JPH06345206A - Load storage equipment equipped with cleaning device - Google Patents

Abstract

PURPOSE:To provide the load storage equipment equipped with a cleaning device which can simplify the whole structure, secure the compact form, and improve the space efficiency, and prevent the leak of the dirty air to the shelf, and can always feed clean air uniformly independently of the type and scale. CONSTITUTION:The air which is sucked into a space 16 by the operation of each blower 23 and discharged is formed to the clean air having the high degree of cleanliness through a filter 22, and supplied from the rear surface side for a shelf 14. A load 5 which is stored in each accommodation space 13 can be kept in the high degree of cleanliness by the clean air which flows from the rear surface to the front surface. The space 16 is in an atmospheric pressure state, and the dirty air which does not pass through the filter does not leak to the shelf side or does not leak outside from the joint part of a cover 11. Then, the necessity of the space for the arrangement of a variety of equipment below the shelf 14 is obviated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a load storage facility equipped with a clean device, which is used for storing products such as semiconductors that are extremely dustproof.

[0002]

2. Description of the Related Art Conventionally, as this type of equipment, for example, a load storage equipment in a clean room as disclosed in Japanese Patent Laid-Open No. 3-152004 has been provided. In this conventional configuration, a filter is arranged on the rear surface side of the load storage portion whose front surface and rear surface are open, and an air supply path is formed behind this filter via a partition wall. An air blower is provided below the load storage section so that the discharge section communicates with the air supply path and the clean air that has passed through the load storage section can be sucked through the suction section, and a main body outer plate is provided behind the partition wall. And an air recovery path is formed between them, and this air recovery path is communicated with the compartment in which the blower is arranged.

According to this conventional type, the air blown from the discharge part of the blower flows upward in the air supply path and becomes clean air having a high degree of cleanness through each filter and is supplied to the load storage part from the rear surface side. Therefore, the inside of the load storage section can maintain a high degree of cleanliness by the clean air flowing from the rear surface to the front surface. The clean air that has passed through the load storage section is again sucked by the blower and is circulated.

At this time, the suction force of the blower also acts on the air recovery passage to make the air recovery passage negative pressure (negative pressure). Therefore, the dirt leaked from the joint portion of the partition wall to the air recovery passage. Due to this suction force, the air is quickly sucked by the blower and does not flow out.

[0005]

However, according to the above-mentioned conventional structure, since the air supply passage is highly positively pressurized (highly pressurized), the rear frame portion and the filter forming the load storage portion are provided. There is a risk that dirty air that does not pass through the filter may leak from the gap between the joints and leak out to the cargo storage section. Therefore, the joint requires cumbersome and expensive sealing such as caulking. . Further, the structure is complicated by forming the air recovery passage by the partition wall on the back side of the air supply passage. Further, since the compartment for arranging the blower is formed below the load storage unit, the size of the whole is increased, and the lowermost level of the load storage unit is increased, resulting in poor space efficiency. A type in which a blower or the like is arranged above the load storage portion is also conceivable, but this type also leads to an increase in size as in the case of the type arranged in the lower side.

The object of the present invention is to simplify and compact the entire structure, to improve space efficiency, and to prevent the dirty air from leaking to the shelves, and to adjust the form and scale. The point is to provide a load storage facility with a clean device that can always supply clean air uniformly regardless of the situation.

[0007]

In order to achieve the above object, the load storage facility with a clean device according to the first aspect of the present invention is provided with a shelf having a plurality of storage spaces in the vertical direction, and the shelf has a front surface open. , The rear surface side is closed by a cover with a space, and in the space, a clean air supply unit consisting of a blower and a filter is provided in a plurality of upper and lower stages,
An air intake is provided on the cover side.

The second aspect of the present invention is the load storage facility with the clean device according to the first aspect, wherein each clean air supply unit is provided with an air intake amount adjusting device for adjusting the air intake amount from the space side. ing.

Further, in the third aspect of the present invention, in the load storage facility with the clean device according to the second aspect of the present invention, the air suction amount adjusting device comprises a plurality of types of mesh plates having different opening ratios,
One selected mesh plate is configured to be detachable from the main body of the clean air supply unit so as to face the suction portion of the clean air supply unit.

[0010]

According to the structure of the first invention described above, the air in the space can be sucked by the operation of each blower, and the discharged air can be made into clean air having a high degree of cleanliness by the filter, and Can be supplied from the rear side. Therefore, the load stored in each storage space of the shelf can be kept highly clean by the clean air flowing from the rear surface to the front surface.

During operation of the clean air supply unit, since the space is in a state close to the atmospheric pressure (a slight negative pressure is created by the suction force of each blower), the air with low cleanliness is generated in this space. , Do not leak to the shelf side without passing through the clean air supply unit or to the outside from the joint part of the cover. In addition, by providing a clean air supply unit having a blower on the rear surface of the shelf in a plurality of upper and lower stages, it is possible to eliminate the space for various devices (blowers) under the shelf and to make the whole compact, and at the bottom of the shelf. The position of the storage space can be lowered.

According to the configuration of the second invention described above, the air intake amount adjusting device in the clean air supply unit on the side closer to the air intake port into the space can adjust the opening ratio to a low value, and the intermediate portion can be adjusted. In the clean air supply unit, the opening ratio can be adjusted to the middle, and in the clean air supply unit on the side far from the air intake port, the opening ratio can be adjusted to be high. In this way, by narrowing the suction amount for the clean air supply unit closer to the air intake port, the air sucked into the space from the air intake port by the operation of each blower becomes uniform in the suction section of each clean air supply unit. Sucked.

Moreover, the variation of the air pressure (uneven supply of clean air) with respect to each storage space, which occurs due to the provision of a plurality of blowers, can be corrected by adjusting each air suction amount adjusting device. The clean air can be uniformly supplied from the clean air supply unit toward the shelf.

Further, according to the configuration of the third aspect of the present invention described above, it is possible to adjust the suction amount by selecting and wearing a plurality of types of mesh plates having different aperture ratios.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to FIGS. A clean room 1 is configured such that clean air 3 is blown downward from a ceiling side (or a side wall side) through a filter 2 and the descending clean air 3 is sucked under a floor through a mesh type floor 4. Reference numeral 10 denotes a closed type load storage facility with a clean device. A box-shaped main body outer plate (an example of a cover) 11 has a shelf 14 in which a plurality of storage spaces 13 are vertically formed by a shelf 12 to form a front surface. Are provided in a pair so as to face the passage 15.

These shelves 14 have a front surface facing the passage 15 side,
The opposite rear surface is open, and the rear surface and the main body outer plate
A space 16 is formed between the rear plate portion 11A of 11 and
In this space 16, clean air supply units 20 are provided in five upper and lower stages (a plurality of stages) so as to cover the rear surface of the load storage section 14. Here, two rows of clean air supply units 20 are shown in the lateral direction, but this may be one row or two or more rows.

The body outer plate 11 is the rear plate portion 11 described above.
A, a top plate portion 11B, a side plate portion 11C, a bottom plate portion 11D, and a shelf
Partition plate portion 11E and front plate portion 11F located below 14
And the like, and a part of the cover is formed of an appropriate material of 11A to 11F.

The clean air supply unit 20 has a box-frame-shaped main body 21 having an open front surface, a filter 22 provided to cover the front surface side of the main body 21, and a blower (fan) provided on the rear surface side of the main body 21. It consists of 23 etc. This blower 23
The discharge part 24 faces the filter 22, and the suction part 25 is opened in the space 16.

A loading / unloading device 30 is provided in the passage 15. The loading / unloading device 30 is provided with a vertical support frame 31 provided in the interior of the passage 15, an elevating table 32 interlocked with an elevating device provided in the supporting frame 31, and the elevating table 32. A guide portion (rail) 33 extending over substantially the entire length of the passage 15, a movable base 34 that is supported and guided by the guide portion 33 and is movable along the front surface of the shelf 14, and a loading / unloading unit provided on the movable base 34. Tool 35
It is composed of. The loading / unloading tool 35 is configured to be horizontally retractable by the link mechanism 36.

Air intake ports 17 and 18A are formed in the portion of the top plate portion 11B facing the upper part of the space 16 and the portion of the partition plate portion 11E facing the lower part of the space 16, respectively.
Further, the front plate portion 11F is formed with an air intake port 18B which communicates the passage 15 with the lower portion of the space 16, and an air outlet 19 is formed in a portion of the bottom plate portion 11D which faces the passage 15. ing. Each of the ports 17, 18A, 18B and 19 is formed in a porous shape or a slit shape. Reference numeral 5 indicates a load handled.

In the load storage facility 10 with the clean device,
A carry-in device and a carry-out device are provided for loading and unloading the load 5. There are various types of the loading device and the unloading device. For example, as shown by the phantom line in FIG. 1, the loading device 6 is provided by utilizing a part of the upper storage space 13 on one shelf 14 and the lower level. The carry-out device 7 is provided by utilizing a part of the storage space 13 of FIG. At that time, the carry-in device 6 and the carry-out device 7 have a door body which can be opened and closed, and the outside of the entrance of the carry-in device 6 is, for example, a self-propelled carriage type load carrying means 8
Is provided.

Next, the operation of the above-mentioned first embodiment will be described. In the load storage facility 10 with a clean device, a high degree of cleanliness is always maintained. That is, the air in the space 16 is sucked from the suction unit 25 by the operation of each blower 23, and is then discharged from the discharge unit 24 into the main body 21. This discharged air becomes clean air 37 having a high degree of cleanness through the filter 22 which is opposed, and is supplied to the shelf 14 from the rear surface side.

Therefore, the load 5 stored in each storage space 13 of the shelf 14 is a clean air flowing from the rear surface to the front surface.
High cleanliness is maintained by 37. And shelves 14
The clean air 37 that has passed through flows into the passage 15 and then flows downward, part of which flows out below the floor 4 through the air outlet 19, and most of the rest is due to the operation of the blower 23 group. The generated suction force flows into the space 16 through the air intake ports 18B and 18A and is circulated for use. At that time, part of the clean air 3 from the ceiling side is replenished by flowing into the space 16 through the air intake 17.

When the above-mentioned clean air supply unit 20 is operated, the space 16 is slightly negative pressure due to the suction force of the blowers 23, but it is almost atmospheric pressure.
The air with a low degree of cleanliness in 16 does not leak to the shelf 14 side without passing through the clean air supply unit 20, and does not leak to the outside from the joint portion of the rear plate portion 11A. Spaces for various devices (blowers) are not needed below the shelves 14 and the entire structure can be made compact, and the position of the storage space 13 at the bottom can be lowered.

For example, the load 5 to be loaded and unloaded by the load transport means 8 is received by the loading / unloading device 30 via the loading / unloading device 6. The target storage space 13 is created by the combined operation of the lifting / lowering movement of the lifting / lowering table 32 in the loading / unloading device 30, the movement of the movable table 34, and the transfer / removing movement of the loading / unloading tool 35 (see the solid line and the virtual line in FIG. 2). Be paid in. Further, by reverse operation of the loading / unloading device 30, the target load 5 in the storage space 13 can be unloaded via the loading / unloading device 7.

In the first embodiment described above, most of the clean air 37 that flows into the passage 15 and then flows downward is flowed into the space 16 through the air intake ports 18B and 18A for circulation. However, as in the second embodiment shown in FIG. 3, all may flow out from the air outlet 19 to below the floor 4, and the air may be taken into the space 16 from the air intake 17.

Various structures are adopted as the clean air supply unit 20, and the air intake port 17,
The formation positions of 18A and 18B are arbitrary. That is, in FIG.
In the third embodiment shown in FIG. 5, each clean air supply unit 20 is provided with an air intake amount adjusting device 40 for adjusting the air intake amount from the space 16 side.

Here, the air intake amount adjusting device 40 includes a plurality of types of mesh plates 41A, 41 having different aperture ratios (for example, the number of holes).
The selected mesh plate B, 41C, ... 41N faces the suction portion 25 of the clean air supply unit 20 and is detachably attached to the main body 21 of the clean air supply unit 20. Here, the attachment / detachment is performed with the mesh plates 41A, 41B,
41C ・ ・ ・ Bolt body 42 passed from the outside to the outer edge of 41N
A nut body fixed to the outer periphery of the suction section 25 of the main body 21.
It can be done by screwing into 43.

A punching metal 44 is provided in the discharge portion 24 of the main body 21, and the punching metal 44 faces the shelf 14 side. The outer corner of the main body 21 has an arc surface 45.
Is formed in. Further, an air intake port 46 is formed on the bottom plate portion 11D side.

According to the third embodiment, a mesh plate 41C having a low opening ratio is attached to the lower clean air supply unit 20 near the air intake port 18A into the space 16, and the clean air supply unit 20 in the middle portion is attached. A mesh plate 41A having an intermediate opening ratio is attached to the above, and a mesh plate 41B having a high opening ratio is attached to the clean air supply unit 20 in the upper part far from the air intake port 18A.

As a result, the air sucked into the space 16 from the air intake ports 18B and 18A by the operation of the blowers 23 is narrowed toward the lower part, so that the suction portion of each clean air supply unit 20 is sucked. 25 will be sucked uniformly. Further, in the first and second embodiments, the provision of the plurality of blowers 23 causes variations in the air pressure to the storage spaces 13 (uneven supply of clean air). This can be corrected by adjusting 40, so that clean air 37 can be uniformly supplied from each clean air supply unit 20 toward the shelf 14.

As a result, the clean air 37 can be constantly and evenly supplied to the shelves 14 irrespective of a change in the type of the air intake port or a change in the height of a different scale.

The air is replenished from the clean room 1 side through the air intake port 46 formed in the bottom plate portion 11D as shown by the solid line B in FIG. 4 or in the bottom plate portion 11D as shown by the solid line B in FIG. From the floor 4 side through the air intake port 46, or as shown by the phantom line C in FIG.
It is performed from the clean room 1 side through an air intake port (not shown) formed in A, and further by a combination thereof.

As shown in each of the above-described embodiments, most or all of the clean air 37 flowing into the passage 15 and then flowing downward is discharged from the air outlet 19 to the bottom of the floor 4, and is supplemented to clean room. By using the air on the first side, it is possible to prevent the air from being unnecessarily heated by the operating heat of the blower 23 group and prevent the heat influence on the load 5.

In each of the above embodiments, the loading / unloading device 30 is arranged between the pair of left and right shelves 14, but this is a type in which one shelf 14 and the loading / unloading device 30 are combined, Shelves 14
It may be in the form of only. As the loading / unloading device 30, various types such as a crane type in which the entire device travels and a stationary type in which the device does not move or travel are adopted.
Further, the load storage facility 10 with a clean device is installed in the clean room 1, but it may be installed in a normal room.

In the above-mentioned third embodiment, the air intake amount adjusting device 40 has a plurality of kinds of mesh plates 41A having different aperture ratios,
41B, 41C ... 41N are shown, but in the second aspect of the present invention, a suction portion 25 having a large number of holes is formed on the main body 21 side, and a porous movable plate that is rotatable or slidable with respect to the main body 21 is provided. The air suction amount adjusting device 40 is provided so that the opening area is changed by changing the communication area of both holes by rotating or sliding the plate, the plate can be freely moved toward and away from the suction portion 25, and the gap is changed. Other forms may be adopted, such as the air suction amount adjusting device 40 having a changed opening ratio.

[0037]

According to the first aspect of the present invention having the above structure, since the space is at atmospheric pressure, dirty air that does not pass through the filter may leak to the shelf side or to the outside from the joint portion of the cover. Therefore, it is possible to eliminate the need for a sealing process such as caulking and a special leak prevention structure, and to provide the entire structure at a low cost. In addition, by installing the clean air supply units in upper and lower stages, it is possible to eliminate the space for installing various devices such as blowers above and below the shelf, simplify the overall structure, and reduce the height to make it compact. It is possible to reduce the level of the storage space at the bottom of the shelf and improve space efficiency.

According to the second aspect of the present invention having the above structure, the air suction amount adjusting device is operated to adjust the opening ratio, whereby the air sucked into the space from the air intake port by the operation of each blower is The closer the clean air supply unit is to the air intake port, the more the suction amount can be reduced, and the suction section of each clean air supply unit can be sucked uniformly.
Furthermore, variations in air pressure due to multiple blowers can be corrected by operating the air suction amount adjustment device, so the supply of clean air to the shelves can be performed with different types of air intakes, different heights, etc. Regardless,
Moreover, regardless of the upper or lower part of the shelves, it can be performed uniformly.

Further, according to the third aspect of the present invention having the above-mentioned structure, by selecting and wearing a plurality of types of mesh plates having different aperture ratios, it is possible to easily and inexpensively adjust the throttle amount of the suction amount.

[Brief description of drawings]

FIG. 1 is a partially cutaway front view of a load storage facility with a clean device according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional plan view of the load storage facility with the clean device.

FIG. 3 is a partially cutaway front view of the load storage facility with a clean device according to the second embodiment of the present invention.

FIG. 4 is a partially cutaway front view of the load storage facility with a clean device according to the third embodiment of the present invention.

FIG. 5 is a partially cutaway front view of the clean air supply unit portion.

[Explanation of symbols]

 1 Clean room 10 Load storage facility with clean device 11 Main body outer plate (cover) 12 Shelf plate 13 Storage space 14 Shelf 15 Passage 16 Space 17 Air intake 18A Air intake 18B Air intake 19 Air outlet 20 Clean air supply unit 21 Main unit 22 Filter 23 Blower 24 Discharge part 25 Suction part 30 Loading / unloading device 37 Clean air 40 Air intake amount adjusting device 41A Mesh plate 41B Mesh plate 41C Mesh plate 46 Air intake port

Claims (3)

[Claims] 1. A shelf having a plurality of storage spaces in the vertical direction is provided, the shelf is opened at the front side, and the rear side is closed by a cover with a space, and a blower and a filter are provided in the space. A load storage facility with a clean device, characterized in that multiple clean air supply units are installed in upper and lower stages and an air intake port is provided on the cover side. 2. The load storage facility with a clean device according to claim 1, wherein each clean air supply unit is provided with an air intake amount adjusting device for adjusting an air intake amount from the space side. 3. The air intake amount adjusting device is composed of a plurality of types of mesh plates having different aperture ratios, and one selected mesh plate is opposed to a suction part of a clean air supply unit,
The load storage facility with a clean device according to claim 2, wherein the clean air supply unit is detachably attached to the main body.