JPH068423A - Ink jet recording head - Google Patents
Ink jet recording headInfo
- Publication number
- JPH068423A JPH068423A JP16603892A JP16603892A JPH068423A JP H068423 A JPH068423 A JP H068423A JP 16603892 A JP16603892 A JP 16603892A JP 16603892 A JP16603892 A JP 16603892A JP H068423 A JPH068423 A JP H068423A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- fixing plate
- recording head
- jet recording
- ink jet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は液滴の吐出によって記録
を行うインクジェット記録の構成に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of ink jet recording for recording by ejecting droplets.
【０００２】[0002]
【従来の技術】圧電素子の長手方向変位を利用してその
変位方向に圧力室壁を変位させて圧力室内のインクを加
圧し該圧力室に連通するノズルよりインク滴を噴射する
インクジェット記録ヘッドは特公平２−５２６２５に示
されている。その構造の概略は第８図に示す様にインク
吐出口１０１を有するノズルプレート１０２を接合した
流路基板１０３に圧力壁を形成する圧力プレート１０４
を接合し各圧力室に位置する部分に圧力素子１０５の長
手方向先端に配設された脚部１０６を第８図に示す様に
粘弾性部材１０７で連結される。更に圧電素子は１素子
ずつ固定板１０８によって位置決めされ接合され更にそ
の上の回路基板１０９により電気的配線がなされてい
る。この構造により圧力壁１０４と圧電素子１０５との
信頼性があり量産の容易な結合構造を与えることを目的
とするものであった。2. Description of the Related Art An ink jet recording head which utilizes a longitudinal displacement of a piezoelectric element to displace a pressure chamber wall in the displacement direction to pressurize ink in the pressure chamber and eject ink droplets from nozzles communicating with the pressure chamber. It is shown in Japanese Patent Publication No. 2-52625. The structure is outlined as shown in FIG. 8. A pressure plate 104 forming a pressure wall on a flow path substrate 103 to which a nozzle plate 102 having an ink ejection port 101 is joined.
The leg portion 106 disposed at the distal end in the longitudinal direction of the pressure element 105 is joined to the portion of the pressure element 105 which is joined to each other by viscoelastic members 107 as shown in FIG. Further, the piezoelectric elements are positioned and bonded one by one by the fixing plate 108, and the circuit board 109 on the piezoelectric elements electrically connects them. The purpose of this structure is to provide a coupling structure in which the pressure wall 104 and the piezoelectric element 105 are reliable and can be easily mass-produced.
【０００３】しかし、前記の構造においては、圧電素子
が１素子ずつ固定板に接合される構造の為に、その接合
にかかる手間が大きいという問題点を有する。又、１素
子ずつ接合する為にに接合時の接合圧力のバラツキによ
り圧力壁にかかる予圧も各々バラツキをもつことにな
り、従って圧力壁にかかる応力、たわみ量もバラツく為
にヘッドの吐出特性に影響を与えることになる。更に固
定板には１本づつの圧電素子に対応した位置決め溝を精
度よく作る必要があり圧電素子の数が増える程その精度
管理は大変なものとなる他、固定板製造の歩留も落ちて
くるので量産の容易な構造とは言いがたい。そして、固
定板と圧電素子の組立時にも一本一本の圧電素子を組つ
ける為その取付ガタのバラツキにより取付位置精度がず
れる為、流路基板の圧力壁との接合位置精度が悪くなる
という問題点を有することがわかった。However, in the above-mentioned structure, since the piezoelectric elements are bonded to the fixing plate one by one, there is a problem that the bonding work is troublesome. In addition, since the elements are joined one by one, the preload applied to the pressure wall also varies due to the variation of the joining pressure at the time of joining. Therefore, the stress applied to the pressure wall and the amount of deflection also vary, and the ejection characteristics of the head are also varied. Will be affected. Furthermore, it is necessary to accurately form the positioning groove corresponding to each piezoelectric element on the fixing plate. As the number of piezoelectric elements increases, the accuracy control becomes more difficult, and the yield of manufacturing the fixing plate decreases. Therefore, it is difficult to say that the structure is easy for mass production. Further, even when assembling the fixing plate and the piezoelectric element, the piezoelectric elements are assembled one by one, so that the mounting position accuracy is deviated due to the variation of the mounting backlash, and the accuracy of the bonding position with the pressure wall of the flow path substrate is deteriorated. It turned out to have problems.
【０００４】[0004]
【発明が解決しようとする課題】本発明はかかる問題点
に鑑みなされたものであり、その目的とするところは、
圧電素子と固定板との接合を容易かつ、精度のあるもの
にならしめ、ヘッドのノズル密度を向上しても安定でバ
ラツキが少なく信頼性の高い上記圧電素子と固定板の接
合ができる構造体を提供し最終的には安定した吐出特性
と信頼性のあるインクジェット記録ヘッドを提供するこ
とにある。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and its object is to:
Structure that makes it possible to bond the piezoelectric element and the fixing plate easily and with accuracy, and to bond the piezoelectric element and the fixing plate with high stability and with little variation even if the nozzle density of the head is improved. And finally to provide an inkjet recording head with stable ejection characteristics and reliability.
【０００５】[0005]
【課題を解決するための手段】そこで本発明では、圧電
素子をセラミック等からなる保持基板に接合後、１本ず
つの振動子形状になる様に、かつ保持基板により圧電素
子アレイを一体保持できる様に加工を行ない圧電素子ユ
ニットとする。そして前記圧電素子ユニットを保持させ
る固定板に取りつけることにより圧電素子を１本１本固
定板に接合しなくてもよい構造とさせる。更に圧電素子
列の両最外側には変位をさせないダミーの圧電素子を同
時に形成し、これと固定板の位置決め溝とを係合させる
ことにより圧電素子ユニット全体の位置精度を向上させ
る。前記の固定板の容易かつ量産性をもたせた製法とし
て樹脂あるいは、樹脂と無機フィラーとの複合物の成形
体として供給する。Therefore, in the present invention, after the piezoelectric element is bonded to the holding substrate made of ceramic or the like, the piezoelectric element array can be integrally held by the holding substrate so that each piezoelectric element has a vibrator shape. Similarly, the piezoelectric element unit is processed. Then, by mounting the piezoelectric element unit on a fixing plate that holds the piezoelectric element unit, each piezoelectric element does not have to be joined to the fixing plate one by one. Further, dummy piezoelectric elements that do not displace are simultaneously formed on both outermost sides of the piezoelectric element array, and the positioning accuracy of the entire piezoelectric element unit is improved by engaging this with the positioning groove of the fixing plate. The fixing plate is supplied as a molded product of a resin or a composite of a resin and an inorganic filler, as a manufacturing method that allows the fixing plate to be easily and mass-produced.
【０００６】[0006]
【実施例】図１は本発明の実施例を説明する為のインク
ジェット記録ヘッドの概略構成を表わす断面図である。
又、図２は図１の記録ヘッドのＡ−Ａ’断面矢視図。以
下この図を用いて記録ヘッドの概略構成を説明する。FIG. 1 is a sectional view showing a schematic structure of an ink jet recording head for explaining an embodiment of the present invention.
2 is a sectional view of the recording head of FIG. The schematic structure of the recording head will be described below with reference to this drawing.
【０００７】積層型圧電素子１は、スパッタやめっきに
より表面に電極を構成したセラミック基板あるいはガラ
スエポキシ銅張積層板等により形成された保持基板２に
接着剤により接合された後、図６に示すように所定の巾
ｗにダイシング等により切断される。断面は同時に保持
基板２も一定の深さまで溝を形成させることにより電極
パターン２ａが形成されている。従ってダイシング加工
後の圧電素子はバラバラになることとなく複数の圧電素
子の集合体として１つのユニットを形成でき、ユニット
内の圧電素子の位置精度は高精度に保たれることにな
る。電極パターンには圧電素子１を駆動する為の信号線
ケーブルが接続されている。又、圧電素子１と保持基板
２は共通電極をとる接続線１１で電気的導通がとられて
いる。圧電素子は以上の信号形態がとれる様に所定の電
極構造をとっている。以上の工程を経て得られた圧電素
子の部品ユニットを以下圧電素子ユニットと記すること
とする。圧電素子ユニットは樹脂材料で形成された固定
板３に固定されている。ここまでの工程により製造され
たユニットを以下駆動部と記することとする。駆動部の
圧電素子先端側にはインク流路ユニット１２が接合部４
を介して接合される。インク流路ユニット１２はノズル
部１０を有するノズルプレート７、圧力室８、圧力室８
からノズル１０に連通する連通孔９、インク供給溜１
３、上記部分を構成する為の肉部６、圧力室８に圧力を
付加する為の圧力壁５ａ、５ｂから成っている。圧力壁
５ａは圧電素子１と接合部材４ａで接合され、５ａの部
分はまわりの５ｂの部分より厚さが厚くなる様に突記状
に形成されている。この圧力壁を構成する部品を第７図
に示す。５ｂの部分は圧電素子の変位を受けて梁状にた
わむことができる。圧力壁５ａ、５ｂは圧力プレート５
に包含され、圧力プレート５は固定板３とも接合部材４
で接合されている。接合部材４、４ａとしてはエポキシ
接着剤等の使用が可能である。The laminated piezoelectric element 1 is shown in FIG. 6 after being bonded by an adhesive to a ceramic substrate having electrodes on the surface by sputtering or plating or a holding substrate 2 formed of a glass epoxy copper clad laminated plate or the like. Thus, it is cut into a predetermined width w by dicing or the like. At the same time, the electrode pattern 2a is formed by forming grooves on the holding substrate 2 to a certain depth in the cross section. Therefore, one unit can be formed as an aggregate of a plurality of piezoelectric elements without the piezoelectric elements after the dicing process becoming disjointed, and the positional accuracy of the piezoelectric elements in the unit can be maintained with high accuracy. A signal line cable for driving the piezoelectric element 1 is connected to the electrode pattern. In addition, the piezoelectric element 1 and the holding substrate 2 are electrically connected to each other by a connection line 11 that serves as a common electrode. The piezoelectric element has a predetermined electrode structure so that the above signal form can be obtained. The component unit of the piezoelectric element obtained through the above steps will be referred to as a piezoelectric element unit below. The piezoelectric element unit is fixed to a fixing plate 3 made of a resin material. The unit manufactured by the steps up to this point will be referred to as a drive unit hereinafter. The ink flow path unit 12 is provided on the tip side of the piezoelectric element of the drive section and the joining section 4 is formed.
Are joined through. The ink flow path unit 12 includes a nozzle plate 7 having a nozzle portion 10, a pressure chamber 8, and a pressure chamber 8.
Communication hole 9 communicating with the nozzle 10 from the ink supply reservoir 1
3, a wall portion 6 for constituting the above portion, and pressure walls 5a, 5b for applying pressure to the pressure chamber 8. The pressure wall 5a is joined to the piezoelectric element 1 by the joining member 4a, and is formed in a protruding shape so that the portion 5a is thicker than the surrounding portion 5b. The components that make up this pressure wall are shown in FIG. The portion 5b can be bent like a beam due to the displacement of the piezoelectric element. The pressure walls 5a and 5b are pressure plates 5
The pressure plate 5 is fixed to the fixing plate 3 and the joining member 4 is included.
Are joined together. An epoxy adhesive or the like can be used as the joining members 4 and 4a.
【０００８】次にこのインクジェット記録ヘッドの構成
を用いて本発明について説明する。図３は、本発明によ
るインクジェット記録ヘッドの圧電素子ユニットと固定
板との係合状態を示す斜視図で図４はその平面図、図５
は図４におけるＢ−Ｂ’方向断面図を示す。又、図６は
図３の様に係合する前の圧電素子ユニットと固定板の状
態を示す斜視図である。Next, the present invention will be described using the configuration of the ink jet recording head. FIG. 3 is a perspective view showing an engagement state between the piezoelectric element unit and the fixing plate of the ink jet recording head according to the present invention, FIG. 4 is a plan view thereof, and FIG.
4 shows a sectional view taken along the line BB ′ in FIG. FIG. 6 is a perspective view showing the state of the piezoelectric element unit and the fixing plate before they are engaged as shown in FIG.
【０００９】図６において、保持基板２上に接合された
圧電素子アレイは圧電素子１の複数と両端にダミーの圧
電素子１４を形成すべく、切断加工され圧電素子ユニッ
ト３１を形成している。このとき両ダミー圧電素子間寸
法Ｍは、所定の寸法に管理されなければならない。In FIG. 6, the piezoelectric element array bonded onto the holding substrate 2 is cut and processed to form a plurality of piezoelectric elements 1 and dummy piezoelectric elements 14 at both ends thereof to form a piezoelectric element unit 31. At this time, the dimension M between both dummy piezoelectric elements must be controlled to a predetermined dimension.
【００１０】次に固定板には、前記寸法Ｍよりわずかの
クリアランスをとった寸法Ｆなる溝部３２が形成されて
いる。この溝部３２に前記圧電素子ユニット３１の寸法
Ｍ部を挿入することにより、固定板３に対する圧電素子
ユニット３１Ｍ、Ｆ寸法方向の位置が決まる。ダミーの
圧電素子１４は実際のインク吐出には関係せず、固定板
３との係合にのみ機能をもたせる。インク吐出にかかわ
る圧電素子１が存在する位置の固定板３は、ニゲ溝３
３、３４が設けてあり振動のそ害がないようになってい
る。以上様な固定板とダミー圧電素子の係合構成をとる
ことによって、圧電素子１の固定板３に対する位置精度
は高いものとなり同じく固定板を基準に接合されるイン
ク流路ユニット１２の圧力壁５ａとの接合位置精度も向
上する。Next, the fixing plate is formed with a groove portion 32 having a dimension F with a clearance slightly smaller than the dimension M. By inserting the size M portion of the piezoelectric element unit 31 into the groove 32, the positions of the piezoelectric element units 31M and F in the F dimension direction with respect to the fixed plate 3 are determined. The dummy piezoelectric element 14 has no function for actual ink ejection, and has a function only for engagement with the fixed plate 3. The fixing plate 3 at the position where the piezoelectric element 1 involved in ink ejection exists is the niger groove 3
3, 34 are provided so that there is no harm from vibration. By adopting the engagement structure of the fixing plate and the dummy piezoelectric element as described above, the positional accuracy of the piezoelectric element 1 with respect to the fixing plate 3 becomes high, and the pressure wall 5a of the ink flow path unit 12 joined similarly with the fixing plate as a reference. The accuracy of the joint position with and is also improved.
【００１１】更に固定板３はインク流路ユニットと接合
する関係上、上面３ａの平担度精度が要求される。そし
て圧電素子ユニットの圧電素子アレイ上端部も固定板上
面とは同一面上にあることが望ましい。以上述べてきた
点からも従来技術にある１本づつ圧電素子を固定板に接
合する方式に比べ本構成はすぐれている。Further, since the fixing plate 3 is joined to the ink flow path unit, the flatness accuracy of the upper surface 3a is required. The upper end of the piezoelectric element array of the piezoelectric element unit is also preferably flush with the upper surface of the fixed plate. Also from the above-mentioned points, this structure is superior to the conventional method in which one piezoelectric element is bonded to the fixed plate.
【００１２】さて固定板３に挿入された圧電素子ユニッ
トは図３に示す様に接合部材２１によって固定板に接合
される。前記に接合箇所は図２における固定板３とダミ
ー圧電素子１４の係合箇所３６であっても差しつかえな
い。The piezoelectric element unit inserted in the fixed plate 3 is joined to the fixed plate by the joining member 21 as shown in FIG. The joining point may be the engaging point 36 between the fixing plate 3 and the dummy piezoelectric element 14 in FIG.
【００１３】以上の構成をとるインクジェット記録ヘッ
ドに提供される固定板３の材料としては、セラミック、
金属、樹脂等が考えられ、そのいずれでも形にすること
は可能である。しかし、セラミック、金属は加工に手間
がかかる上、コストも割高になり量産向きでない。本発
明の実施例では固定板３の材料として無機フィラーのは
いった樹脂により射出成形を行ない、要求されるＦ寸
法、上面の平坦度を精度よく得ることができた。樹脂例
としてはエポックス（三井石油化学工業）等の熱硬化型
樹脂、ベクトラ（ポリプラスチックス）の液晶ポリマ
ー、を試みたがいずれも良好な結果を得ている。As the material of the fixing plate 3 provided in the ink jet recording head having the above structure, ceramic,
Metal, resin, etc. are considered, and any of them can be formed into a shape. However, ceramic and metal are not suitable for mass production because it takes time to process and the cost is high. In the embodiment of the present invention, injection molding was performed using a resin containing an inorganic filler as the material of the fixing plate 3, and the required F dimension and the flatness of the upper surface could be obtained accurately. Thermosetting resins such as Epox (Mitsui Petrochemical Industry Co., Ltd.) and liquid crystal polymers of Vectra (polyplastics) were tried as the resin examples, but all have obtained good results.
【００１４】本実施例においては、圧電素子ユニットは
１列のみで説明したがノズルの配列上、複数列の圧電素
子ユニットを１つの固定板で包含することはたやすい。In this embodiment, the piezoelectric element unit is described in only one row, but it is easy to include a plurality of rows of piezoelectric element units in one fixing plate because of the arrangement of the nozzles.
【００１５】[0015]
【発明の効果】以上に説明した様に、本発明によるイン
クジェット記録ヘッドは、積層型圧電素子を保持基板に
接合後、所定振動子寸法に切断する際、ダミー圧電素子
を形成せしめ、その寸法管理を行ない、これと固定板に
設けた位置決め溝を係合させることにより圧電素子ユニ
ット全体の固定板に対する位置精度を向上させることが
できた。従ってインク流路ユニットと圧電素子との位置
精度も向上し、安定した吐出特性を得ることができた。
又、固定板を樹脂の成形体で供給することによって安価
で量産性のある固定板を提供することができた。As described above, in the ink jet recording head according to the present invention, a dummy piezoelectric element is formed when the laminated piezoelectric element is bonded to the holding substrate and then cut into a predetermined vibrator size, and the size control thereof is performed. By doing this, and by engaging this with the positioning groove provided in the fixed plate, it was possible to improve the positional accuracy of the entire piezoelectric element unit with respect to the fixed plate. Therefore, the positional accuracy of the ink flow path unit and the piezoelectric element was also improved, and stable ejection characteristics could be obtained.
Further, by supplying the fixing plate as a resin molded body, it was possible to provide an inexpensive and mass-producible fixing plate.
【図１】 本発明の実施例のヘッド全体の構成を表わす
断面図。FIG. 1 is a sectional view showing the configuration of the entire head according to an embodiment of the present invention.
【図２】 図５のＡ−Ａ’断面図。FIG. 2 is a cross-sectional view taken along the line A-A ′ of FIG.
【図３】 本発明によるインクジェット記録ヘッドの圧
電素子ユニットと固定板の係合状態を示す斜視図。FIG. 3 is a perspective view showing an engagement state between a piezoelectric element unit and a fixing plate of the ink jet recording head according to the present invention.
【図４】 図１の平面図。FIG. 4 is a plan view of FIG.
【図５】 図２におけるＢ−Ｂ’断面図。5 is a cross-sectional view taken along the line B-B ′ in FIG.
【図６】 図１の係合前の斜視図。6 is a perspective view of FIG. 1 before engagement.
【図７】 圧力プレートの構成を表わす概略図。FIG. 7 is a schematic diagram showing the configuration of a pressure plate.
【図８】 従来技術を表わす斜視図。FIG. 8 is a perspective view showing a conventional technique.
１ 積層型圧電素子 ２ 保持基板 ２ａ 保持基板上電極パターン ３ 固定板 ３ａ 固定板上面 ４ 固定板と圧力プレートとの接合部材 ４ａ 圧電素子と圧力壁の接合部材 ５ 圧力プレート ５ａｂ圧力壁 ６ 流路肉部 ７ ノズルプレート ８ 圧力室 ９ 連通孔 １０ ノズル １１ 接続線 １２ インク流路ユニット １３ インク供給溜 １４ ダミー圧電素子 ３１ 圧電素子ユニット ３２ 係合溝 DESCRIPTION OF SYMBOLS 1 Multilayer piezoelectric element 2 Holding substrate 2a Electrode pattern on holding substrate 3 Fixing plate 3a Fixing plate upper surface 4 Joining member between fixing plate and pressure plate 4a Joining member between piezoelectric element and pressure wall 5 Pressure plate 5ab Pressure wall 6 Channel wall Part 7 Nozzle plate 8 Pressure chamber 9 Communication hole 10 Nozzle 11 Connection line 12 Ink flow path unit 13 Ink supply reservoir 14 Dummy piezoelectric element 31 Piezoelectric element unit 32 Engagement groove
Claims (3)
位方向に配設された圧力室の圧力壁を変位させて該圧力
室内のインクを加圧し該圧力室に連通するノズルよりイ
ンク滴を噴射するインクジェット記録ヘッドにおいて、
圧電素子及び該圧電素子を保持する保持基板とから成る
少なくとも一つ以上の圧電素子ユニットを有し、該圧電
素子ユニットは、これを保持する固定部材によって連結
固定されることを特徴とするインクジェット記録ヘッ
ド。1. A displacement of a laminated piezoelectric element is used to displace a pressure wall of a pressure chamber arranged in the displacement direction to pressurize ink in the pressure chamber and to eject an ink droplet from a nozzle communicating with the pressure chamber. In an inkjet recording head that ejects
Inkjet recording, comprising at least one piezoelectric element unit composed of a piezoelectric element and a holding substrate holding the piezoelectric element, the piezoelectric element unit being connected and fixed by a fixing member holding the piezoelectric element unit. head.
を噴出させる圧電素子列の外側にダミーの圧電素子を有
し該ダミーの圧電素子と前記固定部材とが直接係合する
ことにより各圧電素子の位置精度を出すべく配設された
ことを特徴とする請求項１記載のインクジェット記録ヘ
ッド。2. The piezoelectric element unit has a dummy piezoelectric element on the outside of a piezoelectric element array that actually ejects ink, and the dummy piezoelectric element and the fixing member are directly engaged with each other. The ink jet recording head according to claim 1, wherein the ink jet recording head is arranged so as to obtain the positional accuracy of.
フィラーの複合物の成形体によって構成されていること
を特徴とする請求項１記載のインクジェット記録ヘッ
ド。3. The ink jet recording head according to claim 1, wherein the fixing member is formed of a molded body of resin or a composite of resin and inorganic filler.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16603892A JP3082802B2 (en) | 1992-06-24 | 1992-06-24 | Inkjet recording head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16603892A JP3082802B2 (en) | 1992-06-24 | 1992-06-24 | Inkjet recording head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH068423A true JPH068423A (en) | 1994-01-18 |
| JP3082802B2 JP3082802B2 (en) | 2000-08-28 |
Family
ID=15823801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16603892A Expired - Fee Related JP3082802B2 (en) | 1992-06-24 | 1992-06-24 | Inkjet recording head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3082802B2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0993952A3 (en) * | 1998-09-17 | 2001-01-17 | Seiko Epson Corporation | Piezoelectric vibrator unit, method for manufacturing the same, and ink jet recording head comprising the same |
| US6578953B2 (en) | 1999-03-29 | 2003-06-17 | Seiko Epson Corporation | Inkjet recording head, piezoelectric vibration element unit used for the recording head, and method of manufacturing the piezoelectric vibration element unit |
| US6729002B1 (en) | 1995-09-05 | 2004-05-04 | Seiko Epson Corporation | Method of producing an ink jet recording head |
| US7114797B2 (en) | 2002-05-13 | 2006-10-03 | Seiko Epson Corporation | Actuator device, liquid ejection head, and method of inspecting the same |
| JP2008238594A (en) * | 2007-03-27 | 2008-10-09 | Seiko Epson Corp | Liquid jet head, and liquid jet apparatus |
| JP2010167589A (en) * | 2009-01-20 | 2010-08-05 | Ricoh Co Ltd | Liquid droplet delivery device, and image forming device equipped therewith |
| KR101153690B1 (en) * | 2006-02-20 | 2012-06-18 | 삼성전기주식회사 | Piezoelectric actuator of inkjet head and method for forming the same |
-
1992
- 1992-06-24 JP JP16603892A patent/JP3082802B2/en not_active Expired - Fee Related
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7028377B2 (en) | 1995-09-05 | 2006-04-18 | Seiko Epson Corporation | Method of producing an ink jet recording head |
| US6729002B1 (en) | 1995-09-05 | 2004-05-04 | Seiko Epson Corporation | Method of producing an ink jet recording head |
| US6417600B2 (en) | 1998-09-17 | 2002-07-09 | Seiko Epson Corporation | Piezoelectric vibrator unit, method for manufacturing the same, and ink jet recording head comprising the same |
| EP0993952A3 (en) * | 1998-09-17 | 2001-01-17 | Seiko Epson Corporation | Piezoelectric vibrator unit, method for manufacturing the same, and ink jet recording head comprising the same |
| US6624552B2 (en) | 1998-09-17 | 2003-09-23 | Seiko Epson Corporation | Piezoelectric vibrator unit, method for manufacturing the same, and ink jet recording head comprising the same |
| US6862782B2 (en) | 1998-09-17 | 2005-03-08 | Seiko Epson Corporation | Method of manufacturing a piezoelectric vibrator unit |
| US7600318B2 (en) | 1999-03-29 | 2009-10-13 | Seiko Epson Corporation | Method of manufacturing a piezoelectric vibration element for an inkjet recording head |
| US7100282B2 (en) | 1999-03-29 | 2006-09-05 | Seiko Epson Corporation | Method of manufacturing a piezoelectric vibration element for an inkjet recording head |
| US6578953B2 (en) | 1999-03-29 | 2003-06-17 | Seiko Epson Corporation | Inkjet recording head, piezoelectric vibration element unit used for the recording head, and method of manufacturing the piezoelectric vibration element unit |
| US7114797B2 (en) | 2002-05-13 | 2006-10-03 | Seiko Epson Corporation | Actuator device, liquid ejection head, and method of inspecting the same |
| US7207664B2 (en) | 2002-05-13 | 2007-04-24 | Seiko Epson Corporation | Actuator device, liquid ejection head, and method of inspecting the same |
| US7210770B2 (en) | 2002-05-13 | 2007-05-01 | Seiko Epson Corporation | Actuator device, liquid ejection head, and method of inspecting the same |
| KR101153690B1 (en) * | 2006-02-20 | 2012-06-18 | 삼성전기주식회사 | Piezoelectric actuator of inkjet head and method for forming the same |
| JP2008238594A (en) * | 2007-03-27 | 2008-10-09 | Seiko Epson Corp | Liquid jet head, and liquid jet apparatus |
| US7717545B2 (en) | 2007-03-27 | 2010-05-18 | Seiko Epson Corporation | Liquid ejecting head and liquid ejecting apparatus |
| JP2010167589A (en) * | 2009-01-20 | 2010-08-05 | Ricoh Co Ltd | Liquid droplet delivery device, and image forming device equipped therewith |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3082802B2 (en) | 2000-08-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100556659B1 (en) | Droplet Deposition Apparatus | |
| EP0550030B1 (en) | Ink jet recording head and process for forming same | |
| US7156504B2 (en) | Liquid ejection head | |
| JPH10258509A (en) | Ink jet head, and its manufacture | |
| US6286942B1 (en) | Ink jet recording head with mechanism for positioning head components | |
| JP2850762B2 (en) | Inkjet head | |
| JPH068423A (en) | Ink jet recording head | |
| JP3108930B2 (en) | Ink jet head and method of manufacturing the same | |
| JP2001071490A (en) | Ink-jet recording device | |
| JPH05220956A (en) | Ink jet reocrding head | |
| US7690771B2 (en) | Liquid ejection head, liquid ejection apparatus, and manufacturing method of liquid ejection head | |
| JP2000263781A (en) | Ink jet recorder | |
| JPH10250053A (en) | Ink jet device and manufacture thereof | |
| JP4253859B2 (en) | Inkjet head | |
| JP3114766B2 (en) | Ink jet head and method of manufacturing the same | |
| JP2003072066A (en) | Ink jet printing head | |
| JP2000158650A (en) | Print head and manufacture thereof | |
| JP2005014506A (en) | Inkjet head and inkjet recorder | |
| JP2003080705A (en) | Ink jet recording head, its manufacturing method and ink jet recorder | |
| JP3362787B2 (en) | Piezoelectric unit for inkjet recording head | |
| JP2002187278A (en) | Ink jet head and manufacturing method | |
| JP4284739B2 (en) | Piezoelectric head device for piezoelectric ink jet printer and method for manufacturing the same | |
| JP2006231583A (en) | Manufacturing method for liquid jet head and liquid jet head | |
| JP2000334949A (en) | Ink jet head | |
| JPH08142324A (en) | Ink jet head and manufacture thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20000531 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090630 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100630 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110630 Year of fee payment: 11 |
|
| LAPS | Cancellation because of no payment of annual fees |