JPH0624710A - Ozone generator - Google Patents

Abstract

PURPOSE:To prevent dew condensation in a discharge body, etc., and prevent the discharge body, etc., from causing abnormal discharge in an ozone generator cooling the discharge body, etc., generating ozone by discharging at high voltage. CONSTITUTION:In an ozone generator 1 housing a discharge body 10 for generating ozone by discharge, an electric source 12 applying alternating current high voltage to the discharge body and a cooling part 11, etc., for cooling the discharge body 10 and/or electron source 12 in one housing 2, a dehumidifier 15 for outside air is provided in an outside air suction port 14 for ventilation. A cooling liquid passage of the outside air dehumidifier 15 is provided on upstream side of the cooling part 11 for the discharge body 10, etc., to keep the interior of the device in drying atmosphere. A dehumidifier 6 is provided in the outlet of a compressor 5 for introducing a raw material gas and simultaneously a discharge port 24 of a discharge gas piping 23 of an oxygen enriching device or heatless drier 8 passing the dehumidified raw material gas through is provided in the device.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone generator having a power supply for applying a high AC voltage to a discharge body and generating ozone by discharge inside the discharge body, and particularly to the discharge body and / or the power supply. The present invention relates to an ozone generator for cooling an ozone generator, which prevents condensation on a cooling part such as a discharge body and / or equipment attached thereto.

[0002]

2. Description of the Related Art Conventionally, ozone generators have been used for various purposes, for example, water treatment-related products,
In particular, it is widely used for sterilizing pool water. Ozone generators used for such applications generally include a discharge body that discharges oxygen through an oxygen-containing gas such as air to generate ozone, a power supply that applies an AC high voltage to the discharge body, and an accessory to these. In order to put the whole together, it is housed in a single housing and built in. An oxygen enricher or a heatless dryer is usually provided for supplying the raw material gas to the discharge body.

When oxygen is used as the oxygen-containing gas of the raw material gas, it is usually supplied from an oxygen cylinder. In this case, the oxygen gas may be sent to the discharge body after passing through the heatless dryer to remove water. . When air is used as the raw material gas, unlike the case of oxygen gas, the oxygen concentration is low, so the ozone generation efficiency is low.Therefore, when it is desired to increase ozone generation efficiency, nitrogen components in the air are selectively adsorbed. The air is passed through an oxygen enricher having an adsorbent to be supplied to the discharge body as oxygen-enriched air having a high oxygen concentration. At that time, moisture in the air is removed by the oxygen enricher. If the ozone generation efficiency may be low, the air is passed through a heatless dryer to remove moisture from the air and then sent to the discharge body.

As described above, the source gas supply source is usually placed outside when the source gas is oxygen, and is taken in from the surroundings when the source gas is air, and is usually processed by the built-in equipment. The processing equipment may be external. Further, in this apparatus, a compressor is provided in order to send the raw material gas to the oxygen enricher or the heatless dryer.

Further, in the conventional device, heat is generated inside the housing of the device, and a small amount of different gas is generated due to high voltage.
The housing is provided with an intake port and an exhaust port, and a fan is attached to one or both of them to improve ventilation efficiency. In addition, the discharge body used in this device is discharged at a high voltage, and since the discharge efficiency is generally low, heat is generated, and the electrodes are easily damaged by it. Cooling is done through. In that case, the cooling liquid was introduced from the outside of the ozone generator by the cold heat source flow path pipe, and the discharge body was cooled and then discharged to the outside of the device. The cooling of the discharge body may be performed not only for removing heat but also for lowering the discharge body temperature below the ambient temperature in order to improve efficiency. Further, the power supply may be cooled if necessary.

An ozone generator of this type will be described with reference to FIG. 6. Air 4 is sucked by a compressor 5 from an intake port 3 provided in a housing, the air is sent to an oxygen enricher 8, and the oxygen enricher is supplied. At 8, the nitrogen gas and water are adsorbed and discarded, and the dry oxygen-enriched air 9 enriched with oxygen is sent to the discharge body 10 as a raw material gas. When a heatless dryer is used instead of the oxygen enricher 8, moisture is adsorbed and discarded along with excess air, and dry air is supplied to the discharge body 10 as a raw material gas. Power source 1 for discharge body 10
An AC high voltage is applied from 2 to generate ozone due to discharge, and the ozone is led to a use point outside the apparatus through the ozone outlet pipe line 13.

At this time, the nitrogen gas and moisture adsorbed and discarded there, or the unused gas such as discarded moisture and excess air, which come out of the oxygen enricher or the heatless dryer, are exhaust gas passage pipes. Exhaust port 2 through 23
4 is discharged out of the apparatus.

[0008]

In the conventional ozone generator, a cooling portion is provided, for example, on the outer periphery of the ozone generator in order to cool the discharge body as described above. Of air (outside air) may cause dew condensation on or near the cooled part of the discharge body due to the temperature difference from the surroundings and the humidity of the surrounding air. There is a problem that it may cause an abnormal discharge of the body or a short circuit of the electrodes, which may cause a device failure or an accident.

Therefore, in the ozone generator, it is required to prevent dew condensation in the discharge body when the inside of the casing of the device can be ventilated. It is an object of the present invention to provide an ozone generator integrated in such a housing, in which condensation is not generated in the discharge body or the like which has been a problem in the past. Is.

Further, in the present invention, in order to prevent the formation of dew condensation on or near the discharge body, it is possible to prevent dew condensation from occurring without newly installing special equipment. It is intended to provide a generator.

[0011]

The present invention focuses on the fact that a dry atmosphere can be created inside the apparatus for the above-mentioned purpose, and as a measure therefor, the conventional apparatus is not complicated. The system can be implemented with some additions and improvements to the device. That is, the present invention was able to achieve the above object well by the following means. (1) A discharge body that internally generates ozone by electric discharge,
An ozone generator in which a power supply for applying an AC high voltage to the discharge body, a liquid cooling system for cooling the discharge body and / or the power supply, and equipment attached to these are housed in a single housing. An outside air dehumidifier consisting of a gas / liquid heat exchange heat exchanger is installed in the outside air intake port provided for ventilation of, and a cooling liquid is supplied to the liquid cooling system as a cold heat source of the outside air dehumidifier, An ozone generator, wherein a cooling liquid outlet of the outside air dehumidifier is connected to an inlet of a liquid cooling system for cooling the discharge body and / or the power source. (2) Discharge body that internally generates ozone by electric discharge,
In an ozone generator in which a power supply for applying an AC high voltage to the discharge body, a liquid cooling system for cooling the discharge body and / or the power supply, and equipment attached to these are housed in one housing, external air is introduced. Then, a compressor for adiabatic compression is provided, a dehumidifier for cooling and dehumidifying the compressed air is installed at the compressed air outlet of the compressor, and an oxygen enricher or a heatless dryer is connected after the dehumidifier.
At least a part of the dehumidified air is sent to the discharge body through an oxygen enricher or a heatless dryer, and a dry gas discarded from the oxygen enricher or the heatless dryer is released inside the casing. An ozone generator characterized in that it is provided with a pipe line. (3) The gas discharge port of the conduit for discharging the dried gas discarded from the oxygen enricher or the heatless dryer to the inside of the casing has a direct surface facing the discharge body and / or the power source. The ozone generator according to the above item (2), wherein the ozone generator is provided as follows. (4) An outside air intake port is provided in the housing for ventilation inside the ozone generator, and an outside air dehumidifier including a gas-liquid heat exchange heat exchanger is installed at the outside air intake port, The cooling liquid is supplied as a cold heat source of the dehumidifier, and the cooling liquid outlet of the outside air dehumidifier is connected to the inlet of a liquid cooling system that cools the discharge body and / or the power source. Ozone generator. (5) The gas discharge port of the pipe for discharging the dried gas discarded from the oxygen enricher or the heatless dryer into the inside of the casing has a direct surface facing the discharge body and / or the power source. The ozone generator according to the above item (4), which is provided so that

In one form of the present invention, an outside air intake port is provided in the housing of the ozone generator for ventilation inside the ozone generator, and the outside air intake port is connected to the heat exchanger of the gas-liquid heat exchanger. The external air dehumidifier is installed, a cooling liquid is supplied as a cold heat source of the external air dehumidifier, and the cooling liquid outlet of the external air dehumidifier is connected to the inlet of a liquid cooling system that cools the discharge body and / or the power supply. Thus, a conventional cooling system such as an electric discharge body can be used to create a dry atmosphere inside the device.

As this outside air dehumidifier, a normal dehumidifier can be used, and a normal means for lowering the relative humidity by slightly raising the temperature after dehumidifying the air may be adopted. The cooling liquid used as the cold heat source may be a conventionally known one, and cooling water is generally used, but a cooling medium other than that may be used. By using this outside air dehumidifier, the discharge body and / or
Alternatively, dew condensation on the surface of the power source can be prevented.

According to another aspect of the present invention, a compressor for introducing external air to perform adiabatic compression is provided, and a dehumidifier for cooling / dehumidifying the compressed air is installed at the compressed air outlet of the compressor. Oxygen enricher or heatless dryer is connected after the dehumidifier, and at least a part of the dehumidified air is sent to the discharge body through the oxygen enricher or heatless dryer, from the oxygen enricher or heatless dryer. A pipe is provided for discharging the dried gas to be discarded into the inside of the casing.

In this type, the air sent to the oxygen enricher or the heatless dryer is sufficiently dried because the moisture is removed by the dehumidifier after the compressor, so that the oxygen enricher or the heat is dried. Nitrogen gas or excess air discarded from the Les Dryer, even if it comes out together with the moisture that is discharged together, has a much lower moisture content than the external air that comes in for ventilation as a whole. By discharging it inside the device, it is possible to prevent dew condensation on the discharge body and / or the power supply.

In this case, when ventilation is insufficient with only the amount of gas released inside, the first type may be used together. The above-mentioned outside air dehumidifier is used, but the amount of introduced outside air therein can be considerably reduced. As the discharge body used in the present invention, any conventionally known discharge body that generates various ozone can be used. As a structure for cooling the discharge body, any structure that is already known can be adopted.

The oxygen enricher or heatless dryer used in this apparatus may be of any known type or structure. Specific configurations of the present invention will be described in more detail in Examples.

[0018]

In one form of the present invention, an outside air dehumidifier consisting of a gas-liquid heat exchange heat exchanger is installed at the outside air intake port, and a cooling liquid is supplied as a cold heat source of the outside air dehumidifier to remove the outside air dehumidifier. By connecting the cooling liquid outlet of the vessel to the inlet of the liquid cooling system for cooling the discharge body and / or the power source, the inside of the apparatus can be made a dry atmosphere by using the cooling system such as the conventional discharge body.

Further, in another form of the present invention, the air sent to the oxygen enricher or the heatless dryer is sufficiently dried because the moisture is removed by the dehumidifier after the compressor. Nitrogen gas discarded from the oxygen enricher or heatless dryer, or excess air, even if it comes out together with the moisture discharged together, is much less moisture than the external air that comes in for ventilation as a whole, By discharging this to the inside of the device instead of external air, it is possible to prevent dew condensation on the discharge body and the like. In this case, the first type can be used together when this amount of released gas is not sufficient to provide ventilation inside the device.

[0020]

EXAMPLES The present invention will be specifically described below with reference to examples, but the present invention is not limited to these examples. Embodiment 1 An ozone generator 1 shown in FIG. 1 which is an example of the present invention has a basic configuration in common with the conventional ozone generator of FIG. 6, and an intake air for introducing outside air of a housing 2 is introduced. Air 4 is sucked from a port 3 by a compressor 5, and the air compressed therein is cooled by a dehumidifier 6 which is air-cooled by a fan 7 and dehumidified and enters an oxygen enricher 8. The oxygen enricher 8 contains an adsorbent that adsorbs nitrogen and water, and the oxygen-enriched air 9 discharged therefrom enters a discharge body 10 equipped with a cooling unit 11, where an AC high voltage from a power source 12 is applied. Ozone is generated by the discharge by and is sent to the point of use through the ozone outlet passage pipe 13.

Further, an outside air dehumidifier 15 composed of a gas-liquid heat exchange heat exchanger is provided inside an outside air intake port 14 provided with a fan for ventilation of the housing 2, and a cooling liquid passage pipe 16 is connected thereto. Then, cooling water is supplied to allow dehumidified air to enter the inside of the device. This prevents condensation on the discharge body 10. From the outside air dehumidifier 15 to the cooling liquid passage pipe 17, the discharge body 1
The cooling water that has flowed out of the outside air dehumidifier 15 is connected to the cooling unit 11 of 0 and is sent to the cooling unit 11. The cooling water discharged from the cooling unit 11 flows out of the housing 2 through the cooling liquid passage pipe 18. At that time, the drain water removed from the gas by the dehumidifier 6 and the outside air dehumidifier 15 is joined to the cooling liquid passage pipe 18 by the drain water drainage pipes 19 and 20, respectively.

Air inside the apparatus is exhausted from exhaust ports 21 and 22 provided in the housing 2. Then, the nitrogen gas and the water separated in the oxygen enricher 8 are exhausted from the exhaust gas passage pipe 2
It is released from the outside. In this device, the outside air dehumidifier 15 is first cooled by cooling water by cooling the outside air dehumidifier 15 in the vicinity of the minimum temperature of the cooling liquid in consideration of the temperature rise in the flowing down / cooling process of the cooling liquid. , Outside air dehumidifier 15
The effect of the above is increased, the gas entering the apparatus is made as dry as possible, the outside air dehumidifier 15 is cooled, and the discharge body 10 is cooled by a cooling liquid having a slightly raised liquid temperature. This is to reduce the temperature difference between the above and the surroundings and prevent condensation of the discharge body. Example 2 An ozone generator 1 shown in FIG. 2, which is another example of the present invention.
Relates to a type in which dry exhaust gas or excess gas from an oxygen enricher or a heatless dryer is discharged inside the apparatus.

In this device, the intake port 3 of the compressor 5 is discharged to the outside of the device so as to be sucked from the outside of the device, the adiabatic compressed air is cooled and dehumidified at the outlet of the compressor 5, and the moisture is discharged to the outside of the system. The dehumidifier 6 is provided, and the exhaust port 24 of the exhaust gas passage pipe 23 of the oxygen enricher 8 is installed in the device to exhaust the gas into the device. The gas discharged from the exhaust port is supplied to the oxygen enricher 8 after being compressed by the compressor 5 and then cooled and dehumidified by the dehumidifier 6, so that the moisture adsorbed from the oxygen enricher 8 is absorbed. When it is discarded together with it, it is a gas that is drier than the outside air, so it has a low water content. By exposing it to the inside of the device, a dry atmosphere can be created inside the device, and dew condensation on the surface of the discharge body can be prevented.

The dehumidifier 6 may be cooled by either air cooling or water cooling. In the case of air cooling, a cooling fan is attached close to the dehumidifier 6. In the case of water cooling, it may be incorporated in a cooling system that passes through the cooling unit 11 of the discharge body 10 to cool it in series with the discharge body 10, or may be separately cooled by separately providing a cold heat source pipe. The dehumidifier 6 at the outlet of the compressor 5 is connected to the discharge body 10
When the dehumidifier 6 is installed in the cooling liquid passage pipe 25, the dehumidifier 6 is installed upstream of the discharge body 10 and is cooled before the discharge body 10. The water removed from the gas by the dehumidifier 6 is discharged to the outside of the device by the drain water drainage pipe 19.

In FIG. 2, the oxygen enricher 8 and the compressor 5 are shown.
Although the dehumidifier 6 and the dehumidifier 6 are built in the housing 2, some or all of them may be placed outside, and the intake of the air introduced into the compressor 5 is performed outside the ozone generator, and the oxygen enricher is used. 8 exhaust ports are installed inside the ozone generator,
The dry exhaust gas may be released inside the device. A heatless dryer may be used instead of the oxygen enricher. Example 3 An ozone generator 1 shown in FIG. 3, which is another example of the present invention.
2, the intake port 3 of the compressor 5 was taken outside the ozone generator, the dehumidifier 6 was installed at the outlet of the compressor 5, and the exhaust port of the oxygen enricher 8 was installed inside the device. Although, in the example of FIG. 2, the exhaust port is simply installed in the apparatus, the exhaust port 24 is installed in the apparatus of this example.
Discharge body 10 and power source 1 for which a and 24b are desired to prevent condensation
It is installed so as to face No. 2 so that the discharged dry exhaust gas is directly sprayed on the dew condensation prevention target.

As a result, the effect of preventing dew condensation on the target object (the discharge body 10 and the power source 12) for which dew condensation is particularly desired is enhanced. The exhaust port of the oxygen enricher 8 may be installed in a branched manner as shown in FIG. 3 depending on the number, position, shape, and size of the target object, but since the effect of blowing gas decreases as the number of branches increases. , It must be installed within a range where a sufficient spraying effect can be obtained. A heatless dryer may be used instead of the oxygen enricher. Example 4 The ozone generator 1 shown in FIG. 4 has the outside air dehumidifier 1 at the outside air intake port 14 to the inside of the device for ventilation as in the case of the device shown in FIG.
5 is attached to cool and dehumidify the air entering the device.
While making the inside of the apparatus a dry atmosphere, the exhaust port 24 of the oxygen enricher 8, which is the means shown in FIG. 2, is installed inside the apparatus,
By adopting a configuration in which the dry exhaust gas is discharged into the device, the degree of dryness in the device is further increased and dew condensation is prevented.

The path of the cold heat source is similar to that of FIG. 1, and by cooling the outside air dehumidifier 15 before the discharge body 10,
The effect of preventing dew condensation on the discharge body 10 is enhanced.
Further, the dehumidifier 6 attached to the outlet of the compressor 5 may also be incorporated in the cooling liquid passage pipe for cooling, and in that case, the dehumidifier 6 is incorporated upstream of the discharge body 10. Either the outside air dehumidifier 15 at the intake port for ventilation of the ozone generator or the dehumidifier 6 at the compressor 5 outlet may be cooled first. The moisture removed from the gas by the outside air dehumidifier 15 and the dehumidifier 6 enters the cooling liquid passage pipe 18 by the drain water drainage pipes 20 and 19, respectively, and is discharged outside the apparatus. Example 5 In the ozone generator 1 shown in FIG. 5, the device of FIG. 4 is modified so that the exhaust ports 24a and 24b of the oxygen enricher 8 are directed to the discharge body 10 and the power source 12 as in the case of FIG. Further, they are installed close to each other so that the dry exhaust gas discharged from the oxygen enricher 8 directly blows on the discharge body 10 and the power supply 12.

In this example, the degree of dryness in the apparatus is increased to prevent dew condensation, and in particular, it is possible to prevent dew condensation mainly on the discharge body 10 and the power source 12 which are objects to be prevented from dew condensation. Also in this apparatus, a heatless dryer may be used instead of the oxygen enricher.

[0029]

According to the present invention, by attaching the outside air dehumidifier to the outside air intake port for ventilation of the ozone generator,
By cooling and dehumidifying the gas such as air entering the device, it was possible to prevent dew condensation of the discharge body and the like due to the temperature difference between the cooled discharge body and the surrounding gas and the humidity of the surrounding gas.

Further, the cooling of the dehumidifier is incorporated into the cooling liquid passage pipe of the discharge body, and the dehumidifier is installed upstream of the cooling liquid passage pipe to cool the discharge body before the discharge body. As a result, the effect of preventing dew condensation could be further enhanced. This allows the outside air dehumidifier to be cooled in advance by cooling the outside air dehumidifier in consideration of the increase in the temperature of the cooling liquid in the cooling liquid passage pipe, thereby making it possible to cool the outside air dehumidifier with the cooling liquid at the lowest temperature. The effect of removing the humidity of the surrounding gas, which is one of the causes of dew condensation, can be enhanced, and by cooling the discharge body with the cooling liquid whose liquid temperature has risen slightly downstream of the cooling liquid flow path, the dew condensation This is because the temperature difference between the discharge body and the ambient gas, which is one of the causes, can be reduced. By using the outdoor air dehumidifier as a cooling path first, fluctuations in the liquid temperature of the cooling liquid supplied to the discharge body can be mitigated, so the ozone generation performance that is affected by the fluctuations in the liquid temperature must be stabilized. You can

Further, according to the present invention, a dehumidifier is provided at the outlet of the compressor for introducing air, and by dehumidifying the dehumidifier, dry air is supplied to the oxygen enricher or heatless dryer. The gas discharged from the chemical converter or the heatless dryer could be made dryer than before. By discharging this dry waste gas into the inside of the device, the inside of the device could be exposed to the dry gas, and it was possible to prevent dew condensation on the cooled discharge body or the like.

At this time, by installing an exhaust port so that the dry waste gas is directly blown to the discharge body and / or the power source, these can be cooled under dry conditions, and the condensation of the discharge body and / or the power source can be condensed. We were able to prevent it. In the embodiment, the exhaust port is installed close to the discharge body and the power source, but by adjusting the direction of the exhaust port and the distance to the object, it is not limited to the discharge body and the power source, and especially to prevent condensation. It can be used as an effective measure for preventing dew condensation on an arbitrary object in the device regardless of whether it is singular or plural.

Further, not only the above effects can be used individually, but also by combining the methods described in the above embodiments, a synergistic effect can be obtained and more effective dew condensation can be prevented.

[Brief description of drawings]

FIG. 1 is a schematic diagram of an ozone generator of a type in which an outside air dehumidifier is provided at an outside air intake port according to a first embodiment of the present invention.

FIG. 2 is a schematic diagram of an ozone generator of a type in which an exhaust port of an exhaust gas passage pipe from an oxygen enricher according to a second embodiment of the present invention is provided inside the device.

FIG. 3 is a schematic diagram of an ozone generator of the type of the apparatus of FIG. 2 modified so that an exhaust port of the exhaust gas passage pipe is provided near a discharge body and a power source.

FIG. 4 is a schematic view of an ozone generator of a type in which the apparatus of FIG. 1 is provided with an exhaust port of an exhaust gas passage pipe from an oxygen enricher inside the apparatus.

5 is a schematic view of an ozone generator of the type of the device of FIG. 4 modified so that an exhaust port of an exhaust gas passage pipe is provided near a discharge body and a power source.

FIG. 6 shows a schematic diagram of a conventional ozone generator.

[Explanation of symbols]

 1 Ozone Generator 2 Housing 3 Inlet 4 Air 5 Compressor 6 Dehumidifier 7 Fan 8 Oxygen Enricher 9 Oxygen Enriched Air 10 Discharger 11 Cooling Unit 12 Power Supply 13 Ozone Outlet Pipe 14 Outside Air Intake Port 15 Outside Air Dehumidifier 16 Cooling liquid channel pipe 17 Cooling liquid channel pipe 18 Cooling liquid channel pipe 19 Drain water drainage channel pipe 20 Drain water drainage channel pipe 21 Exhaust port 22 Exhaust port 23 Exhaust gas channel pipe 24 Exhaust port 24a Exhaust port 24b Exhaust port 25 Coolant liquid Pipe

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Ryoichi Shinso 4-2-1 Motofujisawa, Fujisawa City, Kanagawa Prefecture EBARA Research Institute

Claims (5)

[Claims] 1. A discharge body for internally generating ozone by electric discharge, a power supply for applying an AC high voltage to the discharge body, a liquid cooling system for cooling the discharge body and / or the power supply, and equipment attached thereto. In an ozone generator housed in one housing, an outside air dehumidifier consisting of a gas-liquid heat exchange heat exchanger is installed at an outside air intake port provided for ventilation inside the ozone generator, and the outside air dehumidifier is installed. A cooling liquid is supplied to the liquid cooling system as a cold heat source of the ozone generator, and the cooling liquid outlet of the outside air dehumidifier is connected to the inlet of the liquid cooling system for cooling the discharge body and / or the power source. apparatus. 2. A discharge body for internally generating ozone by electric discharge, a power supply for applying an AC high voltage to the discharge body, a liquid cooling system for cooling the discharge body and / or the power supply, and equipment attached thereto. In an ozone generator housed in one housing, a compressor for introducing external air to perform adiabatic compression is provided, and a dehumidifier for cooling / dehumidifying the compressed air is installed at the compressed air outlet of the compressor, After that, an oxygen enricher or heatless dryer is connected, and at least a part of the dehumidified air is sent to the discharge body through the oxygen enricher or heatless dryer, and is discarded from the oxygen enricher or heatless dryer. An ozone generator, wherein a pipe line for discharging the dried gas to the inside of the casing is provided. 3. A gas discharge port of a conduit for discharging the dried gas discarded from the oxygen enricher or the heatless dryer to the inside of the casing is provided in the discharge body and / or the power source. The ozone generator according to claim 2, wherein the ozone generator is provided so as to directly face the ozone generator. 4. An outside air intake port is provided in the housing for ventilation inside the ozone generator, and an outside air dehumidifier including a gas-liquid heat exchange heat exchanger is installed at the outside air intake port. A cooling liquid is supplied as a cold heat source of the outside air dehumidifier, and a cooling liquid outlet of the outside air dehumidifier is connected to an inlet of a liquid cooling system for cooling the discharge body and / or the power supply. Ozone generator. 5. A gas discharge port of a pipe for discharging a dry gas discarded from the oxygen enricher or the heatless dryer into the inside of the casing, is provided in a part of the discharge body and / or the power supply. The ozone generator according to claim 4, wherein the ozone generator is provided so as to directly face the ozone generator.