JPH05199680A - Power supply - Google Patents
Power supplyInfo
- Publication number
- JPH05199680A JPH05199680A JP2739892A JP2739892A JPH05199680A JP H05199680 A JPH05199680 A JP H05199680A JP 2739892 A JP2739892 A JP 2739892A JP 2739892 A JP2739892 A JP 2739892A JP H05199680 A JPH05199680 A JP H05199680A
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- power
- control system
- uninterruptible
- door
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は常用電源の供給が停止し
た後自家発電機電源が作動するまでの間、無停電電源装
置にて電力を供給するようにした電源装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a power supply device in which power is supplied by an uninterruptible power supply device until the private generator power supply is activated after the supply of a regular power supply is stopped.
【０００２】[0002]
【従来の技術】従来の電源装置においては、図９に示す
ように常用電源１０１と自家発電機電源１０２からの電
力を切換器１０３を介してシステム制御系装置１０５、
温度コントロール系装置１０６、動力系装置１０７及び
その他の装置１０８に供給するようにするとともに、シ
ステム制御系装置１０５の前段には無停電電源装置１０
４を備えて、常用電源１０１からの電力の供給が停止し
た後自家発電機電源１０２が作動して所定の出力に達す
る数十秒の間は無停電電源装置１０４にてシステム制御
系装置１０５に電力を供給することで、安全を確保する
ようにしている。2. Description of the Related Art In a conventional power supply device, as shown in FIG. 9, system control system device 105 supplies power from a regular power supply 101 and a private generator power supply 102 via a switch 103.
The temperature control system device 106, the power system device 107, and other devices 108 are supplied to the system control system device 105, and the uninterruptible power supply device 10 is provided before the system control system device 105.
4, the uninterruptible power supply 104 causes the system control system device 105 to operate the system generator 105 for several tens of seconds after the power supply from the regular power supply 101 is stopped and the private generator power supply 102 operates to reach a predetermined output. We are trying to ensure safety by supplying electric power.
【０００３】この電源装置においては、図１０に示すよ
うに無停電電源装置１０４からシステム制御系装置１０
５を構成するすべての装置Ａ〜Ｅに電力を供給するた
め、無停電電源装置１０４の容量は装置Ａ〜Ｅの総積算
量に設定され、装置Ａ〜Ｅの容量がそれぞれ２ＫＶＡで
あれば無停電電源装置１０４の容量は１０ＫＶＡに設定
している。In this power supply unit, as shown in FIG. 10, the uninterruptible power supply unit 104 to the system control system unit 10 are connected.
In order to supply electric power to all the devices A to E that compose the device 5, the capacity of the uninterruptible power supply device 104 is set to the total integrated amount of the devices A to E, and if the capacities of the devices A to E are 2 KVA, respectively. The capacity of the power outage power supply 104 is set to 10 KVA.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上述し
た従来の電源装置のように無停電電源装置から常用のシ
ステム制御系装置全部に電力を供給すると、無停電電源
装置の容量が大きくなって装置が大型化し、コストも高
くなる。However, when power is supplied from the uninterruptible power supply to all of the regular system control system devices like the above-described conventional power supply, the capacity of the uninterruptible power supply becomes large and the device becomes unusable. Larger size and higher cost.
【０００５】[0005]
【課題を解決するための手段】本発明は上記の課題を解
決するため、電源装置に接続される各装置の内の安全確
保に必要な装置に対してのみ無停電電源装置にて電力を
供給するようにした。SUMMARY OF THE INVENTION In order to solve the above problems, the present invention supplies power only to a device required for ensuring safety among devices connected to a power supply device by an uninterruptible power supply device. I decided to do it.
【０００６】[0006]
【作用】無停電電源装置からは電源装置に接続される各
装置のうちの安全確保に必要な装置に対してのみ電力を
供給するので、無停電電源装置が負担する容量が小さく
なる。Since the uninterruptible power supply supplies electric power only to each of the devices connected to the power supply that are necessary for ensuring safety, the capacity of the uninterruptible power supply is reduced.
【０００７】[0007]
【実施例】以下に本発明の実施例を添付図面に基づいて
説明する。ここで、図１は本発明に係る電源装置の電力
系統図、図２は同電源装置におけるシステム制御系の電
力系統の説明図、図３は同電源装置における他のシステ
ム制御系の電力系統の説明図、図４は無停電電源装置の
構成図、図５は同電源装置の作動状態の説明図、図６は
同電源装置に接続するガス浸炭焼き入れ装置の平面図、
図７は同焼き入れ装置の浸炭炉及び焼き入れ槽の断面
図、図８は同焼き入れ装置のシステム制御部の要部回路
構成図である。Embodiments of the present invention will be described below with reference to the accompanying drawings. Here, FIG. 1 is a power system diagram of a power supply device according to the present invention, FIG. 2 is an explanatory diagram of a power system of a system control system in the power supply device, and FIG. 3 is a power system of another system control system in the power supply device. Explanatory drawing, FIG. 4 is a block diagram of an uninterruptible power supply, FIG. 5 is an explanatory view of an operating state of the power supply, FIG. 6 is a plan view of a gas carburizing and quenching apparatus connected to the power supply,
FIG. 7 is a sectional view of a carburizing furnace and a quenching tank of the quenching apparatus, and FIG. 8 is a circuit configuration diagram of essential parts of a system controller of the quenching apparatus.
【０００８】電源装置は図１に示すように、常用電源１
と、自家発電機電源２と、常用電源１からの電力が停止
したときには給電路を自家発電機電源２側に切換える切
換器３と、常用電源１が停止した後自家発電機２が作動
するまでの間電力を供給する無停電電源装置４とを備
え、常用回路にはシステム制御系のうちの基本システム
制御系装置５、温度コントロール系装置７、動力系装置
８及びその他の装置９を接続するとともに、無停電電源
装置４を介してシステム制御系のうちの安全確保に必要
な装置であるバックアップ制御系６を接続している。As shown in FIG. 1, the power supply unit is a common power supply 1
And a private generator power supply 2 and a switch 3 that switches the power supply path to the private generator power supply 2 side when the power from the regular power supply 1 is stopped, and until the private power generator 2 is activated after the regular power supply 1 is stopped. And an uninterruptible power supply 4 for supplying electric power to the common circuit, and a basic system control system device 5, a temperature control system device 7, a power system device 8 and other devices 9 of the system control system are connected to the service circuit. At the same time, a backup control system 6 which is a device required for ensuring safety in the system control system is connected via the uninterruptible power supply 4.
【０００９】ここで、システム制御系装置に対する電力
系統について説明すると、先ず図２に示す例は、システ
ム制御系を構成する装置Ａ〜Ｅのうちの基本システム制
御系を構成する装置Ａ１〜Ｅ１とバックアップ制御系を
構成するＡ２〜Ｅ２とを同一制御盤に収納した場合であ
る。また、図３に示す例は、基本システム制御系を構成
する装置Ａ１〜Ｅ１とバックアップ制御系を構成するＡ
２〜Ｅ２とを別の制御盤に収納した場合である。The power system for the system control system device will now be described. First, in the example shown in FIG. 2, the devices A1 to E1 forming the basic system control system among the devices A to E forming the system control system are described. This is a case where A2 and E2 that constitute the backup control system are housed in the same control panel. Further, in the example shown in FIG. 3, the devices A1 to E1 constituting the basic system control system and the device A constituting the backup control system are constituted.
This is a case where 2 to E2 are stored in different control panels.
【００１０】基本システム制御系とバックアップ制御系
を同一制御盤に収納するか別の制御盤に収納するかは任
意であるが、同一制御盤に収納した場合には停電時にバ
ックアップ制御系のみ制御盤の中で作動していることに
なり、かかる状態が好ましくないときには別の制御盤と
すればよい。It is optional whether the basic system control system and the backup control system are housed in the same control panel or in different control panels. However, when they are housed in the same control panel, only the backup control system is controlled when a power failure occurs. If it is not preferable, a different control panel may be used.
【００１１】また、無停電電源装置４について図４を参
照して説明すると、この装置は正常時には整流器／充電
器１１から蓄電池１２に浮動充電しながらインバータ１
３から給電し、停電時には蓄電池１２によりインバータ
１３の運転を継続して無停電の安定供給電力を供給す
る。Further, the uninterruptible power supply 4 will be described with reference to FIG. 4. In normal operation, this device is operated by the inverter 1 while floatingly charging the storage battery 12 from the rectifier / charger 11.
Power is supplied from No. 3, and in the event of a power failure, the storage battery 12 continues the operation of the inverter 13 to supply uninterrupted stable power supply.
【００１２】以上のように構成した電源装置において
は、図５をも参照して、通常は常用電源１から切換器３
を介して各装置５〜９に電力が供給されているが、常用
電源１が停止したときには自家発電機電源２が作動を開
始するとともに切換器３が自家発電機電源２側に切換わ
るが、自家発電機電源２の出力が所定の出力に達するま
での間に約数十秒を要するため、この間無停電電源装置
４を接続しているバックアップ制御系装置６にのみ所定
の電力が供給され、他の装置５，７〜９には所定の電力
が供給されない。In the power supply device configured as described above, with reference to FIG. 5 as well, the normal power supply 1 to the switch 3 are normally used.
Although power is supplied to each of the devices 5 to 9 via the, the private generator power supply 2 starts operating and the switching device 3 switches to the private generator power supply 2 side when the regular power supply 1 stops. Since it takes about several tens of seconds until the output of the private generator power supply 2 reaches a predetermined output, predetermined power is supplied only to the backup control system device 6 connecting the uninterruptible power supply 4 during this period. The predetermined power is not supplied to the other devices 5, 7-9.
【００１３】このように、無停電電源装置４からシステ
ム制御系装置のうちの安全確保に必要な装置であるバッ
クアップ制御系装置６のみに電力を供給するようにする
ことによって、システム制御系装置全部に電力を供給す
る場合に比べて無停電電源装置４の容量は少なくて済む
ようになる。このようにしても、常用電源１が停止する
原因としては夏場の落雷、送電途中の事故によるものが
殆どであり、そのため頻繁に発生するものではなく、し
かも自家発電機電源に切り替わるに要する時間が数十秒
と極めて短時間であることからすれば、問題が生じるこ
とはない。As described above, by supplying power from the uninterruptible power supply 4 to only the backup control system device 6 which is a device necessary for ensuring safety among the system control system devices, all the system control system devices are supplied. The capacity of the uninterruptible power supply 4 can be smaller than that in the case of supplying power to Even in this case, most of the causes of the stoppage of the regular power supply 1 are due to lightning strikes in summer and accidents during power transmission, so that it does not occur frequently, and the time required to switch to the private generator power supply is high. Since it is an extremely short time of several tens of seconds, no problem will occur.
【００１４】次に、本発明を具体的適用例について説明
するが、表面改質を目的とする熱処理、例えばガス浸炭
焼き入れ、ガス軟窒化、その他還元性雰囲気を使用する
ものは雰囲気ガスの爆発防止対策を構造的に設置しなけ
ればならない。そこで、ここでは、ガス浸炭焼き入れ装
置に適用した例について説明する。Next, a specific application example of the present invention will be explained. A heat treatment for the purpose of surface modification, for example, gas carburizing and quenching, gas nitrocarburizing, or any other thing using a reducing atmosphere is an explosion of the atmosphere gas. Preventive measures must be installed structurally. Therefore, here, an example applied to a gas carburizing and quenching apparatus will be described.
【００１５】先ず、図６及び図７を参照して、ワークＷ
は搬入装置２１により加熱炉２２に扉２２ａを介して搬
入され、所定の温度に加熱された後扉２２ｂを介して送
り出され、中間搬送装置２３で搬送され、浸炭炉２４に
扉２４ａを介して送られる。そして、浸炭炉２４うちで
扉２４ｂを介して水素、一酸化炭素、窒素、二酸化炭素
を主成分にした浸炭性雰囲気ガス中に送られ、この雰囲
気ガス中で前記成分を浸炭後、扉２４ｃを介して焼き入
れ層２５に送られる。First, referring to FIGS. 6 and 7, the work W
Is carried into the heating furnace 22 through the door 22a by the carry-in device 21, is heated to a predetermined temperature and is then sent out through the door 22b, is carried by the intermediate carrying device 23, and is carried into the carburizing furnace 24 through the door 24a. Sent. Then, in the carburizing furnace 24, it is sent through a door 24b into a carburizing atmosphere gas containing hydrogen, carbon monoxide, nitrogen, and carbon dioxide as main components, and after carburizing the components in the atmosphere gas, the door 24c is opened. It is sent to the quenching layer 25 via.
【００１６】この焼き入れ層２５では、浸炭炉２４の扉
２４ｃが昇降用シリンダ３０で開けられて、ワークＷが
バスケット３１に搬入され、このバスケット３１が昇降
用シリンダ３２により焼き入れ油３３の中にワークＷを
投入し、ワークＷの表面硬化を促した後、再度昇降用シ
リンダ３２によりバスケット３１を上昇させて、昇降用
シリンダ３４で扉２５ａを開き、電動モータ３５，３６
により払出し装置２６に払出す。そして、払出し装置２
６の電動モータ３６を駆動して次工程に送り出す。In the quenching layer 25, the door 24c of the carburizing furnace 24 is opened by the lifting cylinder 30, the work W is carried into the basket 31, and the basket 31 is placed in the quenching oil 33 by the lifting cylinder 32. After the work W is put into the container and the surface hardening of the work W is promoted, the raising / lowering cylinder 32 raises the basket 31 again, and the raising / lowering cylinder 34 opens the door 25a to open the electric motors 35, 36.
To the payout device 26. And payout device 2
The electric motor 36 of No. 6 is driven to send it to the next step.
【００１７】この装置においては、浸炭性雰囲気ガスと
外部とを遮断している扉２４ａと扉２５ａの近辺は各扉
２４ａ，２５ａが開いたときに外気と接触して爆発が生
じるのを防止するため、フレームカーテンとして可燃性
ガスを燃焼させ、外気の侵入を防止する構造になってい
る。扉２５ａの部分で説明すると、可燃性ガス４１を電
磁バルブ４２を介して他方の電磁バルブ４４から供給さ
れるエアー４３と混合して、絞り弁４４を介してノズル
ヘッド４５からフレームカーテン４６として燃焼させ
る。In this apparatus, the vicinity of the door 24a and the door 25a which shield the carburizing atmosphere gas from the outside is prevented from coming into contact with the outside air when the doors 24a and 25a are opened and causing an explosion. Therefore, the frame curtain has a structure that burns combustible gas to prevent outside air from entering. Explaining in terms of the door 25a, the combustible gas 41 is mixed with the air 43 supplied from the other electromagnetic valve 44 through the electromagnetic valve 42, and is burned as a frame curtain 46 from the nozzle head 45 through the throttle valve 44. Let
【００１８】ところで、扉２５ａが開いてフレームカー
テンで外気を遮断しながらワークＷを搬出している最中
に停電した場合、電磁バルブ４２，４４が閉状態になっ
てフレームカーテン４６が消失してしまい、そのため浸
炭性雰囲気ガスが外気にふれて爆発を誘発する。そこ
で、この装置では、電磁バルブ４２，４４を制御するに
必要な制御系のみをバックアップ制御系として無停電電
源装置による電力供給を行うようにしている。By the way, when a power failure occurs while the work W is being carried out while the door 25a is opened and the outside air is blocked by the frame curtain, the electromagnetic valves 42 and 44 are closed and the frame curtain 46 disappears. Therefore, the carburizing atmospheric gas touches the outside air and induces an explosion. Therefore, in this device, only the control system necessary for controlling the electromagnetic valves 42 and 44 is used as a backup control system to supply power by the uninterruptible power supply.
【００１９】このシステム制御部の扉２５ａ部の回路に
ついて図８を参照して説明すると、基本システム制御部
（系）５のバスケット３１が焼き入れ工程を完了し、上
昇して上昇端に来た時にリレーＲＡの接点Ｒａが閉じ
る。これにより、バックアップ制御部（系）６のフレー
ムカーテンに着火され、リレーＲＢが作動して接点Ｒｂ
が閉じ、扉２５ａに開指令が入って扉２５ａが開き始め
る。そして、扉２５ａが開き完了するとリレーＲＣが作
動して接点Ｒｃが閉じてリレーＲＤが作動して接点Ｒｄ
が閉じて搬出モータ３５，３６が駆動されてワークＷが
搬出される。The circuit of the door 25a of the system control section will be described with reference to FIG. 8. The basket 31 of the basic system control section (system) 5 completes the quenching process and rises to the rising end. At times, the contact Ra of the relay RA closes. As a result, the frame curtain of the backup control unit (system) 6 is ignited, the relay RB operates, and the contact Rb
Is closed, an opening command is input to the door 25a, and the door 25a starts to open. When the door 25a is completely opened, the relay RC operates and the contact Rc closes, and the relay RD operates and the contact Rd.
Is closed and the carry-out motors 35 and 36 are driven to carry out the work W.
【００２０】ワークＷの搬出が終了するとリレーＲＥが
作動して接点Ｒｅが閉じ搬出完了信号が出力されて扉２
５ａが下降する。その後、扉２５ａが閉り完了するとリ
レーＲＦが作動して接点Ｒｆが閉じてフレームカーテン
が消火され、リレーＲＧが作動して接点Ｒｇが閉じる。
これにより、基本システム制御部５のリレーＲＨが作動
して接点Ｒｈが閉じてサイクルが完了する。When the unloading of the work W is completed, the relay RE is actuated, the contact Re is closed, and the unloading completion signal is output to the door 2
5a descends. Then, when the door 25a is completely closed, the relay RF operates to close the contact Rf to extinguish the frame curtain, and the relay RG operates to close the contact Rg.
As a result, the relay RH of the basic system control unit 5 operates, the contact Rh is closed, and the cycle is completed.
【００２１】このとき、バックアップ制御部６にのみ無
停電電源装置４を設けているので、フレームカーテンの
着火後常用電源１が停止しても無停電電源装置４から電
力が供給されてフレームカーテンは着火状態のまま自家
発電機電源２の出力が所定出力に達するまで待機し、爆
発の誘発を防止できる。At this time, since the uninterruptible power supply unit 4 is provided only in the backup control unit 6, even if the regular power supply 1 is stopped after ignition of the frame curtain, power is supplied from the uninterruptible power supply unit 4 and the frame curtain is It is possible to prevent the explosion from being triggered by waiting until the output of the private generator power supply 2 reaches a predetermined output in the ignition state.
【００２２】[0022]
【発明の効果】以上に説明したように本発明によれば、
無停電電源装置からは電源装置に接続される各装置のう
ちの安全確保に必要な装置に対してのみ電力を供給する
ようにしたので、すべての装置に電力を供給する場合に
比べて無停電電源装置の容量を小さくすることができ、
装置の小型化、据え付けスペースの削減、コストの削減
ができ、メンテナンスも容易になる。As described above, according to the present invention,
Since the uninterruptible power supply supplies power only to the devices that are necessary to ensure safety among the devices connected to the power supply, there is no power outage compared to when power is supplied to all devices. The capacity of the power supply can be reduced,
The equipment can be downsized, the installation space can be reduced, the cost can be reduced, and the maintenance is easy.
【図１】本発明に係る電源装置の電力系統図FIG. 1 is a power system diagram of a power supply device according to the present invention.
【図２】同電源装置におけるシステム制御系の電力系統
の説明図FIG. 2 is an explanatory diagram of a power system of a system control system in the power supply device.
【図３】同電源装置における他のシステム制御系の電力
系統の説明図FIG. 3 is an explanatory diagram of a power system of another system control system in the power supply device.
【図４】無停電電源装置の構成図[Fig. 4] Configuration diagram of uninterruptible power supply
【図５】同電源装置の作動状態の説明図FIG. 5 is an explanatory diagram of an operating state of the power supply device.
【図６】同電源装置に接続するガス浸炭焼き入れ装置の
平面図FIG. 6 is a plan view of a gas carburizing and quenching device connected to the power supply device.
【図７】同焼き入れ装置の浸炭炉及び焼き入れ槽の断面
図FIG. 7 is a sectional view of a carburizing furnace and a quenching tank of the quenching apparatus.
【図８】同焼き入れ装置のシステム制御部の要部回路構
成図FIG. 8 is a circuit configuration diagram of a main part of a system control unit of the quenching apparatus.
【図９】従来の電源装置の電力系統図FIG. 9 is a power system diagram of a conventional power supply device.
【図１０】同電源装置におけるシステム制御系の電力系
統の説明図FIG. 10 is an explanatory diagram of a power system of a system control system in the power supply device.
１…常用電源、２…自家発電機電源、３…切換器、４…
無停電電源装置、５…基本システム制御系装置、６…バ
ックアップ制御系装置。1 ... Regular power supply, 2 ... Private generator power supply, 3 ... Switching device, 4 ...
Uninterruptible power supply, 5 ... Basic system control system device, 6 ... Backup control system device.
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成４年３月１７日[Submission date] March 17, 1992
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】図面[Document name to be corrected] Drawing
【補正対象項目名】図３[Name of item to be corrected] Figure 3
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【図３】 [Figure 3]
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】図面[Document name to be corrected] Drawing
【補正対象項目名】図４[Name of item to be corrected] Fig. 4
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【図４】 [Figure 4]
【手続補正３】[Procedure 3]
【補正対象書類名】図面[Document name to be corrected] Drawing
【補正対象項目名】図５[Name of item to be corrected] Figure 5
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【図５】 [Figure 5]
【手続補正４】[Procedure amendment 4]
【補正対象書類名】図面[Document name to be corrected] Drawing
【補正対象項目名】図６[Name of item to be corrected] Figure 6
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【図６】 [Figure 6]
Claims (1)
装置とを備え、前記常用電源の供給が停止した後自家発
電機電源が作動するまでの間、無停電電源装置から電力
を供給するようにした電源装置において、この電源装置
に接続される各装置のうちの安全確保に必要な装置に対
してのみ前記無停電電源装置から電力を供給することを
特徴とする電源装置。1. A power supply is provided from the uninterruptible power supply, comprising a utility power supply, a private generator power supply, and an uninterruptible power supply, and until the private generator power supply operates after the supply of the utility power is stopped. In the above power supply device, the uninterruptible power supply device supplies power only to a device necessary for ensuring safety among the devices connected to the power supply device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2739892A JPH05199680A (en) | 1992-01-17 | 1992-01-17 | Power supply |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2739892A JPH05199680A (en) | 1992-01-17 | 1992-01-17 | Power supply |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05199680A true JPH05199680A (en) | 1993-08-06 |
Family
ID=12219958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2739892A Pending JPH05199680A (en) | 1992-01-17 | 1992-01-17 | Power supply |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05199680A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005022615A1 (en) * | 2003-08-29 | 2005-03-10 | Nikon Corporation | Liquid recovery apparatus, exposure apparatus, exposure method, and device production method |
| US20130271945A1 (en) | 2004-02-06 | 2013-10-17 | Nikon Corporation | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method |
| US9341954B2 (en) | 2007-10-24 | 2016-05-17 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US9423698B2 (en) | 2003-10-28 | 2016-08-23 | Nikon Corporation | Illumination optical apparatus and projection exposure apparatus |
| US9678332B2 (en) | 2007-11-06 | 2017-06-13 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
| US9678437B2 (en) | 2003-04-09 | 2017-06-13 | Nikon Corporation | Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction |
| US9885872B2 (en) | 2003-11-20 | 2018-02-06 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light |
| US9891539B2 (en) | 2005-05-12 | 2018-02-13 | Nikon Corporation | Projection optical system, exposure apparatus, and exposure method |
| US10101666B2 (en) | 2007-10-12 | 2018-10-16 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and device manufacturing method |
-
1992
- 1992-01-17 JP JP2739892A patent/JPH05199680A/en active Pending
Cited By (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9678437B2 (en) | 2003-04-09 | 2017-06-13 | Nikon Corporation | Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction |
| US9885959B2 (en) | 2003-04-09 | 2018-02-06 | Nikon Corporation | Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator |
| JP4492538B2 (en) * | 2003-08-29 | 2010-06-30 | 株式会社ニコン | Exposure equipment |
| JP2010103560A (en) * | 2003-08-29 | 2010-05-06 | Nikon Corp | Liquid recovery apparatus, exposure apparatus, exposure method, and method of manufacturing device |
| US10012909B2 (en) | 2003-08-29 | 2018-07-03 | Nikon Corporation | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method |
| JP2010118680A (en) * | 2003-08-29 | 2010-05-27 | Nikon Corp | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method |
| JP2010093301A (en) * | 2003-08-29 | 2010-04-22 | Nikon Corp | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method |
| US7826031B2 (en) | 2003-08-29 | 2010-11-02 | Nikon Corporation | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method |
| US7847916B2 (en) | 2003-08-29 | 2010-12-07 | Nikon Corporation | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method |
| JP2010093302A (en) * | 2003-08-29 | 2010-04-22 | Nikon Corp | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method |
| US8854599B2 (en) | 2003-08-29 | 2014-10-07 | Nikon Corporation | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method |
| US8867017B2 (en) | 2003-08-29 | 2014-10-21 | Nikon Corporation | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method |
| JPWO2005022615A1 (en) * | 2003-08-29 | 2006-10-26 | 株式会社ニコン | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method |
| WO2005022615A1 (en) * | 2003-08-29 | 2005-03-10 | Nikon Corporation | Liquid recovery apparatus, exposure apparatus, exposure method, and device production method |
| US9760014B2 (en) | 2003-10-28 | 2017-09-12 | Nikon Corporation | Illumination optical apparatus and projection exposure apparatus |
| US9423698B2 (en) | 2003-10-28 | 2016-08-23 | Nikon Corporation | Illumination optical apparatus and projection exposure apparatus |
| US9885872B2 (en) | 2003-11-20 | 2018-02-06 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light |
| US10281632B2 (en) | 2003-11-20 | 2019-05-07 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power to rotate linear polarization direction |
| US20130271945A1 (en) | 2004-02-06 | 2013-10-17 | Nikon Corporation | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method |
| US10007194B2 (en) | 2004-02-06 | 2018-06-26 | Nikon Corporation | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method |
| US10234770B2 (en) | 2004-02-06 | 2019-03-19 | Nikon Corporation | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method |
| US10241417B2 (en) | 2004-02-06 | 2019-03-26 | Nikon Corporation | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method |
| US9891539B2 (en) | 2005-05-12 | 2018-02-13 | Nikon Corporation | Projection optical system, exposure apparatus, and exposure method |
| US10101666B2 (en) | 2007-10-12 | 2018-10-16 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US9857599B2 (en) | 2007-10-24 | 2018-01-02 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US9341954B2 (en) | 2007-10-24 | 2016-05-17 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US9678332B2 (en) | 2007-11-06 | 2017-06-13 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH05199680A (en) | Power supply | |
| JP2997748B2 (en) | Entry and exit control method for mechanical parking facilities | |
| JPH06150955A (en) | Portable power source | |
| JP6873215B1 (en) | Non-energized avoidance structure for low flash point fuel vessels | |
| JP3912211B2 (en) | Electronic component mounting apparatus and power supply control method in electronic component mounting apparatus | |
| JPH05333195A (en) | Reactor remote shut down device | |
| JPH08315847A (en) | Mobile fuel cell device | |
| CN217692787U (en) | Emergency circuit and train | |
| JPS60158086A (en) | Concrete bucket switchgear | |
| JP3377104B2 (en) | Heat treatment furnace control system | |
| CN216451575U (en) | Illumination and ventilation interlocking control device for ship pump cabin | |
| JP2823380B2 (en) | Elevator driving equipment | |
| CN220412522U (en) | Elevator car intercom device | |
| CN112054385B (en) | Intelligent fireproof distribution box and control system thereof | |
| JPH07320617A (en) | Relay control circuit | |
| JP2008059084A (en) | System interconnection inverter | |
| JPS63129236A (en) | Controller of air conditioner | |
| KR920001877B1 (en) | Method and apparatus of hydrogen annealing for the semiconductor manufacturing process | |
| JPH0114842Y2 (en) | ||
| JP2568510Y2 (en) | Particulate trap filter regeneration device | |
| JPH05240448A (en) | Heat cooking apparatus | |
| JP2014049483A (en) | Substrate processing device, and power supply management method for the same | |
| JPS62196092A (en) | Dynamic braking method | |
| JPH0233076A (en) | Elevator device | |
| JPH1163712A (en) | Controller of air conditioner provided with refrigerant heater |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20020312 |