JPH07302410A - Combined thin-film magnetic head - Google Patents
Combined thin-film magnetic headInfo
- Publication number
- JPH07302410A JPH07302410A JP9603794A JP9603794A JPH07302410A JP H07302410 A JPH07302410 A JP H07302410A JP 9603794 A JP9603794 A JP 9603794A JP 9603794 A JP9603794 A JP 9603794A JP H07302410 A JPH07302410 A JP H07302410A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- magnetic head
- thin film
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3945—Heads comprising more than one sensitive element
- G11B5/3948—Heads comprising more than one sensitive element the sensitive elements being active read-out elements
Landscapes
- Magnetic Heads (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば、アナログオー
ディオ，デジタルオーディオ，及びコンピュータのデー
タレコーダー等に搭載される、複数の磁気ヘッドからな
る複合型薄膜磁気ヘッドに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite type thin film magnetic head having a plurality of magnetic heads, which is mounted on, for example, analog audio, digital audio, and computer data recorders.
【０００２】[0002]
【従来の技術】例えば、アナログオーディオ，デジタル
オーディオ，及びコンピュータのデータレコーダー等の
記録再生装置を製造する際には、その特性上、記録・再
生及び消去を行うための磁気ヘッドを個別に製造した
後、各磁気ヘッドを装置にそれぞれ搭載するのが一般的
とされている。2. Description of the Related Art For example, when manufacturing recording / reproducing devices such as analog audio, digital audio, and computer data recorders, magnetic heads for recording / reproducing and erasing are manufactured individually due to their characteristics. After that, it is common to mount each magnetic head on the apparatus.
【０００３】しかし、このように、各磁気ヘッドをそれ
ぞれ搭載した記録再生装置では、磁気ヘッド数の増加に
したがって、磁気ヘッドの取り付け，調整のための製造
工程が増加してしまう。さらには、このような記録再生
装置は、大きなスペースが必要となり、近年重視されて
いる小型化，低コスト化を考えた場合、非常に不利であ
る。However, as described above, in a recording / reproducing apparatus equipped with each magnetic head, the number of manufacturing steps for attaching and adjusting the magnetic heads increases as the number of magnetic heads increases. Further, such a recording / reproducing apparatus requires a large space, which is extremely disadvantageous in consideration of downsizing and cost reduction, which have been emphasized in recent years.
【０００４】そこで、個別に作製した記録用薄膜磁気ヘ
ッド，再生用薄膜磁気ヘッド，及び消去用薄膜磁気ヘッ
ド等を接合し、１つの複合型薄膜磁気ヘッドとしたもの
を使用する方法が開発され、アナログオーディオ，コン
ピュータのデータレコーダー等において既に採用されて
いる。Therefore, a method has been developed in which a thin film magnetic head for recording, a thin film magnetic head for reproduction, a thin film magnetic head for erasing, etc., which are individually manufactured, are joined together to form a single composite thin film magnetic head. It has already been adopted in analog audio and computer data recorders.
【０００５】この複合型薄膜磁気ヘッドを製造するに際
しては、良好な当たり特性を確保するために、各磁気ヘ
ッド間に位置ずれが生じないように接合することが望ま
れる。特に、デプスが小さい磁気ヘッド（例えば、デプ
スが５μｍ程度の高容量データレコーダー用磁気ヘッ
ド）の場合は、各磁気ヘッド同士を接合する際に、サブ
ミクロンオーダーで位置を制御することが要求される。When manufacturing this composite type thin film magnetic head, it is desired that the magnetic heads be joined so as not to be displaced in order to ensure good hitting characteristics. In particular, in the case of a magnetic head having a small depth (for example, a magnetic head for a high-capacity data recorder having a depth of about 5 μm), it is required to control the position on the submicron order when joining the magnetic heads. .
【０００６】そのために、複合型薄膜磁気ヘッドを製造
する際に、各磁気ヘッドの記録媒体摺動面と対向配置さ
れた顕微鏡の焦点深度により、各磁気ヘッドの位置を確
認しながら接合する方法が検討されている。Therefore, when manufacturing a composite type thin film magnetic head, a method of bonding while confirming the position of each magnetic head by the depth of focus of a microscope arranged facing the recording medium sliding surface of each magnetic head is known. Is being considered.
【０００７】[0007]
【発明が解決しようとする課題】しかし、上記のよう
に、各磁気ヘッドを接合して複合型薄膜磁気ヘッドとす
る場合は、各磁気ヘッドの位置を調整して接合する工程
が必要である。さらには、各磁気ヘッドの媒体摺動面を
揃えるために、各磁気ヘッドの媒体摺動面を研磨する工
程が必要となる。However, as described above, when the magnetic heads are joined to form a composite type thin film magnetic head, a step of adjusting the positions of the magnetic heads and joining them is necessary. Further, a step of polishing the medium sliding surface of each magnetic head is required in order to make the medium sliding surface of each magnetic head uniform.
【０００８】また、上述のように顕微鏡で各磁気ヘッド
の記録媒体摺動面を観察しても、精度は±３μｍ程度が
限界であり、各磁気ヘッド間の位置ずれを高精度に調整
するには限界がある。Further, even when the recording medium sliding surface of each magnetic head is observed with a microscope as described above, the accuracy is limited to about ± 3 μm, and the positional deviation between the magnetic heads can be adjusted with high accuracy. Has a limit.
【０００９】そこで本発明は、このような従来の実情に
鑑みて提案されたものであり、各磁気ヘッドの位置を調
整して接合する工程が不要で、各磁気ヘッド間の位置を
高精度に調整することが可能な複合型薄膜磁気ヘッドを
提供することを目的とする。Therefore, the present invention has been proposed in view of such a conventional situation, and the step of adjusting the positions of the magnetic heads and joining them is unnecessary, and the positions between the magnetic heads can be accurately positioned. An object is to provide a composite type thin film magnetic head that can be adjusted.
【００１０】[0010]
【課題を解決するための手段】上述の目的を達成するた
めに本発明の複合型薄膜磁気ヘッドは、同一基板上に薄
膜工程により３以上の薄膜磁気ヘッドが重なり合うよう
に形成されてなるものである。In order to achieve the above-mentioned object, the composite type thin film magnetic head of the present invention is formed by superposing three or more thin film magnetic heads on the same substrate by a thin film process. is there.
【００１１】上記複合型薄膜磁気ヘッドは、薄膜磁気ヘ
ッドを構成する各磁気コアのうち、最上層の磁気コアと
最下層の磁気コアの少なくとも一方が、磁性基板よりな
るものであってもよい。なお、最上層の磁気コアを磁性
基板で構成する場合は、複合型薄膜磁気ヘッドを構成す
る各薄膜磁気ヘッドのうち、最後に形成される薄膜磁気
ヘッドの上層側の磁気コアを、磁性基板を積層すること
により形成する。また、最下層の磁気コアを磁性基板で
構成する場合は、複合型薄膜磁気ヘッドを構成する各薄
膜磁気ヘッドを磁性基板上に形成し、最初に形成される
薄膜磁気ヘッドの下層側の磁気コアが、前記磁性基板と
なるようにする。In the composite thin film magnetic head, at least one of the uppermost magnetic core and the lowermost magnetic core of the magnetic cores constituting the thin film magnetic head may be formed of a magnetic substrate. When the uppermost magnetic core is composed of a magnetic substrate, of the thin film magnetic heads forming the composite thin film magnetic head, the magnetic core on the upper layer side of the thin film magnetic head formed last is the magnetic substrate. It is formed by stacking. When the bottom magnetic core is composed of a magnetic substrate, each thin film magnetic head constituting the composite type thin film magnetic head is formed on the magnetic substrate, and the magnetic core on the lower layer side of the thin film magnetic head formed first is formed. , So that it serves as the magnetic substrate.
【００１２】また、重ね合わせる薄膜磁気ヘッドの種類
としては、薄膜工程により製造できるものであれば特に
限定されるものではなく、例えば、再生用薄膜磁気ヘッ
ド，記録用薄膜磁気ヘッド，消去用薄膜磁気ヘッド等が
挙げられる。また、これらの薄膜磁気ヘッドの組み合わ
せは、薄膜磁気ヘッド数の合計が３以上であれば特に限
定されるものではなく、任意の組み合わせとすることが
できる。The type of thin film magnetic head to be superposed is not particularly limited as long as it can be manufactured by a thin film process. For example, a reproducing thin film magnetic head, a recording thin film magnetic head, an erasing thin film magnetic head. A head etc. are mentioned. Further, the combination of these thin film magnetic heads is not particularly limited as long as the total number of thin film magnetic heads is 3 or more, and any combination can be used.
【００１３】[0013]
【作用】同一基板上に薄膜工程により３以上の薄膜磁気
ヘッドが重なり合うように形成された複合型薄膜磁気ヘ
ッドでは、各磁気ヘッドが一体化して形成されるため、
各磁気ヘッドを接合する工程が不要である。In the composite type thin film magnetic head in which three or more thin film magnetic heads are formed on the same substrate by the thin film process so as to overlap each other, the respective magnetic heads are integrally formed.
The step of joining the magnetic heads is unnecessary.
【００１４】さらに、各薄膜磁気ヘッドが薄膜工程によ
って重なり合うように形成されるため、それらの位置合
わせの精度は、アライメント装置の精度（現状では０．
２５μｍ程度）となる。Further, since the thin film magnetic heads are formed so as to overlap each other in the thin film process, the alignment accuracy of them is as high as that of the alignment apparatus (currently, 0.
25 μm).
【００１５】また、薄膜磁気ヘッドを構成する各磁気コ
アのうち、最上層の磁気コアを磁性基板とした場合は、
最上層の磁気コアの上に基板や保護膜等を配する工程が
不要となり、工程を削減できる。また、薄膜磁気ヘッド
を構成する各磁気コアのうち、最下層の磁気コアを磁性
基板とした場合は、基板上に最下層の磁気コアを形成す
る工程が不要となり、工程を削減できる。そして、薄膜
磁気ヘッドを構成する各磁気コアのうち、最上層及び最
下層の磁気コアを磁性基板とした場合は、最上層の磁気
コアの上に基板や保護膜等を配する工程が不要になると
ともに、基板上に最下層の磁気コアを形成する工程が不
要となり、さらに工程を削減できる。Of the magnetic cores constituting the thin film magnetic head, when the uppermost magnetic core is a magnetic substrate,
The step of disposing the substrate, the protective film, and the like on the uppermost magnetic core is unnecessary, and the number of steps can be reduced. Further, when the lowermost magnetic core of the magnetic cores constituting the thin-film magnetic head is the magnetic substrate, the step of forming the lowermost magnetic core on the substrate becomes unnecessary and the number of steps can be reduced. When the uppermost and lowermost magnetic cores of the respective magnetic cores forming the thin-film magnetic head are magnetic substrates, the step of disposing a substrate, a protective film, or the like on the uppermost magnetic core becomes unnecessary. In addition, the step of forming the lowermost magnetic core on the substrate becomes unnecessary, and the number of steps can be further reduced.
【００１６】[0016]
【実施例】本発明を適用した具体的な実施例について、
図面を参照しながら説明する。EXAMPLES Specific examples to which the present invention is applied,
A description will be given with reference to the drawings.
【００１７】実施例１ 本実施例の複合型薄膜磁気ヘッドは、図１に示すよう
に、非磁性体からなる基板１上に、再生用薄膜磁気ヘッ
ド２，記録用薄膜磁気ヘッド３，再生用薄膜磁気ヘッド
４が重なり合うように形成されてなる。 Embodiment 1 As shown in FIG. 1, the composite thin film magnetic head of this embodiment has a reproducing thin film magnetic head 2, a recording thin film magnetic head 3, and a reproducing thin film magnetic head 3 on a substrate 1 made of a non-magnetic material. The thin film magnetic heads 4 are formed so as to overlap each other.
【００１８】上記再生用薄膜磁気ヘッド２は、磁界によ
って抵抗率が変化する磁気抵抗効果膜の抵抗変化を再生
出力電圧として検出する磁気抵抗効果型薄膜磁気ヘッド
であり、薄膜工程によって、基板１上に形成される。そ
して、この再生用薄膜磁気ヘッド２は、主に、センス電
流を供給するための電極（図示せず）が取り付けられた
磁気抵抗効果膜２ａと、前記磁気抵抗効果膜２ａを挟み
込む絶縁膜２ｂと、前記絶縁膜２ｂを介して磁気抵抗効
果膜２ａを挟み込む一対の磁気コア２ｃと、前記磁気抵
抗効果膜２ａにバイアス磁界を印加するバイアス導体
（図示せず）とからなる。The reproducing thin-film magnetic head 2 is a magneto-resistive thin-film magnetic head that detects a resistance change of the magneto-resistive film whose resistivity changes according to a magnetic field as a reproducing output voltage. Is formed. The reproducing thin film magnetic head 2 mainly includes a magnetoresistive effect film 2a to which an electrode (not shown) for supplying a sense current is attached, and an insulating film 2b sandwiching the magnetoresistive effect film 2a. , A pair of magnetic cores 2c sandwiching the magnetoresistive effect film 2a via the insulating film 2b, and a bias conductor (not shown) for applying a bias magnetic field to the magnetoresistive effect film 2a.
【００１９】また、上記記録用薄膜磁気ヘッド３は、誘
導型薄膜磁気ヘッドであり、上記再生用薄膜磁気ヘッド
２上に、薄膜工程によって、非磁性膜５を介して形成さ
れる。そして、この記録用薄膜磁気ヘッド３は、主に、
薄膜コイル３ａと、前記薄膜コイル３ａの絶縁のために
薄膜コイル３ａのコイル間及びその上下に形成される絶
縁膜３ｂと、前記絶縁膜３ｂを介して薄膜コイル３ａを
挟み込み、磁気ギャップｇを介して閉磁路を構成する一
対の磁気コア３ｃとからなる。The recording thin-film magnetic head 3 is an inductive thin-film magnetic head, and is formed on the reproducing thin-film magnetic head 2 through a non-magnetic film 5 by a thin film process. The recording thin-film magnetic head 3 is mainly composed of
The thin-film coil 3a, the insulating film 3b formed between the coils of the thin-film coil 3a for insulating the thin-film coil 3a, and above and below the thin-film coil 3a, and the thin-film coil 3a sandwiched by the insulating film 3b and the magnetic gap g. And a pair of magnetic cores 3c forming a closed magnetic circuit.
【００２０】また、上記再生用薄膜磁気ヘッド４は、前
述の再生用薄膜磁気ヘッド２と同様の磁気抵抗効果型薄
膜磁気ヘッドであり、上記記録用薄膜磁気ヘッド３上
に、薄膜工程によって、非磁性膜５を介して形成され
る。The reproducing thin-film magnetic head 4 is a magnetoresistive thin-film magnetic head similar to the reproducing thin-film magnetic head 2 described above. It is formed via the magnetic film 5.
【００２１】そして、必要に応じて、上記再生用薄膜磁
気ヘッド４上や、記録媒体摺動面を除く周囲に、非磁性
体からなる保護層６を形成する。Then, if necessary, a protective layer 6 made of a non-magnetic material is formed on the reproducing thin-film magnetic head 4 and around the recording medium sliding surface.
【００２２】なお、上記各薄膜磁気ヘッドの記録媒体摺
動面、すなわち再生用薄膜磁気ヘッドの磁気抵抗効果膜
の端面及び記録用薄膜磁気ヘッドの磁気ギャップ形成面
は、同一面となるように形成される。The recording medium sliding surface of each thin film magnetic head, that is, the end surface of the magnetoresistive film of the reproducing thin film magnetic head and the magnetic gap forming surface of the recording thin film magnetic head are formed to be the same surface. To be done.
【００２３】また、各薄膜磁気ヘッドのトラック幅は、
図２に示すように、各再生用薄膜磁気ヘッド２，４のト
ラック幅が同一となるように、かつ記録用薄膜磁気ヘッ
ド３のトラック幅が各再生用薄膜磁気ヘッド２，４のト
ラック幅よりも狭くなるように形成する。The track width of each thin film magnetic head is
As shown in FIG. 2, the track widths of the reproducing thin film magnetic heads 2 and 4 are the same, and the track width of the recording thin film magnetic head 3 is smaller than that of the reproducing thin film magnetic heads 2 and 4. Is also formed to be narrow.
【００２４】上記複合型薄膜磁気ヘッドでは、各薄膜磁
気ヘッドが薄膜工程によって積層され形成されるため、
それらの位置合わせの精度は、薄膜工程におけるアライ
メント装置の精度（現状では０．２５μｍ程度）とな
る。したがって、各薄膜磁気ヘッドの記録媒体摺動面の
位置のずれは、約０．２５μｍ以下に抑えられる。In the above composite type thin film magnetic head, each thin film magnetic head is formed by laminating in the thin film process.
The accuracy of these alignments is the accuracy of the alignment apparatus in the thin film process (currently about 0.25 μm). Therefore, the displacement of the recording medium sliding surface of each thin film magnetic head can be suppressed to about 0.25 μm or less.
【００２５】実施例２ 本実施例の複合型薄膜磁気ヘッドは、図３に示すよう
に、磁性体からなる基板１１上に、再生用薄膜磁気ヘッ
ド１２，記録用薄膜磁気ヘッド１３，再生用薄膜磁気ヘ
ッド１４が重なり合うように形成されてなる。 Embodiment 2 As shown in FIG. 3, the composite thin film magnetic head of this embodiment has a reproducing thin film magnetic head 12, a recording thin film magnetic head 13, and a reproducing thin film on a substrate 11 made of a magnetic material. The magnetic heads 14 are formed so as to overlap each other.
【００２６】上記再生用薄膜磁気ヘッド１２は、磁気抵
抗効果型薄膜磁気ヘッドであり、基板１１上に、薄膜工
程によって形成される。そして、この再生用薄膜磁気ヘ
ッド１２は、主に、センス電流を供給するための電極
（図示せず）が取り付けられた磁気抵抗効果膜１２ａ
と、前記磁気抵抗効果膜１２ａを挟み込む絶縁膜１２ｂ
と、前記絶縁膜１２ｂの下に位置し下層側磁気コアとな
る前記基板１１と、前記絶縁膜１２ｂの上に位置する上
層側磁気コア１２ｃと、前記磁気抵抗効果膜１２ａにバ
イアス磁界を印加するバイアス導体（図示せず）とから
なる。The reproducing thin film magnetic head 12 is a magnetoresistive thin film magnetic head, and is formed on the substrate 11 by a thin film process. The reproducing thin film magnetic head 12 mainly has a magnetoresistive effect film 12a to which an electrode (not shown) for supplying a sense current is attached.
And an insulating film 12b sandwiching the magnetoresistive film 12a.
A bias magnetic field is applied to the substrate 11 located below the insulating film 12b and serving as a lower magnetic core, the upper magnetic core 12c located above the insulating film 12b, and the magnetoresistive film 12a. And a bias conductor (not shown).
【００２７】また、上記記録用薄膜磁気ヘッド１３は、
誘導型薄膜磁気ヘッドであり、上記再生用薄膜磁気ヘッ
ド１２上に、薄膜工程によって、非磁性膜１５を介して
形成される。そして、この記録用薄膜磁気ヘッド１３
は、主に、薄膜コイル１３ａと、前記薄膜コイル１３ａ
の絶縁のために薄膜コイル１３ａのコイル間及びその上
下に形成される絶縁膜１３ｂと、前記絶縁膜１３ｂを介
して薄膜コイル１３ａを挟み込み、磁気ギャップｇを介
して閉磁路を構成する一対の磁気コア１３ｃとからな
る。Further, the recording thin film magnetic head 13 is
It is an inductive thin film magnetic head, and is formed on the reproducing thin film magnetic head 12 through a non-magnetic film 15 by a thin film process. Then, this recording thin-film magnetic head 13
Mainly includes the thin film coil 13a and the thin film coil 13a.
For insulating the thin film coil 13a between the coils of the thin film coil 13a and above and below the coil, and the thin film coil 13a is sandwiched by the insulating film 13b, and a pair of magnetic layers forming a closed magnetic circuit is formed by the magnetic gap g. It is composed of a core 13c.
【００２８】また、上記再生用薄膜磁気ヘッド１４は、
磁気抵抗効果型薄膜磁気ヘッドであり、上記記録用薄膜
磁気ヘッド１３上に、薄膜工程によって、非磁性膜１５
を介して形成される。そして、この再生用薄膜磁気ヘッ
ド１４は、主に、センス電流を供給するための電極（図
示せず）が取り付けられた磁気抵抗効果膜１４ａと、前
記磁気抵抗効果膜１４ａを挟み込む絶縁膜１４ｂと、前
記絶縁膜１４ｂの下に位置する下層側磁気コア１４ｃ
と、前記絶縁膜１４ｂの上に位置し上層側磁気コアとな
る磁性体よりなる基板１６と、前記磁気抵抗効果膜１２
ａにバイアス磁界を印加するバイアス導体（図示せず）
とからなる。Further, the reproducing thin film magnetic head 14 is
It is a magnetoresistive thin film magnetic head, and a non-magnetic film 15 is formed on the recording thin film magnetic head 13 by a thin film process.
Is formed through. The reproducing thin-film magnetic head 14 mainly includes a magnetoresistive film 14a to which electrodes (not shown) for supplying a sense current are attached, and an insulating film 14b sandwiching the magnetoresistive film 14a. , The lower magnetic core 14c located under the insulating film 14b
A substrate 16 made of a magnetic material, which is located on the insulating film 14b and serves as an upper magnetic core, and the magnetoresistive film 12.
Bias conductor (not shown) for applying a bias magnetic field to a
Consists of.
【００２９】なお、上記各薄膜磁気ヘッドの記録媒体摺
動面、すなわち再生用薄膜磁気ヘッドの磁気抵抗効果膜
の端面及び記録用薄膜磁気ヘッドの磁気ギャップ形成面
は、同一面となるように形成される。The recording medium sliding surface of each thin film magnetic head, that is, the end surface of the magnetoresistive film of the reproducing thin film magnetic head and the magnetic gap forming surface of the recording thin film magnetic head are formed to be the same surface. To be done.
【００３０】また、各薄膜磁気ヘッドのトラック幅は、
図４に示すように、各再生用薄膜磁気ヘッド１２，１４
のトラック幅が同一となるように、かつ記録用薄膜磁気
ヘッド１３のトラック幅が各再生用薄膜磁気ヘッド１
２，１４のトラック幅よりも狭くなるように形成する。The track width of each thin film magnetic head is
As shown in FIG. 4, each reproducing thin-film magnetic head 12, 14
So that the track widths of the recording thin film magnetic heads 13 are the same and the track widths of the recording thin film magnetic heads 13 are the same for each reproducing thin film magnetic head 1.
It is formed so as to be narrower than the track widths of 2 and 14.
【００３１】上記複合型薄膜磁気ヘッドでは、各薄膜磁
気ヘッドが薄膜工程によって積層され形成されるため、
それらの位置合わせの精度は、薄膜工程におけるアライ
メント装置の精度（現状では０．２５μｍ程度）とな
る。したがって、各薄膜磁気ヘッドの記録媒体摺動面の
位置のずれは、約０．２５μｍ以下に抑えられる。In the above composite type thin film magnetic head, each thin film magnetic head is formed by being laminated by the thin film process.
The accuracy of these alignments is the accuracy of the alignment apparatus in the thin film process (currently about 0.25 μm). Therefore, the displacement of the recording medium sliding surface of each thin film magnetic head can be suppressed to about 0.25 μm or less.
【００３２】また、上記複合型薄膜磁気ヘッドでは、最
下層の磁気コアである再生用薄膜磁気ヘッド１２の下層
側磁気コアを磁性体よりなる基板としたので、基板上に
再生用薄膜磁気ヘッド１２の下層側磁気コアを形成する
工程が不要である。そして、さらに最上層の磁気コアで
ある再生用薄膜磁気ヘッド１４の上層側磁気コアを磁性
体よりなる基板としたので、再生用薄膜磁気ヘッド１４
の上層側磁気コアの上に基板や保護膜等を配する工程が
不要である。Further, in the above-mentioned composite type thin film magnetic head, since the lower layer side magnetic core of the reproducing thin film magnetic head 12 which is the lowermost magnetic core is a substrate made of a magnetic material, the reproducing thin film magnetic head 12 is formed on the substrate. The step of forming the lower magnetic core is unnecessary. Further, since the upper layer side magnetic core of the reproducing thin film magnetic head 14 which is the uppermost magnetic core is a substrate made of a magnetic material, the reproducing thin film magnetic head 14
The step of disposing the substrate, the protective film, etc. on the upper magnetic core is unnecessary.
【００３３】[0033]
【発明の効果】上述の説明から明らかなように、本発明
の複合型薄膜磁気ヘッドでは、各磁気ヘッドを接合する
工程が不要であるとともに、それらの位置合わせの精度
が、非常に優れたものとなる。As is apparent from the above description, the composite type thin film magnetic head of the present invention does not require the step of joining the magnetic heads, and the positioning accuracy thereof is very excellent. Becomes
【００３４】したがって、本発明によれば、高容量デー
タレコーダー用磁気ヘッドのような、高精度で各磁気ヘ
ッドの位置を合わせることが要求される複合型薄膜磁気
ヘッドを提供することができる。Therefore, according to the present invention, it is possible to provide a composite type thin film magnetic head, such as a magnetic head for a high capacity data recorder, which is required to align each magnetic head with high accuracy.
【００３５】さらに、薄膜磁気ヘッドを構成する各磁気
コアのうち、最上層の磁気コアと最下層の磁気コアの少
なくとも一方を、磁性基板により構成することにより、
工程を削減することができる。Further, among the magnetic cores forming the thin film magnetic head, at least one of the uppermost magnetic core and the lowermost magnetic core is formed of a magnetic substrate,
The number of steps can be reduced.
【図１】本発明を適用した複合型薄膜磁気ヘッドの一構
成例を示す要部概略横断面図である。FIG. 1 is a schematic cross-sectional view of an essential part showing a structural example of a composite type thin film magnetic head to which the present invention is applied.
【図２】図１に示す複合型薄膜磁気ヘッドを記録媒体摺
動面側から見た要部概略平面図である。FIG. 2 is a schematic plan view of a main part of the composite thin film magnetic head shown in FIG. 1 viewed from the recording medium sliding surface side.
【図３】本発明を適用した複合型薄膜磁気ヘッドの他の
構成例を示す要部概略横断面図である。FIG. 3 is a schematic horizontal cross-sectional view of a main part showing another configuration example of the composite type thin film magnetic head to which the present invention is applied.
【図４】図３に示す複合型薄膜磁気ヘッドを記録媒体摺
動面側から見た要部概略平面図である。4 is a schematic plan view of an essential part of the composite type thin film magnetic head shown in FIG. 3 viewed from the recording medium sliding surface side.
１，６ 基板 ２，４，１２，１４ 再生用薄膜磁気ヘッド ３，１３ 記録用薄膜磁気ヘッド ５ 非磁性膜 1,6 substrate 2,4,12,14 thin film magnetic head for reproduction 3,13 thin film magnetic head for recording 5 non-magnetic film
Claims (2)
膜磁気ヘッドが重なり合うように形成されてなる複合型
薄膜磁気ヘッド。1. A composite type thin film magnetic head comprising three or more thin film magnetic heads formed on a same substrate by a thin film process so as to overlap each other.
うち、最上層の磁気コアと最下層の磁気コアの少なくと
も一方が、磁性基板よりなることを特徴とする請求項１
記載の複合型薄膜磁気ヘッド。2. The magnetic core constituting the thin film magnetic head, wherein at least one of the uppermost magnetic core and the lowermost magnetic core comprises a magnetic substrate.
The composite thin film magnetic head described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9603794A JPH07302410A (en) | 1994-05-10 | 1994-05-10 | Combined thin-film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9603794A JPH07302410A (en) | 1994-05-10 | 1994-05-10 | Combined thin-film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07302410A true JPH07302410A (en) | 1995-11-14 |
Family
ID=14154289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9603794A Withdrawn JPH07302410A (en) | 1994-05-10 | 1994-05-10 | Combined thin-film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07302410A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6178070B1 (en) * | 1999-02-11 | 2001-01-23 | Read-Rite Corporation | Magnetic write head and method for making same |
| US6549370B1 (en) | 1999-12-09 | 2003-04-15 | Tdk Corporation | Thin-film magnetic head having a magnetic layer that defines throat height and includes a sloped portion |
| JP2012169033A (en) * | 2011-02-16 | 2012-09-06 | Seagate Technology Llc | Method of detecting read signals from storage medium data track and system including transducer head |
-
1994
- 1994-05-10 JP JP9603794A patent/JPH07302410A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6178070B1 (en) * | 1999-02-11 | 2001-01-23 | Read-Rite Corporation | Magnetic write head and method for making same |
| US6549370B1 (en) | 1999-12-09 | 2003-04-15 | Tdk Corporation | Thin-film magnetic head having a magnetic layer that defines throat height and includes a sloped portion |
| JP2012169033A (en) * | 2011-02-16 | 2012-09-06 | Seagate Technology Llc | Method of detecting read signals from storage medium data track and system including transducer head |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20010731 |