JPH0485114U - - Google Patents
Info
- Publication number
- JPH0485114U JPH0485114U JP12949690U JP12949690U JPH0485114U JP H0485114 U JPH0485114 U JP H0485114U JP 12949690 U JP12949690 U JP 12949690U JP 12949690 U JP12949690 U JP 12949690U JP H0485114 U JPH0485114 U JP H0485114U
- Authority
- JP
- Japan
- Prior art keywords
- light
- diffraction grating
- reflected
- caused
- diffraction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 2
- 230000001427 coherent effect Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Optical Transform (AREA)
Description
第１図はこの考案の一実施例のリニアエンコー
ダの概略構成を示す図である。第２図は従来のリ
ニアエンコーダの概略構成を示す図である。
図において、１は光源、２はコリメータレンズ
、３は偏光ビームスプリツタ、４，６はビームス
プリツタ、５，７ａ，７ｂは1/2波長板、８ａ，
８ｂは光検出器、９は回折格子を示す。
FIG. 1 is a diagram showing a schematic configuration of a linear encoder according to an embodiment of this invention. FIG. 2 is a diagram showing a schematic configuration of a conventional linear encoder. In the figure, 1 is a light source, 2 is a collimator lens, 3 is a polarizing beam splitter, 4 and 6 are beam splitters, 5, 7a, and 7b are half-wave plates, 8a,
8b is a photodetector, and 9 is a diffraction grating.
Claims (1)
利用して、該被検物体の移動量を測定するエンコ
ーダであつて、 回折格子に対して可干渉性光束を照射するため
の光源と、 回折格子で反射回折された光を前記可干渉性光
束の光路に再入射するための光学手段と、 前記光源から回折格子に照射された光により生
じた反射回折光と、前記再入射された光により生
じた反射回折光とによつて生じる光の干渉に基づ
く光量の変化を検知する検知手段とを備えた、エ
ンコーダ。[Claims for Utility Model Registration] An encoder that measures the amount of movement of an object to be tested by using light interference caused by a diffraction grating attached to the object, the encoder comprising: a light source for irradiating the diffraction grating; an optical means for re-entering the light reflected and diffracted by the diffraction grating into the optical path of the coherent beam; and reflected diffraction light generated by the light irradiated from the light source to the diffraction grating. and a detection means for detecting a change in light amount based on interference of light caused by reflected diffraction light caused by the re-entered light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12949690U JPH0485114U (en) | 1990-11-29 | 1990-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12949690U JPH0485114U (en) | 1990-11-29 | 1990-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0485114U true JPH0485114U (en) | 1992-07-23 |
Family
ID=31876895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12949690U Pending JPH0485114U (en) | 1990-11-29 | 1990-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0485114U (en) |
-
1990
- 1990-11-29 JP JP12949690U patent/JPH0485114U/ja active Pending
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