JPH06508013A - 3D scanning system - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] 3D scanning system The present invention relates to a three-dimensional +3-Dl scanner, and particularly to a three-dimensional +3-Dl scanner, which has two rotating mirrors and a third rotating mirror. The present invention relates to a line scanning calibration device related to a camera that is linked to an overhead mirror.

Background of the invention Prior art 3-D line scanners require multiple access mirrors and multiple cameras And so. Scanners are used to examine integrated circuits and other small components on printed circuit boards. It is used. In the conventional technology, two cameras and multiple cameras are required to configure the scanning mechanism. number of mirrors are required. Prior art scanning algorithms use two mirrors. It uses the triangulation it requires. Conventional techniques using multiple cameras Laws are increasing in cost and complexity.

Conventional scanning devices utilize a 'gold differential' to calibrate the scanning operation. I've been using it. For example, the gold-defining part has x, y, and two coordinates in one coordinate system. The part is precisely illustrated in a Cartesian coordinate system using . The gold defence, scan provides a highly accurate image of the area being inspected using gold def club They are generally expensive and in some cases extremely difficult to create. each A unique goal differential part is created for the unique part. sometimes one inch of The cost associated with the need to provide a gold differential section with tighter tolerances smaller than 1. There is a difficulty. This level of precision is required for the many different goal differentials created. It will be done.

The gold differential area is scanned by a conventional scanner and a 'trended image' is created. used to form. Trained Image calibrates conventional scanners It is used to match the image of the part being inspected. in the traditional way The gold differential part requires at least 10 times more precision than the part being inspected. do. The motive of the present invention is that each and every part inspected by a part scanning device This was to eliminate the need to constitute a "golden" part of the product.

Summary of the invention The present invention uses an axle camera that receives optical input through a set of two mirrors. The present invention provides a method for inspecting three-dimensional parts. A third mirror provides a top view of the part. Ru. These mirrors are precision rotatable, allowing the operator to determine the exact position of the mirror. I am aware of the location. These mirrors are designed using novel triangulation techniques. Calibrated by method. The calibration method first consists of the position and rotation of two rotatable mirrors. Start by checking the location of the camera. Equipped with a highly accurate autofocus mechanism, Focus vs. distance information is now fed back to the system's controller. It has become. During the calibration period, a precisely defined object, such as a redicle mask, is used to obtain constant dimensional data on system parameters.

The Redicle Mask is a precise putter whose defining dimensions are precisely known. It is. The calibration method uses the camera passing through the first and second mirrors to the reticle. Proceed to create an equation of state that completely describes the ray from . The rays are preset It is assumed that focusing is performed by an automatic focusing mechanism at a relative distance. The calibration method of the present invention is , then introduce a third overhead mirror that yields a second set of state equations .

The first and second sets of state equations are successive approximations in which the unknown state values are found by algebraic processing. It is possible to solve it using a similar method.

One objective of the invention is to use a single camera to analyze parts in three dimensions. The objective is to provide an improved method of component inspection.

Another object of the present invention is to visualize parts in three dimensions using a precisely defined reticle mask. An object of the present invention is to provide an improved line scanner that can perform inspection.

Yet another object of the invention is to provide an improved part scanning mechanism at low cost. There are many things.

Still another object of the present invention is to provide an improved scanner for realizing three-dimensional feature extraction of parts. The objective is to provide a mechanism for

Yet another object of the present invention is to provide an improved system that is capable of autofocus and does not require manual intervention. The purpose of this invention is to provide a component scanning calibration system with a high level of accuracy.

Yet another object of the invention is to provide a single camera with two precisely positioned mirrors. each mirror for displacement in the focused image of the mask reticle. An object of the present invention is to provide an improved part scanning mechanism for correlating rotation angles of parts.

Yet another object of the invention is to provide an improved light camera in which the second triangulation camera is omitted. The purpose is to provide a scanning mechanism.

Still another object of the present invention is to provide partial scanning that does not require the use of a gold differential. The purpose is to provide a calibration mechanism.

Still another object of the present invention is to photodeposit small putters onto a dry plate with high precision. An object of the present invention is to provide a readicle mask having

Yet another object of the invention is to provide a low cost, low resolution optical detector as an optical detector in the system. It's all about using the camera.

Yet another object of the invention is to detect the edges of the dots using an edge detection algorithm. Our goal is to provide an improved dot scanning system as found in Ru.

Yet another object of the present invention is to provide a method for reversing light beams from an object scanned by a camera. The idea is to use an autofocus camera to spot the road.

Brief description of the drawing FIG. 1 is a schematic diagram of the device of the invention.

FIG. 2 is a three-dimensional perspective view of redracing according to the invention.

FIG. 3 is a diagram of a reticle pattern of a mask used in one embodiment of the present invention. .

FIG. 4 shows the center dot of a precision redicle mask used in one embodiment of the present invention. FIG.

FIG. 5 is a high level flow diagram of a calibration method according to the present invention.

FIG. 6 is a flow diagram illustrating the method for centering dots used in the present invention. It is.

FIG. 7 is a schematic flow diagram for locating the dot center used in one embodiment of the present invention. be.

FIG. 8 is a schematic flow diagram of a method for calculating mirror angles.

Figure 9 is a schematic flowchart showing an example of a method for extracting features from the plane of all dots on the reticle. -Fig.

FIG. 10 is a mode diagram of the operation of the present invention.

FIG. I is a diagram illustrating a visual field plane calculation flow according to the present invention.

FIG. 12 is a diagram showing a viewpoint calculation flow according to the present invention.

FIG. 13 is a diagram showing a size and optical path length calculation flow according to the present invention.

FIG. 14 is a diagram showing a mirror surface position calculation flow according to the present invention.

FIG. 15 is a diagram illustrating a flow of a method of bouncing a field plane through an optical path according to the present invention. It is.

Detailed description of the preferred embodiment FIG. 1 shows a method and apparatus for a three-dimensional scanning system according to the invention. Figure 1 shows a CCD camera 22 with an autofocus zoom lens 24. auto focus zoom Lens 24 is trained on optical system 25 pointing to a set of mirrors. mirror - is a set of four overhead mirrors 14A, 14B, 14C and 14D. , a Y-axis mirror 16 and an 18. The Y mirror 16 is controlled by a Y servo motor 36.

The X mirror 18 is controlled by an X servo motor 38. Reticle 1o is part 3 Used as an optically transparent support for scanning 0. mirror optics The system 25 and the autofocus zoom 24 provide an image of the part and an image of the reticle 1o. Provide the following. The above mirror system is arranged above and below the plane defined by reticle 1o. We provide equipment that allows you to observe parts from anywhere.

Figure 2 shows a book used to scan and calibrate an optical scanning system. 1 is a three-dimensional schematic perspective view of an embodiment of the device according to the invention; FIG. The device of the present invention is an automatic It includes a camera 22 that receives an image passing through a focusing zoom lens 20.

The autofocus zoom lens 2o focuses the set of incident light 11H on the camera lens 22. Provide a means to match. The autofocus mechanism determines the distance at which the object is focused. There is a relationship between distance and the amount of focus adjustment made by an optical autofocus system. In this sense, it provides a relative means for determining the optical path length of a light beam. Main departure In the disclosed method, the reticle 1o has a pattern 12 deposited thereon. pa Turn 12 constitutes a number of features of the invention. The reticle pattern 12 is To provide a means to accurately obtain the size and relative position of an image in a scientific system. of the present invention The method is to analyze the trace of the light ray from the target to the imaging device. In Figure 2 , the light beam is transmitted from the reticle pattern to the overhead mirror 14A, the Y mirror 16, It passes through the X-mirror 18, an autofocus system, and enters the camera. , R4, R3, Each ray of R2 and R1 is associated with a three-dimensional coordinate XYZ.

When the device of the invention is operated for the first time, it requires calibration. Calibration according to the invention In this method, the positions of the X and Y mirrors are known exactly as well as the position of the camera 22. ing. Calibration #1AIR is when the pattern on the reticle is exposed to the CCD camera 22. It takes advantage of the fact that it composes an accurate image. Y mirror axis 26 and The angular displacement of the X and Y mirrors about the mirror axis 28 is unknown prior to calibration. Ru. The position of the overhead mirror 14A and its tilt angle with respect to the light @R3 are also unknown. It is an intellectual number. The method of the present invention extracts features of the light 11R passing through the mirror and optical system. , we proceed by creating a set of system equations that can solve for the unknown variables. Melt. The accurately formed reticle 12 allows accurate alignment of the overhead mirror 14A. position, the equation of the system with respect to the optical axis 26 of the Y mirror and the optical axis 28 of the X mirror Provide the information needed to solve the equation. In the calibration method of the present invention, the reticle is I with that combination! The first one is wetted and viewed from the bottom using a rotating mirror. be measured. Second, the reticle is observed from the top using an overhead Ru.

Two views are necessary to scan the part 30 in three dimensions. The bottom view is of provides an accurate profile picture of the object. Bottom view or flat view of reticle 10 The plane is defined in the optical system as Z=0.

FIG. 3 shows the exact reticle pattern 12. Accurate reticle pattern 12 is drawn on the reticle 10 or is preferably photodeposited. It's Ruka. The pattern can be used to accurately calibrate optical systems according to the method of the invention. This is the most precise shape possible. The reticle pattern is precisely spaced, e.g. , a diagonally arranged set of circles or dots of exact size. reticle The whole consists of a known shape and a known size. The size, shape and location are It is predetermined before the bright calibration. Other screens may be used to perform the functions of reticle 10. The description here is by way of example only and is not limiting. It does not mean that. The center of the pattern is used for initial calibration of the device of the invention. A pattern 40 of five dots in dashed lines is used. Second dot 44 is used to orient the reticle space with respect to the center dot pattern 40. Ru. , 42 are used to feature the reticle plane. used. The position of the dot is defined as Z=O on the reticle 10, i.e. , the reticle is a plane in three-dimensional space, and the reticle exists as a plane in three-dimensional space. The plane is the plane of Z20.

FIG. 4 is a detailed enlarged view of the center dot pattern 4o of FIG. dot center glue 4o is a central large area surrounded by four surrounding dots 51, 52, 53 and 54. Dot 5o is shown. The large center dot 5o allows you to accurately center the reticle. used by the focusing and positioning system of the present invention to locate and place used. This dot is preset at the center of the reticle 10. surrounding dots 52 and 54, and dots 53 and 51 are diagonally arranged dots. These dots The size of the dot changes to indicate the rotational position of the reticle, with dot 53 It differs from dot 52 in size. Dots 54, 52 and 51 are different The size of the dot 53 is preferably smaller than that of the dot 53. A person skilled in the art would understand Other patterns such as loss hatching or straight lines with crossed tick marks This mask pattern is unique in the sense that it can be used to provide precise shapes. It can be seen that this provides one way to identify the exact shape of a dimension.

FIG. 5B is a high level flow diagram of the calibration method of the present invention. The calibration procedure of the present invention is as follows: First of all, we begin with block 1°O, which centers the center dot pattern 4o shown. . The procedure is to set the optical system to the center dot pattern, and then set the pattern 4o to the center dot pattern 1. Proceed to block 102 where the The procedure then proceeds to block 104 where the display and camera are is calibrated to calculate the magnification in the X and Y directions. What are the steps?

The diagram then proceeds to block 106 where the camera aspect ratio is set to It is considered to be divided by the size. The procedure then proceeds to 108 where the other dots are I can't stand it. Other dots are found and sized, which allows the reticle to It is used to determine the orientation of the pattern and calculate the remaining features of the optical system.

The procedure then moves to block 110 to extract features from the remainder of the reticle pattern. , the optical system is calibrated. Each block is further defined as shown in Figures 6.7.8 and 9. details are explained.

The upper mirrors of the present invention, shown as mirrors 14A, 14B, 14c and 14D in FIG. FIG. 5A shows how to calibrate the errors. How to calibrate the upper mirror, reticle How to calibrate the pattern and #28 of the X mirror and #28 of the Y mirror shown in Figure 2. Similar to the method for calibrating axis 16. Similar to a reticle, there are 5 alignment steps. The procedure shown in Figure 5A is shown in Figure 5A by centering the image on the CCD and moving it to the CCD camera. It begins by processing the rays from the image. The method for placing the center dot is shown in the figure. 7. The effect of the present calibration method in this respect is that the axial displacement of the mirror The mirror axes are calibrated at the point in time and the mirror axes are shown in Figure 2 as 28 for the X mirror and 26 for the Y mirror. There is. Thereby, the apparatus and method of the present invention utilize the overhead mirror shown in FIG. -14A, the third unknown optical plane can be calibrated. The procedure in Figure 5A is Center the pattern 102A. The optical axis and focal optical path length from the image are shown in Figure 1. Correlated using the method of 6. The procedure then proceeds to box 2OA and the dot pattern. The absolute center of the curve is determined by edge detection. For those skilled in the art, Subvixel Edge Some edge detection methods, such as detection, can be used to more accurately locate dots. Understand what you can do. Those skilled in the art can also use alternative methods of edge detection. You can understand that it is Noh. The procedure goes to step 104 and the position of the overhead mirror is The position is to use the optical path of the mirror and solve the ray tracing equation for the state variable. Determined by Ray tracing and vector analysis are well known in the prior art. There is. A good explanation of vector analysis is by Harvey F. Davis. F. Davis) and Arthur David Snyder (D. avid Snyder) by Allyn/Bacon (Allyn and Bacon) Bacon, Inc.) published by Hecht Shonen Isu J5 (Introducti onto Vector＾nalSIS) in the 4th edition. Ridracing Master The explanation provided is from December 1990 Byte. L's paper 14 Akji-ta ≦ U bi fire ni no riichigu (k revised M bowl 1LIR dazzling) The method of redracing is explained in . The text of both wheels is here as a reference It has been incorporated. The procedure then proceeds to 106A to recalculate the aspect ratio. It will be done. The Ryowa text is incorporated herein for reference. The procedure then proceeds to 108A. , other dots in the reticle pattern are scanned and used for feature extraction in the overhead mirror. be let out. The procedure then proceeds to 11OA, where features of the plane of the reticle are extracted. Ru.

FIG. 6 shows a center dot pattern 40, shown as block 100 in FIG. FIG. The system first of all blocks mirror 16.18 2 00, set to their center position. See Figure 1 for reference numbers for all equipment. and shown in FIG. The X mirror 18 and the Y mirror 16 are When rotated by an equal amount, these tilts are aligned so that they are centered. center The procedure continues to block 202, where the mirror 16.18 is placed at the center of the calibration pattern. is mechanically aligned to obtain an image of the CCD The position of the mirror is such that it fits directly into the center of the CCD array of camera 22. By matching, the mechanism driving the mirror 16 and the mechanism 8 is connected to the CCD camera 22. Provides a reasonable range of motion for scanning objects or parts 3o on the reticle It is possible to do so. The mirror mounting procedure then proceeds to step 204, where the center door In order to display substantially all five dots of the center dot pattern 4o, , within the field of view of the CCD camera. The procedure then proceeds to 402 in FIG. Make a pattern.

In FIG. 7, a method for locating the center dot 5o is shown. The hand fan is block 25. Starting at 0, the pattern scan is approximately in the center of the large dot. The steps are using conventional edge detection techniques to find the minimum X, minimum Y, maximum X, and maximum Y of the edges. . The mirror is placed in the procedure block so that the dot is placed in the center of the field of view of the CCD camera 22. 251. Minimum X, minimum Y, After finding the maximum X and maximum Y, the center bisector is found and the exact center of the dot is is determined at procedure block 254.

Referring to FIG. 5, the magnification of the device of the present invention is obtained by dividing the number of inches by the number of pixels. It will be done. This means that the center dot pattern 4o has a certain size. So, for example, in this case, it is 5o mil and the number of pixels in the center is also known. You can play it. In this case, for example, 1oo vixel is The mil is 50/100 and the aspect ratio is 1/2.

The same technique can be used to scale Y. The procedure consists of 106 X to Y aspects. Proceed to calculate the ratio. The procedure continues at 108 where other dots are scanned and the correct The size of the reticle pattern is used to calibrate the optical system.

FIG. 8 shows that the size and relative aspect ratio of the pixels in the present invention are known. We show how to calculate the angular displacement of the mirror in case. In block 280, other dots edges are found by edge detection. The edge detection method of the present invention is shown in FIG. . Other dot positions are at preset known positions. This is the first dot and the second Provides a method for formulating equations for systems with dots. The absolute position of the two dots is , is known and calculates the angular versus linear displacement of the object on the CCD screen. Provide sufficient information.

Referring to rM2, the Y mirror 16 and the X mirror 18 reflect the light aR, For each displacement of mirror X and mirror Y, R1, R2 and R3 are compared and the associated Move in the direction of the image. Observe the relative motion of the dots on the screen and Positioning and calibration can be performed. For each angular displacement of the Y mirror, the relative Y of the image For each angular displacement of the aX mirror that causes a linear displacement, an associated displacement of the X image occurs. live.

l! Referring to I9, feature extraction of the Z=0 plane is performed. In step 230 , the rest of the dots are checked and searched. Each dot is r! i16 procedure step Found by edge detection as shown in step 232. The procedure is step by step. Proceeding to step 234, each dot is centered in the field of view and the position of the dot is memorized. .

The procedure continues to step 236, where the plane of focus Z=0 is determined. The optical path length is , by defining the Z plane as O at this position, the Z plane is associated with the determined distance. It becomes possible to The procedure then proceeds to block 230 where the first order dot is found. and the same procedure is repeated back to step 232.

Referring to FIG. 10, two modes of operation of the present invention are shown. The present invention Starts in start mode 60 and immediately switches to scanning mode 62 or calibration mode 61 move on. If the present invention is in the calibration mode 61, the scanning mode can be It is possible to move to code 62. Even when the present invention is in scanning mode, no It is possible to shift to the calibration mode 61 even when the In this way, the present invention provides a method for automatically calibrating and dynamically scanning during operation of scanning operations.

The present invention thus addresses changes in the optical properties of materials due to temperature changes, vibrations, and compensates for simple changes caused by moving parts or moving equipment. provide a method for

Referring to Table A, a list of models of the method of the invention is shown. The present invention A model structure of the device of the invention is utilized to form a computational structure. child The model is listed below as a list of data types along with data representation and line numbers. given to. The first model is a model of the optical system of the method of the invention.

The model element includes a type indicating what type of model it is. on line 422 indicates what type of unit it is. In line 423, 424 shows the model label given the model. In line 425, the model is given The extended calibration time is indicated. In line 426, the number of planes given to the model is shown. A planar struture is shown to line 427. In line 428, The number of different optical paths present in the model is shown. The optical path strafure is line 43. given to 0. The next line is a two-dimensional array that defines the viewpoint at the optical origin. Ru. The next model element is the original representation and the world car, shown by line 434. The camera roll angle is the angle between the species and the X axis. The next element in the model is This is a focal model, which will be described later, and is shown in 437. The final element of the model is This is a mirror model that is the mirror model structure described above.

Table A 419/*Model Structure Book/ 420 5truct MODEL 21 f 422 Byte Type; /Zero model type*/423 BYTEUni tType; /1-L=y Type I/424 char Label [LA BELSIZE]; ha model label *1425 time-t CalibTi se;　/Time and date when the zero system last performed calibration*/ 426 BYTE NumberOfSurfaces; /l Model differences Number of planes zero/427 5 truct S[IRFACE[NAXS[IRFAC ES]; /electronic [ii 71/-*/428 EYTE NumberOfP athes; number of different optical paths in the model *1429 7 umbrella optical path array zero / 430　5truct　0pticalPath[MAXOPTICALPAT HES];431 /*Unit vector U that defines the field of view plane at the optical origin, 　V, W zero 4 3 2 double OriginViewUnit [VECT3] [V EC 3]; 433 Chapter 7 OriginView Vector u and X-axis world vector The angle between vector (1, 0, 01 is zero / 434 float CameraRollAngle; 435 / Ning View The ratio of DilI[U]/ViewDim[V] is constant for all views1436 　double　AspectRatio;437　5truct　FOCIJ SMODEL FacusMadel: /Strafcha fist that describes the car focus/ 438　5truct　MIRRORMODEL　MlrrorModel[V ECT2];/xAy zero driving the zero mirror model/ 439]; / End of Umbrella Model Structure / Table B shows the optical elements of the system. Concerning surface straftures. Table B is line 388 and the surface type is reflective. However, it indicates whether it is refractive. The surface is labeled at line 389, and the surface is at 390. The refractive index of is given, and line 391 gives the position of the world surface. line 39 3 gives the vertical vector, which is the position vector given to line 391. is the perpendicular unit world vector of the surface fixed to .

Table B 385 / Zero optical surface structure / 386 5truct 5URFACE 388BYTE Type; / Zero surface type 2 reflection, refraction $1389 char Label (LABELSIZE): /Kyo surface uheru*/390 float t Refractive index; /I refractive conductor passing through the surface /391 double Po5iton[VECT3]; /Zero world surface position zero/39 2 / Unit world vector perpendicular to the surface fixed to the meeting position vector * / 393 d double~ormal (VECT31:394);/zero surface structure End 11 Table C shows the optical path stratum that describes the optical paths along the ordered list of surfaces. Regarding fucha. The optical path includes a type in line 407. 408 label, line 409 is the light switch part, line 410 is the other surface part, line 411 is Surface index structure bite, line 413 contains the surface index structure bit previously described. Contains rough tea.

Table C 402/*Light path structure*/ 403 / Zero path is an ordered list of surfaces * / 404 7 * Path The type of is the same as the scan type */405 5 truct 0 PTICAL PATH407BYTE Type; /Zai light path type*/408 char L abel [LABELSIZE]: /*Light path Raul Zai 14 Q 9 BYTE LightSwitches; #Light switching part-time job $/410 BYTE NumberOfSurfaces; / Number of surfaces along the zero optical path */ 411 BYTE 5urfacelndex[MAXSURFACES]; /*Array zero of indices for the surface/ 412 7* Array of pointers to the surface in the optical path zero / 413 5 truct 5URFACE far *5urfacePtr[ni^X5URFACES I; /Cannot be assigned electrically*/ 414 1; # End I/front of the optical path struc- ture is the focus model struc- ture show. The focus model consists of three components that determine the focus of the ray to be traced in the method of the present invention. Contains elements. The first element is the coefficient V, which is determined using the routine described below. One of the polynomial coefficients used to calculate the display dimension vector V from the focus position It is a dimensional vector. The next element is the coefficient W and is a -dimensional vector, Vector of polynomial coefficients used to calculate W of the display dimension vector from the focus position The last element is defined as the coefficient of optical path length and is the focal point at line 358. is a one-dimensional vector of polynomial coefficients used to calculate the optical path length from a point position. .

Table D 347 Chapter 7 Fish Point Midel Structure Management / 348 5 truct FOCUSM ODEL350/To the zero display dimension’) Tor (ViewDi+a vector) (7) Polynomial coefficient zero used in Luno to calculate V/ 351 / Electric heating point position 3 5 2 float CoeffV [VECT3]; It is used to calculate W of the indicated dimension vector tViewDim vector). polynomial coefficient pass 354 /*From focal position*/ 355 float CoeffW[VECT3]; 356/electronic path length (ap 1357 polynomial coefficients used to calculate l) 358 float CoeffOPL [VECT3]; 359); / electric heating point Terminating zero of the model Table E describes the mirror model struc- ture, which is simply A one-dimensional vector of coefficients including polynomial coefficients is used to calculate the mirror angle from the mirror position. be.

The above table pertains to the elements of the structure of the present invention disclosed above and is reproduced in Appendix BA. With the complete programming model of the present invention stored, Completely describes the optical system. Line numbers in Tables A, B, C, D and E are attached. Corresponds to the line number of the C programming language code in Book A.

Table E 361 / Zero X and Y mirror model reconstruction zero / 3 5 2 5 truc t NIRRORMODEL364/To calculate the mirror angle from the zero mirror position Polynomial coefficient 0/365 float Coeff[VECT3]; 366 1: /End zero of electric mirror model structure/Referring to FIG. 11, according to the present invention, A flow diagram of a method for calculating the conceived viewing plane is shown. This method is very 302, calculate the position of the X, Y mirror surface. 304, initialize the viewpoint to the origin 306, bounce the viewing plane through the optical path 308 , 310° to calculate the final viewpoint. In step 302, the algorithm calculates the size and light. Calculate the path length. Once the optical path length is known, the procedure proceeds to step 304, where the mirror -16.18 mirror surface position can be determined. When the mirror surface position is changed, the book The method continues to step 306 where the viewpoint is at coordinates 0. 0. Initialized to the origin of 0 Ru. Next, in step 308, the field plane is reflected, or bounced, through the optical path. Ru. A final viewpoint is calculated at step 310.

Referring to FIG. 12, a flow diagram of the method of calculating viewpoints devised in the present invention is shown. has been done. This method calculates the size and optical path length ("OPL") 302 , calculate the positions of the X and Y mirror surfaces 304, initialize the viewpoint to the origin 306, and set the optical path. bounce the vector through 312 and calculate the final viewpoint 314゜Step 30 In 2, the algorithm calculates the size and optical path length. Once the optical path length is known, The sequence proceeds to step 304, where the mirror surface of mirror 16.18 is located. . Once the mirror surface position is determined, the method proceeds to step 306^ and the viewpoint is located. Mark 0. Initialized to the origin of 0.0. Next, in step 312, the The vector is reflected, or bounced back. A final viewpoint is calculated in step 314. .

Referring to FIG. 13, a diagram of the method for calculating the size and optical path length devised in the present invention is shown. A raw diagram is shown. In this method, in step 320, the parameter V is set to Step 322 calculates U, step 324 calculates W, and step 326 calculates OPL. Including top. V is found in step 320 by calculating the following equation:

V=Vvo+CV! book focus Next, in step 322, U is calculated using the following formula.

lJ = V umbrella aspect ratio Next, in step 324, W is determined by the following equation.

W=C-.

Finally, the optical path length OPL is determined by the following formula.

OP　1-　　”　CopLo　+　COPL　l　Electric focus diagram 14 If you refer to , a flow diagram of the method of calculating the position of the mirror surface conceived in the present invention is shown. There is. This calculation step calculates the X mirror angle;

Calculate the perpendicular to the X mirror 342, calculate the Y mirror angle 344, and create the Y mirror table. Calculate the perpendicular to the surface 346° Referring to FIG. 15, the method of bouncing the viewing plane through the optical path devised in the present invention A flow diagram of the law is shown. This method scans the entire surface 360 times, and Calculate distances between points, integrate distances 364, reflect and refract optical paths 36 6゜

Claims (9)

[Claims] 1. Scanning for scanning objects placed in space up to three dimensions A system, a. for controlling providing a focus signal, a first servo signal, and a second servo signal; and the means of b. means for automatically focusing an object in response to said focus signal; a means for recording an image of the object, comprising: c. for the recording means. a first means for reflecting an image of said object; and said first reflecting hand. the step has a first mirror axis and an angular displacement with respect to the first mirror axis; positioning the object relative to the first coordinate axis; d. the recording means to the recording means; second means for reflecting an image of the object, said second reflecting means , a second mirror axis, and an angular displacement with respect to the second mirror axis; positioning the point relative to the second coordinate axis; e. said in response to said first servo signal; a first servo connected to said first reflecting means for servo-controlling said first reflecting means; f. servo-controlling the second reflecting means in response to the second servo signal; second servo means connected to said second reflecting means for reflecting; g. multiple position fingers for calibration including a reticle means for recording a pattern with marks thereon; means, wherein each of the plurality of indicators corresponds to a pattern of indicators on the calibration means. Positioned precisely relative to other fiducials on a more defined common plane The relative positions of said common planes are determined by focusing on the index with the first and second can be defined with respect to a second coordinate axis, and portions of the plurality of indices are defined in a predetermined position. A scanning system characterized by forming a central calibration pattern of the image. 2. Claim 1, wherein the recording means is a CCD camera. Scanning system described. 3. a seat on said calibration means sufficient to determine a common plane in three-dimensional space; a plurality of optical reflective means arranged on said common plane to provide target information; The scanning system according to claim 1, characterized in that the scanning system includes: 4. Claim 1, wherein the autofocus means includes a zoom lens. The scanning system described in Section. 5. The means for calibration are a. aligning and recording the position of the image recording means; b. of the first reflecting means; align and record the position; c. Align the position of the second reflecting means. , record; d. Image the center calibration pattern so that the entire center pattern can be observed. and the image of the pattern has a first relative image size along the x and y axes. has a e. A preset size of the center calibration pattern in the x-axis, to determine the x-magnification of said images facing each other by said central calibration pattern on said image recording means. relating to a first relative image size; f. Preparing the center calibration pattern on the y-axis set the size of the center on the image recording means to determine the y magnification. a first relative image size of said images relative to each other by a calibration pattern; mooring, g. storing the angular displacement amount of the first mirror axis for the purpose of determining the x-axis displacement; While storing the angular displacement of the second mirror axis for the purpose of determining the y-axis displacement, other said first mirror axis and said second mirror axis to image any indicia. - rotate the axis, h. storing an x-displacement of the image, the x-displacement being from the rotation of the first mirror; obtained, i. storing a y-displacement of the image, the y-displacement being from the rotation of the first mirror; obtained, j. associating the X-axis displacement with the X-displacement to calibrate the first mirror; k. a step relating the y-axis displacement to the y-displacement to calibrate the second mirror; 2. The apparatus of claim 1, further comprising a step. 6. Claim 5, characterized in that all indicators are imaged and calibrated. Equipment described in Section. 7. The means for relating the x-displacement to the x-axis position of the image includes a polynomial fit. 6. A device according to claim 5, characterized in that it includes a combination of: 8. The means for relating the y-displacement to the y-axis displacement of the image comprises a polynomial 6. Device according to claim 5, characterized in that it includes an adaptation. 9. Each indicator is used to calibrate said first and said second mirror. 6. The method of claim 5.