JPH0766672A - Surface mount type piezoelectric components - Google Patents

Surface mount type piezoelectric components

Info

Publication number
JPH0766672A
JPH0766672A JP23085293A JP23085293A JPH0766672A JP H0766672 A JPH0766672 A JP H0766672A JP 23085293 A JP23085293 A JP 23085293A JP 23085293 A JP23085293 A JP 23085293A JP H0766672 A JPH0766672 A JP H0766672A
Authority
JP
Japan
Prior art keywords
electrodes
substrate
adhesive
piezoelectric
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23085293A
Other languages
Japanese (ja)
Inventor
Hitoshi Konno
仁志 近野
Masabumi Harada
正文 原田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Communication Equipment Co Ltd
Original Assignee
Toyo Communication Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Communication Equipment Co Ltd filed Critical Toyo Communication Equipment Co Ltd
Priority to JP23085293A priority Critical patent/JPH0766672A/en
Publication of JPH0766672A publication Critical patent/JPH0766672A/en
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To surely and easily make electric connections between external electrodes and lead-out electrodes by eliminating the addition of a special process only by altering a mask pattern which is used when an adhesive is applied. CONSTITUTION:Excitation electrodes 4 and 5 are formed in both the surfaces of the center part of a crystal element plate 19 and led out to end parts of the crystal element plate 19, and electrodes 6 and 7 are extended. The peripheral edge parts of protection substrates 2 and 3 are coated with an adhesive 10 and the substrates 2 and 3 are fixed so as to protect the electrodes 4 and 5 formed on both the surfaces of the element plate 19 and vibration areas nearby them with constant clearances, but the adhesive 10 is applied to positions behind the end parts of the substrates 2 and 3 in the center direction nearby the electrodes 6 and 7. Thus, the electrodes 6 and 7 are made wide in exposure area and electric connections of the electrodes 6 and 7 to base electrodes 11 and 12, and further external electrodes 13 and 14 are securely and easily made.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上利用分野】本発明は圧電フィルタや発振子等と
して用いられる圧電部品に関する。特に圧電基板の両面
に保護基板を接着剤で固定した積層体構造を有する表面
実装型の圧電部品に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric component used as a piezoelectric filter, an oscillator or the like. In particular, the present invention relates to a surface-mounted piezoelectric component having a laminated structure in which protective substrates are fixed on both sides of a piezoelectric substrate with an adhesive.

【0002】[0002]

【従来の技術】従来圧電部品はベースに立設した保治具
に圧電基板を固定し、缶ケースにてこれらを包囲し、封
止するのが一般的であった。近年は電子機器等の小型化
に伴い、圧電部品も小型化及び表面実装化が要求されて
おり、例えばセラミックの偏平なパッケージに圧電基板
を収容した表面実装型圧電部品が広く用いられている。
2. Description of the Related Art Conventionally, it has been general practice to fix a piezoelectric substrate to a holding jig installed upright on a base, enclose and seal them in a can case. In recent years, along with the miniaturization of electronic devices and the like, miniaturization and surface mounting of piezoelectric components are also required. For example, surface mounting type piezoelectric components in which a piezoelectric substrate is housed in a flat ceramic package are widely used.

【0003】また、さらなる小型化を実現する為、図4
(a)、(b)に示す如く、圧電基板1を2枚の保護基
板2、3により挟み込んだ薄型の圧電部品が提案され実
用化されつつある。尚、(a)は圧電部品の外観斜視
図、(b)はA―A断面図である。圧電基板1には、基
板中央部両面に励振電極4、5と、該励振電極4、5よ
り圧電基板1の端部まで延設された引き出し電極6、7
が形成されている。圧電基板1の励振電極4、5とその
近傍の振動領域を所定のクリアランス8、9をもって保
護するように、その周縁部に塗布した接着剤10を介し
て保護基板2、3を圧電基板1の両面に固定し基板積層
体を形成する。尚、前記クリアランス8、9の空間容積
は圧電基板1と保護基板2、3を固定している接着剤層
10の厚みにより規定される。さらにスパッタリング、
蒸着等によって基板積層体の両端部に下地電極11、1
2を形成した後、メッキあるいは金属ペ―スト塗布等を
施して外部電極13、14を形成し、それぞれ引き出し
電極6、7とを導通接続して構成したものである。
Further, in order to realize further miniaturization, FIG.
As shown in (a) and (b), a thin piezoelectric component in which the piezoelectric substrate 1 is sandwiched between two protective substrates 2 and 3 has been proposed and put into practical use. Incidentally, (a) is an external perspective view of the piezoelectric component, and (b) is an AA cross-sectional view. The piezoelectric substrate 1 has excitation electrodes 4 and 5 on both sides of the central portion of the substrate, and extraction electrodes 6 and 7 extending from the excitation electrodes 4 and 5 to the ends of the piezoelectric substrate 1.
Are formed. In order to protect the excitation electrodes 4 and 5 of the piezoelectric substrate 1 and the vibrating regions in the vicinity thereof with predetermined clearances 8 and 9, the protective substrates 2 and 3 are attached to the protective substrate 2 and 3 via an adhesive 10 applied to the peripheral portions thereof. Fixed on both sides to form a substrate stack. The space volume of the clearances 8 and 9 is defined by the thickness of the adhesive layer 10 that fixes the piezoelectric substrate 1 and the protective substrates 2 and 3. Further sputtering,
The base electrodes 11, 1 are formed on both ends of the substrate laminate by vapor deposition or the like.
After forming 2, the external electrodes 13 and 14 are formed by plating or coating with a metal paste and are electrically connected to the lead electrodes 6 and 7, respectively.

【0004】上述した如き構成の圧電部品においては引
き出し電極6、7がスパッタリングや真空蒸着等の薄膜
形成技術によって励振電極4、5と同時に一体的に形成
するのが一般的であり、引き出し電極6、7の膜厚は励
振電極8、9と同じく、極めて薄い(一般に1μm以
下)ものとなっている。即ち、従来の圧電部品にあって
は基板積層体の端面より露出した引き出し電極6、7の
端部と下地電極11、12との接触面積が極めて微小と
なるため、導通不良による製造歩留りの低下や、外部か
らのストレス等によって断線を起こしやすいという問題
があった。
In the piezoelectric component having the above-described structure, the extraction electrodes 6 and 7 are generally formed integrally with the excitation electrodes 4 and 5 simultaneously with the excitation electrodes 4 and 5 by a thin film forming technique such as sputtering or vacuum deposition. 7 and 7 are extremely thin (generally 1 μm or less), like the excitation electrodes 8 and 9. That is, in the conventional piezoelectric component, the contact area between the end portions of the lead-out electrodes 6 and 7 exposed from the end face of the substrate laminated body and the base electrodes 11 and 12 is extremely small, so that the manufacturing yield is lowered due to defective conduction. Also, there is a problem that the wire is likely to be broken due to external stress.

【0005】上記問題を解決する方法として、例えば実
開平3―426に開示されているように、圧電基板1端
部の引き出し電極6、7の厚みが励振電極4、5の厚み
より厚くなるように引き出し電極6、7の所定部分にス
パッタリング、蒸着、メッキ、金属ペースト塗布等を施
し、引き出し電極6、7の基板積層体端面からの露出面
積を拡大せしめ、引き出し電極6、7と下地電極11、
12との接続面積を広くすることにより、引き出し電極
6、7と下地電極11、12間の外部ストレスによる断
線を防止するという構成が提案されている。
As a method for solving the above-mentioned problem, for example, as disclosed in Japanese Utility Model Laid-Open No. 3-426, the thickness of the extraction electrodes 6, 7 at the end of the piezoelectric substrate 1 is made thicker than the thickness of the excitation electrodes 4, 5. Then, sputtering, vapor deposition, plating, metal paste coating, etc. are applied to predetermined portions of the extraction electrodes 6, 7 to increase the exposed area of the extraction electrodes 6, 7 from the end face of the substrate laminate, and the extraction electrodes 6, 7 and the base electrode 11 are formed. ,
It has been proposed to widen the connection area with 12 to prevent disconnection due to external stress between the extraction electrodes 6 and 7 and the base electrodes 11 and 12.

【0006】しかしながら引き出し電極6、7の所定部
分のみを厚くするために、スパッタリングや蒸着による
ときは励振電極4、5を形成した後再度真空排気工程
が、メッキによるときはメッキ工程が、金属ペースト塗
布によるときは金属ペーストを乾燥硬化させる工程が夫
々必要となるため、製造が煩雑となりコストアップにな
ると云う欠陥があった。
However, in order to thicken only the predetermined portions of the extraction electrodes 6 and 7, in the case of sputtering or vapor deposition, the excitation electrodes 4 and 5 are formed, and then the vacuum evacuation step is performed again, and in the case of plating, the plating step is performed using a metal paste. In the case of applying, since each step of drying and hardening the metal paste is required, there is a defect that the manufacturing is complicated and the cost is increased.

【0007】さらに例えば特開昭55―34575に開
示されているように、図5に示すように保護基板2、3
の端部に切り欠き15、16、17、18を設け、引き
出し電極6、7を露出させる方法が知られている。
Further, as disclosed in, for example, JP-A-55-34575, as shown in FIG.
It is known that notches 15, 16, 17, and 18 are provided at the ends of the lead electrodes to expose the extraction electrodes 6 and 7.

【0008】しかしながら保護基板2、3に切り欠き1
5、16、17、18を設けるためには、保護基板2、
3に機械加工が必要となるため、コストアップにつなが
ると云う欠陥があった。また保護基板2、3の切り欠き
近傍の圧電基板1が露出しているため該圧電基板1の端
部を破損する可能性が高いと云う欠陥もあった。
However, the notch 1 is formed in the protective substrates 2 and 3.
In order to provide 5, 16, 17, and 18, the protective substrate 2,
Since 3 requires machining, there is a defect that it leads to cost increase. There is also a defect that the piezoelectric substrate 1 in the vicinity of the cutouts of the protective substrates 2 and 3 is exposed, so that the end portion of the piezoelectric substrate 1 is likely to be damaged.

【0009】[0009]

【発明の目的】本発明は上述した如き従来の圧電部品の
欠陥を除去するためになされたものであって、圧電基板
の引き出し電極所定部分の膜厚を厚くする、あるいは保
護基板に機械加工を施すことなく、引き出し電極と外部
電極との電気的接続を確実且つ容易にした圧電部品の構
造を提供することを目的とする。
An object of the present invention is to eliminate the defects of the conventional piezoelectric component as described above, and to increase the film thickness of a predetermined portion of the extraction electrode of the piezoelectric substrate or to machine the protective substrate. An object of the present invention is to provide a structure of a piezoelectric component in which electrical connection between a lead electrode and an external electrode is ensured and facilitated without performing the process.

【0010】[0010]

【発明の概要】上述の目的を達成するため本発明に係わ
る表面実装型圧電部品の構造は、圧電基板の両面に励振
電極と該励振電極から圧電基板端部まで延びる引き出し
電極を形成し、前記励振電極とその周囲の振動領域の振
動を妨げないように該振動領域を所定のクリアランスを
もって保護すべく、保護基板をその周縁部に塗布した接
着剤を介して圧電基板両面に固定して密閉状態とした基
板積層体を構成すると共に、該基板積層体の端面に前記
引き出し電極と導通する外部電極を設け、該外部電極を
回路基板上の配線パターンに導通するよう構成した表面
実装型圧電部品において、前記接着剤を引き出し電極近
傍においては保護基板周縁部から基板積層体の中央方向
へ後退せしめた位置に塗布することによって引き出し電
極と外部電極との電気的接続を容易ならしめたものであ
る。
SUMMARY OF THE INVENTION In order to achieve the above object, a structure of a surface mount type piezoelectric component according to the present invention is such that an excitation electrode and an extraction electrode extending from the excitation electrode to an end portion of the piezoelectric substrate are formed on both surfaces of the piezoelectric substrate. In order to protect the vibration area of the excitation electrode and the surrounding vibration area with a predetermined clearance so as not to interfere with the vibration area, a protective substrate is fixed on both sides of the piezoelectric substrate with an adhesive applied to the peripheral portion of the protection substrate and hermetically sealed. In the surface mount type piezoelectric component, the external electrode that is electrically connected to the extraction electrode is provided on the end face of the substrate laminated body, and the external electrode is electrically connected to the wiring pattern on the circuit board. In the vicinity of the extraction electrode, the adhesive is applied to a position retracted from the peripheral portion of the protective substrate toward the center of the substrate laminate to form the extraction electrode and the external electrode. One in which accounted if ease of care connections.

【0011】[0011]

【発明の実施例】以下、本発明を実施例を示す図面に基
づいて詳細に説明する。図1(a)、(b)はそれぞれ
本発明の一実施例の構成を示す平面図及び断面図であっ
て、圧電基板としてATカット水晶素板を用いた水晶振
動子である。尚、図1(a)は接着剤の構成を明確にす
べく、保護基板を省略して図示してある。
BEST MODE FOR CARRYING OUT THE INVENTION The present invention will now be described in detail with reference to the drawings showing the embodiments. 1A and 1B are a plan view and a cross-sectional view, respectively, showing a configuration of an embodiment of the present invention, which is a crystal resonator using an AT-cut crystal element plate as a piezoelectric substrate. In FIG. 1A, the protective substrate is omitted in order to clarify the structure of the adhesive.

【0012】水晶素板19の中央部両面には励振電極
4、5を形成すると共に、該励振電極4、5より水晶素
板19の端部まで引き出し電極6、7を延設する。水晶
素板19の両面に形成した励振電極4、5とその近傍の
振動領域を一定のクリアランス8、9をもって保護する
ように、保護基板2、3の周縁部に接着剤10を塗布し
て、水晶素板19の両面に夫々保護基板2、3を固定し
て基板積層体としたものに於いて、前記水晶素板19端
部の引き出し電極6、7近傍においては接着剤10を保
護基板2、3端部より中央方向に後退した位置に塗布し
たものである。
Excitation electrodes 4 and 5 are formed on both sides of the central portion of the quartz crystal plate 19, and lead electrodes 6 and 7 are extended from the excitation electrodes 4 and 5 to the ends of the quartz crystal plate 19. Adhesive 10 is applied to the peripheral portions of the protective substrates 2 and 3 so that the excitation electrodes 4 and 5 formed on both sides of the quartz crystal plate 19 and the vibrating regions in the vicinity thereof are protected by constant clearances 8 and 9. In a substrate laminated body in which the protective substrates 2 and 3 are fixed on both sides of the quartz crystal plate 19, respectively, the adhesive 10 is applied to the protective substrate 2 in the vicinity of the extraction electrodes 6 and 7 at the end of the quartz crystal plate 19. It is applied at a position retracted from the three ends toward the center.

【0013】上述の様に基板積層体を構成することによ
り、引き出し電極6、7の露出面積を拡大せしめ、引き
出し電極6、7と下地電極11、12ひいては外部電極
13、14との電気的接続が確実且つ容易となる。
By forming the substrate laminated body as described above, the exposed areas of the extraction electrodes 6, 7 are enlarged, and the electrical connection between the extraction electrodes 6, 7 and the base electrodes 11, 12 and by extension the external electrodes 13, 14 is achieved. Is reliable and easy.

【0014】本考案は以上説明した如き構成のみなら
ず、図2に示す如く水晶素板19の引き出し電極6、7
近傍において、保護基板2、3端部の接着剤塗布側稜部
20を削除することにより、引き出し電極6、7と保護
基板2、3との空間を広くし、外部電極13、14の下
地電極11、12をスパッタリングや蒸着により形成す
るときに、斜め方向よりスパッタリング或は蒸着を行な
い、引き出し電極6、7と外部電極13、14との電気
的接続をさらに確実にすることもできる。
The present invention is not limited to the structure as described above, and as shown in FIG. 2, the extraction electrodes 6 and 7 of the quartz crystal plate 19 are provided.
By removing the adhesive application side ridges 20 at the ends of the protective substrates 2 and 3 in the vicinity, the space between the lead electrodes 6 and 7 and the protective substrates 2 and 3 is widened, and the base electrodes of the external electrodes 13 and 14 are formed. When forming 11 and 12 by sputtering or vapor deposition, it is also possible to perform sputtering or vapor deposition in an oblique direction to further ensure the electrical connection between the extraction electrodes 6 and 7 and the external electrodes 13 and 14.

【0015】更に図3に示す如く、水晶素板19周縁部
の引き出し電極6あるいは7を形成しない面については
接着剤10を水晶素板19中央側に後退させなくともよ
い。これにより、機械的強度が増し、水晶素板19端部
が破損する可能性が低くなり、製造時の取り扱いが容易
になる。
Further, as shown in FIG. 3, the adhesive 10 does not have to be retracted toward the center of the quartz crystal plate 19 on the surface of the periphery of the quartz crystal plate 19 where the extraction electrodes 6 or 7 are not formed. Thereby, the mechanical strength is increased, the possibility that the end portion of the quartz crystal plate 19 is damaged is reduced, and the handling at the time of manufacturing is facilitated.

【0016】尚、保護基板2、3は水晶素板19と同様
に水晶基板で構成することにより、温度変化に伴い水晶
素板19に発生する熱ひずみを低減し、周波数が安定し
た水晶振動子を実現できる。
The protective substrates 2 and 3 are made of a quartz substrate similar to the quartz plate 19, so that the thermal strain generated in the quartz plate 19 due to the temperature change is reduced and the frequency is stable. Can be realized.

【0017】以上本発明はATカット水晶素板を用いた
水晶振動子に適用したものを例として説明したが、本発
明はこれにのみ限定されるものではなく、カットアング
ルがATカット以外の水晶素板、あるいは水晶以外の圧
電素板を用いた水晶振動子や部分電極を二分割した構成
の二重モードフィルタの如き共振子に適用してもよい。
Although the present invention has been described above by taking as an example the one applied to a crystal resonator using an AT-cut crystal blank, the present invention is not limited to this, and the crystal having a cut angle other than AT-cut is used. It may be applied to a resonator such as a crystal oscillator using a base plate or a piezoelectric base plate other than crystal or a dual mode filter having a structure in which a partial electrode is divided into two.

【0018】[0018]

【発明の効果】本発明は、以上説明した如く構成するも
のであるから、接着剤を塗布する際のマスクパターンを
変更するのみで格別な工程を付加することなく、外部電
極と引き出し電極との電気的接続が確実且つ容易とな
り、圧電部品の低価格化に著しい効果を発揮するもので
ある。
EFFECTS OF THE INVENTION Since the present invention is configured as described above, the external electrode and the extraction electrode can be formed by only changing the mask pattern when applying the adhesive and without adding a special step. The electrical connection becomes reliable and easy, and it exerts a remarkable effect in reducing the price of the piezoelectric component.

【0019】[0019]

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)及び(b)は本発明に係わる水晶振動子
の一実施例の構成を示す平面図及び断面図
1A and 1B are a plan view and a cross-sectional view showing the configuration of an embodiment of a crystal resonator according to the present invention.

【図2】本発明に係わる水晶振動子の第2の実施例の構
成を示す断面図
FIG. 2 is a sectional view showing the configuration of a second embodiment of the crystal unit according to the present invention.

【図3】本発明に係わる水晶振動子の第3の実施例の構
成を示す断面図
FIG. 3 is a sectional view showing a configuration of a third embodiment of the crystal unit according to the invention.

【図4】(a)及び(b)は従来の圧電部品の構成を示
す斜視図及び断面図
4A and 4B are a perspective view and a sectional view showing a configuration of a conventional piezoelectric component.

【図5】保護基板に切り欠きを設けた従来の圧電部品の
構成を示す斜視図
FIG. 5 is a perspective view showing a configuration of a conventional piezoelectric component in which a protective substrate is provided with a notch.

【符号の説明】[Explanation of symbols]

1………圧電基板 2、3………保護基板 4、5………励振電極 6、7………引き出し電極 10………接着剤 11、12………下地基板 13、14………外部電極 19………水晶素板 20………保護基板接着剤塗布側稜削除部 1 ... Piezoelectric substrate 2, 3 ... Protective substrate 4, 5 ... Excitation electrode 6, 7 ... Extraction electrode 10 ... Adhesive 11, 12, ... Underlying substrate 13, 14 ... External electrode 19 --- Quartz crystal plate 20 --- Protective substrate adhesive application side ridge deletion part

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】圧電基板の両面に励振電極と該励振電極か
ら圧電基板端部まで延びる引き出し電極を形成し、前記
励振電極とその周囲の振動領域を所定のクリアランスを
もって保護すべく、保護基板をその周縁部に塗布した接
着剤を介して圧電基板両面に固定した基板積層体を構成
すると共に、該基板積層体の端面に前記引き出し電極と
導通する外部電極を設けた表面実装型圧電部品におい
て、前記接着剤を引き出し電極近傍においては保護基板
周縁部から基板積層体の中央方向へ後退せしめた位置に
塗布するよう構成したことを特徴とする表面実装型圧電
部品。
1. A protective substrate is formed on both surfaces of a piezoelectric substrate to form an excitation electrode and an extraction electrode extending from the excitation electrode to an end of the piezoelectric substrate, and to protect the excitation electrode and a vibrating region around the excitation electrode with a predetermined clearance. In a surface-mounted piezoelectric component, which constitutes a substrate laminate fixed to both surfaces of a piezoelectric substrate via an adhesive applied to its peripheral portion, and which has an external electrode electrically connected to the extraction electrode on an end face of the substrate laminate, A surface mount type piezoelectric component characterized in that the adhesive is applied to a position retracted from the peripheral edge of the protective substrate toward the center of the substrate laminate in the vicinity of the extraction electrode.
【請求項2】圧電基板と保護基板を同一の圧電材料にて
構成したことを特徴とする請求項1の表面実装型圧電部
品。
2. The surface mount type piezoelectric component according to claim 1, wherein the piezoelectric substrate and the protective substrate are made of the same piezoelectric material.
【請求項3】引き出し電極近傍において、保護基板端部
の接着剤塗布側稜部を削除したことを特徴とする請求項
1または2の表面実装型圧電部品。
3. The surface mount type piezoelectric component according to claim 1, wherein an edge of the protective substrate on which the adhesive is applied is removed in the vicinity of the lead electrode.
JP23085293A 1993-08-24 1993-08-24 Surface mount type piezoelectric components Pending JPH0766672A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23085293A JPH0766672A (en) 1993-08-24 1993-08-24 Surface mount type piezoelectric components

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23085293A JPH0766672A (en) 1993-08-24 1993-08-24 Surface mount type piezoelectric components

Publications (1)

Publication Number Publication Date
JPH0766672A true JPH0766672A (en) 1995-03-10

Family

ID=16914310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23085293A Pending JPH0766672A (en) 1993-08-24 1993-08-24 Surface mount type piezoelectric components

Country Status (1)

Country Link
JP (1) JPH0766672A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106449965A (en) * 2015-08-10 2017-02-22 比尔克特韦尔克有限公司 Film transducer and actuator strip for a film transducer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106449965A (en) * 2015-08-10 2017-02-22 比尔克特韦尔克有限公司 Film transducer and actuator strip for a film transducer
CN106449965B (en) * 2015-08-10 2020-09-11 比尔克特韦尔克有限公司 Sheet changer and actuator strip for a sheet changer

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