies the host system such as the progress management system of the completion of the work data setting as an event.

Event_WorkData_ready (TimrStamp, workID, processID) (7) The process management system determines the optimal start order of work 1 and, when the start conditions are met, instructs the intelligent I / F to start the work.

Command_Process_start (process1) answer_Process_start (process1, OK) (8) The intelligent I / F starts the work according to the recipe detailed data specified in (5) and the equipment control specification. The intelligent I / F issues the following events to the host system that needs to monitor the status of construction at the facility.

(A) Processing preparation completion notification event_Process_ready ('94: 09: 13: 21: 01, process1) (b) Processing start notification event_Process_start ('94: 09: 13: 21: 05, process1) (c) Processing Completion notification event_Process_complete ('94: 09: 13: 21: 35, process1) (d) Alarm notification alarm (alarm1, file_alarm1) In addition, the host system sends the following command to the intelligent I / F The start of construction can be stopped urgently.

Command_Process_stop (process1) answer_Process_stop (process1, OK) (9) The work processing record is recorded in the process file of the intelligent I / F. Pros data is transferred asynchronously in response to a request from the host system.

(4) Master recipe setting, evaluation, and change (operation outline is shown in FIG. 7) The process management system executes registration, evaluation, and update of the recipe file of the intelligent I / F.

(A) When registering a new recipe file, the following instruction is given.

(1) Instruct generation of a recipe file.

Command_MasterRecipeFile_create (resipe1) answer_MasterRecipeFile_create (resipe1, file_r1) (2) Transfer necessary data to the recipe file.

Command_FileData_set (filer_r1, sendFile_r1) answer_FileData_set (file_r1, sendFile_r1, OK) sendFile_r1: file in the process management system that holds work detail data (b) example of evaluation of recipe file (1) process management system is the target of evaluation The recipe file is obtained from the intelligent I / F, and the I / D of the execution process file recorded in the file as shown in FIG. 7 is obtained.

Command_File_get (file_r1, getFile_r1) answer_File_get (file_r1, getFile_r1, OK) getFile_r1: File in the process management system for acquiring the recipe file (2) The process management system acquires the necessary process file from the intelligent I / F And evaluate.

Command_File_get (file_procsee1, getFile_p1) answer_File_get (file_process1, getFile_p1, OK) getFile_p1: file in the process management system to obtain the process file (c) update existing recipe file (1) process management system is intelligent I Instruct / F to update the file. command_FileDa
ta_set_request (file_1, sendFile_r1) answer_FileData_set_request (file_1, sendFile_r1, OK) (5) Determining the appropriate time for equipment maintenance The equipment diagnostic system manages equipment maintenance information for managing the health condition of equipment. The information necessary for that is collected from the intelligent I / F. The intelligent I / F holds data for managing the health condition of the equipment in association with the process file as shown in FIG.
The process management system works with the equipment diagnosis system to formulate and execute an appropriate maintenance schedule.

Next, the system operation when an abnormal event occurs in the line will be described. The system of the present invention handles abnormal events occurring in a line by classifying them as shown in FIG.

First, the post maintenance function will be described.
Post maintenance is a function that promptly detects abnormal events that occur in the line, minimizes damage to the line, and quickly restores the original condition.

(6) When the equipment detects an abnormality in the equipment itself during wafer processing (FIG. 9 shows an outline of operation) (1) The equipment notifies the intelligent I / F of the occurrence of an abnormal event. .

(2) The intelligent I / F notifies the facility diagnostic system of the occurrence of the abnormal event of (1) as an alarm.

(3) The equipment diagnosis system processes (2) with the highest priority, and instructs the process management system to stop the start of construction at the equipment if necessary.

Command_Equipment_offSchedule (EquipmentID) answer_Equipment_offSchedule (EquipmentID, OK) (4) When the process management system receives the instruction of (3) from the equipment diagnosis system, the next process is executed with the highest priority.

Instruct the intelligent I / F to stop construction at the facility where the alarm occurred.

Command_Process_stop (processID) answer_Process_stop (porcessID, OK) -Instructs the real-time control server to cancel an instruction that is being executed or is waiting to be executed, as a transportation instruction related to the facility where the alarm occurred.

Command_transportcancel (jobID) answer_transportcancel (jobID, OK) -Adjust the scheduling related to the facility in which the alarm occurred.

(5) The equipment diagnosis system searches the past cases of abnormality occurrence, which are held in its own system, and executes appropriate measures based on the reference cases (including the presentation of advice to the operator). ).

(6) The equipment diagnostic system notifies the process management system to that effect when the equipment in which the abnormality has occurred returns to a state in which it can operate normally.

Command_Equipment_onSchedule (EquipmentID) answer_Equipment_onSchedu
le (EquipmentID, OK) Further, the detailed state history of the equipment until the occurrence of the abnormal event is acquired from the intelligent I / F, and the monitor data related to the event is analyzed.

Command_FileData_get (stat
uslogFile, getFileID) answer_FileData_get (statuslogFile, getFileID) If a monitor threshold for predicting the occurrence of an event is obtained by this processing, the intelligent I / F will issue the threshold and alarm with the following command. Set the code.

Command_FileData_set (alarmSetfile, setFileID) answer_FileData_set (alarmSetfile, setFileID) Sets a threshold value and an alarm code in alarmSetfile.

This command is also used to set thresholds and alarms for time-planned maintenance (regular maintenance, aging maintenance).

When a worker substitutes these complicated works executed by the equipment diagnosis system, a man-machine is used.

(7) The process control system resumes normal operation of the restored equipment.

(7) When the abnormality detection monitor detects the occurrence of an abnormal event (contamination) in the line (the outline of the operation is shown in FIG. 10) (1) The abnormal event (contamination) occurred in the line by the abnormality detection monitor Occurrence is detected and this is notified to the line abnormality processing system with an alarm.

(2) The line abnormality management system executes the following processing in parallel.

The contaminated area and the non-contaminated area are identified by the divisions shown in FIGS. 11 to 14 based on the contamination concentration levels set in the alarms notified from the plurality of abnormality detection monitors, and the areas to be closed are Instruct the real-time control server. The real-time control server closes all pollution control isolation shutters in the area to be closed. In addition, all transport controls related to the area to be isolated are urgently stopped. At the same time, the pollution control device in charge of the area to be isolated is activated to start the cleaning work.

Command_Partion_close (partionID) answer_Partion_close (partionID, OK) -The line abnormality management system notifies the process management system of the equipment ID related to the closed area.

Command_Equipment_offSchdule (EquipmentID) answer_Equipment_offSchdule (EquipmentID, OK) With this control command, the process management system executes the following process.

.. The process control system instructs the intelligent I / F to stop the construction at this facility.

Command_Process_stop (processID) answer_Process_stop (porcessID, OK) ... The process management system instructs the real-time control server to cancel an instruction that is being executed or is waiting to be executed, as a transportation instruction related to this equipment. The real-time control server matches this instruction with the instruction from the line abnormality management system, and processes the already executed transportation emergency stop instruction so as not to be retransmitted to the transportation hardware.

Command_transportcancel (jobID) answer_transportcancel (jobID) -The process management system adjusts the scheduling related to the alarmed facility.

The line abnormality management system provides the in-line worker with appropriate information (voice alarm, evacuation route instruction, restoration work support, etc.) according to the level of contamination.

(3) After all the recovery work is completed, the line abnormality management system notifies the process management system to that effect when the equipment in which the abnormality has occurred returns to a state in which it can operate normally.

Command_Equipment_onSchedule (EquipmentID) answer_Equipment_onSchedule (EquipmentID, OK) (4) The process management system resumes normal operation of the recovered equipment.

Next, the preventive maintenance function will be described. Preventive maintenance is a function to detect and eliminate the potential of abnormal event occurrence. The potential for the occurrence of abnormal events in equipment is detected by the equipment data monitoring function of the intelligent I / F.

(7) The system operation when the intelligent I / F detects the arrival of the time-planned maintenance of the equipment or the abnormality of the monitor data is as described in (6).
It is the same as (2) to (5).

[0077]

[Effect] By adopting the basic system structure of the present invention, it becomes possible to expand the function corresponding to various abnormal events occurring in the line without modifying the normal line operation function.

[Brief description of drawings]

FIG. 1 is a block diagram of a production system proposed by the present invention.

FIG. 2 is an explanatory diagram of a system configuration.

FIG. 3 is an explanatory diagram of grasping all equipment tracking data.

FIG. 4 is an explanatory diagram of work transfer control.

FIG. 5 is an explanatory diagram of processing of a work in equipment.

FIG. 6 is a system diagram of a file management form of a single-wafer processing facility.

FIG. 7 is an explanatory diagram of master recipe setting, evaluation, and change.

FIG. 8 is an explanatory diagram of classification of abnormal events that occur in a line.

FIG. 9 is an explanatory diagram when the equipment detects an abnormality of the equipment itself during wafer processing.

FIG. 10 is an explanatory diagram when the abnormality detection monitor detects the occurrence of an abnormal event (contamination) in a line.

FIG. 11 is an explanatory diagram of a closed area when the contamination level is low.

FIG. 12 is an explanatory view of a closed area when the contamination level is in progress.

FIG. 13 is an explanatory diagram of a closed area when the contamination level is medium or large.

FIG. 14 is an explanatory diagram of a closed area when the contamination level is high.

[Explanation of symbols]

 1-1 ... Subsystem, 2-2 ... Subsystem, 2-1 ... Line abnormality management system, 2-2 ... Progress management system, 2-3 ... Quality management system, 2-4 ... Equipment diagnostic system, 2-5 ... Process management system, 2-6 ... Real-time control server, 2-7 ... Transport hardware.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Office reference number FI technical display location H01L 21/50 A

Claims (1)

[Claims] 1. In a system that supports production, when an abnormal event occurs in a line, a subsystem that specializes in abnormal recovery processing operates as a client of each subsystem that executes normal operation of the line. , A production support system characterized by executing appropriate recovery processing.