JPH06242076A - Electromagnetic flaw detecting equipment - Google Patents

Electromagnetic flaw detecting equipment

Info

Publication number
JPH06242076A
JPH06242076A JP5023898A JP2389893A JPH06242076A JP H06242076 A JPH06242076 A JP H06242076A JP 5023898 A JP5023898 A JP 5023898A JP 2389893 A JP2389893 A JP 2389893A JP H06242076 A JPH06242076 A JP H06242076A
Authority
JP
Japan
Prior art keywords
eddy current
magnetic field
defect
inspected
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5023898A
Other languages
Japanese (ja)
Inventor
Satoshi Nagai
敏 長井
Ichiro Furumura
一朗 古村
Taiji Hirasawa
泰治 平澤
Chie Nakayama
智恵 中山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP5023898A priority Critical patent/JPH06242076A/en
Publication of JPH06242076A publication Critical patent/JPH06242076A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)

Abstract

PURPOSE:To prevent fluctuation of impedance of an exciting coil to be built in a probe for detecting variation of eddy current being induced in an object to be inspected by applying magnetic field. CONSTITUTION:The electromagnetic flaw detecting equipment comprises a probe 1 for detecting the variation of eddy current being induced in an object 5 to be inspected by applying magnetic field thereto, a section 3 for detecting a flaw on the object 5 based on an output from the probe 1, and a section 4 for displaying/recording a signal received from the detecting section 3, wherein the probe 1 comprises an exciting coil for applying a vertical field to the object 5 to induce eddy current, and a magnetic sensor for detecting a secondary field induced by the eddy current.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、材料の非破壊検査装置
に係り、特に表面近傍の欠陥探傷に好適な電磁気探傷装
置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a nondestructive inspection apparatus for materials, and more particularly to an electromagnetic flaw detection apparatus suitable for flaw detection near the surface.

【0002】[0002]

【従来の技術】従来の渦電流法による欠陥探傷法では、
例えば渦流探傷試験A(日本非破壊検査協会編、1977
年)に示されるように、交流電流を流した検出コイルを
被検査体に近接させ、被検査体に渦電流を発生させる
と、欠陥あるいは材質の不連続部において渦電流が変化
して前記検出コイルのインピーダンスが増減することか
ら、このコイルのインピーダンス変化で測定することで
被検査体の欠陥探傷を行っていた。
2. Description of the Related Art In the conventional flaw detection method using the eddy current method,
For example, Eddy Current Testing A (edited by Japan Nondestructive Inspection Society, 1977)
As shown in (1), when a detection coil in which an alternating current is passed is brought close to the object to be inspected and an eddy current is generated in the object to be inspected, the eddy current changes at a defect or discontinuity of material, and the detection is performed. Since the impedance of the coil increases or decreases, the flaw detection of the inspection object is performed by measuring the impedance change of the coil.

【0003】[0003]

【発明が解決しようとする課題】上記従来技術では、検
出コイルのインピーダンス変化を測定して被検査体の欠
陥の有無及び大きさ等について判定していたが、この検
出コイルのインピーダンス変化は欠陥に限らず材質変化
及び検出コイルと被検査体との位置関係によっても大き
く変化する。特に強磁性体の材料では局部的な金属組織
の不均一さによってことごとく検出コイルのインピーダ
ンスが変化してしまうために、目的とする欠陥の信号の
判定を困難にしていた。
In the above-mentioned prior art, the impedance change of the detection coil was measured to determine the presence or absence of a defect and the size of the object to be inspected. Not limited to this, the material changes greatly and the positional relationship between the detection coil and the object to be inspected greatly changes. In particular, in the case of a ferromagnetic material, the impedance of the detection coil changes due to local nonuniformity of the metal structure, which makes it difficult to determine the target defect signal.

【0004】本発明は、上記問題点を改善するために提
案されたもので、欠陥によって乱された渦電流の変化の
検出方法を改善し、金属組織の不均一さの影響を軽減す
るようにした電磁気探傷装置を提供することを目的とす
る。
The present invention has been proposed to solve the above problems, and improves a method for detecting a change in eddy current disturbed by a defect so as to reduce the influence of nonuniformity of metal structure. An object of the present invention is to provide an electromagnetic flaw detector.

【0005】[0005]

【課題を解決するための手段】上記目的を解決するため
の本発明にかかる電磁気探傷装置は、被検査体に磁場を
与えて渦電流を発生せしめ、その渦電流の変化を検出す
るプローブと、このプローブからの出力に基づいて被検
査体の欠陥を検出する検出部と、この検出部からの信号
を表示記録する表示記録部とを備えた電磁気探傷装置に
おいて、上記プローブは、上記被検査体に対して垂直の
磁場を励磁して渦電流を誘導せしめる励磁コイルと、渦
電流が作り出す二次的な磁界を検出する磁気センサとを
具備するものである。また、磁気センサは、被検査体に
垂直の磁場を励磁する励磁コイルの中心軸と直交する方
向に互いに対向配置させたものである。
SUMMARY OF THE INVENTION An electromagnetic flaw detector according to the present invention for solving the above-mentioned problems provides a probe for applying a magnetic field to an object to be inspected to generate an eddy current and detecting a change in the eddy current. In an electromagnetic flaw detector equipped with a detection unit for detecting a defect of an object to be inspected based on an output from the probe and a display recording unit for displaying and recording a signal from the detection unit, the probe is the object to be inspected. An exciting coil for exciting an eddy current by exciting a magnetic field perpendicular to the magnetic field and a magnetic sensor for detecting a secondary magnetic field generated by the eddy current are provided. The magnetic sensors are arranged so as to face each other in a direction orthogonal to the central axis of an exciting coil that excites a magnetic field perpendicular to the object to be inspected.

【0006】[0006]

【作用】コイルに交流電流を流し被検査体である金属導
体表面に近接させ垂直な磁場を印加するとその金属導体
に誘導電流である渦電流が流れ、その渦電流によって前
記コイルによる磁場の方向と逆向きの磁場が生じコイル
に誘導電流が流れ、コイルのインピーダンスを変化させ
る。この現象を積極的に利用したのが従来技術の渦流探
傷法であり、欠陥による渦電流の変化をコイルのインピ
ーダンス変化として測定しているが、被検査体の局部的
な導電率及び透磁率の変化によっても渦電流の変化が生
じるためコイルインピーダンスの変化測定に影響を与え
ていた。
[Function] When an alternating current is passed through the coil to bring it close to the surface of the metal conductor, which is the object to be inspected, and a vertical magnetic field is applied, an eddy current, which is an induced current, flows in the metal conductor. A reverse magnetic field is generated and an induced current flows in the coil, changing the impedance of the coil. The eddy current flaw detection method of the prior art actively uses this phenomenon, and changes in eddy current due to defects are measured as changes in the impedance of the coil. The change also causes a change in the eddy current, which affects the change measurement of the coil impedance.

【0007】そこで、本発明では、欠陥によって渦電流
の電流場が乱される時に生じる磁場の分布と定常的な渦
電流が作る磁場の分布と異なることに着目し、被検査体
の表面に垂直な磁場を印加して渦電流を誘導させる励磁
コイルの中心軸に対し直交する方向の磁場を検出する二
つの磁気センサを上記励磁コイル内に配置するように構
成したので、定常状態の渦電流から生じた励磁磁場と逆
方向の磁場を検出せずに、欠陥によって生じた渦電流の
乱れに基づく特定方向の磁場の変化を選択的に検出する
と共に、上記二つの磁気センサの検出信号の差分を出力
するように作用するので、金属組織の局部的な変化に基
づく導電率の変化及び透磁率の変化の影響を軽減するこ
とができる。
Therefore, in the present invention, attention is paid to the fact that the distribution of the magnetic field generated when the current field of the eddy current is disturbed by the defect is different from the distribution of the magnetic field created by the steady eddy current, and the perpendicular to the surface of the object to be inspected. Since two magnetic sensors that detect the magnetic field in the direction orthogonal to the central axis of the exciting coil that applies a strong magnetic field to induce the eddy current are arranged in the exciting coil, Without detecting the magnetic field in the opposite direction to the generated magnetic field, the change in the magnetic field in a specific direction due to the disturbance of the eddy current caused by the defect is selectively detected, and the difference between the detection signals of the two magnetic sensors is calculated. Since it acts so as to output, it is possible to reduce the influence of a change in conductivity and a change in magnetic permeability due to a local change in the metal structure.

【0008】[0008]

【実施例】以下、本発明の実施例を図面に基づいて詳細
に説明する。
Embodiments of the present invention will now be described in detail with reference to the drawings.

【0009】図1は、本発明の一実施例を示す電磁気探
傷装置の構成を示す概略図である。本実施例は、励磁コ
イル内に二つの磁気センサを配置して成るプローブ1
と、このプローブ1の励磁コイルに励磁電流を供給する
交流電源2と、磁気センサの出力信号を増幅したのち励
磁コイルの励磁電流に同期した信号成分を出力する検出
部3と、その出力信号を表示記録する表示記録部4から
構成され、プローブ1を被検査体5に近接させて探傷す
る。
FIG. 1 is a schematic diagram showing the structure of an electromagnetic flaw detector according to an embodiment of the present invention. The present embodiment is a probe 1 which is formed by disposing two magnetic sensors in an exciting coil.
An AC power supply 2 for supplying an exciting current to the exciting coil of the probe 1, a detecting unit 3 for amplifying the output signal of the magnetic sensor and then outputting a signal component synchronized with the exciting current of the exciting coil, and its output signal. The display recording unit 4 is configured to display and record, and the probe 1 is brought close to the inspected body 5 for flaw detection.

【0010】プローブ1は、図2および図3に示した構
成になっている。励磁コイル11は被検査体の表面に対し
垂直な交番磁界で励磁して渦電流を誘導させる。そして
磁気センサ12a,12bは被検査体に誘起した渦電流によ
って生じる二次的な磁界の特定方向の磁界成分を検出す
るように、磁気検出方向が励磁コイル11の中心軸と直交
する平面において、かつ二つの磁気センサ12a,12bの
検出方向が平行になるように近接して配置されるが、ピ
ックアップコイルもしくはホール素子等の磁電変換素子
が用いられる。本実施例ではピックアップコイルを用い
た場合について説明する。そして、この二つの磁気セン
サ12a,12bはそれぞれの検出信号の差分が出力される
ように検出部に接続されている。
The probe 1 has the structure shown in FIGS. 2 and 3. The exciting coil 11 is excited by an alternating magnetic field perpendicular to the surface of the inspection object to induce an eddy current. Then, the magnetic sensors 12a and 12b detect a magnetic field component in a specific direction of the secondary magnetic field generated by the eddy current induced in the object to be inspected, in a plane whose magnetic detection direction is orthogonal to the central axis of the exciting coil 11, Further, the two magnetic sensors 12a and 12b are arranged close to each other so that the detection directions thereof are parallel to each other, but a magnetoelectric conversion element such as a pickup coil or a Hall element is used. In this embodiment, a case where a pickup coil is used will be described. The two magnetic sensors 12a and 12b are connected to the detection unit so that the difference between the respective detection signals is output.

【0011】図1に戻って、交流電源2は、周波数発信
器22により所定の周波数の交流を発生させ、交流電源2
の負荷変動に対して常に一定の電流値に制御する定電流
回路21により、励磁コイルにあらかじめ設定した一定の
励磁電流を供給するものである。
Returning to FIG. 1, the AC power supply 2 generates an AC of a predetermined frequency by the frequency oscillator 22, and the AC power supply 2
The constant current circuit 21 that constantly controls the current value to a constant load value is supplied to the exciting coil with a constant exciting current set in advance.

【0012】検出部3はプローブ1内の磁気センサ12
a,12bによって検出した特定方向の磁界の検出信号を
所定レベルに増幅する増幅器31と、この増幅された検出
信号から励磁コイル11の励磁電流に同期した90°位相差
の2つの信号成分を抽出して出力する90°位相回路33
と、直角位相検出器32により構成されている。
The detection unit 3 is a magnetic sensor 12 in the probe 1.
An amplifier 31 which amplifies a detection signal of a magnetic field in a specific direction detected by a and 12b to a predetermined level, and two signal components having a 90 ° phase difference synchronized with the exciting current of the exciting coil 11 are extracted from the amplified detection signal. 90 ° phase circuit 33
And a quadrature detector 32.

【0013】以下に、上記構成の探傷装置を用いて被検
査体の欠陥を探傷する方法について述べる。最初にプロ
ーブ1を被検査体5に近接させ、交流電源2によりあら
かじめ設定した周波数及び一定電流値にて励磁コイル11
を励磁する。この励磁によって被検査体5である金属導
体に渦電流が誘導される。そして磁気センサ12a,12b
は、この渦電流によって生じた二次的な磁界を検出し、
欠陥によって乱された渦電流場の乱れを検出する。ここ
で、欠陥による渦電流場の乱れについて図4〜図6を用
いて以下に説明する。即ち、図4に示したように、励磁
コイル11に交流電流Eを流し、被検査体5に対し垂直な
磁場B1 を印加すると同心円状の渦電流Kが誘起され、
この渦電流Kによって励磁コイル11が作る垂直磁場B1
と逆向きの磁場B2 が発生し、励磁コイル11のインピー
ダンスを変化させるように作用する。したがってこの渦
電流Kの流れを阻害するような欠陥等が存在すると、そ
れによって励磁コイル11のインピーダンスの変化として
現れる。従来の渦流探傷法はこの現象を積極的に利用し
たものである。一方、割れ等の欠陥が存在する場合、図
5に示したように、同心円状の渦電流Kの一部は、欠陥
Fを迂回して流れる。この欠陥Fを迂回して流れる渦電
流Kは、通常の同心円状の渦電流とは異なる方向に流れ
ることから、この渦電流が作る磁場B2 に変化が生じ
る。即ち、図6に示したように、欠陥Fを迂回する渦電
流Kは欠陥の両側で逆向きに流れることから、その電流
の回りに生ずる磁界B2'も欠陥を境に逆向きの方向にな
る。したがって、この渦電流の乱れに基づく磁界B3 を
検出することで、欠陥Fの検出が可能になる。
A method of detecting a defect of an object to be inspected by using the flaw detecting device having the above structure will be described below. First, the probe 1 is brought close to the object 5 to be inspected, and the exciting coil 11 is operated at a frequency and a constant current value preset by the AC power supply 2.
To excite. By this excitation, an eddy current is induced in the metal conductor which is the device under test 5. And the magnetic sensors 12a, 12b
Detects the secondary magnetic field generated by this eddy current,
The disturbance of the eddy current field disturbed by the defect is detected. Here, the disturbance of the eddy current field due to the defect will be described below with reference to FIGS. That is, as shown in FIG. 4, when an alternating current E is passed through the exciting coil 11 and a magnetic field B1 perpendicular to the inspected body 5 is applied, a concentric eddy current K is induced,
Vertical magnetic field B1 generated by the exciting coil 11 by this eddy current K
A magnetic field B2 in the opposite direction is generated and acts so as to change the impedance of the exciting coil 11. Therefore, if there is a defect or the like that obstructs the flow of the eddy current K, it appears as a change in the impedance of the exciting coil 11. The conventional eddy current flaw detection method positively utilizes this phenomenon. On the other hand, when there is a defect such as a crack, as shown in FIG. 5, a part of the concentric eddy current K flows around the defect F. The eddy current K that bypasses the defect F flows in a direction different from that of a normal concentric eddy current, so that the magnetic field B2 created by this eddy current changes. That is, as shown in FIG. 6, since the eddy current K that bypasses the defect F flows in opposite directions on both sides of the defect, the magnetic field B2 'generated around the current also goes in the opposite direction with the defect as a boundary. . Therefore, the defect F can be detected by detecting the magnetic field B3 based on the disturbance of the eddy current.

【0014】最初に、この渦電流の乱れに基づく磁界B
3 を単一の磁気センサで検出する方法について以下に示
す。磁気センサ12a,12bは、図2および図3に示した
ように、励磁コイル11の中心軸に直交する方向に磁気検
出方向を合わせて磁気センサ12a,12bを配置したの
で、励磁コイル11が作る磁場及び渦電流の作る磁場の垂
直な磁場成分については応答せず、それと直交する被検
査体表面と平行な水平磁場成分だけに応答した検出信号
が得られる。即ち、図7の渦電流場の乱れに基づく磁界
の検出方法に示すように、欠陥が無い部分では励磁コイ
ル11によって誘導された渦電流Pは励磁コイル11と同心
円状に流れており、かつその渦電流Pが作る二次的な磁
界B2 も励磁コイル11の中心軸に対し対称な磁場分布を
示し、また磁気センサ12a,12bの検出方向の中心を励
磁コイル11の中心と一致させているので互いに逆方向に
向く水平成分の検出信号は打ち消しあって出力として現
れない。そして、欠陥のある方へ、プローブを移動して
いくと、渦電流Kの一部は欠陥Fによって流れる方向を
乱され、それによって渦電流が作る磁界は磁気センサ12
a,12bの検出方向中心に対し非対称の磁場分布とな
り、互いに逆方向の磁場成分にアンバランスが生じその
差分が磁気センサ12a,12bの出力信号として得られ、
欠陥に基づく渦電流場の乱れを検出できることとにな
る。
First, the magnetic field B based on this eddy current disturbance
The method for detecting 3 with a single magnetic sensor is shown below. As shown in FIGS. 2 and 3, the magnetic sensors 12a and 12b are arranged so that the magnetic sensors 12a and 12b are arranged with their magnetic detection directions aligned with the direction orthogonal to the central axis of the exciting coil 11. The vertical magnetic field component of the magnetic field generated by the magnetic field and the eddy current does not respond, and a detection signal that responds only to the horizontal magnetic field component parallel to the surface of the object to be inspected which is orthogonal thereto is obtained. That is, as shown in the magnetic field detection method based on the turbulence of the eddy current field in FIG. 7, the eddy current P induced by the exciting coil 11 flows concentrically with the exciting coil 11 in the defect-free portion, and The secondary magnetic field B2 generated by the eddy current P also shows a magnetic field distribution symmetrical with respect to the central axis of the exciting coil 11, and the centers of the magnetic sensors 12a and 12b in the detection direction are aligned with the center of the exciting coil 11. The detection signals of the horizontal components that face in opposite directions cancel each other and do not appear as an output. Then, when the probe is moved to the defective side, a part of the eddy current K is disturbed by the defect F, and the magnetic field generated by the eddy current is generated by the magnetic sensor 12.
The magnetic field distributions are asymmetric with respect to the detection direction centers of a and 12b, and imbalance occurs in the magnetic field components in opposite directions, and the difference between them is obtained as the output signal of the magnetic sensors 12a and 12b.
Disturbances in the eddy current field due to defects can be detected.

【0015】この磁気センサ12a,12bの出力信号は励
磁用コイルの励磁電流に対応した交流波形であるため、
検出部3の同期検波回路32により位相検波を行い励磁電
流の90°位相差に同期した二つの信号成分を抽出し、水
平成分の磁界の強さに比例した直流信号Ex ,Ey とし
て表示記録部4に出力し、図8に示したように、欠陥F
に基づく渦電流場の乱れを検出する。このようにプロー
ブを移動して得られた検出信号Eの変化は欠陥Fの中心
位置で0を示し、その両側で逆極性のピークを示すこと
から欠陥の判定を可能にしている。さらに渦電流の位相
が変化したとしても図9のベクトル表示で示したよう
に、信号の位相と絶対値を容易に知ることができる。
Since the output signals of the magnetic sensors 12a and 12b are AC waveforms corresponding to the exciting current of the exciting coil,
Phase detection is performed by the synchronous detection circuit 32 of the detection unit 3 to extract two signal components synchronized with the 90 ° phase difference of the exciting current, and displayed as direct current signals Ex and Ey proportional to the magnetic field strength of the horizontal component. 4 and, as shown in FIG.
To detect turbulence of eddy current field. In this way, the change in the detection signal E obtained by moving the probe shows 0 at the center position of the defect F, and peaks of opposite polarity are shown on both sides of the center position of the defect F, which enables determination of the defect. Further, even if the phase of the eddy current changes, the phase and absolute value of the signal can be easily known as shown in the vector display of FIG.

【0016】一方、従来の渦流探傷法で問題となる金属
組織の局部的な材質変化に基づく導電率及び透磁率の影
響は渦電流が作る磁界の強さの変化として現れるが、磁
場の分布への影響は少なく、また本発明では、上述した
ように渦電流場の乱れに基づく水平成分の磁界の変化を
選択的に検出するようにしたので、局部的な材質変化部
であっても渦電流場に大きな乱れは生じないためその影
響も少ない。しかしながら励磁コイル11の磁界は影響を
受けるので中心軸に対しわずかながら非対称になること
から、磁気センサ12a,12bの出力にはアンバランス成
分が重畳することになり、欠陥検出能の低下の原因とな
る。
On the other hand, the influence of conductivity and permeability due to a local material change in the metal structure, which is a problem in the conventional eddy current flaw detection method, appears as a change in the strength of the magnetic field created by the eddy current, but it affects the distribution of the magnetic field. In the present invention, since the change in the magnetic field of the horizontal component due to the disturbance of the eddy current field is selectively detected as described above, the eddy current is reduced even in the local material change portion. Since there is no big disturbance in the field, its effect is small. However, since the magnetic field of the exciting coil 11 is affected and becomes slightly asymmetrical with respect to the central axis, an imbalance component is superimposed on the outputs of the magnetic sensors 12a and 12b, which causes a decrease in defect detectability. Become.

【0017】そこで、本発明では図2および図3に示し
たように、励磁コイル11内に二つの磁気センサ12a,12
bを平行に配置して、それぞれの磁気センサ12a,12b
の出力を検出部に接続し、前述の局部的な材質変化に伴
う磁場のアンバランス成分の除去を行っている。このア
ンバランス成分の除去作用について図10および図11を用
いて以下に説明する。図10に示すように、被検査体5に
局部的な材質変化があると磁気センサ12a,12bの検出
信号Ea ,Eb は図11の欠陥の検出信号に比べ比較的な
だらかな変化を示し両方の磁気センサ12a,12bでほぼ
等しいため、検出部に接続したこの磁気センサ12a,12
bの差分出力Eo (=Eb −Ea )には前記局部的な材
質変化に基づく信号は除去されることになる。一方、図
11に示したように被検査体5に欠陥がある場合には、磁
気センサ12a,12bが欠陥の上を通過するとその磁気セ
ンサ12a,12bの出力には局部的な材質変化に基づくな
だらかな信号に重畳して欠陥に基づく信号が現れる。従
って欠陥の両端部において片方の磁気センサ12a,12b
だけが欠陥と重なる位置で差分出力Eo に欠陥に基づく
信号が得られる。
Therefore, in the present invention, as shown in FIGS. 2 and 3, two magnetic sensors 12a, 12a are provided in the exciting coil 11.
b are arranged in parallel, and the respective magnetic sensors 12a, 12b are arranged.
Is connected to the detector to remove the unbalanced component of the magnetic field due to the local material change. The operation of removing this unbalanced component will be described below with reference to FIGS. 10 and 11. As shown in FIG. 10, when there is a local material change in the inspection object 5, the detection signals Ea and Eb of the magnetic sensors 12a and 12b show a comparatively gentle change as compared with the defect detection signal of FIG. Since the magnetic sensors 12a and 12b are substantially the same, the magnetic sensors 12a and 12 connected to the detection unit
The signal due to the local material change is removed from the differential output Eo (= Eb-Ea) of b. Meanwhile, the figure
As shown in 11, when the inspection object 5 has a defect, when the magnetic sensors 12a and 12b pass over the defect, the outputs of the magnetic sensors 12a and 12b have a gentle signal based on a local material change. And a signal based on the defect appears. Therefore, one of the magnetic sensors 12a, 12b at both ends of the defect
A signal based on the defect is obtained at the differential output Eo at the position where only the defect overlaps the defect.

【0018】[0018]

【発明の効果】以上説明したように、本発明の電磁気探
傷装置によれば、被検査体である金属導体の表面に対
し、垂直な磁場を印加して渦電流を誘起させ、この渦電
流の電流場が欠陥によって乱されたときの渦電流の乱れ
に基づいて生じる磁界の水平成分を検出するように励磁
コイルの中心軸と直交する方向に磁気検出方向を一致さ
せた2つの磁気センサを前記励磁コイル内に配置して、
それぞれの磁気センサの出力を検出部に接続したプロー
ブにより探傷するようにしたので、従来の渦流探傷法で
問題となっていた金属組織の局部的な不均一さに基づく
導電率及び透磁率の影響を軽減することができ、強磁性
体材料であっても容易に小さな欠陥の探傷が行い得る利
点を有する。
As described above, according to the electromagnetic flaw detector of the present invention, a perpendicular magnetic field is applied to the surface of the metal conductor, which is the object to be inspected, to induce an eddy current. The two magnetic sensors whose magnetic detection directions coincide with each other in the direction orthogonal to the central axis of the exciting coil are detected so as to detect the horizontal component of the magnetic field generated based on the disturbance of the eddy current when the current field is disturbed by the defect. Place it in the excitation coil,
Since the output of each magnetic sensor was detected by the probe connected to the detection part, the influence of conductivity and permeability due to the local nonuniformity of the metal structure, which was a problem in the conventional eddy current flaw detection method. It is possible to reduce the defect, and it is possible to easily detect a small defect even with a ferromagnetic material.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の電磁気探傷装置の一実施例を示すブロ
ック図。
FIG. 1 is a block diagram showing an embodiment of an electromagnetic flaw detector of the present invention.

【図2】本発明の電磁気探傷装置に用いたプローブの概
略図。
FIG. 2 is a schematic view of a probe used in the electromagnetic flaw detector of the present invention.

【図3】図2のA−A矢視方向切断図。FIG. 3 is a sectional view taken along line AA of FIG.

【図4】渦電流の基本的な流れを示す説明図。FIG. 4 is an explanatory diagram showing a basic flow of an eddy current.

【図5】被検査体に欠陥があった場合、渦電流の流れを
示す説明図。
FIG. 5 is an explanatory diagram showing the flow of an eddy current when the inspection object has a defect.

【図6】図5の縦断面方向から見た渦電流の流れを示す
説明図。
6 is an explanatory diagram showing the flow of an eddy current when viewed in the vertical cross-sectional direction of FIG.

【図7】本発明の電磁気探傷装置による渦電流の流れを
示す説明図。
FIG. 7 is an explanatory diagram showing the flow of an eddy current by the electromagnetic flaw detector of the present invention.

【図8】本発明の電磁気探傷装置による被検査体に欠陥
があった場合の電流変化を示すグラフ。
FIG. 8 is a graph showing a change in current when there is a defect in an object to be inspected by the electromagnetic flaw detector of the present invention.

【図9】本発明の電磁気探傷装置による被検査体に欠陥
があった場合の電流の位相角を示すグラフ。
FIG. 9 is a graph showing the phase angle of the current when there is a defect in the object to be inspected by the electromagnetic flaw detector of the present invention.

【図10】本発明の電磁気探傷装置を用いて被検査体に
欠陥がない場合の検出信号の変化を示すグラフ。
FIG. 10 is a graph showing changes in the detection signal when the inspection object has no defect using the electromagnetic flaw detector of the present invention.

【図11】本発明の電磁気探傷装置を用いて被検査体に
欠陥がある場合の検出信号の変化を示すグラフ。
FIG. 11 is a graph showing changes in the detection signal when the object to be inspected has a defect using the electromagnetic flaw detector of the present invention.

【符号の説明】[Explanation of symbols]

1 プローブ 2 交流電源 3 検出部 4 表示記録部 5 被検査体 11 励磁コイル 12a,12b 磁気センサ 1 probe 2 AC power supply 3 detection unit 4 display recording unit 5 inspected body 11 excitation coil 12a, 12b magnetic sensor

───────────────────────────────────────────────────── フロントページの続き (72)発明者 中山 智恵 神奈川県横浜市鶴見区末広町2丁目4番地 株式会社東芝京浜事業所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Chie Nakayama 2-4 Suehiro-cho, Tsurumi-ku, Yokohama-shi, Kanagawa Toshiba Keihin Office

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 被検査体に磁場を与えて渦電流を発生せ
しめ、その渦電流の変化を検出するプローブと、このプ
ローブからの出力に基づいて被検査体の欠陥を検出する
検出部と、この検出部からの信号を表示記録する表示記
録部とを備えた電磁気探傷装置において、上記プローブ
は、上記被検査体に対して垂直の磁場を励磁して渦電流
を誘導せしめる励磁コイルと、渦電流が作り出す二次的
な磁界を検出する磁気センサとを有することを特徴とす
る電磁気探傷装置。
1. A probe for applying a magnetic field to an object to be inspected to generate an eddy current and detecting a change in the eddy current, and a detection section for detecting a defect of the object to be inspected based on an output from the probe. In an electromagnetic flaw detector equipped with a display recording unit for displaying and recording a signal from the detecting unit, the probe is an exciting coil for exciting a magnetic field perpendicular to the object to be inspected to induce an eddy current, and an eddy current. An electromagnetic flaw detector comprising: a magnetic sensor that detects a secondary magnetic field generated by an electric current.
【請求項2】 磁気センサは、被検査体に垂直の磁場を
励磁する励磁コイルの中心軸と直交する方向に互いに対
向配置させたことを特徴とする請求項1記載の電磁気探
傷装置。
2. The electromagnetic flaw detector according to claim 1, wherein the magnetic sensors are arranged to face each other in a direction orthogonal to a central axis of an exciting coil that excites a magnetic field perpendicular to the object to be inspected.
JP5023898A 1993-02-12 1993-02-12 Electromagnetic flaw detecting equipment Pending JPH06242076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5023898A JPH06242076A (en) 1993-02-12 1993-02-12 Electromagnetic flaw detecting equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5023898A JPH06242076A (en) 1993-02-12 1993-02-12 Electromagnetic flaw detecting equipment

Publications (1)

Publication Number Publication Date
JPH06242076A true JPH06242076A (en) 1994-09-02

Family

ID=12123284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5023898A Pending JPH06242076A (en) 1993-02-12 1993-02-12 Electromagnetic flaw detecting equipment

Country Status (1)

Country Link
JP (1) JPH06242076A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002097425A1 (en) * 2001-05-29 2002-12-05 Nihon University Mutual-induction insertion probe
JP2012247377A (en) * 2011-05-31 2012-12-13 Hitachi Ltd Eddy current inspection apparatus and inspection method using the same
CN108469514A (en) * 2018-06-07 2018-08-31 青岛理工大学 A kind of monitoring device and its method of steel rust in concrete behavior
WO2019044018A1 (en) * 2017-08-30 2019-03-07 国立大学法人 岡山大学 Non-destructive inspection device
CN110455913A (en) * 2019-08-02 2019-11-15 兰州理工大学 A kind of parallel connection type plane cylinder sensor
JPWO2019077778A1 (en) * 2017-10-20 2020-11-05 国立大学法人 岡山大学 Eddy current flaw detection method and eddy current flaw detector

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002097425A1 (en) * 2001-05-29 2002-12-05 Nihon University Mutual-induction insertion probe
JP2012247377A (en) * 2011-05-31 2012-12-13 Hitachi Ltd Eddy current inspection apparatus and inspection method using the same
WO2019044018A1 (en) * 2017-08-30 2019-03-07 国立大学法人 岡山大学 Non-destructive inspection device
JPWO2019044018A1 (en) * 2017-08-30 2020-10-15 国立大学法人 岡山大学 Non-destructive inspection equipment
JPWO2019077778A1 (en) * 2017-10-20 2020-11-05 国立大学法人 岡山大学 Eddy current flaw detection method and eddy current flaw detector
CN108469514A (en) * 2018-06-07 2018-08-31 青岛理工大学 A kind of monitoring device and its method of steel rust in concrete behavior
CN110455913A (en) * 2019-08-02 2019-11-15 兰州理工大学 A kind of parallel connection type plane cylinder sensor

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