JPH05340816A - Spectroscopic measuring instrument - Google Patents
Spectroscopic measuring instrumentInfo
- Publication number
- JPH05340816A JPH05340816A JP14751992A JP14751992A JPH05340816A JP H05340816 A JPH05340816 A JP H05340816A JP 14751992 A JP14751992 A JP 14751992A JP 14751992 A JP14751992 A JP 14751992A JP H05340816 A JPH05340816 A JP H05340816A
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- Prior art keywords
- integration
- time
- value
- integrated value
- integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】分光器の波長分散面上に、積分動
作をする一次元光検出器または、二次元光検出器を配置
して、分光測定を行なう分光測定装置に関し、特に測定
のダイナミックレンジを広げることに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spectroscopic measurement device for performing spectroscopic measurement by disposing a one-dimensional photodetector or a two-dimensional photodetector that performs an integral operation on a wavelength dispersion surface of the spectroscope, and particularly to a dynamic measurement Regarding expanding the range.
【０００２】[0002]
【従来の技術】飽和しない程度に十分短い時間の積分動
作を繰り返して行い、積分値を積算し、目標値に達する
までの積分回数を求め、積分回数と、積分値の総和とか
ら、測定値を求めていた。あるいは、飽和しない適当な
時間の積分動作を一定回数繰り返した後、その積分値を
積算して、測定値を求めていた。2. Description of the Related Art The integration operation is repeated for a time short enough not to saturate, the integrated values are integrated, the number of integrations until reaching a target value is obtained, and the measured value is calculated from the number of integrations and the sum of integrated values Was seeking. Alternatively, the integration operation is repeated a certain number of times without saturation, and then the integration values are integrated to obtain a measurement value.
【０００３】[0003]
【発明が解決しようとする課題】広いダイナミックレン
ジを得るために、飽和が起こらないように積分時間を十
分小さくするときには、積分動作を繰り返すことや、積
算した値が目標値よりも小さいことを確認することに、
積分時間と同等の多大な時間を要し、測定時間の増大を
もたらす。In order to obtain a wide dynamic range, when the integration time is made sufficiently small so that saturation does not occur, it is necessary to repeat the integration operation or confirm that the integrated value is smaller than the target value. To do
A large amount of time equivalent to the integration time is required, resulting in an increase in measurement time.
【０００４】ダイナミックレンジを一桁拡大するために
は、積分動作を十回繰り返すことが必要である。このた
め、三から四桁のダイナミックレンジの拡大を行なうこ
とは、積分回数の指数的な増加を伴い、測定時間の指数
的な増加を招き、ほとんど不可能であった。また、検出
器に入射する光が極めて弱い場合には、検出器から積分
値もきわめて小さく、積算する際に量子化誤差が発生す
るとともに、周囲からのノイズの影響が無視できなくな
り、ＳＮ比が悪くなった。In order to expand the dynamic range by one digit, it is necessary to repeat the integrating operation ten times. Therefore, it is almost impossible to expand the dynamic range by three to four digits, as the number of integration increases exponentially and the measurement time exponentially increases. Further, when the light incident on the detector is extremely weak, the integrated value from the detector is also very small, a quantization error occurs when integrating, and the influence of noise from the surroundings cannot be ignored, and the SN ratio is It got worse.
【０００５】[0005]
【課題を解決するための手段】異なる積分時間で積分動
作を行ない、飽和積分値よりも小さいものの中で最大の
ものを積分値として用い、積分時間が異なるものに付い
ては、積分時間に依って、換算を行ない、測定値とす
る。ダイナミックレンジを拡大するためには、積分時間
を一桁ずつ変えるのが効果的である。[Means for Solving the Problems] The integration operation is performed at different integration times, and the largest one of the values smaller than the saturation integration value is used as the integration value. Convert it to obtain the measured value. In order to expand the dynamic range, it is effective to change the integration time digit by digit.
【０００６】[0006]
【作用】 必要なダイナミックレンジの拡大に必要なだ
け、（回数ではなく）、積分時間を変化させる。また、
光が弱い場合には、積分時間の長い積分値を用いること
により積分値を大きくする。[Operation] The integration time is changed (not the number of times) as necessary to expand the required dynamic range. Also,
When the light is weak, the integral value is increased by using the integral value having a long integral time.
【０００７】[0007]
【実施例】以下実施例に基づき、詳細に説明する。図１
は、本発明を説明するブロック図である。分光器１の波
長分散面に配置された一次元光検出器２には、分光器１
内で分光された光が結像する。光検出器２上には、光を
検出する複数の素子が設けられている。分光器１内で分
光された光は、複数の素子上に、波長が異なるように入
射するように構成され、分光測定が行なわれる。本発明
による測定は、次のようにして行なわれる。Embodiments will be described in detail below based on embodiments. Figure 1
FIG. 3 is a block diagram illustrating the present invention. The one-dimensional photodetector 2 arranged on the wavelength dispersion surface of the spectroscope 1 includes the spectroscope 1
The light dispersed inside forms an image. A plurality of elements that detect light are provided on the photodetector 2. The light dispersed in the spectroscope 1 is configured to be incident on a plurality of elements with different wavelengths, and spectroscopic measurement is performed. The measurement according to the present invention is performed as follows.
【０００８】光検出器２としては、ＣＣＤ、ＣＩＤ（Ch
arge Injection Device)＋ＰＤＡ(Photo−Diode Array)
等の固体素子が用いられる。分光器１に測定される光を
入射させる。制御回路３はまず、０．０１秒だけ光検出
器２の積分動作を行なう。積分動作の後、各素子の積分
値を、記憶回路４に記憶する。続いて、制御回路３は、
０．１秒、１秒、１０秒、１００秒だけ光検出器２の積
分動作を順次行ない、各素子の各積分時間に対応した積
分値を、記憶回路４に記憶する。全ての積分動作が終了
したら、各素子毎に、予め測定してある、飽和積分値よ
りも小さい積分値の内で、最も大きな積分値を検出回路
５が検出する。検出された積分値を、積分時間を用い
て、単位積分時間当りの積分値に、換算回路６が換算し
測定値とする。As the photodetector 2, CCD, CID (Ch
arge Injection Device) ＋ PDA (Photo-Diode Array)
Solid-state devices such as The light to be measured is made incident on the spectroscope 1. The control circuit 3 first performs the integrating operation of the photodetector 2 for 0.01 seconds. After the integration operation, the integrated value of each element is stored in the storage circuit 4. Then, the control circuit 3
The integration operation of the photodetector 2 is sequentially performed for 0.1 seconds, 1 second, 10 seconds, and 100 seconds, and the integrated value corresponding to each integration time of each element is stored in the storage circuit 4. When all the integration operations are completed, the detection circuit 5 detects the largest integrated value of the integrated values smaller than the saturated integrated value, which is measured in advance for each element. Using the integration time, the detected integrated value is converted by the conversion circuit 6 into an integrated value per unit integration time to obtain a measured value.
【０００９】なお、光検出器２への入射光を積分時間に
基づいて時間的に制限するシャッター機構を設け、積分
時間のゲートとすることができる。以後、図示しない測
定回路に依って測定値が処理され、分光測定が実施され
る。表１に測定の例を示す。A shutter mechanism for temporally limiting the light incident on the photodetector 2 based on the integration time can be provided to serve as a gate for the integration time. After that, the measurement value is processed by the measurement circuit (not shown), and the spectroscopic measurement is performed. Table 1 shows an example of measurement.
【００１０】[0010]
【表１】 [Table 1]
【００１１】これは、素子を１０２４個並べた一次元光
検出器２の例である。各素子の飽和積分値は、１，００
０，０００である。縦の欄には各素子が順番に並べられ
ており、横の欄には各素子の時間による積分値である。
表１に示すように、０．０１秒から１００秒まで一桁ず
つ異なる積分時間で積分動作を行ない、各積分時間によ
る積分値が得られる。各素子毎に、飽和積分値よりも小
さいものの内で最も大きな積分値を枠で囲ってある。こ
の積分値を積分時間で割ったものを測定値とすると、測
定値は、単位時間当りの積分値となり、積分時間の大小
には無関係で、光の強弱に比例したものになる。This is an example of the one-dimensional photodetector 2 in which 1024 elements are arranged. The saturation integral value of each element is 1,00
It is 10,000. Each element is arranged in order in the vertical column, and the integrated value by time of each element is shown in the horizontal column.
As shown in Table 1, the integration operation is performed from 0.01 seconds to 100 seconds at different integration times by one digit, and the integrated value at each integration time is obtained. For each element, the largest integral value out of the saturated integral values is surrounded by a frame. If the measured value is obtained by dividing the integrated value by the integration time, the measured value becomes the integrated value per unit time, which is irrelevant to the magnitude of the integration time and is proportional to the intensity of light.
【００１２】表２は、表１によって得られた測定値であ
る。Table 2 shows the measured values obtained according to Table 1.
【００１３】[0013]
【表２】 [Table 2]
【００１４】これから、素子としてのダイナミックレン
ジは、０から１，０００，０００まで６桁であるが、測
定値のダイナミックレンジは、０．０１から１００，０
００，０００まで、１０桁であることがわかる。制御回
路３は、積分動作を積分時間が短いほうから順次行うよ
うに構成されるとともに、検出回路５は、積分動作の度
毎に積分値を検査し、光検出器２中の全ての素子の積分
値が飽和積分値を越えたら、制御回路３に終了信号を送
るように構成されるとともに、制御回路３は終了信号を
受けたら、測定を終了するように構成するようにしても
よい。From now on, the dynamic range of the element is 6 digits from 0 to 1,000,000, but the dynamic range of the measured value is from 0.01 to 100,0.
It can be seen that there are 10 digits up to 0,000. The control circuit 3 is configured to sequentially perform the integration operation from the one having a shorter integration time, and the detection circuit 5 inspects the integration value for each integration operation to detect all the elements in the photodetector 2. When the integrated value exceeds the saturation integrated value, the end signal may be sent to the control circuit 3, and the control circuit 3 may be configured to end the measurement when the end signal is received.
【００１５】また、制御回路３は、積分動作を積分時間
が短いほうから順次行うように構成されるとともに、検
出回路５は、最初の積分値を検査し、各素子の中で最小
の値を与える素子の積分値が、飽和積分値を越える時間
（飽和時間）を算出し、飽和時間を制御回路３に送るよ
うに構成されるとともに、制御回路３は飽和時間よりも
小さい範囲の積分時間でのみ積分動作を行うように構成
することも可能である。Further, the control circuit 3 is configured to sequentially perform the integration operation from the one having a shorter integration time, and the detection circuit 5 inspects the first integration value to determine the minimum value among the elements. The integrated value of the given element is configured to calculate a time (saturation time) exceeding the saturation integrated value and send the saturation time to the control circuit 3, and the control circuit 3 has an integration time within a range smaller than the saturation time. It is also possible to configure so that only the integration operation is performed.
【００１６】これと同様のことは、０．０１秒の積分動
作を１０，０００回繰り返すことに依っても達成できる
が、その場合には、次のような障害が発生する。 (1) 積分値の、記憶や積算や目標値との大小の比較など
の処理に０．００１秒から０．０１秒程度の時間がかか
るため、測定に時間がかかる。 (2) 光強度が小さい場合には、積分値が小さいため、デ
ジタル値に変換する場合の量子化誤差が発生する。ま
た、積分値を送る際に周囲からのノイズを受け易い（こ
うしたノイズは、単位時間当りの積分値に関係なく一定
であると考えられる）。このため、一度に長い積分時間
の積分動作をすることに依るＳＮ比の改善が少ない。The same thing as this can be achieved by repeating the integration operation for 0.01 seconds 10,000 times, but in that case, the following obstacles occur. (1) Since it takes about 0.001 seconds to 0.01 seconds to perform processing such as storage of the integrated value, integration, and comparison with the target value, the measurement takes time. (2) When the light intensity is small, the integration value is small, so a quantization error occurs when converting to a digital value. Also, when sending the integrated value, it is susceptible to noise from the surroundings (such noise is considered to be constant regardless of the integrated value per unit time). Therefore, there is little improvement in the SN ratio due to the integration operation having a long integration time at a time.
【００１７】従って、本発明による装置に依れば、測定
時間の増加なしに、ダイナミックレンジの拡大と、ＳＮ
比の改善が実施できる。なお、この実施例では、積分時
間を一桁ずつ違えたが、１、２、５、１０のように、対
数目盛りに近い時間ずつ違えて実施すると、より細かく
ダイナミックレンジを拡大できる。また、２桁ずつ違え
て実施すると、より短い測定時間で、より大きくダイナ
ミックレンジが拡大できる。Therefore, according to the device of the present invention, the dynamic range and SN can be increased without increasing the measurement time.
The ratio can be improved. In this embodiment, the integration time is varied by one digit, but if the integration time is varied by a time close to the logarithmic scale such as 1, 2, 5, 10, the dynamic range can be expanded more finely. Further, if the measurement is performed with two digits different, the dynamic range can be expanded more greatly in a shorter measurement time.
【００１８】また、積分時間で割ることに依って、単位
時間当りの積分値を測定値としたが、測定値を取り扱う
方法については、別のやり方も考えられる。例として
は、小数点を頭に持ってくるために、積分時間が最小の
ものに換算する方法や、整数にするために、積分時間が
最大のものに換算する方法がある。また、検出器の各素
子の飽和積分値は、同一としてあるが、現実には、各素
子毎に異なることも有り得る。その場合には、各素子毎
に飽和積分値を記憶しておく方法や、飽和積分値の最小
のものを全素子に適用する方法などが考えられる。Although the integrated value per unit time is used as the measured value by dividing by the integral time, another method can be considered as a method for handling the measured value. As an example, there is a method of converting the integral time to the smallest one to bring the decimal point to the head, and a method of converting the integral time to the largest one to make it an integer. Further, the saturation integral value of each element of the detector is the same, but in reality, it may be different for each element. In that case, a method of storing the saturation integral value for each element, a method of applying the one having the minimum saturation integral value to all the elements, and the like can be considered.
【００１９】なお、本実施例は光検出器２として、一次
元的に素子を配したものを用いたが、素子を２次元的に
配した光検出器２を用いることができる。この場合、分
光１により、分光された光を面構成した場合に有用であ
る。In this embodiment, as the photodetector 2, a one-dimensionally arranged element is used, but a two-dimensionally arranged photodetector can be used. In this case, it is useful in the case where the light split by the spectroscopy 1 is formed into a plane.
【００２０】[0020]
【発明の効果】必要なダイナミックレンジの拡大に必要
なだけ、積分回数ではなく、積分時間を変化させるの
で、積分回数が指数的に拡大することが無い。これに依
って、測定に必要な時間を短縮できる。また、光が弱い
場合には、積分時間の長い信号を用いることにより積分
値を大きくでき、量子化誤差や周囲からのノイズの影響
を受け難くすることに依って、ＳＮ比の低下を防ぐこと
ができる。The number of integrations is not exponentially expanded because not only the number of integrations but also the integration time is changed as necessary to expand the required dynamic range. As a result, the time required for measurement can be shortened. Further, when the light is weak, the integration value can be increased by using a signal with a long integration time, and the reduction of the SN ratio is prevented by making it less susceptible to the effects of quantization error and noise from the surroundings. You can
【図１】本発明の実施例のブロック図である。FIG. 1 is a block diagram of an embodiment of the present invention.
１ 分光器 ２ 一次元光検出器 ３ 制御回路 ４ 記憶回路 ５ 検出回路 ６ 換算回路 1 spectroscope 2 one-dimensional photodetector 3 control circuit 4 storage circuit 5 detection circuit 6 conversion circuit
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成５年７月２６日[Submission date] July 26, 1993
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００８[Correction target item name] 0008
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００８】光検出器２としては、ＣＣＤ、ＣＩＤ（Ch
arge Injection Device)、ＰＤＡ(Photo−Diode Array)
等の固体素子が用いられる。分光器１に測定される光を
入射させる。制御回路３はまず、０．０１秒だけ光検出
器２の積分動作を行なう。積分動作の後、各素子の積分
値を、記憶回路４に記憶する。続いて、制御回路３は、
０．１秒、１秒、１０秒、１００秒だけ光検出器２の積
分動作を順次行ない、各素子の各積分時間に対応した積
分値を、記憶回路４に記憶する。全ての積分動作が終了
したら、各素子毎に、予め測定してある、飽和積分値よ
りも小さい積分値の内で、最も大きな積分値を検出回路
５が検出する。検出された積分値を、積分時間を用い
て、単位積分時間当りの積分値に、換算回路６が換算し
測定値とする。As the photodetector 2, CCD, CID (Ch
arge Injection Device) , PDA (Photo-Diode Array)
Solid-state devices such as The light to be measured is made incident on the spectroscope 1. The control circuit 3 first performs the integrating operation of the photodetector 2 for 0.01 seconds. After the integration operation, the integrated value of each element is stored in the storage circuit 4. Then, the control circuit 3
The integration operation of the photodetector 2 is sequentially performed for 0.1 seconds, 1 second, 10 seconds, and 100 seconds, and the integrated value corresponding to each integration time of each element is stored in the storage circuit 4. When all the integration operations are completed, the detection circuit 5 detects the largest integrated value of the integrated values smaller than the saturated integrated value, which is measured in advance for each element. Using the integration time, the detected integrated value is converted by the conversion circuit 6 into an integrated value per unit integration time to obtain a measured value.
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１９[Name of item to be corrected] 0019
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１９】なお、本実施例は光検出器２として、一次
元的に素子を配したものを用いたが、素子を２次元的に
配した光検出器２を用いることができる。この場合に
は、分光１として分光した光を２次元に分散させる分光
器を用いる。２次元に分散させる分光器としては、エシ
ェール回折格子とプリズムを組み合わせたものがよく知
られているがエシェール回折格子と回折格子を組み合わ
せてせよい。 In this embodiment, as the photodetector 2, a one-dimensionally arranged element is used, but a two-dimensionally arranged photodetector can be used. In this case
Is a spectrum that disperses the light split as spectrum 1 in two dimensions.
Use a bowl. As a spectroscope that disperses two-dimensionally,
Well-known is a combination of a diffraction grating and a prism.
However, it is a combination of an escher diffraction grating and a diffraction grating.
You can let me.
Claims (3)
元光検出器を配置した分光器と、積分動作を異なる複数
の積分時間について行うように制御する制御回路と、検
出器上の各素子の複数の積分時間に付いて得られた、複
数の積分値を記憶する記憶回路と、前記複数の積分値の
うち、素子が飽和する積分値（飽和積分値）を越えない
範囲で最大の積分値を検出する検出回路と、前記素子が
飽和積分値を越えない範囲で最大の積分値を最大の積分
値を得た積分時間で換算した値を、その素子の測定値と
する換算回路とを、設けたことを特徴とする分光測定装
置。1. A spectroscope in which a one-dimensional photodetector for performing an integration operation is arranged on a wavelength dispersion surface, a control circuit for controlling the integration operation to be performed for a plurality of different integration times, and each of the detectors. A storage circuit that stores a plurality of integrated values obtained for a plurality of integration times of the element, and a maximum value within a range that does not exceed an integration value (saturation integration value) at which the element saturates among the plurality of integration values. A detection circuit for detecting an integrated value, and a conversion circuit for converting the maximum integrated value within the range in which the element does not exceed the saturation integrated value by the integration time at which the maximum integrated value is obtained, as a measured value of the element. A spectroscopic measurement device comprising:
間が短いほうから順次行なうように構成されるととも
に、前記検出回路は、積分動作の度毎に積分値を検査
し、検出器中の全ての素子の積分値が飽和積分値を越え
たら、前記制御回路に終了信号を送るように構成される
とともに、前記制御回路は、前記終了信号を受けたら、
測定を終了するように構成されたことを特徴とする請求
項１に記載の分光測定装置。2. The control circuit is configured to sequentially perform the integration operation from the shorter integration time, and the detection circuit inspects the integrated value each time the integration operation is performed, When the integrated value of all the elements exceeds the saturated integrated value, it is configured to send an end signal to the control circuit, and the control circuit receives the end signal,
The spectroscopic measurement device according to claim 1, wherein the spectroscopic measurement device is configured to terminate the measurement.
間が短いほうから順次行なうように構成されるととも
に、前記検出回路は、最初の積分値を検査し、各素子の
中で最小の値を与える素子の積分値が、飽和積分値を越
える時間（飽和時間）を算出し、飽和時間を、前記制御
回路に送るように構成されるとともに、前記制御回路
は、飽和時間よりも小さい範囲の積分時間でのみ積分動
作を行なうように構成されたことを特徴とする請求項１
に記載の分光測定装置。3. The control circuit is configured to sequentially perform the integration operation from a shorter integration time, and the detection circuit inspects an initial integration value to determine a minimum value among the elements. Is calculated so that the integrated value of the element that gives the saturated value exceeds the saturation integrated value (saturation time), and the saturation time is sent to the control circuit. 2. An integration operation is performed only during an integration time.
The spectroscopic measurement device described in 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14751992A JP3396237B2 (en) | 1992-06-08 | 1992-06-08 | Spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14751992A JP3396237B2 (en) | 1992-06-08 | 1992-06-08 | Spectrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05340816A true JPH05340816A (en) | 1993-12-24 |
| JP3396237B2 JP3396237B2 (en) | 2003-04-14 |
Family
ID=15432168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14751992A Expired - Fee Related JP3396237B2 (en) | 1992-06-08 | 1992-06-08 | Spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3396237B2 (en) |
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| JP2003523510A (en) * | 2000-02-15 | 2003-08-05 | ベアリアン・オーストラリア・プロプライエタリー・リミテッド | Method and apparatus for spectroscopic analysis |
| US7550703B2 (en) * | 1999-01-25 | 2009-06-23 | Gentex Corporation | Apparatus including at least one light sensor with an input pin for receiving an integration period signal |
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-
1992
- 1992-06-08 JP JP14751992A patent/JP3396237B2/en not_active Expired - Fee Related
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| JP2003523510A (en) * | 2000-02-15 | 2003-08-05 | ベアリアン・オーストラリア・プロプライエタリー・リミテッド | Method and apparatus for spectroscopic analysis |
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| US9207116B2 (en) | 2013-02-12 | 2015-12-08 | Gentex Corporation | Light sensor |
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| Publication number | Publication date |
|---|---|
| JP3396237B2 (en) | 2003-04-14 |
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