JPH0467349A - Suction pad for flexible magnetic disk and manufacture thereof - Google Patents
Suction pad for flexible magnetic disk and manufacture thereofInfo
- Publication number
- JPH0467349A JPH0467349A JP17267990A JP17267990A JPH0467349A JP H0467349 A JPH0467349 A JP H0467349A JP 17267990 A JP17267990 A JP 17267990A JP 17267990 A JP17267990 A JP 17267990A JP H0467349 A JPH0467349 A JP H0467349A
- Authority
- JP
- Japan
- Prior art keywords
- zirconium oxide
- negative pressure
- composite ceramic
- oxide
- magnetic disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title description 6
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims abstract description 31
- 229910001928 zirconium oxide Inorganic materials 0.000 claims abstract description 30
- 239000000919 ceramic Substances 0.000 claims abstract description 22
- 239000002131 composite material Substances 0.000 claims abstract description 22
- 239000000696 magnetic material Substances 0.000 claims abstract description 10
- 239000000395 magnesium oxide Substances 0.000 claims abstract description 8
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims abstract description 8
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims abstract description 8
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims abstract description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 14
- 238000000465 moulding Methods 0.000 claims description 3
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 3
- 238000005304 joining Methods 0.000 claims description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract description 3
- 150000001875 compounds Chemical group 0.000 abstract 1
- 239000000463 material Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 239000010408 film Substances 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- 229910001369 Brass Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000010951 brass Substances 0.000 description 3
- 229910000859 α-Fe Inorganic materials 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- BYFGZMCJNACEKR-UHFFFAOYSA-N aluminium(i) oxide Chemical compound [Al]O[Al] BYFGZMCJNACEKR-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000010952 cobalt-chrome Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は２フレキシブル磁気デイスク装置等に用いられ
る負圧パッドに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a negative pressure pad used in two flexible magnetic disk devices and the like.
［従来の技術］
磁気記録装置の小型化，転送時間短縮等の要求により，
２インチフレキシブル磁気ディスク装置（以下２’ Ｆ
ＤＤという）が開発された。これはメタル磁性粉を塗付
した２インチ記録媒体を３６００ｒｐ−で回転させて記
録再生を行なうもので、データディスクやスチルビデオ
フロッピー装置として商品化されている。また高記憶容
量化、高画質化の要求も強く、更に記録密度の向上が求
められている。しかし、高密度記録になるほど磁気ヘッ
ドと記録媒体との接触状態が問題となり、スペーシング
ロスの抑制が重要な課題となる。２’ ＦＤＤでは高速
回転する記録媒体の表面の空気が粘性によって引っ張ら
れ、高速で流れる空気膜を形成するのでスペーシングロ
スが大きくなりやすい。[Prior art] Due to the demand for smaller magnetic recording devices and shorter transfer times,
2-inch flexible magnetic disk device (hereinafter referred to as 2'F
DD) was developed. This is a 2-inch recording medium coated with metal magnetic powder that is rotated at 3600 rpm for recording and reproduction, and has been commercialized as data disks and still video floppy devices. There is also a strong demand for higher storage capacity and higher image quality, and further improvements in recording density are required. However, the higher density recording becomes, the more the contact state between the magnetic head and the recording medium becomes a problem, and the suppression of spacing loss becomes an important issue. In a 2' FDD, air on the surface of a recording medium rotating at high speed is pulled by viscosity and forms an air film that flows at high speed, so spacing loss tends to increase.
そのため、第８図に示すように記録媒体を介して磁気ヘ
ッドと反対側に設けた安定部材（パッド８１）を用い、
記録媒体８２とパッド８１間に形成した空気膜の圧力で
記録媒体８２を磁気ヘッド８３に押しつける方法がとら
れている。しかし。Therefore, as shown in FIG. 8, a stabilizing member (pad 81) provided on the opposite side of the magnetic head via the recording medium is used.
A method is used in which the recording medium 82 is pressed against the magnetic head 83 by the pressure of an air film formed between the recording medium 82 and the pad 81. but.
この方法はパッドが固定式のためトラックの内周。In this method, the pad is fixed, so it is attached to the inner circumference of the track.
外周で均一な当たりを得ることが困難であること。It is difficult to obtain uniform contact on the outer periphery.
スペーシングを小さくするためにヘッド荷重を増し過ぎ
ると、記録媒体の損傷を招く恐れがあること等が問題と
なり、第９図に示すようなベルヌイプレート方式と呼ば
れる負圧パッドが開発された。If the head load is increased too much in order to reduce the spacing, problems arise such as the possibility of damage to the recording medium, and a negative pressure pad called the Bernoulli plate system as shown in FIG. 9 was developed.
この方式においては記録媒体８２が回転すると。In this method, when the recording medium 82 rotates.
ベルヌイの定理により負圧発生部９１の圧力が低下し、
大気圧で記録媒体８２が磁気ヘッド９２に押しつけられ
ることを利用して良好な当たりを得るものである。ベル
ヌイプレート方式では、パッド方式のような当たり調整
が不用なことや、負圧パッドとへラドキャリッジが一体
のため内周、外周で均一なスペーシングが得られる利点
がある。According to Bernoulli's theorem, the pressure in the negative pressure generating section 91 decreases,
Good contact is obtained by utilizing the fact that the recording medium 82 is pressed against the magnetic head 92 at atmospheric pressure. The Bernoulli plate method has the advantage of not requiring contact adjustment unlike the pad method, and because the negative pressure pad and helad carriage are integrated, uniform spacing can be obtained on the inner and outer peripheries.
一方、現行仕様の記録媒体では内周側トラックにおける
記録減磁の問題から、記録密度の向上には限界があり、
媒体電磁変換特性の改良が求められている。具体的には
金属薄膜型記録媒体や、原理的に高密度記録が可能な垂
直磁気記録方式が期待される。On the other hand, with the current specifications of recording media, there is a limit to the improvement of recording density due to the problem of recording demagnetization in the inner track.
Improvements in medium electromagnetic conversion characteristics are required. Specifically, metal thin film recording media and perpendicular magnetic recording systems, which in principle enable high-density recording, are expected.
垂直磁気記録では、主にＣｏＣｒ等の合金薄膜を記録媒
体に使用しており、非磁性ベースフィルム上に蒸着やス
パッタリング等の方法で形成される。金属薄膜では膜形
成時における熱や応力等の影響で、記録媒体に若干の反
り、歪みが生じることがあり、媒体自身も塗布型媒体に
比べて剛性が高く１回転によって振動しやすい。また、
負圧パッドも記録媒体の振動を抑える空気膜の緩衝効果
が低く、記録媒体と接触することがある。In perpendicular magnetic recording, a thin alloy film such as CoCr is mainly used as a recording medium, and is formed on a nonmagnetic base film by a method such as vapor deposition or sputtering. With metal thin films, the recording medium may be slightly warped or distorted due to the effects of heat, stress, etc. during film formation, and the medium itself is more rigid than coated media and is more likely to vibrate during one rotation. Also,
The negative pressure pad also has a low buffering effect of the air film that suppresses vibrations of the recording medium, and may come into contact with the recording medium.
［発明が解決しようとする課題］
塗布型媒体負圧パッドは非磁性金属等で形成され、バイ
ンダーを含む塗布型媒体には適するが。[Problems to be Solved by the Invention] The negative pressure pad for coated media is formed of non-magnetic metal, etc., and is suitable for coated media containing a binder.
金属薄膜型媒体に使用すると接触時に記録面を傷つけた
り、摺動により発生する磨耗粉が耐久性を損なうという
問題点がある。When used in metal thin film media, there are problems in that the recording surface is damaged upon contact, and abrasion powder generated by sliding impairs durability.
耐磨耗性が大きく、金属薄膜型媒体と摺動させても高い
耐久性を示す材料として酸化ジルコニウム系セラミック
スがあるが、高硬度１強靭性で複雑な形状の加工が難し
く、材料コストや加工コストの問題で使用が困難であっ
た。Zirconium oxide ceramics are a material that has high wear resistance and exhibits high durability even when sliding with metal thin film type media, but due to its high hardness and toughness, it is difficult to process into complex shapes, resulting in material costs and processing problems. It was difficult to use due to cost issues.
本発明は、高密度記録用金属薄膜型媒体に使用して高耐
−久性を示し、しかも低コストなフレキシブル磁気ディ
スク用負圧パッドおよ、びその製造方法を提供すること
を目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide a negative pressure pad for a flexible magnetic disk that exhibits high durability when used in a metal thin film type medium for high-density recording and is low in cost, and a method for manufacturing the same.
［課題を解決するための手段］
上記目的を達成するために本発明の負圧パッドにおいて
は、基板部分を加工が容易な非磁性材料で形成し、記録
媒体と対向する負圧発生部を酸化ジルコニウム系複合セ
ラミックスで構成する。[Means for Solving the Problems] In order to achieve the above object, in the negative pressure pad of the present invention, the substrate portion is formed of a non-magnetic material that is easy to process, and the negative pressure generating portion facing the recording medium is oxidized. Constructed of zirconium-based composite ceramics.
本発明の好ましい実施態様においては、負圧発生部１を
構成する酸化ジルコニウム系複合セラミックスは、３０
〜７３重量％の酸化ジルコニウム（Ｚ ｒ ０２ ）と
残部酸化アルミニウム（Ａｌ２Ｏ、）を含み、酸化ジル
コニウムは２〜１７モル％の酸化イツトリウム（Ｙ２０
３ ） 、酸化カルシウム（ＣａＯ）、酸化マグネシウ
ム（ＭｇＯ）の少なくとも１種または２種以上で置−換
されたものを用いる。In a preferred embodiment of the present invention, the zirconium oxide composite ceramics constituting the negative pressure generating section 1 is made of
It contains ~73% by weight of zirconium oxide (Z r 02 ) and the balance aluminum oxide (Al2O, ), and the zirconium oxide contains 2-17% by mole of yttrium oxide (Y20).
3) Substituted with at least one or two or more of calcium oxide (CaO) and magnesium oxide (MgO) is used.
また本発明によれば、アルミニウムや真鍮、非磁性フェ
ライト等の非磁性材料基板に磁気ヘッドを貫通させる穴
部を設け、空気流の逃げ部に相当する溝加工を施した酸
化ジルコニウム系複合セラミックスの薄板と、該非磁性
材料基板を接合してブロックを形成し、該酸化ジルコニ
ウム系複合セラミックス薄板に負圧発生部に相当する大
小２つのＣ型パターンを加工してブロックを個々に切断
。Further, according to the present invention, a zirconium oxide-based composite ceramic substrate is made of a non-magnetic material such as aluminum, brass, or non-magnetic ferrite, with a hole through which the magnetic head passes, and a groove corresponding to an airflow escape part. A block is formed by joining the thin plate and the non-magnetic material substrate, two large and small C-shaped patterns corresponding to negative pressure generating parts are processed on the zirconium oxide composite ceramic thin plate, and the blocks are individually cut.
成形することにより上記負圧パッドの製造方法が得られ
る。By molding, the method for manufacturing the negative pressure pad described above is obtained.
［作用］
本発明による負圧パッドでは、記録媒体と接触する恐れ
のある負圧発生部を高硬度１強靭性の酸化ジルコニウム
系複合セラミックスとすることで。[Function] In the negative pressure pad according to the present invention, the negative pressure generating portion that may come into contact with the recording medium is made of a zirconium oxide-based composite ceramic with high hardness and toughness.
磨耗粉の発生を抑えて耐久性が確保できる。また。Durability can be ensured by suppressing the generation of abrasion powder. Also.
パッド体積の大部分を安価で加工しやすい非磁性材料と
し、酸化ジルコニウム系複合セラミックスは薄板として
用いるため、材料コスト、加工コストの低減が図れる。Since most of the pad volume is made of a non-magnetic material that is inexpensive and easy to process, and the zirconium oxide composite ceramic is used as a thin plate, material costs and processing costs can be reduced.
［実施例］
以下２本発明の実施例について図面を参考にして説明す
る。第１図は本発明による負圧パッドを示す斜視図であ
る。酸化ジルコニウム系複合セラミックスからなる負圧
発生部１１は、非磁性材料からなる基板１２上にガラス
接合されている。負圧発生部１１は空気流逃げ部１３を
有する２個の同心的に配置されたリング１１−１．１１
−２により構成されている。[Example] Two examples of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view of a negative pressure pad according to the present invention. A negative pressure generating section 11 made of zirconium oxide composite ceramics is glass-bonded onto a substrate 12 made of a nonmagnetic material. The negative pressure generating part 11 consists of two concentrically arranged rings 11-1.11 having an air flow escape part 13.
-2.
負圧発生部１１を構成する酸化ジルコニウム系複合セラ
ミックスは、３０〜７３重量％の酸化ジルコニウム（Ｚ
ｒＯ□）と残部酸化アルミニウム（Ａｇ２０３）を含み
２酸化ジルコニウムは２〜１７モル％の酸化イツトリウ
ム（Ｙ２０ Ｂ ） 、酸化カルシウム（ＣａＯ）、酸
化マグネシウム（ＭｇＯ）の少なくとも１種または２種
以上で置換されたものを用いる。基板１２の材質は、酸
化ジルコニウム系複合セラミックスとのガラス接合を考
慮して非磁性フェライトを使用したが、ろう付けや樹脂
接着等の適当な接合方法によるならば、アルミニウムや
真鍮等を用いてもよい。２’ ＦＤＤでは負圧発生部の
寸法は磁気ヘッドの荷重や記録媒体、パッドの大きさに
よっても異なるが、負圧パッド径Φ４〜８ ｍｍで溝幅
約５００μ■、深さ３０〜５０μｍ程度である。そして
基板１２の中心部には磁気ヘッド貫通用穴部１４が形成
されている。The zirconium oxide composite ceramics constituting the negative pressure generating section 11 contains 30 to 73% by weight of zirconium oxide (Z
rO□) and the remainder aluminum oxide (Ag203), the zirconium dioxide is replaced with 2 to 17 mol% of at least one or more of yttrium oxide (Y20B), calcium oxide (CaO), and magnesium oxide (MgO). Use what was given. As for the material of the substrate 12, non-magnetic ferrite was used in consideration of glass bonding with zirconium oxide composite ceramics, but aluminum, brass, etc. may also be used if an appropriate bonding method such as brazing or resin bonding is used. good. In a 2' FDD, the dimensions of the negative pressure generating part vary depending on the load of the magnetic head, the recording medium, and the size of the pad, but the negative pressure pad diameter is 4 to 8 mm, the groove width is approximately 500 μm, and the depth is approximately 30 to 50 μm. be. A magnetic head penetration hole 14 is formed in the center of the substrate 12.
次に上記構造の本発明による負圧パッドの製造工程につ
いて説明する。Next, the manufacturing process of the negative pressure pad according to the present invention having the above structure will be explained.
まず第３図に示すように酸化ジルコニウム系複合セラミ
ックス板３１に、空気流の逃げ部に相当する溝３２を加
工する。次に第４図に示すように非磁性材料基板４１に
磁気ヘッドを貫通させる穴部４２を加工する。アルミニ
ウム、真鍮等ならば機械加工が容易だか、非磁性フェラ
イトの場合は焼成前にプレス成形しておくとよい。そし
て酸化ジルコニウム系複合セラミックス薄板３１と非磁
性材料基板４２を、軟化点５００〜６００℃程度のガラ
スを用いて接合し、第５図のようなブロックを形成する
。その後、第６図のように負圧発生部１１を加工する。First, as shown in FIG. 3, a groove 32 corresponding to an air flow relief part is formed in a zirconium oxide composite ceramic plate 31. Next, as shown in FIG. 4, a hole 42 is formed in the nonmagnetic material substrate 41 through which the magnetic head passes. Aluminum, brass, etc. can be easily machined, or non-magnetic ferrite can be press-formed before firing. Then, the zirconium oxide composite ceramic thin plate 31 and the nonmagnetic material substrate 42 are bonded using glass having a softening point of about 500 to 600° C. to form a block as shown in FIG. 5. Thereafter, the negative pressure generating portion 11 is processed as shown in FIG.
ここでは超音波加工機を用いたが、フッ酸等によるエツ
チングも可能である。Although an ultrasonic processing machine was used here, etching using hydrofluoric acid or the like is also possible.
図中破線に従って切断し、第７図のようなチップを得、
四すみを成形して第１図に示す負圧パッドを得る。必要
ならばこの後、 ＃１００００程度の研摩シートで記
録媒体対向面の仕上げを行なう。Cut along the broken line in the figure to obtain a chip as shown in Figure 7.
The four corners are molded to obtain the negative pressure pad shown in FIG. If necessary, the surface facing the recording medium is then finished with an abrasive sheet of about #10,000.
尚１本実施例では負圧発生部をへ角形としたが。Incidentally, in this embodiment, the negative pressure generating portion is formed into a rectangular shape.
実際の使用にあたって支障がなければ特に形状を限定す
るものではない１例えば四角形ならば、最終工程の成形
加工も省略することができるし、第２図に断面を示すよ
うに円形でもよい。酸化ジルコニウム系複合セラミック
ス部分以外の材料や接合方法は適宜定めればよいし、磁
気ヘッド用穴部も組み合わされる磁気ヘッドに応じて定
めることができる。要するに本発明は、その要旨を逸脱
しない範囲で種々変形して実施することができる。The shape is not particularly limited as long as it does not pose a problem in actual use. For example, if it is square, the final molding process can be omitted, or it may be circular as shown in the cross section in FIG. The materials other than the zirconium oxide composite ceramic portion and the bonding method may be determined as appropriate, and the hole for the magnetic head may also be determined depending on the magnetic head to be combined. In short, the present invention can be implemented with various modifications without departing from the gist thereof.
［発明の効果］
以上述べたごとく本発明によれば、高密度記録用金属薄
膜媒体に使用しても高い耐久性を示し。[Effects of the Invention] As described above, the present invention exhibits high durability even when used as a metal thin film medium for high-density recording.
しかも低コストなフレキシブル磁気ディスク用負圧パッ
ド及びその製造方法の提供が可能となった。Moreover, it has become possible to provide a low-cost negative pressure pad for a flexible magnetic disk and a method for manufacturing the same.
第１図は本発明の実施例を示す負圧パッドの斜視図、第
２図は本発明の他の実施例である負圧パッドの構造を示
す断面斜視図、第３図以下は本発明による製造工程の実
施例を説明するもので、酸化ジルコニウム系複合セラミ
ックス薄板の加工状態を示す斜視図、第４図は同じく磁
気ヘッドを貫通させる穴部を設けた非磁性材料基板加工
状態を示す斜視図、第５図は同じく、第３図の薄板と第
４図の基板を接合したブロックの加工状態を示す斜視図
、第６図は第５図のブロックに負圧発生部を加工した状
態を示す斜視図、第７図は第６図のブロックを図中破線
に従って切断した小片を示す斜視図、第８図および第９
図は従来のパッド方式の構成を示す概略図である。
１１・・・負圧発生部、１２・・・非磁性基板、１３・
・・空気流逃げ部、１４・・・・磁気ヘッド貫通用穴部
、３１・・・酸化ジルコニウム系複合セラミックス薄板
。
８３．９２・・・磁気ヘッド、８２・・・記録媒体。
第１図Fig. 1 is a perspective view of a negative pressure pad showing an embodiment of the present invention, Fig. 2 is a cross-sectional perspective view showing the structure of a negative pressure pad which is another embodiment of the invention, and Fig. 3 and the following figures are according to the present invention. This is a perspective view illustrating an example of the manufacturing process, showing a processed state of a zirconium oxide composite ceramic thin plate, and a perspective view showing a processed state of a non-magnetic material substrate with a hole portion for a magnetic head to pass through. Similarly, FIG. 5 is a perspective view showing a processed state of a block in which the thin plate shown in FIG. 3 and the substrate shown in FIG. A perspective view, FIG. 7 is a perspective view showing a small piece of the block shown in FIG. 6 cut along the broken line in the figure, and FIGS. 8 and 9 are
The figure is a schematic diagram showing the configuration of a conventional pad method. 11...Negative pressure generating section, 12...Nonmagnetic substrate, 13.
...Airflow escape part, 14...Magnetic head penetration hole part, 31...Zirconium oxide composite ceramic thin plate. 83.92...Magnetic head, 82...Recording medium. Figure 1
Claims (1)
媒体と対向する負圧発生部を酸化ジルコニウム系複合セ
ラミックスで形成することを特徴とするフレキシブル磁
気ディスク用負圧パッド。 ２、前記酸化ジルコニウム系複合セラミックスは、３０
〜７３重量％の酸化ジルコニウム（ＺｒＯ＿２）と残部
酸化アルミニウム（Ａｌ＿２Ｏ＿３）を含み、前記酸化
ジルコニウムは２〜１７モル％の酸化イットリウム（Ｙ
＿２Ｏ＿３）、酸化カルシウム（ＣａＯ）、及び酸化マ
グネシウム（ＭｇＯ）の少なくとも１種または２種以上
で置換された酸化ジルコニウム系複合セラミックスを用
いることを特徴とする前記特許請求の範囲第１項記載の
フレキシブル磁気ディスク用負圧パッド。 ３、非磁性材料基板に、磁気ヘッドを貫通させる穴部を
加工する工程と、酸化ジルコニウム系複合セラミックス
の薄板に空気流の逃げ部に相当する溝加工を施す工程と
、前記非磁性材料基板及び酸化ジルコニウム系複合セラ
ミックス薄板を接合してブロックを形成する工程と、前
記酸化ジルコニウム系複合セラミックス薄板に負圧発生
部に相当する大小２つのＣ型パターンを形成する工程と
、ブロックを個々に切断して成形することにより負圧パ
ッドを形成する工程とを含むフレキシブル磁気ディスク
用負圧パッドの製造方法。[Claims] 1. A negative for a flexible magnetic disk, characterized in that the substrate portion is formed of a non-magnetic material that is easy to process, and the negative pressure generating portion facing the recording medium is formed of a zirconium oxide-based composite ceramic. pressure pad. 2. The zirconium oxide-based composite ceramic has 30
The zirconium oxide contains ~73% by weight of zirconium oxide (ZrO_2) and the balance aluminum oxide (Al_2O_3), and the zirconium oxide contains 2~17% by mole of yttrium oxide (Y
_2O_3), calcium oxide (CaO), and magnesium oxide (MgO). Negative pressure pad for magnetic disks. 3. A step of forming a hole through which a magnetic head passes through the non-magnetic material substrate, a step of forming a groove corresponding to an airflow escape in a thin plate of zirconium oxide composite ceramic, and the non-magnetic material substrate and A process of joining zirconium oxide based composite ceramic thin plates to form a block, a process of forming two large and small C-shaped patterns corresponding to negative pressure generating parts on the zirconium oxide based composite ceramic thin plate, and cutting the blocks individually. and forming a negative pressure pad by molding the negative pressure pad for a flexible magnetic disk.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17267990A JPH0467349A (en) | 1990-07-02 | 1990-07-02 | Suction pad for flexible magnetic disk and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17267990A JPH0467349A (en) | 1990-07-02 | 1990-07-02 | Suction pad for flexible magnetic disk and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0467349A true JPH0467349A (en) | 1992-03-03 |
Family
ID=15946357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17267990A Pending JPH0467349A (en) | 1990-07-02 | 1990-07-02 | Suction pad for flexible magnetic disk and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0467349A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5409549A (en) * | 1992-09-03 | 1995-04-25 | Canon Kabushiki Kaisha | Solar cell module panel |
| US5509973A (en) * | 1993-04-08 | 1996-04-23 | Misawa Homes Co., Ltd. | Roof panel and roof structure with solar batteries |
| KR100618665B1 (en) * | 2006-02-24 | 2006-09-06 | 모악개발 주식회사 | Leakage test methods for sewage pipe using air pressure and recording medium for computer program used in the same |
-
1990
- 1990-07-02 JP JP17267990A patent/JPH0467349A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5409549A (en) * | 1992-09-03 | 1995-04-25 | Canon Kabushiki Kaisha | Solar cell module panel |
| US5509973A (en) * | 1993-04-08 | 1996-04-23 | Misawa Homes Co., Ltd. | Roof panel and roof structure with solar batteries |
| KR100618665B1 (en) * | 2006-02-24 | 2006-09-06 | 모악개발 주식회사 | Leakage test methods for sewage pipe using air pressure and recording medium for computer program used in the same |
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