JPH06331534A - Measuring apparatus of mechanical characteristic of thin film - Google Patents

Abstract

PURPOSE:To eliminate an influence due to the electromagnetic waves, of an apparatus at the circumference, which cause the noise of an AE signal when the contact force and the adhesion force of a thin film are measured. CONSTITUTION:All measuring parts 1 to 8 in a measuring apparatus are covered with a cover 7 which is composed of a conductive magnetic substance, e.g. iron or ferrite. Thereby, it is possible to prevent an indenter 4 detecting an AE signal due to the breakdown of a thin film from being affected by the electromagnetic waves of a personal computer 10 and of a CRT display 11 at the circumference and by the electromagnetic waves of an adjacent apparatus as noises.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film mechanical property measuring device, and more particularly to a device for measuring adhesion or adhesion.

[0002]

2. Description of the Related Art A conventional thin film mechanical property measuring apparatus is shown in FIG.
As shown in FIG. 2, a load transducer 3 provided with a tilting mechanism 2 which is located below the test piece 1 and tilts the test piece 1 is used. The test piece 1 is located at the upper position and is deformed by being pushed into it.
Indenter 4 which also functions as a detector for detecting acoustic emission (AE) due to cracks generated inside
And a driver 5 for driving the indenter 4 in the vertical direction, and a driver 5
And a displacement gauge 6 that measures the amount of pushing of the indenter 4 in conjunction with. (See, for example, JP-A 64-31036).

Next, the operation of the conventional device will be described. A test piece 1 in which a thin film is coated on a substrate is a tilting mechanism 2 placed on a sample pan of an electronic balance used as a load converter 3.
It is on the top of. PZT with a spherical tip
(Lead zirconate titanate piezoelectric ceramic) AE converter,
Alternatively, an indenter 4 made of a PZT-AE transducer, whose tip is processed by ruby, ceramic, cemented carbide, etc. and bonded, is attached to the tip of a piezoelectric actuator that is a driver 5, and pushes and deforms the test piece 1. At the same time, the AE signal associated with the destruction inside the substrate or the thin film or at the interface between the substrate and the thin film is detected. The displacement meter 6 attached to the indenter 4 uses a light intensity type displacement meter, and measures the amount of pushing of the indenter 4 with respect to the test piece 1. The peeling of the film is detected by measuring the number and amplitude of AE signals generated, and the adhesive force is obtained from the pushing load and the pushing depth at that time.

[0004]

In this conventional thin film mechanical property measuring apparatus, a personal computer 10 and a CRT display 11 are provided for automatic control of the measuring operation.
However, there is a problem in that the AE signal detected by the indenter is mixed with noise due to the electromagnetic waves of these peripheral devices and the AE signal generated by the peeling phenomenon cannot be accurately measured. In addition, the electromagnetic waves generated from equipment outside the device vibrates the metal such as iron inside and also mixes in the AE signal for detecting the peeling phenomenon, so that the peeling phenomenon cannot be accurately detected. There was a point.

[0005]

Means for Solving the Problems A thin film mechanical property measuring apparatus according to the present invention uses a test piece having a thin film formed on a substrate, and has a tilting mechanism which is located below the test piece and tilts the test piece. A load transducer equipped with the indenter, which is located above the test piece and applies deformation to the test piece at the same time as a detector that detects the propagation state of cracks generated inside the test piece, and the indenter in the vertical direction. A cover made of a conductive magnetic material that covers all of the above-mentioned test piece, tilting mechanism, load converter, indenter, driver and displacement gauge, and the drive unit to be driven, the displacement gauge to measure the pushing amount of the indenter. It has and.

[0006]

[Function] By covering the entire measuring section consisting of the test piece, tilting mechanism, load converter, indenter, driver and displacement gauge with the conductive / magnetic material cover, electromagnetic waves from the outer peripheral part are shielded and the indenter It is possible to prevent noise from being mixed in the AE signal detected by.

[0007]

Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a configuration diagram showing the configuration of an embodiment of the present invention.

In the figure, 1 is a test piece in which a thin film is formed on a substrate, 2 is a tilting mechanism for mounting the test piece 1 and tilting, 3 is a load converter on which the tilting mechanism 2 is mounted, and an electronic balance. It is composed of. 4 is a PZ with a spherical tip
T-AE converter or ruby only tip, ceramic,
It is an indenter made of a PZT-AE converter which is processed by cemented carbide and adhered. Reference numeral 5 is a driver for moving the block 8 to which the indenter 4 is attached in the vertical direction, and 6 is a light intensity type displacement gauge attached to the block 8 for measuring the amount of pushing of the indenter 4 with respect to the test piece 1. Reference numeral 7 denotes a shield cover which is attached to a separate body made of a magnetic material having conductivity or a vibration isolation table so as to be able to rise and fall freely, and includes a test piece 1, a tilt mechanism 2, a load converter 3, an indenter 4, a driver 5 and a displacement meter. It covers the entire measuring section consisting of 6. Reference numeral 10 is a personal computer for automating the measurement operation of the mechanical properties of the thin film, and 11 is a CRT display for displaying measurement data and the like.

A test piece 1 having a substrate coated with a thin film is placed on a tilting mechanism 2 of a sample pan of an electronic balance used as a load converter 3. P with a spherical tip
An indenter 4 made of a ZT-AE converter or a PZT-AE converter having only the tip processed by ruby, ceramic, cemented carbide or the like and adhered is attached to a block 8, and the block 8 is a driver 5 of a piezoelectric actuator. It is attached to the tip. The indenter 4 presses the test piece 1 to deform it, and at the same time, detects an AE signal due to destruction at the inside of the substrate or the thin film or the interface between the substrate and the thin film. The displacement meter 6 attached to the block 8 uses a light intensity type displacement meter and measures the amount of pushing of the indenter 4 with respect to the test piece 1. These measurement operations are automatically controlled by the computer 10, and the measurement results and the like are displayed on the display 11.

By the way, the control of the driver 5 and the load converter 3
The electromagnetic waves of the personal computer and CRT display used for processing the measured values of the displacement meter 6 and the electromagnetic waves generated by the adjacent equipment can be iron or ferrite, which is a conductive magnetic material that covers the entire measurement unit. The cover 7 prevents the metal inside the measuring device from vibrating, and prevents noise from being added to the AE signal detected by the AE converter that is the indenter 4.

[0011]

As described above, the present invention is provided with the cover of iron or ferrite, which is a conductive magnetic material that covers the entire measuring portion, so that the electromagnetic waves of the personal computer and the CRT display and the adjacent equipment are generated. It is possible to prevent the metal inside the measuring device from vibrating due to the electromagnetic wave and to prevent the AE signal of the AE converter, which is the indenter, from giving noise.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a configuration of an embodiment of the present invention.

FIG. 2 is a configuration diagram showing a configuration of an example of a conventional thin film mechanical property measuring apparatus.

[Explanation of symbols]

 1 Test piece 2 Tilt mechanism 3 Load converter 4 Indenter 5 Driver 6 Displacement meter 7 Shield cover 8 Block 9 Displacement meter display section 10 Personal computer 11 CRT display 12 Vibration isolation table

Claims (1)

[Claims] 1. A load transducer, which uses a test piece having a thin film formed on a substrate, is provided below the test piece, and has a tilting mechanism for tilting the test piece, and above the test piece. The indenter also acts as a detector that detects the propagation state of cracks that occur inside the test piece at the same time that the test piece is pressed and deformed, a driver that drives the indenter in the vertical direction, and the indentation of the indenter. A displacement meter that measures the amount,
Mechanical characteristics of a thin film, characterized in that it has a cover made of a magnetic material having conductivity, which covers all of the test piece, the tilting mechanism, the load converter, the indenter, the driver and the displacement meter. measuring device.