JPH0453138U - - Google Patents

Info

Publication number
JPH0453138U
JPH0453138U JP9416990U JP9416990U JPH0453138U JP H0453138 U JPH0453138 U JP H0453138U JP 9416990 U JP9416990 U JP 9416990U JP 9416990 U JP9416990 U JP 9416990U JP H0453138 U JPH0453138 U JP H0453138U
Authority
JP
Japan
Prior art keywords
clean room
cold air
warm
air supply
ceiling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9416990U
Other languages
Japanese (ja)
Other versions
JP2522007Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990094169U priority Critical patent/JP2522007Y2/en
Publication of JPH0453138U publication Critical patent/JPH0453138U/ja
Application granted granted Critical
Publication of JP2522007Y2 publication Critical patent/JP2522007Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図、第２図は、本案実施例で、第１図は、
構成要領截断平面図、第２図は、構成要領截断側
面図、第３図、第４図は、従来例で、第３図は、
構成要領截断平面図、第４図は、構成要領截断側
面図である。 １……クリーンルーム、２……天井チヤンバー
、３……天井枠体、４……フアンユニツト、５…
…フイルター、６……床下チヤンバー、７……通
風床、８……間仕切り壁、９……閉じ板、１１…
…還流路、２１……暖・冷風供給空間、２２……
隙間、４１……受け口、４２……通風量調整ダン
パー、４３……フアン、４４……逆流防止ダンパ
ー、Ａ……クリーンルーム、Ｂ……天井チヤンバ
ー、Ｃ……床下チヤンバー、Ｄ……天井枠体、Ｅ
……通風床、Ｆ……フアンユニツト、Ｇ……フイ
ルター、Ｈ……間仕切り壁、Ｉ……還流路、Ｊ…
…送風ダクト、Ｋ……枝ダクト、Ｌ……風量調整
ダンパー。 Figures 1 and 2 are examples of the present invention, and Figure 1 is
FIG. 2 is a cross-sectional plan view of the configuration, FIG. 3 is a cross-sectional side view of the configuration, FIGS. 3 and 4 are conventional examples, and FIG.
FIG. 4 is a cross-sectional plan view of the configuration. FIG. 4 is a cross-sectional side view of the configuration. 1...Clean room, 2...Ceiling chamber, 3...Ceiling frame, 4...Fan unit, 5...
... Filter, 6 ... Underfloor chamber, 7 ... Ventilation floor, 8 ... Partition wall, 9 ... Closing plate, 11 ...
...reflux path, 21...warm/cold air supply space, 22...
Gap, 41... Socket, 42... Ventilation volume adjustment damper, 43... Fan, 44... Backflow prevention damper, A... Clean room, B... Ceiling chamber, C... Underfloor chamber, D... Ceiling frame body ,E
... Ventilation floor, F ... Fan unit, G ... Filter, H ... Partition wall, I ... Return path, J ...
...Blower duct, K...Branch duct, L...Air volume adjustment damper.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] クリーンルーム１と天井チヤンバー２との境界
部に設けた天井枠体３に、クリーンルーム１内の
空気を導入して天井チヤンバー２へと送風する複
数のフアンユニツト４…を配列するとともに、そ
の送風空気を清浄化してクリーンルーム１へと流
出させる複数のフイルター５…を配列したクリー
ンルーム装置において、それらのフアンユニツト
４…の背後に天井チヤンバー２を区分して形成し
た共通の暖・冷風供給空間２１を設け、また、そ
れらのフアンユニツト４…の背面にその暖・冷風
供給空間２１からの暖・冷風を導入する受け口４
１…を設け、更に、各受け口に通風量調整ダンパ
ー４２…を設けたことを特徴とするクリーンルー
ムの暖・冷風供給装置。 A plurality of fan units 4 for introducing air from the clean room 1 and blowing it to the ceiling chamber 2 are arranged in the ceiling frame 3 provided at the boundary between the clean room 1 and the ceiling chamber 2, and the blown air is In a clean room device in which a plurality of filters 5 for cleaning and flowing out into a clean room 1 are arranged, a common warm/cold air supply space 21 formed by dividing a ceiling chamber 2 is provided behind these fan units 4, In addition, a socket 4 for introducing warm/cold air from the warm/cold air supply space 21 is provided on the back of the fan unit 4...
1. A clean room hot/cold air supply device characterized in that a ventilation volume adjustment damper 42 is provided at each intake.
JP1990094169U 1990-09-06 1990-09-06 Clean room equipment Expired - Fee Related JP2522007Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990094169U JP2522007Y2 (en) 1990-09-06 1990-09-06 Clean room equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990094169U JP2522007Y2 (en) 1990-09-06 1990-09-06 Clean room equipment

Publications (2)

Publication Number Publication Date
JPH0453138U true JPH0453138U (en) 1992-05-07
JP2522007Y2 JP2522007Y2 (en) 1997-01-08

Family

ID=31831913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990094169U Expired - Fee Related JP2522007Y2 (en) 1990-09-06 1990-09-06 Clean room equipment

Country Status (1)

Country Link
JP (1) JP2522007Y2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08261531A (en) * 1995-03-27 1996-10-11 Toyo Netsu Kogyo Kk Clean room system
US10495094B2 (en) 2003-03-20 2019-12-03 Nortek Air Solutions, Llc Modular fan housing with multiple modular units having sound attenuation for a fan array for an air-handling system
US10641271B2 (en) 2003-03-20 2020-05-05 Nortek Air Solutions, Llc Fan array fan section in air-handling systems
US11255332B2 (en) 2003-03-20 2022-02-22 Nortek Air Solutions, Llc Modular fan housing with multiple modular units having sound attenuation for a fan array for an air-handling system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60194230U (en) * 1984-06-02 1985-12-24 高砂熱学工業株式会社 clean tunnel
JPS61243236A (en) * 1985-04-19 1986-10-29 Hitachi Ltd Clean working chamber
JPS62132326U (en) * 1986-02-17 1987-08-20

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60194230U (en) * 1984-06-02 1985-12-24 高砂熱学工業株式会社 clean tunnel
JPS61243236A (en) * 1985-04-19 1986-10-29 Hitachi Ltd Clean working chamber
JPS62132326U (en) * 1986-02-17 1987-08-20

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08261531A (en) * 1995-03-27 1996-10-11 Toyo Netsu Kogyo Kk Clean room system
US10495094B2 (en) 2003-03-20 2019-12-03 Nortek Air Solutions, Llc Modular fan housing with multiple modular units having sound attenuation for a fan array for an air-handling system
US10641271B2 (en) 2003-03-20 2020-05-05 Nortek Air Solutions, Llc Fan array fan section in air-handling systems
US11255332B2 (en) 2003-03-20 2022-02-22 Nortek Air Solutions, Llc Modular fan housing with multiple modular units having sound attenuation for a fan array for an air-handling system

Also Published As

Publication number Publication date
JP2522007Y2 (en) 1997-01-08

Similar Documents

Publication Publication Date Title
JPH0453138U (en)
JPH03111840U (en)
JPH0478430U (en)
JPS5928266Y2 (en) Conditioned air blower
JPH0198286U (en)
JPH0439618U (en)
JPH0439645U (en)
JPS6240437U (en)
JPS62130331U (en)
JPH01100039U (en)
JPH0313055U (en)
JPS63178733U (en)
JPH0295793U (en)
JPH01136821U (en)
JPS61178136U (en)
JPS63162241U (en)
JPH0450331U (en)
JPH03107631U (en)
JPH0241012U (en)
JPH0220031U (en)
JPH0188322U (en)
JPH03100717U (en)
JPH0443736U (en)
JPS63188417U (en)
JPH03111805U (en)

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees