JPH06139560A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH06139560A JPH06139560A JP31264092A JP31264092A JPH06139560A JP H06139560 A JPH06139560 A JP H06139560A JP 31264092 A JP31264092 A JP 31264092A JP 31264092 A JP31264092 A JP 31264092A JP H06139560 A JPH06139560 A JP H06139560A
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- film
- protective film
- ferromagnetic metal
- metal film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は強磁性金属膜を磁気記録
層とする磁気記録媒体に関し、特に耐久性を改善した磁
気記録媒体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium having a ferromagnetic metal film as a magnetic recording layer, and more particularly to a magnetic recording medium having improved durability.
【０００２】[0002]
【従来の技術】Ｃｏ−Ｎｉ、Ｃｏ−Ｃｒその他の強磁性
金属膜を磁気記録層とする磁気記録媒体に関する技術
は、ビデオ記録、デジタル記録等の高密度記録のため、
あるいは記録再生装置の小型化、高性能化などのために
従来から広く研究されており、また実用化されている。
しかし、強磁性金属膜は一般に磁気ヘッド等の摺動部材
との摩擦により摩耗し易いので、強磁性金属膜の表面に
潤滑剤を塗布したり、潤滑剤層を設けたりして摩擦を減
じるとか、あるいは硬質の保護膜を形成して耐摩耗性を
上げることが提案されている。例えば、特開平２−１３
２６２３号及び特開平３−２２４１３２号には、強磁性
金属膜の表面にダイヤモンド状炭素よりなる保護膜を生
成し、更にその上に潤滑剤層を設けることにより、耐久
性並びに走行安定性を改善することが提案されている。2. Description of the Related Art A technique relating to a magnetic recording medium using a ferromagnetic metal film such as Co--Ni, Co--Cr or the like as a magnetic recording layer is for high density recording such as video recording and digital recording
Alternatively, it has been widely researched and put into practical use for downsizing and high performance of the recording / reproducing apparatus.
However, since the ferromagnetic metal film is generally easily worn by friction with a sliding member such as a magnetic head, it is necessary to apply a lubricant to the surface of the ferromagnetic metal film or provide a lubricant layer to reduce the friction. Alternatively, it has been proposed to form a hard protective film to improve wear resistance. For example, Japanese Patent Laid-Open No. 2-13
2623 and JP-A-3-224132 improve durability and running stability by forming a protective film made of diamond-like carbon on the surface of a ferromagnetic metal film and further providing a lubricant layer thereon. It is suggested to do so.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、これら
の文献に記載されたダイヤモンド状炭素を検討したとこ
ろ、特開平２−１３２６２３号に記載されたものは炭素
膜中の水素の濃度が３ａｔ％以下であり、また特開平３
−２２４１３２号に記載されたものは炭素膜中の水素の
濃度が１５ａｔ％（３０モル％）以下であり、比較的結
晶性が高い硬質の膜であるために脆く、潤滑剤を併用し
ても耐摩耗性は十分でないことが分かった。強磁性金属
膜への接着性を上げるために、従来ダイヤモンド状保護
膜を形成する前に強磁性金属膜の表面を前処理すること
が提案されている。例えば、特開平３−１１４１３２号
公報、特開平４−１０２１４号、及び特開平４−４４６
３６号には、メタン、エタンのような低級炭化水素ある
いは更にフッ素を含む炭化水素を強磁性金属膜の表面で
プラズマ重合してプラズマ重合膜を形成することが提案
されている。しかし比較例に示すようにプラズマ膜を介
在させたのでは必ずしも十分な耐久性が得られない。他
の重要な問題は、プラズマ重合膜を介在させると、ダイ
ヤモンド状保護膜の厚さに更にプラズマ重合膜の厚さが
加算される結果スペーシングロスが増大することであ
る。したがって、プラズマ重合膜のような中間層はでき
るだけ回避する必要がある。したがって本発明の目的
は、ダイヤモンド状保護膜の強磁性金属膜への密着性を
向上させることにより、磁気記録媒体のスチル特性等の
耐摩耗性を上げることにある。本発明の他の目的は、ダ
イヤモンド状保護膜の柔軟性を向上してスチル特性等の
耐摩耗性を上げることにある。However, when the diamond-like carbons described in these documents were examined, it was found that those described in JP-A-2-132623 have a hydrogen concentration of 3 at% or less in the carbon film. Yes, and JP-A-3
No. 224132 has a hydrogen concentration of 15 at% (30 mol%) or less in the carbon film and is brittle because it is a hard film having relatively high crystallinity, and even if a lubricant is used in combination. It was found that the wear resistance was not sufficient. In order to improve adhesion to the ferromagnetic metal film, it has been conventionally proposed to pretreat the surface of the ferromagnetic metal film before forming the diamond-like protective film. For example, JP-A-3-114132, JP-A-4-10214, and JP-A-4-446.
No. 36 proposes to form a plasma polymerized film by plasma polymerizing a lower hydrocarbon such as methane or ethane or a hydrocarbon further containing fluorine on the surface of the ferromagnetic metal film. However, as shown in the comparative example, sufficient durability cannot be obtained by interposing a plasma film. Another important problem is that the inclusion of the plasma-polymerized film increases the spacing loss as a result of adding the thickness of the plasma-polymerized film to the thickness of the diamond-shaped protective film. Therefore, it is necessary to avoid intermediate layers such as plasma-polymerized membranes as much as possible. Therefore, an object of the present invention is to improve wear resistance such as still characteristics of a magnetic recording medium by improving the adhesion of the diamond-like protective film to the ferromagnetic metal film. Another object of the present invention is to improve the flexibility of the diamond-like protective film and increase the abrasion resistance such as still characteristics.
【０００４】[0004]
【課題を解決するための手段】本発明は、非磁性基体の
表面に強磁性金属膜を形成した磁気記録媒体において、
前記強磁性金属膜の表面に水素ガスによるプラズマ処理
を施し、その上にダイヤモンド状保護膜を形成したこと
を特徴とする。本発明は水素ガスによるプラズマ処理に
加えて、更にダイヤモンド状保護膜として炭素が６０〜
７０ａｔ％と水素が３０〜４０ａｔ％である組成を採用
することにより、ダイヤモンド状保護膜を柔軟にするこ
とにより耐摩耗性を向上させる。更に好ましくは、ダイ
ヤモンド状保護膜の上に更に潤滑層を設けることにより
潤滑性を向上させる。The present invention provides a magnetic recording medium having a ferromagnetic metal film formed on the surface of a non-magnetic substrate,
The surface of the ferromagnetic metal film is plasma-treated with hydrogen gas, and a diamond-like protective film is formed thereon. In the present invention, in addition to the plasma treatment with hydrogen gas, carbon is further added as a diamond-like protective film in an amount of 60 to 60%.
By adopting a composition in which 70 at% and hydrogen are 30 to 40 at%, the diamond-like protective film is made soft and wear resistance is improved. More preferably, the lubricating property is improved by further providing a lubricating layer on the diamond-like protective film.
【０００５】本発明のダイヤモンド状保護膜は、例えば
特開平２−１３２６２３号等に記載されているグラファ
イトをターゲットとしＡｒ及びＨ2 のグロー放電による
スパッタリング法、メタン、エタン、ブタン等の低分子
量炭化水素のプラズマ蒸着とか、これらのガスをグロー
放電でイオン化し、それを蒸着するイオン化蒸着法な
ど、従来公知の任意の方法を用い、条件を適正に制御す
ることにより製造できる。The diamond-like protective film of the present invention has a low-molecular weight carbonization of methane, ethane, butane or the like, which is a sputtering method by glow discharge of Ar and H 2 targeting graphite described in, for example, JP-A-2-132623. It can be produced by appropriately controlling the conditions by using any conventionally known method such as plasma vapor deposition of hydrogen or ionization vapor deposition method in which these gases are ionized by glow discharge and vaporized.
【０００６】ダイヤモンド状保護膜は、炭素が６０〜７
０ａｔ％と水素が３０〜４０ａｔ％の組成が望ましい。
ポリエチレンのようにＣ／Ｈ＝０．５になると直鎖状で
あり、架橋構造を有しない。これに対し、この組成（Ｃ
／Ｈ＝０．５）からずれてくると架橋構造を有すること
になり膜強度が急激に上昇する。この場合、Ｃ／Ｈ＝
０．５では透明であるがＣ＝６０〜７０ａｔ％、Ｈ＝３
０〜４０ａｔ％では膜が黒色化する。これはＣ−ＨのＨ
が取れてＣ−Ｃ結合が多くなり同時にＣ＝Ｃ結合も生成
しているためである。これが架橋の進行を示すものであ
る。そのため膜強度が上昇してセラミック並みの硬度を
得る。The diamond-like protective film contains 60 to 7 carbon.
A composition of 0 at% and hydrogen of 30 to 40 at% is desirable.
When polyethylene has a C / H ratio of 0.5, it is linear and does not have a crosslinked structure. In contrast, this composition (C
/H=0.5), the film has a crosslinked structure and the film strength sharply increases. In this case, C / H =
Although it is transparent at 0.5, C = 60 to 70 at% and H = 3.
The film turns black at 0 to 40 at%. This is C-H
This is because the C—C bond is increased and the C═C bond is also generated at the same time. This shows the progress of crosslinking. Therefore, the film strength is increased to obtain the hardness of ceramics.
【０００７】水素によるプラズマ処理は、排気した真空
室に装入した強磁性金属膜を有する非磁性基体を真空度
０．０１〜１Ｔｏｒｒ、水素の流量５〜１００ＳＣＣ
Ｍ、周波数０〜１３．５ＭＨｚ〜Ｈｚ、電力１０〜１０
０Ｗ、パワー密度０．１〜０．５Ｗ／ｃｍ2 の条件でプ
ラズマ処理して強磁性金属膜の表面を清浄化及び活性化
する。In the plasma treatment with hydrogen, a non-magnetic substrate having a ferromagnetic metal film loaded in an evacuated vacuum chamber is vacuumed at 0.01 to 1 Torr and a hydrogen flow rate is 5 to 100 SCC.
M, frequency 0 to 13.5 MHz to Hz, power 10 to 10
The surface of the ferromagnetic metal film is cleaned and activated by plasma treatment under the conditions of 0 W and a power density of 0.1 to 0.5 W / cm 2 .
【０００８】潤滑層としては脂肪酸、パーフルオロアル
キルカルボン酸、パーフルオロアルキルポリエーテル、
高級アルコール、脂肪酸アミド等の潤滑剤、特にフッ素
系のものが好ましい。As the lubricating layer, fatty acid, perfluoroalkylcarboxylic acid, perfluoroalkylpolyether,
Lubricants such as higher alcohols and fatty acid amides, especially fluorine-based lubricants are preferable.
【０００９】[0009]
【作用】本発明によると、強磁性金属膜とダイヤモンド
状保護膜の密着性が向上し耐摩耗性、耐久性が向上す
る。また、形成されるダイヤモンド状保護膜は、比較的
高い水素含有率を有する有機質に接近するので、保護膜
の柔軟性が増し、強磁性金属膜への密着性が向上するこ
とにより耐久性が向上する。さらに、走行安定性に関し
ては潤滑層と併用することにより何ら問題は生じないこ
とが分かった。According to the present invention, the adhesion between the ferromagnetic metal film and the diamond-like protective film is improved, and the wear resistance and durability are improved. Further, since the formed diamond-like protective film approaches an organic substance having a relatively high hydrogen content, the flexibility of the protective film is increased and the adhesion to the ferromagnetic metal film is improved, so that the durability is improved. To do. Further, it was found that no problem arises with respect to running stability when used in combination with a lubricating layer.
【００１０】[0010]
【実施例の説明】以下、本発明の好ましい実施例を詳し
く説明する。強磁性金属膜の材料としてはＣｏ、Ｃｏ−
Ｎｉ、Ｃｏ−Ｔｉ、Ｃｏ−Ｏ、Ｃｏ−Ｍｏ、Ｃｏ−Ｎｉ
−Ｏ、Ｃｏ−Ｃｒ、Ｃｏ−Ｃｒ−Ｎｉ等が使用できる
が、特にＣｏ−Ｎｉ（重量比で７０〜９５対３０〜５）
が好ましく、以下の実施例ではＣｏ８０重量−Ｎｉ２０
重量％のものを使用した。また、非磁性基体としては、
ポリアミド、ポリエステル、等従来公知のプラスチック
製支持体が使用できるが、以下の例ではポリエチレンテ
レフタレートを使用した。非磁性体の表面に強磁性金属
膜を形成する方としては、電子ビーム蒸着法、イオンプ
レーティング法、スパッタリング法、などが使用できる
が、以下の例では電子ビーム蒸着法によった。すなわ
ち、真空中で、電子ビームにより、るつぼ内に収容した
Ｃｏ−Ｎｉ合金を照射して溶融させ、これを回転ドラム
の面に沿って一定速度で移動している長尺のポリエチレ
ンテレフタレートのフィルム上に蒸着した。得られた強
磁性金属膜の表面に、水素プラズマによる前処理を施し
て表面をわずかに還元して活性化した。その上に、ダイ
ヤモンド状膜を、ＣＨ4 とＨ2 との混合ガスをＡＦプラ
ズマ化し、これをＣｏ−Ｎｉ蒸着膜の表面に成膜した。DESCRIPTION OF THE PREFERRED EMBODIMENTS The preferred embodiments of the present invention will be described in detail below. As the material of the ferromagnetic metal film, Co, Co-
Ni, Co-Ti, Co-O, Co-Mo, Co-Ni
-O, Co-Cr, Co-Cr-Ni, etc. can be used, but especially Co-Ni (weight ratio 70-95: 30-5).
Is preferred, and in the following examples Co80 weight-Ni20
The thing of the weight% was used. Further, as the non-magnetic substrate,
Conventionally known plastic supports such as polyamide and polyester can be used, but polyethylene terephthalate was used in the following examples. As a method for forming the ferromagnetic metal film on the surface of the non-magnetic material, an electron beam evaporation method, an ion plating method, a sputtering method, or the like can be used. In the following examples, the electron beam evaporation method was used. That is, in a vacuum, a Co-Ni alloy contained in a crucible is irradiated with an electron beam to be melted in an electron beam, and is melted on a long polyethylene terephthalate film moving at a constant speed along the surface of a rotating drum. It was vapor-deposited on. The surface of the obtained ferromagnetic metal film was pretreated with hydrogen plasma to slightly reduce the surface and activate it. Then, a diamond-like film was formed into an AF plasma by using a mixed gas of CH 4 and H 2 and was formed on the surface of the Co—Ni vapor deposition film.
【００１１】実施例１ ポリエチレンテレフタレートの表面にＣｏ−Ｎｉ（８
０：２０）を厚さ０．２μｍに成膜した。次に、強磁性
金属表面を水素プラズマにより次の条件で活性化した。 圧力：０．０５Ｔｏｒｒ 周波数：１００Ｈｚ 電力：５０Ｗ その後、ダイヤモンド状保護膜を次の条件で厚さ１００
Åに成膜した。 原料：ＣＨ4 ：Ｈ2 ＝４：１ 圧力：０．０５Ｔｏｒｒ ＡＦ周波数：１００ｋＨｚ 電力：９０Ｗ 得られたダイヤモンド状保護膜の水素含有率は３０ａｔ
％であった。更にＣｏ−Ｎｉ層の表面に潤滑剤層として
パーフルオロアルキルポリエーテルを３０Åの厚さに塗
布した。Example 1 Co-Ni (8) was formed on the surface of polyethylene terephthalate.
0:20) was formed into a film having a thickness of 0.2 μm. Next, the ferromagnetic metal surface was activated by hydrogen plasma under the following conditions. Pressure: 0.05 Torr Frequency: 100 Hz Power: 50 W After that, a diamond-like protective film having a thickness of 100 is prepared under the following conditions.
Film was formed on Å. Raw material: CH 4 : H 2 = 4: 1 Pressure: 0.05 Torr AF frequency: 100 kHz Electric power: 90 W Hydrogen content of the obtained diamond-like protective film is 30 at
%Met. Further, perfluoroalkyl polyether was applied as a lubricant layer on the surface of the Co-Ni layer to a thickness of 30 liters.
【００１２】実施例２ 実施例１において、ダイヤモンド膜の成膜条件を次のよ
うに変えた。得られたダイヤモンド状保護膜の水素含有
率は３５ａｔ％であった。 原料：ＣＨ4 ：Ｈ2 ＝２：１ 圧力：０．０５Ｔｏｒｒ ＡＦ周波数：１００ｋＨｚ 電力：９０ＷExample 2 In Example 1, the film forming conditions for the diamond film were changed as follows. The hydrogen content of the obtained diamond-like protective film was 35 at%. Raw material: CH 4 : H 2 = 2: 1 Pressure: 0.05 Torr AF frequency: 100 kHz Electric power: 90 W
【００１３】比較例１ 実施例１においてダイヤモンド膜の成膜条件を次のよう
に変えた。得られたダイヤモンド状保護膜の水素含有率
は４５ａｔ％であった。 原料：ＣＨ4 ：Ｈ2 ＝１：１ 圧力：０．０５Ｔｏｒｒ ＡＦ周波数：１００ｋＨｚ 電力：９０ＷComparative Example 1 In Example 1, the diamond film forming conditions were changed as follows. The hydrogen content of the obtained diamond-like protective film was 45 at%. Raw material: CH 4 : H 2 = 1: 1 Pressure: 0.05 Torr AF frequency: 100 kHz Electric power: 90 W
【００１４】比較例２ 実施例１においてダイヤモンド膜の成膜条件を次のよう
に変えた。得られたダイヤモンド状保護膜の水素含有率
は２０ａｔ％であった。 原料：ＣＨ4 ：Ｈ2 ＝１：０ 圧力：０．０５Ｔｏｒｒ ＡＦ周波数：１００ｋＨｚ 電力：９０ＷComparative Example 2 In Example 1, the diamond film forming conditions were changed as follows. The hydrogen content rate of the obtained diamond-like protective film was 20 at%. Raw material: CH 4 : H 2 = 1: 0 Pressure: 0.05 Torr AF frequency: 100 kHz Electric power: 90 W
【００１５】比較例３ 実施例１において水素の代わりにアルゴンを使用し炭化
水素プラズマ重合膜を１００Åの厚さに形成した。Comparative Example 3 A hydrocarbon plasma polymerized film was formed to a thickness of 100 Å by using argon instead of hydrogen in Example 1.
【００１６】上記の実施例及び比較例の摩擦係数と耐久
走行性であるスチル特性を測定したところ表１の通りで
あった。スチル特性は再生出力が２ｄＢ低下するまでの
再生時間を示す。硬度は潤滑剤と塗布する前のダイヤモ
ンド状保護膜のビッカース硬度を示す。耐久摩擦係数は
２００パス走行後の走行摩擦である。The frictional coefficient and the still running property, which is the durability running property, of the above Examples and Comparative Examples were measured and the results are shown in Table 1. The still characteristic indicates the reproduction time until the reproduction output drops by 2 dB. The hardness indicates the Vickers hardness of the diamond-like protective film before coating with the lubricant. The durable friction coefficient is the running friction after running 200 passes.
【００１７】[0017]
【表１】 [Table 1]
【００１８】[0018]
【効果】水素プラズマ処理により、還元雰囲気となり活
性化された基体上に製膜されたダイヤモンド状保護膜は
密着性が増し、耐久摩擦、スチル特性が著しく向上す
る。[Effect] By the hydrogen plasma treatment, the diamond-like protective film formed on the activated substrate in a reducing atmosphere has improved adhesiveness and remarkably improved durable friction and still characteristics.
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成５年１月８日[Submission date] January 8, 1993
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００３[Name of item to be corrected] 0003
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、これら
の文献に記載されたダイヤモンド状炭素を検討したとこ
ろ、特開平２−１３２６２３号に記載されたものは炭素
膜中の水素の濃度が３ａｔ％以下であり、また特開平３
−２２４１３２号に記載されたものは炭素膜中の水素の
濃度が１５ａｔ％（７．５モル％）以下であり、比較的
結晶性が高い硬質の膜であるために脆く、潤滑剤を併用
しても耐摩耗性は十分でないことが分かった。強磁性金
属膜への接着性を上げるために、従来ダイヤモンド状保
護膜を形成する前に強磁性金属膜の表面を前処理するこ
とが提案されている。例えば、特開平３−１１４１３２
号公報、特開平４−１０２１４号、及び特開平４−４４
６３６号には、メタン、エタンのような低級炭化水素あ
るいは更にフッ素を含む炭化水素を強磁性金属膜の表面
でプラズマ重合してプラズマ重合膜を形成することが提
案されている。しかし比較例に示すようにプラズマ膜を
介在させたのでは必ずしも十分な耐久性が得られない。
他の重要な問題は、プラズマ重合膜を介在させると、ダ
イヤモンド状保護膜の厚さに更にプラズマ重合膜の厚さ
が加算される結果スペーシングロスが増大することであ
る。したがって、プラズマ重合膜のような中間層はでき
るだけ回避する必要がある。したがって本発明の目的
は、ダイヤモンド状保護膜の強磁性金属膜への密着性を
向上させることにより、磁気記録媒体のスチル特性等の
耐摩耗性を上げることにある。本発明の他の目的は、ダ
イヤモンド状保護膜の柔軟性を向上してスチル特性等の
耐摩耗性を上げることにある。However, when the diamond-like carbons described in these documents were examined, it was found that those described in JP-A-2-132623 have a hydrogen concentration of 3 at% or less in the carbon film. Yes, and JP-A-3
No. 224132 has a hydrogen concentration of 15 at% ( 7.5 mol%) or less in the carbon film, and is brittle because it is a hard film having relatively high crystallinity. However, it was found that the wear resistance was not sufficient. In order to improve adhesion to the ferromagnetic metal film, it has been conventionally proposed to pretreat the surface of the ferromagnetic metal film before forming the diamond-like protective film. For example, JP-A-3-114132
JP-A-4-10214 and JP-A-4-44.
No. 636 proposes forming a plasma polymerized film by plasma polymerizing a lower hydrocarbon such as methane or ethane or a hydrocarbon containing fluorine on the surface of the ferromagnetic metal film. However, as shown in the comparative example, sufficient durability cannot be obtained by interposing a plasma film.
Another important problem is that the inclusion of the plasma-polymerized film increases the spacing loss as a result of adding the thickness of the plasma-polymerized film to the thickness of the diamond-shaped protective film. Therefore, it is necessary to avoid intermediate layers such as plasma-polymerized membranes as much as possible. Therefore, an object of the present invention is to improve wear resistance such as still characteristics of a magnetic recording medium by improving the adhesion of the diamond-like protective film to the ferromagnetic metal film. Another object of the present invention is to improve the flexibility of the diamond-like protective film and increase the abrasion resistance such as still characteristics.
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００５[Name of item to be corrected] 0005
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００５】本発明のダイヤモンド状保護膜は、例えば
特開平２−１３２６２３号等に記載されているグラファ
イトをターゲットとしＡｒ及びＨ２のグロー放電による
スパッタリング法、メタン、エタン、ブタン等の低分子
量炭化水素のプラズマ重合とか、これらのガスをグロー
放電でイオン化し、それを蒸着するイオン化蒸着法な
ど、従来公知の任意の方法を用い、条件を適正に制御す
ることにより製造できる。The diamond-like protective film of the present invention is a sputtering method by glow discharge of Ar and H 2 targeting graphite described in, for example, JP-A-2-132623, and low molecular weight carbonization of methane, ethane, butane and the like. It can be produced by appropriately controlling the conditions by using any conventionally known method such as plasma polymerization of hydrogen or ionization deposition method of ionizing these gases by glow discharge and depositing them.
【手続補正３】[Procedure 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１７[Correction target item name] 0017
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１７】[0017]
【表１】 [Table 1]
Claims (3)
した磁気記録媒体において、前記強磁性金属膜の表面に
水素ガスによるプラズマ処理を施し、その上にダイヤモ
ンド状保護膜を形成したことを特徴とする、磁気記録媒
体。1. A magnetic recording medium having a ferromagnetic metal film formed on the surface of a non-magnetic substrate, wherein the surface of the ferromagnetic metal film is plasma-treated with hydrogen gas and a diamond-like protective film is formed thereon. A magnetic recording medium characterized by:
０ａｔ％と水素が３０〜４０ａｔ％である請求項１に記
載の磁気記録媒体。2. The diamond-like protective film contains 60 to 7 carbon.
The magnetic recording medium according to claim 1, wherein 0 at% and hydrogen are 30 to 40 at%.
を設けたことを特徴とする、請求項１または２に記載の
磁気記録媒体。3. The magnetic recording medium according to claim 1, further comprising a lubricating layer provided on the diamond-like protective film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31264092A JPH06139560A (en) | 1992-10-29 | 1992-10-29 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31264092A JPH06139560A (en) | 1992-10-29 | 1992-10-29 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06139560A true JPH06139560A (en) | 1994-05-20 |
Family
ID=18031645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31264092A Pending JPH06139560A (en) | 1992-10-29 | 1992-10-29 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06139560A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5858477A (en) * | 1996-12-10 | 1999-01-12 | Akashic Memories Corporation | Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon |
| US6171674B1 (en) * | 1993-07-20 | 2001-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Hard carbon coating for magnetic recording medium |
| WO2015197047A1 (en) | 2014-06-26 | 2015-12-30 | Friedrich-Schiller-Universität Jena | Atomic carbon source |
-
1992
- 1992-10-29 JP JP31264092A patent/JPH06139560A/en active Pending
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6468617B1 (en) | 1993-07-20 | 2002-10-22 | Semiconductor Energy Laboratory Co., Ltd. | Apparatus for fabricating coating and method of fabricating the coating |
| US6171674B1 (en) * | 1993-07-20 | 2001-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Hard carbon coating for magnetic recording medium |
| US6183816B1 (en) * | 1993-07-20 | 2001-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating the coating |
| US6805891B2 (en) | 1996-05-31 | 2004-10-19 | United Mobile Corporation | Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production |
| US6544627B1 (en) | 1996-05-31 | 2003-04-08 | United Modular Corporation | Method of producing recording media having protective overcoats of highly tetrahedral amorphous carbon |
| US6740384B2 (en) | 1996-05-31 | 2004-05-25 | Vijayen Veerasamy | Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production |
| US7402350B2 (en) | 1996-05-31 | 2008-07-22 | Stormedia Texas, Llc | Highly tetrahedral amorphous carbon coatings and systems and methods for their production |
| US7513215B2 (en) | 1996-05-31 | 2009-04-07 | Stormedia Texas, Llc | Systems and methods for the production of highly tetrahedral amorphous carbon coatings |
| US7544397B2 (en) | 1996-05-31 | 2009-06-09 | Stormedia Texas, Llc | Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production |
| US7604881B2 (en) | 1996-05-31 | 2009-10-20 | Stormedia Texas, Llc | Highly tetrahedral amorphous carbon coatings and systems and methods for their production |
| US7931748B2 (en) | 1996-05-31 | 2011-04-26 | Stormedia Texas, Llc | Systems and methods for the production of highly tetrahedral amorphous carbon coatings |
| US5858477A (en) * | 1996-12-10 | 1999-01-12 | Akashic Memories Corporation | Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon |
| WO2015197047A1 (en) | 2014-06-26 | 2015-12-30 | Friedrich-Schiller-Universität Jena | Atomic carbon source |
| DE102014009755A1 (en) | 2014-06-26 | 2015-12-31 | Friedrich-Schiller-Universität Jena | Atomic carbon source |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5227211A (en) | Magnetic recording disk medium comprising a magnetic thin film and a carbon overcoat having surface nitrogen atoms, a specified carbon structure, and oxygen atoms | |
| EP0293662B1 (en) | A process for making a thin film metal alloy magnetic recording disk with a hydrogenated carbon overcoat | |
| JPH09500932A (en) | Support with high carbon coating | |
| JPS59160828A (en) | Magnetic recording medium | |
| US5798135A (en) | Method for producing a magnetic recording medium having a carbon protective layer | |
| US6613422B1 (en) | Nitrogen -implanted, high carbon density overcoats for recording media | |
| Bhatia et al. | Ultra-thin overcoats for the head/disk interface tribology | |
| JPH06139560A (en) | Magnetic recording medium | |
| JPH06139559A (en) | Magnetic recording medium | |
| JP2761859B2 (en) | Magnetic recording media | |
| US5922415A (en) | Lubrication of magnetic disk storage media | |
| JPH0533456B2 (en) | ||
| JPH0223926B2 (en) | ||
| US6586086B1 (en) | Magnetic recording medium and making method | |
| JPH06139558A (en) | Magnetic recording medium | |
| JPH01320622A (en) | Magnetic recording medium | |
| JP2577924B2 (en) | Magnetic recording media | |
| JP3108156B2 (en) | Magnetic recording medium and method of manufacturing the same | |
| JPH0262888B2 (en) | ||
| JPH01263912A (en) | Magnetic recording medium | |
| JP2513688B2 (en) | Magnetic recording media | |
| JPH07153064A (en) | Magnetic recording medium and its manufacture | |
| JPS62192919A (en) | Production of magnetic recording medium | |
| JPH06259754A (en) | Magnetic recording medium and its production | |
| JPS63234408A (en) | Magnetic recording medium |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20020709 |