JPH07235002A - Magnetic disk device - Google Patents

Abstract

PURPOSE:To prevent a magnetic domain of an MR element from being disturbed by arranging the MR element on other end of a main magnetic pole locating on the side opposite to a magnetic disk through an insulation layer. CONSTITUTION:This device is a magnetic disk device provided with a perpendicular magnetic recording system magnetic disk 102 provided with a magnetization recording layer 107 having perpendicular magnetic anisotropy on a soft magnetic lining layer 106 and a magnetic head 101 recording and reproducing information on the disk 102. The magnetic head 101 is provided with a pair of main magnetic poles 109a, 109b respectively formed out of a high permeability material and whose one ends are arranged in the relation locating on the magnetic disk 102 side and a non-magnetic intermediate layer 110 provided between these main magnetic poles. Further, the device is provided with a recording coil 112 letting pass a generated magnetic flux through the magnetic disk 102 through the main magnetic poles 109a, 109b and the MR element 114 arranged on the other ends of a pair of the main magnetic poles 109a, 109b through the insulation layer 111 and in the relation magnetically coupled with a pair of the main magnetic poles 109a, 109b.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk device, for example, a magnetic disk device using a perpendicular magnetic recording type magnetic disk.

[0002]

2. Description of the Related Art Conventionally, in the field of computers,
A magnetic disk device is actively used as a large-capacity external storage device that can be randomly accessed. With the expansion of use, demands for larger storage capacity and higher recording density are increasing in magnetic disk devices.

In a magnetic disk device, usually, a plurality of magnetic disks each having a magnetic layer provided on a non-magnetic substrate are stacked and mounted on one rotating shaft, and a magnetic head for recording / reproducing on / from these magnetic disks. Is attached to an arm, and the arm is driven by an actuator to position the magnetic head.

In the magnetic disk device having such a structure, the magnetic head does not come into direct contact with the disk surface which rotates at a high speed at the time of recording / reproducing information, but a desired surface of the disk surface is slightly floated. Positioned to access the location. Then, a signal is recorded or reproduced by the magnetic head on the concentric tracks on the disk surface.

In the magnetic disk device, in order to meet the demand for a large storage capacity, for example, the linear recording density of the disk, that is, the recording density in the track direction is improved,
Alternatively, attempts have been made to increase the recording density by increasing the track density. In order to further increase the recording density, in recent years, much research has been conducted on contact recording in which a magnetic head is made to fly extremely low or is almost in contact with a magnetic disk for recording and reproduction.

As a method of increasing the linear recording density, 1
In 975, the perpendicular magnetic recording system was proposed. In this perpendicular magnetic recording method, the demagnetizing field at the magnetic transition portion can be made extremely small in principle and the width of the magnetic transition can be narrowed compared to the conventional in-plane magnetic recording method having anisotropy in the in-plane direction. Density recording becomes possible. In this perpendicular magnetic recording system, when a magnetic head for perpendicular magnetic recording using a strip-shaped soft magnetic thin film is used, a recording magnetic field in a more perpendicular direction can be obtained. It is also known to be effective in increasing the density. Further, in order to improve the recording and reproducing efficiency in the perpendicular magnetic recording system and to form a steeper magnetic transition, a perpendicular double-layer film medium in which a soft magnetic backing layer is provided under a perpendicular magnetic anisotropy magnetic recording layer. A magnetic disk having a structure is also proposed. When this magnetic disk is used, the demagnetizing field at the tip of the magnetic head can be reduced by the magnetic interaction between the magnetic head and the soft magnetic backing layer, and a larger generated magnetic field can be obtained during recording.
Similarly, for reproduction, the demagnetizing field at the tip of the magnetic head can be reduced and the effective magnetic permeability can be improved, so that the magnetic flux from the medium can be efficiently focused on the magnetic head and a large signal can be obtained.

Recently, there has been proposed an active magnetic head which employs a perpendicular magnetic recording system and uses a magnetoresistive effect element (MR element) in order to increase the sensitivity of signal reproduction. The active magnetic head uses the property that the electric resistance of the MR element made of a soft magnetic material such as permalloy changes with an external magnetic field, and converts the magnetic flux from the recording medium into an electric signal. The reproducing sensitivity of the magnetic head using this MR element is proportional to the magnitude of the sense current flowing through the soft magnetic material in order to convert the resistance change into the voltage change. Therefore, a large output can be obtained even when the relative speed between the magnetic head and the medium is small. Therefore, it is possible to reduce the track width and increase the track density by taking advantage of the large output.

By the way, as a magnetic head with a built-in MR element for a perpendicular magnetic recording system, there is a Japanese Patent Publication No. 62-24.
As disclosed in Japanese Patent Publication No. 848 and Japanese Patent Publication No. 63-67250, there is known a structure in which an MR element is arranged at a position adjacent to a recording single magnetic pole film and facing a recording medium.

However, in these magnetic heads, when the MR element is abraded due to contact with the medium, the cross-sectional area of the MR element becomes small, so that the resistance increases and the reproduction output fluctuates.

As a measure against wear, Japanese Patent Publication No. 53-25
In the one disclosed in Japanese Patent No. 488, the MR element is arranged on the bridge in parallel with the yoke between the two soft magnetic yokes in contact with the medium so as to avoid the influence of wear. However, although this magnetic head is not affected by wear, the direction of the magnetic field generated at the time of recording is parallel to the film surface direction of the MR element, so that a large recording magnetic field is applied in the film surface direction of the MR element at the time of recording. Therefore, there is a problem that the magnetic domain structure of the MR element is disturbed. Also, since this magnetic head operates as a ring type head during recording,
It generated a large in-plane magnetic field and was difficult to apply to perpendicular magnetic recording.

In order to avoid the influence of the recording magnetic field, the recording head and the reproducing MR element may be separated from each other, but in this case, the recording head and the recording MR element should be separated from each other especially on a track having a small radius on the disk. Track deviation may occur due to the influence of the distance from the reproducing head, and signal quality may be significantly deteriorated.

Further, in the case of adopting a structure in which an MR element is arranged in the vicinity of a single magnetic pole film for recording or a magnetic shield film in order to record and reproduce a signal on a magnetic recording layer of perpendicular magnetic anisotropy, At the time of signal reproduction, the MR element is magnetically coupled to the single magnetic pole film or magnetic shield film for recording, and the sum (g + Tm) of the gap g between the MR element and these soft magnetic films adjacent to each other and the MR element film thickness Tm. Limits the playback resolution. For this reason, when a perpendicular magnetic anisotropy magnetization recording layer is used, there is also a problem that a high reproducing resolution suitable for the excellent recording resolution of the magnetization recording layer cannot be obtained.

In order to obtain a large reproduced signal,
Thin M less than 0.1 μm, preferably less than 0.05 μm
It is necessary to use the R element and increase the resistance value of the MR element. In this case, the film thickness of the MR element becomes almost the same as the grain size of the crystal forming the magnetization recording layer of perpendicular magnetic anisotropy, and not only the resolution cannot be made sufficiently high, but There is a problem that the resulting noise increases and the signal quality deteriorates.

Further, in this type of magnetic disk device, as shown in FIG.
A head slider incorporating 39 is used. In this head slider, the air bearing surface 540 formed by two parallel flat surfaces faces the magnetic disk surface,
Further, the gap portion 541 of the magnetic head 539 is positioned on the surface side of the magnetic disk to record / reproduce signals.

FIG. 54 is a conceptual diagram for explaining the operating principle of the head slider. Slider 542
Is supported and restrained by a gimbal spring and a suspension spring (not shown) at a support point 543 with a force (arrow 544) perpendicular to the disk surface and a moment (arrow 545) about the support point. The magnetic head 546 is provided at the rear end of the slider, and the gap 54
7 is a magnetic disk 550 which is located at the rear end of the air bearing surface 548 of the slider and rotates in the direction indicated by an arrow 549.
Facing the surface of.

The head slider 542 has a dynamic pressure generated between air bearing surface 548 and the surface of the magnetic disk 550 by the air entrained on the surface of the rotating magnetic disk 550 due to viscosity, and support restraint by a gimbal spring or suspension spring. It floats above the disk with a constant gap 551 in balance with the force.

This method has an advantage that the contact between the magnetic head and the magnetic disk is avoided and the wear due to the contact between the magnetic head and the magnetic disk is prevented. However, from the viewpoint of magnetic recording, there is a problem that a gap 551 is formed between the magnetic head and the magnetic disk, which causes a loss during recording / reproducing and causes a decrease in signal output. This problem becomes noticeable when the recording density is high and the wavelength of the recording signal is short, or in the case of the so-called perpendicular magnetic recording method in which the easy axis of magnetization is perpendicular to the disk surface, which is one of the major barriers to improving the recording density. It has become.

Therefore, there has been proposed a system in which the gap between the magnetic head and the magnetic disk is made as small as possible, and the recording / reproducing is performed in a state where the two are substantially in contact with each other. For example, Japanese Laid-Open Patent Publication No. 3-178017 proposes a method in which the shape of the magnetic head is needle-like and the recording / reproducing portion of the magnetic head at the tip is pressed against the disk with an extremely light load. According to this method, by applying a minute load to a minute area, the amount of head wear due to sliding with respect to the magnetic disk can be suppressed to a range where there is no practical problem. However, it is not easy to stably apply a constant load to the needle-shaped head.

A method for stably reducing the distance between the magnetic head and the magnetic disk is disclosed in, for example, Japanese Patent Laid-Open No. 62-62.
As disclosed in Japanese Patent No. 3476, a method is proposed in which two large and small flying sliders are combined and a magnetic head is mounted on the smaller slider. However, in this method, the smaller slider is also floating, and there is a limit to reducing the gap between the magnetic head and the magnetic disk, and it is difficult to bring the magnetic head and the magnetic disk into contact with each other.

[0020]

Therefore, the present invention is based on the MR
It is possible to prevent wear of the element and at the same time MR
It is a first object of the present invention to provide a perpendicular magnetic recording type magnetic disk device provided with a magnetic head capable of preventing the elements from being affected.

Further, according to the present invention, the magnetic coupling between the magnetic pole for recording and the MR element for reproducing and the magnetic disk can be strengthened, and both the recording resolution and the reproducing resolution can be improved. A second object is to provide a device.

Further, according to the present invention, a slider having a magnetic head mounted thereon can be pressed against a magnetic disk with a stable and extremely light load, and a signal can be recorded and reproduced by bringing the magnetic head and the magnetic disk into contact with each other. A third object is to provide a magnetic disk device that can be used.

A fourth object of the present invention is to provide a magnetic disk device which can always maintain a tilt angle of a slider having a magnetic head with respect to the surface of a magnetic disk at a desired value.

[0024]

In order to achieve the first object, the present invention provides a magnetic recording medium of a perpendicular magnetic recording system in which a magnetic recording layer having perpendicular magnetic anisotropy is provided on a soft magnetic backing layer. In a magnetic disk device comprising a disk and a magnetic head for recording information on and reading information from the magnetic disk, the magnetic heads are each made of a high magnetic permeability material, and one end of each is located on the magnetic disk side. A pair of main magnetic poles arranged in a positional relationship, a non-magnetic intermediate layer provided between the main magnetic poles, a recording coil for passing the generated magnetic flux to the magnetic disk through the main magnetic pole, and the pair of main magnetic poles. The MR element is provided at the other end of the magnetic pole via an insulating layer and is arranged to be magnetically coupled to the pair of main magnetic poles.

In order to achieve the above second object,
The present invention provides a magnetic disk of a perpendicular magnetic recording system in which a magnetic recording layer having perpendicular magnetic anisotropy is provided on a soft magnetic backing layer, and a magnetic head for recording and reading information on this magnetic disk. In a magnetic disk device provided with the magnetic head, the magnetic head includes an MR element for reproduction arranged in the vicinity of a soft magnetic material for recording or a soft magnetic film for magnetic shield, and the thickness of the MR element is Tm. When the distance between the element and the soft magnetic material for recording or the soft magnetic film for magnetic shield is g and the shortest recording wavelength is λ min,
The relationship of Tm <λmin <Tm + g is satisfied, and the magnetization recording layer of the magnetic disk is composed of magnetic crystal grains having an average diameter smaller than the film thickness Tm of the MR element.

Further, in order to achieve the third object,
The present invention relates to a magnetic disk, a magnetic head for recording and reading information on and from the magnetic disk, and air generated between the magnetic disk for supporting the magnetic head and accompanying the rotation of the magnetic disk. In a magnetic disk device provided with a slider that floats while maintaining a height at which a levitation force by a dynamic pressure action and an externally applied pressing load are balanced, the magnetic head and a slider on which the magnetic head is mounted have a spring property. Is supported by the slider via a supporting member having a magnetic field such that the magnetic head contacts the disk surface by the spring force of the supporting member even when the slider is floating above the disk surface. The slider bears most of the pressing load applied to the slider, and the slider bears the remaining load. It is. Further, in order to achieve the fourth object, the present invention provides a magnetic disk, a magnetic head for recording and reading information on the magnetic disk, a slider equipped with the magnetic head, and the magnetic head. And a supporting member having a spring property for supporting the slider, wherein the magnetic head and the slider record / reproduce information in a state of being in contact with the surface of the magnetic disk. A spring-like supporting member having a folded structure is provided for connecting the child to the flying slider or the head positioning mechanism.

In the present invention, it is desirable to have means for forming a non-signal area in which substantially no effective signal exists between the recording tracks on the magnetic disk. This no-signal region can be formed by utilizing the side fringe magnetic field of the magnetic head, for example. Specifically, when the magnetic disk is a ring type recording head having a magnetic gap, the gap length of the magnetic gap is g [μm], the recording track width is Tw [μm], and the track pitch is Tp [μ.
m] and the coercive force of the magnetic layer of the magnetic disk is Hc [Oe], g <(1500 / Hc−Hc / 4000π +
0.3) / (Hc / 400π-1 / 2), and g ≧ (1
500 / Hc-Hc / 4000π + 0.3-Tp + T
The non-signal area can be formed by satisfying the condition of w) / (Hc / 400π-1 / 2).

In the case where the recording head of the magnetic disk is a single magnetic pole head for perpendicular magnetic recording, which has a main magnetic pole whose end in the recording track width direction is tapered on the trailing side, the non-signal area is When the dimension of the taper portion of the recording head in the recording track width direction is p and the track pitch is Tp, it can be formed by satisfying the condition of 0 <p ≦ Tp−Tw.

Further, the non-signal area can be formed on the magnetic disk itself. Specifically, at least one of saturation magnetization and coercive force of the non-signal area of the magnetic layer for recording a signal is recorded on the recording track. Can be made smaller than that of the region.

When the non-signal area is provided in this way, when the width of the recording track on the magnetic disk is Tw, the track pitch of the recording track is Tp, and the width of the non-signal area is G, G> It is desirable to satisfy the condition of Tp-Tw.

[0031]

According to the magnetic disk device corresponding to the first purpose,
Vertical recording is performed with good sensitivity by a pair of relatively thick main magnetic poles at the time of signal recording, and a pair of main magnetic poles sandwiching the nonmagnetic intermediate layer act as a differential type head at the time of reproduction, and the nonmagnetic intermediate layer High resolution can be obtained because the resolution is determined by the thickness of. Further, the MR element used for reproduction is arranged at the other end of the main magnetic pole, that is, the other end located on the side opposite to the magnetic disk via an insulating layer. Therefore, wear does not occur in the MR element when the magnetic head travels in contact with the magnetic disk, and even if the magnetic disk is conductive, the sense current flowing in the MR element may leak. Absent. Furthermore, since the end surface of the main pole and the film surface of the MR element are parallel to each other, even when a large recording magnetic field is applied during recording, a magnetic field is applied in the direction normal to the film surface of the MR element. As a result, a large internal demagnetizing field is generated in the direction of canceling the external magnetic field, and as a result, the magnetic domain of the MR element is not disturbed.

According to the magnetic disk device for the second purpose, the film thickness Tm of the MR element and the gap g between the MR element and the soft magnetic material for the recording head or the soft magnetic film for the magnetic shield are set. , The shortest recording wavelength λmin, Tm <λ
min <Tm + g, and in addition, the distance ds between the tip of the MR element and the surface of the recording medium, the protective film thickness dp of the recording medium, the magnetic recording layer thickness dr, and the film thickness Tm of the MR element are ds + dp <T
By adopting a structure satisfying m and ds + dp + dr <2Tm, it becomes possible to reproduce a signal with a resolution higher than the reproduction resolution Tm + g of the shield type MR head. In particular, it is possible to magnetostatically couple the MR element and the backing soft magnetic layer close to each other, and it is possible to perform high resolution reproduction with the MR element thickness Tm as the resolution. Therefore, in the shield type MR head, sin (k (Tm +
The loss due to the gap represented by g)) / k (Tm + g) satisfies the condition
It can be suppressed to (kTm) / kTm.

Further, in the magnetic disk device corresponding to the third object, the slider is supported by the spring, and the gap between the slider and the magnetic disk is autonomously kept constant by the balance between the dynamic pressure of air and the bar force. To surface. The support member joined to the slider functions as a leaf spring, and the repulsive force of the leaf spring presses the magnetic head against the magnetic disk surface. Since the slider floats above the magnetic disk at a constant distance, the pressing force of the magnetic head against the disk by the leaf spring action of the support member can also be maintained constant.

[0034]

Embodiments of the present invention will be described below with reference to the drawings.

Embodiment 1 FIG. 1 is a perspective view showing a magnetic disk device according to an embodiment of the present invention with a main portion partially cut away.

This magnetic disk device has a magnetic head 10
1 and a perpendicular magnetic recording type magnetic disk 102.

The magnetic head 101 is provided so as to contact the magnetic disk 102 via the arm 103.
This magnetic head 101 is positioned on a desired track 104 among a plurality of tracks formed concentrically on the magnetic disk 102 by an actuator (not shown).

In the magnetic disk 102, a soft magnetic backing layer 106 and a perpendicular magnetic anisotropy magnetization recording layer 107 are sequentially laminated on a disk-shaped non-magnetic substrate 105, and a protective film is further formed thereon. The structure 108 is formed. Explaining in a concrete example, the diameter is 1.8 inches and the thickness is 0.4 m.
A soft magnetic backing layer 106 of CoZrNb microcrystals having a thickness of 0.1 μm was formed on a glass substrate 105 having a thickness of m by a high frequency sputtering method in an argon gas atmosphere. The in-plane coercive force (Hcs) of this soft magnetic backing layer 106 is 1
It was 0 Oe. Further thereon, a perpendicular magnetic anisotropy magnetization recording layer 1 made of CoPt and having a thickness of 0.08 μm was formed by a DC magnetron sputtering method in an argon gas atmosphere.
The coercive force (Hch) in the perpendicular direction of the magnetization recording layer 107 on which No. 07 was formed was 2200 Oe. Magnetization recording layer 10
A protective film 108 made of diamond-like carbon and having a thickness of 0.008 μm was formed on No. 7 by plasma CVD in order to ensure durability against contact with the head. The magnetic disk 102 is formed in this way.

Next, the structure of the magnetic head 101 will be described.

FIG. 2 shows the magnetic head 10 along the direction of relative movement between the magnetic head 101 and the magnetic disk 102.
It is a cross-sectional schematic diagram of 1. FIG. 3 is a partially transparent perspective view of the magnetic head 101.

In these figures, 103 indicates a needle arm made of ceramics. At the tip of the needle arm 103, main magnetic poles 109a and 109b made of a CoFe high magnetic permeability material are formed by a high frequency sputtering method. The main magnetic poles 109a and 109b extend in a direction perpendicular to the surface of the magnetic disk 102 and are formed in a two-layer structure facing each other in the track direction.
Further, the main magnetic poles 109 a and 109 b are provided so that one ends of the main magnetic poles 109 a and 109 b face the magnetic disk 102. The main magnetic poles 109a and 109b have a thickness in the track direction of 0.3 μm, and a nonmagnetic intermediate layer 110 made of Ti and having a thickness of 0.01 μm formed by a high frequency sputtering method is interposed between the main magnetic poles 109a and 109b. . Main magnetic poles 109a and 109b
A recording coil 112 covered with an insulating material 111 is arranged around the. In the case of this example, the number of turns of the recording coil 112 is three.

At the other ends of the main magnetic poles 109a and 109b, that is, at the rear ends opposite to the front ends facing the magnetic disk 102, an MR element 114 made of permalloy is arranged with an insulating layer 113 interposed therebetween. . MR element 114
Is arranged such that its film surface is parallel to the surface of the magnetic disk 102, and is magnetically coupled to the main magnetic poles 109a and 109b. Two copper lead wires 115a and 115b are connected to both ends of the MR element 114 in the track width direction, and M is connected through the copper leads 115a and 115b.
A sense current Is in the track width direction can be passed through the R element 114. Recording and reproduction are performed with the head 101 and the magnetic disk 102 in contact with each other.

At the time of recording, a recording current corresponding to a signal is passed through the recording coil 112, so that the main magnetic poles 109a, 1
A strong magnetic flux passing through 09b and in the direction corresponding to the signal is generated. At this time, due to magnetostatic coupling between the main magnetic poles 109a and 109b and the soft magnetic layer 106 of the magnetic disk, a large and sharp distribution recording magnetic field is generated inside the magnetization recording layer 107 sandwiched between them. . By this recording magnetic field, the magnetization recording layer 107 is magnetized in the direction corresponding to the signal.

FIG. 4 shows the recording magnetic field distribution at a position separated by 0.01 μm from the front surface of the head. Main pole 10
The magnetic disks 1 and the ends (lower ends in the figure) of 9a and 109b
Even if the protective film 108 of No. 02 is brought into contact with the protective film 108, an average gap of about 0.002 μm exists between them due to the surface roughness. The thickness of the protective film 108 is 0.008 μm. Therefore, the distance between the tips of the main poles 109a and 109b and the magnetization recording layer 107 of the magnetic disk 102, that is, the spacing (d) between the head / recording layer is 0.
It is 01 μm.

At the time of signal reproduction, the magnetic transition points of the magnetic disk 102.
The magnetic flux flowing from one main magnetic pole to the other main magnetic pole via the MR element 114 changes when the al point) passes through the front surfaces of the main magnetic poles 109a and 109b. Change the electrical resistance sharply.

FIG. 5 shows changes in the magnetic flux flowing inside the MR element 114 during the above signal reproduction. When the magnetization transition point reaches the front surface of the main magnetic poles 109a and 109b, the amount of magnetic flux passing through the respective main magnetic poles starts to increase and increases to a certain value. At this time, since there is a fixed distance between the main magnetic poles 109a and 109b, the time points at which the magnetic fluxes flowing through the respective magnetic poles start increasing are different. As a result, the main magnetic poles 109a, 10
The difference in the amount of magnetic flux flowing through each of the magnetic fluxes 9b becomes maximum when the magnetic transition point comes to the front surface of the nonmagnetic intermediate layer 110. MR
The amount of magnetic flux passing through the element 114 depends on the two main magnetic poles 109.
This is the difference in the amount of magnetic flux passing through a and 109b. Therefore, when the magnetization transition point reaches the front surface of the non-magnetic intermediate layer 110, the amount of magnetic flux passing through the inside of the MR element becomes maximum. Since the electrical resistance of the MR element 114 changes depending on the amount of magnetic flux passing through the MR element 114, if a constant sense current Is is passed through the MR element 114, a reproduction signal voltage at the time when the amount of magnetic flux becomes maximum can be obtained. You can

6 to 8 show reproduced signal waveforms differentiated for data detection. The zero cross point of the reproduced waveform is the data detection point, and the larger the slope,
Excellent noise-to-noise ratio (S / N ratio). 6 to 8 show
When the thicknesses of the main magnetic poles 109a and 109b in the track direction are 0.3 μm, 0.5 μm and 0.1 μm, respectively, they are differential reproduction signals. As is clear from comparing these figures, even if the thicknesses of the main magnetic poles 109a and 109b are changed, the inclination near the zero cross and its width do not change. Therefore,
It is understood that the resolution and the S / N ratio do not depend on the thickness of the main pole in this range.

FIG. 9 shows the main magnetic poles 109a and 109b when the thickness in the track direction is changed in a larger range.
The change in slope of the zero cross is shown. As is clear from this result, if the thickness of the main magnetic pole is 0.05 μm or more, the zero-cross slope of does not depend on the thickness of the main magnetic pole.

FIG. 10 shows a differential reproduction signal when the thickness of the specific magnetic intermediate layer 110 is 0.1 μm.
As is clear from the figure, in this case, the slope of the zero-cross point is small.

FIG. 11 shows the change in the slope of the zero-cross point when the thickness of the non-magnetic intermediate layer 110 is changed over a wide range. The smaller the thickness of the non-magnetic intermediate layer 110, the larger the slope of the zero-cross point, and the larger the S / N ratio.
It can be seen that

As described above, in the magnetic head 101 incorporated in the magnetic disk device of this embodiment, the recording sensitivity, the reproduction resolution and the reproduction sensitivity can be controlled independently. Therefore, it is possible to achieve both high recording capability and high reproduction resolution. Further, since this magnetic head has a head structure in which the recording portion and the reproducing portion are integrated, the recording center and the reproducing center are separated from each other by about submicron. Therefore, it is possible to suppress the occurrence of off-track even with the yoke angle, and it is possible to sufficiently cope with the narrow track of the magnetic disk. Therefore, the recording density and reliability of the magnetic disk device can be improved.

Further, by causing the magnetic head 101 and the magnetic disk 102 to come into contact with each other and run, the spacing loss can be reduced, and the recording and reproduction of signals at a high recording density can be performed. In addition, since the MR element 114 is not worn or the sense current is not leaked, the reliability of the MR element built-in head can be remarkably enhanced despite the contact recording.

Further, since the direction of the magnetic field at the time of signal recording is perpendicular to the MR element 114, the magnetic domain of the MR element 114 is not changed by the recording magnetic field. Therefore, stable signal reproduction with less noise becomes possible, and the reliability of the device can be improved.

Embodiment 2 FIG. 12 schematically shows a main part of a magnetic disk device according to another embodiment of the present invention as a sectional view taken along the direction of relative movement between the head and the magnetic disk. .

Perpendicular magnetic recording type magnetic disk 216
Is manufactured as follows. First, 2.
A soft magnetic backing layer 218 made of FeSi and having a thickness of 0.12 μm is formed on a glass substrate 217 having a diameter of 5 inches and a thickness of 0.635 mm by a DC magnetron sputtering method in an argon gas atmosphere. On top of that, a thickness of 0.0
A CoCr perpendicular magnetic anisotropic layer (magnetization recording layer) 220 having a thickness of 0.1 μm is formed by a DC magnetron sputtering method in an argon gas atmosphere through a sputtered carbon intermediate layer 219 having a thickness of 4 μm. Further, in order to secure the durability against the contact of the head, a 0.005 μm thick protective film 221 made of a SiN film is formed by an RF sputtering method. The in-plane coercive force (Hcs) of the soft magnetic backing layer 218 is 60 Oe, and the perpendicular coercive force (Hch) of the magnetization recording layer 220 is 1600 Oe.

The magnetic head 222 for recording and reproducing signals on the magnetic disk 216 is constructed as follows. Needle arm 223 made of SiC ceramics
Fe formed by the high frequency sputtering method at the tip of the
Main magnetic poles 224a and 224b made of Si high magnetic permeability material are provided. The main magnetic poles 224a and 224b face each other in the track direction, and one ends of the main magnetic poles 224a and 224b are arranged to face the magnetic disk 216.
The thickness of the main poles 224a and 224b in the track direction is
It is 0.1 μm. A non-magnetic intercenter layer 225 made of SiO ₂ is formed between the two main magnetic poles 224a and 224b by a high frequency sputtering method. The non-magnetic intermediate layer 2
The thickness of 25 is 0.02 μm in the portion close to the magnetic disk 216. Main magnetic pole 224a and needle arm 22
The recording coil 226 covered with the insulating material 235 is arranged between 3s. In the case of this example, the number of turns of the recording coil 226 is half turn (0.5 turn).

The main magnetic poles 224a and 224b and the non-magnetic intermediate layer 225 are curved at the rear end opposite to the front end facing the magnetic disk 216, and the end face of the front end and the end face of the rear end are 90 degrees. It makes an angle of °. A permalloy layer 228 is formed on the end surface of the rear end portion through an insulating layer 227.
/ Cu layer 229 / Permalloy layer 230 / FeMn layer 23
A spin valve element 232 composed of one laminated film is arranged.

The spin valve element 232 has a main magnetic pole 224.
a and 224b are magnetically coupled. Two copper lead wires 233a and 233b are connected to the ends of the spin valve element 232 in the vertical direction in the figure. A sense current Is is passed in the vertical direction of the spin valve element 232 through the copper lead wires 233a and 233b. The magnetization direction of the permalloy layer 230 is the antiferromagnetic FeMn layer 2
It is fixed in a fixed direction by exchange coupling with 31. On the other hand, the magnetization direction of the permalloy layer 228 can be changed by the magnetic flux applied from the magnetic disk 216 to the magnetic valve element 232 through the main magnetic poles 224a and 224b. The electrical resistance of the spin valve element 232 changes depending on the relative relationship between the magnetization direction of the permalloy layer 230 and the magnetization direction of the permalloy layer 228. In practice, the electric resistance of the spindle valve element 232 has a minimum resistance value when the magnetization directions of the two permalloy layers are parallel,
Maximum when antiparallel. Therefore, the spin valve element 232 has the same operation as the MR element in the first embodiment. Recording and reproduction are performed with the magnetic head 222 and the magnetic disk 216 in contact with each other.

Also in this embodiment, the spin valve element 232 does not contact the surface of the magnetic disk 216. Further, the magnetic field generated by the main magnetic poles 224a and 224b is
It is orthogonal to the surface of the spin valve element 232. Therefore, the same effect as that of the first embodiment can be obtained.

Third Embodiment FIG. 13 is a schematic sectional view similar to FIG. 12, showing a main part of a magnetic disk drive according to a third embodiment of the present invention.

The magnetic disk device of this embodiment also includes a magnetic head 301 and a magnetic disk 302.

The magnetic head 301 is a head for recording information on the magnetic disk 302 of the perpendicular magnetic recording system and reproducing the recorded information, and includes an MR element for reproducing a magnetization signal. The magnetic head 301 is provided so as to come into contact with the magnetic disk 302 via the arm 303. The magnetic disk 302 has a plurality of concentric tracks, and the magnetic head 301
Is positioned on a desired track by an actuator (not shown).

In the magnetic disk 302, a soft magnetic backing layer 306 and a magnetization recording layer 307 having perpendicular magnetic anisotropy are sequentially laminated on a disk-shaped non-magnetic substrate 305, and a protective film 308 is further formed thereon. Are manufactured by forming. Specifically, on a glass substrate 305 having a diameter of 1.8 inches and a thickness of 0.4 mm, the thickness (db) made of CoZrNb microcrystals is 0.2 μm by a high frequency sputtering method in an argon gas atmosphere. A soft magnetic backing layer 306 is formed. Furthermore, the thickness (dr) is 0.07 μm by the DC magnetron sputtering method in an argon gas atmosphere.
A magnetic recording layer 307 having perpendicular magnetic anisotropy made of CoPt of m is formed. On the magnetic recording layer 7, in order to secure durability and insulation against contact with the head, R
A protective film 308 made of ZrO ₂ and having a thickness (dp) of 0.01 μm is formed by the F sputtering method.

In the above magnetic disk 302, the in-plane coercive force (Hcs) of the soft magnetic backing layer 306 was 5 Oe and its saturation magnetic flux density (Bsb) was 1100 G. On the other hand, as a result of observation with a transmission electron microscope (TEM), the average crystal grain size of the magnetization recording layer 307 is 0.015 μm.
m, that is, about 1/5 of the film thickness. Further, the magnetic recording layer 307 has a perpendicular magnetic anisotropy constant of 2.5 × 10 ⁵ J /
m ³ or more, vertical coercive force (Hch) is 2500 O
e, the saturation magnetization (Isr) was 10,000 G. Film thickness (db) of soft magnetic backing layer 306 and saturation magnetic flux density (Bsb)
The product (db · Bsb) of 2200 Gμm, the magnetic recording layer 3
07 film thickness (dr) and saturation magnetization Isr (dr · Is
r) was 700 Gm. Therefore, the magnetic disk 302 satisfies the relationship of Bsb · db> Isr · dr. In the magnetic disk satisfying this relationship, the soft magnetic backing layer 306 is less likely to be saturated, and therefore, the effect of strengthening the magnetic coupling with the magnetic head can be obtained.

The magnetic head 301 is constructed as follows.

In the figure, reference numeral 303 indicates a needle arm made of ceramics. At the end of the needle arm 303, the thickness of CoZrNb having a high magnetic permeability of 0.
A 5 μm magnetic shield film 309 is formed. An MR element 311 is formed on the outside of the magnetic shield film 309 by an ion beam sputtering method with a 0.2 μm thick non-magnetic insulating layer 310 interposed therebetween.

The MR element 311 is made of a NiFe alloy,
The film thickness Tm is 0.08 μm and the height is 6 μm. That is, the film thickness Tm of the MR element 311 is determined by the magnetization recording layer 30.
7 is sufficiently larger than the average crystal grain size of 0.015 μm.
The gap g between the magnetic shield film 309 and the MR element 311 is 0.2 μm, which is the same as the film thickness of the nonmagnetic insulating layer 310.

A nonmagnetic insulating layer 312, a magnetic shield film 313 and a nonmagnetic insulating layer 314 are formed on the outer surface side (that is, the left side surface in the figure) of the MR element 311. The distance g between the magnetic shield film 313 and the MR element 311 is
It is 0.2 μm.

The left side surface of the non-magnetic insulating layer 314 in the figure is smoothed, and a seed magnetic pole 315 for recording is formed on the smoothed side surface. The main magnetic pole 315 has a thickness Tr = 0.
It consists of a 5 μm FeSi thin film. A protrusion is formed in the center of the main magnetic pole 315. By this protrusion,
The recording magnetic flux generated by the recording coil 316 covered with the insulating material 317 can efficiently penetrate the main magnetic pole piece 315.

The tip (lower end in the figure) of the MR element 311 for signal reproduction is exposed at the lower end of the magnetic head. However, the distance (ds) between the protective film 308 of the magnetic disk and the MR element 311 is about 0.01 μm on average due to their surface roughness even when they are in contact with each other.
Further, as described above, the thickness (dp) of the protective film 308 is 0.01 μm. Therefore, the distance (ds + dp) between the tip of the MR element 311 and the magnetization recording layer 307 is 0.02 μm. As a result, the head / medium spacing (ds + dp) and the film thickness of the MR element 311 (Tm =
0.08 μm) and the film thickness of the magnetization recording layer 307 (dr =
0.07 μm) satisfies the relationship of the following equation.

Ds + dp <Tm, and ds + dp
+ Dr <2Tm Distance (dsw) between tip of main pole 315 and protective film 308
Similarly, since it is 0.01 μm, the recording main pole 31
Distance between the tip of No. 5 and the magnetization recording layer 307 (dsw + dp)
Is 0.02 μm. Therefore, the head / medium spacing (dsw + dp) and the film thickness (T
r = 0.5 μm) satisfies the relationship of the following equation.

2 (dsw + dp) <Tr In the magnetic disk device of the above embodiment, a strong magnetic flux is generated in the main magnetic pole 315 by passing a recording current through the recording coil 316 during signal recording. At this time, the main magnetic pole 315 and the CoZrNb soft magnetic underlayer 3 of the magnetic disk
Due to the magnetostatic coupling with C, C sandwiched between them
A large and sharp distribution recording magnetic field is generated inside the oPt magnetization recording layer 307. As a result, the magnetization recording layer 307 is magnetized in the direction corresponding to this recording magnetic field.

On the other hand, at the time of signal reproduction, when the magnetization transition point of the magnetic disk 302 passes through the front surface of the MR element 311, the amount of magnetic flux flowing from the magnetic recording layer 307 to the MR element 311 changes and its electric resistance becomes steep. Change. By flowing a constant sense current through the MR element 311, this resistance change can be converted into a voltage change to obtain a reproduction signal voltage.

FIG. 14 shows how the pulse width (PW ₅₀ ) changes when the head / medium spacing (ds + dp) is changed. The pulse width PW
₅₀ is defined by the half value width of the differential signal (dV (x) / dx) when the output voltage of the MR element 311 is V (x).

As is clear from FIG. 14, when the head / medium spacing (ds + dp) is larger than the film thickness (Tm) of the MR element 311, the resolution of PW ₅₀ is Tm.
Asymptotic to the curve defined by + g. As already mentioned, g
Is the distance between the MR element 311 and the magnetic shield 309. On the other hand, when the spacing (ds + dp) is smaller than Tm, the resolution of PW ₅₀ is Tm.
Asymptotically to the curve defined by. The results mean the following:

That is, in the magnetic disk device of the above embodiment, when the spacing (ds + dp) is sufficiently smaller than the film thickness (Tm) of the MR element 311, the MR element 3
11 is almost irrelevant to the gap g between the magnetic shield film 309 and the magnetic shield film 309, and the resolution is determined only by the film thickness (Tm) of the MR element 311. Therefore, it is possible to reproduce even a signal whose shortest recording wavelength λmin is shorter than Tm + g.

In the combination of the in-plane recording medium and the shield type MR head, the reproduction resolution cannot be higher than Tm + g even if ds + dp is reduced. On the other hand, the magnetic disk 302 having the soft magnetic backing layer 306 and the perpendicular magnetic anisotropy magnetization recording layer 307, and the shield type M
In the case of combining with the R head, the reproduction resolution can be increased up to Tm / (Tm + g) times at maximum by making ds + dp sufficiently smaller than Tm.

FIG. 15 shows the thickness of the recording main pole 315 (T
It shows how the reproduction pulse width (PW ₅₀ ) changes when r) is changed. As is clear from the figure, the main pole 3
Thickness of 15 (Tr) is spacing (dsw + dp) of 2
If it becomes smaller than twice, the pulse width (PW ₅₀ ) will rapidly increase and the resolution will decrease. This is because if the main magnetic pole 315 becomes too thin, the inclination of the recording magnetic field generated by the main magnetic pole becomes small, and the width of the magnetic transition is increased. Therefore, by satisfying the condition of 2 (dsw + dp) <Tr, higher density recording becomes possible. Note that this relationship is the same in the magnetic disk devices of the first and second embodiments.

Embodiment 4 FIG. 16 is a schematic sectional view similar to FIG. 12, showing a main part of a magnetic disk device according to a fourth embodiment of the present invention.

Perpendicular magnetic recording type magnetic disk 418
Is manufactured as follows. First, 2.
On a glass substrate 419 having a diameter of 5 inches and a thickness of 0.635 mm, the thickness (db) of FeSi was set to 0.1 by DC magnetron sputtering in an argon gas atmosphere.
A 2 μm soft magnetic backing layer 420 is formed. in addition,
A perpendicular magnetic anisotropy magnetization recording layer 421 made of CoPt0 having a thickness (dr) of 0.1 μm is formed by a DC magnetron sputtering method in an argon gas atmosphere. Further, a protective film 422 made of a SiN ₂ film having a thickness (dp) of 0.005 μm is formed by RF sputtering to secure durability against head contact and insulation.

In the above magnetic disk 419, the in-plane magnetic force (Hcs) of the soft magnetic backing layer 420 is 6 Oe,
The saturation magnetic flux density (Bsb) was 1500G. Also, C
Regarding the characteristics of the perpendicular magnetic anisotropy magnetization recording layer 421 made of oPtO, its perpendicular coercive force (Hch) is 1600.
Oe and saturation magnetization (Isr) were 9000 G, and the average grain size of the crystals was 0.01 and μm. The magnetic disk of this embodiment also satisfies the relationship of Bsb.db> Isr.dr.

The magnetic head 423 is constructed as follows.

That is, in the figure, 424 indicates a needle arm made of SiC ceramics. This needle arm 42
A main magnetic pole 425 made of FeSi high magnetic permeability material is formed at the four ends by a high frequency sputtering method. Main pole 4
The thickness (Tr) of 25 in the track direction is 0.1 μm, and the saturation magnetic flux density (BsA) is 18000G. Main pole 42
A recording coil 427 covered with an insulating material 426 is arranged on the left side surface of FIG. In the case of this example, the number of turns of the recording coil 427 is one.

The left side surface of the insulating material 426 in the drawing is machined flat by mechanical polishing, and the machined surface is made of NiF.
An MR element 428 made of an e-alloy is formed. MR
The film thickness (Tm) of the element 428 is 0.06 μm, and the height is 4 μm
Is. The distance (g) between the MR element 428 and the main magnetic pole 425 is 0.3 μm near the end facing the magnetic disk 418. A nonmagnetic insulating layer 429 is formed on the left side surface of the MR element 428 in the figure.

In this case, the tip of the MR element 428 for signal reproduction (lower end in the figure) and the protective film 422 of the magnetic disk 418.
The distance (ds) between and does not become zero due to the surface roughness even when they are contacted with each other, and is about 0.01 μm on average. Therefore, the distance between the tip of the MR element 428 and the magnetization recording layer 421 of the magnetic disk 418, that is, the head / medium spacing is ds + dp = 0.015 μm.
Therefore, spacing (ds + dp), MR element 42
8 (Tm) and the thickness of the magnetic recording layer 421 (d
r) satisfies the relationship of the following equation.

Ds + dp <Tm, and ds + dp + dr <2Tm

The distance (dsw) between the tip of the recording main pole 425 (lower end in the figure) and the protective film 422 is also ds.
Is 0.01 μm. Therefore, the main pole 42
The distance between the tip of the magnetic recording layer 5 and the magnetization recording layer 421, that is, the head-medium spacing (dsw + dp) is also (ds +
It is 0.015 μm similarly to dp). Further, as described above, the thickness (Tr) of the main magnetic pole 425 in the track direction is 0.1 μm. As a result, spacing (dsw + d
p) and the film thickness (Tr) of the main magnetic pole 425 satisfy the relationship shown by the following equation.

2 (dsw + dp) <Tr In the magnetic disk device having the above configuration, the third embodiment
Similarly, excellent recording and reproducing resolution can be exerted.

Embodiment 5 FIGS. 17 (a) to 17 (c) show an example of a slider head mechanism incorporated in the magnetic disk device of the present invention. 17 (a) is a side view, FIG. 17 (b) is a bottom view,
FIG. 17C is an enlarged cross-sectional view showing the contact slider portion.

Reference numeral 501 in the figure denotes a support member composed of a plate-like member having a spring property. This support member 501
A contact slider 502 is provided at one end of the. The contact slider 502 is equipped with a magnetic head having an electromagnetic conversion portion formed by using, for example, a thin film technique. The other end 504 of the support member 501 is joined to the flying slider 505.

As shown in FIG. 17A, the sliding surface 507 of the contact slider 502 on which the magnetic head is mounted is 508 higher than the air bearing surface 506 of the flying slider 505.
A slight amount of protrusion is shown.

As shown in FIG. 18, the flying slider 505 is fixed to an actuator arm 512 for positioning the magnetic head on the track of the magnetic disk via a gimbal spring 510 suspension arm 509a and a sunspension spring 509b. ing.

The suspension slider 505 is pressed against the surface of the magnetic disk 513 by the suspension spring 509b via the pivot 511 with a constant spring force. The flying slider 505 rotates about the pivot 511, but this rotation is limited by the gimbal spring 510.

When the magnetic disk 513 turns in the direction shown by the arrow 514, the surrounding air is accompanied by the viscosity of the disk on the surface of the disk and an air flow is generated. Due to this air flow, a dynamic pressure is generated between the surface of the disk 513 and the air bearing surface 506 of the flying slider 505, and a buoyancy force is applied to the flying slider 505 in a direction away from the disk surface. Due to this buoyancy, the flying slider 505 floats above the magnetic disk surface. At this time, the levitation slider has a buoyancy force due to the air flow and the suspension spring 50 described above.
At a position where the pressing force of 9b is balanced, it floats while maintaining a constant flying height. Sliding surface 507 of contact slider 502
The amount of protrusion 508 from which the air protrudes from the air bearing surface 506.
Is set to be larger than the flying height of the flying slider 505, the magnetic disk 513 rotates and the flying slider 505
The magnetic head portion can be pressed against the disk surface even when the disk is floating.

FIG. 19 shows the structure of the contact slider and the supporting member on which the magnetic head is mounted, and the constant method of making the same.

An arrow 516 is formed on the end surface of the silicon substrate 515.
The magnetic head 517 is formed by using the thin film forming technique from the direction. Next, the surface 518 of the magnetic head 517 in contact with the disk is smoothed by polishing to remove the step between the silicon substrate and the magnetic head portion. After that, the silicon substrate 515 is etched, and the hatched portion 519 in the drawing is removed by etching to form the support member 520 that functions as a leaf spring. Support member 52
The spring constant of 0 can be determined by the amount of etching 519. By depositing a metal thin film on the non-etching surface of the supporting member 520 and patterning it,
It is possible to form a wiring pattern for electrical connection to the magnetic head 517. The magnetic head 517 and the supporting member 520 thus created are
As shown in FIG. 17C, it is joined to the mounting portion 504 of the flying slider 505. Although not shown in the drawing, a metal wiring pattern is also formed on the flying slider 502 by the same method as described above. Therefore, if the conductor on the flying slider side and the wiring pattern formed on the supporting member 520 are connected by wire bonding between both terminals, a power supply wiring for the magnetic head can be formed.

FIG. 20 shows the structure of the contact slider and the supporting member on which the magnetic head is mounted, and another example of the manufacturing method thereof. In this example, the thin film forming technique is used on the silinco substrate 521 to move the magnetic head 52 from the direction of the arrow 522.
3 is formed, and thereafter the unnecessary portion 524 of the silicon substrate is removed by etching to form the leaf spring portion 525.

In each of the above examples, the magnetic head is provided on the silicon substrate, but an alumina substrate can be used instead of the silicon substrate.

FIG. 21 shows a structure of a slider portion having a magnetic head mounted thereon and a support member, and still another example of a method for producing the slider member. In this example, a plastic film 526 such as a polyimide film is used as a supporting member, and a magnetic head 528 is formed on the supporting member in the direction of an arrow 527 by a thin film forming technique. The plastic film 526 having such an appropriate thickness does not have to have the etching step for forming the supporting member as in the previous example because the film itself has sufficient flexibility. Further, when the plastic film 526 is used as the supporting member, since the damping rate of the mechanical vibration of the plastic is large, it is possible to obtain the excellent characteristic that the disturbance or the like due to the frictional force generated at the contact portion with the magnetic disk can be suppressed.

A method of recording and reproducing information with the magnetic head in contact with the magnetic disk by mounting the magnetic head on the contact slider is such that the easy axis of magnetization of the magnetic material of the magnetic disk is on the disk surface. The present invention can be applied to a so-called in-plane magnetic recording method that is parallel, and to a so-called perpendicular magnetic recording method in which the easy axis of magnetization of the magnetic material of the magnetic disk is perpendicular to the disk surface. The structure of the magnetic head may be a so-called conventional head structure composed of a recording / reproducing head composed of a magnetic pole and a coil, or a reproducing head composed of a recording head composed of a magnetic pole and a coil and an MR element. A so-called MR head type head configuration may also be used.

In the embodiment shown in FIG. 17, the supporting member 5 for supporting the contact slider 502 having the magnetic head mounted thereon.
No. 01 has a fixed end provided on the tip side (left side of the drawing) of the flying slider 505, and is mounted so that the magnetic head portion 502 is located on the rear end side (right side of the drawing) of the slider 505. However, as shown in FIG. 22, the fixed end 530 of the supporting member 529 may be the rear end side of the flying slider 505, and the magnetic head portion may be attached so as to be located on the tip side of the flying slider 505.

As a method of installing the contact slider, see FIG.
As shown in (a) and (b), a concave portion 533 is provided in a part of the air bearing surface 532 of the flying slider 531 and the contact slider 5 having a magnetic head mounted therein is formed in the concave portion 533.
It is also possible to provide 34.

As another mode of installing the contact slider, there is an example shown in FIGS. 24 (a) and 24 (b). In this example, a fixed end 537 of the support member 536 is provided on the rear end side of the flying slider 535, and one end of the support member 536 is joined to the fixed end 537. In this case, the support member 536
Is attached so that the contact slider 538 having the magnetic head mounted thereon is further behind the rear end of the flying slider 535.

With respect to the mounting position of the contact slider, it is desirable that the contact point with the disk is located in front of the pivot point supporting the flying slider shown in FIG. As a result, the rotational moment about the pivot generated by pressing the magnetic head against the disk surface and the moment about the pivot generated by the frictional force generated in the magnetic head portion can cancel each other. By doing so, it becomes possible to further improve the stability of the flying posture of the flying slider.

The contact slider is pressed against the disk surface by the spring action of the supporting member as described above. Therefore, the magnitude of the load with which the magnetic head mounted on the contact slider is pressed against the disk surface depends on the amount of deformation of the support member. As a result, as shown in FIG. 25, in order to press the contact slider 603 portion against the disk surface 601 with a certain load, it is necessary to change the support member 602 by a predetermined amount. If this amount of deformation increases, the degree of adhesion between the sliding surface 604 of the contact slider and the disk surface decreases, and it becomes difficult to reliably bring the magnetic head into contact with the disk surface. In order to solve this problem, it is preferable to deform the support member 602 in advance as shown in FIG. As a result,
As shown in FIG. 6 (b), when a predetermined load is applied to the contact slider 603, the sliding surface 604 of the contact slider 603.
And the disk surface can be kept parallel to each other, and the adhesion between the sliding surface 604 and the disk can be improved. Support member 602
As means for preliminarily deforming as shown in FIG. 26 (a),
A method of bending the supporting member 602 by vapor-depositing a metal on one surface of the supporting member 602, or the supporting member 60.
It is conceivable to irradiate the laser beam onto the laser beam 2 to cause permanent thermal strain to deform the support member.

Another method for improving the adhesion between the sliding surface of the contact slider and the disk surface when the contact slider is pressed against the disk surface by the deformation of the supporting member is shown in FIG. As shown in FIG. 5, a thin portion 608 may be formed on a part of the support member 607. in this case,
When a load is applied to bring the sliding surface 606 of the contact slider 605 into contact with the disk surface 609, the thin portion 608 is intensively deformed as shown in FIG. 27B. As a result, a mechanism similar to a link using the thin portion 608 as a hinge operates, and the sliding surface 606 and the disk surface 609 can be kept parallel by the action.

In order to surely bring the magnetic head portion mounted on the contact slider into contact with the disk surface, a means shown in FIG. 28 may be used in addition to the above method. In this example,
The sensitive portion 613 of the magnetic head 612 is located at the portion on the contact slider 610 that most strongly contacts the disk surface 611. In FIG. 30, the magnetic head portion 612 is formed on the front edge of the contact slider. However, the magnetic head unit 61
The position 2 is not limited to the front edge of the contact slider 610.

The planar shape of the supporting member having the leaf spring action is not limited to the band shape as described above.
As shown in (a) and (b), it can be triangular. In the figure, 621 is a triangular support member, 622 is a contact slider on which a magnetic head is mounted, 623 is a fixed portion, and 624.
Is a flying slider or a track positioning mechanism.

When a load is applied to the sliding portion of the contact slider 622, the maximum vertical stress acting on the cross section of the supporting member 621 is maximum at the fixed portion 623 and becomes smaller as it approaches the tip. Therefore, when the shape of the support member 621 is a band shape having a uniform width as in the above example, the tip end portion has more strength than necessary against bending.
On the other hand, if the planar shape of the support member 621 is triangular as shown in FIG. 31, the maximum vertical stress acting on the cross section of the support member 621 can be made equal at all positions. Further, since the excess material at the tip portion can be removed, the weight of the support member 621 can be reduced.
Comparing the case where the planar shape of the support member 621 is a strip shape and the case where the support member 621 is a triangle shape, when the design is such that the maximum stress values generated in the mounting portions 623 of both are equal, in the case of a triangle shape, Member 6 against a directional load
The vertical deformation of 21 can be 1.5 times that in the case of a strip. This means that when the position of the contact slider 622 changes in the vertical direction, the change in the load applied to the contact slider 622 is reduced to 2/3. Therefore,
By making the planar shape of the support member 621 triangular,
The effect that the tolerance for the error of the head size and the mounting position can be increased is obtained. On the other hand, when the tip end of the support member 621 is designed to have the same amount of vertical displacement,
In the triangular support member 621, the width of the fixed portion 623 of the support member is set to 1.
It can be made 5 times wider. As a result, the support member 621
When the connection wiring between the magnetic head and the magnetic head is provided, the space for providing the connection terminal of the wiring can be widened. Therefore, there is an advantage that wire bonding or the like for making an electrical connection between the magnetic head and the flying slider 624 can be facilitated.

Further, as shown in FIGS. 30 (a) and 30 (b), the shape of the supporting member having the leaf spring action may be V-shaped. In the figure, 625 is a V-shaped support member, 62
Reference numeral 6 is a contact slider mounted with a magnetic head, 627 is a fixed portion, and 628 is a flying slider or a track positioning mechanism. Assuming that the support members have the same thickness, the V-shaped support member 625 is designed to be more horizontal than when a single strip-shaped support member is used when the support members are designed to have the same rigidity in the vertical direction. The rigidity in the direction becomes high. Therefore,
The advantage that the positioning accuracy in the track direction with respect to the magnetic disk can be improved is obtained.

Although some examples of the shape of the supporting member have been described, the shape of the supporting member is not limited to these examples. In order to optimize the bending rigidity and the torsional rigidity of the support member, it is possible to take a shape other than the above example.

As described above, in this embodiment, the magnetic head having the electromagnetic conversion portion is mounted on the contact slider, and the contact slider is joined to the flying slider via the supporting member, and the spring of the supporting member is joined. The magnetic head and contact slider are pressed against the disk surface by force. Therefore, even when the flying slider is flying above the disk surface, it is possible to record / reproduce signals with the magnetic head in contact with the disk surface and the magnetic head in contact with the magnetic disk.

In the above embodiments, the contact slider having the magnetic head mounted thereon is joined to the flying slider via a supporting member manufactured separately from the contact slider. However, by combining the thin film forming technology and the etching technology, for example, both the supporting member and the contact slider are
It is also possible to form it integrally with the flying slider. 31 (a), (b) and FIG. 32 show an example in which both the contact slider and the support member are formed integrally with the flying slider.

In the example of FIGS. 31 (a) and 31 (b), FIG.
, A magnetic head portion is formed on the silicon substrate 640 by a thin film forming technique, and then unnecessary portions are etched, so that the flying slider portion 641 and the supporting member 641, as shown in FIG. Part 642,
The contact slider portion 643 is formed.

In the example of FIG. 32, a substrate thinner than that in the case of FIGS. 31 (a) and 31 (b) is used. After forming a magnetic head portion on this substrate, etching is performed to form a flying slider portion 644, a supporting member portion 645, and a contact slider portion 646. Then, the flying slider portion 644
To a separately manufactured slider block 647.
In this example, a thin substrate is used, so that FIG.
Compared with the case of (b), there is an advantage that the etching amount is small.

Example 6 In Example 5, a contact slider having a magnetic head mounted thereon was attached to a flying slider via an elastic supporting member, and the magnetic head portion was in contact with the magnetic disk surface. The magnetic disk device for recording and reproducing has been described.

However, as shown in FIG. 33, the contact slider 701 including the magnetic head is attached to the supporting member 70 having elasticity.
It is also possible to adopt a structure in which the magnetic head is directly attached to the track positioning mechanism 703 instead of the flying slider via the magnetic head 2. Also in this case, recording / reproduction can be performed with the magnetic head portion in contact with the magnetic disk surface 704.

The point common to the example shown in FIG. 33 and the example shown in the fifth embodiment is that a contact slider including a magnetic head is supported by a supporting member having elasticity, and this slider is a magnetic disk. Sliding in contact with the surface.

A problem common to these structures is that FIG.
As shown in FIGS. 4 (a) and 4 (b), when the distance h (indicated by 707 in the figure) between the fixed end 705 of the supporting member and the magnetic disk surface 706 changes, the contact with the head mounted The angle θ (708) between the sliding surface of the slider and the magnetic disk surface may change.
If the angle θ changes in this way, good recording characteristics and reproducing characteristics cannot be expected.

In order to solve this problem, therefore, in this embodiment, as shown in FIGS. 35 (a) and 35 (b), a folded structure composed of two parent beams 710 and one child beam 711 is used. The supporting member 709 provided is used. In addition,
The base end of the parent beam 710 is fixed to the fixed end 712, and the tip of the child beam 711 is provided with a contact slider 713 including a magnetic head.

FIGS. 36 (a) and 36 (b) schematically show the operation of the supporting member 709 having this folded beam structure. FIG. 36A shows a case where the distance between the disk surface 714 and the fixed end 712 of the support member 709 is large, and FIG. 36B shows a case where the distance between the disk surface 714 and the fixed end 712 of the support member 709 is small. Is shown.

In the case of FIG. 36A, the deformations of the parent beam 710 and the child beam 711 are small, and the sliding surface 719 of the contact slider 717 is in normal contact with the disk surface 714. On the other hand, in the case of FIG.
The contact slider 713 is pushed up by the disk surface 714 and the parent beam 710 and child beam 711 deform as shown. However, by appropriately selecting the length and bending rigidity of each of the parent beam 710 and the child beam 711, the bending angle of the parent beam 710 and the child beam 711 can be determined.
Therefore, the sliding surface 719 of the contact slider 731 can be normally brought into contact with the disk surface 714 in this case as well. Therefore, even when the distance between the disk surface 714 and the fixed end 712 of the support member 709 changes, the angle θ (0 in this case) formed between the disk surface 714 and the sliding surface 719 of the contact slider is changed. It is possible to keep it constant.

The relationship between the bending angle of the parent beam 710 and the bending angle of the child beam 711 will be described with reference to FIG. One end of the parent beam 710 is bound to the fixed end 712,
The child beam 711 is connected to the other end. Child beam 7
Although not shown in the drawing, a contact slider including a magnetic head is provided at the free end of 11, and a reaction force of pressing the magnetic head against the disk is applied to the free end.

Here, the length of the parent beam 710 is L ₁ ,
The moment of inertia of area I ₁ and Young's modulus are E ₁ , the length of the secondary beam 711 is L ₂ , the moment of inertia of area I _{2 is} Young's modulus E ₂ , and the magnitude of pressing force is W.

The inclination i ₁ of the tip of the parent beam 710 is i ₁ = (WL ₁ ² ) / (2E ₁ I ₁ )-(WL ₁ L ₂ ) depending on the load and moment applied to the tip.
/ (E ₁ I ₁ ) When the relationship between the length of the parent beam 710 and child beams 711 and _{L 2 = L 1/4,} i 1 = a ^{_{(WL 1 2) / (4E}} 1 I 1).

On the other hand, the magnitude i of the tilt of the sub-beam is
₁ becomes i ₂ = WL ₂ ² / 2E ₂ I ₂ = WL ₁ ² / 32E ₂ I ₂ .

[0127] The inclination of the parent beam 710 the magnitude i _1, to offset the slope of the magnitude i ₂ son beam 711, i ₁
= I ₂ is required. Therefore, if i ₁ = i ₂ is set, it can be seen that when the ratio of bending rigidity of the parent beam 710 and the child beam 711 is E ₁ I ₁ / E ₂ I ₂ = 8, the tilts of both beams are offset. . Assuming that the parent beam 710 and the child beam 711 are made of the same material, the relation of the above equation can be written as I ₁ / I ₂ = 8.

[0128] As above conclusions, the relationship between the length of the parent beam 710 the length of (L ₁₎ and the slave beam 711 (L _2),
When L ₁ / I ₂ = 4, the shapes and dimensions of the cross sections of the two are appropriately selected, and the ratio of the geometrical moments of inertia of the two is I
By setting ₁ / I ₂ = 8, the angle θ between the sliding surface 719 of the contact slider 713 and the disk surface 714 can be kept constant regardless of the vertical displacement of the beam.

For example, if the cross-sectional shapes of both beams 710 and 711 are rectangular and the thickness of both beams is the same,
When the width of the parent beam 710 is 8 times the width of the child beam 711, the inclination becomes zero. Although the parent beam 710 is treated as one in the example described with reference to FIG. 37, it is clear that the same relationship can be obtained when the parent beam 710 is divided into two as shown in FIG. is there.

In the above embodiment, the case where the tilt angle of the tip of the child beam 711 does not change even if the distance between the mounting position of the parent beam 710 and the surface 714 of the disk changes. However, by appropriately selecting the length and rigidity of the parent beam 710 and the child beam 711,
The tilt angle of the tip of the child beam 711 can be freely set in accordance with the change in the distance between the mounting position of the parent beam 710 and the disk surface 714.

In the above embodiment, the folding direction of the beams 710 and 711 on the support member 709 is made to coincide with the tangential direction of the disk, so that the contact surface between the sliding surface 719 of the contact slider 713 and the disk surface 714 is The change in the angle θ along the tangential direction of the disk is controlled. But,
The inclination of the contact slider 713 along the radial direction of the disk may be controlled by matching the folding direction of the beams 710 and 711 with the radial direction of the disk. Furthermore, as shown in FIG. 38, a support member 725 is formed by combining a pair of beams 721 and 723 folded back in the tangential direction of the disc and a pair of beams 722 and 724 folded back in the radial direction of the disc. By using it, the inclination of the contact slider 713 in both directions can be controlled. That is, by designing the tilt of the beam 721 and the tilt of the beam 723 to be equal and the tilt of the beam 722 and the tilt of the beam 724 to be equal, the tilt change in the two directions of the contact slider 713 can be offset. it can.

39 to 43 are schematic diagrams showing paths for supplying the sense current I _s to the MR element mounted on the magnetic head.

In FIG. 39, reference numeral 801 denotes a magnetic disk, and 802 denotes an MR element for signal reproduction which is arranged so as to be perpendicular to the surface of the magnetic disk 801. In this example, the return yoke 803, the MR element 802, and the conductive non-magnetic body 8 formed of a conductive soft magnetic material are used.
04-Return yoke 80 made of conductive soft magnetic material
The sense current I _s is supplied through the path of No. 5.

In the example shown in FIG. 40, the return yoke 806, the MR element 807, the conductive non-magnetic material 808, the recording main magnetic pole 809, and the recording-side return yoke 810 formed of a conductive soft magnetic material, The sense current I _s is supplied. In addition, 811 has shown the recording coil.

In the example shown in FIGS. 41 (a) and 41 (b), the return yoke 813 formed of a conductive soft magnetic material, the MR element 814, the conductive nonmagnetic material 815, and the conductive soft magnetic material are used. In the path of the return yoke 816, the sense current I
_s was supplied. 817 also indicates a return yoke.

In the example shown in FIG. 42, a magnetic shield 818 made of a conductive soft magnetic material-a conductive non-magnetic material 819-
The sense current I _s is supplied through the path of the magnetic shield 822 formed of the MR element 820 to the conductive non-magnetic material 821 to the conductive soft magnetic material.

In the example shown in FIG. 43, a magnetic shield 823 formed of a conductive soft magnetic material-a conductive non-magnetic material 824-
The sense current I _s is supplied through the path of the MR element 825 to the conductive non-magnetic material 826 to the magnetic shield 827 formed of a conductive soft magnetic material.

As described above, in any of the examples shown in FIGS. 39 to 43, the sense current I _s is passed through the conductive soft magnetic material such as the magnetic shield or the return yoke which is arranged close to the MR element. Supplied. Therefore, it is not necessary to provide a lead for supplying a sense current in a minute gap between the MR element and the magnetic shield, so that the distance between the MR element and the magnetic shield is reduced and the resolution determined by this distance is improved. It becomes possible. Further, as a result that the distance between the MC element and the magnetic shield can be reduced, the reproduction efficiency can be improved. Further, the heat generated by the MR element is efficiently transmitted to the magnetic shield and the return yoke via the conductive non-magnetic material. Therefore,
A good heat dissipation property can be obtained, and the characteristic change and damage of the MR element due to heat can also be prevented.

Embodiment 7 FIG. 44 schematically shows a main part of a magnetic disk apparatus according to another embodiment of the present invention as a sectional view taken along the direction of relative movement between the magnetic head 901 and the magnetic disk 902. Has been done.

In the figure, 903 is a needle-shaped arm made of ceramics, and the electromagnetic conversion portion of the magnetic head is mounted on the tip thereof. Soft magnetic main poles 904a and 904b made of a CoFe alloy are formed at the tip of the arm 903. The main magnetic poles 904a and 904b extend in a direction perpendicular to the surface of the magnetic disk 902. The main magnetic poles 904a and 904b face each other in the track direction, and a nonmagnetic intermediate layer 905 made of SiO ₂ is interposed between the main magnetic poles 904a and 904b. Main magnetic poles 904a and 904
The thickness of b in the track direction is 0.25 μm,
0.3 μm, and the thickness of the nonmagnetic intermediate layer 905 is 0.0
It is 3 μm. The height of the main magnetic poles 904a and 904b is 0.5 μm.

The main magnetic poles 904a and 904b are provided so that one ends of the main magnetic poles 904a and 904b face the magnetic disk 102. At the other ends of the main magnetic poles 904a and 904b,
The MR element 907 is provided via the insulating layer 906. The MR element 907 has a magnetic disk 902 on its film surface.
Parallel to the surface of the main pole 904
They are arranged so as to be orthogonal to the extending direction of a and 904b, and are magnetically coupled to the main magnetic poles 904a and 904b. 2 at both ends of the MR element 907 in the track width direction.
Copper lead wires 908a and 908b are connected,
The sense current I _s in the track width direction can be passed through the MR element 907 via these copper lead wires. A return magnetic pole 910 made of a CoZr-based amorphous alloy is provided on the MR element 907 via an insulating layer 909 made of AL ₂ O ₃ , and the return magnetic pole 910 is magnetically connected to the main magnetic poles 904a and 904b. Are connected. A recording coil 911 having three turns is wound around the return magnetic pole 910. By supplying a recording current to the recording coil 911, a recording magnetic field is applied to the perpendicular recording layer 912 of the magnetic disk 902 via the return magnetic pole 910 and the main magnetic poles 904a and 904b magnetically coupled to the return magnetic pole 910. The main magnetic poles 904a and 904b are
It is magnetically coupled to the soft magnetic backing layer 913 of the magnetic disk 902. The soft magnetic backing layer 913 improves the recording and reproducing efficiency. The magnetic head 9
Recording and reproduction by 01 are performed with the head 901 and the magnetic disk 902 in contact with each other.

The above embodiment is different from the first embodiment in that the recording coil 911 is wound around the return magnetic pole 910 provided on the main magnetic poles 904a and 904b, not on the main magnetic poles 904a and 904b. As a result, the pair of main magnetic poles 904a and 90a are independent of the size and the number of windings of the recording coil 911.
Since the height of 4b can be reduced, the regeneration efficiency can be improved. From the opposite viewpoint, the size of the recording coil and the number of windings can be increased without raising the pair of main magnetic poles 904a and 904b, so that a stronger recording magnetic field can be applied while maintaining high reproduction efficiency. it can.

Embodiment 8 FIG. 45 schematically shows a main part of a magnetic disk device according to another embodiment of the present invention as a sectional view taken along the direction of relative movement between the magnetic head 901 and the magnetic disk 902. Has been done. Although not shown in the figure, the magnetic head 901
Is formed on the tip of the needle-like arm made of ceramic, as described in the previous embodiment. Further, in the drawing, the insulating layer interposed between the respective members is omitted.

In the figure, at the tip of the needle arm made of ceramic, main magnetic poles 920a, 9 of soft magnetic material made of FeN alloy are formed.
20b is formed. These main magnetic poles 920a, 92
0b extends in a direction perpendicular to the surface of the magnetic disk 902. The main magnetic poles 920a and 920b face each other in the track direction, and the non-magnetic intermediate layer 905 is interposed therebetween. In addition, the main magnetic poles 920a, 9
20b is provided so that one end thereof faces the magnetic disk 902.
Curved as it moves away from 2. The main pole 920a,
At the other end of 920b, an MR placed parallel to the end cotton
The element 923 is provided through the insulating layer 922.
Two copper lead wires 924a and 924b are connected to the upper and lower ends of the MR element 923, and the sense current I _s is made to flow to the MR element 923 via these copper lead wires. The nonmagnetic intermediate layer 921 is formed so that its thickness increases as it approaches the MR element 923. Specifically, the thickness at one end facing the magnetic disk 902 is 0.04 μm, but the MR element 92
The thickness at the other end opposite to 3 is 0.2 μm.

A U-shaped return pole 924 is arranged in parallel with and adjacent to the MR element 923 with an insulating layer interposed. A recording coil 925 is provided so as to be surrounded by the return magnetic pole 924. Of the two arms extending in parallel with the return pole 924, M
The arm facing the R element 924 has main magnetic poles 920a, 9a.
It is magnetically coupled with 20b. As a result, the magnetic disk 9
A recording magnetic field can be efficiently applied to 02. On the other hand, the other arm of the return electrode 924 is magnetically coupled to the soft magnetic backing layer 912 of the magnetic disk 902. As a result, the magnetic flux generated by the recording coil 925 can be efficiently guided.

Also in this embodiment, the same effect as that of the seventh embodiment can be obtained.

Embodiment 9 FIG. 46 shows a planar type magnetic head 930 according to another embodiment of the present invention, which includes the magnetic head and the magnetic disk 902.
It is schematically shown as a cross-sectional view along the relative movement direction with respect to. Note that, in FIG. 48, the insulating layer interposed between each member is omitted.

The planar type magnetic head 93 of this embodiment
0 is manufactured by a thin film process. That is, by using the thin film process, the head substrate 93
1, the return poles 932a, 932b, 93
2c and the recording coil 933 are sequentially formed. continue,
The MR element 934, the insulating layer 935, the main magnetic poles 936a and 936b, and the nonmagnetic intermediate layer 937 are formed through an insulating material.

The planar type magnetic head 903 as described above.
Has the advantage that it can be made significantly thinner by using a thin film process.

Also in this embodiment, the same effect as that of the seventh embodiment can be obtained.

Embodiment 10 FIG. 47 shows a magnetic head 94 according to another embodiment of the present invention.
0 is schematically shown as a cross-sectional view along the relative movement direction of the magnetic head and the magnetic disk 902. In addition, in this figure, the insulating layer interposed between each member is omitted.

The magnetic head 940 of this embodiment has two main magnetic poles 9 formed via a non-magnetic intermediate layer (not shown).
41a and 941b. Two main magnetic poles 941a, 91
One end of 41b is arranged so as to face the magnetic disk 902, and is formed so as to overlap each other only in the vicinity of this one end. An MR element 943 is provided on the other ends of the main magnetic poles 941a and 941b via an insulating layer 924. Furthermore, on the main magnetic poles 941a and 941b,
A J-shaped return pole 94 is provided via an insulating layer (not shown).
4 are arranged. The return magnetic pole 944 is magnetically coupled to the main magnetic poles 941a and 941b, and the recording coil 945 is wound. The number of turns of the recording coil is one.

Also in this embodiment, the same effect as that of the seventh embodiment can be obtained.

Example 11 The magnetic recording / reproducing apparatus of this example is equipped with the same MR head as shown in FIG. Therefore, as described in the first embodiment, by detecting the difference in the amount of magnetic flux passing through the two main magnetic poles 109a and 109b with the MR element 114,
The signal is reproduced.

In addition, the magnetic disk drive of this embodiment includes the reproduction signal processing circuit shown in the block diagram of FIG. In the figure, 1001 is a magnetic disk, 1002 is a recording / reproducing head, 1003 is a recording amplifier, 1004 is a reproducing preamplifier, 1005 is a differentiating circuit, 1006 is a detecting circuit, and 1007 is a precoder. The feature of this processing circuit is that the differentiating circuit 1005 and the precoder 1007 are provided. The differentiating circuit 1005 is a circuit that differentiates the output of the MR head with a time parameter. This differentiating circuit converts the change in the reproducing magnetic flux density interlinking the MR element shown in FIG. 5 into the reproducing voltage signal shown in FIG. The precoder 1007 is a restoration circuit for eliminating interference generated between adjacent bits due to the transfer function G when passing through the reproducing head 1002 and the differentiating circuit 1005. That is, the precoder 1007
Performs processing according to the inverse function G ⁻¹ of the transfer function G.

FIG. 49 shows how data is interfered when input data passes through the recording / reproducing channel, and how data is restored by the precoder. This example shows a data flow when the bit interval (B) and the thickness (Tr) of the pair of main magnetic poles 109a and 109b have the following relationship.

B <Tr <3B The transfer function from the input to passing through the differentiating circuit 1005 is 1 + D + D ² + D ³ , and the transfer function of the precoder 1007 is (1 + D + D ² + D ³ ) ^-1 .

In this example, a precoder 1007 is arranged after the detection circuit 1006. However, in order to prevent error propagation, a precoder may be arranged at the first stage of the recording / reproducing channel, that is, at the beginning of the input.

Embodiment 12 FIG. 50 is a differential MR head similar to that of FIG. 3, and is equipped with a pair of main magnetic poles 1011a and 1011b and an MR element 114 arranged at the upper end thereof. Main pole 10 on the upstream side in the relative movement direction of the head, that is, on the leading side
11a and 1011b are extended by ΔW so that one side end portion thereof exceeds the side end portions of the other main magnetic poles 1011b.
As a result, the width of the main pole 1011b on the trailing side is set to W
Then, the width of the main magnetic pole 1011a is W + ΔW.
The other structure is the same as that of the MR head shown in FIG.

As shown in FIG. 51, the MR head of FIG. 50 is arranged so that its head gap surface is inclined by an angle θ with respect to the track 1012 of the magnetic disk. As a result, the side end of the main pole 1011a is
It extends beyond the side edge of b by ΔW in the direction opposite to the inclination θ. Therefore, when the thickness of the main pole 1011b is Tr1 and the gap length is g, ΔW is preferably (T
By setting r1 + g) tan θ or more, it is possible to ensure that the pair of main magnetic poles pass just above the magnetic transition 1013 to be reproduced. As a result, accurate reproduction can be performed without causing a phase shift and an offset during reproduction.

Example 13 In this example, as in the case shown in FIG. 16, a magnetic head in which an MR head is arranged adjacent to the main pole is used. As shown in FIG. 52, this magnetic head is arranged so that the surface of the MR reproducing head 1014 is inclined by an angle θ with respect to the width direction of the recording track 1016. As shown, the MR head 1014 and the recording head 1015 are arranged so as to be offset in the width direction. At this time, the shift amounts ΔW1 and ΔW2 of the side ends of the MR head 1014 with reference to the both side ends of the recording head are set as follows. <When the relative movement direction of the head is the arrow A in the figure> ΔW1: (g + tr) tan θ or more ΔW2: g · sin θ or more and (g + tr) sin θ
<When the relative movement direction of the head is the arrow B in the figure> ΔW1: g · tan θ or more ΔW2: g · sin θ or more

[0162]

As described above, according to the first aspect of the invention, the recording sensitivity and the reproduction resolution / reproduction sensitivity can be independently controlled, and both high recording ability and reproduction resolution can be achieved. . Further, since the MR element used for reproduction is arranged at the other end of the main magnetic pole located on the side opposite to the magnetic disk via the insulating layer, the MR element is used even when the magnetic head is in contact with the magnetic disk. The element does not wear, and the sense current flowing through the MR element does not leak even if the magnetic disk is conductive. Furthermore, since the end surface of the main pole and the film surface of the MR element are parallel to each other, even when a large recording magnetic field is applied during recording, a magnetic field is applied in the direction normal to the film surface of the MR element. Therefore, the magnetic domain of the MR element is not disturbed.

According to the invention of claim 2, the film thickness Tm of the MR element, the gap g between the MR element and the soft magnetic film for the recording head or the soft magnetic film for the magnetic shield, and the shortest recording wavelength λmin. Since Tm <λmin <Tm + g, the signal can be reproduced with high resolution.

According to the ninth aspect of the invention, recording / reproducing can be performed with the magnetic head being in stable contact with the magnetic disk.

According to the tenth aspect of the invention, recording / reproducing can be performed in a state where the tilt angle of the slider with respect to the magnetic disk surface is always kept constant.

[Brief description of drawings]

FIG. 1 is a partial cross-sectional perspective view of a magnetic disk device according to a first embodiment of the present invention.

FIG. 2 is a schematic cross-sectional view of a main part of the device.

FIG. 3 is a schematic perspective view of a magnetic head incorporated in the apparatus.

FIG. 4 is a diagram showing a recording magnetic field distribution of the magnetic head.

FIG. 5 is a diagram showing a change in magnetic flux in an MR element in the magnetic head.

FIG. 6 is a reproduction signal waveform diagram of the magnetic head.

FIG. 7 is a reproduction signal waveform diagram of the magnetic head.

FIG. 8 is a reproduction signal waveform diagram of the magnetic head.

FIG. 9 is a diagram showing a relationship between the inclination of zero cross and the thickness of the main pole in the magnetic head.

FIG. 10 is a reproduction signal waveform diagram when the main magnetic pole in the magnetic head is thickened.

FIG. 11 is a diagram showing the relationship between the zero-cross slope and the thickness of the non-magnetic intermediate layer in the same magnetic head.

FIG. 12 is a schematic sectional view showing an essential part of a magnetic disk device according to a second embodiment of the invention.

FIG. 13 is a schematic sectional view showing an essential part of a magnetic disk device according to a third embodiment of the invention.

FIG. 14 is a diagram showing a relationship between a reproduction signal pulse width and a head-medium spacing in the apparatus.

FIG. 15 is a diagram showing the relationship between the reproduction signal pulse width and the thickness of the recording main pole in the same device.

FIG. 16 is a schematic sectional view showing an essential part of a magnetic disk device according to a fourth embodiment of the present invention.

FIG. 17 is a side view, a front view, and a partially enlarged sectional view of a slider head incorporated in a magnetic disk device according to a fifth embodiment of the invention.

FIG. 18 is a side view showing a support structure of a slider.

FIG. 19 is a diagram for explaining an example of a method of manufacturing a slider on which a magnetic head is mounted.

FIG. 20 is a view for explaining another example of a method for manufacturing a slider on which a magnetic head is mounted.

FIG. 21 is a view for explaining still another example of a method for manufacturing a slider on which a magnetic head is mounted.

FIG. 22 is a side view showing another example of a combination of a slider, a slider and a magnetic head.

FIG. 23 is a front view and a side view showing still another example of a combination of a slider, a slider, and a magnetic head.

24A and 24B are a front view and a side view showing still another example of a combination of a slider, a slider, and a magnetic head.

FIG. 25 is a conceptual diagram showing a contact state between the magnetic head portion at the tip of the slider and the disk surface.

FIG. 26 is a conceptual diagram showing a method of improving the contact state between the magnetic head portion at the tip of the slider and the disk surface and the effect.

FIG. 27 is a conceptual diagram showing another improvement method and effect of the contact state between the magnetic head portion at the tip of the slider and the disk surface.

FIG. 28 is a conceptual diagram showing another method for improving the contact state between the magnetic head portion of the tip of the slider and the disk surface.

FIG. 29 is a diagram showing another example of the slider on which the magnetic head is mounted.

FIG. 30 is a diagram showing yet another example of a slider on which a magnetic head is mounted.

FIG. 31 is a view for explaining another example of the method of manufacturing the flying slider, the elastic body, and the slider.

FIG. 32 is a view for explaining still another example of the method of manufacturing the flying slider, the elastic body, and the slider.

FIG. 33 is a view for explaining a problem of a method of bringing a magnetic head mounted on a slider into contact with the surface of a magnetic disk.

FIG. 34 is a view for explaining a problem of a system in which a magnetic head having a slider mounted thereon is brought into contact with the surface of a magnetic disk.

FIG. 35 is a view showing the periphery of a magnetic head incorporated in a magnetic disk device according to a sixth embodiment of the present invention.

FIG. 36 is a view for explaining the operation of the embodiment.

FIG. 37 is a view for explaining the operation principle of the embodiment.

38 is a plan view showing another example of a support having a folded beam, FIG.

FIG. 39 is a schematic diagram showing a first example of a path for supplying a sense current to an MR element.

FIG. 40 is a schematic diagram showing a second example of a path for supplying a sense current to an MR element.

FIG. 41 is a diagram showing a third example of a path for supplying a sense current to an MR element.

FIG. 42 is a schematic diagram showing a fourth example of a path for supplying a sense current to an MR element.

FIG. 43 is a schematic diagram showing a fifth example of a path for supplying a sense current to an MR element.

FIG. 44 is a schematic diagram schematically showing a main part of a magnetic disk device according to another embodiment of the present invention.

FIG. 45 is a diagram for explaining the eighth embodiment of the present invention.

FIG. 46 is a diagram for explaining the ninth embodiment of the present invention.

FIG. 47 is a diagram for explaining the tenth embodiment of the present invention.

FIG. 48 is a diagram for explaining Example 11 of the invention.

FIG. 49 is a diagram for explaining Example 11 of the invention.

FIG. 50 is a diagram for explaining the twelfth embodiment of the present invention.

FIG. 51 is a diagram for explaining the twelfth embodiment of the present invention.

FIG. 52 is a diagram for explaining Example 13 of the present invention.

FIG. 53 is a diagram for explaining a conventional example.

FIG. 54 is a view for explaining a conventional example.

[Explanation of symbols]

101, 222, 301, 423, 502 ... Magnetic head 102, 216, 302, 418, 531, 801 ... Magnetic disk 103, 223, 303, 424, 512 ... Arm 104 ... Track 105, 217, 305, 419 ... Glass substrate 106, 218, 306, 420 ... Soft magnetic backing layer 107, 220, 307, 421 ... Magnetic recording layer 110 with perpendicular magnetization anisotropy 110, 225 ... Non-magnetic intermediate layer 108, 221, 308, 412 ... Protective film 109a, 109b , 224a, 224b, 315, 4
25 ... Main magnetic pole 112, 226, 316, 427 ... Coil 114, 232, 311, 428, 802, 807, 8
14, 820, 825 ... Magnetoresistive effect element (MR element) 115a, 115b, 233a, 233b ... Copper lead 309, 313 ... Magnetic shield film 534, 536, 605, 610, 643, 646, 7
01, 713 ... Slider 641, 644 ... Slider 501, 602, 621, 625, 642, 645, 7
02,709 ... Support member 710 ... Parent beam 711 ... Child beam 803, 805, 806, 810, 813, 816, 8
17, ... Return yoke 804, 808, 815, 821, 826, ... Conductive non-magnetic material 818, 822, 823, 827 ... Magnetic shield

Front page continued (72) Inventor Yasuro Otsubo 1 Komukai Toshiba-cho, Sachi-ku, Kawasaki-shi, Kanagawa Toshiba Research and Development Center, Inc. (72) Inventor Shigeru Hoshina Komu-shi Toshiba-cho, Kawasaki-shi, Kanagawa Incorporated company Toshiba Research and Development Center (72) Inventor Hiroshi Ohashi 2-9 Suehiro-cho, Ome-shi, Tokyo Incorporated Toshiba Ome factory

Claims (10)

[Claims] 1. A perpendicular magnetic recording type magnetic disk comprising a magnetic recording layer having perpendicular magnetic anisotropy provided on a soft magnetic backing layer, and a magnetic head for recording and reading information on and from the magnetic disk. In the magnetic disk device comprising: a magnetic head, each of the magnetic heads is formed of a high magnetic permeability material, and a pair of main magnetic poles are arranged between the main magnetic poles, each main magnetic pole having one end located on the magnetic disk side. A non-magnetic intermediate layer, a recording coil that passes the generated magnetic flux to the magnetic disk through the main magnetic pole, an insulating layer at the other end of the pair of main magnetic poles, and a magnetic field between the pair of main magnetic poles. A magnetic disk device comprising a magnetoresistive effect element arranged in a coupling relationship with the magnetic disk. 2. A perpendicular magnetic recording type magnetic disk comprising a magnetic recording layer having perpendicular magnetic anisotropy provided on a soft magnetic backing layer, and a magnetic head for recording and reading information on this magnetic disk. In the magnetic disk device comprising the magnetic head, the magnetic head comprises a reproducing magnetoresistive effect element arranged in the vicinity of a recording soft magnetic material or a magnetic shield soft magnetic film, and a film thickness of the magnetoresistive effect element. To T
where m is the distance between the magnetoresistive element and the soft magnetic material for recording or the soft magnetic film for magnetic shield, and the shortest recording wavelength is λmin, Tm <λmin <Tm + g
And the magnetization recording layer of the magnetic disk is composed of magnetic crystal grains having an average diameter smaller than the film thickness Tm of the magnetoresistive effect element. 3. The magnetic disk comprises a soft magnetic backing layer and a magnetic recording layer laminated thereon, the saturation magnetic flux density of the soft magnetic backing layer is Bsb, the film thickness is db, and the magnetic recording layer is a magnetic recording layer. When the film thickness is dr and the saturation magnetization is Isr, Bsb
2. The relation of db> Isr.dr is satisfied.
Alternatively, the magnetic disk drive described in 2. 4. The magnetic head is a perpendicular magnetic recording head having a recording main magnetic pole, and the magnetic disk has a soft magnetic backing layer and a magnetic recording layer laminated thereon. Is Tr and the distance between the tip of the main pole and the magnetization recording layer is dsw + dp, 2
3. The magnetic disk device according to claim 1, wherein (dsw + dp) <Tr is satisfied. 5. The magnetic disk drive according to claim 1, further comprising means for forming a non-signal area in which substantially no effective signal exists between the recording tracks on the magnetic disk. . 6. When the width of the recording track on the magnetic disk is Tw, the track pitch of the recording track is Tp, and the width of the non-signal area is G, the condition of G> Tp-Tw is satisfied. The magnetic disk drive according to claim 5, which is characterized in that. 7. The magnetic head is mounted on a contact slider so as to come into contact with the surface of the magnetic disk by a spring force of a supporting member having a spring property, and the contact slider is included in a positioning mechanism of the magnetic head. 3. The magnetic disk drive according to claim 1, wherein the magnetic disk drive is connected to an appropriate fixed end. 8. The support member includes a first beam extending from the fixed end in one direction and a second beam extending from the tip of the first beam in a direction opposite to the first beam. 8. The magnetic disk drive according to claim 7, wherein the magnetic slider has a folded structure including the contact slider, and the contact slider is provided at the tip of the second beam. 9. A magnetic disk, a magnetic head for recording and reading information on and from the magnetic disk, and air generated between the magnetic disk for supporting the magnetic head and accompanying the rotation of the magnetic disk. In a magnetic disk device including a slider that floats while maintaining a height at which the levitation force due to the dynamic pressure action and the pressing load applied from the outside are balanced, the magnetic head is provided with a slider having a spring property. The magnetic head is in contact with the disk surface by the spring force of the slider even when the slider is supported by the slider and is floating above the disk surface, and in this state, the pressing load applied to the slider is applied. The magnetic disk device is characterized in that the slider bears most of the above and the rest bears the rest of the load. 10. A magnetic disk, a magnetic head for recording and reading information on and from the magnetic disk, and a slider for supporting the magnetic head, the magnetic head contacting the surface of the magnetic disk. Recording information in the state
A magnetic disk device for reproducing, comprising an elastic body having a folded structure for connecting the slider to a flying slider or a head positioning mechanism.