JPH05102451A - Evaluating method for solid-state image sensor - Google Patents
Evaluating method for solid-state image sensorInfo
- Publication number
- JPH05102451A JPH05102451A JP3263529A JP26352991A JPH05102451A JP H05102451 A JPH05102451 A JP H05102451A JP 3263529 A JP3263529 A JP 3263529A JP 26352991 A JP26352991 A JP 26352991A JP H05102451 A JPH05102451 A JP H05102451A
- Authority
- JP
- Japan
- Prior art keywords
- value
- solid
- state image
- added
- difference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、固体撮像素子の電気的
特性を評価する固体撮像素子の評価方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid-state image sensor evaluation method for evaluating the electrical characteristics of a solid-state image sensor.
【０００２】[0002]
【従来の技術】近年、固体撮像素子の民生、産業分野へ
の進出はめざましく、それにともない小型化，高画質
化，多機能化への要求がますます高まっている。2. Description of the Related Art In recent years, solid-state image pickup devices have made remarkable progress in the consumer and industrial fields, and accordingly, demands for miniaturization, high image quality, and multi-functionality are increasing.
【０００３】固体撮像素子の電気的特性の中には画質に
対する規定が設けられており、この規定を満足するかど
うかについて製品を正確かつ迅速に評価することが必要
である。The electric characteristics of the solid-state image pickup device include a regulation for image quality, and it is necessary to accurately and quickly evaluate a product as to whether or not the regulation is satisfied.
【０００４】従来より、固体撮像素子の電気的特性を評
価する場合、まずウェハ状態でテスタを用いて自動評価
を行い、組立後にテスタまたは実装評価装置を用いて評
価するのが一般的である。Conventionally, in the case of evaluating the electrical characteristics of a solid-state image pickup device, it is general to first perform automatic evaluation using a tester in a wafer state, and then evaluate using a tester or a mounting evaluation device after assembly.
【０００５】ここでテスタを用いた固体撮像素子の画質
評価の一部である線欠陥に関して、固体撮像素子の評価
方法を図３を参照しながら説明する。Here, with respect to the line defect which is a part of the image quality evaluation of the solid-state image pickup device using the tester, an evaluation method of the solid-state image pickup device will be described with reference to FIG.
【０００６】図３は従来の固体撮像素子の評価方法のブ
ロック図である。図３に示すように、固体撮像素子から
の信号をテスタにより二次元配列にした画像データ１に
対し、加算手段２により、画素の配列に対して縦方向ま
たは横方向の一方向に、各列毎または各行毎の加算を行
い、画像データ１を一次元のデータ列である加算データ
３に変換する。次に加算データ３の個々の加算値に対
し、差分処理手段３４により隣接する加算値間で差分を
とり、その差分データ３５の個々の差分値と定められた
しきい値３８とを比較し、しきい値３８を越える加算値
を比較計数手段３６により計数し、その合計値３７によ
り線欠陥を評価していた。FIG. 3 is a block diagram of a conventional solid-state image sensor evaluation method. As shown in FIG. 3, with respect to the image data 1 in which the signals from the solid-state image pickup device are arranged in a two-dimensional array by a tester, each column is added by the addition unit 2 in one direction in the vertical direction or the horizontal direction with respect to the pixel array. The image data 1 is converted into addition data 3 which is a one-dimensional data string by performing addition for each row or each row. Next, for each added value of the added data 3, the difference processing means 34 calculates a difference between adjacent added values, and compares each difference value of the difference data 35 with a predetermined threshold value 38, The added value exceeding the threshold value 38 was counted by the comparison counting means 36, and the line defect was evaluated by the total value 37.
【０００７】[0007]
【発明が解決しようとする課題】しかしながら上記従来
の構成では、加算データに対し、隣接する加算値間の差
分がしきい値より小さく、徐々に加算値すなわち出力値
が変化する線欠陥は、テスタで自動評価することができ
ず、したがってこのような線欠陥を有する固体撮像素子
では、その出力をモニタテレビ受像機に写しだし、その
画像を人間の目視によって官能評価しなければならない
という課題を有していた。However, in the above-mentioned conventional configuration, the line defect in which the difference between the adjacent addition values is smaller than the threshold value with respect to the addition data and the addition value, that is, the output value gradually changes is Therefore, a solid-state image sensor having such a line defect has a problem that the output must be projected on a monitor television receiver and the image must be visually evaluated by human eyes. Was.
【０００８】本発明は上記従来の課題を解決するもの
で、徐々に出力値が変化する線欠陥をテスタで自動評価
できる固体撮像素子の評価方法を提供することを目的と
する。The present invention solves the above-mentioned conventional problems, and an object of the present invention is to provide a solid-state image sensor evaluation method capable of automatically evaluating a line defect whose output value gradually changes with a tester.
【０００９】[0009]
【課題を解決するための手段】この目的を達成するため
に、本発明の固体撮像素子の評価方法における第１の手
段は、二次元配列された画像データを縦方向または横方
向の一方向に加算し、その加算データの最大値と平均値
との差または最小値と平均値との差により線欠陥を評価
するものである。In order to achieve this object, the first means in the method for evaluating a solid-state image pickup device according to the present invention is to use two-dimensionally arranged image data in one of the vertical and horizontal directions. The line defects are evaluated by the addition and the difference between the maximum value and the average value of the added data or the difference between the minimum value and the average value.
【００１０】また本発明の固体撮像素子の評価方法にお
ける第２の手段は、加算データの個々の加算値と平均値
との差を個々にしきい値と比較し、しきい値を越える加
算値を計数し、その合計値により線欠陥を評価するもの
である。The second means in the method for evaluating a solid-state image pickup device according to the present invention compares the difference between the individual added value and the average value of the added data with a threshold value individually, and detects the added value exceeding the threshold value. The line defect is evaluated by counting and counting the total value.
【００１１】[0011]
【作用】この第１の手段によって、隣接する加算値間の
差分が定められたしきい値より小さく徐々に加算値が変
化するような線欠陥をテスタで自動評価することができ
る。With this first means, it is possible to automatically evaluate a line defect in which the difference between adjacent addition values is smaller than a predetermined threshold value and the addition value gradually changes, by a tester.
【００１２】また第２の手段によって、加算データの個
々の加算値と平均値との差を個々にしきい値と比較し、
しきい値を越える加算値を計数し、その合計値により線
欠陥をテスタで自動評価することができる。By the second means, the difference between each added value and the average value of the added data is individually compared with the threshold value,
The added value exceeding the threshold value is counted, and the line defect can be automatically evaluated by the tester based on the total value.
【００１３】[0013]
【実施例】以下本発明の一実施例について、図面を参照
しながら説明する。図１は本発明の第１の実施例におけ
る固体撮像素子の評価方法のブロック図である。図１に
示すように、固体撮像素子からの信号をテスタにより二
次元配列にした画像データ１に対し、加算手段２により
画素の配列に対して縦方向または横方向の一方向に、各
列毎または各行毎の加算を行い、画像データ１を一次元
のデータ列である加算データ３に変換する。次に加算デ
ータ３について最大値Ａ，最小値Ｂおよび平均値Ｃを算
出する。次にＡ，Ｂ，ＣによりＤおよびＥをＤ＝Ａ−
Ｃ，Ｅ＝Ｃ−Ｂとして算出する。ここでＤは（最大値−
平均値)で、Ｄによって画像データ１全体の出力平均値
より出力が大きい線欠陥を評価する。Ｅは（平均値−最
小値）で、Ｅにより画像データ１全体の出力平均値より
出力が小さい線欠陥を評価する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram of a method for evaluating a solid-state image sensor according to the first embodiment of the present invention. As shown in FIG. 1, with respect to image data 1 in which a signal from a solid-state image sensor is arranged in a two-dimensional array by a tester, an addition unit 2 is arranged in each of the vertical and horizontal directions of the pixel array for each column. Alternatively, addition is performed for each row, and the image data 1 is converted into addition data 3 which is a one-dimensional data string. Next, the maximum value A, the minimum value B, and the average value C of the addition data 3 are calculated. Next, D and E are D = A- by A, B, and C.
It is calculated as C, E = CB. Where D is (maximum value-
The average value) is used to evaluate a line defect whose output is larger than the average output value of the entire image data 1 by D. E is (average value-minimum value), and E is used to evaluate a line defect whose output is smaller than the average output value of the entire image data 1.
【００１４】このように第１の実施例によれば、加算デ
ータ３について（最大値−平均値），（平均値−最小
値）を算出し、その算出された値により線欠陥を評価す
るため、隣接する列または行の加算値間の差が小さく、
徐々に加算値すなわち出力値が変化する線欠陥でもテス
タで自動評価することができる。As described above, according to the first embodiment, (maximum value-average value) and (average value-minimum value) are calculated for the addition data 3 and the line defect is evaluated based on the calculated values. , The difference between the sums of adjacent columns or rows is small,
Even a line defect in which the added value, that is, the output value, gradually changes can be automatically evaluated by the tester.
【００１５】次に本発明の第２の実施例について、図２
を参照しながら説明する。図２は本発明の第２の実施例
における固体撮像素子の評価方法のブロック図である。
すなわち、第１の実施例と同様にして得られた加算デー
タ３に対し、第１の実施例と同様に平均値Ｃを算出す
る。次に差分処理手段２４により、加算データ３の個々
の加算値と平均値Ｃとの差分をとることにより差分デー
タ２５を算出する。次に差分データ２５の個々の差分値
としきい値２８とを比較計数手段２６により比較し、し
きい値２８を越える差分値の個数を計数して合計値２７
により線欠陥を評価する。このように第２の実施例によ
れば、加算データ３の個々の加算値と平均値Ｃとの差を
個々にしきい値２８と比較し、しきい値２８を越える加
算値を計数し、その合計値により線欠陥を評価するた
め、隣接する列または行の加算値間の差が小さく、徐々
に加算値すなわち出力値が変化する線欠陥でもテスタで
自動評価することができる。Next, a second embodiment of the present invention will be described with reference to FIG.
Will be described with reference to. FIG. 2 is a block diagram of a method for evaluating a solid-state image sensor according to the second embodiment of the present invention.
That is, the average value C is calculated for the addition data 3 obtained in the same way as in the first embodiment, as in the first embodiment. Next, the difference processing means 24 calculates the difference data 25 by taking the difference between each added value of the added data 3 and the average value C. Next, each difference value of the difference data 25 and the threshold value 28 are compared by the comparison / counting means 26, and the number of difference values exceeding the threshold value 28 is counted to obtain the total value 27.
The line defect is evaluated by. As described above, according to the second embodiment, the difference between the individual addition value of the addition data 3 and the average value C is individually compared with the threshold value 28, and the addition value exceeding the threshold value 28 is counted. Since the line defect is evaluated based on the total value, it is possible to automatically evaluate even a line defect in which the difference between the added values of adjacent columns or rows is small and the added value, that is, the output value changes gradually by the tester.
【００１６】[0016]
【発明の効果】以上のように本発明の固体撮像素子の評
価方法によれば、隣接する加算値間の差分が小さく徐々
に加算値、すなわち出力値が変化する線欠陥をテスタで
自動評価することが可能になる。As described above, according to the solid-state image sensor evaluation method of the present invention, a line defect in which the difference between adjacent addition values is small and the addition value is gradually changed, that is, the output value is automatically evaluated by the tester. It will be possible.
【図１】本発明の第１の実施例における固体撮像素子の
評価方法のブロック図FIG. 1 is a block diagram of a solid-state image sensor evaluation method according to a first embodiment of the present invention.
【図２】本発明の第２の実施例における固体撮像素子の
評価方法のブロック図FIG. 2 is a block diagram of a solid-state image sensor evaluation method according to a second embodiment of the present invention.
【図３】従来の固体撮像素子の評価方法のブロック図FIG. 3 is a block diagram of a conventional solid-state image sensor evaluation method.
１ 画像データ ２ 加算手段 ３ 加算データ Ａ 加算データの最大値 Ｂ 加算データの平均値 Ｃ 加算データの最小値 Ｄ 最大値と平均値の差 Ｅ 最小値と平均値の差 1 image data 2 addition means 3 addition data A maximum value of addition data B average value of addition data C minimum value of addition data D difference between maximum value and average value E difference between minimum value and average value
Claims (2)
の画像データを加算手段により縦方向または横方向の一
方向に加算し、その加算データの最大値と平均値との差
または最小値と平均値との差により、線欠陥を評価する
固体撮像素子の評価方法。1. A two-dimensional array of image data output from a solid-state image pickup device is added in one direction in a vertical direction or a horizontal direction by an adding means, and a difference between a maximum value and an average value of the added data or a minimum value is obtained. A solid-state image sensor evaluation method for evaluating line defects based on a difference from an average value.
の画像データを縦方向または横方向の一方向に加算し、
その加算データの個々の加算値と平均値との差を個々に
しきい値と比較し、しきい値を越える加算値を計数し、
その合計値により線欠陥を評価する固体撮像素子の評価
方法。2. The two-dimensional array of image data output from the solid-state image pickup device is added in one direction in the vertical direction or the horizontal direction,
The difference between each added value and the average value of the added data is individually compared with the threshold value, and the added value exceeding the threshold value is counted,
A solid-state image sensor evaluation method for evaluating line defects based on the total value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3263529A JPH05102451A (en) | 1991-10-11 | 1991-10-11 | Evaluating method for solid-state image sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3263529A JPH05102451A (en) | 1991-10-11 | 1991-10-11 | Evaluating method for solid-state image sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05102451A true JPH05102451A (en) | 1993-04-23 |
Family
ID=17390805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3263529A Pending JPH05102451A (en) | 1991-10-11 | 1991-10-11 | Evaluating method for solid-state image sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05102451A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006135700A (en) * | 2004-11-05 | 2006-05-25 | Sharp Corp | Image inspection device, image inspection method, control program and readable storage medium |
-
1991
- 1991-10-11 JP JP3263529A patent/JPH05102451A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006135700A (en) * | 2004-11-05 | 2006-05-25 | Sharp Corp | Image inspection device, image inspection method, control program and readable storage medium |
| US7646892B2 (en) | 2004-11-05 | 2010-01-12 | Sharp Kabushiki Kaisha | Image inspecting apparatus, image inspecting method, control program and computer-readable storage medium |
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