JPH05143971A - Metal thin film type magnetic recording medium - Google Patents
Metal thin film type magnetic recording mediumInfo
- Publication number
- JPH05143971A JPH05143971A JP30355291A JP30355291A JPH05143971A JP H05143971 A JPH05143971 A JP H05143971A JP 30355291 A JP30355291 A JP 30355291A JP 30355291 A JP30355291 A JP 30355291A JP H05143971 A JPH05143971 A JP H05143971A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magnetic recording
- recording medium
- thin film
- metal thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は磁気ディスク装置に使用
される面内記録用金属薄膜型磁気記録媒体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal thin film type magnetic recording medium for in-plane recording used in a magnetic disk device.
【０００２】[0002]
【従来の技術】近年、磁気記録媒体の高密度記録化に伴
って、ＣｏＮｉＣｒ、ＣｏＣｒＴａ等の一軸結晶磁気異
方性を有するＣｏ合金を非磁性基板上にＣｒ下地層を介
して成膜した面内記録用金属薄膜型磁気記録媒体が用い
られている。磁気記録媒体における技術的課題の一つ
は、媒体表面と磁気ヘッドとの接触抵抗を軽減し、耐摩
耗性、耐久性を向上させることにある。従来、耐久性の
向上のため、基板表面にテキスチャーと呼ばれる凹凸加
工を施し、以って媒体表面を凹凸にして接触抵抗を軽減
している。又、Ｃｏ合金からなる磁気記録層の上に炭素
からなる保護用Ｃ（カーボン）層を形成したり、更にそ
の上に液体潤滑層を形成している。2. Description of the Related Art In recent years, a Co alloy having a uniaxial crystal magnetic anisotropy such as CoNiCr or CoCrTa has been formed on a non-magnetic substrate through a Cr underlayer along with high density recording of a magnetic recording medium. A metal thin film magnetic recording medium for internal recording is used. One of the technical problems in a magnetic recording medium is to reduce the contact resistance between the medium surface and the magnetic head, and improve wear resistance and durability. Conventionally, in order to improve durability, unevenness processing called texture is applied to the substrate surface to make the medium surface uneven so as to reduce the contact resistance. Further, a protective C (carbon) layer made of carbon is formed on the magnetic recording layer made of Co alloy, and a liquid lubricating layer is further formed thereon.
【０００３】[0003]
【発明が解決しようとする課題】上記のような耐久性向
上手段が採られているにも拘らず、磁気記録媒体を繰り
返して回転、停止すると媒体表面と磁気ヘッド表面とが
繰り返して接触することに起因して、摩擦係数が増大
し、回転起動が不可能になったり、Ｃ層が摩耗してヘッ
ドクラッシュが起こったりするようになり、媒体の耐久
性（寿命）に一定の限度がある。Despite the use of the durability improving means as described above, when the magnetic recording medium is repeatedly rotated and stopped, the medium surface and the magnetic head surface are repeatedly brought into contact with each other. As a result, the coefficient of friction increases, rotation start becomes impossible, and the C layer wears to cause a head crash, and the durability (life) of the medium has a certain limit.
【０００４】また、近年、高密度記録の要求が益々強く
なっており、磁気記録層とヘッドとの間隔を小さくする
ため、Ｃ層の薄膜化が要求されている。Further, in recent years, the demand for high density recording has become stronger and stronger, and in order to reduce the distance between the magnetic recording layer and the head, the thinning of the C layer is required.
【０００５】[0005]
【課題を解決するための手段】本発明の金属薄膜型磁気
記録媒体は、非磁性基板の上にＣｒ下地層、磁気記録層
および保護用Ｃ層が同順序で積層形成された磁気記録媒
体において、前記保護用Ｃ層は少なくともその表面層が
アモルファスカーボンにＣイオン又はＣとＨの混合イオ
ンが注入されて形成されたダイヤモンドライクカーボン
により形成されている。The metal thin film magnetic recording medium of the present invention is a magnetic recording medium in which a Cr underlayer, a magnetic recording layer and a protective C layer are laminated in the same order on a non-magnetic substrate. At least the surface layer of the protective C layer is formed of diamond-like carbon formed by implanting C ions or mixed ions of C and H into amorphous carbon.
【０００６】[0006]
【作用】スパッタリングにより磁気記録層の上に形成さ
れたＣ層はＳＰ2性の高い非晶質のアモルファスカーボ
ンであるが、これにＣイオン又はＣとＨの混合イオン注
入すると、ＳＰ3 性の高いダイヤモンドライクカーボン
(ｉ−カーボン）となる。このカーボンはアモルファス
カーボンに比べて高硬度であり、耐摩耗性、耐久性に優
れる。従って、同じ耐久性を確保する場合、アモルファ
スカーボンからなる従来のＣ層に対して、ダイヤモンド
ライクカーボンからなるＣ層では、その層厚を薄くする
ことができ、従来と同等の耐久性を確保しつつ記録密度
の向上を図ることができる。The C layer formed on the magnetic recording layer by sputtering is amorphous amorphous carbon having a high SP 2 property, but when C ions or a mixed ion of C and H is ion-implanted into this, the C layer has a SP 3 property. High diamond-like carbon
(i-carbon). This carbon has higher hardness than amorphous carbon and is excellent in wear resistance and durability. Therefore, in order to secure the same durability, the layer thickness of the C layer made of diamond-like carbon can be made thinner than that of the conventional C layer made of amorphous carbon, and the same durability as the conventional one can be secured. At the same time, the recording density can be improved.
【０００７】[0007]
【実施例】図１は実施例に係る金属薄膜型磁気記録媒体
の部分断面図を示しており、非磁性基板1 の上に、Ｃｒ
下地層2 、磁気記録層3 、および保護用Ｃ層4 がこの順
序で積層形成されており、前記Ｃ層4 の上には、液体潤
滑膜5 が塗布形成されている。EXAMPLE FIG. 1 shows a partial cross-sectional view of a metal thin film magnetic recording medium according to an example, in which a Cr film is formed on a non-magnetic substrate 1.
An underlayer 2, a magnetic recording layer 3, and a protective C layer 4 are laminated in this order, and a liquid lubricating film 5 is formed by coating on the C layer 4.
【０００８】前記基板1 としては、Ａｌ合金製基板1 の
上に、剛性を確保するため10〜20μm 程度の非晶質Ｎｉ
−Ｐメッキ層が形成されたものが通常使用されるが、か
かる構成に限らず、ガラス基板やセラミックス基板等、
ある程度の剛性のある非磁性材ならいずれのものも使用
可能である。尚、基板の上面には、通常、磁気ヘッドと
の接触摩擦抵抗を軽減するためにテキスチャーと呼ばれ
る凹凸加工が施される。As the substrate 1, an amorphous Ni substrate of about 10 to 20 μm is formed on the Al alloy substrate 1 in order to secure rigidity.
-A P-plated layer is usually used, but the structure is not limited to this, and a glass substrate, a ceramic substrate, or the like may be used.
Any non-magnetic material having a certain degree of rigidity can be used. Incidentally, the upper surface of the substrate is usually provided with an unevenness process called a texture in order to reduce the contact frictional resistance with the magnetic head.
【０００９】基板1 の上に形成されるＣｒ下地層2 は、
その上に形成される一軸結晶磁気異方性を示すＣｏ合金
（結晶構造ｈｃｐ）のｃ軸（結晶磁気異方性を示す結晶
軸）を面内配合させるために形成されるもので、通常、
500〜2000Å程度の厚さにスパッタリングにより形成さ
れる。前記磁気記録層3 は、既述の通り、ＣｏＮｉＣ
ｒ、ＣｏＣｒＰａ、ＣｏＣｒＰｔ等の一軸結晶磁気異方
性を示すＣｏ合金で形成される。尚、磁気記録層3 は、
Ｃｏ合金を単層に形成したものに限らず、Ｃｏ合金層と
Ｃｒ層とを交互に複層形成したもの（最上層はＣｏ合金
層）でもよい。磁気記録層3 の層厚（Ｃｏ合金単層なら
その層厚、複層ならＣｏ合金層の合計厚）は通常 600〜
800 Åとされる。再生出力の確保とノイズ低減のために
は、磁気記録媒体としてＢｒδが 400〜600 Ｇ・μ程度
のものが要求されているからである。The Cr underlayer 2 formed on the substrate 1 is
It is formed for in-plane blending of the c-axis (crystal axis showing crystal magnetic anisotropy) of the Co alloy (crystal structure hcp) showing uniaxial crystal magnetic anisotropy formed thereon,
It is formed by sputtering to a thickness of about 500 to 2000Å. As described above, the magnetic recording layer 3 is made of CoNiC.
It is formed of a Co alloy exhibiting uniaxial crystal magnetic anisotropy such as r, CoCrPa, and CoCrPt. The magnetic recording layer 3 is
The Co alloy is not limited to a single layer, and a Co alloy layer and a Cr layer may be alternately formed in multiple layers (the uppermost layer is a Co alloy layer). The thickness of the magnetic recording layer 3 (the total thickness of the Co alloy single layer and the total thickness of the Co alloy layers if it is multiple layers) is usually 600-
It is set at 800 Å. This is because a magnetic recording medium having a Brδ of about 400 to 600 G · μ is required to secure the reproduction output and reduce noise.
【００１０】前記磁気記録層3 の上には少なくとも表面
層がダイヤモンドライクカーボンによって形成された保
護用Ｃ層4 が 200〜400 Å程度形成されている。該Ｃ層
4 は、スパッタリングにより成膜したＣ層にＣイオン又
はＣとＨの混合イオンを 1×1014〜 5×1016個／cm2 程
度イオン注入することにより容易に形成することができ
る。 1×1014未満ではＳＰ3 性の高いダイヤモンドライ
クカーボン量が少なく、一方 5×1016を越えて注入する
と前記カーボン量が過剰となり、又注入時間も長くな
る。尚、ダイヤモンドライクカーボンは、Ｃ層4 の全層
に限らず、表面層(少なくとも50Å程度) に形成されて
いるだけでも十分効果がある。On the magnetic recording layer 3, a protective C layer 4 whose surface layer is at least formed of diamond-like carbon is formed on the order of 200 to 400 Å. The C layer
4 can be easily formed by implanting about 1 × 10 14 to 5 × 10 16 ions / cm 2 of C ions or a mixed ion of C and H into the C layer formed by sputtering. If it is less than 1 × 10 14 , the amount of diamond-like carbon having high SP 3 property is small, whereas if it exceeds 5 × 10 16 , the amount of carbon becomes excessive and the injection time becomes long. It should be noted that the diamond-like carbon is not limited to the entire layer of the C layer 4, but it is sufficiently effective if it is formed in the surface layer (at least about 50Å).
【００１１】前記液体潤滑膜5 は、通常フッ素化ポリエ
ーテル等の潤滑剤により20〜50Å程度塗布形成される。
前記Ｃｒ下地層、磁気記録層および保護用Ｃ層の基とな
るファモルファスＣ層は、通常、スパッタリングにより
積層成膜されるが、磁気記録媒体を工業的に生産する場
合、所期層を成膜するためのターゲット材を備えたスパ
ッタリング装置を併設し、基板を各スパッタリング装置
に順次移動させて積層成膜すればよい。The liquid lubricating film 5 is usually formed by coating with a lubricant such as fluorinated polyether in an amount of about 20 to 50 liters.
The famorphous C layer, which is a base of the Cr underlayer, the magnetic recording layer and the protective C layer, is usually formed into a laminated film by sputtering. However, when the magnetic recording medium is industrially produced, it forms a desired layer. A sputtering apparatus provided with a target material for film formation may be provided side by side, and the substrate may be sequentially moved to each sputtering apparatus to perform laminated film formation.
【００１２】次に具体的実施例を掲げる。 (1) アルミニウム合金基板の表面にＮｉ−Ｐ無電解メ
ッキ層（20μm)を形成し、表面をポリッシュ、テキスチ
ャー処理をした後、直流マグネトロンスッタリングによ
り、Ａｒ雰囲気 7×10-3Ｔｏｒｒの下でＣｒ下地層1000
Å、磁気記録層 (Ｃｏ合金単層）600 Å、Ｃ層 200Åを
この順序で成膜し試料Ａを得た。 (2) 試料ＡのＣ層にＣイオンを 5×1015個／cm2 で注
入して試料Ｂを得た。また、同様にＣとＨの混合イオン
を 1×1016個／cm2 で注入して試料Ｃを得た。尚、試料
Ａは従来例、試料ＢおよびＣは実施例に該当する。 (3) 試料Ａ、Ｂ、ＣのＣ層をラマン分光分析した。そ
の結果を図２および図３に示す。図２は試料Ａ、図３は
試料Ｂに対応する。同図より、試料Ａでは INTENSITY
(分光強度) が二山分布を示しており、Ｃ層はＳＰ2 性
の高いアモルファスカーボンで形成されていることが分
かる。一方、試料Ｂでは図２における右側の山部が消失
しており、Ｃ層はＳＰ3 性の高いダイヤモンドライクカ
ーボンとなっていることを示している。試料Ｃについて
も同様のスペクトルが得られた。尚、試料Ｂ、Ｃについ
て、Ｃ層は全層がダイヤモンドライクカーボンとなって
いたが、Ｃｏ合金層へのイオンの注入は認められなかっ
た。 (4) 試料Ａ、Ｂ、ＣのＣ層表面に液体潤滑剤を20Å塗
布した後、薄膜ヘッドを用いてＣＳＳ (Contact Start
Stop)試験を行った。３万回のＣＳＳ試験後のディスク
表面における摩耗痕発生率は以下の通りであった。下記
結果より、実施例は従来例に対して、２倍程度の耐久性
の改善が認められる。Next, specific examples will be given. (1) Ni-P electroless plating layer (20 μm) is formed on the surface of an aluminum alloy substrate, the surface is polished and textured, and then DC magnetron suttering is performed in an Ar atmosphere of 7 × 10 −3 Torr. Cr underlayer 1000
Å, a magnetic recording layer (Co alloy single layer) 600 Å, and a C layer 200 Å were formed in this order to obtain a sample A. (2) Sample B was obtained by injecting C ions into the C layer of sample A at 5 × 10 15 ions / cm 2 . Similarly, a sample C was obtained by injecting mixed ions of C and H at 1 × 10 16 ions / cm 2 . Sample A corresponds to the conventional example, and samples B and C correspond to the examples. (3) The C layers of Samples A, B and C were analyzed by Raman spectroscopy. The results are shown in FIGS. 2 and 3. 2 corresponds to sample A and FIG. 3 corresponds to sample B. From the figure, sample A has INTENSITY
(Spectral intensity) shows a two-peak distribution, and it can be seen that the C layer is formed of amorphous carbon having a high SP 2 property. On the other hand, in the sample B, the mountain portion on the right side in FIG. 2 disappears, indicating that the C layer is diamond-like carbon having high SP 3 property. A similar spectrum was obtained for sample C as well. Incidentally, in Samples B and C, the C layer was entirely diamond-like carbon, but ion implantation into the Co alloy layer was not observed. (4) After applying 20Å of liquid lubricant on the surface of C layer of Samples A, B, and C, use CSS (Contact Start) with thin film head.
Stop) test was conducted. The rate of occurrence of wear marks on the disk surface after the CSS test of 30,000 times was as follows. From the following results, it is recognized that the working example is about twice as durable as the conventional example.
【００１３】試料Ａ──25％ 試料Ｂ──11％ 試料Ｃ──14％ (5) また、ＣＳＳ試験中のμf(動摩擦係数) を測定し
た結果を表１に示す。Sample A-25% Sample B-11% Sample C-14% (5) Further, Table 1 shows the results of measurement of μf (dynamic friction coefficient) during the CSS test.
【００１４】[0014]
【表１】 [Table 1]
【００１５】表１より、実施例に係る試料Ｂ、Ｃは、３
万回後のμf が0.34 以下であるのに対して、従来例の
試料Ａでは、0.41と大きく、実施例の耐久性が良好であ
ることがわかる。From Table 1, the samples B and C according to the example are 3
It can be seen that the μf after 10,000 times is 0.34 or less, whereas the sample A of the conventional example has a large value of 0.41 and the durability of the example is good.
【００１６】[0016]
【発明の効果】以上説明した通り、本発明の金属薄膜型
磁気記録媒体は、磁気記録層の上に積層形成した保護用
Ｃ層の少なくともその表面層をアモルファスカーボンに
Ｃイオン又はＣとＨの混合イオンを注入して形成したダ
イヤモンドライクカーボンで形成したので、従来のアモ
ルファスカーボンに比して硬度の向上ひいては耐摩耗
性、耐久性の向上を図ることができ、Ｃ層の層厚減少に
より記録密度の高度化をも図ることができる。As described above, in the metal thin film magnetic recording medium of the present invention, at least the surface layer of the protective C layer formed on the magnetic recording layer is made of amorphous carbon containing C ions or C and H. Since it is made of diamond-like carbon formed by injecting mixed ions, it is possible to improve hardness as compared with conventional amorphous carbon, and thus wear resistance and durability. Higher density can also be achieved.
【図面の簡単な説明】[Brief description of drawings]
【図１】本発明の金属薄膜型磁気記録媒体の要部断面図
である。FIG. 1 is a sectional view of an essential part of a metal thin film magnetic recording medium of the present invention.
【図２】従来の金属薄膜型磁気記録媒体の保護用Ｃ層の
ラマンスペクトル図である。FIG. 2 is a Raman spectrum diagram of a protective C layer of a conventional metal thin film magnetic recording medium.
【図３】実施例の金属薄膜型磁気記録媒体におけるＦイ
オンが注入された保護用Ｃ層のラマンスペクトル図であ
る。FIG. 3 is a Raman spectrum diagram of the protective C layer in which F ions are implanted in the metal thin film magnetic recording medium of the example.
1 非磁性基板 2 Ｃｒ下地層 3 磁気記録層 4 保護用Ｃ層 5 液体潤滑膜 1 non-magnetic substrate 2 Cr underlayer 3 magnetic recording layer 4 protective C layer 5 liquid lubrication film
Claims (1)
層および保護用Ｃ層が同順序で積層形成された金属薄膜
型磁気記録媒体において、 前記保護用Ｃ層は少なくともその表面層がアモルファス
カーボンにＣイオン又はＣとＨとの混合イオンが注入さ
れて形成されたダイヤモンドライクカーボンにより形成
されていることを特徴とする金属薄膜型磁気記録媒体。1. A metal thin film magnetic recording medium in which a Cr underlayer, a magnetic recording layer and a protective C layer are laminated in the same order on a non-magnetic substrate, wherein the protective C layer has at least its surface layer. A metal thin film magnetic recording medium characterized by being formed of diamond-like carbon formed by implanting C ions or mixed ions of C and H into amorphous carbon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30355291A JPH05143971A (en) | 1991-11-19 | 1991-11-19 | Metal thin film type magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30355291A JPH05143971A (en) | 1991-11-19 | 1991-11-19 | Metal thin film type magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05143971A true JPH05143971A (en) | 1993-06-11 |
Family
ID=17922386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30355291A Pending JPH05143971A (en) | 1991-11-19 | 1991-11-19 | Metal thin film type magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05143971A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5858477A (en) * | 1996-12-10 | 1999-01-12 | Akashic Memories Corporation | Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon |
-
1991
- 1991-11-19 JP JP30355291A patent/JPH05143971A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6544627B1 (en) | 1996-05-31 | 2003-04-08 | United Modular Corporation | Method of producing recording media having protective overcoats of highly tetrahedral amorphous carbon |
| US6740384B2 (en) | 1996-05-31 | 2004-05-25 | Vijayen Veerasamy | Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production |
| US6805891B2 (en) | 1996-05-31 | 2004-10-19 | United Mobile Corporation | Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production |
| US7402350B2 (en) | 1996-05-31 | 2008-07-22 | Stormedia Texas, Llc | Highly tetrahedral amorphous carbon coatings and systems and methods for their production |
| US7513215B2 (en) | 1996-05-31 | 2009-04-07 | Stormedia Texas, Llc | Systems and methods for the production of highly tetrahedral amorphous carbon coatings |
| US7544397B2 (en) | 1996-05-31 | 2009-06-09 | Stormedia Texas, Llc | Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production |
| US7604881B2 (en) | 1996-05-31 | 2009-10-20 | Stormedia Texas, Llc | Highly tetrahedral amorphous carbon coatings and systems and methods for their production |
| US7931748B2 (en) | 1996-05-31 | 2011-04-26 | Stormedia Texas, Llc | Systems and methods for the production of highly tetrahedral amorphous carbon coatings |
| US5858477A (en) * | 1996-12-10 | 1999-01-12 | Akashic Memories Corporation | Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon |
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