JPH0651842A - Flow controller - Google Patents

Flow controller

Info

Publication number
JPH0651842A
JPH0651842A JP20474092A JP20474092A JPH0651842A JP H0651842 A JPH0651842 A JP H0651842A JP 20474092 A JP20474092 A JP 20474092A JP 20474092 A JP20474092 A JP 20474092A JP H0651842 A JPH0651842 A JP H0651842A
Authority
JP
Japan
Prior art keywords
valve
flow rate
flow
motor
time
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20474092A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Yokoajiro
義幸 横網代
Shigeru Shirai
白井  滋
Yasuo Kidouchi
康夫 城戸内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP20474092A priority Critical patent/JPH0651842A/en
Publication of JPH0651842A publication Critical patent/JPH0651842A/en
Pending legal-status Critical Current

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  • Flow Control (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Multiple-Way Valves (AREA)

Abstract

PURPOSE:To easily manufacture the flow controller for opening/closing fluid and adjusting flow by omitting an adjustment process at the time of manufacture for detecting the close position of a valve. CONSTITUTION:This device is composed of 1st and 2nd valve elements 22 and 24, valve shaft 6, motor 12, flow sensor 13, flow calculation part 14, flow stop detection part 30 and valve opening time motor control part 31 to control the motor 12 at the time of opening the valve while receiving the signal of the flow stop detection part 30. At the time of opening the valve, the motor 12 is driven by the feedback control part 15 at velocity corresponding to set flow (a) and operated so as to prevent the overshoot of flow caused by the delay of flow detection at the time of reducing the set flow, and the control at the time of opening the valve can be stably performed in the shortest time corresponding to the set flow. The motor 12 is stopped by surely detecting the close position of the valve by detecting the stop of a pulse signal from the flow sensor 13. Since the adjustment process at the time of manufacture is omitted and further a position detector can be omitted, the device can be minimized.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、浴室や洗面あるいは台
所等で湯・水の出し止め、および所望の流量をうる流量
制御装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow rate control device for keeping hot water and water out of a bathroom, washbasin, kitchen, etc., and for obtaining a desired flow rate.

【0002】[0002]

【従来の技術】従来この種の流量制御装置は例えば図3
に示すようなものがあった。
2. Description of the Related Art Conventionally, a flow rate control device of this type is shown in FIG.
There was something like that.

【0003】ボデー1に流路入口2と流路出口3との間
に弁座4を設け、さらにこの弁座に対向した弁体5に遊
嵌して連結された弁軸6と弁体5を付勢するばね7を設
けている。弁軸6はそのねじ部8をボデー1の回転直線
変換ネジ9と螺合している。また、弁軸6はギヤー10
およびギヤー11を介して回転駆動するモータ12と結
合している。直流モータ12は流量センサ13と流量演
算部14と、流量演算部14からの流量信号と設定流量
との差に応じてフィードバック制御部15により制御さ
れる。16はギヤー11と一体のカムで位置検出器17
を有する。
A valve seat 4 is provided on the body 1 between a flow passage inlet 2 and a flow passage outlet 3, and a valve shaft 6 and a valve body 5 which are loosely fitted and connected to a valve body 5 facing the valve seat. A spring 7 for urging is provided. The thread portion 8 of the valve shaft 6 is screwed into the rotation straight line conversion screw 9 of the body 1. Further, the valve shaft 6 is a gear 10
And a motor 12 that is rotationally driven via a gear 11. The DC motor 12 is controlled by the flow rate sensor 13, the flow rate calculation unit 14, and the feedback control unit 15 according to the difference between the flow rate signal from the flow rate calculation unit 14 and the set flow rate. 16 is a cam integrated with the gear 11 and is a position detector 17
Have.

【0004】図5はフィードバック制御部15の特性で
あり、流量信号と設定流量の差である流量誤差に比例し
た速度でモータ12を駆動し、弁軸6を左右に動かして
弁体5を開あるいは閉方向に調節して流量信号が設定流
量にほぼ一致したところでモータ12を停止させ流量を
設定流量に等しく調節するものである。同図Aの流量誤
差が小さい範囲では誤差に比例した速度となるが、同図
Bの一定以上の流量誤差の範囲ではモータ12のスピー
ドに限界があるためモータ速度は一定になる。
FIG. 5 shows the characteristics of the feedback control unit 15. The motor 12 is driven at a speed proportional to the flow rate error which is the difference between the flow rate signal and the set flow rate, and the valve shaft 6 is moved left and right to open the valve body 5. Alternatively, when the flow rate signal is adjusted to the close direction and the flow rate signal substantially matches the set flow rate, the motor 12 is stopped and the flow rate is adjusted to be equal to the set flow rate. In the range where the flow rate error is small in FIG. A, the speed is proportional to the error, but in the range where the flow rate error is above a certain level in FIG. B, the motor speed is constant because the speed of the motor 12 is limited.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、上記の
ような従来の構成のものにおいては次のような課題を有
していた。
However, the conventional structure as described above has the following problems.

【0006】位置検出器17はギヤ11のカム16に対
応して閉止位置を検出している。弁座4と弁体5と弁軸
6の寸法のバラツキやねじ部8と回転直線変換部9との
嵌合関係、さらにギヤ10とギヤ11の嵌合関係など部
品バラツキが累積するため位置検出器17が図6のD位
置を検出するためには、位置検出器17の動作点を装置
製作時に一品ずつ調整する必要が生じてくる。例えば、
ギヤ10を弁軸6から外しておき、ギヤ11を位置検出
器17の閉止検出位置に移動させ、図6のC点である弁
体5が弁座4に当接する点を流量などで確認したのち、
さらに弁軸6を図6のEに相当する分、右方に移動さ
せ、その後にギヤ10をギヤ11と嵌合させながら弁軸
6に結合させるという手順で調整を行う。以上のように
従来例では複雑な工程で閉止検出位置を一品ずつ調整す
る必要があるため、製造に手間がかかりコストがかかる
ことになる。
The position detector 17 detects the closed position corresponding to the cam 16 of the gear 11. Position detection is performed because component variations such as variations in the dimensions of the valve seat 4, the valve body 5, and the valve shaft 6, the fitting relationship between the screw portion 8 and the rotation straight line converting portion 9, and the fitting relationship between the gear 10 and the gear 11 are accumulated. In order for the device 17 to detect the D position in FIG. 6, it becomes necessary to adjust the operating point of the position detector 17 one by one when manufacturing the device. For example,
The gear 10 was removed from the valve shaft 6, the gear 11 was moved to the closing detection position of the position detector 17, and the point where the valve body 5 contacted the valve seat 4 at point C in FIG. Later,
Further, the valve shaft 6 is moved to the right by an amount corresponding to E in FIG. 6, and thereafter, the gear 10 is engaged with the gear 11 to be connected to the valve shaft 6 for adjustment. As described above, in the conventional example, since it is necessary to adjust the closing detection positions one by one in a complicated process, manufacturing is time-consuming and costly.

【0007】本発明は上記の課題を解決し、調整工程を
省き無調整で簡単に製造できる流量制御装置を実現しよ
うとするものである。
The present invention is intended to solve the above problems and to realize a flow rate control device which can be manufactured easily without adjustment by omitting the adjustment step.

【0008】[0008]

【課題を解決するための手段】本発明は上記目的を達成
するため、流量センサの信号の停止を検出してモータを
停止させる閉弁時制御部を設けたものである。
In order to achieve the above-mentioned object, the present invention is provided with a valve closing time control unit for detecting the stop of the signal of the flow rate sensor and stopping the motor.

【0009】[0009]

【作用】この構成により、閉弁時に弁体が閉止する位置
を水量センサの信号の停止を確認してモータを停止する
よう作用する。
With this construction, the motor is stopped by confirming the stop of the signal of the water amount sensor at the position where the valve body is closed when the valve is closed.

【0010】[0010]

【実施例】以下本発明の一実施例について図1〜図2を
参照しながら説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS.

【0011】図1において湯が流入する第1の入口18
と水が流入する第2の入口19と、1つの出口20と、
第1の入口18と出口20の間に第1の弁座21と第1
の弁体22とが、また第2の入口19と出口20の間に
第2の弁座23と第2の弁体24とが流路本体1にそれ
ぞれ設けてある。第1の弁体22と第2の弁体24とに
それぞれ閉方向に付勢する第1のばね25および第2の
ばね26とが設けられ、そして弁軸6は第2の弁体24
を摺動可能に貫通してその先端は第1の弁体22の穴部
27に摺動可能に連結され、さらに止め輪28で第2の
弁体24に当接している。第2の弁体24と弁軸6の貫
通部にはOリング29が設けられ摺動部をシールしてい
る。出口20には流量センサ13が設けられ、流量セン
サ13の信号は流量演算部14で周期を測定され流量信
号が演算される。この流量信号は設定流量信号と比較さ
れ、フィードバック制御部15はモータ12を駆動しギ
ヤ11およびギヤ10により弁軸6を回動し弁軸6のね
じ部8と回転直線変換ねじ9により弁軸6をスラスト方
向に駆動する。流量停止検出部30は流量演算部13と
連動し流量センサ13のパルス信号の停止を検出する。
閉弁時モータ制御部31には湯出/止スイッチ32、水
出/止スイッチ33および流量停止検出部30の信号が
入力され、閉弁時にスイッチ34でフィードバック制御
部15に代わりモータ12を駆動する。
In FIG. 1, the first inlet 18 into which hot water flows
A second inlet 19 through which water flows and one outlet 20,
Between the first inlet 18 and the outlet 20, the first valve seat 21 and the first
And a second valve seat 23 and a second valve body 24 are provided in the flow path body 1 between the second inlet 19 and the outlet 20, respectively. The first valve body 22 and the second valve body 24 are respectively provided with a first spring 25 and a second spring 26 that bias in the closing direction, and the valve shaft 6 is the second valve body 24.
Is slidably passed through, and its tip is slidably connected to the hole 27 of the first valve body 22, and further abuts on the second valve body 24 by a retaining ring 28. An O-ring 29 is provided in the penetrating portion between the second valve body 24 and the valve shaft 6 to seal the sliding portion. A flow rate sensor 13 is provided at the outlet 20, and a signal of the flow rate sensor 13 has its period measured by a flow rate calculation unit 14 to calculate a flow rate signal. This flow rate signal is compared with the set flow rate signal, and the feedback control unit 15 drives the motor 12 to rotate the valve shaft 6 by the gear 11 and the gear 10 and the threaded portion 8 of the valve shaft 6 and the rotary linear conversion screw 9 to drive the valve shaft. 6 is driven in the thrust direction. The flow stop detector 30 works in conjunction with the flow calculator 13 to detect the stop of the pulse signal of the flow sensor 13.
When the valve is closed, signals from the hot water discharge / stop switch 32, the water discharge / stop switch 33, and the flow rate stop detection unit 30 are input to the motor control unit 31. When the valve is closed, the switch 12 drives the motor 12 instead of the feedback control unit 15. To do.

【0012】上記構成により、湯出/止スイッチ32が
操作され湯が出湯しているとき弁軸6は左方に駆動され
第1の弁体22が開き流量センサ13の信号によりフィ
ードバック制御部15が流量を設定流量に等しく制御し
ている。
With the above construction, when the hot water discharge / stop switch 32 is operated and hot water is being discharged, the valve shaft 6 is driven to the left and the first valve body 22 is opened, and the feedback control unit 15 is operated by the signal from the flow rate sensor 13. Controls the flow rate equal to the set flow rate.

【0013】図2は閉弁時のモータ速度および流量の特
性図で、湯出/止スイッチ32の操作で閉弁が指示され
ると閉弁時モータ制御部31はスイッチ34を切り換え
て図2のF時点でモータ12を速度v1で閉止方向に駆
動する。第1の弁体22が右方に動いて流量を絞り流量
センサ13のパルス信号の間隔が長くなる。流量演算部
14で流量の減少を検出するGの時点、Hの時点で閉弁
時モータ制御部31は流量に応じてモータ速度をv2,
v3と徐々に下げて閉止位置を行き過ぎないようにして
いる。流量演算部14が流量センサ13の最低動作流量
以下の流量に相当するT1を検出したI時点でモータ速
度をさらにv4に下げ、流量停止検出部30はI時点か
らT1よりも長いT2の時間経過を待ち、流量センサ1
3のパルス信号が来ないことを確認して流量停止を判断
し、閉弁時モータ制御部31はモータ速度をゼロにして
モータ12を停止する。I時点で充分小さい流量である
流量Kを確認しておりv4×T2の移動距離を流量Kに
相当する弁体22の開度以上に設定しておけばJ時点ま
でのL時点で第1の弁体22が第1の弁座21に当接す
ることが保証される。v4は充分に低速であるので行き
過ぎ量を小さく抑えることができる。
FIG. 2 is a characteristic diagram of the motor speed and the flow rate when the valve is closed. When the tapping / stopping switch 32 is operated to instruct the valve closing, the valve closing motor control unit 31 switches the switch 34 to change the state. At time F, the motor 12 is driven in the closing direction at the speed v1. The first valve element 22 moves to the right to reduce the flow rate and the pulse signal interval of the flow rate sensor 13 becomes longer. At the time of G and H when the decrease in the flow rate is detected by the flow rate calculation unit 14, the valve closing motor control unit 31 sets the motor speed to v2 according to the flow rate.
It is gradually lowered to v3 so as not to overshoot the closed position. The motor speed is further reduced to v4 at time I when the flow rate calculation unit 14 detects T1 corresponding to a flow rate equal to or lower than the minimum operating flow rate of the flow rate sensor 13, and the flow rate stop detection unit 30 passes the time T2 longer than T1 from time I. Wait for the flow sensor 1
After confirming that the pulse signal of No. 3 does not come, it is determined that the flow rate is stopped, and the valve closing motor control unit 31 sets the motor speed to zero and stops the motor 12. If the flow rate K, which is a sufficiently small flow rate, is confirmed at the time point I, and the moving distance of v4 × T2 is set to be equal to or more than the opening degree of the valve body 22 corresponding to the flow rate K, the first time point at the time point L until the time point J is reached. It is ensured that the valve body 22 abuts the first valve seat 21. Since v4 is sufficiently low speed, the overshoot amount can be suppressed small.

【0014】一方、水出/止スイッチ33を操作する
と、弁軸6が右方に駆動され、第1の弁体22は第1の
弁座21に当接し、さらに弁軸6は穴部27の摺動で右
方に動き、止め輪28が第2の弁体24を押し開け第2
の入口19の水を出口20に供給し流量がフィードバッ
ク制御される。もう一度水出/入スイッチ33を操作し
閉弁が指示されると上記の湯の場合と移動方向が逆で同
様に閉弁動作が制御される。
On the other hand, when the water discharge / stop switch 33 is operated, the valve shaft 6 is driven to the right, the first valve body 22 abuts on the first valve seat 21, and the valve shaft 6 has a hole 27. Sliding to the right causes the stop ring 28 to push open the second valve body 24
The water at the inlet 19 is supplied to the outlet 20 and the flow rate is feedback-controlled. When the water out / on switch 33 is operated again to instruct to close the valve, the movement direction is opposite to that in the case of the above hot water, and the valve closing operation is similarly controlled.

【0015】図3は弁軸の変位と湯側の流量Mと水側の
流量Nとの特性図で、Pの範囲で第1の弁体22および
第2の弁体24の両方とも閉止している。上記閉弁動作
で湯側を閉止した場合はQ点で、水側を閉止した場合は
R点でモータ12が停止する。Q点およびR点はP範囲
の中になればよいので上記の弁軸6の行き過ぎ量より大
きくP範囲を設定しておけばよい。
FIG. 3 is a characteristic diagram of the displacement of the valve shaft and the flow rate M on the melt side and the flow rate N on the water side. In the range of P, both the first valve body 22 and the second valve body 24 are closed. ing. When the hot water side is closed by the above valve closing operation, the motor 12 is stopped at point Q, and when the water side is closed, the motor 12 is stopped at point R. It is sufficient that the Q point and the R point are within the P range, and therefore the P range may be set to be larger than the overshoot amount of the valve shaft 6.

【0016】製造時には弁軸を第1の弁体22あるいは
第2の弁体24のいずれかが開いている位置、例えばS
点で組み立てておけば、最初に上記の閉弁動作を行えば
自動的に弁軸6はP範囲に移動して止まることになり調
整工程は不要となる。
At the time of manufacture, the valve shaft is in a position where either the first valve body 22 or the second valve body 24 is open, for example, S.
If it is assembled at points, the valve shaft 6 will automatically move to the P range and stop if the above valve closing operation is first performed, and the adjustment step is unnecessary.

【0017】上記のように、流量停止検出部30と流量
停止検出部30信号をうけて閉弁時にモータ12を制御
する閉弁時モータ制御部31とを設け、流量センサ13
の信号の停止を検出することで弁の閉止位置を確実に検
出してモータ12を停止させるよう作用し、製造時の調
整工程を省きさらに位置検出器を省略できるので、装置
のコストを小さくすることができるのである。
As described above, the flow rate stop detection unit 30 and the valve closing time motor control unit 31 for controlling the motor 12 at the time of valve closing in response to the signal of the flow rate stop detection unit 30 are provided, and the flow rate sensor 13 is provided.
By detecting the stop of the signal of No. 3, the valve closing position is surely detected and the motor 12 is stopped, and the adjustment step at the time of manufacturing can be omitted and the position detector can be omitted, so that the cost of the device can be reduced. It is possible.

【0018】また、流量センサ13のパルス周期の時間
を測定し、流量信号を演算する流量演算部14と、流量
センサ13のパルス信号が一定時間発生していないこと
を検出する流量停止検出部30とで構成したので、流量
センサ13のパルス信号が停止した後、最短時間で流量
の停止を検出することができ、弁の閉止位置を正確に検
出することができる。
Further, the flow rate calculating section 14 for measuring the pulse period of the flow rate sensor 13 and calculating the flow rate signal, and the flow rate stop detecting section 30 for detecting that the pulse signal of the flow rate sensor 13 has not been generated for a certain period of time. With the above configuration, the stop of the flow rate can be detected in the shortest time after the pulse signal of the flow rate sensor 13 is stopped, and the closed position of the valve can be accurately detected.

【0019】[0019]

【発明の効果】以上説明したように、本発明の流量制御
装置によれば、弁体と弁軸と弁軸を駆動するモータと、
流量センサと、流量センサの信号の停止を検出して閉弁
時にモータを制御する閉弁時モータ制御部とで構成し、
閉弁時に流量センサの信号の停止を検出することで弁の
閉止位置を確実に検出しモータを停止させるものである
から、製造時の調整工程を省きさらに位置検出器を省略
でき、装置のコストを小さくすることができる。
As described above, according to the flow rate control device of the present invention, the valve body, the valve shaft, and the motor for driving the valve shaft,
It is composed of a flow rate sensor and a valve closing motor control unit that detects the stop of the signal of the flow rate sensor and controls the motor when closing the valve,
By detecting the stop of the flow sensor signal when the valve is closed, the valve closing position can be reliably detected and the motor stopped, so the adjustment process during manufacturing can be omitted and the position detector can be omitted. Can be made smaller.

【0020】また、流量センサの信号が一定時間発生し
ていないことを検出する流量停止検出部で構成したの
で、流量センサの信号が停止した後に、流量の停止を検
出することが可能となり、弁位置を正確に検出できる。
Further, since the flow rate stop detector for detecting that the signal of the flow rate sensor has not been generated for a certain period of time is constituted, it becomes possible to detect the stop of the flow rate after the signal of the flow rate sensor is stopped, and the valve is stopped. The position can be detected accurately.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例における流量制御装置の全体
構成図
FIG. 1 is an overall configuration diagram of a flow rate control device according to an embodiment of the present invention.

【図2】同装置の開弁時のモータ速度および流量の特性
FIG. 2 is a characteristic diagram of motor speed and flow rate when the device is opened.

【図3】同装置の弁軸変位に対する流量の特性図FIG. 3 is a characteristic diagram of flow rate with respect to valve shaft displacement of the device.

【図4】従来の流量制御装置の構成図FIG. 4 is a block diagram of a conventional flow control device.

【図5】従来の流量制御装置の流量誤差に対するモータ
速度の特性図
FIG. 5 is a characteristic diagram of a motor speed with respect to a flow rate error of a conventional flow rate control device.

【図6】弁軸変位に対する流量の特性図FIG. 6 is a characteristic diagram of flow rate with respect to valve shaft displacement.

【符号の説明】[Explanation of symbols]

6 弁軸 12 モータ 13 流量センサ 18 第1の入口 19 第2の入口 20 出口 21 第1の弁座 22 第1の弁体 23 第2の弁座 24 第2の弁体 30 流量停止検出部 31 閉弁時モータ制御部 6 Valve Shaft 12 Motor 13 Flow Rate Sensor 18 First Inlet 19 Second Inlet 20 Outlet 21 First Valve Seat 22 First Valve Body 23 Second Valve Seat 24 Second Valve Body 30 Flow Stop Detector 31 Motor control unit when valve is closed

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】入口と出口とを有する流路本体と、前記流
路本体に設けられ流路の開閉及び流量調節を行う弁座お
よび弁体と、前記弁体に連結される弁軸と、前記弁軸を
駆動して弁を開閉するモータと、前記流路本体の出口側
に設けた流量センサと、閉弁時に前記流量センサの信号
の停止を検出して前記モータを停止する閉弁時モータ制
御部を備えた流量制御装置。
1. A flow passage body having an inlet and an outlet, a valve seat and a valve body provided in the flow passage body for opening and closing the flow passage and adjusting a flow rate, and a valve shaft connected to the valve body. A motor that drives the valve shaft to open and close the valve, a flow sensor provided on the outlet side of the flow path main body, and a closed valve that detects the stop of the signal of the flow sensor when the valve is closed to stop the motor. A flow control device having a motor control unit.
【請求項2】流量に比例した周波数のパルス信号を発生
する流量センサのパルス周期の時間を測定し、前記時間
から流量信号を演算する流量演算部と、前記流量センサ
のパルス信号が一定時間発生していないことを検出する
流量停止検出部とで構成された請求項1記載の流量制御
装置。
2. A flow rate calculating section for measuring a pulse cycle time of a flow rate sensor for generating a pulse signal having a frequency proportional to the flow rate, and calculating a flow rate signal from the time, and a pulse signal for the flow rate sensor being generated for a fixed time. The flow rate control device according to claim 1, wherein the flow rate control device includes a flow rate stop detection unit that detects that the flow rate control is not performed.
JP20474092A 1992-07-31 1992-07-31 Flow controller Pending JPH0651842A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20474092A JPH0651842A (en) 1992-07-31 1992-07-31 Flow controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20474092A JPH0651842A (en) 1992-07-31 1992-07-31 Flow controller

Publications (1)

Publication Number Publication Date
JPH0651842A true JPH0651842A (en) 1994-02-25

Family

ID=16495539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20474092A Pending JPH0651842A (en) 1992-07-31 1992-07-31 Flow controller

Country Status (1)

Country Link
JP (1) JPH0651842A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016134390A (en) * 2015-01-15 2016-07-25 株式会社Screenホールディングス Substrate processing apparatus
CN109422224A (en) * 2017-08-28 2019-03-05 康美包(苏州)有限公司 The control method and control device of bottle placer and bottle placer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016134390A (en) * 2015-01-15 2016-07-25 株式会社Screenホールディングス Substrate processing apparatus
CN109422224A (en) * 2017-08-28 2019-03-05 康美包(苏州)有限公司 The control method and control device of bottle placer and bottle placer

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