JPH0590347U - Insulation thin film hardness measuring device - Google Patents

Abstract

(57) [Abstract] [Purpose] The present invention is an insulating thin film hardness measuring device that digitizes the hardness of an insulating thin film. [Structure] A device under test A in which an insulating film 4 is coated on a conductive film 3
The air cylinder 7 is arranged substantially vertically on the stage 1 on which the load cell 5 is mounted, the load cell 5 is attached to the lower end of the rod 72 of the air cylinder 7, and the conductive needle 6 is attached substantially vertically to the load cell 5. The load cell 5, the conductive needle 6 and the conductive film 3 are connected to the detector 8, the conductive needle 6 is erected on the insulating film 4 and a load is applied to the conductive film 3 and the conductive needle 6. A signal is detected to detect the breaking point of the film by the detector 8, and the withstand load of the film is measured.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an insulating thin film hardness measuring device generally used for thin film products.

[0002]

[Prior Art]

 In the conventional measurement of hardness of an insulating thin film, the hardness is evaluated by rubbing the insulating film applied and formed on a substrate with a cutter or the like and scratching.

[0003]

[Problems to be solved by the device]

 However, in the above-mentioned conventional technique, the hardness of the insulating film is measured depending on the feeling of the measurer, and therefore, there is a problem in that there are individual differences in the measurement.

Further, there is a problem that the hardness evaluation cannot be quantified because it cannot be quantitatively measured.

Therefore, the present invention has been devised in view of the problems of the above-mentioned conventional techniques, and an object thereof is to provide a hardness measuring device for an insulating thin film that digitizes the hardness of the insulating film.

[0006]

[Means for Solving the Problems]

 In order to achieve the above object, in the insulating thin film hardness measuring apparatus according to the present invention, an air cylinder is arranged substantially vertically on a stage on which an object to be measured having an electrically conductive film coated with an insulating film is placed. A load cell is attached to the lower end of the rod of the air cylinder, and a conductive needle is attached almost vertically to the load cell, and the load cell, the conductive needle, and the conductive film are connected to a detector, and the conductive needle is attached. The insulating film is erected and applied with a load, the electric signal between the conductive film and the conductive needle is detected, the breaking point of the film is detected by a detector, and the withstand load of the film is measured.

[0007]

[Action]

 After placing the object to be measured on the stage, operate the rod of the air cylinder to gradually lower the conductive needle, and then push the needle against the thin film and apply a load to the needle by the air pressure. go.

At this time, an electric signal is applied between the needle tip of the conductive needle and the conductive portion under the insulating film, and when the insulating film is broken by the needle, It contacts the conductive part and a signal flows between them. This is detected by the detector and the load applied to the load cell (tip of the conductive needle) at that time is measured.

[0009]

【Example】

 An example will be described with reference to FIG. 1. An object to be measured A is a metal plate of Al, Fe, or the like, or a surface of a conductive film (ITO or the like) 3 on a glass substrate 2 coated with an insulating film 4. ing.

An air cylinder 7 that operates by supplying air 71 substantially vertically is installed on the stage 1 on which the object to be measured A is placed, and a lower end of a rod 72 of the air cylinder 7 is a load cell (load cell). ) 5 is installed.

Further, a metal conductive needle 6 having a needle tip of about 0.1 mmφ is attached to the load cell 5 almost vertically.

The detector 8 is connected to each of the load cell 5, the conductive needle 6 and the conductive film 3, and detects an electric signal between the conductive film 3 and the conductive needle 6 to detect the insulating film 4. The breaking point is detected and the withstand load of the film is measured.

That is, an electric signal is placed between the needle tip of the conductive needle 6 and the conductive portion under the insulating film 4, and when the insulating thin film 4 is broken by the needle, it is insulated from the needle 6. The load is applied to the load cell 5 (needle tip of the conductive needle 6) at that time by detecting a signal flowing between the conductive portion under the membrane 4 and the conductive portion.

[0014]

[Effect of the device]

 Since the present invention is configured as described above, it is possible to quantify by mechanically quantitatively measuring the hardness that was conventionally measured by the measurer. Therefore, the hardness of the insulating thin film can be mechanically measured.

Further, since the measurement of the insulating film can be quantitatively performed and can be converted into a numerical value, it is possible to solve the problem of individual difference of the measurer, and it is possible to perform uniform measurement.

[Brief description of drawings]

FIG. 1 is a schematic view of the device of the present invention.

[Explanation of sign]

 1 Stage 3 Conductive Film 4 Insulating Film 5 Load Cell 6 Conductive Needle 7 Air Cylinder 72 Rod 8 Detector A Measured Object

Claims (1)

[Scope of utility model registration request] 1. An air cylinder is disposed substantially vertically on a stage on which an object to be measured having an electrically conductive film coated with an insulating film is placed, and a load cell is attached to the lower end of the rod of the air cylinder and the load cell Attach a conductive needle almost vertically, and connect the load cell, the conductive needle, and the conductive film to a detector, and set the conductive needle on the insulating film to apply a load to the conductive film and the conductive needle. An insulation film hardness measuring device, which detects an electric signal of the film, detects a breaking point of the film with a detector, and measures a withstand load of the film.