JPH0666738A - Exafs measuring instrument - Google Patents

Abstract

PURPOSE:To obtain an extended X-ray absorption fine structure (EXAFS) measuring instrument which can use liquid samples as objects to be measured. CONSTITUTION:The instrument is constituted in such a way that X-rays of different energy are taken out by changing the incident angle theta of X rays R1 made incident to a monochromator 10 from an X-ray source F while the source F, monochromator 10, and a light receiving slit 17 are always positioned on a Rowland circle L1 and the X rays are projected upon a sample 27. The circle L1 is set so that the circuit L1 can be included in a vertical plane and the sample 27 is supported by means of a cylindrical sample holder 53. In addition, the holder 53 is maintained so that the holder 53 can be parallel-displaced by means of a horizontal sample holding mechanism 62 without being tilted.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to EXAF for performing structural analysis of a sample by measuring so-called EXAFS.
It relates to an S measuring device.

[0002]

2. Description of the Related Art EXAFS is an extended X-ray absorption fine structure (extended X-ray absorption fine structure).
Fine Structure), which is an absorption fine structure seen over a range of about 1 KeV from the X-ray absorption edge of a composition atom of a crystal sample or an amorphous sample toward the higher energy side. By observing the graphic pattern of this EXAFS, information on the atoms constituting the sample can be obtained. To measure this EXAFS, while changing the energy of X-rays transmitted through the sample, that is, the wavelength of X-rays, the ratio of the X-ray intensity before passing through the sample to the X-ray intensity after passing through the sample is The energy value of is calculated.

An EXAFS measuring device having a structure shown in FIG. 4 is conventionally known. This apparatus is roughly divided into a first spectroscopic mechanism 101 and a second spectroscopic mechanism 102. The first spectroscopic mechanism 101 is a base 1
A first traveling body 107 that is fixedly installed on 05 and movable in the front-rear direction by being guided by a first guide rail 106 that extends in the front-rear direction, and a second guide that is fixedly installed on the base 105 and extends in the left-right direction in the drawing. It has a second traveling body 109 which is guided by the rail 108 and is movable in the left-right direction in the drawing. The first traveling body 107 and the second traveling body 109 are connected by a long first link 103 that is rotatably connected to each traveling body. First link 103
The first crystal monochromator 110 is provided integrally with the first link 103 on the left end of the first crystal monochromator 110, and the X-ray diffraction surface of the first crystal monochromator 110 is on the first traveling body 107. It coincides with the rotation axis Y1.

On a guide rod 111 extending rightward from the first crystal monochromator 110, a third traveling body 112 is slidably movable with respect to the guide rod 111. The third traveling body 112 is connected to the first link 103 via a second link 104 whose one end is rotatably connected to the third traveling body 112. The first link 103 and the second link 104 are connected to each other so that they can rotate freely. The first light receiving slit 117 is provided on the third traveling body 112.

The first traveling body 107 is a pulse motor 113.
It is screwed into a rod-shaped feed screw 114 that is driven to rotate by the pulse motor 113.
When driven and rotated by, it translates along the first guide rail 106. The third traveling body 112 is screw-fitted to a rod-shaped feed screw 116 that is rotationally driven by the pulse motor 115, and when the feed screw 116 is driven by the pulse motor 115 to rotate,
It translates along the guide rod 111.

The above is the structure of the first spectroscopic mechanism 101. The first spectroscopic mechanism 101 operates so that the X-ray source F, the first crystal monochromator 110, and the first light receiving slit 117 are always positioned on the Rowland circle L1.

The second spectroscopic mechanism 102 includes a guide rod 11
A first traveling body 118 slidably provided on the first traveling body 118;
Measuring stand 119 and three links 120a, 120b, 1
20c, and a feed screw 122 that is rotationally driven by the pulse motor 121 to move the fourth traveling body 118 in parallel.
Further, it has a feed screw 124 which is rotationally driven by the pulse motor 123 to move the measuring table 119 in parallel. A second crystal monochromator 130 is provided on the fourth traveling body 118 integrally with the link 120b. Also,
The second light receiving slit 125, the ion chamber 126, the sample 127 to be measured, and the X-ray counter 128 are fixedly arranged on the measurement table 119.

The second spectroscopic mechanism 102 having the above structure.
Serves to always position the first light receiving slit 117, the second crystal monochromator 130, and the second light receiving slit 125 on the Rowland circle L2.

In the EXAFS measuring device having the above structure, the EXAFS measurement is performed as follows.
That is, the X-rays emitted from the X-ray source F are divergent slits 129.
Is incident on the first crystal monochromator 110 with the divergence angle being restricted, and the X-ray of a specific wavelength is diffracted by the first crystal monochromator 110. The diffracted X-rays are focused on the first light receiving slit 117, pass through the slit, and then enter the second crystal monochromator 130, whereupon X-rays of a specific wavelength are diffracted again.

The X-rays of the specific wavelength diffracted in this way, that is, the X-rays having the specific energy, are emitted from the second light receiving slit 12.
5 to the ion chamber 126 and the sample 12
After passing through 7, it is captured by the X-ray counter 128.
The X-ray intensity I ₀ before the sample is transmitted is measured by the ion chamber 126, and the X-ray intensity I after the sample is transmitted by the X-ray counter 128.
Is measured. Finally, the intensity ratio I ₀ / I is calculated,
A known EXAFS figure is obtained based on the calculation result.

[0011]

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention
In the measuring device, the base 105 is always installed horizontally, and it was very difficult to stand it vertically. The reason is that the third traveling body 112 and the pulse motor 11
This is because so-called air pads had to be attached to the bottom surface of the long support plate P1 on which the 5 and the like are mounted and the bottom surface of the long support plate P2 on which the fourth traveling body 118, the pulse motor 123 and the like are mounted. . This air pad means that the support plates P1 and P2 are slightly floated from the base 105 by blowing air toward the base 105 so that these support plates can slide smoothly on the base 105. It is a thing. As described above, the conventional EXAFS measuring device is used in the Roland circles L1 and L2.
Since the sample 127 had to be set horizontally, the sample 127 that could be the measurement target was limited to a solid sample, and the liquid sample could not be the measurement target.

The present invention has been made to solve the problem, and an object of the present invention is to provide an EXAFS measuring apparatus capable of measuring a liquid sample.

[0013]

In order to achieve the above-mentioned object, an EXAFS measuring apparatus according to the present invention is arranged so that an X-ray source, a monochromator and a light-receiving slit are always positioned on a Rowland circle and are emitted from the X-ray source. EXAF in which X-rays of different energies are extracted by changing the incident angle of the X-rays incident on the monochromator and the X-rays are irradiated to the sample
In the S measuring apparatus, the Roland circle is set to be included in a vertical plane, and the sample holder supporting the sample and the sample holder can be moved in parallel in the vertical plane without tilting. A sample horizontal holding means for holding the sample is provided.

[0014]

[Operation] Since the Roland circle is provided in the vertical plane, X
The line is incident on the sample from above and below. Therefore, even if the sample is a liquid, the sample can be irradiated with X-rays without any trouble. Further, even when the X-ray optical system constituting the EXAFS measuring device makes a predetermined scanning movement, the sample horizontal holding means allows the sample holder to be always kept in a horizontal state.
There is no inconvenience that the liquid surface of the liquid sample is disturbed and the measurement accuracy is lowered, or the liquid sample is spilled.

[0015]

FIG. 1 shows an embodiment of the EXAFS measuring apparatus according to the present invention. This EXAFS measurement device is roughly provided with two spectroscopic mechanisms, a first spectroscopic mechanism 1 and a second spectroscopic mechanism 2.

The first spectroscopic mechanism 1 is fixed to a vertically standing base 5 and its position is immovable. A first rotation axis X1.
The first rotary link 3 rotatable around the center of the first rotary link 3 and the base 5 located at a position separated upward from the first rotary link 3
A second rotation link 4 which is fixed to the second rotation axis X2 and is rotatable about a second rotation axis X2 which does not move.
A parallel movement link 20 that connects the three links 3 and 4 to each other.
And a parallel link drive device 11 for driving the parallel movement link 20. First rotation axis X1 and second
Each of the rotation axis lines X2 extends in the direction perpendicular to the paper surface, that is, in the horizontal direction.

The parallel link drive device 11 includes a pulse motor 15, a rod-shaped feed screw 14 that is rotationally driven by the pulse motor 15, a traveling body 7 that is screw-fitted to the feed screw 14, and the traveling body 7. Two guide rods 6 that guide the user to smoothly move in the vertical direction in the figure without rattling, and on the traveling body 7 in the left-right direction (Y Direction) and a support piece 12 that can move freely. The translation link 20 is fixed to the right end of the support piece 12. The pulse motor 15 operates while being controlled by the spectroscopic control device 18.

An approximately disk-shaped worm wheel 31 is provided at the left end of the first rotary link 3, and an X-ray tube 32 having an X-ray source F is fixedly mounted on the worm wheel 31. The worm wheel 31 is rotatable independently of the first rotation link 3 about the first rotation axis X1. Further, the X-ray tube 32 has an X-ray stored inside it.
The radiation source F is fixed on the worm wheel 31 so as to ride on the first rotation axis X1. Worm wheel 31
The worm wheel 31 and an X-ray source drive device 33 for rotationally driving the X-ray source F integral with the worm wheel 31 are disposed on the left side of the. The X-ray source drive device 33 includes a pulse motor 13 and a worm 16 that is rotationally driven by the pulse motor 13. The worm 16 meshes with the worm wheel 31.

The first crystal monochromator 10 is fixedly attached to the upper end of the parallel movement link 20. The X-ray diffraction surface of the monochromator 10 is the second rotary link 4
And the parallel movement link 20 are positioned so as to include a third rotation axis X3 that is an axis that is rotatably connected to each other. The first crystal monochromator 10 is the second crystal monochromator.
It can freely rotate with respect to the rotary link 4.

On the rotation axis between the first rotary link 3 and the parallel movement link 20, that is, the fourth rotary axis X4, an auxiliary link 34 extending rightward in the figure is provided rotatably around the rotary axis X4. Has been. As shown in FIG. 3, the traveling body 9 is attached to the right end portion of the auxiliary link 34 via a bearing 35 so as to be freely rotatable around the axis ω. By being guided by the two guide rods 8 and 8, the traveling body 9 can be smoothly linearly moved in the lateral direction of the drawing, that is, in the horizontal direction without rattling.

On the traveling body 9, a rectangular ω table 3 is mounted.
6 is attached rotatably around the axis ω. In FIG. 3, the slit arm 37 is fixed to the left end side surface of the ω table 36, and the first light receiving slit 17 is attached to the tip of the arm. In FIG. 1, the ω table drive device 38 having the pulse motor 21 and the worm 41 fixed to the output shaft thereof is provided on the upper end of the traveling body 9.
Is fixedly placed. As shown in FIG. 3, the worm 41 is a worm wheel 4 fixed to the ω table 36.
It meshes with 2. The drive device 38 drives the ω table 36 to rotate about the axis ω. The pulse motor 21 operates while being controlled by the spectroscopic control device 18.

Next, the structure of the second spectroscopic mechanism 2 will be described. The second spectroscopic mechanism 2 includes a rectangular first slider 39 slidably mounted on the ω table 36, and a cylindrical θ rotary table 4 provided on the first slider 39.
It has 0 and. The θ rotation table 40 can freely rotate around the axis φ by the action of the bearing 43. In FIG. 1, a pulse motor 44 is fixedly installed at the upper right corner of the first slider 39. The worm 45 fixed to the output shaft of the pulse motor 44 is shown in FIG.
As shown in, the worm wheel 46 fixed to the end portion of the θ rotary table 40 meshes with it. Driven by the pulse motor 44, the worm 45 and the worm wheel 4
When 6 rotates, the θ rotation table 40 rotates about the axis φ. Hereinafter, this rotation will be referred to as θ rotation. The operation of the pulse motor 44 is also controlled by the spectroscopic control device 18. The second crystal monochromator 30 is detachably attached to the front surface of the θ-turntable 40.

In FIG. 3, a horizontally elongated 2θ rotary table 48 is provided around the θ rotary table 40 via a bearing 47. This 2θ turntable 48 is a bearing 47
By virtue of the function of, it is possible to freely rotate around the axis φ in the same manner as the turntable 40, but independently of the turntable 40.
In FIG. 1, a linear movement mechanism 49 having a pulse motor built therein is fixedly attached to the upper left corner of the first slider 39. The mechanism 49 has a mechanism similar to a mechanism used for a so-called micrometer, and the output probe 49a linearly moves forward and backward by the rotation of a built-in pulse motor. The tip of the probe 49a is connected to the side surface of the left-hand tip of the 2θ rotary table 48. Therefore, the 2θ rotary table 48 rotates about the axis φ as the probe 49a moves back and forth. Hereinafter, this rotation will be referred to as 2θ rotation.

In FIG. 3, a second slider 50 having a substantially rectangular shape is attached to the right side portion from the center of the 2θ rotary table 48. This slider 50 is a 2θ rotary table 48
In the state of being in contact with, the object smoothly slides in a direction toward or away from the axis φ that is the center of the θ rotation and the 2θ rotation, that is, the horizontal direction in FIG. On the front surface of the second slider 50, in order from the direction closer to the second crystal monochromator 30,
A slit base 52, a cylindrical sample holder 53, and a detector arm 54 are provided. The slit base 52 and the detector arm 54 are both fixedly fixed to the second slider 50, while the sample holder 53 has a bearing 55.
By being supported by, it is possible to freely rotate around the axis ψ. On the front of the slit base 52,
The second light receiving slit 25 and the ion chamber 26 are fixedly arranged. A tray 56 is provided inside the sample holder 53, and a sample, especially the liquid sample 2 is placed in the tray 56.
7 are accommodated. The front of the detector arm 54 has an X
A line counter 28 is fixedly attached.

In FIG. 1, a feed screw 22 which is rotationally driven by a pulse motor 23 is provided at the lower left position on the front surface of the ω table 36. And the ω table 36
A bracket 57 protruding from the side surface of the first slider 39 that comes into surface contact with the feed screw 22 is engaged with the bracket 57. When the feed screw 22 rotates, the first slider 39, which is integral with the bracket 57, reciprocates linearly in parallel with a straight line connecting the center of the first crystal monochromator 10 and the center of the first light receiving slit 17. Further, the feed screw 24, which is rotationally driven by the pulse motor 58, is attached to the side surface of the 2θ rotary table 48. A bracket 59 protruding from the side surface of the second slider 50, which is in surface contact with the 2θ rotary base 48, meshes with the feed screw 24. When the lead screw 24 rotates, the second screw that is integral with the bracket 59
The slider 50 moves in parallel so as to approach or move away from the rotation center axis φ. The operation of the pulse motors 23 and 58 is controlled by the spectroscopic control device 18.

With the EXAFS measuring device having the above-described structure, EXAFS measurement by the two-crystal method is performed as follows.

The X-ray R1 emitted from the X-ray source F is incident on the first crystal monochromator 10, and the X-ray having a wavelength corresponding to the incident angle θ at that time is diffracted by the monochromator 10. The diffracted X-ray R2 is focused on the first light-receiving slit 17, and then enters the second crystal monochromator 30 to diffract the X-ray having a specific wavelength. The diffracted X-ray having a specific wavelength is collected by the second light receiving slit 25, further transmitted through the ion chamber 26 and the liquid sample 27 in the sample holder 53, and then captured by the X-ray counter 28. At this time, the ion chamber 2
6 measures the intensity I0 of the X-ray before passing through the sample 27, and the I0 is sent to the arithmetic unit 60. The X-ray counter 28 measures the intensity I of the X-ray transmitted through the sample 27, and the I is also sent to the arithmetic unit 60. The arithmetic unit 60 calculates the ratio I0 / I of the two X-ray intensities and stores the result in a built-in memory.

When the above-mentioned one measurement is completed, the pulse motor 15 in the parallel link drive device 11 operates to move the traveling body 7 in the vertical direction, for example, in the downward direction by a predetermined short distance,
Along with that, the parallel movement link 20 also moves in the vertical direction. At this time, the parallel movement link 20 is translated by the action of the first rotary link 3 and the second rotary link 4 while being oriented in the up-down direction, and further by the action of the support piece 12 sliding on the traveling body 7. It also moves in the left-right direction (Y direction).

When the first crystal monochromator 10 moves in parallel in the vertical and horizontal directions as described above, the traveling body 9 connected to the parallel movement link 20 via the auxiliary link 34.
Is translated by the guide rods 8 in the left-right direction. In this way, the first crystal monochromator 10 and the traveling body 9 move while being constrained by the first rotary link 3, the parallel movement link 20, and the auxiliary link 34, so that the X-ray source F, the first crystal monochromator 10, and Each optical element of the first light receiving slit 17 is always a Roland circle L.
The positional relationship of riding 1 is maintained. The Rowland circle L1 is included in the vertical plane because the base 5 is set upright.

When the first crystal monochromator 10 and the first light receiving slit 17 are moved in the above-mentioned positional relationship, the worm wheel 31 is driven by the pulse motor 13 in the X-ray source driving device 33 to rotate an appropriate angle. At the same time, the ω table 36 is driven by the pulse motor 21 in the ω table drive device 38 to rotate by an appropriate angle. The rotation of the worm wheel 31 changes the angle of the X-ray source F with respect to the first crystal monochromator 10, while the rotation of the ω table 36 changes the angle of the first light receiving slit 17 with respect to the first crystal monochromator 10. By changing the angles of the X-ray source F and the first light receiving slit 17, the first
When the crystal monochromator 10 and the first light receiving slit 17 move while maintaining the Rowland circle L1, the optical axes of the X-ray source F, the first crystal monochromator 10 and the first light receiving slit 17 are always aligned with each other. Controlled.

At the same time that the incident angle θ of X-rays on the first crystal monochromator 10 changes in the first spectroscopic mechanism 1, at the same time, in the second spectroscopic mechanism 2, the first crystal monochromator 10 diffracts the light to obtain the second crystal monochromator. The incident angle of the X-rays incident on the meter 30 is also changed. In order to realize the change, the θ rotation pulse motor 44 is operated to rotate the θ rotation base 40 supporting the second crystal monochromator 30 by an appropriate angle, and at the same time, the 2θ rotation linear movement fine movement mechanism. The 2θ rotary table 48 supporting the sample 27 and the X-ray counter 28 is rotated in the same direction at a speed twice the θ rotation by operating 49. Thus, the wavelength of the diffracted X-ray is changed in the first spectroscopic mechanism 1, and the second spectroscopic mechanism 2 is further changed.
The wavelength of the diffracted X-ray is changed within the liquid sample, and the X-ray having the changed wavelength, that is, the energy is changed, is the liquid sample 2.
7 and the X-ray intensity ratio I ₀ / I is determined.

After that, the first crystal monochromator 10 is sequentially moved by an appropriate distance, and the second crystal monochromator 30 is sequentially rotated by an appropriate angle by θ, so that various X values having different energy values can be obtained. The X-ray intensity ratio I0 / I is determined for the line. When the X-ray intensity ratio I0 / I thus obtained is plotted on a graph for each X-ray energy, a well-known EXAFS figure is obtained. The figure pattern of this EXAFS figure is displayed on a CRT display, a mechanical plotter, or another display. By observing using the device 61, it is possible to infer the structure and the like of the atoms constituting the liquid sample 27.

When the incident angle of the diffracted X-ray R2 is changed by rotating the second crystal monochromator 30 by θ, correspondingly, the distance between the first light receiving slit 17 and the second crystal monochromator 30 is changed. It is necessary to change the distance and the distance between the second crystal monochromator 30 and the second light receiving slit 25 so as to match the incident angle. These respective distance changes are executed by rotating the feed screw 22 by the pulse motor 23 to move the first slider 39, and further rotating the feed screw 24 by the pulse motor 58 to move the second slider 50. . How much the distance is changed is determined by the data value stored in advance in the data table in the spectroscopic control device 18.

The sample 27 to be measured in this embodiment is a liquid. Such a liquid sample 2
It is possible to perform EXAFS measurement for No. 7 by setting the base 5 in the vertical direction so that the entire apparatus is in the vertical type, that is, the Rowland circle L1 is included in the vertical plane. Because. However, one problem arises here. That is, when the sample holder 53 rotates integrally with the 2θ rotary table 48 when the 2θ rotary table 48 rotates 2θ about the axis φ, the sample storage tray 56 also rotates integrally therewith, and as a result,
This means that the liquid surface of the contained liquid sample 27 may be disturbed or flow out to the outside. In order to avoid such an inconvenience, in this embodiment, the base 5 in FIG.
A horizontal holding mechanism 62 for holding the sample horizontal is provided at the lower right position of the.

As is apparent from FIGS. 2 and 3, the horizontal holding mechanism 62 has a round bar-shaped horizontal guide 63 horizontally installed on the front surface of the base 5, and slides on the horizontal guide 63. Rectangular parallelepiped traveling block 64
And a round bar-shaped vertical guide 65 extending vertically through the traveling block 64.
As can be seen from FIG. 3, the vertical guide 65 is fixed to a cubic block 66 that is fixed to a rotation shaft extending from the end surface of the sample holder 53. Due to the function of the horizontal holding mechanism 62 having the above configuration, the sample holder 53 always maintains a constant horizontal state regardless of the position of the 2θ rotary table 48, and as a result, the liquid contained in the sample holder 53 is maintained. The liquid level of the sample 27 is not disturbed, and the sample 27 is not spilled from the tray 56 and is always maintained in a horizontal stationary state.

The above is the operation at the time of EXAFS measurement by the two-crystal method. In the present example, EXAFS measurement can be performed by the 1-crystal method in addition to the 2-crystal method. When changing the setting of the device from the two-crystal method to the one-crystal method,
Perform the following operations.

First, in FIG. 1, the second crystal monochromator 30 is removed from the θ rotary table 40, and the second light receiving slit 25 is removed from the slit table 52. And 2
The 2θ angle of the θ rotation table 48 is fixed at 0 °. The 2θ angle of 0 ° means that the ion chamber 26
Is an angular position where the X-ray optical axis from the X-ray counter 28 to the X-ray counter 28 coincides with the X-ray optical axis connecting the center of the first crystal monochromator 10 and the first light receiving slit 17.

After the 2θ rotary table 48 is positioned at an angle of 0 °, the two feed screws 22 and 24 are rotated to bring both the first slider 39 and the second slider 50 closer to the first crystal monochromator 10. Slide in the direction. By this movement, the ion chamber 26 and the sample 27 are moved to the position shown in FIG.
As shown in (1), it is carried to a position approaching the first light receiving slit 17, that is, a position where EXAFS measurement by the single crystal method is possible. In the arrangement state of each component shown in FIG. 2, EXAFS measurement by the single crystal method becomes possible. The measurement by the one-crystal method is performed by measuring 1
The sample 27 is irradiated with light after being diffracted by one monochromator, that is, the first crystal monochromator 10. Measuring the ratio I ₀ / I of the X-ray intensity I ₀ incident on the sample 27 and the X-ray intensity I after passing through the sample is the same as in the case of the two-crystal method.

Although the present invention has been described with reference to the preferred embodiment, the present invention is not limited to the embodiment.

The above embodiment is an embodiment in which the present invention is applied to an EXAFS measuring apparatus which can be used for both the 1-crystal method and the 2-crystal method. However, it is obvious that the present invention can be applied to the EXAFS measuring device dedicated to the one-crystal method. The EXAFS measuring apparatus dedicated to the 1-crystal method is basically an apparatus configured by only the first spectroscopic mechanism 1 in FIG. 1 without using the second spectroscopic mechanism 2. In this case, the ion chamber 26, the sample holder 53, the X-ray counter 28, and the like are directly installed on the ω table 36 and integrated with the first light receiving slit 17.

The structure of the first spectroscopic mechanism 1 has the following required functions: the X-ray source F, the first crystal monochromator 1.
0 and the first light-receiving slit 17 are always located on the Rowland circle L1 and the X-ray optical axes of the X-ray source F, the first crystal monochromator 10, and the respective elements of the first light-receiving slit 17 are always aligned. Any structure other than the structures described in the embodiments can be adopted as long as both functions are achieved. For example, the first spectroscopic mechanism 101 used in the conventional apparatus shown in FIG.
An EXAFS measuring device can also be configured by mounting the second spectroscopic mechanism 2 according to the present invention on the above.

The mechanism for moving the first slider 39 and the second slider 50 in parallel is not limited to the mechanism using the feed screw described in the embodiment, but any other mechanism can be adopted.

In order to rotate the θ rotation table 40 for supporting the second crystal monochromator 30 by θ rotation and the 2θ rotation table 48 equipped with the ion chamber 26, the sample 27, the X-ray counter 28, etc. The means is not limited to the illustrated embodiment.

In the embodiment shown in FIGS. 1 to 3, the entire apparatus is arranged in a so-called vertical type, that is, the Rowland circle L1 is included in the vertical plane. Besides this arrangement,
The so-called horizontal position, that is, the base 5 and the Rowland circle L1 are both in a horizontal position,
Of course it is possible. Since it is considered that this horizontal arrangement targets a solid sample in many cases, the sample horizontal holding mechanism 62 is not necessary in many cases.

[0045]

According to the present invention, since the Rowland circle is provided in the vertical plane, X-rays are incident on the sample from above and below. Therefore, even if the sample is a liquid, EXAFS measurement can be performed by irradiating the sample with X-rays without any trouble. Also, E
Even when the X-ray optical system that constitutes the XAFS measuring device makes a predetermined scanning movement, the sample horizontal holding means allows the sample holder to be maintained in a horizontal state at all times, and therefore the liquid surface of the liquid sample is disturbed and measured. It is possible to solve problems such as deterioration of accuracy and spilling of the liquid sample.

[0046]

[Brief description of drawings]

FIG. 1 is a front view showing an embodiment of an EXAFS measuring device according to the present invention.

FIG. 2 is a front view showing an arrangement state of each component when performing EXAFS measurement by a one-crystal method in the EXAFS measurement device.

3 is a cross-sectional view showing in detail a second spectroscopic mechanism according to a line III-III in FIG.

FIG. 4 is a plan view showing an example of a conventional EXAFS measurement device.

[Explanation of symbols]

 10 1st crystal monochromator 17 1st light receiving slit 21 ω rotation pulse motor 27 Liquid sample 53 Sample holder 56 Sample tray 62 Sample horizontal holding mechanism 63 Horizontal guide 64 Traveling block 65 Vertical guide 66 Sample holder block F X-ray source L1 Roland Circle φ θ, 2θ Rotation center axis

Claims (2)

[Claims] 1. The X-ray source, the monochromator, and the light-receiving slit are always positioned on the Rowland circle, and the incident angle of the X-ray emitted from the X-ray source and incident on the monochromator is changed to take out X-rays of different energies. In the EXAFS measuring device adapted to irradiate the sample with the X-rays, the Rowland circle is set so as to be included in a vertical plane, and the sample holder supporting the sample and the sample holder are vertically tilted without tilting. An EXAFS measuring device, comprising: a sample horizontal holding means for holding the sample so as to be movable in parallel in a plane. 2. The sample horizontal holding means includes a horizontal guide member extending in the horizontal direction, a traveling block moving along the horizontal guide member, and a vertical block extending through the traveling block in the vertical direction. The EXAFS measurement device according to claim 1, further comprising a vertical guide member that moves in a vertical direction while being guided, and the sample holder is integrally fixed to the vertical guide member.