JPH0453908A - Optical multiplexer/demultiplexer and optical module - Google Patents
Optical multiplexer/demultiplexer and optical moduleInfo
- Publication number
- JPH0453908A JPH0453908A JP16286490A JP16286490A JPH0453908A JP H0453908 A JPH0453908 A JP H0453908A JP 16286490 A JP16286490 A JP 16286490A JP 16286490 A JP16286490 A JP 16286490A JP H0453908 A JPH0453908 A JP H0453908A
- Authority
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- Prior art keywords
- optical
- waveguide
- demultiplexing
- demultiplexer
- multiplexing
- Prior art date
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- 230000003287 optical effect Effects 0.000 title claims abstract description 131
- 239000000758 substrate Substances 0.000 claims description 15
- 238000005253 cladding Methods 0.000 claims description 10
- 230000000644 propagated effect Effects 0.000 abstract description 4
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 16
- 230000005540 biological transmission Effects 0.000 description 10
- 239000013307 optical fiber Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
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Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、波長多重伝送用の光合分波器、及び光合分波
器に発光素子、受光素子等を実装した光モジュールに関
するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an optical multiplexer/demultiplexer for wavelength multiplexing transmission, and an optical module in which a light emitting element, a light receiving element, etc. are mounted on the optical multiplexer/demultiplexer.
[従来の技術]
光フアイバ通信における波長多重伝送技術Cよ通信シス
テムの経済化を図る上で重要である。[Prior Art] Wavelength division multiplexing transmission technology C in optical fiber communication is important for economicalization of communication systems.
波長多重伝送において、光合分波器1発光素子、受光素
子、ピッグテールファイバ、及び電子回路を実装した波
長多重伝送用光モジュールは必須のデバイスである。In wavelength multiplexing transmission, an optical module for wavelength multiplexing transmission, which is equipped with an optical multiplexer/demultiplexer 1, a light emitting element, a light receiving element, a pigtail fiber, and an electronic circuit, is an essential device.
本出願人は、波長多重伝送用光モジュールとして第5図
に示す構成のものを提案している(井本。The present applicant has proposed an optical module for wavelength division multiplexing transmission having the configuration shown in FIG. 5 (Imoto).
他”導波路型光合分波罷”、日立電線、NO,0,8p
p、19−24.19139 ) 、これは、同一の基
板50上に導波路構造の光合分波器51.半導体レーザ
LD。Others "Waveguide type optical multiplexing/demultiplexing", Hitachi Cable, NO, 0, 8p
p, 19-24.19139), this is an optical multiplexer/demultiplexer 51. of waveguide structure on the same substrate 50. Semiconductor laser LD.
受光素子PD、及びピッグテールファイバ52を実装し
たものであり、光合分波器51の一端にピッグテールフ
ァイバ52が、他端に半導体レーザLD、受光素子PD
等が接続されて構成されている。また、基板50上には
半導体レーザLD、受光素子PDを作動させるための電
子回路53も実装されている。A light receiving element PD and a pigtail fiber 52 are mounted, and the pigtail fiber 52 is mounted at one end of the optical multiplexer/demultiplexer 51, and the semiconductor laser LD and the light receiving element PD are mounted at the other end.
etc. are connected and configured. Furthermore, an electronic circuit 53 for operating the semiconductor laser LD and the light receiving element PD is also mounted on the substrate 50.
[発明が解決しようとする課題]
ところで、第5図に示す波長多重伝送用モジュルの構成
を現状技術で実現しようとすると、半導体レーザLD及
び受光素子PDをチップ状で実装しなければならない。[Problems to be Solved by the Invention] By the way, if the configuration of the wavelength multiplex transmission module shown in FIG. 5 is to be realized using the current technology, the semiconductor laser LD and the light receiving element PD must be mounted in the form of a chip.
その場合には、モジュール全体を気密封止することによ
り上記チップの信頼性を高めることができる。しかし、
モジュール全体を気密封止する技術は現状ではまた実現
不可能である。また、半導体レーザLDと導波路の結合
効率を高めるためには少なくとも一個の収差の少ないレ
ンズを介して結合させる必要があるか、現状では導波路
上に上記機能を有するレンズをモノリンツクに形成する
ことは離しい。In that case, the reliability of the chip can be increased by hermetically sealing the entire module. but,
The technology of hermetically sealing the entire module is also currently unfeasible. In addition, in order to increase the coupling efficiency between the semiconductor laser LD and the waveguide, it is necessary to couple them through at least one lens with little aberration, or at present, it is necessary to form a monolink lens with the above function on the waveguide. It's far away.
そこで現状では、半導体レーザとレンズとをマウント上
に実装して気密封止した半導体レーザパッケージや、受
光素子とレンズとをマウント上に実装して気密封止した
受光素子パッケージを使わざるを得ない。ところが、こ
れらのパッケージの高さ2幅、及び長さはいずれも数m
m程度の長さである。Therefore, at present, we have no choice but to use a semiconductor laser package in which a semiconductor laser and a lens are mounted on a mount and hermetically sealed, or a photodetector package in which a photodetector and a lens are mounted on a mount and hermetically sealed. . However, the height, width, and length of these packages are all several meters.
The length is about m.
そのため、第6図に示すように、半導体レーザLDに接
続される導波路54と、受光素子PDに接続される導波
路55との間隔2Gを、数mm以上にとらなければなら
ない、しかし、この間隙2Gを数mm以上にとると必然
的に曲線部の長さBが長くなるため、第7図に示すよう
に、導波路の全長りが20mm以上になって小形化が困
髭になるという問題がある。導波路の全長りが長くなる
と伝搬損失が増大するという問題点もある。Therefore, as shown in FIG. 6, the distance 2G between the waveguide 54 connected to the semiconductor laser LD and the waveguide 55 connected to the photodetector PD must be several mm or more. If the gap 2G is set to several mm or more, the length B of the curved part will inevitably become longer, and as shown in Figure 7, the total length of the waveguide will become more than 20 mm, making it difficult to miniaturize. There's a problem. There is also the problem that propagation loss increases as the total length of the waveguide increases.
さらには、半導体レーザバラゲージと受光素子パッケー
ジとが近接して配置されることになるので、光学的及び
電気的な信号のまわりこみによる漏話(クロストーク)
が生じるという問題点も懸念される。特に、高速、広帯
域な信号伝送(〉数百M b / s )を行う場合に
は、漏話の発生が非常に問題になる。 本発明の目的は
、上記課題を解消し、小型で漏話の少ない波長多重伝送
用の光合分波器及び光モジュールを提供することにある
。Furthermore, since the semiconductor laser package and the photodetector package are placed close to each other, crosstalk occurs due to optical and electrical signals crossing over.
There is also concern that this may occur. In particular, when performing high-speed, broadband signal transmission (>several hundred Mb/s), the occurrence of crosstalk becomes a serious problem. An object of the present invention is to solve the above-mentioned problems and provide an optical multiplexer/demultiplexer and an optical module for wavelength division multiplexing transmission that are small and have little crosstalk.
[課題を解決するための手段]
上記目的を達成するなめ本発明は、基板上に形成された
クラッド層内に複数の興なった波長の光信号を合波9分
波、或いは合分波するための光合分波導波路が形成され
ている光合分波器において、上記光合分波導波路の少な
くとも一つの分波光出射部が略り字型の曲り導波路から
成り、その曲り導波路の屈曲部先端に導波方向に対して
略45度の角度を有する反射端面が形成されていると共
にその反射端面か空気と接触するよう露出されているも
のである。[Means for Solving the Problems] The present invention achieves the above object by multiplexing and demultiplexing optical signals of a plurality of wavelengths in a cladding layer formed on a substrate. In an optical multiplexer/demultiplexer in which an optical multiplexer/demultiplexer waveguide is formed, at least one demultiplexed light output portion of the optical multiplexer/demultiplexer waveguide is composed of an abbreviated curved waveguide, and the tip of the bent portion of the curved waveguide A reflective end face having an angle of approximately 45 degrees with respect to the waveguide direction is formed at the end, and the reflective end face is exposed so as to come into contact with the air.
また、光合分波器は上記光合分波導波路が同一基板上に
複数個連結されて形成され、各光合分波導波路の少なく
とも一つの分波光出射部が上記曲り導波路から成るもの
でもよい。Further, the optical multiplexer/demultiplexer may be formed by connecting a plurality of the optical multiplexer/demultiplexer waveguides on the same substrate, and at least one demultiplexed light output portion of each optical multiplexer/demultiplexer waveguide may be formed of the curved waveguide.
また本発明は、基板上に形成されたクラッド層内に複数
の異なった波長の光信号を合波1分波。Furthermore, the present invention multiplexes a plurality of optical signals of different wavelengths in a cladding layer formed on a substrate.
或いは合分波するための光合分波導波路が形成され、そ
の光合分波導波路の分波後の光が取り出される各出射端
に発光素子、受光素子等が設けられている光モジュール
において、上記光合分波導波路の少なくとも一つの分波
光出射部が略り字形の曲り導波路から成り、その曲り導
波路の屈曲部先端に導波方向に対して略45度の角度を
有する反射端面が形成されていると共にその反射端面が
空気と接触するよう露出されているものである。Alternatively, in an optical module in which an optical multiplexing/demultiplexing waveguide for multiplexing and demultiplexing is formed and a light emitting element, a light receiving element, etc. are provided at each output end from which the demultiplexed light of the optical multiplexing/demultiplexing waveguide is taken out, the optical multiplexing/demultiplexing waveguide is provided. At least one demultiplexed light output part of the demultiplexing waveguide is composed of an abbreviated curved waveguide, and a reflective end face having an angle of approximately 45 degrees with respect to the waveguide direction is formed at the tip of the bent part of the curved waveguide. At the same time, its reflective end face is exposed so as to come into contact with the air.
[作用]
光合分波器に入射した光信号は光合分波導波路で分枝さ
れてそれぞれの波長の分波光出射部側へ伝搬する。略り
字型の曲り導波路から成る分波光出射部へ伝搬した分波
光は他の波長の分波光に対して略90度異なった方向に
出射されることになる。曲り導波路の屈曲部先端に上記
反射端面を形成し、その反射端面を空気と接触させるよ
う露出させることにより、分枝された光を反射端面で全
反射させてその伝搬方向を略90度変えることができる
ので、曲り導波路を設けることによる伝搬損失が極めて
少なく抑えられる。[Operation] The optical signal incident on the optical multiplexer/demultiplexer is branched by the optical multiplexer/demultiplexer waveguide and propagated to the demultiplexed light output section of each wavelength. The demultiplexed light that has propagated to the demultiplexed light emitting section formed of the abbreviated curved waveguide is emitted in a direction approximately 90 degrees different from the demultiplexed light of other wavelengths. By forming the above-mentioned reflective end face at the tip of the bent part of the curved waveguide and exposing the reflective end face to contact with air, the branched light is totally reflected at the reflective end face and its propagation direction is changed by approximately 90 degrees. Therefore, the propagation loss due to the provision of the curved waveguide can be suppressed to an extremely low level.
また、光合分波導波路が入射光中の波長成分の数に応じ
て複数個連結されて形成されることにより、入射光信号
はそれぞれの光合分波導波路で順次側々の波長の光信号
に分枝されて出射される。In addition, by forming a plurality of optical multiplexing/demultiplexing waveguides connected according to the number of wavelength components in the incident light, the incident optical signal is sequentially split into optical signals of side wavelengths in each optical multiplexing/demultiplexing waveguide. It is branched and emitted.
従って、多数の波長成分から成る光信号を個々の波長の
光信号に分波することかできる。また、各光合分波導波
路の少なくとも一つの光信号出射部を略I−字型の曲り
導波路で構成することにより、分波光の出射端相互を十
分に離間させることができる。これにより、分波光の出
射端に発光素子受光素子等を設ける際、これらの素子を
互いに十分に離間させて配置することができる。Therefore, an optical signal consisting of a large number of wavelength components can be demultiplexed into optical signals of individual wavelengths. Further, by configuring at least one optical signal output portion of each optical multiplexing/demultiplexing waveguide as a substantially I-shaped curved waveguide, the output ends of the demultiplexed light can be sufficiently spaced from each other. Thereby, when a light emitting element, a light receiving element, etc. are provided at the output end of the demultiplexed light, these elements can be arranged with a sufficient distance from each other.
また、光モジュールは、上記光合分波器の分枝光の出射
端に発光素子、受光素子等が設けられて構成されるので
これらの素子を互いに十分に離間させて配置することが
できる。従って、光学的漏話及び電気的漏話を効果的に
防止することかできる。Further, since the optical module is configured such that a light emitting element, a light receiving element, etc. are provided at the output end of the branched light of the optical multiplexer/demultiplexer, these elements can be arranged with a sufficient distance from each other. Therefore, optical crosstalk and electrical crosstalk can be effectively prevented.
[実施例] 本発明の実施例について説明する。[Example] Examples of the present invention will be described.
第1図(a)は本発明の光合分波器の一実雄例を示す側
面図、第1図(b)は第1図(a)のI−■線断面図で
ある。この光合分波器は、2つの興なった波長λ1.λ
2の入力光信号を分波する方向性結合型の光合分波導波
路7を基板1上に形成したものである。導波路は埋め込
み型で構成されている。すなわち、基板1上に形成され
た低屈折率ncのクラッド層2内に高屈折率nw()n
c)のコア導波路3及び4が埋め込まれて主に構成され
ている。クラッド層2の一組の対向する側面り、R間を
貫通させて設けられた直線状のコア導波路3は、上記波
長λ1及びλ2の光信号の入射端5を端面しに構成し、
分枝された一方の波長λ1の光信号の入射端6を端面R
に構成する。FIG. 1(a) is a side view showing an example of an optical multiplexer/demultiplexer of the present invention, and FIG. 1(b) is a sectional view taken along the line I--■ in FIG. 1(a). This optical multiplexer/demultiplexer has two distinct wavelengths λ1. λ
A directional coupling type optical multiplexing/demultiplexing waveguide 7 for demultiplexing two input optical signals is formed on the substrate 1. The waveguide is constructed as a buried type. That is, a high refractive index nw()n is formed in the cladding layer 2 with a low refractive index nc formed on the substrate 1.
It is mainly composed of the core waveguides 3 and 4 of c) embedded therein. A linear core waveguide 3 is provided so as to penetrate between a pair of opposing side surfaces of the cladding layer 2, and is configured such that the input end 5 of the optical signals of the wavelengths λ1 and λ2 faces the end face,
The input end 6 of one of the branched optical signals of wavelength λ1 is connected to the end surface R.
Configure.
直線状のコア導波路3に近接して形成されて上記光合分
波導波#I7を構成するコア導波路4はその分波光出射
部14が略り字型の曲り導波路1−1から成る8曲り導
波路11は、上記入力端5及び出射端6が形成された端
面り、Rとは異なる端面りに他方の波長λ2の出射端8
を構成する1曲り導波路11にはその屈曲部先端9が第
1図(b)に示すように導波方向に対して略45度の角
度に切り取られることにより反射端面12が形成されて
いる。そしてクラッド層2には、反射端面12を空気と
接触させるよう露出させるため、?1113が形成され
ている。The core waveguide 4 that is formed close to the linear core waveguide 3 and constitutes the optical multiplexing and demultiplexing waveguide #I7 has a demultiplexed light output section 14 consisting of an abbreviated curved waveguide 1-1. The curved waveguide 11 has an output end 8 with the other wavelength λ2 on an end face where the input end 5 and the output end 6 are formed, and on an end face different from R.
As shown in FIG. 1(b), the one-curved waveguide 11 constituting the curved waveguide 11 has a reflective end face 12 formed by cutting its bent end 9 at an angle of about 45 degrees with respect to the waveguide direction. . In order to expose the reflective end face 12 to the cladding layer 2 so as to make it contact with the air, ? 1113 is formed.
ここで、上記反射端面12における全反射臨界角θc
(=2cos−’(nw/n、))が92.8度である
ので、これよりも曲り導波路11の屈曲角度θが大きく
なるとこの屈曲部での伝搬損失が急激に増加する。従っ
て、上記向り導波路11の屈曲角度θは92.8度を越
えないようにして90度に近い値に設定される。また、
上記溝13は、例えばクラッド層2の上面よりフォトリ
ソグラフィ及びドライエツチングプロセスを用いて掘る
ことによって形成される。涌の深さdはコア導波路が埋
め込まれている深さよりも深く掘り、必要によっては基
板1の中まで掘っていってもよい、湧13の幅Gは少な
くとも数μmを必要とし、幅Gが広いほど光伝搬効率は
良くなる。Here, the total reflection critical angle θc at the reflective end face 12
(=2cos-'(nw/n,)) is 92.8 degrees, so when the bending angle θ of the curved waveguide 11 becomes larger than this, the propagation loss at this bend increases rapidly. Therefore, the bending angle θ of the direction waveguide 11 is set to a value close to 90 degrees so as not to exceed 92.8 degrees. Also,
The groove 13 is formed, for example, by digging from the upper surface of the cladding layer 2 using photolithography and dry etching processes. The depth d of the well is dug deeper than the depth at which the core waveguide is embedded, and it may be dug into the substrate 1 if necessary.The width G of the well 13 is required to be at least several μm; The wider the distance, the better the light propagation efficiency.
尚、基板1にはSt、GaAs、InP等の半導体、S
fO□、SiO□に種々の添加物が添加されたもの、サ
ファイア等のガラス、或いはLiNbO5、LiTa0
i等の強誘電体、さらには磁性体等を用いてもよい。Note that the substrate 1 is made of semiconductors such as St, GaAs, InP, etc.
fO□, SiO□ with various additives added, glass such as sapphire, or LiNbO5, LiTa0
A ferroelectric material such as i, or even a magnetic material may be used.
次に、この光合分波器の動作原理について説明する。Next, the operating principle of this optical multiplexer/demultiplexer will be explained.
直線状のコア導波F#13には2つの異なった波長λ1
.λ2の光信号が入射される。光信号は光合分波導波F
!?17に入射し、ここで波長λ1の光信号と波長λ2
の光信号とに分波される。一方の波長λ1の光信号は直
線状のコア導波路3内を伝搬して端面R側の出射端6よ
り出射される。他方の波長λ2の光信号は曲り導波路1
1内を伝搬する。There are two different wavelengths λ1 in the linear core waveguide F#13.
.. An optical signal of λ2 is input. Optical signal is optical multiplexing/demultiplexing waveguide F
! ? 17, where an optical signal of wavelength λ1 and an optical signal of wavelength λ2
The optical signal is split into two. One optical signal of wavelength λ1 propagates within the linear core waveguide 3 and is emitted from the output end 6 on the end surface R side. The other optical signal with wavelength λ2 is transmitted through curved waveguide 1.
Propagate within 1.
この曲り導波路11内の伝搬の際、光信号は屈曲部先端
9の反射端面12で全反射され、進行方向が直線状のコ
ア導波路3内を伝搬する光信号の進行方向に対して略直
交する方向に変えられる。そして波長λ2の光信号は、
入射@5や出射端6が形成された端面り、Rとは異なる
端面り側の出力端8より出射される。During propagation in this curved waveguide 11, the optical signal is totally reflected at the reflective end face 12 of the bending part tip 9, and the traveling direction is approximately relative to the traveling direction of the optical signal propagating in the linear core waveguide 3. Can be turned in orthogonal directions. And the optical signal of wavelength λ2 is
The light is emitted from the output end 8 on the side of the end face different from the end face R where the incident @5 and the outgoing end 6 are formed.
このように光合分波導波路7の分波光出射部14を略り
字型の曲り導波1111で構成することにより、導波路
の全長を長くすることなく夫々の分波光の出射端6,8
を適宜位置に形成することができる。これにより、光合
分波器の小型化、伝搬損失の低減化が達成できる。また
本実施例のように一方の波長λ1の光信号が出射される
側と他方の波長λ2の光信号が出射される側とを完全に
異ならせることにより、モジュール化する際に発光素子
と受光素子相互を十分に離間させて設けることかできる
ので、光学的漏話及び電気的漏話を効果的に防止するこ
とができる。By configuring the demultiplexed light output section 14 of the optical multiplexing/demultiplexing waveguide 7 with the abbreviated curved waveguide 1111 in this way, the output ends 6 and 8 of each demultiplexed light can be connected without increasing the total length of the waveguide.
can be formed at an appropriate position. This makes it possible to downsize the optical multiplexer/demultiplexer and reduce propagation loss. Furthermore, as in this embodiment, by completely differentiating the side from which the optical signal of one wavelength λ1 is emitted and the side from which the other optical signal of wavelength λ2 is emitted, it is possible to Since the elements can be provided with a sufficient distance from each other, optical crosstalk and electrical crosstalk can be effectively prevented.
尚、第2図に示すように、波長λ1の光信号を伝搬させ
る方の分波光出射部14が略り字型の曲り導波#II
It″構成されてもよい。As shown in FIG. 2, the demultiplexed light output section 14 that propagates the optical signal of wavelength λ1 is an abbreviated curved waveguide #II.
It'' may be configured.
第3図に示す光合分波器17は、3つの異なった波長λ
2.λ2.及びλ1の入力光信号を分波すべく、同一基
板上に2つの方向性結合型の光合分波導波路7a、7b
を互いに連結させて形成したものである。すなわち、基
板の対向する端面位置に入射端5並びに出射端6を有す
る一つの直線状コア導波路3の21!i所に、上記光合
分波S波路7a、7bを構成する2つのコア導波路4a
。The optical multiplexer/demultiplexer 17 shown in FIG.
2. λ2. and λ1, two directional coupling type optical multiplexing/demultiplexing waveguides 7a and 7b are installed on the same substrate.
are formed by connecting them to each other. That is, 21! of one linear core waveguide 3 having an input end 5 and an output end 6 at opposite end positions of the substrate! Two core waveguides 4a constituting the optical multiplexing/demultiplexing S wavepaths 7a and 7b are placed at the i location.
.
4bが夫々近接して形成されている。これら2つのコア
導波路4a、4bの分波光出射部14a。4b are formed close to each other. A demultiplexed light output section 14a of these two core waveguides 4a and 4b.
14bは互いに逆向きのFIIiL字型の曲り導波路1
1a、llbから成る。これにより、入射tIN5並び
に出射端6が形成された端面り、Rとは異なる対向する
端面り、Uに分波光の出射端15゜16が形成されてい
る。また、曲り導波路11a。14b is a FIIi L-shaped curved waveguide 1 facing in opposite directions.
It consists of 1a and llb. As a result, an output end 15° 16 of the demultiplexed light is formed on the end surface where the input tIN5 and the output end 6 are formed, and on the opposite end surface U, which is different from R. Also, a curved waveguide 11a.
11bの屈曲部先端9a、9bには導波方向に対して略
45度の角度を有する反射端面12a。A reflective end face 12a having an angle of approximately 45 degrees with respect to the waveguide direction is provided at the tip ends 9a and 9b of the bent portion 11b.
12bが形成され、クラッド層2にはこれら反射端面1
2a、12bを露出させるよう矩形状の渭13a、13
bが形成されている。入射#i5側の光合分波導波路7
aは、一つの波長λ2の光を分波して曲り導波路11a
PIへ導き、波長λ1並びにλ3の光はそのまま通過さ
せるよう構成されている。出射端6側の光合分波導波路
7bは、波長λ、の光を分波して曲り導波路11b側へ
導き、波長λ1の光はそのまま通過させるよう構成され
ている。12b are formed, and the cladding layer 2 has these reflective end faces 1.
Rectangular arms 13a, 13 to expose 2a, 12b.
b is formed. Optical multiplexing/demultiplexing waveguide 7 on the input #i5 side
a is a curved waveguide 11a that splits light with one wavelength λ2.
It is configured so that the light with wavelengths λ1 and λ3 is guided to the PI and passes through as is. The optical multiplexing/demultiplexing waveguide 7b on the side of the output end 6 is configured to split light with a wavelength λ and guide it to the curved waveguide 11b, while allowing the light with a wavelength λ1 to pass through as is.
コア導波路3に入射した3つの異なる波長λ1λ2.及
びλ、の光信号は先ず入射端591の光合分波導波路7
aで2つに分波される。すなわち、これら3つの波長の
うち波長λ2の光信号は分波されて曲り導波路11a側
へ導かれて端面りから出射され、残りの波長λ1並びに
λ、の光信号は光合分波導波i7b側へ導かれる。そし
て、波長λ1並びにλ、の光信号は、光合分波導波路7
bでさらに分波されて、波長λ、の光信号は曲り導波#
?l1lbflllへ導かれて端面Uから出射され、波
長λlの光信号はそのままコア導波路3内を伝搬して端
面Rから出射される。このように夫々の光合分波導波路
7a、7bの分波光出射部14a。Three different wavelengths λ1λ2 . The optical signals of
It is split into two at a. That is, among these three wavelengths, the optical signal with wavelength λ2 is demultiplexed and guided to the curved waveguide 11a side and emitted from the end face, and the remaining optical signals with wavelengths λ1 and λ are guided to the optical multiplexing/demultiplexing waveguide i7b side. be led to. The optical signals with wavelengths λ1 and λ are transmitted through the optical multiplexing/demultiplexing waveguide 7.
After being further split at b, the optical signal of wavelength λ is sent to the curved waveguide #
? The optical signal with the wavelength λl is guided to l1lbflll and emitted from the end surface U, and the optical signal with the wavelength λl propagates as it is in the core waveguide 3 and is emitted from the end surface R. In this way, the demultiplexed light output portions 14a of the respective optical multiplexing/demultiplexing waveguides 7a, 7b.
14bを略り字型の曲り導波F!@lla、11bで構
成することにより、3つの出射端6,15゜16を個々
に異なる端面位置に形成することができる。14b is an abbreviated curved waveguide F! By configuring with @lla and 11b, the three output ends 6, 15, 16 can be formed at different end face positions.
尚、波長間のアイソレーションを高く保つために、それ
ぞれの分波光の出射@6.15.16に非希望波長の光
信号を抑圧する干渉膜フィルタを設けてもよい。また、
光合分波導波路7a、7bの分波光出射部14a、14
bを複数の屈曲部を有する曲り導波路で構成して、出射
端の位置を適宜変えるようにしてもよい。In order to maintain high isolation between wavelengths, interference film filters may be provided at the outputs of the respective demultiplexed lights @6, 15, and 16 to suppress optical signals of undesired wavelengths. Also,
Demultiplexed light output parts 14a, 14 of optical multiplexing/demultiplexing waveguides 7a, 7b
b may be constructed of a curved waveguide having a plurality of bent portions, and the position of the output end may be changed as appropriate.
第4図に本発明の光モジュールの一実施例を示す、この
光モジュールは、上述の第1図の光合分波器10を用い
て構成した双方向伝送用光合分波器モジュールである。FIG. 4 shows an embodiment of the optical module of the present invention. This optical module is an optical multiplexer/demultiplexer module for bidirectional transmission constructed using the optical multiplexer/demultiplexer 10 of FIG. 1 described above.
すなわち、光モジュール18は、光合分波器10の端面
りの上記入射@5に光ファイバ19が、端面Rの上記出
射端6にレンズ付き半導体レーザー(発光素子)20が
、端面りの上記出射端8に干渉膜フィルタ21を備えた
受光素子22が設けられて構成されている。尚、端面R
は、半導体レーザー20の光信号がこの端面Rで反射さ
れて再び半導体レーザー20に戻って来ないよう角度φ
だけ斜めに加工されている。That is, in the optical module 18, the optical fiber 19 is connected to the input @5 on the end surface of the optical multiplexer/demultiplexer 10, the semiconductor laser (light emitting element) 20 with a lens is connected to the output end 6 of the end surface R, and the optical fiber 19 is connected to the above-mentioned output @5 on the end surface. A light receiving element 22 having an interference film filter 21 is provided at the end 8. In addition, the end surface R
is an angle φ so that the optical signal of the semiconductor laser 20 is not reflected by this end surface R and returns to the semiconductor laser 20 again.
It is processed diagonally.
この角度φは10度以下に設定される4、tな、干渉膜
フィルタ21は波長λ2の光信号を通し、波長λ1の光
信号を遮断するためのものである。This angle φ is set to 10 degrees or less.The interference film filter 21 is for passing the optical signal of wavelength λ2 and blocking the optical signal of wavelength λ1.
半導体レーザー20から発振された光信号(波長λ1)
は光合分波器10のコア導波路3内に入射し、矢印Aで
示す如く端面り側へ伝搬して光フアイバ19内へ出射さ
れる。一方、光フアイバ19内を伝搬してきた光信号(
波長λ2)は、入射端5よりコア導波F#I3内に入射
し、光合分波導波#I7で分枝されて曲り導波路11内
を伝搬し、干渉膜フィルタ21を通過して受光素子22
内へ入射される。Optical signal oscillated from semiconductor laser 20 (wavelength λ1)
enters the core waveguide 3 of the optical multiplexer/demultiplexer 10, propagates toward the end face side as shown by arrow A, and is emitted into the optical fiber 19. On the other hand, the optical signal (
The wavelength λ2) enters the core waveguide F#I3 from the input end 5, is branched by the optical multiplexing/demultiplexing waveguide #I7, propagates within the curved waveguide 11, passes through the interference film filter 21, and reaches the light receiving element. 22
Injected into the interior.
このように半導体レーザー2oと受光素子22の位置が
離れているので、光学的漏話及び電気的漏話の影響は小
さく抑えられる。また、光合分波導波路7の分枝光出射
部14を略り字型の曲り導波#&11で構成したことに
より、導波路の全長を長くすることなく半導体レーザ2
0と受光素子22相互が十分に離間されて設けられるの
で、光モジュールを小型に作ることができる。尚、光モ
ジュールは、受光素子のみを実装した分波器モジュール
、発光素子のみを実装した合波器モジュールであっても
よい。Since the positions of the semiconductor laser 2o and the light receiving element 22 are thus far apart, the influence of optical crosstalk and electrical crosstalk can be suppressed to a small level. In addition, by configuring the branched light output section 14 of the optical multiplexing/demultiplexing waveguide 7 with an abbreviated curved waveguide #&11, the semiconductor laser 2 can be used without increasing the total length of the waveguide.
Since the optical module 0 and the light receiving element 22 are provided with a sufficient distance from each other, the optical module can be made compact. Note that the optical module may be a demultiplexer module in which only a light receiving element is mounted, or a multiplexer module in which only a light emitting element is mounted.
[発明の効果]
以上要するに本発明によれば、小型で電気的及び光学的
漏話の少ない波長多重伝送用の光合分波器及び光モジュ
ールを実現することができる。[Effects of the Invention] In summary, according to the present invention, it is possible to realize an optical multiplexer/demultiplexer and an optical module for wavelength multiplexing transmission that are small and have little electrical and optical crosstalk.
第1図(a)は本発明の光合分波器の一実施例を示す側
面図、第1図(b)は第1図(a)のI−I線断面図、
第2図及び第3図は本発明の光合分波器の他の実施例を
示す図、第4図は本発明の光モジュールの一実施例を示
す図、第5図は波長多重伝送用光モジュールの従来例を
示す斜視図、第6図は光合分波器の従来例を示す図、第
7図は第6図の光合分波器を実現する場合の導波路の全
長と導波路間隔との関係の計算結果を示すグラフである
。
図中、1は基板、2はクラッド層、7.7a。
7bは光合分波導波路、6.8は出射端、9゜9a、9
bは屈曲部先端、1oは光合分波器、11、lla、l
lbは曲り導波路、12゜12a、12bは反射端面、
14.14a。
14bは分波光出射部、18は光モジュール、20は発
光素子、22は受光素子である。
特許出願人 日立電線株式会社
代理人弁理士 絹 谷 信 雄
第1図
第4図
第5図
第6図FIG. 1(a) is a side view showing an embodiment of the optical multiplexer/demultiplexer of the present invention, FIG. 1(b) is a sectional view taken along the line II in FIG. 1(a),
2 and 3 are diagrams showing other embodiments of the optical multiplexer/demultiplexer of the present invention, FIG. 4 is a diagram showing an embodiment of the optical module of the present invention, and FIG. 5 is a diagram showing an optical fiber for wavelength multiplexing transmission. FIG. 6 is a perspective view showing a conventional example of a module; FIG. 6 is a diagram showing a conventional example of an optical multiplexer/demultiplexer; FIG. It is a graph showing the calculation result of the relationship. In the figure, 1 is a substrate, 2 is a cladding layer, and 7.7a. 7b is an optical multiplexing/demultiplexing waveguide, 6.8 is an output end, 9°9a, 9
b is the tip of the bent part, 1o is the optical multiplexer/demultiplexer, 11, lla, l
lb is a curved waveguide, 12° 12a, 12b are reflective end faces,
14.14a. 14b is a demultiplexed light emitting section, 18 is an optical module, 20 is a light emitting element, and 22 is a light receiving element. Patent Applicant Hitachi Cable Co., Ltd. Patent Attorney Nobuo Kinutani Figure 1 Figure 4 Figure 5 Figure 6
Claims (1)
波長の光信号を合波、分波、或いは合分波するための光
合分波導波路が形成されている光合分波器において、上
記光合分波導波路の少なくとも一つの分波光出射部が略
L字型の曲り導波路から成り、該曲り導波路の屈曲部先
端に導波方向に対して略45度の角度を有する反射端面
が形成されていると共に該反射端面が空気と接触するよ
う露出されていることを特徴とする光合分波器。 2、上記光合分波導波路が同一基板上に複数個連結して
形成され、各光合分波導波路の少なくとも一つの光合光
出射部が上記曲り導波路から成ることを特徴とする請求
項1記載の光合分波器。 3、基板上に形成されたクラッド層内に複数の異なった
波長の光信号を合波、分波、或いは合分波するための光
合分波導波路が形成され、該光合分波導波路の分波後の
光が取り出される各出射端に発光素子、受光素子等が設
けられている光モジュールにおいて、上記光合分波導波
路の少なくとも一つの分波光出射部が略L字形の曲り導
波路から成り、該曲り導波路の屈曲部先端に導波方向に
対して略45度の角度を有する反射端面が形成されてい
ると共に該反射端面が空気と接触するよう露出されてい
ることを特徴とする光モジュール。[Claims] 1. An optical multiplexer in which an optical multiplexing/demultiplexing waveguide for multiplexing, demultiplexing, or multiplexing and demultiplexing a plurality of optical signals of different wavelengths is formed in a cladding layer formed on a substrate. In the demultiplexer, at least one demultiplexed light output portion of the optical multiplexing/demultiplexing waveguide is comprised of a substantially L-shaped curved waveguide, and the tip of the curved portion of the curved waveguide is formed at an angle of approximately 45 degrees with respect to the waveguide direction. What is claimed is: 1. An optical multiplexer/demultiplexer characterized in that a reflective end face is formed and the reflective end face is exposed so as to come into contact with air. 2. The optical multiplexing/demultiplexing waveguide is formed by connecting a plurality of them on the same substrate, and at least one optical combining/demultiplexing waveguide of each optical multiplexing/demultiplexing waveguide is formed of the curved waveguide. Optical multiplexer/demultiplexer. 3. An optical multiplexing/demultiplexing waveguide for multiplexing, demultiplexing, or multiplexing/demultiplexing optical signals of a plurality of different wavelengths is formed in the cladding layer formed on the substrate, and the optical multiplexing/demultiplexing waveguide is In an optical module in which a light emitting element, a light receiving element, etc. are provided at each output end from which the subsequent light is extracted, at least one branched light output section of the optical multiplexing/demultiplexing waveguide is comprised of a substantially L-shaped curved waveguide; An optical module characterized in that a reflective end face having an angle of approximately 45 degrees with respect to the waveguide direction is formed at the tip of a bent portion of a curved waveguide, and the reflective end face is exposed so as to come into contact with air.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16286490A JPH0453908A (en) | 1990-06-22 | 1990-06-22 | Optical multiplexer/demultiplexer and optical module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16286490A JPH0453908A (en) | 1990-06-22 | 1990-06-22 | Optical multiplexer/demultiplexer and optical module |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0453908A true JPH0453908A (en) | 1992-02-21 |
Family
ID=15762713
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16286490A Pending JPH0453908A (en) | 1990-06-22 | 1990-06-22 | Optical multiplexer/demultiplexer and optical module |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0453908A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5441192A (en) * | 1993-12-03 | 1995-08-15 | Kanematsu-Nnk Corporation | Fastener driving tool |
JPH08171032A (en) * | 1994-09-21 | 1996-07-02 | Alcatel Nv | Optical coupling device |
JPH09178963A (en) * | 1995-12-26 | 1997-07-11 | Nec Corp | Light wavelength discrimination circuit and manufacture therefor |
JP2009300617A (en) * | 2008-06-11 | 2009-12-24 | Fuji Xerox Co Ltd | Light guide plate and optical module |
JP2019035877A (en) * | 2017-08-17 | 2019-03-07 | 日本電信電話株式会社 | Optical integrated circuit |
CN114167546A (en) * | 2021-12-06 | 2022-03-11 | 浙江光特科技有限公司 | Low-crosstalk optical integrated chip |
-
1990
- 1990-06-22 JP JP16286490A patent/JPH0453908A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5441192A (en) * | 1993-12-03 | 1995-08-15 | Kanematsu-Nnk Corporation | Fastener driving tool |
JPH08171032A (en) * | 1994-09-21 | 1996-07-02 | Alcatel Nv | Optical coupling device |
JPH09178963A (en) * | 1995-12-26 | 1997-07-11 | Nec Corp | Light wavelength discrimination circuit and manufacture therefor |
JP2009300617A (en) * | 2008-06-11 | 2009-12-24 | Fuji Xerox Co Ltd | Light guide plate and optical module |
JP2019035877A (en) * | 2017-08-17 | 2019-03-07 | 日本電信電話株式会社 | Optical integrated circuit |
CN114167546A (en) * | 2021-12-06 | 2022-03-11 | 浙江光特科技有限公司 | Low-crosstalk optical integrated chip |
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