JPH0671042B2 - Position correction type substrate support device - Google Patents
Position correction type substrate support deviceInfo
- Publication number
- JPH0671042B2 JPH0671042B2 JP1169264A JP16926489A JPH0671042B2 JP H0671042 B2 JPH0671042 B2 JP H0671042B2 JP 1169264 A JP1169264 A JP 1169264A JP 16926489 A JP16926489 A JP 16926489A JP H0671042 B2 JPH0671042 B2 JP H0671042B2
- Authority
- JP
- Japan
- Prior art keywords
- tool
- substrate
- interlocking
- correction
- posture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- Jigs For Machine Tools (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Control Of Position Or Direction (AREA)
Description
【発明の詳細な説明】 〈産業上の利用分野〉 この発明は、半導体ウエハや液晶用ガラス基板等ような
電子工業界用の各種基板（以下基板と称する）に対する
処理装置や検査装置等の各種装置に配置され、上記の基
板を一時的に支持する機能と、基板が支持される位置を
修正する機能を兼ね備えた位置修正型基板支持装置に関
するものである。DETAILED DESCRIPTION OF THE INVENTION <Field of Industrial Application> The present invention relates to various types of processing equipment and inspection equipment for various substrates (hereinafter referred to as substrates) for the electronic industry such as semiconductor wafers and glass substrates for liquid crystals. The present invention relates to a position correction type substrate supporting device which is arranged in an apparatus and has both the function of temporarily supporting the substrate and the function of correcting the position at which the substrate is supported.
〈従来の技術〉 この種の装置は従来より例えば第10図に示すもの（以下
従来例１という）、あるいは第11図に示すもの（以下従
来例２という）が知られている。<Prior Art> This type of device is conventionally known, for example, as shown in FIG. 10 (hereinafter referred to as conventional example 1) or as shown in FIG. 11 (hereinafter referred to as conventional example 2).
従来例１は、多関節アーム型の搬送ロボット20から搬送
されてきた基板Ｗを、直線搬送型の搬送ロボット21へ受
渡しするために、両搬送ロボット間に配置された位置修
正型基板支持装置である。The conventional example 1 is a position correction type substrate supporting device arranged between both transfer robots in order to transfer the substrate W transferred from the multi-joint arm type transfer robot 20 to the linear transfer type transfer robot 21. is there.
基台101上に３本の基板支持ピン110を立設して基板支持
具を構成するとともに、基台101の周縁部に多数の位置
修正用テーパピン112を立設し、そのテーパピン112はそ
の上部を基板支持ピン110のピンヘッド110aより上位に
突出してテーパ部112aを形成し、基台101はアクチェー
タ118で昇降可能に支持して成り、基板搬入側の搬送ロ
ボット20で持ち込んだ基板Ｗを基台101を上昇させるこ
とにより基板支持ピン110の上端に載置するように受け
取り、その受け取りに際し、テーパピン112のテーパ部1
12aで基板Ｗの周縁部を当接ガイドすることにより基板
Ｗの前後左右方向の位置ずれを修正するように構成され
ている。なお、従来例１の位置修正型基板支持装置のよ
うに、２つの搬送ロボット間での基板の受渡しのために
位置修正型基板支持装置が使用されるのは、次のような
２つの理由からである。Three substrate support pins 110 are erected on the base 101 to form a substrate support, and a large number of position correcting taper pins 112 are erected on the peripheral edge of the base 101, and the taper pins 112 are located above the taper pins 112. Is formed above the pin head 110a of the substrate support pin 110 to form a taper portion 112a, and the base 101 is supported by an actuator 118 so as to be able to move up and down. The substrate W brought in by the transfer robot 20 on the substrate loading side is a base. By raising 101, it is received so as to be placed on the upper end of the substrate support pin 110, and when receiving it, the taper portion 1 of the taper pin 112 is received.
The peripheral edge of the substrate W is abutted and guided by 12a so as to correct the positional displacement of the substrate W in the front-rear, left-right directions. It should be noted that the position-correcting type substrate supporting device is used for the transfer of the substrate between the two transfer robots like the position-correcting type substrate supporting device of Conventional Example 1 for the following two reasons. Is.
第１の理由は、例えば基板における搬送ロボットの支持
されるべき位置が、双方の搬送ロボットで重複していた
り、その他何らかの事情により、搬送ロボット同士で直
接、基板の受渡しをすることが困難な場合に、搬送ロボ
ット間に、基板を一時的に支持する手段を介在させるこ
とが必要であり、それによって、基板の受渡しが円滑に
できるからである。The first reason is, for example, that the positions of the substrates to be supported by the transfer robots overlap in both transfer robots, or it is difficult for the transfer robots to directly transfer the substrates due to some other reason. In addition, it is necessary to interpose a means for temporarily supporting the substrate between the transfer robots, so that the substrate can be delivered and received smoothly.
第２の理由は、搬送ロボットから受け取った基板の位置
がずれていた場合に、そのままでは、次の搬送ロボット
へ基板を渡すことに支障を生じることがあるので、本来
支持されるべき位置に基板が支持されるように、基板支
持位置を修正しておいて、基板の受渡しの信頼性を高め
る必要があるからである。The second reason is that if the position of the substrate received from the transfer robot is deviated, it may hinder the transfer of the substrate to the next transfer robot. This is because it is necessary to correct the substrate support position so that the substrate is supported so as to improve the reliability of the substrate delivery.
従来例２も位置修正型基板支持装置であり、基台104の
中央部に基板支持具として吸引チャック106を立設し、
基台104に中央部から放射状に複数の透し溝105を等角度
間隔で切設し、基板修正具107を各透し溝105に挿通して
透し溝105に沿って移動可能に設け、それら複数の修正
具107を連動機構Ｋを介して同期連動可能に構成し、修
正具107の上端ピン107aを吸引チャック106で保持した基
板の周縁部に当接させて、基板の前後左右方向の位置ず
れを修正するように構成されている。なお同図中符号K1
は同期連動機構Ｋを構成するパルスモータ、K2は吸引チ
ャック106と同軸に枢支され、パルスモータK1で回動さ
れる回転板、K3は基板修正具107の下端部107cと回転板
２とに旦って連設されたリンク、K4は基板修正具107の
摺動用ガイドである。Conventional Example 2 is also a position correction type substrate supporting device, in which a suction chuck 106 as a substrate supporting member is erected at the center of the base 104.
A plurality of transparent grooves 105 are radially cut from the central portion of the base 104 at equal angular intervals, and a substrate correction tool 107 is inserted into each transparent groove 105 and provided movably along the transparent groove 105. The plurality of correction tools 107 are configured to be synchronously interlocked with each other via the interlocking mechanism K, and the upper end pins 107a of the correction tools 107 are brought into contact with the peripheral edge of the substrate held by the suction chuck 106 so as to move in the front-rear direction of the substrate. It is configured to correct misalignment. The reference numeral K 1 in the figure
Is a pulse motor constituting the synchronous interlocking mechanism K, K 2 is a rotary plate that is pivotally supported coaxially with the suction chuck 106 and is rotated by the pulse motor K 1 , and K 3 is a lower end portion 107c of the substrate correction tool 107 and a rotary plate.
A link K 4 arranged in series with 2 and a guide 4 for sliding the board correction tool 107.
なお、従来例２の位置修正型基板支持装置は、測定装置
に付設される。基板回転モータ108による吸引チャック1
06の回転により、基板を測定するに適した向きに旋回す
るための装置の基板支持部として使用され、基板支持部
に位置修正型基板支持装置が使用されるのは、吸引チャ
ック106に対する基板の位置を修正することが必要であ
るからである。The position-corrected substrate supporting device of Conventional Example 2 is attached to the measuring device. Suction chuck 1 by substrate rotation motor 108
The rotation of 06 causes the substrate to be rotated in a direction suitable for measuring the substrate, and the position-corrected substrate supporting device is used for the substrate supporting unit. This is because it is necessary to correct the position.
〈発明が解決しようとする課題〉 従来例１は、アクチェータ118を上昇させる１つの動作
で、基板Ｗの受け取りと、テーパピン112による基板Ｗ
の位置修正とができる優れた装置ではあるが、しかし、
テーパピン112のテーパ部112aが基板Ｗの周縁を案内す
ることで位置修正する方式のため、位置修正できるのは
テーパピン112のテーパ部112aの範囲内に制限される。
そのため、基板の位置を修正する範囲が狭いという不都
合がある。また、受け取った基板を、搬送ロボットへ渡
す際に、テーパピン112が搬送ロボットの動きを制約す
る不都合がある。<Problems to be Solved by the Invention> In the conventional example 1, one operation of raising the actuator 118 is performed to receive the substrate W and the substrate W by the taper pin 112.
Although it is an excellent device that can correct the position of
Since the position of the taper portion 112a of the taper pin 112 is corrected by guiding the peripheral edge of the substrate W, the position can be corrected only within the range of the taper portion 112a of the taper pin 112.
Therefore, there is an inconvenience that the range for correcting the position of the substrate is narrow. Further, there is a disadvantage that the taper pin 112 restricts the movement of the transfer robot when the received substrate is transferred to the transfer robot.
従来例２は、基板修正具107を移動することによって基
板ｗの位置を修正する方式のため、位置修正できる範囲
が広く優れた装置ではあるが、しかし、基板修正具107
の移動は水平方向の移動にすぎないから、基板Ｗの受渡
しに際して、基板が基板修正具107の上端ピン107aに当
たらないように基板Ｗを搬送しなければならず、上端ピ
ン107aが搬送ロボットの動きを制約する不都合がある。
また、吸引チャック106と搬送ロボットとの間で基板を
受渡しする動作に対して、基板の位置を修正する方向へ
基板修正具107を移動させる動作や、基板から離れる方
向へ移動させる動作を、タイミング制御する必要があ
る。The second conventional example is an excellent apparatus in which the position of the substrate w can be corrected by moving the substrate correcting tool 107, and thus the range of position correction is wide and excellent.
Movement of the substrate W is only horizontal movement, the substrate W must be conveyed so that the substrate W does not hit the upper end pin 107a of the substrate correction tool 107 when the substrate W is transferred. There is the inconvenience of restricting movement.
Further, with respect to the operation of transferring the substrate between the suction chuck 106 and the transfer robot, the operation of moving the substrate correction tool 107 in the direction of correcting the position of the substrate and the operation of moving the substrate in the direction of separating from the substrate Need to control.
本発明はこのような事情に鑑みてなされたもので、第１
から第５の発明に共通の解決しようとする課題は、以下
のイ及びロであり、さらに、第２から第５の発明は以下
のハも解決しようとする課題とする。The present invention has been made in view of such circumstances.
Problems to be solved common to the fifth to fifth inventions are the following a and b, and further, the second to fifth inventions are also problems to be solved in the following c.
イ． 基板の位置を修正する範囲が広いこと、 ロ． 搬送ロボットとの基板の受渡しに際し、基板の位
置を修正するための手段である修正具が、搬送ロボット
による基板の移動に障害とならないように、修正具を搬
送中の基板より下へ移動できるようにして、搬送ロボッ
トの動きを修正具が制約するという問題を解消するこ
と、 ハ． 基板を受渡しするために基板支持具を昇降する動
作と、基板の位置を修正する方向へ修正具を移動させる
動作や、修正具を基板から離れる方向へ移動させる動作
を、タイミング制御する必要を解消することである。I. There is a wide range to correct the board position, b. When the substrate is transferred to and from the transfer robot, the correction tool, which is a means for correcting the position of the substrate, can be moved below the substrate being transferred so as not to hinder the transfer robot's movement of the substrate. To solve the problem that the correction tool restricts the movement of the transfer robot. Eliminates the need to control the timing of the operation of raising and lowering the substrate support tool to transfer the substrate, the operation of moving the repair tool in the direction to correct the position of the substrate, and the operation of moving the repair tool away from the substrate. It is to be.
〈課題を解決するための手段〉 包括概念で把握される第１の発明は、上記課題イ．ロを
解消するものとして以下のように構成される。<Means for Solving the Problem> The first invention grasped by the comprehensive concept is to solve the above problems a. It is configured as follows to eliminate the problem b.
即ち、基板支持具と、基板支持具で支持した基板より下
方に揺動支点を有し、起立姿勢と傾倒姿勢との間で揺動
可能に支持され、当該支持基板の周囲に配置された複数
のの修正具と、昇降可能に設けられ、複数の修正具を上
記両姿勢間で同期連動可能に揺動する連動具と、連動具
を昇降駆動するアクチェータとを具備して成り、複数の
修正具が連動具の昇降に基づき同期連動することによ
り、起立姿勢では基板支持具で支持した基板の外縁に修
正具の上部が当接して基板の位置を修正し、傾倒姿勢で
は修正型具の上部がが当該基板より下位に退避するよう
に構成したことを特徴とする位置修正基板支持装置であ
る。That is, a substrate supporting member and a plurality of swing supporting points below the substrate supported by the substrate supporting member are swingably supported between an upright posture and a tilted posture, and are arranged around the supporting substrate. No. 1 correction device, an interlocking device that is provided so as to be able to move up and down, and that swings a plurality of correction devices so that they can be synchronously interlocked between the two postures, and an actuator that drives the interlocking device to move up and down. When the tool is synchronously interlocked based on the lifting of the interlocking tool, the upper part of the correction tool abuts the outer edge of the substrate supported by the substrate support tool in the upright position to correct the position of the substrate, and the upper part of the correction mold tool in the tilted position. Is a position correction substrate supporting device characterized in that is configured to be retracted to a lower position than the substrate.
第２の発明は上記課題イ〜ハを解消するものであり、上
記第１の発明において、基板支持具を連動具に固設する
とともに、連動具を、上昇位置では各修正具と当接して
各修正具を起立姿勢に規制するように構成することによ
って、基板支持具と連動具とを一体に昇降するととも
に、連動具が上昇時に各修正具を連動して、起立姿勢に
規制するようにしたもので、以下のように構成される。A second aspect of the present invention is to solve the above problems (a) to (c), and in the first aspect of the invention, the substrate support is fixed to the interlocking device, and the interlocking device is brought into contact with each of the correction tools in the raised position. By configuring each of the correction tools so as to be restricted to the standing posture, the board support tool and the interlocking tool are lifted up and down as a unit, and when the interlocking tool is raised, the respective correction tools are interlocked and restricted to the standing posture. It is configured as follows.
即ち、基板支持具と、基板支持具で支持した基板より下
方に揺動支点を有し、起立姿勢と傾倒姿勢との間で揺動
可能に支持され、当該基板の周囲に配置された複数の修
正具と、基板支持具を固設して昇降可能に設置され、上
昇時に各修正具と当接し、上昇位置では各修正具を起立
姿勢に規制する連動具と、連動具を昇降駆動するアクチ
ェータとを具備して成り、複数の修正具が連動具の上昇
に基づき基板支持具の上昇と同期連動して起立し、その
起立姿勢では基板支持具で支持した基板の外縁に修正具
の上部が当接して基板の位置を修正し、連動具の下降に
基づき基板支持具の下降と同期連動して傾動し、その傾
倒姿勢では修正具の上部が、当該基板より下位に退避す
るように構成したことを特徴とする位置修正型基板支持
装置である。That is, the substrate support and a plurality of swing fulcrums below the substrate supported by the substrate support are swingably supported between an upright posture and a tilted posture, and are arranged around the substrate. A fixer and a substrate support are fixedly installed so as to be able to move up and down, and they come into contact with each corrector when ascending, and an interlocking device that restricts each corrector to a standing posture at the elevated position and an actuator that drives the interlocking device to move up and down. And a plurality of correction tools stand up in synchronization with the rise of the substrate support tool based on the rise of the interlocking tool, and in the standing posture, the upper part of the correction tool is placed on the outer edge of the substrate supported by the substrate support tool. The position of the substrate is corrected by abutting, and it is tilted in synchronization with the lowering of the substrate support tool based on the lowering of the interlocking tool, and in the tilted posture, the upper part of the correcting tool is retracted below the substrate. A position-corrected substrate supporting device characterized by the above.
第３の発明は上記課題イ〜ハを解消するものであり、上
記第１の発明において、基板支持具を連動具に固設し、
各修正具を傾倒可能に連動具に支持するとともに、連動
具によって上昇される修正具と当接して各修正具を起立
姿勢に規制する当接具を備える構成にすることによっ
て、基板支持具と連動具とを一体に昇降するとともに、
連動具が上昇時に各修正具を当接具に当接させて起立姿
勢に規制するようにしたもので、以下のように構成され
る。A third invention is to solve the above-mentioned problems a to c. In the first invention, the substrate support is fixed to the interlocking device,
By supporting each correction tool in a tiltable manner on the interlocking tool and providing a contact tool that contacts the correction tool raised by the interlocking tool and restricts each correction tool in the standing posture, the board support tool and While moving up and down together with the interlocking tool,
When the interlocking tool is raised, each correction tool is brought into contact with the contact tool so as to be restricted to the standing posture, and is configured as follows.
即ち、基板支持具と、基板支持具で支持した基板より下
方に揺動支点を有し、起立姿勢と傾倒姿勢との間で揺動
可能に支持され、当該支持基板の周囲に配置された複数
の修正具と、基板支持具を固設して昇降可能に設置さ
れ、各修正具を傾倒可能に支持する連動具と、連動具と
ともに上昇する修正具と当接して修正具を傾倒姿勢から
起立姿勢へ規制する当接具と、連動具を昇降駆動するア
クチェータとを具備して成り、複数の修正具が連動具の
上昇に基づき基板支持具の上昇と同期連動して起立し、
その起立姿勢では基板支持具で支持した基板の外縁に修
正具の上部が当接して基板の位置を修正し、連動具の下
降に基づき基板支持具の下降と同期連動して傾動し、そ
の傾倒姿勢では修正具の上部が当該基板より下位に退避
するように構成したことを特徴とする位置修正型基板支
持装置である。That is, a substrate supporting member and a plurality of swing supporting points below the substrate supported by the substrate supporting member are swingably supported between an upright posture and a tilted posture, and are arranged around the supporting substrate. The fixing tool and the board supporting tool are fixedly installed so that they can be moved up and down.The interlocking tool that supports each correcting tool so that it can be tilted, and the correcting tool that rises together with the interlocking tool are brought into contact with each other to stand up from the tilted posture. It is provided with an abutment device that regulates the posture and an actuator that drives the interlocking device to move up and down, and a plurality of correction tools stand up in synchronization with the ascent of the substrate support tool based on the ascent of the interlocking device,
In the upright position, the upper part of the correction tool abuts the outer edge of the substrate supported by the substrate support tool to correct the position of the board, and tilts in synchronization with the descent of the substrate support tool based on the descent of the interlocking tool, and the tilting. The position-corrected substrate support device is characterized in that the upper part of the correction tool is retracted to a lower position than the substrate in the posture.
第４の発明は上記課題イ〜ハを解消するものであり、上
記第１の発明において、基板支持具を連動具に固設する
とともに、連動具を、下降位置で各修正具と当接して各
修正具を起立姿勢に規制するように構成することによっ
て、基板支持具と連動具とを一体に昇降するとともに、
連動具が下降時に各修正具を連動して起立姿勢に規制す
るようにしたもので、以下のように構成される。A fourth invention is to solve the above-mentioned problems a to c. In the first invention, the substrate support is fixed to the interlocking device, and the interlocking device is brought into contact with each correction tool at the lowered position. By configuring each of the correction tools so as to be restricted to the standing posture, the board support tool and the interlocking tool are moved up and down together, and
When the interlocking device descends, each correction device is interlocked to regulate the standing posture, and is configured as follows.
即ち、基板支持具と、基板支持具で支持した基板より下
方に揺動支点を有し、起立姿勢と傾倒姿勢との間で揺動
可能に支持され、当該支持基板の周囲に配置された複数
の修正具と、基板支持具を固設して昇降可能に設置さ
れ、下降時に各修正具と当接し、下降位置では各修正具
を起立姿勢に規制する連動具と、連動具を昇降駆動する
アクチェータとを具備して成り、複数の修正具が連動具
の下降に基づき基板支持具の下降と同期連動して起立
し、その起立姿勢では基板支持具で支持した基板の外縁
に修正具の上部が当接して基板の位置を修正し、連動具
の上昇に基づき基板支持具の上昇と同期連動して傾動
し、その傾倒姿勢では修正具の上部が当該基板より下位
に退避するように構成したことを特徴とする位置修正型
基板支持装置である。That is, a substrate supporting member and a plurality of swing supporting points below the substrate supported by the substrate supporting member are swingably supported between an upright posture and a tilted posture, and are arranged around the supporting substrate. The fixing tool and the substrate supporting tool are fixedly installed so as to be able to move up and down, and they come in contact with each correcting tool when descending, and in the descending position, the interlocking tool that regulates each correcting tool to the standing posture and the interlocking tool is driven up and down. An actuator is provided, and a plurality of correction tools stand up in synchronization with the descent of the substrate support tool based on the descent of the interlocking tool. In the standing posture, the upper part of the correction tool is placed on the outer edge of the substrate supported by the substrate support tool. Is contacted to correct the position of the board, and the tilting is performed in synchronization with the rise of the board support tool based on the rise of the interlocking tool, and in the tilted posture, the upper part of the repair tool is retracted below the board. A position-corrected substrate supporting device characterized by the above.
第５の発明は上記課題イ〜ハを解消するものであり、上
記第１の発明において、基板支持具を連動具に固設し、
各修正具を傾倒可能に連動具に支持するとともに、下降
する修正具と当接して各修正具を起立姿勢に規制する当
接具を備える構成にすることによって、基板支持具と連
動具とを一体に昇降するとともに、連動具といっしょに
各修正具が下降すると、各修正具が当接具に当接し、各
修正具を起立姿勢に規制するようにしたもので、以下の
ように構成される。A fifth invention is to solve the above-mentioned problems a to c. In the first invention, the substrate support is fixed to the interlocking device,
The board support tool and the interlocking tool are supported by tiltingly supporting each correction tool on the interlocking tool and providing a contact tool that contacts the descending repair tool to regulate each correction tool in the standing posture. It is designed to move up and down as one unit and when each correction tool descends together with the interlocking tool, each correction tool comes into contact with the abutment tool and regulates each correction tool in the standing posture.It is configured as follows. It
即ち、基板支持具と、基板支持具で支持した基板より下
方に揺動支点を有し、起立姿勢と傾倒姿勢との間で揺動
可能に支持され、当該支持基板の周囲に配置された複数
の修正具と、基板支持具を固設して昇降可能に設置さ
れ、複数の修正具を同期連動可能に支持する連動具と、
連動具の下降により修正具と当接して修正具を傾倒姿勢
から起立姿勢へ規制する当接具と、連動具を昇降駆動す
るアクチェータとを具備して成り、複数の修正具が連動
具の下降に基づき基板支持具の下降と同期連動して起立
し、その起立姿勢では基板支持具で支持した基板の外縁
に修正具の上部が当接して基板の位置を修正し、連動具
の上昇に基づき基板支持具の上昇と同期連動して傾動
し、その傾倒姿勢では修正具の上部が当該基板より下位
に退避するように構成したことを特徴とする位置修正型
基板支持装置である。That is, a substrate supporting member and a plurality of swing supporting points below the substrate supported by the substrate supporting member are swingably supported between an upright posture and a tilted posture, and are arranged around the supporting substrate. Repair tool, and a board support tool are fixedly installed to be able to move up and down, and an interlocking tool that supports a plurality of repair tools in a synchronized interlocking manner,
The lowering of the interlocking device includes an abutment device that abuts against the correction device to restrict the correction device from the tilted posture to the standing posture, and an actuator that drives the interlocking device to move up and down. Based on the above, it stands up in synchronism with the lowering of the substrate support, and in its standing posture, the upper part of the correction tool abuts the outer edge of the substrate supported by the substrate support to correct the position of the substrate, and based on the rising of the interlocking tool. A position-correcting type substrate supporting device, characterized in that the substrate supporting device tilts in synchronization with the rise of the substrate supporting device, and in the tilted posture, an upper part of the correcting device is retracted to a lower position than the substrate.
〈作用〉 第１の発明ではアクチェータで連動具を昇降することに
より、基板の周囲に配置されている複数の修正具が連動
具によって起立姿勢と傾倒姿勢との間で揺動する。<Operation> In the first aspect of the present invention, when the interlocking device is moved up and down by the actuator, the plurality of correction tools arranged around the substrate are swung by the interlocking device between the standing posture and the tilted posture.
そして起立姿勢では基板支持具で支持した基板の外縁に
修正具の上部が当接して基板の位置を修正し、傾倒姿勢
では修正具の上部が当該基板よりも下位に退避する。こ
れにより基板の受け渡しに際し、修正具の上部が搬送ロ
ボットの動きを制約することはなくなる。また、修正具
が動くことにより、基板の位置を修正するから、修正す
る範囲が広い。Then, in the standing posture, the upper portion of the correction tool abuts on the outer edge of the substrate supported by the substrate support tool to correct the position of the substrate, and in the tilted posture, the upper portion of the correction tool retracts below the substrate. This prevents the upper part of the correction tool from restricting the movement of the transfer robot when the substrate is transferred. Further, since the position of the substrate is corrected by the movement of the correction tool, the correction range is wide.
第２の発明では上記基本動作に加えて、基板支持具が連
動具と一体に昇降する。そして連動具を上昇すると、基
板支持具が上昇して基板支持具が搬送ロボットから基板
を受け取るとともに、上昇してきた連動具が修正具に当
接することによって、修正具が起立し、基板の受け取り
に連動して基板の位置修正を行う。次いで、搬入側の搬
送ロボットを退避させるとともに、搬出側の搬送ロボッ
トの基板の下へ待機させておいてから、連動具を下降す
ると、基板支持具が下降して基板支持具から搬送ロボッ
トへ基板を渡すとともに、連動具と修正具との当接によ
る押し上げが解除され、修正具が傾倒姿勢になって基板
より下に退避する。そのため、搬送ロボットは修正具に
動きを制約されることなく基板を搬出できる。なお、基
板を受け取る際には、連動具が上昇する前に、基板を搬
入するため、まだ修正具は起立姿勢にないので、搬送ロ
ボットが修正具に動きを制約されることなく、基板を搬
入することができる。In the second aspect of the invention, in addition to the above basic operation, the substrate supporting tool is moved up and down together with the interlocking tool. Then, when the interlocking tool is raised, the substrate support tool is raised and the substrate support tool receives the substrate from the transfer robot, and the ascending interlocking tool abuts the repair tool, so that the repair tool stands up and receives the substrate. The position of the board is corrected in conjunction with this. Next, the transfer robot on the carry-in side is evacuated, and it is made to stand by under the substrate of the transfer robot on the carry-out side, and when the interlocking tool is lowered, the substrate support is lowered and the substrate is transferred from the substrate support tool to the transfer robot. When the correction tool is pushed up due to the contact between the interlocking tool and the correction tool, the correction tool is tilted and retracted below the substrate. Therefore, the transfer robot can carry out the substrate without being restricted in movement by the repair tool. When the substrate is received, the substrate is loaded before the interlocking device is lifted, so the correction tool is not in the upright posture yet.Therefore, the transfer robot does not restrict the movement of the correction tool to load the substrate. can do.
つまり、アクチェータの１回の昇降動作で基板の受け渡
しと位置修正とが同時に行えることになる。これによ
り、迅速に位置修正できる。That is, the substrate can be transferred and the position can be corrected at the same time by a single lifting operation of the actuator. Thereby, the position can be corrected quickly.
第３の発明では第１の発明の基本動作に加えて、基板支
持具が連動具と一体に昇降する。そて連動具を上昇する
と、基板支持具が上昇して基板支持具が搬送ロボットか
ら基板を受け取るとともに、連動具も上昇し、上昇して
きた修正具が当接具に当接することによって、修正具が
起立し、基板の受け取りに連動して基板の位置修正を行
う。。次いで、搬入側の搬送ロボットを退避させるとと
もに、搬出側の搬送ロボットの基板の下へ待機させてお
いてから、連動具を下降すると、基板支持具が下降して
基板支持具から搬送ロボットへ基板を渡すとともに、修
正具も下降して、修正具と当接具との当接による押し上
げが解除され、修正具が傾倒姿勢になって、基板より下
に退避する。そのため、搬送ロボットが修正具に動きに
制約されることなく、基板を搬出することができる。な
お、基板を受け取る際には、連動具が上昇する前に、基
板を搬入することにより、まだ修正具は起立姿勢にない
ので、搬送ロボットが修正具に動きを制約されることな
く、基板を搬入することができる。In the third invention, in addition to the basic operation of the first invention, the substrate support tool moves up and down together with the interlocking tool. Then, when the interlocking tool is raised, the substrate support tool is raised, the substrate support tool receives the substrate from the transfer robot, the interlocking tool is also raised, and the ascending correction tool abuts on the abutment tool, so that the correction tool Stands, and the position of the substrate is corrected in synchronization with the receipt of the substrate. . Next, the transfer robot on the carry-in side is evacuated, and it is made to stand by under the substrate of the transfer robot on the carry-out side, and when the interlocking tool is lowered, the substrate support is lowered and the substrate is transferred from the substrate support tool to the transfer robot. When the correction tool is lowered, the correction tool is also lowered to release the push-up due to the contact between the correction tool and the abutment tool, and the correction tool is in a tilted posture and retracts below the substrate. Therefore, the substrate can be carried out without the movement of the transfer robot being restricted by the correction tool. When the substrate is received, the correction tool is not in the upright posture yet by loading the substrate before the interlocking device is raised, so that the transfer robot does not restrict the movement of the correction tool to the substrate. Can be brought in.
第４の発明では、第１の発明の基本動作に加えて、基板
支持具が一体に昇降する。連動具を上昇すると、基板支
持具が上昇して搬送ロボットから基板を受け取り、その
後、搬入側の搬送ロボットを退避させてから連動具を下
降すると、連動具が修正具に当接し、修正具が起立し、
基板の位置修正を行う。次いで、再び連動具を上昇する
と、連動具と修正具との当接による押し上げの解除によ
り修正具が傾倒姿勢になり、搬出側の搬送ロボットを基
板の下へ待機させておいてから、連動具を再度下降する
と、基板支持具が下降し、下降する途中で基板支持具か
ら搬送ロボットへ基板を渡す。なお、修正具が起立する
のは、下降する途中であるから、まだ修正具が起立して
いない内に、搬出側の搬送ロボットに基板が渡され、修
正具は渡された基板の下で起立することになるので、修
正具に動きを制約されることなく搬送ロボットが基板を
搬出することができる。In the fourth invention, in addition to the basic operation of the first invention, the substrate support moves up and down as a unit. When the interlocking tool is raised, the substrate support tool is raised to receive the substrate from the transfer robot.After that, when the transfer robot on the loading side is retracted and then the interlocking tool is lowered, the interlocking tool comes into contact with the correction tool and the correction tool is removed. Stand up,
Correct the position of the board. Then, when the interlocking tool is lifted again, the correction tool is tilted due to the release of the push-up due to the contact between the interlocking tool and the correction tool, and the transfer robot on the unloading side is made to wait under the substrate before the interlocking tool is moved. When the substrate support is lowered again, the substrate support is lowered, and the substrate is transferred from the substrate support to the transfer robot on the way down. Since the corrector is standing up while it is descending, the substrate is passed to the transfer robot on the unloading side while the corrector is not standing upright, and the corrector is raised under the passed substrate. Therefore, the transfer robot can carry out the substrate without being restricted in movement by the correction tool.
第５の発明では第１の発明の基本動作に加えて、基板支
持具が一体に昇降する。連動具を上昇すると、基板支持
具が上昇して搬送ロボットから基板を受け取る。その
後、搬入側の搬送ロボットを退避させてから、連動具を
下降すると、修正具が下降して当接具に当接して起立
し、基板の位置修正を行う。次いで、再び連動具を上昇
し、修正具の当接具との当接による押し上げが解除され
て、修正具が傾倒姿勢になり、搬出側の搬送ロボットを
基板の下へ待機させておいてから、連動具を再度下降す
ると、基板支持具が下降し、下降する途中で搬送ロボッ
トへ基板を渡す。なお、まだ修正具が起立していない内
に、搬出側の搬送ロボットに基板が渡されるから、修正
具は渡された基板の下で起立するので、修正具に動きを
制約されることなく搬送ロボットが基板を搬出すること
ができる。In the fifth invention, in addition to the basic operation of the first invention, the substrate support moves up and down as a unit. When the interlocking tool is raised, the substrate support tool is raised and receives the substrate from the transfer robot. After that, when the transfer robot on the loading side is retracted and then the interlocking tool is lowered, the correction tool is lowered and abuts against the abutment tool to stand up to correct the position of the substrate. Next, the interlocking tool is lifted again, the push-up due to the contact of the repair tool with the contact tool is released, the repair tool is in the tilted posture, and the transfer robot on the unloading side is kept waiting under the substrate. When the interlocking tool is lowered again, the substrate support tool is lowered, and the substrate is handed over to the transfer robot on the way down. In addition, since the substrate is passed to the transfer robot on the unloading side while the repair tool is not upright, the repair tool stands up under the transferred substrate, so the repair tool can be transported without being restricted. The robot can carry out the substrate.
〈実施例〉 以下図面に基づいて本発明の実施例装置を説明する。<Embodiment> An embodiment of the present invention will be described below with reference to the drawings.
第１図は第１の発明の属する位置修正型基板支持装置の
斜視図、第２図はその縦断面図であり、検査装置等の前
段に配置される。FIG. 1 is a perspective view of a position-correcting type substrate supporting device to which the first invention belongs, and FIG. 2 is a longitudinal sectional view thereof, which is arranged in front of an inspection device or the like.
この装置は、基台１と基台１上に立設した左右一対の基
枠２・２と、基板支持具として基台１上に立設した３本
の基板支持ピン10‥と、各基枠２に揺動支点Ｑで支持し
た一対の修正具12・12と、修正具12を実線で示す起立姿
勢Ａと、第２図の仮想線で示す傾倒姿勢Ｂとの間で同期
連動可能に揺動する連動具15と、連動具15を昇降駆動す
るアクチェータ18とを具備して成り、 アーム昇降式搬送ロボット20Aで搬入した基板Ｗを３本
の基板支持ピン10‥で支持し、アクチェータ18で連動具
15を下降させることにより修正具12で基板Ｗの位置を修
正するように構成されている。This apparatus comprises a base 1, a pair of left and right base frames 2.2 standing on the base 1, three board support pins 10 standing on the base 1 as board supports, and each board. A pair of correction tools 12, 12 supported on the frame 2 at the swing fulcrum Q, a standing posture A shown by the solid line of the correction tool 12, and a tilted posture B shown by the phantom line in FIG. 2 can be synchronously interlocked. The swingable interlocking device 15 and the actuator 18 for moving the interlocking device 15 up and down are provided, and the substrate W loaded by the arm lift type transfer robot 20A is supported by the three substrate support pins 10 ... With interlocking tool
The position of the substrate W is corrected by the correction tool 12 by lowering the position 15.
即ち、各修正具12は第１図に示すようにＬ字状に形成し
た２個の部材を下部12cで一体に連接して一組となし、
基板支持ピン10のピンヘッド10aより下方に位置する揺
動支点Ｑで揺動可能に支持し、第２図に示すように圧縮
ばね13で下端部12cを押し上げることにより傾倒姿勢Ｂ
側へ付勢され、かつ左右一対の修正具12・12の下部12c
・12cに連動具15を架着し、圧縮ばね13に抗して下部12c
を押し下げるように構成されている。これにより起立姿
勢Ａでは基板支持ピン２で支持した基板Ｗの外縁に修正
具12の上部が当接して基板Ｗの位置を修正し、傾倒姿勢
Ｂでは当該上部12aが基板Ｗより下位に退避する。な
お、これらの図中符号14は基板Ｗに余分の当接力が作用
しないように修正具12の起立姿勢を規定するる規制具で
ある。又この規制具14に代えてアクチェータ18の昇降ス
トロークを規定するようにしてもよい。That is, as shown in FIG. 1, each correction tool 12 has two members formed in an L shape and integrally connected at the lower portion 12c to form one set,
The substrate support pin 10 is rockably supported by a rocking fulcrum Q located below the pin head 10a, and as shown in FIG.
The lower part 12c of the pair of right and left correction tools 12, 12 is biased to the side
・ Install the interlocking device 15 on 12c and lower 12c against compression spring 13.
Is configured to push down. As a result, in the standing posture A, the upper portion of the correction tool 12 is brought into contact with the outer edge of the substrate W supported by the substrate support pins 2 to correct the position of the substrate W, and in the tilted posture B, the upper portion 12a retracts below the substrate W. . Reference numeral 14 in these figures is a restricting tool that regulates the standing posture of the correcting tool 12 so that an excessive contact force does not act on the substrate W. Further, instead of the restrictor 14, the lifting stroke of the actuator 18 may be regulated.
第３図は第１の発明に属する上記装置の変形例を示す縦
断面図である。この装置は、一対の基枠２・２上にベー
ス板４を架設し、ベース板上に３本の基板支持ピン10‥
を立設し、連動具15の左右両側部に修正具12のエルボ12
bを押し上げる当ローラ16を設けた点が上記第２図のも
のと基本的に異なる。なお、基板Ｗの位置修正動作は同
様であり、その説明を省く。FIG. 3 is a vertical cross-sectional view showing a modified example of the above apparatus according to the first invention. In this device, a base plate 4 is erected on a pair of base frames 2.2, and three substrate support pins 10 ... Are mounted on the base plate.
Stand upright, and fix the elbow 12
The point that a roller 16 for pushing up b is provided is basically different from that shown in FIG. The position correcting operation of the substrate W is the same, and the description thereof will be omitted.
第４図は第２の発明の属する位置修正型基板支持装置の
斜視図、第５図はその縦断面図である。FIG. 4 is a perspective view of a position-correcting type substrate supporting device to which the second invention belongs, and FIG. 5 is a longitudinal sectional view thereof.
この装置は、基台１に３本の支柱2a‥を立設してベース
板４を架設固定し、ベース板４の左右両端部下面に修正
具12の下部12cを支持する揺動支点Ｑを設け、基板支持
ピン10‥は連動具15を構成する昇降板15a上に立設して
ベース板４にあけた挿通孔を通して昇降可能に構成し、
昇降板15aの左右両側部に修正具12のエルボ12bを押し上
げる当たりローラ16を設けて成り、修正具12は基板支持
ピン10の昇降と同期連動して起立・傾動退避するように
構成されている。In this device, three columns 2a ... Are erected on the base 1 and the base plate 4 is erected and fixed. The substrate support pins 10 are provided on the elevating plate 15a that constitutes the interlocking device 15 and can be moved up and down through the insertion holes formed in the base plate 4.
The lifting plate 15a is provided with a hit roller 16 for pushing up the elbow 12b of the correction tool 12 on both left and right sides, and the correction tool 12 is configured to stand up and tilt and retract in synchronization with the lifting and lowering of the substrate support pin 10. .
従って、この装置では第１図に示した装置の基本動作に
加えて、基板支持ピン10の下降と同期連動して修正具12
が傾倒するようになっており、次のように動作する。Therefore, in this device, in addition to the basic operation of the device shown in FIG.
Is designed to tilt and operates as follows.
基板Ｗの受け渡しを開始する前の初期状態では、昇降板
15aはまだ上昇させていない。この状態で、基板搬入側
の搬送ロボット（図示せず）が、基板支持ピン10の上方
へ基板Ｗを搬入してくる。In the initial state before the transfer of the substrate W is started, the lifting plate
15a has not yet risen. In this state, a transfer robot (not shown) on the substrate loading side loads the substrate W above the substrate support pins 10.
続いて、アクチェータ18で昇降板15aで上昇すると、基
板支持ピン10が上昇し、基板搬入側の搬送ロボットから
基板を受け取る。また、昇降板15aが上昇する過程で当
りローラ16が修正具12のエルボ12bを当接押し上げし、
修正具12を起立させ、基板支持ピン10に受け取られた基
板Ｗを位置修正する。Subsequently, when the actuator 18 raises the elevation plate 15a, the substrate support pins 10 are raised to receive the substrate from the substrate carrying-in side transfer robot. Further, the hitting roller 16 abuts and pushes up the elbow 12b of the correction tool 12 in the process of raising the elevating plate 15a,
The correction tool 12 is raised and the position of the substrate W received by the substrate support pins 10 is corrected.
次に、搬入側の搬送ロボットを退避させておいてから、
搬出側の搬送ロボット20Bを基板Ｗの下へ待機させ、昇
降板15aを下降すると、基板支持ピン10の上端が搬出側
の搬送ロボットより低くなるので、搬送ロボット20Bへ
基板Ｗが渡される。その際、昇降板15aの下降に伴っ
て、当たりローラ16による修正具12のエルボ12bの押し
上げが解除され、修正具12は傾倒し、修正具12は基板Ｗ
より下になる。そのため、基板搬出側の搬送ロボット20
Bは、修正具12に動きを制約されることなく、基板Ｗを
搬出することができる。なお、基板搬入側の搬送ロボッ
トから基板Ｗを受け取る際には、昇降板15aが上昇する
前に、基板を搬入するため、修正具12は、まだ起立姿勢
になってないので、搬送ロボットが修正具12に動きを制
約されることなく、基板を搬入することができる。Next, evacuate the transfer robot on the loading side,
When the carry-out side transfer robot 20B stands by below the substrate W and the elevating plate 15a is lowered, the upper ends of the substrate support pins 10 become lower than the carry-out side transfer robot, so that the substrate W is passed to the transfer robot 20B. At that time, the elbow 12b of the correction tool 12 is released from being pushed by the contact roller 16 as the lift plate 15a is lowered, the correction tool 12 is tilted, and the correction tool 12 is moved to the substrate W.
Below. Therefore, the transfer robot 20 on the substrate unloading side
B can carry out the substrate W without being restricted by the correction tool 12. When the substrate W is received from the transfer robot on the substrate loading side, since the substrate is loaded before the lift plate 15a is raised, the correction tool 12 is not in the upright posture, so the transfer robot corrects it. The substrate can be loaded without the movement of the tool 12 being restricted.
このように、アクチェータ18の１回の昇降動作で基板の
受け渡し位置修正動作と基板Ｗの搬入及び搬出時の修正
具12の傾倒動作のすべてを行い、以下の特有の効果を有
する。As described above, all of the operation of correcting the transfer position of the substrate and the tilting operation of the correction tool 12 when loading and unloading the substrate W are performed by one elevating operation of the actuator 18, and the following unique effects are obtained.
１回の昇降動作だけであるから、位置修正を伴う基板Ｗ
の受け渡しが、迅速である。昇降板15aを昇降するだけ
で、基板搬入時の修正具12の傾倒動作から、基板Ｗの受
け取り動作、基板Ｗの位置修正動作、基板Ｗを渡す動
作、搬出時の修正具12の傾倒動作に至る一連の動作が、
タイミング制御を要さずに行える。搬出側の搬送ロボッ
トには、基板Ｗを昇降する機能を有していなくても、基
板Ｗの受け渡し及び、修正具12に動きを制約されること
なく基板の搬入と搬出ができ、搬送ロボットに簡単な機
構のものを使用できる。Substrate W with position correction because it only needs to be moved once
The delivery of is quick. By simply moving up and down the lift plate 15a, the tilting operation of the correction tool 12 at the time of substrate loading, the receiving operation of the substrate W, the position correction operation of the substrate W, the operation of passing the substrate W, the tilting operation of the correction tool 12 at the time of unloading A series of operations leading to
It can be performed without the need for timing control. Even if the transfer robot on the unloading side does not have the function of raising and lowering the substrate W, the transfer robot can transfer the substrate W and carry it in and out without the movement of the correction tool 12 being restricted. A simple mechanism can be used.
第６図は上記第３の発明に属する装置を示す斜視図であ
る。この装置は連動具15を構成する昇降板15aで修正具1
2を支持した点が第４図のものと異なり、第６図中、符
号12dはベース板４の一端部下面に当接する修正具12の
当接ローラ、13aは修正具12を傾倒姿勢側へ付勢する錘
りであり、連動具15を構成する昇降板15aの昇降に伴っ
て、修正具12の揺動支点Ｑも昇降し、その上昇に伴っ
て、修正具12の当接ローラ12dがベース板４に当接して
押し下げられて、修正具12が起立するようになってお
り、次のように動作する。なお、ベース板４が第３の発
明の構成における当接具に相当する。FIG. 6 is a perspective view showing an apparatus according to the third invention. This device uses the lifting plate 15a that constitutes the interlocking device 15
Unlike FIG. 4 in that 2 is supported, in FIG. 6, reference numeral 12d indicates an abutment roller of the correction tool 12 that abuts the lower surface of one end of the base plate 4, and 13a indicates the correction tool 12 in the tilted posture side. The weight is an urging weight, and the rocking fulcrum Q of the correction tool 12 also moves up and down as the lift plate 15a that constitutes the interlocking tool 15 moves up and down. The correction tool 12 stands up by being pressed against the base plate 4 and operates as follows. The base plate 4 corresponds to the abutment tool in the configuration of the third invention.
基板Ｗの受け渡しを開始する前の初期状態では、昇降板
15aはまだ上昇させていない。この状態で、基板搬入側
の搬送ロボット（図示せず）が、基板支持ピン10の上方
へ基板Ｗを搬入してくる。In the initial state before the transfer of the substrate W is started, the lifting plate
15a has not yet risen. In this state, a transfer robot (not shown) on the substrate loading side loads the substrate W above the substrate support pins 10.
続いて、アクチェータ18で昇降板15aを上昇すると、基
板支持ピン10が上昇し、基板搬入側の搬送ロボットから
基板を受け取る。また、昇降板15aが上昇する過程で、
修正具12の当接ローラ12dがベース板４に当接して押し
下げられ、修正具12を起立させ、基板支持ピン10に受け
取られた基板Ｗを位置修正する。Subsequently, when the lift plate 15a is lifted by the actuator 18, the substrate support pins 10 are lifted to receive the substrate from the transfer robot on the substrate loading side. Also, in the process of raising the lifting plate 15a,
The contact roller 12d of the repair tool 12 contacts the base plate 4 and is pushed down to raise the repair tool 12 and correct the position of the substrate W received by the substrate support pin 10.
次に、搬入側の搬送ロボットを退避させておいてから、
搬出側の搬送ロボット（図示せず）を基板Ｗの下へ待機
させ、昇降板15aを下降すると、搬送ロボットへ基板Ｗ
が渡される。また、昇降板15aの下降に伴って、当接ロ
ーラ12dの押し下げが解除され、修正具12は傾倒し、修
正具12は基板Ｗより下になる。そのため、基板搬出側の
搬送ロボットは、修正具12に動きを制約されることな
く、基板Ｗを搬出することができる。なお、基板搬入側
の搬送ロボットから基板Ｗを受け取る際には、昇降板15
aが上昇する前に、基板を搬入するため、まだ修正具12
は起立姿勢にないので、搬送ロボットが修正具12に動き
を制約されることなく、基板を搬入することができる。Next, evacuate the transfer robot on the loading side,
When a transfer robot (not shown) on the unloading side stands by below the substrate W and the elevating plate 15a is lowered, the transfer robot transfers the substrate W to the substrate W.
Is passed. Further, as the lift plate 15a is lowered, the pressing of the contact roller 12d is released, the repair tool 12 is tilted, and the repair tool 12 is positioned below the substrate W. Therefore, the transport robot on the substrate unloading side can unload the substrate W without the movement of the repair tool 12 being restricted. When the substrate W is received from the transfer robot on the substrate loading side, the lifting plate 15
Fixer 12 is still in place to load the board before a rises.
Since the robot is not in the upright posture, the substrate can be carried in without the movement of the transfer robot being restricted by the correction tool 12.
このように、第３の発明に属する第６図示の実施例で
も、第２の発明に属する第４図及び第５図示の実施例と
同様に、アクチェータ18の１回の昇降動作で基板の受け
渡しと、位置修正動作と、基板Ｗの搬入及び搬出時の修
正具12の傾倒動作のすべてを行い、第４図及び第５図示
の実施例と同様の特有の効果を有する。As described above, also in the sixth embodiment shown in the third invention, as in the embodiments shown in FIGS. 4 and 5 belonging to the second invention, the substrate is transferred by one elevating operation of the actuator 18. The position correction operation and the tilting operation of the correction tool 12 when loading and unloading the substrate W are all performed, and the same specific effects as those of the embodiments shown in FIGS. 4 and 5 are obtained.
第７図は第４の発明に属する位置修正型基板支持装置の
斜視図である。この装置は、基台１に直接ベース板４を
固設し、ベース板４上の左右両端部に各修正具12のエル
ボ12bを支持する揺動支点Ｑを設け、ベース板４の上方
に昇降板15aを配置してアクチェータ18の出力ドットで
昇降可能に支持し、昇降板15aに基板支持ピン10‥を立
設し、各修正具12の下部に当接ローラ12dを設けて成
り、修正具12は当接ローラ12dが昇降板15aの両端部下面
と当接して押し下げられることにより、傾倒姿勢から起
立姿勢へ同期連動するように構成されている。なお、同
図中符号12eは、修正具12に付設された基板支持具、13b
は修正具12を傾倒姿勢側へ付勢する引張ばねであり、起
立姿勢では、当該支持具12eで基板Ｗを支持することに
なる。このためピンヘッド10aと基板Ｗとの間に、わず
かな隙間が形成される。FIG. 7 is a perspective view of a position-correcting type substrate supporting device according to the fourth invention. In this device, a base plate 4 is fixedly mounted directly on a base 1, rocking fulcrums Q for supporting the elbows 12b of the respective correction tools 12 are provided at both left and right ends of the base plate 4, and the base plate 4 is elevated above the base plate 4. The plate 15a is arranged to be supported by output dots of the actuator 18 so as to be able to move up and down, the substrate support pins 10 ... Are erected on the lift plate 15a, and the abutment roller 12d is provided at the bottom of each correction tool 12. The contact roller 12d is configured to synchronously interlock from the tilted posture to the standing posture by the contact rollers 12d coming into contact with the lower surfaces of both end portions of the lift plate 15a and being pushed down. Incidentally, reference numeral 12e in the figure is a substrate support attached to the correction tool 12, 13b.
Is a tension spring for urging the correction tool 12 toward the tilted posture, and supports the substrate W by the support tool 12e in the standing posture. Therefore, a slight gap is formed between the pin head 10a and the substrate W.
この装置では、連動具15を構成する昇降板15aの下降に
伴って、修正具12の当接ローラ12dがベース板４に押し
下げられて、修正具12が起立するようになっており、次
のように動作する。In this device, the contact roller 12d of the repair tool 12 is pushed down by the base plate 4 as the lift plate 15a that constitutes the interlocking tool 15 is lowered, and the repair tool 12 stands up. Works like.
基板Ｗの受け渡しを開始する前の初期状態では、昇降板
15aはまだ上昇させていない。この状態で、基板搬入側
の搬送ロボット（図示せず）が、基板支持ピン10の上方
へ基板Ｗを搬入してくる。In the initial state before the transfer of the substrate W is started, the lifting plate
15a has not yet risen. In this state, a transfer robot (not shown) on the substrate loading side loads the substrate W above the substrate support pins 10.
続いて、アクチェータ18で昇降板15aを上昇すると、昇
降板15aによる当接ローラ12dの押し下げが解除されて修
正具12が傾倒するとともに、基板支持ピン10が上昇し、
基板搬入側の搬送ロボットから基板を受け取る。Subsequently, when the elevator plate 15a is raised by the actuator 18, the pressing roller 12d is released from being pushed down by the elevator plate 15a, the correction tool 12 is tilted, and the substrate support pin 10 is raised.
A substrate is received from the transfer robot on the substrate loading side.
更に続けて、搬入側の搬送ロボットを退避させておいて
から、昇降板15aを下降すると、当接ローラ12dが昇降板
15aに押し下げられて、修正具12が起立し、基板Ｗを位
置修正する。Then, after the transfer robot on the loading side is retracted and the lifting plate 15a is lowered, the contact roller 12d moves to the lifting plate.
The correction tool 12 is erected by being pushed down by 15a and corrects the position of the substrate W.
次に、再度、昇降板15aを上昇させておいてから、搬出
側の搬送ロボット（図示せず）を基板Ｗの下へ待機さ
せ、昇降板15aを再度下降すると、搬送ロボットへ基板
Ｗが渡される。なお、昇降板15aの下降に伴って、修正
具12が起立するが、起立し終えるまでに搬送ロボットへ
基板Ｗが渡されるので、修正具12は渡された基板Ｗの下
で起立するから、修正具12に動きを制約されることなく
基板搬出側の搬送ロボットが、基板Ｗを搬出することが
できる。Next, the elevating plate 15a is raised again, and then the carry-out side transfer robot (not shown) is made to stand by under the substrate W. When the elevating plate 15a is lowered again, the substrate W is passed to the transfer robot. Be done. Note that the correction tool 12 stands up with the lowering of the lift plate 15a, but since the substrate W is handed over to the transfer robot by the end of the standing up, the correction tool 12 stands up under the passed substrate W, The transport robot on the substrate unloading side can unload the substrate W without the movement of the repair tool 12 being restricted.
このように、アクチェータ18の２回の昇降動作で基板Ｗ
の受け渡しと、位置修正動作と基板Ｗの搬入及び搬出時
の修正具12の傾倒動作のすべてを行い、以下の特有の効
果を有する。In this way, the substrate W is moved by the lifting and lowering operations of the actuator 18 twice.
And the position correction operation and the tilting operation of the correction tool 12 at the time of loading and unloading the substrate W are performed, and the following unique effects are obtained.
昇降板15aを昇降するだけで、基板受け取りのための基
板支持ピン10の上昇動作、基板Ｗの位置修正動作、基板
を渡すための基板支持ピン10の下降動作に至る一連の動
作が、タイミング制御を要さずに行える。搬出側の搬送
ロボットには、基板Ｗを昇降する機能を有していなくて
も、基板Ｗの受け渡し及び修正具12に動きを制約される
ことなく基板の搬入と搬出ができ、搬送ロボットに簡単
な機構なものを使用できる。Timing control of a series of operations from the raising operation of the substrate supporting pin 10 for receiving the substrate, the position correcting operation of the substrate W, and the lowering operation of the substrate supporting pin 10 for handing over the substrate are performed only by raising and lowering the raising and lowering plate 15a. Can be done without the need. Even if the transfer robot on the unloading side does not have the function of raising and lowering the substrate W, the substrate can be loaded and unloaded without being constrained by the transfer of the substrate W and the movement of the correction tool 12, which is easy for the transfer robot. It is possible to use a simple mechanism.
第８図は上記第４の発明の変形例を示す要部縦断面図で
ある。この装置は修正具12の上部12aを錘り状に形成し
て引張りばね13bを省くとともに、当接ローラ12dを省い
て直接修正具12の下部を押し下げるように構成し、構造
を簡素化したものである。なお、基板の位置修正動作等
は第７図示のものと同様であり、その説明を省く。FIG. 8 is a longitudinal cross-sectional view of a main part showing a modified example of the fourth invention. In this device, the upper part 12a of the correction tool 12 is formed in a weight shape to omit the tension spring 13b, and the contact roller 12d is omitted to directly push down the lower part of the correction tool 12 to simplify the structure. Is. The board position correcting operation and the like are the same as those shown in FIG. 7, and a description thereof will be omitted.
第９図は、上記第５の発明を示す斜視図である。この装
置は昇降板15aの左右両端部に修正具12を支持する揺動
支点Ｑを設け、修正具12の下部12cに取着した当接ロー
ラ12dを基台１に当接させることにより、基板支持ピン1
0の下降時に修正具12を傾動させ、上昇時に引張ばね13b
により修正具12を傾動させるように構成されており、次
のように作動する。FIG. 9 is a perspective view showing the fifth invention. In this device, swinging fulcrums Q for supporting the correction tool 12 are provided at both left and right ends of the lift plate 15a, and the contact roller 12d attached to the lower portion 12c of the correction tool 12 is brought into contact with the base 1 to thereby remove the substrate. Support pin 1
Tilt the corrector 12 when it descends 0, and tension spring 13b when it ascends.
Is configured to tilt the correction tool 12 and operates as follows.
基板Ｗの受け渡しを開始する前の初期状態では、昇降板
15aはまだ上昇させていない。この状態で基板搬入側の
搬送ロボット（図示せず）が、基板支持ピン10の上方へ
基板Ｗを搬入してくる。In the initial state before the transfer of the substrate W is started, the lifting plate
15a has not yet risen. In this state, a transfer robot (not shown) on the substrate loading side carries in the substrate W above the substrate support pins 10.
続いて、アクチェータ18で昇降板15aを上昇する。昇降
板15aとともに修正具12の揺動支点Ｑが上昇し、当接ロ
ーラ12dの基台１による押上げ方向の力が解除されて、
修正具12が傾倒するとともに、基板支持ピン10が上昇
し、基板搬入側の搬送ロボットから基板を受け取る。Then, the actuator 18 lifts the lift plate 15a. The rocking fulcrum Q of the correction tool 12 rises together with the lift plate 15a, and the force of the contact roller 12d in the direction of pushing up by the base 1 is released,
As the correction tool 12 is tilted, the substrate support pin 10 is lifted to receive the substrate from the transfer robot on the substrate loading side.
さらに続けて、搬入側の搬送ロボットを退避させておい
てから、昇降板15aを下降すると、当接ローラ12dが基台
１に当接して押し下げる方向の力を受け、修正具12が起
立し、基板Ｗを位置修正する。Further, subsequently, after the transfer robot on the loading side is retracted, when the elevating plate 15a is lowered, the contact roller 12d receives a force in a direction of contacting and pushing down the base 1, and the correction tool 12 stands up. The position of the substrate W is corrected.
次に、再度、昇降板15aを上昇しておいてから搬出側の
搬送ロボット（図示せず）を基板Ｗの下へ待機させ、昇
降板15aを再度下降すると、搬送ロボットへ基板Ｗが渡
される。なお、昇降板15aの下降に伴って修正具12が起
立するが、起立し終えるまでに搬送ロボットへ基板Ｗが
渡されるので、修正具12に動きを制約されることなく基
板搬出側の搬送ロボットが、基板Ｗを搬出することがで
きる。Next, the elevating plate 15a is raised again, and then the transfer robot (not shown) on the unloading side is made to stand by under the substrate W. When the elevating plate 15a is lowered again, the substrate W is passed to the transfer robot. . Although the correction tool 12 stands up as the lift plate 15a descends, the substrate W is handed over to the transfer robot by the time it finishes standing, so the transfer robot on the substrate unloading side is not restricted by the correction tool 12 in movement. However, the substrate W can be unloaded.
このようにアクチェータ18の２回の昇降動作で基板Ｗの
受け渡しと、位置修正動作と基板Ｗの搬入及び搬出時の
修正具12の傾倒動作のすべてを行い、第４の発明に属す
る第７図及び第８図示の実施例と同様の特有の効果を有
する。In this way, all of the transfer of the substrate W, the position correction operation, and the tilting operation of the correction tool 12 at the time of loading and unloading of the substrate W are performed by the two raising and lowering operations of the actuator 18 in this way, and which corresponds to the fourth invention. And has the same unique effect as the embodiment shown in FIG.
なお、上記実施例ではいづれも搬送ロボット間での基板
の受け渡し用の位置修正型基板支持装置として説明した
が、検査装置等の試料台として適用することもできる。In each of the above embodiments, the position-corrected substrate supporting device for transferring the substrate between the transfer robots has been described, but it can be applied as a sample stage for an inspection device or the like.
また、上記実施例では基板支持具としてピン10を用いて
いるが、これに代えて吸着式のチャック等を用いること
もできる。同様に修正具についても多様な変形を加えて
実施し得る。Further, although the pin 10 is used as the substrate support in the above-mentioned embodiment, a suction chuck or the like may be used instead of the pin 10. Similarly, the correction tool can be implemented with various modifications.
〈発明の効果〉 以上の説明で明らかなように、第１の発明は、基板の位
置を修正するための修正具を起立姿勢と傾倒姿勢との間
で揺動させ、基板の受け渡しに際し、修正具の上部を当
該支持位置よりも下方に退避させるようにしたので、次
のイ及びロの効果を奏する。<Effects of the Invention> As is apparent from the above description, the first invention is that the correction tool for correcting the position of the substrate is swung between the upright posture and the tilted posture, and when the substrate is transferred, the correction is performed. Since the upper part of the tool is retracted below the supporting position, the following effects a and b are obtained.
さらに、第２と第３の発明は連動具とともに基板支持具
を昇降するようにし、上昇した位置で基板の位置修正を
するようにしたから、以下のイ．ロ．ハ．ニ．及びホの
効果を奏する。Further, in the second and third inventions, the substrate support is raised and lowered together with the interlocking device, and the position of the substrate is corrected at the raised position. B. C. D. And the effect of e is produced.
また、第４と第５の発明は、第１の発明をさらに連動具
とともに基板支持具を昇降するようにし、下降した位置
で基板の位置修正をするようにしたから、以下のイ．
ロ．ハハ及びニの効果を奏する。Further, in the fourth and fifth inventions, the first invention is further arranged to raise and lower the substrate support together with the interlocking device, and the position of the substrate is corrected at the lowered position.
B. Has the effect of haha and d.
イ．修正具が移動することにより基板の位置を修正する
から、基板の位置を修正する範囲が広い。I. Since the position of the substrate is corrected by moving the correction tool, the range of correcting the position of the substrate is wide.
ロ．搬送ロボットとの基板の受け渡しに際し、修正具
が、搬送ロボットによる基板の移動に障害とならないよ
うに、修正具を搬送中の基板より下へ移動し、修正具が
搬送ロボットの動きを制約せず、搬送ロボットの動きが
自由である。B. When transferring the substrate to the transfer robot, move the repair tool below the substrate being transferred so that the repair tool does not interfere with the movement of the substrate by the transfer robot, and the repair tool does not restrict the movement of the transfer robot. The movement of the transfer robot is free.
ハ．基板を受け渡しするために基板支持具を昇降する動
作と、基板の位置を修正する方向へ修正具を移動させる
動作や、修正具を基板から離れる方向へ移動させる動作
を、タイミング制御する必要がない。C. There is no need to control the timing of the operation of raising and lowering the substrate support tool for transferring the substrate, the operation of moving the repair tool in the direction to correct the position of the substrate, and the operation of moving the repair tool away from the substrate. .
ニ．搬出側の搬送ロボットには、基板を昇降する機能を
有していなくても、基板を渡すこと及び修正具に動きを
制約されることなく基板を搬出することができ、搬出側
の搬送ロボットに簡単な機構のものを使用できる。D. Even if the transfer robot on the unloading side does not have a function of raising and lowering the substrate, the substrate can be carried out without being constrained by the movement of the substrate and the correction tool. A simple mechanism can be used.
ホ．連動具を１回昇降動作させるだけで、位置修正を伴
う基板Ｗの受け渡しが迅速にできる。E. Only by raising and lowering the interlocking tool once, the substrate W can be quickly delivered with the position correction.
第１図〜第９図は本発明に係る位置修正型基板支持装置
の実施例を示し、第１図は第１の発明に属する実施例装
置の斜視図、第２図はその縦断面図、第３図はその変形
例を示す縦断面図、第４図は第２の発明の属する実施例
装置の斜視図、第５図はその縦断面図、第６図は第３の
発明に属する実施例装置を示す斜視図、第７図は第４の
発明に属する実施例装置の斜視図、第８図はその変形例
を示す縦断面図、第９図は第５の発明に属する実施例装
置を示す斜視図、第10図及び第11図はそれぞれ従来例を
示す斜視図である。 10……基板支持具（基板支持ピン）、12……修正具、12
a……修正具の上部、15・15a……連動具（昇降板）、1
6.16a……当接具、18……アクチェータ、Ａ……起立姿
勢、Ｂ……傾倒姿勢、Ｑ……揺動支点、Ｗ……基板。1 to 9 show an embodiment of a position correction type substrate supporting apparatus according to the present invention, FIG. 1 is a perspective view of an embodiment apparatus belonging to the first invention, and FIG. 2 is a longitudinal sectional view thereof. FIG. 3 is a longitudinal sectional view showing a modification thereof, FIG. 4 is a perspective view of an apparatus of an embodiment to which the second invention belongs, FIG. 5 is a longitudinal sectional view thereof, and FIG. 6 is an embodiment belonging to the third invention. FIG. 7 is a perspective view showing an example device, FIG. 7 is a perspective view of an example device belonging to the fourth invention, FIG. 8 is a longitudinal sectional view showing a modification thereof, and FIG. 9 is an example device belonging to the fifth invention. FIG. 10, FIG. 10 and FIG. 11 are perspective views showing conventional examples. 10 …… Board support tool (board support pin), 12 …… Correcting tool, 12
a …… Upper part of the correction tool, 15 ・ 15a …… Interlocking tool (elevation plate), 1
6.16a ... Abutment tool, 18 ... actor, A ... standing posture, B ... tilting posture, Q ... swing fulcrum, W ... substrate.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 奥野 英治 京都府京都市伏見区羽束師古川町322番地 大日本スクリーン製造株式会社洛西工場 内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Eiji Okuno 322 Hazashishi Furukawacho, Fushimi-ku, Kyoto, Kyoto Prefecture Dainippon Screen Mfg. Co., Ltd. Rakusai Factory
Claims (5)
より下方に揺動支点を有し、起立姿勢と傾倒姿勢との間
で揺動可能に支持され、当該支持基板の周囲に配置され
た複数の修正具と、昇降可能に設けられ、複数の修正具
を上記両姿勢間で同期連動可能に揺動する連動具と、連
動具を昇降駆動するアクチェータとを具備して成り、 複数の修正具が連動具の昇降に基づき同期連動すること
により、起立姿勢では基板支持具で支持した基板の外縁
に修正具の上部が当接して基板の位置を修正し、傾倒姿
勢では修正具の上部が当該基板より下位に退避するよう
に構成したことを特徴とする位置修正型基板支持装置1. A substrate support and a swing fulcrum below the substrate supported by the substrate support, which is swingably supported between an upright posture and a tilted posture and is arranged around the support substrate. A plurality of corrective tools, an interlocking tool that can be moved up and down, and that swings the plurality of corrective tools so that they can be synchronously interlocked between the two postures, and an actuator that moves the interlocking tools up and down. When the corrector is synchronized with the interlocking tool as it moves up and down, the upper part of the corrector abuts the outer edge of the substrate supported by the substrate support in the upright posture to correct the position of the substrate, and in the tilted posture the corrector A position-correcting type substrate supporting device characterized in that the upper part is configured to be retracted below the substrate.
より下方に揺動支点を有し、起立姿勢と傾倒姿勢との間
で揺動可能に支持され、当該基板の周囲に配置された複
数の修正具と、基板支持具を固設して昇降可能に設置さ
れ、上昇時に各修正具と当接し、上昇位置では各修正具
を起立姿勢に規制する連動具と、連動具を昇降駆動する
アクチェータとを具備して成り、 複数の修正具が連動具の上昇に基づき基板支持具の上昇
と同期連動して起立し、その起立姿勢では基板支持具で
支持した基板の外縁に修正具の上部が当接して基板の位
置を修正し、連動具の下降に基づき基板支持具の下降と
同期連動して傾動し、その傾倒姿勢では修正具の上部が
当該基板より下位に退避するように構成したことを特徴
とする位置修正型基板支持装置2. A substrate supporting member and a swinging fulcrum below the substrate supported by the substrate supporting member, which is swingably supported between an upright posture and a tilted posture and is arranged around the substrate. A plurality of corrective tools and a board support are fixedly installed so that they can be moved up and down, and they come in contact with each corrective tool when ascending, and at the raised position, the interlocking tool that regulates each corrective tool in the standing posture and the interlocking tool is raised and lowered. A plurality of correction tools stand up in synchronization with the rise of the substrate support tool based on the rise of the interlocking tool, and in the standing posture, the correction tools are provided on the outer edge of the substrate supported by the substrate support tool. The upper part of the board contacts the board and corrects the position of the board.When the interlocking tool descends, the board support tool tilts in synchronization with the lowering of the board support tool. In the tilted posture, the upper part of the repair tool retracts below the board. Position-corrected substrate support device characterized by being configured
より下方に揺動支点を有し、起立姿勢と傾倒姿勢との間
で揺動可能に支持され、当該支持基板の周囲に配置され
た複数の修正具と、基板支持具を固設して昇降可能に設
置され、各修正具を傾倒可能に支持する連動具と、連動
具とともに上昇する修正具と当接して修正具を傾倒姿勢
から起立姿勢へ規制する当接具と、連動具を昇降駆動す
るアクチェータとを具備して成り、 複数の修正具が連動具の上昇に基づき基板支持具の上昇
と同期連動して起立し、その起立姿勢では基板支持具で
支持した基板の外縁に修正具の上部が当接して基板の位
置を修正し、連動具の下降に基づき基板支持具の下降と
同期連動して傾動し、その傾倒姿勢では修正具の上部が
当該基板より下位に退避するように構成したことを特徴
とする位置修正型基板支持装置3. A substrate supporting member and a swinging fulcrum below the substrate supported by the substrate supporting member, which is swingably supported between an upright posture and a tilted posture, and is arranged around the supporting substrate. A plurality of corrective tools and a substrate support tool are fixedly installed so that they can be moved up and down, and the corrective tool is tilted by abutting the interlocking tool that supports each corrective tool in a tiltable manner and the corrective tool that rises with the interlocking tool It comprises an abutment tool that regulates from a posture to an upright posture, and an actuator that drives the interlocking tool up and down, and a plurality of correction tools stand up in synchronization with the rise of the substrate support tool based on the ascent of the interlocking tool, In the upright position, the upper part of the correction tool abuts the outer edge of the substrate supported by the substrate support tool to correct the position of the board, and tilts in synchronization with the descent of the substrate support tool based on the descent of the interlocking tool, and the tilting. In the posture, the upper part of the correction tool should be retracted below the board. Position correction type substrate support device characterized by being made
より下方に揺動支点を有し、起立姿勢と傾倒姿勢との間
で揺動可能に支持され、当該支持基板の周囲に配置され
た複数の修正具と、基板支持具を固設して昇降可能に設
置され、下降時に各修正具と当接し、下降位置では各修
正具を起立姿勢に規制する連動具と、連動具を昇降駆動
するアクチェータとを具備して成り、 複数の修正具が連動具の下降に基づき基板支持具の下降
と同期連動して起立し、その起立姿勢では基板支持具で
支持した基板の外縁に修正具の上部が当接して基板の位
置を修正し、連動具の上昇に基づき基板支持具の上昇と
同期連動して傾動し、その傾倒姿勢では修正具の上部が
当該基板より下位に退避するように構成したことを特徴
とする位置修正型基板支持装置4. A substrate support and a swing fulcrum below the substrate supported by the substrate support, which is swingably supported between an upright posture and a tilted posture, and is arranged around the support substrate. The plurality of corrective tools and the board supporting tool are fixedly installed so that they can be moved up and down.The interlocking tool and the interlocking tool that come into contact with the respective corrective tools when descending and restrict the respective corrective tools to the standing posture at the lowered position are provided. It is equipped with an actuator that is driven up and down, and a plurality of correction tools stand up in synchronization with the descent of the substrate support tool based on the descent of the interlocking tool, and in that standing posture, the correction is performed on the outer edge of the substrate supported by the substrate support tool. The upper part of the tool abuts and corrects the position of the board, and tilts in synchronization with the rise of the substrate support tool based on the rise of the interlocking tool, and in the tilted posture, the upper part of the fix tool retracts below the substrate. Position correction type substrate support device characterized in that
より下方に揺動支点を有し、起立姿勢と傾倒姿勢との間
で揺動可能に支持され、当該支持基板の周囲に配置され
た複数の修正具と、基板支持具を固設して昇降可能に設
置され、複数の修正具を同期連動可能に支持する連動具
と、連動具の下降により修正具と当接して修正具を傾倒
姿勢から起立姿勢へ規制する当接具と、連動具を昇降駆
動するアクチェータとを具備して成り、 複数の修正具が連動具の下降に基づき基板支持具の下降
と同期連動して起立し、その起立姿勢では基板支持具で
支持した基板の外縁に修正具の上部が当接して基板の位
置を修正し、連動具の上昇に基づき基板支持具の上昇と
同期連動して傾動し、その傾倒姿勢では修正具の上部が
当該基板より下位に退避するように構成したことを特徴
とする位置修正型基板支持装置5. A substrate support and a swing fulcrum below the substrate supported by the substrate support, are swingably supported between an upright posture and a tilted posture, and are arranged around the support substrate. A plurality of corrective tools and a board supporting tool fixedly installed so as to be able to move up and down, and the interlocking tool that supports the plurality of corrective tools in a synchronously interlocking manner and the corrective tool that abuts the corrective tool when the interlocking tool descends. It is equipped with an abutment tool that regulates the tilting posture from a tilted posture to an upright posture, and an actuator that raises and lowers the interlocking device. Then, in its standing posture, the upper portion of the correction tool abuts the outer edge of the substrate supported by the substrate support tool to correct the position of the substrate, and tilts in synchronization with the rise of the substrate support tool based on the rise of the interlocking tool, In that tilted position, the top of the repair tool should be retracted below the board. Position correction type substrate support device characterized in that
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1169264A JPH0671042B2 (en) | 1989-06-29 | 1989-06-29 | Position correction type substrate support device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1169264A JPH0671042B2 (en) | 1989-06-29 | 1989-06-29 | Position correction type substrate support device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0334345A JPH0334345A (en) | 1991-02-14 |
| JPH0671042B2 true JPH0671042B2 (en) | 1994-09-07 |
Family
ID=15883287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1169264A Expired - Lifetime JPH0671042B2 (en) | 1989-06-29 | 1989-06-29 | Position correction type substrate support device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0671042B2 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09213769A (en) * | 1996-01-31 | 1997-08-15 | Komatsu Electron Metals Co Ltd | Semiconductor wafer transfer device |
| US5980195A (en) * | 1996-04-24 | 1999-11-09 | Tokyo Electron, Ltd. | Positioning apparatus for substrates to be processed |
| US5944476A (en) * | 1997-03-26 | 1999-08-31 | Kensington Laboratories, Inc. | Unitary specimen prealigner and continuously rotatable multiple link robot arm mechanism |
| JP3578593B2 (en) * | 1997-06-04 | 2004-10-20 | 東京エレクトロン株式会社 | Substrate alignment device |
| US6309163B1 (en) * | 1997-10-30 | 2001-10-30 | Applied Materials, Inc. | Wafer positioning device with storage capability |
| US6183189B1 (en) * | 1998-11-27 | 2001-02-06 | Chartered Semiconductor Manufacturing, Ltd. | Self aligning wafer chuck design for wafer processing tools |
| JP2002064132A (en) * | 2000-08-22 | 2002-02-28 | Tokyo Electron Ltd | Delivery method of member to be treated, placement mechanism for the member and probing device |
| JP4435443B2 (en) * | 2001-04-17 | 2010-03-17 | 大日本スクリーン製造株式会社 | Substrate transport apparatus and substrate transport method |
-
1989
- 1989-06-29 JP JP1169264A patent/JPH0671042B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0334345A (en) | 1991-02-14 |
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