JPH08102635A - Composite parts of lcr - Google Patents

Composite parts of lcr

Info

Publication number
JPH08102635A
JPH08102635A JP6261520A JP26152094A JPH08102635A JP H08102635 A JPH08102635 A JP H08102635A JP 6261520 A JP6261520 A JP 6261520A JP 26152094 A JP26152094 A JP 26152094A JP H08102635 A JPH08102635 A JP H08102635A
Authority
JP
Japan
Prior art keywords
lcr
film
circuit
alumina
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6261520A
Other languages
Japanese (ja)
Inventor
Kazuhiro Seto
一弘 瀬戸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP6261520A priority Critical patent/JPH08102635A/en
Publication of JPH08102635A publication Critical patent/JPH08102635A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce an occupied floor area and to inexpensively manufacture composite LCR parts by working and forming terminal electrodes of prescribed sizes. CONSTITUTION: Composite LCR circuits consisting of a resistor part 2, an inductor part 3 and a capacitor part 4 are formed on an alumina insulating base block 2 by alumina vapor deposition or the like. After an anodizing treatment is applied on the surface of an alumina conductor, an electrically insulated dielectric film 7 is formed. An Fe-Ni magnetic film 6 is formed on the inductor part 3. Finally conductive paste is applied to three positions of the side faces of the block 2 as terminal electrodes 1a, 1b, 1c of an LCR circuit, baked and then soldered.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、電子装置の回路に使用
される表面実装型LCR複合部品に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface mount type LCR composite component used in a circuit of an electronic device.

【0002】[0002]

【従来の技術】電子装置の回路の信号ライン等のノイズ
遮断、インピーダンス整合等に組み込まれる従来のLC
R複合回路においては、図6に示すように、表面実装型
小型コイル12と表面実装型コンデンサ13を並列に接
続してLC回路を構成し、又プリント基板パターンによ
る抵抗14を該LC回路に対し直列に配列し、LCR回
路を構成していた。又、図7に示すように、円筒フェラ
イトコア15を2個用い、貫通インダクタを構成し、そ
の中央に小型セラミックコンデンサ等を接続し、LC回
路を構成し、これらを樹脂16で封止することで、LC
複合部品としていた。このように、従来のLCR複合回
路においては、小型コイルおよび小型コンデンサ、抵抗
との組合せ等で回路を形成するか、あるいは比較的大き
な占有床面積をとる高価なLC複合部品等を選定し、抵
抗と組合わせて回路を形成していた。
2. Description of the Related Art A conventional LC incorporated in a circuit such as a signal line of an electronic device for noise blocking and impedance matching.
In the R composite circuit, as shown in FIG. 6, an LC circuit is constructed by connecting a surface mounting type small coil 12 and a surface mounting type capacitor 13 in parallel, and a resistor 14 formed by a printed circuit board pattern is connected to the LC circuit. They were arranged in series to form an LCR circuit. Further, as shown in FIG. 7, two cylindrical ferrite cores 15 are used to form a through inductor, a small ceramic capacitor or the like is connected to the center thereof to form an LC circuit, and these are sealed with resin 16. And LC
It was a composite part. As described above, in the conventional LCR composite circuit, the circuit is formed by a combination of a small coil, a small capacitor, and a resistor, or an expensive LC composite component that occupies a relatively large floor area is selected and the resistance is increased. The circuit was formed in combination with.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、電子装
置の小型軽量、低価格化が進む上で、電子部品の表面実
装密度の向上が課題となる一方、上述のような構成のた
め、LCR複合回路の占有床面積をより小さくすること
は、困難であるという問題があった。
However, in order to reduce the size and weight of the electronic device and to reduce the price thereof, the improvement of the surface mounting density of the electronic parts becomes an issue, while the LCR composite circuit has the above-mentioned structure. There is a problem that it is difficult to reduce the occupied floor area of the.

【0004】本発明の目的は、LCR複合回路の占有床
面積をより小さくでき、低コストで作製することが可能
であり、高い信頼性を有する表面実装対応のLCR複合
部品を提供することにある。
An object of the present invention is to provide a surface mountable LCR composite component which can reduce the occupied floor area of the LCR composite circuit, can be manufactured at low cost, and has high reliability. .

【0005】[0005]

【課題を解決するための手段】本発明のLCR複合部品
は、アルミナ等の安価な絶縁基板を、予め一部、もしく
は全てを分割するか、あるいは絶縁基板に切断溝等を形
成し、その後、導体膜、誘電体膜等を積層してLCR複
合回路を設け、更に、端子電極を形成し、所定の大きさ
に加工、又は、端子電極を所定の大きさに加工後、形成
してなる構成を特徴とする。
In the LCR composite component of the present invention, an inexpensive insulating substrate such as alumina is divided in part or in advance, or a cut groove or the like is formed in the insulating substrate, and thereafter, A structure in which a conductor film, a dielectric film, and the like are laminated to provide an LCR composite circuit, and a terminal electrode is further formed and processed into a predetermined size, or after the terminal electrode is processed into a predetermined size and formed. Is characterized by.

【0006】即ち、本発明は、絶縁基板ブロック上に、
導体膜、誘電体膜、及び必要に応じ、磁性膜、電気絶縁
膜を積層して、インダクタ部、キャパシタ部、及びレジ
スタ部による回路を形成し、前記回路と接続する端子電
極を前記絶縁基板ブロックの側面に形成してなることを
特徴とするLCR複合部品である。
That is, according to the present invention, on the insulating substrate block,
A conductor film, a dielectric film, and, if necessary, a magnetic film and an electric insulating film are laminated to form a circuit including an inductor portion, a capacitor portion, and a resistor portion, and a terminal electrode connected to the circuit is connected to the insulating substrate block. The LCR composite component is characterized in that it is formed on the side surface of.

【0007】[0007]

【作用】本発明において、部品の床面積を小さくし、表
面実装対応の端末処理を施したことで、従来のLCR複
合回路の占有床面積を大幅に縮小できる。又、表面実装
部品としたことで、他部品と共に自動実装機にて高密度
実装が実現できる。部品の高さが低いため、実装前の部
品配列の際、部品の安定性が良くなる。又、回路の基板
として安価な絶縁基板を適用したことで、従来品と比較
し、低コスト化が達成できる。
In the present invention, the floor area of the components is reduced and the terminal treatment corresponding to the surface mounting is performed, whereby the floor area occupied by the conventional LCR composite circuit can be greatly reduced. Further, by using the surface mount component, high density mounting can be realized by an automatic mounter together with other components. Since the height of the components is low, the stability of the components is improved when the components are arranged before mounting. Further, by using an inexpensive insulating substrate as the circuit substrate, cost reduction can be achieved as compared with the conventional product.

【0008】[0008]

【実施例】以下、本発明の実施例を図面を用いて説明す
る。
Embodiments of the present invention will be described below with reference to the drawings.

【0009】(実施例1)図1に、本発明の代表的な部
品構成を示す第1の実施例のLCR複合部品の外観斜視
図を示す。図1におけるLCR複合部品の作製手順を示
すと、次のようになる。2mm×1.2mmに切り出さ
れた厚み0.63mmのアルミナの絶縁基板ブロック2
の上に、アルミ蒸着、及びフォトリソグラフィー技術を
利用し、インダクタ部3、キャパシタ(コンデンサ)部
4、及びレジスタ部2を形成した。
(Embodiment 1) FIG. 1 is an external perspective view of an LCR composite component of a first embodiment showing a typical component structure of the present invention. The manufacturing procedure of the LCR composite component in FIG. 1 is as follows. Alumina insulating substrate block 2 with a thickness of 0.63 mm cut out to 2 mm x 1.2 mm
The inductor portion 3, the capacitor portion 4, and the register portion 2 were formed on the above using aluminum deposition and photolithography technology.

【0010】又、インダクタ部3とキャパシタ部4に対
応するアルミ導体表面を、陽極酸化手法によるアルマイ
ト処理を施し、電気絶縁誘電体膜7を形成した上で、イ
ンダクタ部3だけに、又はインダクタ部3を含む素子表
面の一部、あるいは全面に、Fe−Ni磁性膜6をDC
スパッタ法により成膜した。
The aluminum conductor surfaces corresponding to the inductor portion 3 and the capacitor portion 4 are anodized by an anodic oxidation method to form an electrically insulating dielectric film 7, and then only the inductor portion 3 or the inductor portion 3 is formed. A Fe-Ni magnetic film 6 is formed on the surface of the element including
The film was formed by the sputtering method.

【0011】前記アルミナの絶縁基板ブロック2の側面
に、Agを主成分とした導電ペーストを塗布、焼き付け
た後、Ni及び半田をめっきし、LCR回路の端子電極
1a,1b,1cを形成し、表面実装可能な形状にし
た。
On the side surface of the insulating substrate block 2 made of alumina, a conductive paste containing Ag as a main component is applied and baked, and then Ni and solder are plated to form terminal electrodes 1a, 1b, 1c of the LCR circuit, It has a surface mountable shape.

【0012】(実施例2)図2に、本発明の第2の実施
例を示す。図2に示すように、まず、2mm×1.2m
mに切り出された厚み0.63mmのアルミナの絶縁基
板ブロック2の上に、銅の無電解めっき、及びフォトリ
ソグラフィー技術を利用し作製したインダクタンス、及
びレジスタンスを有する複数の直線導体17,18,1
9によるインダクタ部3、及びレジスタ部5と、この直
線導体と誘電体膜7を介し、下部あるいは上部に形成し
た前記直線導体に対向する導体膜20からなるキャパシ
タ(コンデンサ)部4とによるLCR複合回路を形成し
た。
(Embodiment 2) FIG. 2 shows a second embodiment of the present invention. As shown in Fig. 2, first, 2 mm x 1.2 m
A plurality of linear conductors 17, 18, 1 having an inductance and a resistance produced by electroless plating of copper and photolithography technology on an insulating substrate block 2 of alumina having a thickness of 0.63 mm cut out to m.
9. An LCR composite comprising an inductor part 3 and a register part 5 formed of 9 and a capacitor part 4 formed of a conductor film 20 facing the linear conductor formed on the lower or upper part of the linear conductor and the dielectric film 7 therebetween. Formed a circuit.

【0013】更に、前記アルミナの絶縁基板ブロック2
の側面にLCR回路の端子電極として、直線導体17の
両端に電気的に接続された端子電極17a,17c、及
び直線導体18の両端に電気的に接続された端子電極1
8a,18c、及び直線導体19の両端に電気的に接続
された端子電極19a,19c、及び導体膜20に電気
的に接続された端子電極1bを、Agを主成分とした導
電ペーストを塗布、焼き付けした後、Ni及び半田をめ
っきすることにより、形成し、表面実装可能な形状にし
た。又、前記誘電体膜7は、図3に示す断面図の構造に
なるように、ACスパッタ法によりSiO2を1μm成
膜し、形成したものである。
Further, the insulating substrate block 2 made of alumina is used.
Terminal electrodes 17a, 17c electrically connected to both ends of the linear conductor 17 and terminal electrodes 1 electrically connected to both ends of the linear conductor 18 as terminal electrodes of the LCR circuit on the side surface of the
8a, 18c, and terminal electrodes 19a, 19c electrically connected to both ends of the linear conductor 19, and terminal electrodes 1b electrically connected to the conductor film 20 are coated with a conductive paste containing Ag as a main component, After baking, it was formed by plating Ni and solder to obtain a surface mountable shape. The dielectric film 7 is formed by depositing SiO 2 in a thickness of 1 μm by the AC sputtering method so as to have the structure shown in the sectional view of FIG.

【0014】(実施例3)図4に、本発明の第3の実施
例を示した。本実施例のLCR複合部品は、次のように
構成されている。2は絶縁ブロック、3はインダクタ
部、4はキャパシタ部、5はレジスタ部、1a,1b,
1cは端子電極である。
(Embodiment 3) FIG. 4 shows a third embodiment of the present invention. The LCR composite component of this example is configured as follows. 2 is an insulating block, 3 is an inductor part, 4 is a capacitor part, 5 is a register part, 1a, 1b,
1c is a terminal electrode.

【0015】又、図5に、その製造方法の一例を示し
た。図5に示すように、2mm×1.2mmに切り出さ
れた厚み0.63mmのアルミナの絶縁基板ブロック2
の上に、第1導体膜81を銅の無電解めっきにより膜厚
1μmで成膜した。
Further, FIG. 5 shows an example of the manufacturing method. As shown in FIG. 5, a 0.63 mm-thick alumina insulating substrate block 2 cut out to a size of 2 mm × 1.2 mm
A first conductor film 81 was formed thereon by electroless plating of copper to a film thickness of 1 μm.

【0016】次に、フォトリソグラフィー技術を利用
し、所望の形状にエッチングした後、第1導体膜81上
に、CVD法により誘電体膜7bを成膜した。更に、誘
電体膜7b上に、第2導体膜82を銅の無電解めっきに
より膜厚1μmで成膜し、フォトリソグラフィー技術を
利用し、平面上で周回を描いたスパイラル状になるよう
にエッチングした。
Next, using a photolithography technique, after etching into a desired shape, a dielectric film 7b was formed on the first conductor film 81 by the CVD method. Further, a second conductor film 82 is formed on the dielectric film 7b by electroless plating of copper to a film thickness of 1 μm, and is etched using a photolithography technique so as to have a spiral shape in which a circle is drawn on a plane. did.

【0017】更に、第2導体膜82上に電気絶縁膜9と
してSiO2を1μmの膜厚でACスパッタ法を用い成
膜した後、スパイラル状の第2導体膜82の端部と、後
に成膜する第3導体膜とを電気的接続可能にするため、
絶縁膜9にスルーホール10をフォトリソグラフィー技
術を利用したエッチングを用い、形成した。
Further, after forming SiO 2 as the electric insulating film 9 with a film thickness of 1 μm on the second conductor film 82 by the AC sputtering method, the end portion of the spiral second conductor film 82 and the later formed film are formed. In order to enable electrical connection with the third conductor film to be formed,
Through holes 10 were formed in the insulating film 9 by etching using a photolithography technique.

【0018】次に、第3導体膜83を絶縁膜9上に銅の
無電解めっきにより膜厚1μmで成膜し、フォトリソグ
ラフィー技術を利用し、第2導体膜82の端部が引き出
されている側の反対側に引き出されるようにエッチング
パターン化し、その後、第1導体膜81、第2導体膜8
2、及び第3導体膜83の端部と電気的に接続がなされ
るように、絶縁基板ブロック2の側面にAgを主成分と
した導電ペーストを塗布、焼き付け後、Ni及び半田を
めっきし、端子電極1a,1b,1cを形成した(図4
の状態)。最後に、回路の保護を目的に、回路保護膜1
0としてポリイミド樹脂を図4に示した素子上面に焼き
付けをした。
Next, a third conductor film 83 is formed on the insulating film 9 by electroless plating of copper to a film thickness of 1 μm, and the end portion of the second conductor film 82 is pulled out by using the photolithography technique. The etching pattern is formed so as to be drawn out to the side opposite to the side where the first conductor film 81 and the second conductor film 8 are formed.
The conductive paste containing Ag as a main component is applied to the side surface of the insulating substrate block 2 so as to be electrically connected to the end portions of the second and third conductor films 83, baked, and then plated with Ni and solder. The terminal electrodes 1a, 1b, 1c are formed (see FIG. 4).
State). Finally, for the purpose of protecting the circuit, the circuit protection film 1
No. 0 was used and a polyimide resin was baked on the upper surface of the device shown in FIG.

【0019】なお、本発明は、上記の実施例に限定され
るものではなく、各種の変更が可能である。例えば、製
造の手順において、絶縁基板上にLCR複合回路を形成
し、その後、所定の大きさに切断、分割して、基板ブロ
ックの側面に端子電極を形成してもよい。
The present invention is not limited to the above embodiment, but various modifications can be made. For example, in the manufacturing procedure, the LCR composite circuit may be formed on the insulating substrate, and then cut and divided into a predetermined size to form the terminal electrode on the side surface of the substrate block.

【0020】又、本発明のLCR複合部品の大きさにつ
いては、高密度実装に対応するため、3mm角以内が好
適である。更に、部品の高さが1mm以内であることを
実現するため、絶縁基板の厚さは1mm以内であること
が好ましい。
The size of the LCR composite component of the present invention is preferably 3 mm square or less in order to support high-density mounting. Further, in order to realize that the height of the component is within 1 mm, the thickness of the insulating substrate is preferably within 1 mm.

【0021】[0021]

【発明の効果】以上の説明による本発明のLCR複合部
品により、占有床面積を大幅に縮小でき、かつ、低コス
ト化が達成でき、高い信頼性も確保できた。
According to the LCR composite component of the present invention as described above, the occupied floor area can be greatly reduced, the cost can be reduced, and the high reliability can be secured.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例のLCR複合部品を説明
する外観斜視図。
FIG. 1 is an external perspective view illustrating an LCR composite component according to a first embodiment of the present invention.

【図2】本発明の第2の実施例のLCR複合部品を説明
する外観斜視図。
FIG. 2 is an external perspective view illustrating an LCR composite component according to a second embodiment of the present invention.

【図3】本発明の第2の実施例のLCR複合部品を説明
する部分断面図。
FIG. 3 is a partial sectional view illustrating an LCR composite component according to a second embodiment of the present invention.

【図4】本発明の第3の実施例のLCR複合部品を説明
する外観斜視図。
FIG. 4 is an external perspective view illustrating an LCR composite component according to a third embodiment of the present invention.

【図5】本発明における第3の実施例のLCR複合部品
の製造方法の説明図。
FIG. 5 is an explanatory diagram of a method for manufacturing an LCR composite component according to a third embodiment of the present invention.

【図6】従来のLCR複合部品の説明図。FIG. 6 is an explanatory view of a conventional LCR composite part.

【図7】従来のLC複合部品の説明図。FIG. 7 is an explanatory view of a conventional LC composite component.

【符号の説明】[Explanation of symbols]

1a,1b,1c,17a,17c 端子電極 18a,18c,19a,19c 端子電極 2 絶縁基板ブロック 3 インダクタ部 4 キャパシタ(コンデンサ)部 5 レジスタ部 6 磁性膜 7,7b 誘電体膜 9 (電気)絶縁膜 10 スルーホール 11 回路保護膜 12 コイル 13 コンデンサ 14 抵抗 15 フェライトコア 16 (封止)樹脂 17,18,19 直線導体 20 導体膜 81 第1導体膜 82 第2導体膜 83 第3導体膜 1a, 1b, 1c, 17a, 17c Terminal electrode 18a, 18c, 19a, 19c Terminal electrode 2 Insulating substrate block 3 Inductor section 4 Capacitor section 5 Register section 6 Magnetic film 7, 7b Dielectric film 9 (Electrical) insulation Film 10 Through hole 11 Circuit protective film 12 Coil 13 Capacitor 14 Resistor 15 Ferrite core 16 (Sealing) resin 17, 18, 19 Linear conductor 20 Conductor film 81 First conductor film 82 Second conductor film 83 Third conductor film 83

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 絶縁基板ブロック上に、導体膜、誘電体
膜、及び必要に応じ、磁性膜、電気絶縁膜を積層して、
インダクタ部、キャパシタ部、及びレジスタ部による回
路を形成し、前記回路と接続する端子電極を前記絶縁基
板ブロックの側面に形成してなることを特徴とするLC
R複合部品。
1. A conductive film, a dielectric film, and optionally a magnetic film and an electric insulating film are laminated on an insulating substrate block,
A circuit comprising an inductor section, a capacitor section, and a register section, and a terminal electrode connected to the circuit is formed on a side surface of the insulating substrate block.
R composite parts.
JP6261520A 1994-09-29 1994-09-29 Composite parts of lcr Pending JPH08102635A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6261520A JPH08102635A (en) 1994-09-29 1994-09-29 Composite parts of lcr

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6261520A JPH08102635A (en) 1994-09-29 1994-09-29 Composite parts of lcr

Publications (1)

Publication Number Publication Date
JPH08102635A true JPH08102635A (en) 1996-04-16

Family

ID=17363050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6261520A Pending JPH08102635A (en) 1994-09-29 1994-09-29 Composite parts of lcr

Country Status (1)

Country Link
JP (1) JPH08102635A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102082036A (en) * 2009-12-01 2011-06-01 三星电机株式会社 Chip-type electric double layer capacitor and method of manufacturing the same
US8493744B2 (en) 2007-04-03 2013-07-23 Tdk Corporation Surface mount devices with minimum lead inductance and methods of manufacturing the same

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6284206U (en) * 1985-11-13 1987-05-29
JPH0360148A (en) * 1989-07-28 1991-03-15 Murata Mfg Co Ltd Laminated type lcr element
JPH0465428U (en) * 1990-10-16 1992-06-08
JPH04213208A (en) * 1990-12-07 1992-08-04 Murata Mfg Co Ltd Lc resonator
JPH05160662A (en) * 1991-12-09 1993-06-25 Mitsubishi Materials Corp Lc filter and its forming method
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