JPH0635128Y2 - Position detector - Google Patents
Position detectorInfo
- Publication number
- JPH0635128Y2 JPH0635128Y2 JP1989050490U JP5049089U JPH0635128Y2 JP H0635128 Y2 JPH0635128 Y2 JP H0635128Y2 JP 1989050490 U JP1989050490 U JP 1989050490U JP 5049089 U JP5049089 U JP 5049089U JP H0635128 Y2 JPH0635128 Y2 JP H0635128Y2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- permanent magnet
- position detector
- relative distance
- detection element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
【考案の詳細な説明】 ［産業上の利用分野］ 本考案は磁気検出素子を使用した位置検出器に関し、と
くに、小型リニアアクチュエータなどに利用される位置
検出器に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a position detector using a magnetic detection element, and more particularly to a position detector used for a small linear actuator or the like.
［従来の技術］ 従来、可動部の変位を検出する変位検出部は、例えば第
４図に示すように、アクチュエータＬの可動部１の矢印
で示す変位方向に対し磁気抵抗素子などの磁気検出素子
２の感磁面21を直角に配置し、前記感磁面21に対向させ
て単一の永久磁石３を可動部に設けて構成され、前記磁
気検出素子２の感磁面21に加わる前記永久磁石３による
磁界の垂直成分の磁束密度の変化により磁気検出素子２
の出力が変化し、可動部１の変位を検出するようにして
ある。[Prior Art] Conventionally, as shown in FIG. 4, for example, as shown in FIG. 4, a displacement detection unit for detecting the displacement of a movable portion is a magnetic detection element such as a magnetoresistive element in the displacement direction of the movable portion 1 of the actuator L with respect to the displacement direction. The two magnetic sensitive surfaces 21 are arranged at right angles, and a single permanent magnet 3 is provided in the movable portion so as to face the magnetic sensitive surface 21, and the permanent magnet 3 added to the magnetic sensitive surface 21 of the magnetic detection element 2 is constructed. Due to the change in the magnetic flux density of the vertical component of the magnetic field by the magnet 3,
Output changes and the displacement of the movable part 1 is detected.
また、実開昭57−86418号公報に開示されているよう
に、一枚の基板上に磁気抵抗素子と、この磁気抵抗素子
に常時一定の磁界を付与する第１の永久磁石を並置して
固定した変位検出部と、変位検出部の近傍で磁気抵抗素
子の感磁面と直交する方向に相対的に位置が変位するよ
うに配置された第２の永久磁石の合成磁界によって磁気
抵抗素子の出力を変化させ、第２の永久磁石の変位を検
出するものがある。Further, as disclosed in Japanese Utility Model Application Laid-Open No. 57-86418, a magnetoresistive element and a first permanent magnet that constantly applies a constant magnetic field to the magnetoresistive element are juxtaposed on one substrate. The fixed displacement detection unit and the composite magnetic field of the second permanent magnet, which is arranged in the vicinity of the displacement detection unit so that its position is displaced relatively in the direction orthogonal to the magnetic sensitive surface of the magnetoresistive element, There is one that changes the output and detects the displacement of the second permanent magnet.
［考案が解決しようとする課題］ ところで、第４図に示した構成の永久磁石３による感磁
面21の磁束密度は、第３図に破線で示すように永久磁石
３と感磁面21との距離の変化に対し指数関数的に変化す
る。例えば、磁極面の面積が40平方ミリメートル、高さ
が20ミリメートルの希土類磁石を使用した例では、変位
が１〜２ミリメートルまでは比較的直線的に磁束密度が
変化し、磁束の検出が可能であるが、それ以上の変位の
大きい範囲では、磁束密度が低下するので制御装置など
のノイズによる影響で検出が難しかった。したがって、
感磁面21、と永久磁石３との距離が永久磁石３の寸法に
対して比較的大きい場合は永久磁石３の変位の検出精度
が急激に低下し、位置制御が困難である。[Problems to be Solved by the Invention] By the way, the magnetic flux density of the magnetic sensitive surface 21 by the permanent magnet 3 having the configuration shown in FIG. 4 is as shown by the broken line in FIG. Changes exponentially with changes in the distance. For example, in the example of using a rare earth magnet with a pole face area of 40 mm 2 and a height of 20 mm, the magnetic flux density changes relatively linearly up to a displacement of 1 to 2 mm, and the magnetic flux can be detected. However, in a range where the displacement is larger than that, the magnetic flux density is lowered, and it is difficult to detect it due to the influence of noise from the control device or the like. Therefore,
When the distance between the magnetic sensitive surface 21 and the permanent magnet 3 is relatively large with respect to the dimension of the permanent magnet 3, the detection accuracy of the displacement of the permanent magnet 3 is drastically lowered, and the position control is difficult.
また、実開昭57−86418号公報に開示された方法も構造
が複雑であるなどの欠点があった。本考案は永久磁石を
固定する固定板の材質と永久磁石の配置を変えることに
より、変位が大きい領域まで検出できる高精度の位置検
出器を提供することを目的とするものである。Further, the method disclosed in Japanese Utility Model Laid-Open No. 57-86418 also has drawbacks such as a complicated structure. An object of the present invention is to provide a highly accurate position detector capable of detecting even a large displacement area by changing the material of the fixing plate for fixing the permanent magnet and the arrangement of the permanent magnet.
［課題を解決するための手段］ 本考案は、相対距離が変化する可動部または固定部のい
ずれか一方に平面状の磁極面を設けた永久磁石と、他方
に前記相対距離が変化する方向と平行に平面状の感磁面
を設けた磁気検出素子を備えた位置検出器において、相
対距離が変化する方向に対して直角方向に平板状の非磁
性体を設け、前記非磁性体の上に磁極面が前記非磁性体
と平行になるように、２個の永久磁石を感覚を設けて固
定し、かつ同じ方向に向いた前記２個の永久磁石の磁極
の極性が異極になるように配置し、前記磁気検出素子を
前記２個の永久磁石の外側面の間に配置した位置検出器
である。[Means for Solving the Problems] According to the present invention, a permanent magnet having a planar magnetic pole surface on one of a movable portion and a fixed portion whose relative distance changes, and a direction in which the relative distance changes on the other In a position detector provided with a magnetic detection element having a flat magnetic sensitive surface in parallel, a flat non-magnetic material is provided in a direction perpendicular to the direction in which the relative distance changes, and a non-magnetic material is provided on the non-magnetic material. The two permanent magnets are sensibly fixed so that the magnetic pole surface is parallel to the non-magnetic body, and the polarities of the magnetic poles of the two permanent magnets facing in the same direction are different. A position detector in which the magnetic detection element is disposed between the outer surfaces of the two permanent magnets.
また、磁極面が前記非磁性体と直角になるように１個の
永久磁石を前記非磁性体に固定し、前記磁気検出素子を
前記１個の永久磁石の磁極面の間に配置したものであ
る。In addition, one permanent magnet is fixed to the non-magnetic material so that the magnetic pole surface is perpendicular to the non-magnetic material, and the magnetic detection element is arranged between the magnetic pole surfaces of the one permanent magnet. is there.
［作用］ 、相対距離が変化する方向に対して直角に設けた非磁性
体の上に磁極面が平面状の永久磁石を設けてあり、永久
磁石を２個設ける場合は、両磁極の方向が非磁性体の上
に移動方向に対し直角になるように置かれている。ま
た、永久磁石を１個設ける場合は、磁極面が移動方向に
対して平行に置かれている。[Operation] When a permanent magnet having a flat magnetic pole surface is provided on a non-magnetic material provided at right angles to the direction in which the relative distance changes, and when two permanent magnets are provided, the directions of both magnetic poles are It is placed on the non-magnetic material so as to be perpendicular to the moving direction. When one permanent magnet is provided, the magnetic pole surface is placed parallel to the moving direction.
したがって、いずれの場合も両磁極面の間に形成される
磁力線は、一方の磁極面から出たあと、湾曲して他方の
磁極に入り、永久磁石から離れるにしたがって、ほぼ直
線的に磁力線の量が減少する。しかも、ネオジウム、
鉄、硼素系の永久磁石を使用すると、永久磁石によって
形成された磁力線を検出する感磁面の磁界の垂直成分の
磁束密度は比較的遠距離まで高い値で直線性を維持する
ので、遠距離の位置検出の精度が向上する。Therefore, in any case, the magnetic field lines formed between the two magnetic pole surfaces are linearly curved as they go out from one magnetic pole surface, then curve into the other magnetic pole, and move away from the permanent magnet. Is reduced. Moreover, neodymium,
When an iron or boron permanent magnet is used, the magnetic flux density of the vertical component of the magnetic field on the magnetic sensitive surface that detects the magnetic field lines formed by the permanent magnet maintains linearity at a high value up to a relatively long distance, The accuracy of position detection is improved.
［実施例］ 本考案を図に示す実施例について説明する。[Embodiment] An embodiment of the present invention shown in the drawings will be described.
第１図は本考案の実施例を示す側面図で、アクチュエー
タＬの可動部１の矢印で示す変位方向に対し垂直に非磁
性板11が可動部１に設けられている。非磁性板11の上に
は両磁極面が平板状の二つの永久磁石３、３′が、その
磁極面31、31′が異極になるように適宜間隔を置いて固
定されている。平板状の感磁面21を有する磁気検出素子
２は、アクチュエータＬの固定部４に感磁面21が永久磁
石３、３′の両磁極面31、31′の中間の位置で、かつ非
磁性板11に垂直になるように、非磁性台22を介して配置
されている。すなわち、可動部１の移動方向に対し平行
になるように感磁面21が配置されている。永久磁石３、
３′は残留磁束密度を大きくするために、材質がネオジ
ウム、鉄、硼素系である磁石を使用している。FIG. 1 is a side view showing an embodiment of the present invention, in which a non-magnetic plate 11 is provided on the movable portion 1 perpendicularly to the displacement direction of the movable portion 1 of the actuator L indicated by the arrow. On the non-magnetic plate 11, two permanent magnets 3 and 3'having two flat magnetic pole surfaces are fixed at appropriate intervals so that the magnetic pole surfaces 31 and 31 'have different polarities. The magnetic detection element 2 having the flat plate-shaped magnetic sensitive surface 21 is non-magnetic on the fixed portion 4 of the actuator L when the magnetic sensitive surface 21 is at a position intermediate between the magnetic pole surfaces 31, 31 'of the permanent magnets 3, 3'. It is arranged via a non-magnetic base 22 so as to be perpendicular to the plate 11. That is, the magnetic sensitive surface 21 is arranged so as to be parallel to the moving direction of the movable portion 1. Permanent magnet 3,
No. 3'uses a magnet whose material is neodymium, iron or boron to increase the residual magnetic flux density.
上記のように磁気検出素子と永久磁石を配置すると、磁
極面31、31′から出る磁力線が長くなり、一方の磁極面
31から垂直に飛び出した後、湾曲して他方の磁極面31′
に入り、永久磁石３、３′から離れるにしたがってほぼ
直線的に磁力線の量が減少し、感磁面21が受ける磁束密
度は、第３図の実線（１）で示すように、さらに近距離
から遠距離までほぼ同じ勾配をもつ直線に近い変化で、
かつ高い磁束密度となる。例えば、前記従来例と同じ大
きさが半分の磁石を二つ、５ミリメートル離して配置し
た場合は変位が７〜８ミリメートルまでほぼ直線的に磁
束密度が変化し、制御装置のノイズにも影響されない大
きさになっている。When the magnetic detection element and the permanent magnet are arranged as described above, the magnetic field lines emitted from the magnetic pole surfaces 31, 31 'become long, and one magnetic pole surface
After protruding vertically from 31, it is curved and the other magnetic pole surface 31 '
The amount of magnetic lines of force decreases substantially linearly with increasing distance from the permanent magnets 3 and 3'and the magnetic flux density received by the magnetically sensitive surface 21 is further reduced as shown by the solid line (1) in FIG. From a distance to a long distance, the change is close to a straight line with almost the same gradient,
And the magnetic flux density is high. For example, when two magnets, which are half the size of the conventional example, are placed 5 mm apart from each other, the magnetic flux density changes linearly up to a displacement of 7 to 8 mm and is not affected by the noise of the control device. It is sized.
また、第２図に示すように、１個の永久磁石３のＮ極お
よびＳ極の磁極面32、32′の向く方向を、可動部１の移
動方向と直角になるように、言換えれば、１個の永久磁
石３のＮ極およびＳ極の磁極面32、32′が可動部１の移
動方向と平行で、かつ反対方向に向くように非磁性板11
の上に固定して、感磁面21を永久磁石３の両磁極面32、
32′の中間の位置で、かつ非磁性板11に垂直な平面上に
配置してもよい。In addition, as shown in FIG. 2, in other words, the direction in which the magnetic pole surfaces 32, 32 ′ of the N pole and the S pole of one permanent magnet 3 face is perpendicular to the moving direction of the movable portion 1. The non-magnetic plate 11 is arranged so that the magnetic pole surfaces 32, 32 'of the N pole and the S pole of the one permanent magnet 3 are parallel to the moving direction of the movable portion 1 and face the opposite direction.
The magnetic sensitive surface 21 on both magnetic pole surfaces 32 of the permanent magnet 3,
It may be arranged at an intermediate position of 32 'and on a plane perpendicular to the non-magnetic plate 11.
１個の永久磁石が非磁性体の上に置かれている場合は第
３図の実線（２）に示すように、従来例に比べて変位の
大きい範囲まで高い磁束密度が得られる。例えば、前記
従来例で述べた永久磁石と同じ大きさの磁石を使用した
例では、変位が７〜８ミリメートルまで磁束密度が検出
可能の大きさで、ほぼ二次関数的に変化する。When one permanent magnet is placed on a non-magnetic material, as shown by the solid line (2) in FIG. 3, a high magnetic flux density can be obtained up to a range of large displacement as compared with the conventional example. For example, in the case of using a magnet having the same size as the permanent magnet described in the conventional example, the magnetic flux density is detectable up to a displacement of 7 to 8 mm, and changes substantially quadratically.
したがって、可動部の移動距離が比較的大きい範囲ま
で、制御装置のノイズに関係なく容易に、要求されるリ
ニアアクチュエータの可動部の位置検出が可能となる。Therefore, it is possible to easily detect the required position of the movable portion of the linear actuator within a range in which the moving distance of the movable portion is relatively large, regardless of noise of the control device.
なお、磁気検出素子２を可動部２に、永久磁石３を固定
部４に固定しても良い。The magnetic detection element 2 may be fixed to the movable portion 2 and the permanent magnet 3 may be fixed to the fixed portion 4.
［考案の効果］ 以上のように、本考案によれば、磁気検出素子と非磁性
体の上に置いた永久磁石とで硬性されるので構造が極め
て簡単な位置検出器を提供することができ、永久磁石か
らの変位によって生ずる磁気検出素子の感磁面の磁束密
度の変化は距離の変化に対してほぼ直線的であるので、
位置制御が容易であるとともに、リニアアクチュエータ
の移動距離が大きい場合でも、磁気検出素子の出力を大
きく出来るので位置検出精度の高い位置検出器を提供で
きる効果がある。[Advantages of the Invention] As described above, according to the present invention, it is possible to provide a position detector having an extremely simple structure because it is hardened by the magnetic detection element and the permanent magnet placed on the non-magnetic body. Since the change in the magnetic flux density on the magnetic sensitive surface of the magnetic detection element caused by the displacement from the permanent magnet is almost linear with respect to the change in distance,
The position control is easy, and the output of the magnetic detection element can be increased even when the moving distance of the linear actuator is large, so that a position detector with high position detection accuracy can be provided.
第１図は本考案の実施例を示す側面図、第２図は他の実
施例を示す側面図、第３図は変位と磁束密度の関係図、
第４図は従来例を示す側面図である。 １……可動部、11……非磁性板、２……磁気検出素子、
21……感磁面、３、３′……永久磁石、31、31′、32、
32′……磁極面、４……固定部FIG. 1 is a side view showing an embodiment of the present invention, FIG. 2 is a side view showing another embodiment, and FIG. 3 is a relationship diagram between displacement and magnetic flux density.
FIG. 4 is a side view showing a conventional example. 1 ... Movable part, 11 ... Non-magnetic plate, 2 ... Magnetic detection element,
21 ... Magnetically sensitive surface, 3, 3 '... Permanent magnet, 31, 31', 32,
32 '... Magnetic pole surface, 4 ... Fixed part
Claims (3)
いずれか一方に平面状の磁極面を設けた永久磁石と、他
方に前記相対距離が変化する方向と平行に平面状の感磁
面を設けた磁気検出素子を備えた位置検出器において、
相対距離が変化する方向に対して直角方向に平板状の非
磁性体を設け、前記非磁性体の上に磁極面が前記非磁性
体と平行になるように、２個の永久磁石を間隔を設けて
固定し、かつ同じ方向に向いた前記２個の永久磁石の磁
極の磁性が異極になるように配置し、前記磁気検出素子
を前記２個の永久磁石の外側面の間に配置したことを特
徴とする位置検出器。1. A permanent magnet having a planar magnetic pole surface on one of a movable portion and a fixed portion where the relative distance changes, and on the other side a planar magnetic sensitive surface parallel to the direction in which the relative distance changes. In a position detector including a magnetic detection element provided with,
A flat plate-shaped non-magnetic material is provided in a direction perpendicular to the direction in which the relative distance changes, and two permanent magnets are arranged on the non-magnetic material so that the magnetic pole surface is parallel to the non-magnetic material. The magnetic detection elements are provided and fixed, and are arranged so that the magnetic poles of the two permanent magnets facing in the same direction have different polarities, and the magnetic detection element is arranged between the outer surfaces of the two permanent magnets. A position detector characterized in that
いずれか一方に平面状の磁極面を設けた永久磁石と、他
方に前記相対距離が変化する方向と平行に平面状の感磁
面を設けた磁気検出素子を備えた位置検出器において、
相対距離が変化する方向に対して直角方向になるように
平板状の非磁性体を設け、磁極面が前記非磁性板と直角
になるように１個の永久磁石を前記非磁性体に固定し、
前記磁気検出素子を前記１個の永久磁石の磁極面の間に
配置したことを特徴とする位置検出器。2. A permanent magnet having a flat magnetic pole surface on one of a movable portion and a fixed portion where the relative distance changes, and a flat magnetic sensitive surface parallel to the direction where the relative distance changes on the other. In a position detector including a magnetic detection element provided with,
A plate-shaped non-magnetic material is provided so as to be perpendicular to the direction in which the relative distance changes, and one permanent magnet is fixed to the non-magnetic material so that the magnetic pole surface is perpendicular to the non-magnetic material. ,
A position detector characterized in that the magnetic detection element is arranged between magnetic pole faces of the one permanent magnet.
磁石を使用した請求項１または２記載の位置検出器。3. A position detector according to claim 1, wherein a neodymium, iron or boron magnet is used as the permanent magnet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989050490U JPH0635128Y2 (en) | 1989-04-27 | 1989-04-27 | Position detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989050490U JPH0635128Y2 (en) | 1989-04-27 | 1989-04-27 | Position detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02140410U JPH02140410U (en) | 1990-11-26 |
| JPH0635128Y2 true JPH0635128Y2 (en) | 1994-09-14 |
Family
ID=31569082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989050490U Expired - Lifetime JPH0635128Y2 (en) | 1989-04-27 | 1989-04-27 | Position detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635128Y2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4247622B2 (en) * | 2004-08-19 | 2009-04-02 | ソニー株式会社 | Lens position detection device, lens barrel, and imaging device |
| WO2006019094A1 (en) * | 2004-08-19 | 2006-02-23 | Sony Corporation | Lens position detector, lens barrel and imaging device |
| JP4679984B2 (en) * | 2005-07-06 | 2011-05-11 | 日本電産サーボ株式会社 | Grip detection device |
| JP2016145721A (en) * | 2015-02-06 | 2016-08-12 | 日立金属株式会社 | Distance measuring system and distance measuring method |
| JP6672656B2 (en) * | 2015-09-15 | 2020-03-25 | リコーイメージング株式会社 | Position detecting device and optical device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4866866A (en) * | 1971-12-15 | 1973-09-13 |
-
1989
- 1989-04-27 JP JP1989050490U patent/JPH0635128Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02140410U (en) | 1990-11-26 |
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