JPH0714907A - Portable closed container - Google Patents

Abstract

PURPOSE:To provide a closed container wherein dust, etc., generated inside a lid is prevented from entering a container body. CONSTITUTION:A portable closed container is provided with a container body 10 and a lid 20 which can airtightly close an opening part of the container body. The lid 20 is fixed to the container body 10 by a latch rod 24 which carries out fitting and removal by moving forward and backward from the side of the lid 20 to the container body 10. In such a portable closed container, a seal mechanism is interposed between a window 23 for moving the latch rod forward and backward formed in the lid 20 and the latch rod 24.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a portable sealed container used in a system for manufacturing semiconductor wafers, liquid crystal display boards, reticles and disks.

[0002]

2. Description of the Related Art FIG. 7 shows an example of this type of system. Reference numeral 1 is a surface treatment apparatus having a surface treatment furnace for surface treatment of semiconductor wafers, 2 is a wafer inspection apparatus, and 3 is self-propelled. Type transfer robot, 4 a wafer storage, 5 a wafer cleaning device, 6 a stacker crane, 7 a linear motor type transfer device, 8 a wafer cassette 9 (FIG. It is a portable sealed container that stores the above).

The transfer and storage of the wafer cassette 9 in the system (clean room) is performed by storing the wafer cassette 9 in the closed container 8 (shown in FIG. 8) in order to prevent dust from adhering to the semiconductor wafer. .

In FIGS. 7 to 9, reference numeral 8 is a bottom lid type portable closed container, and W is a wafer. Reference numeral 10 is a container body of the closed container 8, and a flange 13 is formed in the opening 12. Reference numeral 20 denotes a hollow bottom lid, the upper surface of which serves as a cassette mounting portion 21, and a locking / unlocking mechanism as shown in FIG. From the latch rod advancing / retreating window 23, a rod (in this example, a plate-shaped latch rod) 24 is advanced / retreated into a recess 14 formed in the inner peripheral surface of the flange 13 of the container body 10 to be locked / unlocked. When the bottom lid 20 is locked, the bottom lid 20 is pressed against the bottom of the flange 13 via the sealing material 15 to hermetically shut off the inside of the container body 10 from the outside air. 16 is a handle. A flat leg portion 21B is formed around the bottom of the bottom lid 20.

In FIG. 10, a plate-like latch bar 24 has a rolling element 24a, and is supported by a cantilever so that it can be moved forward and backward in the longitudinal direction and can be tilted. Reference numeral 25 is a cam (shown in an enlarged perspective view in FIG. 13) having a cam surface 25a on which the rolling elements 24a roll, 26 is a fulcrum member, and 27 is a spring. Cam shaft 28
Extends from the center of the upper wall of the lifting table 31 described later into the bottom lid 20, and when the bottom lid 20 is concentrically placed on the lifting table 31,
Spline engagement with the cam 25. Elevating table 31 is camshaft 2
It incorporates a camshaft drive mechanism 29 that rotates 8 by a predetermined angle.

[0006] FIG. 10 shows the locked state,
11 and 12 are enlarged views of the locked state and the unlocked state, respectively.

Conventionally, particle contamination of the wafer W has been a problem, but as the density of semiconductor integrated circuits has increased, a natural oxide film on the wafer surface due to oxygen in the air or an organic gas in the air has been generated. The influence begins to become a problem, and in order to prevent the growth of the natural oxide film and the organic gas contamination, it is necessary to move, transfer, and process the wafer W in an inert gas (N ₂ gas, dry air) atmosphere. At present, an N ₂ gas atmosphere in which the concentration of O ₂ or H ₂ O or both of them is 10 ppm or less is required.

Therefore, the surface treatment apparatus 1 and the wafer storage 4 are
In addition, as shown in FIG. 14, a gas purging mechanism (gas purging station) is provided to meet the above request.

In FIG. 14, 1A is a port provided at a proper position on the wall of the main body case of the surface treatment apparatus 1, 30 is an elevating device, 31 is an elevating table of the elevating device 30, and an opening 32 of the port 1A. Also serves as a port door that airtightly closes. 33 is a sealing material. Reference numeral 34 denotes an air supply passage formed in the port 1A, one end of which is opened to the inner peripheral surface of the opening 32, and the other end of which is connected to an inert gas cylinder (not shown) through a pipe passage 35. Reference numeral 36 is an exhaust passage formed in the port 1A, one end of which is opened to the inner peripheral surface of the opening 32,
The other end is connected to a pipe line 37 extending outside the surface treatment apparatus 1. 38 and 39 are opening / closing valves.

[0010]

The bottom lid 20 of the above-mentioned closed container 8 is a hollow body having the internal space A, and communicates with the inside of the container body 10 through the window 23 through which the latch rod 24 moves forward and backward. During the above gas purging of the container 8,
Although it is an extremely small amount, dust existing in the bottom cover 20, for example, dust generated from driving parts such as rolling elements and cams which are engaged with each other, moves into the container body 10 to prevent particle contamination. There was a problem of causing it.

The present invention has been made to solve this problem, and an object of the present invention is to provide a closed container capable of preventing dust and the like generated inside the lid from entering the container body.

[0012]

In order to achieve the above object, the present invention provides a container main body and a lid capable of airtightly closing an opening of the container main body. In a portable closed container in which the lid is fixed to the container body by a latch rod that advances and retracts to and from the container body, a seal is provided between the latch rod advancing / retreating window formed on the lid and the latch rod. The mechanism is interposed.

According to a second aspect of the present invention, the sealing mechanism comprises a bellows body mounted over the latch rod advancing / retreating window and the latch rod.

In the third aspect, when the bellows body is provided, the lid is provided with a window with a filter.

According to a fourth aspect of the present invention, the sealing mechanism includes a bag-like member having a hole for covering the latch rod advancing / retreating window from the inside of the lid and allowing the latch rod to freely penetrate, and the hole is airtight when fixed to the latch rod. The valve-shaped member is closed.

[0016]

In the present invention, the inner side and the outer side (container body side) of the window for advancing and retracting the latch rod of the lid are shut off by the sealing mechanism.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

In FIGS. 1, 2 and 3, reference numeral 50 denotes a bellows body, and as shown in FIG. 4, it has a square tube portion 50A with a flange 50a at one end side, and this flange a is formed in the window 23. Bellows portion 50 that is fitted to the tubular fitting portion 23a formed on the four sides and fixed to the bottom lid 20 and is continuous with the rectangular tubular portion 50A.
The edge portion 50C of B is externally fitted and fixed to the latch rod 24,
The window 23 is closed by the bellows body 50. Reference numeral 51 is a breathing window formed on the bottom lid 20, and is covered with a high-performance filter 52. This breathing window 51 has a latch bar 23.
It is provided so that the inside of the bottom lid 20 can breathe when moving forward and backward.

In this embodiment, since the bellows body 50 constantly hermetically shields the inner side and the outer side of the window 23 of the bottom lid 20, dust and the like generated in the bottom lid 20 is kept. There is no fear of moving in.

FIGS. 5 and 6 show another embodiment of the present invention. Reference numeral 60 denotes a bag-like member for covering the window 23 from the inside of the bottom cover. In this embodiment, an elastic member such as rubber is used. Becomes, bottom lid 20
A hole 61 is formed on the bottom wall 60B side which is fixed to the inside of the window 23 and faces the opening 60A fitted to the inner periphery of the window 23. The hole 61 has a size that allows the latch rod 24 to freely penetrate therethrough, and the inner peripheral surface portion thereof is formed into a tapered surface to form a seat 61A on which the valve member 62 is seated. Valve member 6
2 is externally fitted and fixed at a position at a predetermined distance from the tip of the latch rod 24.

In this embodiment, when the bottom cover 20 is closed, that is, when the latch bar 23 is engaged with the hole of the bottom cover 20, as shown in FIG. 61, window 2
3 communicates with the inside of the container body 10 through the bottom cover 20.
6 is opened, that is, when the latch rod 23 is retracted, the valve member 62 is seated on the seat 61A of the hole 61, as shown in FIG.
The inside of the bottom lid 20 is airtightly shut off from the outside.

Therefore, even if the bottom cover 20 is opened and the gas purge is performed, there is no possibility that dust and the like generated in the bottom cover 20 will move into the container body 10.

[0023]

As described above, according to the present invention, since the sealing mechanism is interposed between the latch rod advancing / retreating window formed in the lid and the latch rod, even if dust is generated inside the lid. The dust does not move into the container body, and particle contamination can be completely prevented.

[Brief description of drawings]

FIG. 1 is a vertical cross-sectional view showing an essential part of a first embodiment of the present invention when a bottom lid is opened.

FIG. 2 is a vertical cross-sectional view showing a main part of the first embodiment of the present invention when the bottom cover is closed.

FIG. 3 is a partial view showing a side wall of a bottom lid in the above embodiment.

FIG. 4 is a perspective view showing a bellows body in the above embodiment.

FIG. 5 is a vertical cross-sectional view showing an essential part of a second embodiment of the present invention when the bottom lid is opened.

FIG. 6 is a vertical cross-sectional view showing a main part of a second embodiment of the present invention when the bottom lid is closed.

FIG. 7 is a diagram showing an example of a semiconductor manufacturing system.

FIG. 8 is an external view of a conventional portable closed container.

FIG. 9 is a vertical cross section of a conventional portable closed container.

FIG. 10 is a view for explaining a conventional locking / unlocking mechanism of a portable airtight container.

FIG. 11 is a vertical cross-sectional view showing an essential part of the conventional example when the bottom lid is opened.

FIG. 12 is a vertical cross-sectional view showing a main part of the conventional example when the bottom cover is closed.

FIG. 13 is a diagram showing a cam surface of a cam of the locking / unlocking mechanism.

FIG. 14 is a view for explaining a gas purging mechanism of a conventional portable closed container.

[Explanation of symbols]

 8 Transportable closed container 10 Container body 20 Bottom lid 23 Latch rod advancing / retreating window 24 Latch rod 50 Bellows body 51 Filter 52 window 60 Bag-like body 61 Hole 61A Seat 62 Valve-like body

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiya Morita 100 Takegahana-cho, Ise-shi, Mie Shinko Electric Co., Ltd.Ise Works (72) Inventor Kono, etc. 100 Takegahana-cho, Ise-shi, Mie Shinko Electric Co., Ltd. Ise Inside the factory

Claims (4)

[Claims] 1. A container main body and a lid capable of airtightly closing an opening of the container main body, and the lid is closed by a latch rod that advances and retracts from the lid side to the container main body to engage and disengage. A portable closed container fixed to a main body, wherein a sealing mechanism is interposed between the latch rod advancing / retreating window formed in the lid and the latch rod. 2. The portable sealed container according to claim 1, wherein the sealing mechanism is a bellows body mounted over the latch rod advancing / retreating window and the latch rod. 3. The portable closed container according to claim 2, wherein the lid is provided with a window with a filter. 4. The bag-shaped body, wherein the sealing mechanism covers the latch rod advancing / retreating window from the inside of the lid, and has a hole through which the latch rod extends.
The portable sealed container according to claim 1, comprising a valve member fixed to the latch rod and airtightly closing the hole when retracted.