JPH0651900U - Electron beam irradiation device - Google Patents

Abstract

(57) [Abstract] [Purpose] To prevent the air for cooling the window foil from affecting the transport of the irradiated film and to facilitate the assembly of the primary and secondary window foil parts. [Structure] The primary window foil 3 is the scanning tube 1 in the electron beam generator.
Install on. The partition 14 is provided above the electron beam incident side of the conveyed irradiation target film 9, and the secondary window foil 6 is attached to the opening thereof. An air reflection plate 16 is provided outside the ends of the primary window foil and the secondary window foil, and the air for cooling the window foil from the nozzle 15 cools the primary window foil and reverses and circulates at the reflection plate. Then
Cool the secondary window foil. The air flow is shielded by the secondary window foil and the partition, and does not affect the irradiated film. As it is not necessary to assemble the two window foil parts together,
Processing of the window foil mounting member becomes easy. The size of the air reflector can be determined according to the distance between the two window foils, and the distance can be freely selected.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an electron beam irradiation apparatus in which air is used as a cooling gas for a window foil so that the air flow does not affect the transport of a film to be irradiated.

[0002]

[Prior art]

 In the electron beam irradiation device, a window foil is provided at the end of the electron beam generator, the electron beam generator is vacuum-sealed, and the electron beam is transmitted through the window foil and introduced into the irradiation region. Upon such transmission, the window foil partially absorbs the energy of the electron beam and generates heat. Therefore, the cooling gas is passed through the surface of the window foil to cool the window foil, but since the cooling gas is applied to the window foil from the irradiation area side, the irradiation target transported in the irradiation area is thin. In the case of film, the gas flow hits the illuminated film, impairing the smooth transport of the film.

Therefore, an electron beam irradiation apparatus having two window foils has been devised so that the cooling gas of the window foils does not affect the transport of the thin irradiation target film, and FIG. 2 is a configuration diagram thereof. . A primary window foil 3 is attached to a flange 2 of the scanning tube 1 in the electron beam generating section by a primary window pressing plate 4. A secondary window plate 5 is attached to the primary window pressing plate 4, and a secondary window foil 6 is attached to this window plate by a secondary window pressing plate 7. An irradiation container 8 is provided so as to be coupled to the secondary window pressing plate 7, and the irradiation target film 9 is conveyed therein. The electron beam e ⁻ from the scanning tube 1 passes through the primary window foil 3 and the secondary window foil 6 and is irradiated on the irradiation target film 9.

A flow port 10 for cooling gas having a nozzle portion at the tip is formed in the primary window pressing plate 4, and a flow port 11 is also formed in the secondary window plate 5, and these flow ports are for cooling. It communicates with the air supply duct 12 and the exhaust duct 13 of the body. The cooling gas supplied by the air supply duct 12 and ejected from the nozzle portion at the tip of the flow port 10 of the primary window pressing plate 4 cools the primary window foil 3 and the inside of the primary window pressing plate 4 is cooled. By the end portion 4 ₁ and the inner end portion 5 ₁ of the secondary window plate 5, the secondary window foil 6 side is inverted and recirculated as shown by the arrow, and the window foil is cooled and discharged from the circulation port 11 through the exhaust duct 13. It In this way, the irradiation area in the irradiation container 8 is blocked by the secondary window foil 6 with respect to the window foil cooling gas, so that the film to be irradiated is not affected by the cooling gas flow during its transportation.

The accelerated electron beam produces ozone when passing through the air. As the gas for cooling the window foil, nitrogen gas that does not generate ozone even when hit by an electron beam is used. By introducing and circulating the gas from the exhaust duct 13 into the air supply duct 12, the nitrogen gas is reused. However, the gas consumption is reduced. The irradiation area in the irradiation container 8 is in an atmospheric state, and ozone is generated when the electron beam passes through the secondary window foil and passes through the air layer. However, an exhaust port is provided at the bottom of the irradiation container for ventilation. In general, the above-mentioned components of the electron beam irradiation apparatus described above are housed in a concrete building in order to shield the generated X-rays.

[0006]

[Problems to be solved by the device]

 According to such a conventional apparatus, the irradiated film 9 is not affected by the gas flow for cooling the window foil, and since nitrogen gas is used as the cooling gas, the window foil, especially the primary window foil 3 is completely protected. It will not be affected by ozone. However, since the cooling air is prevented from leaking outside between the primary window foil 3 and the secondary window foil 6, these window foils and a plurality of their mounting members, the primary window holding plate 4, the secondary window foil, and the secondary window foil The window plate 5 and the secondary window pressing plate 7 need to be integrally assembled between the flange 2 of the scanning tube 1 and the irradiation container 8. In this respect, the processing accuracy of these mounting members and the processing accuracy of the joint surface are problems. However, the assembly itself is difficult to perform, and the gap between the primary window foil 3 and the secondary window foil 6 is limited by the thickness of the primary window retainer plate and the secondary window plate, and the gap is too large. Can not do it.

The present invention relates to an electron beam irradiation apparatus having a window foil that does not require measures against ozone. Air is used as a gas for cooling the window foil, and the distance between the primary window foil and the secondary window foil is controlled. It is an object of the present invention to provide an electron beam irradiation apparatus that can be arbitrarily selected and can easily assemble a window foil portion.

[0008]

[Means for Solving the Problems]

 In order to achieve such an object, the electron beam irradiation device of the present invention irradiates an electron beam generating part with a primary window foil through which the electron beam is transmitted and the electron beam is transmitted through the primary window foil. A secondary window foil that penetrates into the area, a partition provided above the electron beam incident side of the irradiated film that is attached and transported with the secondary window foil, and a window foil that cools the primary window foil. It is characterized by comprising an air reflecting plate for reversing the cooling air flow to the surface of the secondary window foil.

[0009]

[Action]

 The partition provided above the electron beam incident side of the film to be irradiated conveys the airflow for cooling the window foil and the film is not affected by the airflow. Window foil Cooling air is turned over from the primary window foil to the secondary window foil surface by an air reflection plate and is recirculated and recirculated. Even if the air flows out from the recirculation / reflux section, the secondary window foil and the partition body cause irradiation. Since it does not reach the film, the primary window foil part and the secondary window foil part can be independently assembled, and the air reflection plate should have a size corresponding to the distance between the two window foils.

[0010]

【Example】

An embodiment of the present invention will be described with reference to the block diagram of FIG. The same reference numerals as those in FIG. 2 indicate the same parts. The primary window foil 3 is attached to the flange 2 of the scanning tube 1 in the electron beam generator by the primary window pressing plate 4. A partition 14 is provided at a position above the electron beam incident side of the transported irradiation target film 9, and the secondary window foil 6 is attached to the secondary window plate 5 attached to the opening of this partition. It is attached by a plate 7. The primary window foil 3 and the secondary window foil 6 are made of a material resistant to ozone so that ozone countermeasures are not required, and the electron beam e ⁻ from the scanning tube 1 passes through the two window foils. The film 9 to be irradiated is irradiated.

A nozzle 15 for ejecting a cooling gas is provided near the end of the primary window foil 3, and this nozzle is connected to an air supply duct 12 to which compressed air is supplied as the cooling gas. An air reflection plate 16 is provided outside each end of the primary window foil 3 and the secondary window foil 6, and the end of the air reflection plate formed in a curved surface is, for example, the flange 2 of the scanning tube 1. The size of the air reflector 16 is set according to the distance between the two window foils. The cooling air ejected from the nozzle 15 cools the primary window foil, and is turned over to the surface of the secondary window foil 6 by the air reflecting plate 16 to flow back to cool the secondary window foil. Since the upper part of the conveyed irradiation target film 9 is covered with the partition 14 and the secondary window foil 6, the window foil cooling air flow does not affect the conveyance of the irradiation target film.

Each of the above-mentioned components is housed in a concrete building, for example. Compressed air to the air supply duct 12 is supplied from outside the building, and ozone is generated inside the building so that it is used for cooling the window foil. Ventilate and exhaust air.

[0013]

[Effect of device]

 Since the present invention is configured as described above, the airflow for cooling the window foil is shielded by the partition body and the secondary window foil, and does not affect the transport of the irradiated film.

The primary window foil and the secondary window foil may be attached to the scanning tube and the partition, respectively, independently of each other, and with regard to the members related to the attachment of each window foil, matters other than the attachment are taken into consideration. Since there is no need, the shape and processing of each member is simple, and the assembly and adjustment of each window foil part is easy. Furthermore, since it is sufficient to use an air reflecting plate having a size corresponding to the arrangement interval of the two window foils, the same interval can be freely selected.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an embodiment of the present invention.

FIG. 2 is a configuration diagram of a conventional example.

[Explanation of symbols]

 1 Scanning tube 3 Primary window foil 6 Secondary window foil 9 Irradiated film 14 Partition 15 Nozzle 16 Air reflector

Claims (1)

[Scope of utility model registration request] 1. A primary window foil that seals an electron beam generating portion in a vacuum and transmits an electron beam, a secondary window foil that transmits an electron beam transmitted through the primary window foil to an irradiation region, and a secondary window foil. A partition provided above the electron beam incident side of the irradiated film to which the window foil is attached and conveyed, and an air reflection for reversing the window foil cooling air flow for cooling the primary window foil to the secondary window foil surface. An electron beam irradiation apparatus comprising: a plate.