JPH0525166B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of the Invention] The present invention relates to an automatic original changing device, and more particularly to an automatic original changing device for automatically changing originals such as photomasks or reticles used in semiconductor printing equipment.

[Background of the invention]

Conventionally, in semiconductor printing equipment, loading or replacing the master plate (photomask or reticle) necessary for each process has been done manually, and for this reason, there is a limit to preventing dust from adhering to the master plate. It was hot. Therefore, in order to prevent dust from adhering to the original as much as possible, various devices have been proposed that automatically load or replace the original without the need for human intervention, which is the source of dust.
60-5521 etc.).

Incidentally, in this type of apparatus, cassettes containing originals are generally stacked on a shelf-like carrier, and the originals necessary for exposure are taken out from the carrier position and transported to the printing exposure position. For this reason, in such conventional devices,
The process of taking out the original required for exposure from the cassette and transporting it to the printing exposure position is relatively long, and there is a disadvantage that dust often adheres to the original during this time.

[Purpose of the invention]

In view of the above-mentioned problems with the conventional type, an object of the present invention is to minimize the time that an original such as a reticle remains exposed in the air when exchanging an original, and to An object of the present invention is to provide an automatic original plate exchange device which avoids the adhesion of dust as much as possible.

[Explanation of Examples]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a schematic configuration of an automatic reticle exchange device according to an embodiment of the present invention. In the figure, 1 is a carrier loaded with a large number of cassettes containing reticles, and 2 is a cassette taken out of the carrier 1 by a fork 3 in a sealed state. Contains the reticle needed for exposure. The reticle is stored horizontally in the cassette 2, and the fork 3 is movable parallel to the reticle surface (in the direction of arrow E) and vertically.

A is the carrier position where the carrier 1 is placed, B is the elevator position where the removed cassette 2 moves up and down, and B' is the reticle take-out position where the reticle 4 is taken out from the cassette 2, which is the topmost step of the elevator position A. C is the printing exposure position.

Further, 2' is a cassette 2 that has been transported to a reticle take-out position B' by an elevator (not shown). 2a' is the top cover of cassette 2', 2b' is the side cover,
Reference numeral 4 denotes an arm of a lid removing mechanism which brings the cassette 2' into an unsealed state.Here, by sliding the upper lid 2a' in the direction of arrow F and removing it, the hermetic state of the cassette 2' is released. 5 is a reticle taken out from the cassette 2'.

Next, the operation of the automatic reticle exchange device having the above configuration will be explained.

When automatically changing the reticle, fork 3
First, the cassette 2 is moved parallel to the carrier 1 to the height where the cassette 2 containing the reticle necessary for the next exposure process is loaded, and then moved to the left of the arrow E to the lower side of the desired cassette 2. inserted into. This fork 3 then moves slightly upward to support the cassette 2, and in this state is pulled out to the right as indicated by arrow E. As a result, the cassette 2 is taken out from the carrier position A to the elevator position B. Subsequently, the elevator goes up, and the cassette 2 is transported to the reticle take-out position B' (cassette 2'). At this reticle extraction position B′,
The arm 4 is projected above the cassette 2', and then the tip of the arm 4 is lowered to catch a hook (not shown), which is a protrusion or recess provided on the upper lid 2a'.
The upper cover 2a' is removed by being engaged with and further pulled in the direction of arrow F. Next, the upper reticle ejecting mechanism (not shown) descends to remove the reticle 5.
is taken out by suction or grip, and delivered to a reticle set mechanism (not shown). This reticle setting mechanism transports the reticle 5 to the exposure position C and sets it.

After the printing exposure is completed, the reticle 5 follows the reverse route and is stored in the cassette 2, and this cassette 2 is further stored in the carrier 1.

In this way, move the reticle 5 from carrier 1 to cassette 2 to the top of the elevator.
By transporting the reticle 5 to B', compared to when the reticle 5 is taken out at the carrier position A, the time that the reticle 5 is alone in contact with the outside air is shortened, and there is a risk of dust adhering for that time. becomes smaller.

FIG. 2 shows a specific example of the cassette 2 used in the apparatus shown in FIG. In the figure, 21 is a cassette case, 22 is an upper lid, and 23 is the above-mentioned arm 4.
24 is a groove on which the upper cover 22 can slide freely in the direction perpendicular to the plane of the paper; 25 is a groove for hooking the arm 4 when the upper cover 22 is slid;
The stepped portion 26 for supporting the reticle 5 is a protrusion for holding the reticle 5 within the cassette 2.

FIG. 3 shows the structure of a cassette according to another embodiment of the invention. As shown in the figure, the side cover 27 may be attached so as to be openable/closed or removable, and the reticle 5 may be taken out from this side cover 27. In this case, for example, like the fork 3, the reticle ejecting mechanism is fed under the reticle 5 from the side lid 27 side, then rises slightly to lift the reticle 5, and then escapes from the cassette 2. Accordingly, the reticle 5 may be taken out. Third
In the illustrated example, the side cover 27 is attached to the cassette case 2.
It is attached so as to be slidable up and down along a groove 28 provided in the side wall of 1.

〔Effect of the invention〕

As described above, according to the present invention, when replacing the original, the original is transported from the carrier to the vicinity of the exposure position with the original housed in the cassette, so that the original remains exposed from the carrier and remains in the air. It is possible to significantly shorten the time and reduce the chances of dust adhering to the original plate.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing a schematic structure of an automatic reticle exchange device according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view showing a specific example of a cassette used in the device shown in FIG. , FIG. 3 is a longitudinal sectional view of a cassette according to another embodiment of the present invention. 1...Carrier, 2, 2'...Cassette, 2a', 2
1...Top lid, 2b', 27...Side cover, 3...Fork, 4
...Arm (lid removing mechanism), 5...Reticle, A...Carrier position, B...Elevator position, B'...Reticle extraction position, C...Printing exposure position.

Claims (1)

[Claims] 1. A means for taking out a desired cassette in a sealed state from a carrier loaded with cassettes containing originals in a substantially hermetically sealed state and conveying the same to an original delivery position set near the original setting position, and a means for maintaining the sealed state of the cassette. An automatic original exchange device comprising a release means and an original setting means for taking out the original stored in the cassette at the original delivery position and setting it at the original setting position.