JPH0513759A - Mis transistor - Google Patents
Mis transistorInfo
- Publication number
- JPH0513759A JPH0513759A JP16590291A JP16590291A JPH0513759A JP H0513759 A JPH0513759 A JP H0513759A JP 16590291 A JP16590291 A JP 16590291A JP 16590291 A JP16590291 A JP 16590291A JP H0513759 A JPH0513759 A JP H0513759A
- Authority
- JP
- Japan
- Prior art keywords
- region
- source
- concentration impurity
- mos transistor
- conductivity type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、MISトランジスタに
関し、特に出力バッファに用いられる大面積を占めるM
OSトランジスタに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a MIS transistor, and more particularly, to an MIS transistor which occupies a large area used for an output buffer.
Regarding an OS transistor.
【0002】[0002]
【従来の技術】従来、この種のMOSトランジスタの形
状は図2のようにゲート電極1を格子状に形成し、ゲー
ト電極1により区画された領域にドレインまたはソース
領域2を形成している。2. Description of the Related Art Conventionally, a MOS transistor of this type has a shape in which a gate electrode 1 is formed in a lattice shape as shown in FIG. 2 and a drain or source region 2 is formed in a region partitioned by the gate electrode 1.
【0003】[0003]
【発明が解決しようとする課題】しかし、このような形
状にすると基板電位バイアス領域は、MOSトランジス
タの外周囲に形成されるのが普通である。ところが、高
電流駆動を必要とする出力バッファ部にこのような形状
のトランジスタを用いると、MOSトランジスタのチャ
ネルに高電流が流れると、中心部の領域では基板電位が
変化し、その結果ラッチアップ現象が起こり易いという
欠点がある。尚、3はドレイン領域、5はコンタクトホ
ール、6はソース電極、7はドレイン電極である。However, with such a shape, the substrate potential bias region is usually formed around the outer periphery of the MOS transistor. However, when a transistor having such a shape is used in the output buffer section that requires high current driving, when a high current flows through the channel of the MOS transistor, the substrate potential changes in the central region, resulting in a latch-up phenomenon. There is a drawback that is likely to occur. In addition, 3 is a drain region, 5 is a contact hole, 6 is a source electrode, and 7 is a drain electrode.
【0004】[0004]
【課題を解決するための手段】本発明は、従来の技術の
課題を解決することを目的とし、ラッチアップ現象を起
こし難いMOSトランジスタを実現できた。具体的に
は、第1導電型半導体基板上に格子状に形成されたゲー
ト電極で区画された領域にソース領域とドレイン領域を
交互に配置されたMOSトランジスタにおいて、該ソー
ス領域の中に該第1導電型半導体の高濃度不純物領域を
設けるというものである。SUMMARY OF THE INVENTION The present invention aims to solve the problems of the prior art, and has realized a MOS transistor in which the latch-up phenomenon is unlikely to occur. Specifically, in a MOS transistor in which a source region and a drain region are alternately arranged in a region defined by a gate electrode formed in a grid pattern on a first conductivity type semiconductor substrate, A high-concentration impurity region of a one-conductivity type semiconductor is provided.
【0005】[0005]
【作用】本発明のMOSトランジスタは図1に示すよう
に、ソース領域中に基板と同一の導電型の高濃度不純物
領域を設けてあるので、基板とソースをどの部分でも同
電位にすることができるためラッチアップ現象が起こり
難い。As shown in FIG. 1, the MOS transistor of the present invention has a high-concentration impurity region of the same conductivity type as that of the substrate in the source region. Because of this, the latch-up phenomenon is unlikely to occur.
【0006】[0006]
【実施例】以下、図に従って本発明の実施例を詳細に説
明する。図1は、本発明によるMOSトランジスタの形
状図である。格子状に形成されたゲート電極1により区
画された複数の部分に交互にソース領域2及びドレイン
領域3を形成する。形成されたソース領域中には、基板
と同導電型の高濃度不純物領域4を形成する。さらに全
ての区画された領域にコンタクトホール5を設け、ソー
ス領域はソース電極6で、ドレイン領域はドレイン電極
7で接続される。ただし、この場合ソース領域のコンタ
クトホール5は、該高濃度不純物領域を含んだ形で形成
する。Embodiments of the present invention will be described in detail below with reference to the drawings. FIG. 1 is a schematic view of a MOS transistor according to the present invention. The source regions 2 and the drain regions 3 are alternately formed in a plurality of portions partitioned by the gate electrode 1 formed in a lattice shape. A high-concentration impurity region 4 having the same conductivity type as the substrate is formed in the formed source region. Further, contact holes 5 are provided in all partitioned regions, the source region is connected to the source electrode 6, and the drain region is connected to the drain electrode 7. However, in this case, the contact hole 5 in the source region is formed so as to include the high concentration impurity region.
【0007】このようにすれば、各ソース領域はその中
に形成された高濃度不純物領域4と、ソース電極6によ
り同電位に保持される。In this way, each source region is held at the same potential by the high concentration impurity region 4 formed therein and the source electrode 6.
【0008】[0008]
【発明の効果】以上述べたように本発明によれば、格子
状に配置されたゲート電極により区画された島状領域の
うちのソース領域中に、基板と同極性の導電型不純物領
域を形成することによって、規則的な構造を崩すことな
く、ラッチアップ耐性の高い高電流駆動用のMOSトラ
ンジスタを実現できるという効果がある。As described above, according to the present invention, a conductive type impurity region having the same polarity as that of the substrate is formed in the source region of the island region defined by the gate electrodes arranged in a grid pattern. By doing so, there is an effect that it is possible to realize a high-current driving MOS transistor having high latch-up resistance without breaking the regular structure.
【図1】本発明のMOSトランジスタの平面図である。FIG. 1 is a plan view of a MOS transistor of the present invention.
【図2】従来のMOSトランジスタの平面図である。FIG. 2 is a plan view of a conventional MOS transistor.
1 ゲート電極 2 ソース領域 3 ドレイン領域 4 基板バイアス領域 5 コンタクトホール 6 ソース電極 7 ドレイン電極 1 gate electrode 2 source region 3 drain region 4 substrate bias region 5 contact hole 6 source electrode 7 drain electrode
Claims (1)
して格子状に形成されたゲート電極により島状に区画さ
れた領域をソース及びドレインとするMISトランジス
タにおいて、前記ソースとした領域中に前記第1導電型
半導体基板と同型の高濃度不純物領域を形成し、前記ソ
ースとした領域と前記高濃度不純物領域とを導電性電極
で接続したことを特徴とするMISトランジスタ。Claim: What is claimed is: 1. A MIS transistor comprising a first conductivity type semiconductor substrate, wherein a source and a drain are regions divided into islands by gate electrodes formed in a grid pattern with an insulating film interposed therebetween. A high-concentration impurity region of the same type as the first conductivity type semiconductor substrate is formed in the region serving as the source, and the region serving as the source and the high-concentration impurity region are connected by a conductive electrode. MIS transistor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16590291A JPH0513759A (en) | 1991-07-05 | 1991-07-05 | Mis transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16590291A JPH0513759A (en) | 1991-07-05 | 1991-07-05 | Mis transistor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0513759A true JPH0513759A (en) | 1993-01-22 |
Family
ID=15821167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16590291A Pending JPH0513759A (en) | 1991-07-05 | 1991-07-05 | Mis transistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0513759A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5635736A (en) * | 1994-09-16 | 1997-06-03 | Kabushiki Kaisha Toshiba | MOS gate type semiconductor device |
US8987838B2 (en) | 2013-06-14 | 2015-03-24 | Nichia Corporation | Field-effect transistor |
US9105607B2 (en) | 2013-03-15 | 2015-08-11 | Samsung Electronics Co., Ltd. | Semiconductor device |
US9214523B2 (en) | 2013-05-30 | 2015-12-15 | Nichia Corporation | Field-effect transistor |
-
1991
- 1991-07-05 JP JP16590291A patent/JPH0513759A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5635736A (en) * | 1994-09-16 | 1997-06-03 | Kabushiki Kaisha Toshiba | MOS gate type semiconductor device |
US9105607B2 (en) | 2013-03-15 | 2015-08-11 | Samsung Electronics Co., Ltd. | Semiconductor device |
US9214523B2 (en) | 2013-05-30 | 2015-12-15 | Nichia Corporation | Field-effect transistor |
US8987838B2 (en) | 2013-06-14 | 2015-03-24 | Nichia Corporation | Field-effect transistor |
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