JPH04199709A - Apparatus for successive treatment - Google Patents

Abstract

PURPOSE:To suppress waiting times of an object to be treated in the inside and outside of an apparatus, by connecting two carrying chambers through one buffer chamber, and by allowing a temporary stay of the object to be treated, and further, by connecting the buffer chamber with the carrying chamber alternately to move the object to be treated in one direction. CONSTITUTION:A buffer chamber 41, in which an object to be treated is stayed temporarily, and two carrying chambers 31, 32 connected through the buffer chamber 41 are provided. A second buffer chamber 42 is connected with one carrying chamber 32 in a desired direction, and further, the carrying chamber 32 is connected with the next carrying chamber 33 through the second buffer chamber 42. Successively, by repeating such connections, the carrying route whose direction can be selected suitably is formed, and treatment chambers 52-54 are connected with the carrying chambers 31-33 in the carrying route, in the order of desired processes being performed. As a result, the apparatuses for the processes of a pretreatment and aftertreatment can be connected directly with this apparatuses for successive treatments. Thereby, the object to be treated does not return to the buffer chamber through which the object has been inputted, and since it doesn't disturb the receiving of the next object to be treated which waits in the pretreatment, the waiting time of the next object to be treated is not increased.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a continuous processing apparatus, and particularly relates to a continuous processing apparatus suitable for sequentially and continuously performing a plurality of different vacuum processes in various orders. .

[Prior art] As a conventional composite vacuum processing apparatus, there is a
There is one described in Japanese Patent No. 7870.

This conventional device will be explained with reference to FIGS. 5A and 5B.

Figures 5A and 5B show conventional continuous processing equipment 600°700
FIG.

Fig. 5A will be explained.

In the figure, 51, 52, 53 are processing chambers for processing objects to be processed, and 1.11 is an input/output chamber 12 (load lock chamber 1, buffer chamber 1, , ], ) , 3 is a separation chamber for distributing the processed material that has entered from the input/output chamber to the target processing chamber.

Here, if we focus on the movement of the processed object and look at the operation,
The workpiece sent from the load lock chamber 1 is sent to the separation chamber 3 via the buffer chamber 1].
Processing chamber 51, where the intended initial processing is performed.
52 or 53.

After the first treatment is performed in the first treatment chamber, the object to be treated is returned to the separation chamber 3 and then sent to the next treatment chamber for the next treatment.

In this way, the objects to be processed are sequentially sent to each of the processing chambers 51, 52, 53 in an arbitrary order centering on the separation chamber 3, and are continuously processed. After being processed, it is returned to the load lock chamber 1 via the buffer chamber 1 and taken out of the apparatus.

Furthermore, in the conventional example, if four or more processing chambers are required, as shown in FIG. 5B, a separation chamber 3]
- is increased in the opposite direction to the input/output chambers 1 and 11 to accommodate the increase in the number of processing chambers. Here, the buffer chamber ]-1 is a mere passage chamber for the processed material, and
- Time retention is performed in separation chambers 31 and 32.

[Problems to be Solved by the Invention] In the conventional example described in item 1, the object to be processed is transported through one reciprocating transport path composed of the input/output chamber 12 and the separation chamber 3 (31, 32). Therefore, the conveying means for moving the objects to be processed is used for both reciprocating purposes, and the objects to be processed cannot be taken in and taken out at the same time.As the number of processing chambers increases, there is a problem in that the waiting time in the input/output chamber 12 increases.

That is, in the apparatus shown in FIG. 5A, the processing chamber 51→
When processing is carried out in the order of 52 → 53, the object to be processed is taken out from the final upper processing chamber 53, transferred to the input/output chamber J2, and then transferred to each processing chamber. If each workpiece is not transferred to the processing chamber of the sequential method,
New objects to be processed cannot be taken in from the input/output chamber 12.

In addition, if you want to form an integrated continuous processing process that combines the processing processes of other devices before and after the processing process of this device, the input/output chamber]-2 is limited to one location. A processing device that processes the process and an input/output chamber 12 of this device
It is not possible to connect directly to the equipment, and a transport means must be prepared to move the workpiece to and from the equipment.

The purpose of the present invention is that even if the number of processing chambers increases, the waiting time for processing does not increase, and furthermore, it can be directly connected to the processing process equipment before and after it without restrictions on directionality, and there is no need to separately prepare transportation means between the equipment. The purpose of the present invention is to provide a continuous processing device without any

"Means for Solving the Problem" The above purpose is achieved by using a continuous processing device comprising a buffer chamber in which the material to be processed is temporarily retained and two transfer chambers connected via this buffer chamber. It can be achieved.

Furthermore, the above object can also be achieved by alternately connecting a necessary number of buffer chambers and transfer chambers.

[Function] In the continuous processing apparatus of the present invention, the first buffer chamber is located between the two transport chambers, and forms a transport path unit for the object to be processed.

A second buffer chamber is connected to one transfer chamber in the desired direction, and further, the next transfer chamber is connected via this second buffer chamber. Repeat this connection one after another,
A conveyance path that selects an appropriate direction is formed, and processing chambers are connected to the conveyance chambers in the conveyance path in a desired process order. As a result, the preceding and succeeding processing devices can be directly connected to this continuous processing device.

In this continuous processing apparatus, a workpiece that has been subjected to a target process in one processing chamber is transferred to a buffer chamber on the next process side via a transfer chamber connected to this processing chamber. In this way, since the object to be processed does not return to the buffer chamber into which it was input, it does not interfere with the taking in of the next object to be processed that is waiting in the previous process. As a result, the waiting time for the next object to be processed is not increased.

[Example] Next, embodiments of the present invention will be described with reference to the drawings.

A first embodiment of the present invention will be described using FIG. 1A.

FIG. 1 is an explanatory diagram of the operation of the continuous processing device W100 of this embodiment.

In the figure, 1 is a load chamber for taking in the workpiece, 2 is an unloading room for taking out the workpiece, 31, 32, 33 is a transport chamber equipped with transport means such as belts and rollers, 41, 42
is a buffer chamber interposed between the transfer chambers, and 51, 52
,53,54. ．． Reference numeral 55 denotes a processing chamber in which the object to be processed is subjected to vacuum processing such as etching, film formation, or heat treatment.

Each chamber is separated by a gate valve 61 provided in the transfer chamber, and a unique exhaust device (not shown) provided in each chamber maintains the vacuum conditions required in each chamber. .

Next, a case will be described in which a workpiece is processed using this continuous processing apparatus 100.

A plurality of arrows shown in the figure indicate the moving direction of the object to be processed.

The workpiece that has entered the transfer chamber 31 from the load chamber 1 is sent to one of the processing chambers 51 and 52 where a desired initial treatment is performed. The workpiece that has been processed for the first time in the processing chamber to which it has been sent is returned to the transfer chamber 31 after the processing is completed, and is sent to one of the other processing chambers 52, 51, or
It is sent to buffer room 8. In other words, since the object to be processed does not return to the load chamber 1 into which it was initially sent,
The next object to be processed, which is waiting in the loading chamber or outside the apparatus, can be taken into the transfer chamber 31 without being hindered and sent to the processing chamber.

Similarly, in the transfer chamber 32, the workpiece that has been processed in the processing chamber 53 is transferred to the buffer chamber 42 on the next process side, and then the workpiece that was waiting in the buffer chamber 41 on the previous process side is The object is transferred to the transfer chamber 32 without being obstructed by the object to be processed.
and sent to the processing chamber 53. Furthermore, the transfer chamber 3
3, the workpiece that has been vacuum-processed in the processing chamber 54 or 55 is taken out to the unloading chamber 2 via the transfer chamber 33, and the next workpiece waiting in the buffer chamber 42 is transferred. , the transfer chamber 33 without being obstructed by the object to be processed.
and transported to the processing chamber 54 or 55.

Therefore, when one transport unit (a buffer chamber and two transport chambers connected via this buffer chamber) is considered, the waiting time for transferring the processed material can be reduced in this transport unit, so the transport before and after it can be Depending on the transfer of the processed material in the room,
By appropriately controlling the retention of the objects to be processed in each buffer chamber using a computer or the like, it is possible to suppress the waiting time for processing the objects to be processed in the apparatus.

Here, the transport path of the processed material in this embodiment is, excluding the entry and exit to and from each processing chamber, load chamber 1→transfer chamber 3]→buffer chamber 41→transfer chamber 32→buffer chamber 42→transfer chamber 3
3 → A conveyance path unit 3 which passes through the unloading chamber 2 and in which each buffer chamber 41 and 42 are located in the middle.
]→41→32 and 32→42→33 are arranged in a straight line. On the other hand, the pretreatment process device 6 of this device. Post-processing
[Since the processing device 7 is located on one side of this linear conveyance path, the processing device 7 is located on one side of the linear conveyance path, so that the chamber 1. The unloading chamber 2 is similarly arranged on one side of the linear conveyance path and is directly connected to these pre- and post-processing process devices.

Next, a second embodiment of the present invention will be described using FIG. 1B.

This embodiment is a modification of the first embodiment, and is an example showing that the positional relationship between the front and rear processing process apparatuses 6 and 7 shown in FIG. 1A can be changed as appropriate.

FIG. 1B is an explanatory diagram of the operation of the continuous processing apparatus 200 in which the pre-processing process device 6 and the post-processing process device 7 are connected on the same straight line with respect to the same conveyance path as in FIG. 1A.

The basic configuration is the same as the continuous processing apparatus 100 of the first embodiment, but the positions of the load chamber 1/preprocessing device 6 and the processing chamber 5 are swapped.

In addition, the unloading chamber 2, the post-processing process device 7, and the processing chamber 5
The positions with 5 have been swapped.

Since the transfer chambers 31 and 33 have openings of the same shape, the processing chambers 5j and 55 and the load chamber 1. By simply changing the position of the unloading chamber 2, it is possible to construct a linear integrated processing line.

Next, a third embodiment of the present invention will be described using FIG. 2.

FIG. 2 is an explanatory diagram of the operation of the continuous processing apparatus 300 of this embodiment.

This is an example of a configuration consisting of the same elements as in Figures 1A and B, and includes a transport path unit consisting of the transport chamber 3, transfer chamber 41, and transport chamber 32, and a transport path unit comprising the transport chamber 32, buffer chamber 42, and transport chamber 33. , change the direction at the position of the transfer chamber 32,
A transport path bent at right angles is configured, and the pre-processing process device 6
In this example, the post-processing device 7 is directly connected to the post-processing device 7.

Without the buffer chambers 41 and 42 unique to the present invention, =11
- If the transfer chambers 31, 32, and 33 are arranged to directly transfer the workpiece between the transfer devices, the processing chambers 52 and 55 will overlap because the path is bent at a right angle at the transfer chamber 32 position. However, since the buffer chambers 44, 4.2 are provided, it is possible to secure a space that does not interfere with the installation position of the processing chamber, and at the same time, it is possible to secure a maintenance space for the equipment.

As shown in Fig. 1A, the auxiliary valves 8 are provided in the buffer chambers 41 and 42, so that the regular processing of the processed material cannot be performed due to a malfunction in the front or rear transport devices or processing chambers. In this case, it is possible to take out a workpiece that is in the middle of processing. Such an auxiliary valve may be attached to the buffer chamber shown in FIGS. 1B and 2, and the effect will be the same.

Next, a fourth embodiment of the present invention will be described using FIG. 3.

FIG. 3 is an explanatory diagram of the operation of a continuous processing apparatus 400 in which the structures of a part of the transfer chamber and a buffer chamber are combined.

-]2- In Fig. 1A, the transfer chamber 3] and the buffer chamber 41, and the transfer chamber 32 and the buffer chamber 42 are integrally connected, respectively, and the auxiliary valve 8 is not provided. Since it has the same configuration as the continuous processing apparatus 100 shown in the figure, its explanation will be omitted.

This embodiment can be used when it is acceptable for both chambers to have a common vacuum atmosphere or thermal atmosphere, and it is possible to rationalize the gas valve and the exhaust device.

Next, a fifth embodiment of the present invention will be described using FIG. 4.

FIG. 4 shows a continuous processing device 50 in which a similar continuous processing device is added in parallel to the continuous processing device 100 shown in FIG.
It is an explanatory diagram of an action showing 0.

Its configuration is such that two continuous processing apparatuses 1.00 are connected using buffer chambers 43, 46, and the positions of processing chambers 42, 54 are changed for the connection.

The configurations other than those described above are almost the same, so the explanation thereof will be omitted.

Further, since the operation of this continuous processing apparatus 500 is almost the same as that of the other embodiments described above, the explanation thereof will be omitted.

As shown in Figure 4, expansion is possible because the transfer chamber, buffer chamber, and processing chamber are integrated into a unit, and in addition, a continuous Can configure processing equipment.

Further, in the above embodiment, the transfer chamber is square, but the shape is not limited to a square, and a polygon may be used to connect many processing chambers.

[Effects of the Invention] According to the present invention, in a continuous processing apparatus having a plurality of processing chambers, two transfer chambers are connected via one buffer chamber to temporarily retain the object to be processed, and further, These buffer chambers and transfer chambers are connected alternately so that the objects to be processed can be transferred in one direction. The waiting time inside and outside the device can be suppressed. At the same time, since the transport path unit composed of the buffer chamber and the transport chamber can be connected in the desired direction, it is possible to connect directly to the position of the pre-processing process device and the post-processing process device.

In addition, by providing a buffer chamber on the conveyance path and providing appropriate auxiliary valves in this bath/sofa chamber, space for maintenance of the equipment can be secured, and in the event of a failure of the equipment, the workpieces in the middle of processing can be removed. It also has the effect of being able to be taken out from the auxiliary valve and the equipment restored quickly.

[Brief explanation of the drawing]

Fig. 1A is an explanatory view of the operation of the continuous processing apparatus of the first embodiment, Fig. 1B is an explanatory view of the operation of the continuous processing apparatus of the second embodiment, and Fig. 2 is an explanatory diagram of the continuous processing apparatus of the third embodiment. The action explanatory diagram, FIG. 3, is of the fourth embodiment. - Pre-treatment process device, 7... Post-treatment process device, 8... Auxiliary valve, 100
,200,300°4,. 500,600,700-
...Continuous processing equipment.

Claims (1)

[Scope of Claims] 1. In a continuous processing apparatus in which one or more types of processing are continuously performed via a transfer chamber connected to one or more processing chambers that process objects to be processed, at least two or more transfer chambers. and a buffer chamber disposed between the transfer chamber and for temporarily retaining the processed material, and two transfer chambers connected via the buffer chamber. Features of continuous processing equipment. 2. The continuous processing apparatus according to claim 1, wherein the buffer chamber and the transfer chamber are connected alternately to enable continuous execution of one or more types of processing. 3. In a continuous processing device in which one or more types of processing are continuously performed via a transfer chamber connected to one or more processing chambers for processing the object to be processed, a buffer chamber in which the object to be processed is temporarily retained. a plurality of transfer chambers connected to each other via the transfer chamber; at least one processing chamber connected to the transfer chamber; a load chamber for preparing the object to be processed for processing in the processing chamber; 1. A continuous processing device comprising an unloading chamber for dismantling the workpiece, and when transferring the workpiece, the workpiece is transferred in one direction from the loading chamber to the unloading chamber. 4. Claim 1, wherein the adjacent transfer chamber and buffer chamber are connected via a partition that can be opened and closed.
, 2 or 3. The continuous processing apparatus according to . 5. The continuous processing apparatus according to claim 1, 2, 3, or 4, wherein the adjacent transfer chamber and buffer chamber are constituted by one container without a partition. 6. In a continuous processing device in which one or more types of processing are continuously performed via a transfer chamber connected to one or more processing chambers that process the object to be processed, the transfer chambers including one or more processing chambers are arranged in a matrix. A continuous processing apparatus characterized in that the transport chambers are connected via a buffer chamber for temporarily retaining the object to be processed. 7. The continuous processing apparatus according to claim 1, 2, 3, 4, 5 or 6 is used for continuous processing of semiconductor devices, forming a plurality of transport paths and simultaneously performing various vacuum processing. Composite vacuum processing equipment.