JPH0735579B2 - Band-shaped airlock - Google Patents
Band-shaped airlockInfo
- Publication number
- JPH0735579B2 JPH0735579B2 JP16671886A JP16671886A JPH0735579B2 JP H0735579 B2 JPH0735579 B2 JP H0735579B2 JP 16671886 A JP16671886 A JP 16671886A JP 16671886 A JP16671886 A JP 16671886A JP H0735579 B2 JPH0735579 B2 JP H0735579B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum chamber
- differential pressure
- chamber
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は帯状物のエアーロック、特に金属ストリップ等
の帯状物の表面に真空室内でイオンプレーティング等の
物理的蒸着法によって金属、セラミックスその他の薄い
被膜を連続的にコーティングするめの帯状物連続真空蒸
着処理装置の入側および出側に設けられる複数個の差圧
室を具えるエアーロックの差圧室封止構造に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to airlocks for strips, particularly metals, ceramics, etc. on the surface of strips such as metal strips by a physical vapor deposition method such as ion plating in a vacuum chamber. The present invention relates to a differential pressure chamber sealing structure for an air lock, which comprises a plurality of differential pressure chambers provided on the inlet side and the outlet side of a belt-shaped continuous vacuum deposition apparatus for continuously coating a thin film.
（従来の技術） 従来、金属ストリップ等の帯状物の片面または両面にA
l,Ti等を連続的に蒸着するための連続真空蒸着装置の入
側および出側エアーロックとして、第６図に示すような
ものが既知である。この図示の形式の連続真空蒸着処理
装置は、真空蒸着処理を行うための高真空に維持される
真空室１と、この真空室１の入口1aおよび出口1bにそれ
ぞれ通じる入側および出側エアーロック２および３とを
具え、これら両エアーロック2,3は真空室１に近い程高
真空度に調圧された複数個の差圧室によりそれぞれ構成
され、金属ストリップ等の帯状物４を入口1aから出口1b
を経て連続的に真空室１内に通過させて蒸着処理を行っ
ている際に、真空室１内を高真空に維持するための真空
封止を確保するよう構成されている。(Prior Art) Conventionally, A is applied to one or both sides of a strip-shaped material such as a metal strip.
As an inlet side and an outlet side air lock of a continuous vacuum vapor deposition apparatus for continuously vapor-depositing l, Ti, etc., those shown in FIG. 6 are known. The continuous vacuum vapor deposition processing apparatus of the type shown in the figure includes a vacuum chamber 1 that is maintained at a high vacuum for performing vacuum vapor deposition processing, and an inlet side and an outlet side air lock leading to an inlet 1a and an outlet 1b of the vacuum chamber 1, respectively. 2 and 3, both air locks 2 and 3 are composed of a plurality of differential pressure chambers whose pressure is adjusted to a high degree of vacuum as they are closer to the vacuum chamber 1, respectively, and a strip 4 such as a metal strip is provided at an inlet 1a. Exit 1b
It is configured to ensure a vacuum seal for maintaining a high vacuum in the vacuum chamber 1 when the vapor deposition process is performed by continuously passing through the vacuum chamber 1 through the above.
入側エアーロック２の入口側および出側エアーロック３
の出口側には、それぞれコイル巻戻機５および巻取機６
が設けられ、これにより、巻戻機５によってコイルから
巻戻した帯状物４を入側エアーロック２の入口開口７か
ら真空室１を経て出側エアーロック３の出口開口８に連
続的に通し、真空室１内で蒸発ポットのような蒸発源９
から蒸発した金属蒸気を帯状物表面に蒸着させ、出側エ
アーロック３の出口開口８から出た帯状物４を巻取機６
によってコイル状に巻き取るよう構成されている。Inlet side airlock 2 and outlet side airlock 3
The coil rewinder 5 and the winder 6 are respectively provided on the outlet side of the
By this, the strip 4 unwound from the coil by the rewinding machine 5 is continuously passed from the inlet opening 7 of the inlet airlock 2 through the vacuum chamber 1 to the outlet opening 8 of the outlet airlock 3. , An evaporation source 9 such as an evaporation pot in the vacuum chamber 1.
The metal vapor evaporated from the vapor is vapor-deposited on the surface of the strip-shaped material, and the strip-shaped material 4 coming out of the outlet opening 8 of the outlet side air lock 3 is taken up by the winder 6.
Is configured to be wound into a coil.
入側エアーロック２の複数個の差圧室2a,2b,2c,2dの内
部圧力は、真空室１内の真空度を所定値に維持するよう
に、大気圧に近い入側端の差圧室2aから順次の差圧室2
b,2c,2dの内部の真空度を高め、他方、出側エアーロッ
ク３の複数個の差圧室3a,3b,3c,3dの内部圧力は真空室
１内の所定の真空度から順次出側端に向けて低めていっ
て出側端の差圧室3aでは大気圧近くになるよう各差圧室
に接続された真空排気ダクト（図示せず）を経てそれぞ
れ排気されて調圧されている。The internal pressures of the plurality of differential pressure chambers 2a, 2b, 2c, 2d of the inlet side air lock 2 are set so as to maintain the degree of vacuum in the vacuum chamber 1 at a predetermined value. Differential pressure chamber 2 from chamber 2a
The degree of vacuum inside b, 2c, 2d is increased, while the internal pressures of the plurality of differential pressure chambers 3a, 3b, 3c, 3d of the outlet side air lock 3 are sequentially output from a predetermined degree of vacuum in the vacuum chamber 1. In the differential pressure chamber 3a at the outlet end, the pressure is reduced toward the side end and is evacuated and regulated via a vacuum exhaust duct (not shown) connected to each differential pressure chamber so that the pressure is close to atmospheric pressure. There is.
（発明が解決しようとする問題点） 上述したように帯状物を連続的に処理する場合には、大
気‐高真空‐大気（air-to-air）となるために、大気と
真空室との間の真空シールをどのようにするかが問題と
なっている。即ち、シール性が悪いと大気中のO2，CO2
および微細な浮遊物が真空室内に侵入して、蒸着被膜に
悪影響を与えるばかりでなく、真空ポンプによる真空
室、差圧室での排気量が増え、ランニングコストがかさ
むという問題がある。(Problems to be Solved by the Invention) When the strips are continuously treated as described above, since the atmosphere-high vacuum-air (air-to-air), the atmosphere and the vacuum chamber are separated from each other. The problem is how to make the vacuum seal between them. That is, if the sealing property is poor, the atmospheric O 2 , CO 2
In addition to the fact that fine suspended matter penetrates into the vacuum chamber and adversely affects the vapor-deposited coating, the exhaust amount in the vacuum chamber and the differential pressure chamber by the vacuum pump increases, which causes a problem of increasing running cost.
本発明は、上述した問題を解決しようとするものであ
る。The present invention seeks to solve the above problems.
（問題点を解決するための手段） 本発明によれば、第１図に示すように、真空室に近い程
高真空度に調圧された複数個の差圧室2a,2b2c……を具
え、高真空に排気される真空室内の高真空を維持しなが
ら真空処理すべき帯状物４を入側大気雰囲気中から真空
室に導入するとともに出側大気雰囲気中に真空室から導
出し得るよう真空室の入側および出側にそれぞれ設けら
れる帯状物のエアーロックにおいて、前記差圧室2a,2b,
2c……の入側に上下シールロール11,12が帯状物４をは
さんで入側を閉塞するようにそれぞれ設けられ、少なく
とも１組のシールロール11,12の両端部の帯状物非通過
部に上下一対のサイドシールロール18,19が互に接触し
た状態に保持さて設けられていることを特徴とする。(Means for Solving Problems) According to the present invention, as shown in FIG. 1, a plurality of differential pressure chambers 2a, 2b2c .. A vacuum so that the belt-like material 4 to be vacuum-processed can be introduced into the vacuum chamber from the inlet side atmospheric atmosphere while the high vacuum in the vacuum chamber evacuated to a high vacuum is maintained, and can be led out from the vacuum chamber into the outlet side atmospheric atmosphere. In the air lock of the belt-shaped material provided on the inlet side and the outlet side of the chamber, the differential pressure chambers 2a, 2b,
Upper and lower sealing rolls 11 and 12 are provided on the entrance side of 2c ... so as to close the entrance side by sandwiching the strip 4, and at least one pair of seal rolls 11 and 12 at both ends thereof does not pass through the strip. In addition, a pair of upper and lower side seal rolls 18 and 19 are provided so as to be held in contact with each other.
（作用） 上述の構成になる本発明による帯状物のエアーロックに
よれば、差圧室2a,2b,2c……より真空度の低い入側また
は出側を上下シールロール11,12およびサイドシールロ
ール18,19によって実質的に閉塞して帯状物を通すこと
ができる。したがって、大気中のO2，CO2および微細な
浮遊物の侵入によって生じる蒸着被膜に対する悪影響を
なくし、また、真空室および差圧室の排気に要するラン
ニングコストを低減することができる。(Operation) According to the air lock of the belt-like material of the present invention having the above-mentioned structure, the upper and lower sealing rolls 11 and 12 and the side seals are provided on the inlet side or the outlet side having a lower vacuum degree than the differential pressure chambers 2a, 2b, 2c. The rolls 18 and 19 allow the strip to pass through substantially closed. Therefore, it is possible to eliminate the adverse effect on the vapor deposition film caused by the invasion of O 2 , CO 2 and fine floating substances in the atmosphere, and to reduce the running cost required for exhausting the vacuum chamber and the differential pressure chamber.
（実施例） 第１〜４図は、上述した帯状物連続真空蒸着処理装置の
入側エアーロック２に本発明を実施した例を示す。(Embodiment) FIGS. 1 to 4 show an embodiment in which the present invention is applied to the inlet side air lock 2 of the above-described continuous strip-like vacuum vapor deposition processing apparatus.
図示の例では、真空排気ダクト10を経て排気されて入側
エアーロック２の入口端から真空室に向けて順次真空度
が高められた複数個の差圧室2a,2b,2cの入側に上下一対
のシールロール11,12が帯状物４をはさむようにしてエ
アーロック２の頂壁13、底壁14および側壁15で囲まれた
空間を実質的に閉塞して封止するようそれぞれ設けられ
ている。各シールロール11,12のネック部11a,12aは側壁
15に回転シール16を介して貫通されて軸受17,18にそれ
ぞれ回転自在に支承されており、シールロール11,12は
駆動してもよいし、非駆動でもよいが、回転駆動させた
方が、帯状物との間ですり疵が発生せず好ましい。In the illustrated example, the plurality of differential pressure chambers 2a, 2b, 2c, which have been exhausted through the vacuum exhaust duct 10 and whose degree of vacuum has been gradually increased from the inlet end of the inlet air lock 2 toward the vacuum chamber, are introduced into the inlet side. A pair of upper and lower sealing rolls 11 and 12 are provided so as to sandwich the strip 4 and substantially close and seal the space surrounded by the top wall 13, the bottom wall 14 and the side wall 15 of the airlock 2. There is. The neck portions 11a and 12a of the seal rolls 11 and 12 are side walls.
The roller 15 is rotatably supported by the bearings 17 and 18 through the rotary seal 16 and the seal rolls 11 and 12, respectively. It is preferable that scratches do not occur between the strip and the strip.
第２および第４図に示すように、上下一対のサイドシー
ルロール19,20が入口端に位置する上下一対のシールロ
ール11,12の入側両サイドに最大幅の帯状物をも干渉し
ない位置で設けられており、これらの上下サイドシール
ロール19,20は互に接触した状態で好ましくは半割型の
軸受21に回転自在に支承され、軸受21は頂壁13にピン22
によって枢着されたレバー23の下端に取付けられ、レバ
ー23の上端にシリンダー装置24のピストンロッド25が連
結され、シリンダー装置24を作動して図示のシール位置
とする際、上下シールロール11,12間の帯状物４の両側
に生じる空隙26をサイドシールロール19,20が塞いでシ
ール性を高めるよう構成されている。As shown in FIGS. 2 and 4, the pair of upper and lower side seal rolls 19 and 20 is located at the inlet end, and the pair of upper and lower seal rolls 11 and 12 do not interfere with the entrance side of the pair of upper and lower seal rolls. The upper and lower side seal rolls 19 and 20 are rotatably supported in a state in which they are in contact with each other on a bearing 21 which is preferably a half-split type.
It is attached to the lower end of the lever 23 pivotally attached by the piston rod 25 of the cylinder device 24 is connected to the upper end of the lever 23, and when the cylinder device 24 is actuated to the sealing position shown in the drawing, the upper and lower seal rolls 11, 12 The side seal rolls 19 and 20 close the gaps 26 formed on both sides of the strip 4 between them to enhance the sealing performance.
図示の例ではサイドシールロール19,20をエアーロック
入口端の差圧室2aの入側に設けられた上下シールロール
11,12の入側にだけしか設けていないが、全てのシール
ロール11,12の入側に設けてもよいし、例えば第５図に
示すようにシールロール11,12の入側および出側に設け
ることもできる。In the illustrated example, the side seal rolls 19 and 20 are upper and lower seal rolls provided on the inlet side of the differential pressure chamber 2a at the air lock inlet end.
Although it is provided only on the inlet side of 11,12, it may be provided on the inlet side of all the seal rolls 11 and 12, for example, as shown in FIG. Can also be provided.
（発明の効果） 本発明によれば、エアーロックの各差圧室より真空度の
低い入側または出側を実質的に閉塞して帯状物を通すこ
とができ、したがって、大気中のO2，CO2および微細な
浮遊物の侵入によって生じる蒸着被膜に対する悪影響を
なくし、また、真空室および差圧室の排気に要するラン
ニングコストを低減することができる。(Effects of the Invention) According to the present invention, it is possible to substantially close the inlet side or the outlet side having a lower degree of vacuum than the differential pressure chambers of the air lock to allow the belt-like material to pass therethrough, and therefore the O 2 in the atmosphere , CO 2 and fine floating substances can be prevented from adversely affecting the deposited film, and the running cost required for exhausting the vacuum chamber and the differential pressure chamber can be reduced.
第１図は本発明によるエアーロックの長さ方向の部分縦
断面図、 第２図は第１図に示すエアーロックの一部を長さ方向に
対し直角な断面で示す断面図、 第３図は第２図のIII−III線上の断面図、 第４図は第２図のIV−IV線上の断面図、 第５図は本発明の他の実施例を示す略線図、 第６図が従来の帯状物連続真空蒸着装置の概略線図であ
る。 １…真空室、２…入側エアーロック 2a,2b,2c…差圧室、３…出側エアーロック 3a,3b,3c…差圧室、４…帯状物 10…真空排気ダクト、11…上シールロール 12…下シールロール、13…上壁 14…下壁、15…側壁 16,17…軸受 18,19…サイドシールロール1 is a partial longitudinal cross-sectional view of an airlock according to the present invention in the lengthwise direction, FIG. 2 is a cross-sectional view showing a part of the airlock shown in FIG. 1 in a cross section perpendicular to the lengthwise direction, and FIG. 2 is a sectional view taken along the line III-III in FIG. 2, FIG. 4 is a sectional view taken along the line IV-IV in FIG. 2, FIG. 5 is a schematic diagram showing another embodiment of the present invention, and FIG. It is a schematic diagram of the conventional strip continuous vacuum evaporation system. 1 ... Vacuum chamber, 2 ... Air lock 2a, 2b, 2c ... Differential pressure chamber, 3 ... Air lock 3a, 3b, 3c ... Differential pressure chamber, 4 ... Belt 10 ... Vacuum exhaust duct, 11 ... Above Seal roll 12 ... Lower seal roll, 13 ... Upper wall 14 ... Lower wall, 15 ... Side wall 16,17 ... Bearing 18,19 ... Side seal roll
Claims (1)
の差圧室を具え、高真空に排気される真空室内の高真空
を維持しながら真空処理すべき帯状物を入側大気雰囲気
中から真空室に導入するとともに出側大気雰囲気中に真
空室から導出し得るよう真空室の入側および出側にそれ
ぞれ設けられる帯状物のエアーロックにおいて、前記差
圧室の入側または出側に上下シールロールが帯状物をは
さんで入側または出側を閉塞するようにそれぞれ設けら
れ、少なくとも１組の上下シールロールの両端部の帯状
物非通過部に上下一対のサイドシールロールが互に接触
した状態に保持されて設けられていることを特徴とする
帯状物のエアーロック。1. A plurality of differential pressure chambers, the pressure of which is adjusted to a higher degree of vacuum as the vacuum chamber is closer to the vacuum chamber, and a strip-shaped material to be vacuum-processed is introduced while maintaining a high vacuum in the vacuum chamber exhausted to a high vacuum. In the air lock of the strip-shaped member provided on the inlet side and the outlet side of the vacuum chamber so that the air can be introduced into the vacuum chamber from the atmosphere and can be led out from the vacuum chamber into the atmosphere, the inlet side of the differential pressure chamber or Upper and lower seal rolls are provided on the outlet side so as to close the inlet side or the outlet side by sandwiching the strips, and a pair of upper and lower side seal rolls are provided on both ends of at least one pair of the upper and lower seal rolls. An air lock for a band-shaped object, wherein the air locks are provided so that they are in contact with each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16671886A JPH0735579B2 (en) | 1986-07-17 | 1986-07-17 | Band-shaped airlock |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16671886A JPH0735579B2 (en) | 1986-07-17 | 1986-07-17 | Band-shaped airlock |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6324066A JPS6324066A (en) | 1988-02-01 |
| JPH0735579B2 true JPH0735579B2 (en) | 1995-04-19 |
Family
ID=15836468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16671886A Expired - Lifetime JPH0735579B2 (en) | 1986-07-17 | 1986-07-17 | Band-shaped airlock |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0735579B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6008722A (en) * | 1994-08-02 | 1999-12-28 | Mazda Motor Corporation | Anti-vehicle-thief apparatus and code setting method of the apparatus |
| JP3441177B2 (en) | 1994-08-02 | 2003-08-25 | マツダ株式会社 | Vehicle anti-theft device |
| JP3073904B2 (en) * | 1995-02-17 | 2000-08-07 | 本田技研工業株式会社 | Vehicle data processing device |
| JP3191607B2 (en) * | 1995-03-28 | 2001-07-23 | トヨタ自動車株式会社 | Vehicle anti-theft device |
| JP3344185B2 (en) * | 1995-09-28 | 2002-11-11 | トヨタ自動車株式会社 | Code identification device |
-
1986
- 1986-07-17 JP JP16671886A patent/JPH0735579B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6324066A (en) | 1988-02-01 |
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