JPH05107298A - Inspection and manufacturing method of wiring apparatus and inspecting device therefor - Google Patents

Abstract

PURPOSE:To provide an inspection method which enables highly accurate inspection over the entire surface of a wiring apparatus made up of a plurality of low electrode lines and a plurality of column electrode lines crossing the row electrode lines through an insulating member, a manufacturing method and an inspecting device used for the method. CONSTITUTION:High resistance members RTX1-RTXm and RTY1-RTYn are connected to one ends Xu1-Xum and Yu1-Yun of a plurality of row electrode lines X1-Xm and a plurality of column electrode lines Y1-Yn respectively. Ends of the high resistance members RTX1-RTXm and RTY1-RTYn with neither the row electrode lines X1-Xm nor the column electrode lines Y1-Yn connected thereto are made to have a continuity to a common terminal Ct. Electric resistance values are measured separately between the respective ends Xt1-Xtm and Yt1-Ytn of the row electrode lines X1-Xm and column electrode lines Y1-Yn with neither the high resistance members RTX1-RTXm nor RTY1-RTYn connected thereto to inspect a wiring apparatus 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device wired in a matrix form, and more particularly to an inspection method for accurately and surely inspecting the entire surface of the wiring device, and a wiring device for realizing the inspection method. The present invention relates to a method and an inspection device for performing the inspection method.

[0002]

2. Description of the Related Art Liquid crystal display devices (hereinafter abbreviated as LCD) are recognized as having excellent characteristics as a display device such as being capable of driving at low voltage and low power consumption and being thin.
Recently, the importance is rapidly increasing. This tendency is not limited to display devices driven by segments, which are typified by electronic calculators and digital wristwatches, and has become apparent as simple matrix LCDs that drive individual pixels individually to display complex images and moving images.

Further, an active matrix control LCD in which a thin film switching element represented by a thin film transistor (hereinafter abbreviated as TFT) is arranged in a liquid crystal panel to control a driving voltage is capable of high definition and high speed display. In recent years, it has been particularly noticed as an alternative to the cathode tube because of its high display quality. The integration degree of this thin film switching element is becoming higher and higher, and a display device having 640 columns and 400 rows has come to be commercially available. Therefore, it is possible to quickly and surely establish a short-circuit state between a large number of row electrode lines of such a highly integrated device arranged in a matrix and a large number of column electrode lines intersecting the row electrode lines through an insulating member. It is an important issue in manufacturing to inspect.

Referring to FIG. 4, a large number of row electrode lines of a highly integrated device arranged in a matrix and a plurality of columns intersecting the row electrode lines via an insulating member have been used. A method for inspecting a short circuit state with the electrode wire will be described. First, the row electrode line X1 in the first row and the column electrode line Y1 in the first column
In order to inspect for a short circuit at the intersection C1.1 with C1, one end Xt1 of the first row electrode line X1 and the first column electrode line Y
Connect the detection terminal to one end Yt1 of 1,
The resistance value between the end portions is measured, and it is evaluated whether or not the resistance value is a prescribed resistance value (insulation resistance value), and the presence or absence of a short circuit at the intersection C1.1 is determined.

Subsequently, in order to inspect whether or not there is a short circuit at the intersection C1.2 between the row electrode line X1 of the first row and the column electrode line Y2 of the second column, the row electrode line of the first row is checked. Connect the detection terminals to one end Xt1 of X1 and one end Yt2 of the column electrode wire Y2 in the second row, and measure the resistance between each end to determine the specified resistance (isolation Resistance value), the intersection C1.2
Determine whether or not there is a short circuit. In this way, the intersection of the first row electrode line X1 and the nth column electrode line Yn
Inspect for short circuit up to C1.n.

Next, in order to inspect whether or not there is a short circuit at the intersection C2.1 between the second row electrode line X2 and the first column electrode line Y1, the second row electrode line is checked. Connect the detection terminals to one end Xt2 of X2 and one end Yt1 of the column electrode wire Y1 in the first column, measure the resistance between each end, and measure the specified resistance (isolation Resistance value) to determine whether or not there is a short circuit at the intersection C2.1. Again, the second row electrode line X2
On the other hand, the presence or absence of a short circuit is sequentially inspected up to the intersection C2.n with the column electrode line Yn of the nth column.

In this manner, the presence or absence of a short circuit up to the row electrode line Xm of the m-th row and the intersection Cm.n with the column electrode line Yn of the n-th column are sequentially inspected. When the presence or absence of a short circuit is inspected on the entire surface of the substrate in this way, the number of inspections per product is the product of the number of row electrode lines and the number of column electrode lines (m × n). By the way,
If the number of row electrode lines m = 400 and the number of column electrode lines n = 640, the number of intersections will be 256,000, and even if the time required to inspect one intersection is 0.1 seconds, it will be 7 per substrate. It takes more time.

On the other hand, all the row electrode lines and the column electrode lines are connected to the common terminal Ct via the row common electrode line Cx and the column common electrode line Cy to greatly simplify the inspection process. Has been done as an improvement over the prior art (FIG. 5). In this improved conventional technique, as shown in FIG. 5A, one end of the row electrode line and the column electrode line is electrically connected to the common terminal Ct via the row common electrode line Cx and the column common electrode line Cy. , Short-circuit inspection was performed, and after the substrate was completed, the line break line Dx shown in FIG.
And the column break line Dy by breaking the substrate to remove the common electrode lines Cx and Cy and the common terminal Ct to electrically separate each of the plurality of row electrode lines and column electrode lines. How to make up.

This method will be described with reference to the drawings.
First, in order to inspect the presence or absence of a short circuit at the intersections C1.1 to C1.n of the row electrode line X1 of the first row and all the column electrode lines Y1 to Yn, the row electrode line X1 of the first row is On one end Xt1 and common terminal Ct,
Connect each detection terminal, measure the resistance value between each end, evaluate whether it is a specified resistance value, the row electrode line X1 of the first row and all column electrode lines Y1 ~ Yn Intersection of C1.1-C1.n
Determine whether or not there is a short circuit. Where the first row electrode line
If no short circuit occurs at the intersections C1.1 to C1.n between X1 and all column electrode lines Y1 to Yn, the current is the first row electrode line X1.
From one end Xt1 of the first row through the row electrode line X1
It goes from the other end to the common terminal Ct through the column common electrode line Cy and shows a predetermined wiring resistance value.

On the other hand, if a short circuit occurs at the intersection C1.1 between the row electrode line X1 of the first row and the column electrode line Y1 of the first column, the current is the first line. Row electrode line X1 at one end Xt
From 1 through the row electrode line X1 of the first row and the column common electrode line Cy
The path from the intersection C1.1 where there is a short circuit to the common terminal Ct through the column electrode line Y1 and the row common electrode line in the first column
Since a parallel path is formed through the path extending through Cx to the common terminal Ct, the resistance value decreases below a predetermined value. Even when a short circuit occurs at the intersection with another column electrode wire, a parallel path is partially formed with respect to the regular path, so that the resistance value between the terminals decreases below a predetermined value. .. Therefore, it can be detected that the row electrode line X1 of the first row is short-circuited with the column electrode line at an intersection C1.1 to C1.n somewhere with the column electrode lines Y1 to Yn.

Next, in order to inspect for a short circuit at intersections C2.1 to C2.n of the second row electrode line X2 and all the column electrode lines Y1 to Yn, the second row line is inspected. The detection terminal is connected to one end Xt2 of the electrode wire X2 and the common terminal Ct, and the resistance value between the terminals is measured, and it is evaluated whether or not it is a specified resistance value. Intersection C between row electrode line X2 and all column electrode lines Y1 to Yn
Determine whether there is a short circuit in 2.1 to C2.n. In this way
All column electrode lines Y1 to Yn are sequentially arranged up to the m-th row electrode line Xm
Check for short circuit at intersections Cm.1 to Cm.n. After the inspection of the row electrode lines, the inspection of the column electrode lines is similarly performed.

When this method is used, the number of inspections is the sum (m + n) of the number of row electrode lines and the number of column electrode lines when inspecting for the presence or absence of an overall short circuit. By the way, the number of row electrode lines m = 40
0 and the number of column electrode lines n = 640, the number of inspections is 104.
If the time required for one inspection is 0.1 seconds, the total inspection time will be less than 2 minutes, which is about 250 minutes less than the time required for the conventional inspection method. Can be inspected. In this method, after the inspection is completed, the unnecessary row common electrode Cx, column common electrode Cy, and common terminal Ct are removed at the row break line DX and the column break line DY in FIG. The same wiring device is used.

[0013]

However, in the conventional inspection method, which has been improved as described above, the degree of change in the resistance value varies depending on the position of the crossing portion to be short-circuited, and there is a relation with the variation in the wiring resistance value. However, there was a problem that the abnormality could not be detected. For example, if a short circuit occurs at the intersection C1.1 between the row electrode line X1 in the first row and the column electrode line Y1 in the first column, the current will flow in most parts other than the regular path. ,
Since the parallel path from the short-circuited intersection C1.1 to the common electrode C1 through the column electrode line Y1 and the row common electrode line Cx in the first column to the common terminal Ct, the resistance value between the terminals is less than the predetermined value. Significant reduction and easy detection of short circuit.

On the other hand, if a short circuit occurs at the intersection Cm.n between the m-th row electrode line Xm and the n-th column electrode line Yn, the m-th row Terminal Xtm of electrode wire Xm and common terminal
When connecting the detection electrodes to Ct and measuring the resistance value between the terminals, the current flows through a regular path in most parts, and parallel wiring is formed from the intersection Cm.n to the common terminal. There is only a route to Ct, and the resistance value only during this period is about half of the specified value, but from the overall perspective, the ratio of abnormal parts that can be made into regular wiring is small, so the resistance value between the above terminals is the specified resistance. It will be almost the same as the value,
In some cases, it may not be possible to detect the presence or absence of a short circuit due to variations in wiring resistance.

The object of the present invention is to eliminate such inconvenience, and to provide a wiring device having a plurality of row electrode lines and a plurality of column electrode lines intersecting the row electrode lines through an insulating member over the entire surface. An object of the present invention is to provide an inspection method, a manufacturing method, and an inspection device capable of performing an accurate and reliable inspection.

[0016]

The invention according to claim 1 is
A method for inspecting a wiring device configured by a plurality of row electrode lines and a plurality of column electrode lines intersecting with the row electrode lines via an insulating member, the method including: One end Xu of the row electrode lines X1 to Xm and the plurality of column electrode lines Y1 to Yn
High resistance material RTX1 to RTXm, R for 1 to Xum and Yu1 to Yun respectively
TY1 to RTYn are connected to each of the high resistance members RTX1 to RTXm, RTY
1 to RTYn of the row electrode lines X1 to Xm or the column electrode lines Y1 to Yn
The end portion not connected with is electrically connected to the common terminal Ct via the row common electrode line Cx or the column common electrode line Cy, and the high resistance member RTX1 of the row electrode lines X1 to Xm and the column electrode lines Y1 to Yn. ~ RT
Xm, RTY1 to RTYn are not connected to each end Xt1
.About.Xtm, Yt1.about.Ytn and the common terminal Ct are respectively measured to inspect the wiring device 1 to solve the above problems.

According to a second aspect of the present invention, there is provided a manufacturing method for manufacturing a wiring device including a plurality of row electrode lines and a plurality of column electrode lines intersecting the row electrode lines with an insulating member interposed therebetween. Then, as shown in FIG. 2, a plurality of row electrode lines X1 to Xm
And high resistance members RX1 to RXm, RY1 to RYn are provided at one ends of the plurality of column electrode wires Y1 to Yn, respectively, and each high resistance member RX1
~ RXm, RY1 ~ RYn of the row electrode lines X1 ~ Xm or the end not connected to the column electrode lines Y1 ~ Yn, after conducting through the column common electrode line Cx and the row common electrode line Cy, The above problem is solved by electrically interconnecting the plurality of row electrode lines X1 to Xm and the column electrode lines Y1 to Yn to manufacture the wiring device 1.

According to a third aspect of the present invention, there is provided an inspection device for inspecting a wiring device including a plurality of row electrode lines and a plurality of column electrode lines intersecting the row electrode lines with an insulating member interposed therebetween. Therefore, as shown in FIG. 3, the plurality of row electrode lines X1
~ Xm and one ends Xu1 to Xum of the plurality of column electrode wires Y1 to Yn,
Detection terminal portion 2 connected to each of Yu1 to Yun and high resistance members RTX1 to RTX connected to each detection terminal portion 2.
m, RTY1 to RTYn, a high resistance member group 3, a common electrode wire portion 4 for conducting each end portion of each of the high resistance member groups that is not connected to the detection terminal portion 2, and the row electrode wire
X1 to Xm and the scanning electrode unit 5 connected to the end portions Xt1 to Xtm, Yt1 to Ytn of the column electrode lines Y1 to Yn to which the detection terminal unit 2 is not connected, the common electrode line portion 4 and the scanning terminal portion 5 The problem is solved by constructing an inspection device for the wiring device 1 by including the resistance value measuring unit 6 for measuring the electric resistance value between the two.

[0019]

According to the inspection method of the present invention, the row electrode wire is
Somewhere between X1 to Xm and column electrode wires Y1 to Yn C1.1 to Cn.m
If there is a short circuit at the high resistance member RTX1 to RTX affected by the parallel path formed due to the short circuit
Since the proportion of the resistance values of m, RTY1 to RTYn that can be connected to the regular wiring is large, the resistance value between each end Xt1 to Xtm, Yt1 to Ytn and the common terminal Ct is greatly reduced from the specified resistance value. Accordingly, even if the wiring resistance values of the row electrode lines and the column electrode lines fluctuate to some extent, it is possible to reliably inspect the presence or absence of a short circuit at the intersection over the entire surface of the wiring device.

In the manufacturing method according to the second aspect of the present invention, the high resistance members RX1 to RXm, RY1 to RY in the manufacturing process of the wiring device.
n and column common electrode line Cx, row common electrode line Cy and common terminal Ct
Therefore, even if the wiring resistance value of the row electrode line and the column electrode line fluctuates to some extent during the manufacturing process, it is possible to reliably detect the presence or absence of a short circuit at the intersection over the entire surface of the wiring device before manufacturing. You can proceed.

In the inspection apparatus according to the third aspect of the present invention, the intersection C1.1 to somewhere between the row electrode lines X1 to Xm and the column electrode lines Y1 to Yn.
When a short circuit occurs in Cn.m, the ratio of the resistance value of the high resistance member group affected by the parallel path formed due to the short circuit to the regular wiring is large. The electrical resistance value between the common electrode wire portion 4 and the common electrode wire portion 4 is significantly reduced from a predetermined resistance value, and even if the wiring resistance values of the row electrode lines and the column electrode lines are slightly changed, the intersections are spread over the entire wiring device. The presence or absence of a short circuit can be reliably detected.

[0022]

Embodiments of the present invention will now be described in detail with reference to the drawings. (Embodiment 1) An embodiment of the present invention will be described in detail with reference to FIG. As an example, a Cr thin film having a thickness of 100 nm was used on the surface of the transparent insulating substrate, the width was 7 μm, and the line pitch was 1
400 (X1 to X400) row electrode wires of 80 μm are almost parallel,
Also, a wiring device 1 in which 640 (Y1 to Y640) column electrode wires intersecting each other with an insulating member formed on the surface
The method of inspecting is explained. Therefore, in FIG. 1, m is read as 400 and n is read as 640.

The wiring resistance per intersection at the time of such a construction is 100 Ω for each row electrode line / column electrode line.
Became. That is, it was 64 kΩ per row electrode line and 40 kΩ per column electrode line.

Each row electrode line X1 to X400 and each column electrode line Y1 to Y6
High-resistance members RTX1 to RTX400, RTY1 ... that have resistance values of 20 kΩ at one end Xu1 to Xu400, Yu1 to Yu640 of 40
RTY640 is connected. This high resistance material RTX1 ~ RTX400, RTY1
~ The other end of RTY640 is row common electrode line Cx, column common electrode line Cx
Connected to common terminal Ct using Cy. Also, the other end Xt1 ~ of each row electrode line X1 ~ X400 and each column electrode line Y1 ~ Y640
The scanning terminals T1 for measurement were sequentially scanned on the Xt400, Yt1 to Yt640, and the resistance value between the common terminal Ct and the scanning terminal T1 was measured.

Next, the operation of this embodiment will be described in detail. First, the row electrode line X1 of the first row and all column electrode lines Y1 ~
In order to inspect for a short circuit at the intersections C1.1 to C1.640 with Y640, connect the scanning terminal T1 to the end Xt1 of the row electrode line X1 of the first row, and connect it to the common terminal Ct. The resistance value was measured.

If no short circuit occurs at the intersections C1.1 to C1.640 of the first row electrode line X1 and all the column electrode lines Y1 to Y640, the current flows in the first line. End Xt of eye row electrode line X1
1 to 1st row electrode line X1, 20kΩ high resistance member
It passed through RTX1 and further through the column common electrode line Cy to the common terminal Ct, and showed a regular wiring resistance value of 84 kΩ.

On the other hand, when a short circuit occurs at the intersection C1.1 between the row electrode line X1 of the first row and the column electrode line Y1 of the first column, the current is the first row. From the end Xt1 of the row electrode line X1 of the first row electrode line X1, the high resistance member RTX1 of 20 kΩ
Through the column common electrode line Cy to the common terminal Ct, and the column electrode line Y1 of the first column from the intersection C1.1 where the short circuit occurs, the high resistance member RTY1 of 20 kΩ, and the row common Electrode wire
The resistance value between the terminals, passing through Cx and the path leading to the common terminal Ct, was 35 kΩ, which was significantly smaller than the predetermined value of 84 kΩ. Intersection C with other column electrode wires Y2-Y640
Even when a short circuit occurred between 1.2 and C1.640, the parallel path was partially formed with respect to the regular path, and the resistance value between the terminals decreased from the predetermined value.

Next, in order to inspect whether or not there is a short circuit at intersections C2.1 to C2.640 of the second row electrode line X2 and all the column electrode lines Y1 to Yn, the second row line is checked. Scanning terminal at end Xt2 of electrode line X2
Move the T1 to measure the resistance value between the common terminal Ct and evaluate whether or not it is a specified resistance value, and the row electrode line X2 of the second row and all the column electrode lines Y1 to Y640 The presence or absence of a short circuit was determined at the intersections C2.1 to C2.640. In this way, the presence or absence of a short circuit at the intersections C400.1 to C400.640 with all the column electrode lines Y1 to Y640 up to the 400th row electrode line X400 was sequentially inspected.

Again, the row electrode line X400 and all column electrode lines
If no short circuit occurs at the intersections C400.1 to C400.640 with Y1 to Y640, the current flows from the end Xt400 of the row electrode wire X400 to
400th row electrode line X400, 20kΩ high resistance member RT
It passed through x400 and further passed through the column common electrode line Cy to the common terminal Ct and showed a normal wiring resistance value of 84 kΩ.

On the other hand, the 400th row row electrode line X4
When a short circuit occurs at the intersection C400.640 between 00 and the column electrode line Y640 of the 640th column, the current flows from the end Xt400 of the row electrode line X400 of the 400th line to the 400th line. Row electrode line X4
A path leading to the common terminal Ct through the high-resistance member RTX400 of 00, 20 kΩ, and further through the column common electrode line Cy, and the intersection C400.640 where the short circuit occurs to the 640th column electrode line Y64
The high resistance member RTY640 of 0, 20 kΩ and the common electrode line Cx flow through the common electrode line Cx, and the resistance value between the corresponding terminals is 74 kΩ, which is a predetermined value 84.
It was clearly reduced from kΩ, and a short-circuit phenomenon at the intersection could be detected over the entire surface of the wiring device.

When the present invention is used, in order to inspect whether or not there is a short circuit on the entire surface of the substrate, the number of inspections per substrate is 1040, which is the sum of the number of row electrode lines and the number of column electrode lines. Since one inspection required 0.1 seconds, the inspection time for one substrate was 104 seconds.

As the resistance value of the high resistance member, the embodiment using the element of 20 kΩ has been described. However, the resistance value of the high resistance member should be appropriately set depending on the number of electrode lines, the wiring resistance value, and the variation of the wiring resistance value. This makes it possible to reliably inspect the entire surface of the wiring device for a short circuit.

Configuration similar to this embodiment (m = 400, n =
640), even when the improved conventional inspection method (configuration shown in FIG. 5) without using a high resistance member is used,
When no short circuit occurs at the intersections C1.1 to C1.640 of the first row electrode line X1 and all the column electrode lines Y1 to Y640, the current is the first row electrode line X1. From the end Xt1 of the row to the row electrode line X1 of the first row and further to the column common electrode line Cy
In Ct, it shows a normal wiring resistance value of 64 kΩ.

On the other hand, when a short circuit occurs at the intersection C1.1 between the row electrode line X1 of the first row and the column electrode line Y1 of the first column, the current is the first line. From the end Xt1 of the row electrode line X1 of the first row to the row electrode line X1 of the first row and further to the column common electrode line Cy.
To the common terminal Ct and the short-circuited intersection C1.1 to the column electrode line Y1 in the first column, the row common electrode line Cx
, The resistance value between the terminals is 25 kΩ, which is significantly smaller than the predetermined value of 64 kΩ, and a short circuit occurs between the row electrode line and the column electrode line. What you are doing can be easily detected.

However, when a short circuit occurs at the intersection C400.640 between the 400th row electrode line X400 and the 640th column electrode line Y640, the current is the 400th row electrode. line
From the end portion Xt400 of X400, through the row electrode line X400 of the 400th row and further through the column common electrode line Cy to the common terminal Ct, and the intersections C400.640 to 640 where a short circuit occurs.
The resistance value between these terminals is 6 through the column electrode line Y640 of the column and the row common electrode line Cx and the route to the common terminal Ct.
It shows 3.95 kΩ, which is almost the same as the predetermined value of 64 kΩ, and the short circuit phenomenon at the intersection cannot be detected due to the variation in the wiring resistance value of the row electrode line and the column electrode line.

(Embodiment 2) Another embodiment of the present invention will be described in detail with reference to FIG. Also in this embodiment, as in the first embodiment, an example in which the number of row electrodes (m) is 400 and the number of column electrodes (n) is 640 will be described in detail. Therefore, in FIG. 2, m is read as 400 and n is read as 640.

First, the thickness of 100 n is formed on the surface of the transparent insulating substrate.
width of 7 μm, pitch between rows 180 μm
400 row electrode lines were formed substantially parallel to X1 to X400. The measurement end portions Xt1 to Xt400 are arranged at one end of each row electrode wire, and a thin film pattern made of indium tin oxide is arranged at the other end, and the high resistance disclosed in the present invention is 20 kΩ. The members RX1 to RX400 are used. On this surface, 640 column electrode wires Y1 to Y640 intersecting with each other with an insulating member interposed were formed. Further, similar to the row electrode lines, the end portions Yt1 to Yt640 for measurement are arranged at one end of each column electrode wire Y1 to Y640, and a thin film pattern made of indium tin oxide is arranged at the other end. The high resistance member RY1 disclosed in the present invention showing a resistance of 20 kΩ.
It was RY640.

Here, even if a thin film pattern made of indium / tin oxide is provided as a base of the Cr layer of each row electrode line and column electrode line and the Cr layer is removed only in the portion corresponding to the high resistance member, the present invention The purpose of is achieved.

The wiring resistance per intersection at this structure is 100 Ω for each row electrode line / column electrode line.
Became. That is, it was 64 kΩ per row electrode line and 40 kΩ per column electrode line. A row common electrode line Cx and a column common electrode line Cy in which a high resistance member connected to each row electrode line and column electrode line is formed of a Cr thin film having a width of 2 mm and a thickness of 100 nm in the peripheral portion of the transparent insulating substrate Was used to connect to the common terminal Ct. After configuring in this way, the inspection process described in detail below was performed.

In the inspection process, first, the first row electrode line X1
In order to inspect for the presence or absence of a short circuit at the intersections C1.1 to C1.640 with all the column electrode lines Y1 to Y640, the end portion Xt1 of the first row electrode line X1 and the common terminal Ct, Connect the detection electrodes,
The resistance value between each end was measured. Here, the intersections C1.1 to C1.6 of the first row electrode line X1 and all the column electrode lines Y1 to Y640.
When a short circuit does not occur at 40, current flows from the end Xt1 of the first row electrode line X1 to the first row electrode lines X1, 20.
It goes through the high resistance member Rx1 of kΩ and further to the common terminal Ct through the column common electrode line Cy, and the normal wiring resistance value is 84.
It showed kΩ.

On the other hand, when a short circuit occurs at the intersection C1.1 between the row electrode line X1 of the first row and the column electrode line Y1 of the first column, the current is the first row. From the end Xt1 of the row electrode line X1 of the first row electrode line X1, the high resistance member RX1 of 20 kΩ
Through the column common electrode line Cy to the common terminal Ct, and the column electrode line Y1 of the first column from the intersection C1.1 where the short circuit occurs, the high resistance member RY1 of 20 kΩ, and the row common Electrode wire
The resistance value between the terminals, passing through Cx and the path leading to the common terminal Ct, was 35 kΩ, which was significantly smaller than the predetermined value of 84 kΩ. Even when a short circuit occurs at the intersection with another column electrode wire, a parallel path is partially formed with respect to the regular path, so the resistance value between the terminals has decreased below the predetermined value. ..

Next, in order to inspect for a short circuit at intersections C2.1 to C2.640 of the second row electrode line X2 and all the column electrode lines Y1 to Y640, the second row line is checked. Connect the detection electrodes to the end Xt2 of the electrode wire X2 and the common terminal Ct, measure the resistance value between each terminal, and evaluate whether the resistance value is the specified value or not. Intersection of electrode line X2 and all column electrode lines Y1 to Y640
The presence or absence of a short circuit at C2.1 to C2.640 was determined. In this way, the presence or absence of a short circuit at the intersections C400.1 to C400.640 with all the column electrode lines Y1 to Y640 up to the 400th row electrode line X400 was sequentially inspected. Again, row electrode line X400 and all column electrode lines
If no short circuit occurs at the intersections C400.1 to C400.640 with Y1 to Y640, the current flows from the end Xt400 of the row electrode wire X400 to
400th row electrode line X400, 20kΩ high resistance member RX
It passed through 400 and then through the column common electrode line Cy to the common terminal Ct, and the normal wiring resistance value was 84 kΩ.

On the other hand, the 400th row row electrode line X4
When a short circuit occurs at the intersection C400.640 between 00 and the column electrode line Y640 of the 640th column, the current flows from the end Xt400 of the row electrode line X400 of the 400th line to the 400th line. Row electrode line X4
A path leading to the common terminal Ct through the high-resistance member RX400 of 00, 20 kΩ, and further through the column common electrode line Cy, and the intersection C400.640 where the short circuit occurs to the 640th column electrode line Y64
The high resistance member RY640 of 0, 20 kΩ flows through the row common electrode line Cx and the path to the common terminal Ct, and the resistance value between the corresponding terminals shows 74 kΩ, which is a predetermined value 84.
It was clearly reduced from kΩ, and a short circuit phenomenon could be detected at the intersection across the front of the wiring device. When the presence or absence of a short circuit is inspected on the entire surface of the substrate using the inspection method according to the present invention, the number of inspections per substrate is 1040 times which is the sum of the number of row electrode lines and the number of column electrode lines. Since one inspection required 0.1 seconds, the inspection time for one substrate was 104 seconds.

After the inspection step is completed, the substrate is cut along the line break lines Dx and the column break lines Dy shown in FIG. 2B, and all the high resistance members RX1 to RX400, RY1 to RY640 and the row common electrodes are cut. By removing the line Cx, the column common electrode line Cy, and the common terminal Ct, all the row electrode lines X1 to X400 and the column electrode lines Y1 to Y640 are removed.
Are electrically isolated to complete the wiring device. At this time, the object can be achieved by removing the high-resistance member without cutting the substrate, or only the common electrode line may be removed.

As the resistance value of the high resistance member, the embodiment using the element of 20 kΩ has been described. However, the resistance value of the high resistance member should be appropriately set depending on the number of electrode lines, the wiring resistance value, and the variation of the wiring resistance value. By doing so, it is possible to reliably inspect for a short circuit.

Further, although the embodiment in which the thin film pattern made of indium / tin oxide is arranged as the high resistance member has been described, it goes without saying that the material is not limited to this, and the row electrode line / column is simply used. Even if it is configured by reducing the wiring width of the electrode wire, the object of the present invention can be achieved.

(Embodiment 3) Still another embodiment of the present invention will be described in detail with reference to FIG. Also in this embodiment, as in the first embodiment, an example in which the number of row electrodes (m) is 400 and the number of column electrodes (n) is 640 will be described in detail. Therefore, in FIG. 3, m is read as 400 and n is read as 640.

As a wiring device to be inspected, a Cr insulating thin film having a thickness of 100 nm was used on the surface of a transparent insulating substrate to obtain a width of 7 μm.
m, 400 row electrode lines with a pitch between rows of 180 μm (X1 ~
(X400) 640 (Y1 to Y640) column electrode wires formed substantially in parallel with each other and intersecting with an insulating member on the surface were used.

The wiring resistance per intersection at this structure is 100 Ω for each row electrode line / column electrode line.
Became. That is, it was 64 kΩ per row electrode line and 40 kΩ per column electrode line.

Each row electrode line X1 to X400 and each column electrode line Y1 to Y6
The detection terminal portion 2 was connected to each of the one ends Xu1 to Xu400 and Yu1 to Yu640 of 40. This detection terminal unit 2 has high resistance members RTX1 to RTX400, RTY each having a resistance value of 20 kΩ.
1 to RTY640 connected. This high resistance member RTX1 ~ RT
X400, RTY1 to RTY640 are further connected to the common electrode wire portion 4. In addition, each row electrode line X1 to X400 and each column electrode line Y1 to Y640
The other end portions Xt1 to Xt400, Yt1 to Yt640 are sequentially scanned with the scanning terminal portion 5 for measurement, and the resistance value between the common electrode wire portion 4 and the scanning terminal portion 5 is measured by the resistance value measuring portion 6. did.

Next, the inspection method according to the present invention will be described in detail. First, in order to inspect the presence or absence of a short circuit at the intersections C1.1 to C1.640 of the first row row electrode line X1 and all the column electrode lines Y1 to Y640, the first row electrode line X1 The scanning terminal portion 5 was connected to the end portion Xt1, and the resistance value between the scanning terminal portion 5 and the common electrode wire portion 4 was measured.

Here, if no short circuit occurs at the intersections C1.1 to C1.640 of the first row electrode line X1 and all the column electrode lines Y1 to Y640, the current flows in the first line. End Xt of eye row electrode line X1
From 1, the row electrode line X1 of the first row passes through the high resistance member RTX1 of 20 kΩ and further passes through the common electrode line portion 4, so that the resistance value between the common electrode line portion 4 and the scanning terminal portion 5 is the resistance. It can be measured by the value measuring section 6, and the resistance measuring section 6 shows a regular wiring resistance value of 84 kΩ.

On the other hand, when a short circuit occurs at the intersection C1.1 between the row electrode line X1 of the first row and the column electrode line Y1 of the first column, the current is the first row. From the end Xt1 of the row electrode line X1 of the first row electrode line X1, the high resistance member RTX1 of 20 kΩ
And the path leading to the common electrode wire portion 4 and the intersection C1.1 where the short circuit occurs and the column electrode wire Y1, 20k of the first row
Since the high resistance member RTY1 of Ω and the path to the common electrode wire portion 4 pass through, the resistance value between the common electrode wire portion 4 and the scanning terminal portion 5 can be measured by the resistance value measuring portion 6, Value measuring unit 6
Shows a resistance value of 35 kΩ, which is a predetermined value of 8
Significantly less than 4 kΩ. Even if a short circuit occurs at the intersections C1.2 to C1.640 with other column electrode wires Y2 to Y640, a parallel path is partially formed to the regular path, so The resistance value of was less than the predetermined value.

Next, in order to inspect for a short circuit at intersections C2.1 to C2.640 of the second row electrode line X2 and all the column electrode lines Y1 to Y640, the second row line is checked. The scanning terminal portion 5 is moved to the end portion Xt2 of the electrode wire X2, the resistance value is measured, and it is evaluated whether or not it is a specified resistance value. The row electrode wire X2 in the second row and all the column electrode wires are evaluated.
The presence or absence of a short circuit was determined at intersections C2.1 to C2.640 with Y1 to Y640. In this way, the intersections C400.1 to C4 with all the column electrode lines Y1 to Y640 are sequentially formed up to the 400th row electrode line X400.
The presence or absence of a short circuit at 00.640 was inspected.

Again, the row electrode line X400 and all column electrode lines
If no short circuit occurs at the intersections C400.1 to C400.640 with Y1 to Y640, the current flows from the end Xt400 of the row electrode wire X400 to
400th row electrode line X400, 20kΩ high resistance member RT
It passed through X400 and further through the common electrode wire portion 4 and showed a regular wiring resistance value of 84 kΩ.

On the other hand, the 400th row row electrode line X4
When a short circuit occurs at the intersection C400.640 between 00 and the column electrode line Y640 of the 640th column, the current flows from the end Xt400 of the row electrode line X400 of the 400th line to the 400th line. Row electrode line X4
A path passing through the high-resistance member RTX400 of 00 and 20 kΩ and further passing through the common electrode wire portion 4 and an intersection C400.640 where a short circuit occurs.
To the 640th column electrode line Y640, a high resistance member RTY640 of 20 kΩ, and a path passing through the common electrode line portion 4, and the resistance value between the corresponding terminals shows 74 kΩ, which is a predetermined value of 84 kΩ. It was clearly reduced, and a short-circuit phenomenon could be detected at the crossing over the entire surface of the wiring device. When the above inspection method is used to inspect the entire surface of a substrate for the presence or absence of a short circuit, the number of inspections per substrate is 1040, which is the sum of the number of row electrode lines and the number of column electrode lines. Since it took 0.1 seconds, the inspection time for one substrate was 104 seconds.

As the resistance value of the high resistance member, the embodiment using the element of 20 kΩ has been described. However, the resistance value of the high resistance member varies depending on the number of electrode wires, the wiring resistance value, and the wiring resistance value of the wiring device to be inspected. By appropriately setting, it is possible to reliably inspect the entire wiring device for the presence or absence of a short circuit at the intersection.

(Embodiment 4) FIG. 6 shows still another embodiment of the present invention. In this embodiment, the row electrode lines (X1 to X400)
Which is an active element at the intersection of the column electrode line (Y1 to Y640)
The inspection method of the present invention is applied to a wiring device of an active matrix control liquid crystal display element in which FT7 is arranged. In this example, the same effect as that of the example 1 was obtained, and the short circuit phenomenon at the intersection was surely detected over the entire surface of the wiring device.

(Fifth Embodiment) FIG. 7 shows still another embodiment of the present invention. In this embodiment, the row electrode lines (X1 to X400)
Which is an active element at the intersection of the column electrode line (Y1 to Y640)
The manufacturing method of the present invention is applied to a wiring device of an active matrix control liquid crystal display element in which FT7 is arranged. In this embodiment as well, similar to the second embodiment, the short-circuit phenomenon at the intersection was surely detected over the entire surface of the wiring device. even here,
After the inspection process is completed and the board is completed, a part of the board is cut and removed along the row break line Dx and the column break line Dy shown in FIG. 7B, and all the high resistance members Rx1 to Rx400, Ry1 to Ry640 are removed. , The row common electrode line Cx, the column common electrode line Cy and the common terminal Ct are removed, and all the row electrode lines and the column electrode lines are electrically independent. Also in this embodiment, the same operational effect as that of the second embodiment was obtained, and the short circuit phenomenon at the crossing portion could be reliably detected over the entire surface of the wiring device.

(Embodiment 6) FIG. 8 shows still another embodiment of the present invention. In this embodiment, the row electrode lines (X1 to X400)
Which is an active element at the intersection of the column electrode line (Y1 to Y640)
The inspection device of the present invention is applied to a wiring device of an active matrix control liquid crystal display element provided with FT7. In this embodiment, the same effect as that of the third embodiment was obtained, and the short circuit phenomenon at the crossing portion was surely detected over the entire surface of the wiring device.

In each of the above-described embodiments, the case where the resistance values of the high resistance members are equal to each other has been described. However, when the resistance values of the high resistance member are appropriately changed, the terminals may be changed depending on the position of the short-circuited intersection. Since the resistance value between them is different, it is possible to detect not only the presence or absence of a short circuit but also the short circuit position, and just by inspecting the row electrode line or the column electrode line, the same effect as inspecting all the electrode lines can be obtained. can get.

[0062]

As is apparent from the above description, according to the first aspect of the invention, a plurality of row electrode lines and a plurality of column electrodes intersecting the row electrode lines via the insulating member. When inspecting a wiring device composed of wires, the ratio of the resistance value of the high resistance member affected by the parallel path formed due to the short circuit to the regular wiring is large, so that the row electrode line and the column Even if the wiring resistance value of the electrode wire fluctuates to some extent, it is possible to reliably detect the presence or absence of a short circuit at the intersection over the entire surface of the wiring device.

According to the second aspect of the present invention, in manufacturing a wiring device including a plurality of row electrode lines and a plurality of column electrode lines intersecting the row electrode lines with an insulating member interposed therebetween. A high resistance member is provided at one end of each of the plurality of row electrode lines and the plurality of column electrode lines, and an end portion of each of the high resistance members that is not connected to the row electrode line or the column electrode line,
A wiring device is manufactured by electrically connecting the plurality of row electrode lines and the plurality of column electrode lines to each other after electrical connection is made through the column common electrode line and the row common electrode line. With this configuration, the resistance value between the common electrode line and each end of the row electrode line and the column electrode line that is not connected to the high resistance member is inspected to determine whether the resistance value is a predetermined value or not. The effect that the presence or absence of a short circuit at the intersection of the row electrode line and the column electrode line can be reliably detected with high sensitivity over the entire surface of the wiring device is obtained.

According to the inspection apparatus of the invention described in claim 3,
When inspecting a wiring device composed of a plurality of row electrode lines and a plurality of column electrode lines intersecting the row electrode lines via an insulating member, a plurality of row electrode lines and the plurality of columns are provided. Conduction is made between a detection terminal portion connected to each one end of the electrode wire, a high resistance member group connected to the detection terminal portion, and each end portion of the high resistance member group that is not connected to the detection terminal portion. A common electrode line portion, a scanning terminal portion that is sequentially connected to the end portions where the detection terminal portions of the row electrode lines and the column electrode lines are not connected, and an electric resistance value between the common electrode line portion and the scanning terminal portion. Since the resistance value of the high resistance member group affected by the parallel path formed by the occurrence of the short circuit can be set to the regular wiring, the scanning terminal Between the electrode part and the common electrode wire part The resistance value is significantly smaller than the specified resistance value, and even if the wiring resistance value of the row electrode line and the column electrode line fluctuates to some extent, it is possible to reliably detect the presence or absence of a short circuit over the entire surface of the wiring device. Be done.

[Brief description of drawings]

FIG. 1 is a schematic plan view showing an embodiment of an inspection method for a wiring device according to the present invention.

FIG. 2 is a schematic plan view showing an embodiment of a method for manufacturing a wiring device according to the present invention.

FIG. 3 is a schematic plan view showing an embodiment of a wiring device inspection apparatus according to the present invention.

FIG. 4 is a schematic plan view showing a wiring device according to the prior art.

FIG. 5 is a schematic plan view showing a method for manufacturing a wiring device according to an improved prior art.

FIG. 6 is a schematic plan view showing another embodiment of the wiring device inspection method according to the present invention.

FIG. 7 is a schematic plan view showing another embodiment of the method for manufacturing the wiring device according to the present invention.

FIG. 8 is a schematic plan view showing another embodiment of the wiring device inspection apparatus according to the present invention.

[Explanation of symbols]

 1 Wiring device 2 Detection terminal part 3 High resistance member group 4 Common electrode line part 5 Scanning terminal part 6 Resistance value measuring part 7 TFT X1 Row electrode line Xm of the first row Row electrode line Y1 of the mth row First column Column electrode line Yn of the nth column Column electrode line of the nth column Xt1 X1 end Xu1 X1 end Xtm Xm end Xum Xm end Yt1 Y1 end Yu1 Y1 end Ytn Yn end Yun End of Yn Cx row common electrode line Cy column common electrode line Ct common terminal C1.1 intersection of X1 and Y1 Cm.n intersection of Xm and Yn RX1 connected to high resistance member RXm Xm connected to X1 High resistance member RY1 High resistance member connected to Y1 RYn High resistance member connected to Yn Dx Row break line Dy Column break line T1 Scan terminal

Claims (3)

[Claims] 1. An inspection method for inspecting a wiring device comprising a plurality of row electrode lines and a plurality of column electrode lines intersecting with the row electrode lines with an insulating member interposed therebetween. A high resistance member is connected to one end of each of the row electrode lines and the plurality of column electrode lines, and an end of each high resistance member that is not connected to the row electrode line or the column electrode line is a common electrode line. The electrical resistance value between each end of the row electrode line and the column electrode line, to which the high resistance member is not connected, and the common terminal is measured. Wiring device inspection method. 2. A manufacturing method for manufacturing a wiring device comprising a plurality of row electrode wires and a plurality of column electrode wires intersecting with the row electrode wires via an insulating member, the method comprising: A high resistance member is provided at one end of each of the row electrode lines and the plurality of column electrode lines, and an end of each high resistance member that is not connected to the row electrode line or the column electrode line is connected to a common electrode line. A method for manufacturing a wiring device, wherein each of the plurality of row electrode lines and each of the column electrode lines are electrically independent from each other after being electrically conducted through the wiring device. 3. An inspection apparatus for inspecting a wiring device comprising a plurality of row electrode lines and a plurality of column electrode lines intersecting the row electrode lines with an insulating member interposed therebetween. Of the row electrode lines and one end of each of the plurality of column electrode lines, a high resistance member group having a high resistance member connected to each of the detection terminal parts, and each high resistance member A common electrode wire portion that conducts each end portion that is not connected to the detection terminal portion of the group, and a scanning terminal portion that is connected to an end portion to which the detection terminal portions of the row electrode lines and the column electrode lines are not connected. And a resistance value measuring unit that measures an electric resistance value between the common electrode line portion and the scanning terminal portion.