JPH0555319A - Socket for ic - Google Patents

Socket for ic

Info

Publication number
JPH0555319A
JPH0555319A JP3212572A JP21257291A JPH0555319A JP H0555319 A JPH0555319 A JP H0555319A JP 3212572 A JP3212572 A JP 3212572A JP 21257291 A JP21257291 A JP 21257291A JP H0555319 A JPH0555319 A JP H0555319A
Authority
JP
Japan
Prior art keywords
wire
liquid metal
main body
socket
crosstalk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3212572A
Other languages
Japanese (ja)
Inventor
Kazuhiro Kageyama
和浩 影山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Ibaraki Ltd
Original Assignee
NEC Ibaraki Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Ibaraki Ltd filed Critical NEC Ibaraki Ltd
Priority to JP3212572A priority Critical patent/JPH0555319A/en
Publication of JPH0555319A publication Critical patent/JPH0555319A/en
Pending legal-status Critical Current

Links

Landscapes

  • Connecting Device With Holders (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To cut off the effect of the crosstalk of the signal between each of wire ropes and the noise of a power source by a method wherein the liquid metal, poured into the hollow part inside the main body block, is electrically insulated from the wire ropes by having the outer circumference of the center part of the wire ropes coated by an insulating coating, and the liquid metal is grounded. CONSTITUTION:The soldering part 7 of the lower end part of wire probes 3 is soldered to a printed substrate 5. Also, liquid metal 2 is earthed together with an earthing wiring pattern provided on the printed substrate 5 through the intermediary of the main body blocks 1, formed by conductive material, and mounting screws 10. In the IC socket constituted as above, pin parts 3a can be brought into contact with bumps 4a by the prescribed pressure. Besides, the effect of the crosstalk of signal between each of the wire probes can be shut off.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ICの製造過程におい
て実施する電気試験のとき、装置やバーンインテスト等
において使用するためのIC用ソケットに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an IC socket for use in an apparatus, a burn-in test, etc., during an electrical test carried out in the IC manufacturing process.

【0002】[0002]

【従来の技術】集積回路(IC)は、各種のタイプのも
のが製造されており、それらに対応して、それぞれのタ
イプのICに適合するIC用ソケットが実用されている
が、そのうちの一つとして、一つの面に多数のバンプを
高密度に設けたIC用のソケットとして、ワイヤプロー
ブピンを有するIC用ソケットがある。
2. Description of the Related Art Various types of integrated circuits (ICs) have been manufactured, and correspondingly, IC sockets suitable for the respective types of ICs have been put into practical use. As one example, there is an IC socket having a wire probe pin as an IC socket in which a large number of bumps are densely provided on one surface.

【0003】この形式の従来のIC用ソケットは、IC
を装着する本体部に複数個のワイヤプローブが設けられ
ており、各ワイヤプローブは、ICに設けてある複数個
のバンプのそれぞれにピン部(ワイヤプローブピン)が
接触するように配設されている。
A conventional IC socket of this type is an IC
A plurality of wire probes are provided on the main body part on which each of the wire probes is mounted, and each wire probe is arranged so that the pin part (wire probe pin) comes into contact with each of the plurality of bumps provided on the IC. There is.

【0004】このように、ワイヤプローブは、IC用ソ
ケットの本体部に保持されているが、そのピン部のIC
のバンプに対する接触圧力を、ワイヤプローブ自身の撓
みによるばね力によって得る構成となっているため、本
体部は、ワイヤプローブが撓むことができるように、内
部が中空となっている。
As described above, the wire probe is held in the main body of the IC socket, and the IC of the pin portion is held.
Since the contact pressure to the bump is obtained by the spring force due to the bending of the wire probe itself, the inside of the main body is hollow so that the wire probe can bend.

【0005】[0005]

【発明が解決しようとする課題】上述したようなワイヤ
プローブピンを有する従来のIC用ソケットは、電気的
ノイズやクロストークに関して問題がある。
The conventional IC socket having the wire probe pin as described above has a problem with respect to electrical noise and crosstalk.

【0006】すなわち、上述のように、ワイヤプローブ
を保持する本体部の内部が中空となっているため、電気
的ノイズの影響を受け易く、特にワイヤプローブの長さ
が長くなる程、高周波のノイズに対して弱くなり、ワイ
ヤプローブ相互間における信号のクロストークや電源ノ
イズの影響を受け易くなる。このため、高速のICは、
電気試験を行うのが困難である。
That is, as described above, since the inside of the main body for holding the wire probe is hollow, it is easily affected by electrical noise. In particular, the longer the wire probe is, the higher the noise of high frequency becomes. And becomes susceptible to signal crosstalk and power supply noise between wire probes. Therefore, high-speed IC
Difficult to make electrical tests.

【0007】[0007]

【課題を解決するための手段】本発明のIC用ソケット
は、電気導体で形成され中央部を絶縁被覆された複数個
のワイヤプローブと、前記複数個のワイヤプローブを保
持し内部が中空となっている本体部と、前記本体部の中
空の内部に注入されて接地されている液体金属とを備え
ている。
SUMMARY OF THE INVENTION An IC socket according to the present invention has a plurality of wire probes formed of an electric conductor and having a central portion insulated and coated, and a hollow interior for holding the plurality of wire probes. And a liquid metal that is injected into the hollow interior of the body and grounded.

【0008】[0008]

【実施例】次に、本発明の実施例について図面を参照し
て説明する。
Embodiments of the present invention will now be described with reference to the drawings.

【0009】図1は本発明の一実施例を示す断面図、図
2は図1の実施例の主要部を拡大して示した断面図であ
る。
FIG. 1 is a sectional view showing an embodiment of the present invention, and FIG. 2 is an enlarged sectional view showing a main part of the embodiment shown in FIG.

【0010】図1および図2において、IC用ソケット
の本体部(本体ブロック)1は、内部が中空となってお
り、この中空部に液体金属2が注入されている。液体金
属2は、電気的に接地されている。本体ブロック1はま
た、複数個のワイヤプローブ3を保持している。ワイヤ
プローブ3は、中央部の外周を絶縁被覆3bによって被
覆されており、これによって液体金属2と電気的に絶縁
されている。
In FIGS. 1 and 2, a main body (main body block) 1 of an IC socket has a hollow inside, and a liquid metal 2 is injected into this hollow portion. The liquid metal 2 is electrically grounded. The body block 1 also holds a plurality of wire probes 3. The wire probe 3 is covered at its outer periphery at the center with an insulating coating 3b, and is electrically insulated from the liquid metal 2 by this.

【0011】本体ブロック1の上面には、被試験体のI
C4を載置するためのガイドブロック6が設けられてお
り、このガイドブロック6の側面を案内としてその上に
載置されたIC4は、カバー板8を介して押え部材9に
よって保持される。IC4の下面には、入出力信号およ
び電源を接続するための複数個のバンプ4aが設けられ
ており、これらは、ガイドブロック6の所定の位置に設
けられている案内穴を貫通して延長しているワイヤプロ
ーブ3の頂部のピン部3aと接触し、ワイヤプローブ3
の下端部のリード部3dを介して、本体ブロック1を搭
載して取付けねじ10によって固定しているプリント基
板5の配線パターンと接続している。
On the upper surface of the main body block 1, the I
A guide block 6 for mounting the C4 is provided, and the IC 4 mounted on the guide block 6 with the side surface of the guide block 6 as a guide is held by the pressing member 9 via the cover plate 8. The lower surface of the IC 4 is provided with a plurality of bumps 4a for connecting an input / output signal and a power source. These bumps 4a extend through a guide hole provided at a predetermined position of the guide block 6. Contacting the top pin portion 3a of the wire probe 3
The main body block 1 is connected to the wiring pattern of the printed circuit board 5, which is fixed by the mounting screw 10, via the lead portion 3d at the lower end of the.

【0012】ワイヤプローブ3は、下端部のはんだ付け
部7をプリント基板5にはんだ付けされており、ピン部
3aがIC4のバンプ4aに接触したとき、中央部のた
わみ部3cにおいて撓み、それによる弾性力によってバ
ンプ4aに対する接触圧力を発生している。
In the wire probe 3, the soldering portion 7 at the lower end portion is soldered to the printed circuit board 5, and when the pin portion 3a comes into contact with the bump 4a of the IC 4, the bending portion 3c at the central portion bends, which causes The elastic force generates a contact pressure on the bump 4a.

【0013】液体金属2は、導電性材料で形成されてい
る本体ブロック1および取付けねじ10を介してプリン
ト基板5に設けてある接地用配線パターンと接続されて
いる。
The liquid metal 2 is connected to a ground wiring pattern provided on the printed circuit board 5 through a body block 1 made of a conductive material and a mounting screw 10.

【0014】このように構成したIC用ソケットは、I
C4を搭載して固定したとき、ワイヤプローブ3が本体
ブロック1のなかで自由に撓むことができるため、ピン
部3aをIC4のバンプ4aに所定の圧力で接触させる
ことができ、しかも、ワイヤプローブ3の中央部が絶縁
被覆3bによって被覆されて液体金属2と電気的に絶縁
されているため、ワイヤプローブ相互間における信号の
クロストークや電源ノイズの影響を遮断することができ
る。従って高速のICの電気試験を行うことが可能とな
る。
The IC socket thus constructed is
When C4 is mounted and fixed, the wire probe 3 can freely bend in the main body block 1, so that the pin portion 3a can be brought into contact with the bump 4a of the IC 4 with a predetermined pressure, and the wire 4 Since the central portion of the probe 3 is covered with the insulating coating 3b and electrically insulated from the liquid metal 2, it is possible to block the influence of signal crosstalk and power supply noise between the wire probes. Therefore, it becomes possible to perform a high-speed electrical test of the IC.

【0015】[0015]

【発明の効果】以上説明したように、本発明のIC用ソ
ケットは、ワイヤプローブの中央部の外周を絶縁被覆に
よって被覆して本体ブロックの内部の中空部に注入した
液体金属と電気的に絶縁し、液体金属を接地することに
より、ワイヤプローブ相互間における信号のクロストー
クや電源ノイズの影響を遮断することができるという効
果があり、従って高速のICの電気試験を行うことが可
能となるという効果がある。
As described above, the IC socket of the present invention is electrically insulated from the liquid metal injected into the hollow portion inside the body block by covering the outer periphery of the central portion of the wire probe with an insulating coating. However, by grounding the liquid metal, there is an effect that the crosstalk of signals between the wire probes and the influence of power source noise can be blocked, and therefore, it is possible to perform a high-speed electrical test of the IC. effective.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す断面図である。FIG. 1 is a sectional view showing an embodiment of the present invention.

【図2】図1の実施例の主要部を拡大して示した断面図
である。
FIG. 2 is a cross-sectional view showing an enlarged main part of the embodiment of FIG.

【符号の説明】[Explanation of symbols]

1 本体ブロック 2 液体金属 3 ワイヤプローブ 3a ピン部 3b 絶縁被覆 3c たわみ部 3d リード部 4 IC 4a バンプ 5 プリント基板 6 ガイドブロック 7 はんだ付け部 8 カバー板 9 押え部材 10 取付けねじ 1 Main body block 2 Liquid metal 3 Wire probe 3a Pin part 3b Insulation coating 3c Deflection part 3d Lead part 4 IC 4a Bump 5 Printed circuit board 6 Guide block 7 Soldering part 8 Cover plate 9 Holding member 10 Mounting screw

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 電気導体で形成され中央部を絶縁被覆さ
れた複数個のワイヤプローブと、前記複数個のワイヤプ
ローブを保持し内部が中空となっている本体部と、前記
本体部の中空の内部に注入されて接地されている液体金
属とを備えることを特徴とするIC用ソケット。
1. A plurality of wire probes formed of an electric conductor and having a central portion insulated and coated, a main body portion that holds the plurality of wire probes and has a hollow interior, and a hollow body portion of the main body portion. An IC socket, comprising: a liquid metal injected into the interior and grounded.
JP3212572A 1991-08-26 1991-08-26 Socket for ic Pending JPH0555319A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3212572A JPH0555319A (en) 1991-08-26 1991-08-26 Socket for ic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3212572A JPH0555319A (en) 1991-08-26 1991-08-26 Socket for ic

Publications (1)

Publication Number Publication Date
JPH0555319A true JPH0555319A (en) 1993-03-05

Family

ID=16624925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3212572A Pending JPH0555319A (en) 1991-08-26 1991-08-26 Socket for ic

Country Status (1)

Country Link
JP (1) JPH0555319A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0896912A (en) * 1994-09-28 1996-04-12 Ngk Insulators Ltd Ic socket
US6452406B1 (en) 1996-09-13 2002-09-17 International Business Machines Corporation Probe structure having a plurality of discrete insulated probe tips
US6528984B2 (en) 1996-09-13 2003-03-04 Ibm Corporation Integrated compliant probe for wafer level test and burn-in
US7282945B1 (en) 1996-09-13 2007-10-16 International Business Machines Corporation Wafer scale high density probe assembly, apparatus for use thereof and methods of fabrication thereof
US7368924B2 (en) 1993-04-30 2008-05-06 International Business Machines Corporation Probe structure having a plurality of discrete insulated probe tips projecting from a support surface, apparatus for use thereof and methods of fabrication thereof
KR20160105620A (en) * 2015-02-27 2016-09-07 주식회사 오킨스전자 Test socket for semiconductor package

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7368924B2 (en) 1993-04-30 2008-05-06 International Business Machines Corporation Probe structure having a plurality of discrete insulated probe tips projecting from a support surface, apparatus for use thereof and methods of fabrication thereof
JPH0896912A (en) * 1994-09-28 1996-04-12 Ngk Insulators Ltd Ic socket
US6452406B1 (en) 1996-09-13 2002-09-17 International Business Machines Corporation Probe structure having a plurality of discrete insulated probe tips
US6528984B2 (en) 1996-09-13 2003-03-04 Ibm Corporation Integrated compliant probe for wafer level test and burn-in
US7282945B1 (en) 1996-09-13 2007-10-16 International Business Machines Corporation Wafer scale high density probe assembly, apparatus for use thereof and methods of fabrication thereof
KR20160105620A (en) * 2015-02-27 2016-09-07 주식회사 오킨스전자 Test socket for semiconductor package

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