JPH0429852Y2 - - Google Patents

Description

[Detailed Description of the Invention] "Industrial Application Field" This invention relates to a low-noise air cleaning device suitable for use in, for example, clean rooms.

"Prior Art" Conventionally, the one shown in FIG. 5 is known as an air cleaning device used in clean rooms of semiconductor factories and the like.

This air purifier consists of a main air purifier 2 equipped with an inlet 1 for recirculating air from a clean room, a filter box 4 equipped with an air outlet 3 for air into the clean room, and a main air purifier 2 and a filter box 4 equipped with an inlet 1 for recirculating air from a clean room. Each main component is a duct 5 that communicates with each other.

A blower 6 is provided inside the main air cleaner 2, and by operating the blower 6, the air taken in from the suction port 1 and the outside air intake port 7 is cooled once by a cooling coil (not shown), and the air is silenced. After the sound is silenced in the box 8 and chamber 9, it is passed through the duct 5 to the filter box 4.
supply to. The air purified through the filter 10 is then blown out into the clean room from the outlet 3.

In air purifiers with such conventional configurations, noise countermeasures such as motor noise and air flow noise are
A sound absorbing material 11 is pasted on each inner wall of the main air cleaner 2, and a sound deadening box 8 and a chamber 9 are provided as described above. Furthermore, inside the filter box 4, a rectifying plate 12 is provided in front of the opening of the duct 5 to detour the air in the horizontal direction. It is designed to block direct sound to 3.

"Problems to be Solved by the Invention" However, in the above-mentioned conventional air purifying apparatus, measures against noise in the clean room of the air purifying apparatus are still insufficient in the following points.

In other words, since the main air purifier's suction port 1 is not equipped with any noise reduction device other than a rattle,
Noise such as motor sound of blower 6 is directly inlet 1
easily spread to the outside. Moreover, the noise from the duct 5 passes through the gap S between the rectifying plate 11 provided on the side of the air outlet 3 of the filter box 4 and the inner wall 4a, and reaches the air outlet 3 almost directly.
The silencing effect cannot be expected to be that great.

This invention was made in view of the above-mentioned circumstances, and aims to provide an air cleaning device with higher noise reduction effect.

``Means for solving the problem'' This idea consists of a main air cleaner equipped with an air inlet, a filter box equipped with an air outlet, and a duct that communicates the main air cleaner and the filter box. A cell member for silencing is provided at the suction port of the main air cleaner, and a rectifying plate for diffusing the air flow from the duct is provided inside the filter box at the opening of the duct. It is located at the front, and the current plate is integrated with the inner wall near the duct.

"Operation" Among the noises generated by operating the air purifier, the sound that diffuses to the outside from the suction port of the main air purifier is reduced to a smaller level by the cell member provided at the suction port. Furthermore, the sound that diffuses to the outside from the air outlet of the filter box is reduced to a smaller level because the direct sound from the duct is blocked by the current plate.

"Embodiments" Hereinafter, embodiments of this invention will be described with reference to the drawings.

Figures 1 to 4 show an embodiment of this invention, in which four air purifiers are connected to form a unit, and a clean room is formed below the unit. In the figure, the same members as in FIG. 1 are designated by the same reference numerals.

The air purifying device of this embodiment constantly supplies clean air to the clean room C, as shown by the arrow in FIG.
The system is such that the air is blown from the ceiling to the bottom of the floor and then returned to the air purifier through the utility area U.

The above-mentioned air purifying device has a main air purifier 2 and a filter box 4, which are installed above and below each other, and are communicated vertically through a duct 5. In this embodiment, there are four sets as shown in FIG. One clean room C is composed of the air purifiers K, K, and so on. In addition, the code|symbol 20 shows the front room of the clean room C.

The main air cleaner 2 is divided into two upper and lower chambers as shown in FIG.
The air supply chamber 21 shown in the figure is provided, and the lower chamber is also provided with a silencing box 8 communicating with the upper chamber and a chamber 9 communicating with the silencing box 8.

The air supply chamber 21 is connected to an intake port 7 for treated outside air, and also has an intake port 1 formed of a louver for sucking in the return air flow from the clean room C. The suction port 1 is provided with a cell member 22, which is one of the features of this invention.

This cell member 22 is intended to reduce the direct sound that diffuses to the outside from the suction port 1 among the noises (motor sound, airflow sound, etc.) generated by operating the air purifier. It's hot,
By dividing the cross section of the rectangular tube into small sections (for example, into four chambers), the area to which the sound absorbing material 11 is attached is increased,
This increases the absorption efficiency of sound passing through the rectangular tube.

Further, a cooling coil 24 is provided at the rear (discharge side) of the air supply chamber 21 via a prefilter 23 . A blower 6 that supplies cooling air to the silencing box 8 is provided on the side (discharge side) of the cooling coil 24. Note that a sound absorbing material 11 such as glass wool is pasted around the inner walls of these upper chambers.

Further, on the inner wall of the sound deadening box 8 in the lower chamber, a sound absorbing material 11 and a punching metal 26 are respectively pasted on the inner wall of the sound deadening box 8 with an air layer 25 interposed therebetween. By providing this, it is hoped that a sound silencing effect will be achieved through sound resonance.

Further, a check damper 27 is provided at the communication port 9a between the noise reduction box 8 and the chamber 9, located on the chamber 9 side, so that the airflow passing through the communication port 9a is detoured in the vertical direction. . The role of the check damper 27 is to adjust the air volume and prevent backflow when the blower 6 stops, and especially to block direct sound from the noise reduction box 8. The attached sound absorbing material 11 can also be expected to have a sound deadening effect.

On the other hand, a filter box 4 is provided below the main air cleaner 2, and this filter box 4 is connected via a duct 5 to a chamber 9 of the main air cleaner 2 above. Air outlets 3, 3... are provided on the lower surface of the filter box 4, and filters 10, 10 are provided above the outlets 3, 3... for purifying the air supplied from the duct 5, respectively. ...is installed. As this filter 10, for example,
HEPA filters, ULPA filters, super ULPA filters, etc. are used.

Moreover, on the inner wall 4a of the filter box 4,
A rectifying plate 12 larger than the area of the opening is horizontally and integrally attached near the bottom of the opening of the duct 5. This current plate 12 is one of the features of this invention, and its role is to temporarily detour the airflow from the duct 5 in the horizontal direction, thereby uniformizing the wind speed distribution on the filters 10, 10... and air outlet 3 from duct 4.
The purpose is to improve the silencing effect by blocking direct sound to the air outlet (especially the right side air outlet).

Note that the baffle plate 12 may be integrally attached to the inner wall 4a by screwing or welding, or may be formed integrally with the inner wall 4a in advance. The point is to eliminate the gap between the rectifying plate 12 and the inner wall 4a to improve the airtightness between them.

Since this rectifier plate 12 is provided integrally with the inner wall 4a, the direct sound shielding effect from the duct 4 is good.
Coupled with the sound absorption effect described in No. 1, the noise level at the air outlet 3 can be further reduced.

Next, the operation of the air purifying device having the above configuration will be explained.

First, the blower 6 is activated. Then, the air in the clean room C is supplied into the air supply chamber 21 through the suction port 1, and the treated outside air is supplied through the outside air intake port 7, respectively. The supplied air passes through the prefilter 23 and is cooled by the cooling coil 24, and then is supplied by the blower 6 to the silencing box 8 in the lower chamber. Furthermore, after passing through the communication portion 9a, the water bypasses the check damper 27 up and down and is sent to the filter box 4 via the duct 5.

Next, the airflow sent to the filter box 4 is detoured in one horizontal direction by the rectifier plate 12, and then passes through the filters 10, 10... at a uniform wind speed. The cleaned air is blown out into the clean room C from the air outlets 3, 3, . . . .

Next, after being discharged under the floor of the clean room C, the air passes through the utility area U and is sucked into the suction port 1 of the main air cleaner 2 again as a return air flow.

Next, the silencing effect of the air purifying device will be explained.

First, regarding the sound leaking from the suction port 1, the sound of the motor, etc. in the upper room of the main air purifier 2 is
1, the sound is further reduced to a lower level by the cell member 22, and then diffused to the outside.

Next, regarding the sound leaking from the air outlet 3, after the motor sound and airflow sound from the blower 6 are absorbed by the resonance effect in the silencing box 8, the direct sound that enters the chamber 9 from the silencing box 8. The sound is further reduced by being blocked by the check damper 27. Then, the direct sound that enters the filter box 4 through the duct 5 is further blocked by the rectifying plate 27, thereby being further attenuated and then diffused to the outside.

Here, measurement data of the noise at the suction port 1 and the blowout port 3 conducted by the present inventors will be described below.

First, when measured at a position 30 cm in front of the suction port 1 (point A position in Figure 3) as shown, it was 69 dB (A) without the cell member 22, but 66 dB (A) with the cell member 22 installed. A sound reduction effect of 3 dB (A) was confirmed.

Further, when measured at a position 30 cm below the air outlet 3, it was confirmed that the current baffle plate 12 of this embodiment had a sound reduction effect of about 2 dB (A) compared to the conventional baffle plate 12.

Furthermore, as a result of verifying the silencing effect at 1.2 m above the floor (point B in Figure 3) in a clean room C made by connecting four air purifiers K, K..., the noise reduction effect was 69 dB (A) with the conventional method. However, in the method of this example, the sound reduction effect was 65 dB (A), and a sound reduction effect of 4 dB (A) was confirmed. As described above, the effects of noise countermeasures in this embodiment are obvious.

Note that the chambers 9, 9 of the air purifiers K and K of this embodiment are connected to each other via a communication path 28, so that if one air purifier K breaks down, the other air purifier K connects to the chambers 9, 9 through the communication path 28. 28 so that airflow can be directed through it. Therefore, the two air purifiers K, K can perform a backup system for each other.

"Effects of the invention" As explained in detail above, according to this invention, a cell member is provided at the suction port of the main air purifier, so
Noise at the suction port passes through the cell member and is absorbed, resulting in a large sound reduction effect. In addition, a rectifying plate for diffusing the airflow from the duct is installed inside the filter box, located in front of the opening of the duct, so direct sound from the duct to the outlet is blocked. The noise from
Great sound reduction effect. Moreover, since the rectifying plate is integrated with the inner wall near the duct, there is no gap between the rectifying plate and the inner wall, which improves the direct sound shielding effect and reduces the noise from the air outlet. ,
The sound reduction effect becomes even greater.

Therefore, the noise from the suction port and the air outlet, which are the main noise diffusion ports, can be effectively reduced, and overall, better noise countermeasures can be taken.

[Brief explanation of the drawing]

Figures 1 to 4 show one embodiment of this invention, in which Figure 1 is a sectional view of an air purifier, Figure 2 is a plan view of the air cleaner, and Figure 3 is a diagram of four air cleaners. 4 is a top view of the system shown in FIG. 3, and FIG. 5 is a conventional example of an air cleaning device. 1... Suction port, 2... Main air cleaner, 3... Outlet, 4... Filter box, 5... Duct,
22... Cell member, 12... Current plate.

Claims (1)

[Scope of utility model registration request] The main air cleaner is equipped with a main air cleaner having an air inlet, a filter box having an air outlet, and a duct that communicates the main air cleaner and the filter box. A cell member for noise reduction is provided at the mouth, and a rectifying plate for diffusing the airflow from the duct is provided inside the filter box, located in front of the opening of the duct. An air purifying device characterized in that the rectifying plate is integrally provided with the inner wall near the duct.