JPH04164835A - Method for boring glass plate - Google Patents

Method for boring glass plate

Info

Publication number
JPH04164835A
JPH04164835A JP29042190A JP29042190A JPH04164835A JP H04164835 A JPH04164835 A JP H04164835A JP 29042190 A JP29042190 A JP 29042190A JP 29042190 A JP29042190 A JP 29042190A JP H04164835 A JPH04164835 A JP H04164835A
Authority
JP
Japan
Prior art keywords
glass plate
holes
hole
grinding
protrusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29042190A
Other languages
Japanese (ja)
Inventor
Tsutomu Ota
勉 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP29042190A priority Critical patent/JPH04164835A/en
Publication of JPH04164835A publication Critical patent/JPH04164835A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00Re-forming shaped glass
    • C03B23/26Punching reheated glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

PURPOSE:To efficiently form a small hole having high accuracy and quality through a glass plate by forming a man-penetrating hole on a glass plate by hot-pressing and removing the protrusion formed on the face opposite to the face having non-penetrating hole by grinding or polishing. CONSTITUTION:Non-penetrating holes 4... are formed on a glass plate 1 by hot-pressing (2: upper mold, 3: lower mold, 5: protrusion, 6: core pin) and the protrusions 5 formed on the face opposite to the face having the non-penetrating holes 4... are removed by grinding or polishing to form through holes (7: grinding wheel, 8: grinding Jig; 9: fixing wax, 10: work table).

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はプリンター用のインクジェットヘッドのノズル
板や医療用マイクロポンプの基板として使われる穴明き
ガラス板の製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a perforated glass plate used as a nozzle plate of an inkjet head for a printer or a substrate of a medical micropump.

〔従来の技術〕[Conventional technology]

ガラスは硬脆材料であると同時に絶縁材料である。この
為穴明は加工法としてドリルによる切削加工や放電加工
は使えない。従って従来は軸付小径砥石による研削穴明
は加工法や超音波加工・サンドブラストなどの遊離砥粒
加工法による穴明は加工していた。特に後者の遊離砥粒
加工による穴明けは、治工具を工夫する事により多数穴
を同時に加工できる為に比較的生産性が高く量産技術と
して良く用いられている。しかしながら直径が05順程
度のいわゆる細穴を加工する場合には以下に述べるよう
な問題点があった。最大の問題点は加工精度が悪い事で
ある。例えば超音波加工の場合は加工が進むにつれて工
具の摩耗も進行し穴の入口側と出口側で20%以上のテ
ーパーがついてしまう。また穴の入口側出口側のエツジ
部はチッピングが発生し易く穴明けの加工精度・品質は
部品機能を満足できるものではなかった。これらの問題
点はサンドブラスト法にも共通であり、精密デバイス用
部品としての活用のネックとなっていた。また特に0.
5 rm程度の細穴を加工する場合は超音波加工工具の
剛性が低(超音波振動が有効に加工に作用しないうえに
加工力も高くできない事から加工速度も11IffI/
gIa以下になってしまい加工能率が低かった。サンド
ブラスト法の場合でもエアジェツトによって吹きつけら
れる砥粒が細穴の中に入りに((なる為にやはり1 r
tm / si程度の加工速度であった。
Glass is both a hard and brittle material and an insulating material. For this reason, cutting with a drill or electric discharge machining cannot be used as a processing method for drilling holes. Therefore, in the past, hole drilling was performed by grinding using a small-diameter grindstone with a shaft, or by free abrasive processing methods such as ultrasonic processing and sandblasting. In particular, the latter method of drilling holes using free abrasive processing is relatively highly productive and is often used as a mass production technique because it is possible to simultaneously process many holes by devising jigs and tools. However, when machining so-called small holes with diameters on the order of 0.5 mm, there are problems as described below. The biggest problem is poor processing accuracy. For example, in the case of ultrasonic machining, as the machining progresses, the tool wear progresses, resulting in a taper of 20% or more at the entrance and exit sides of the hole. In addition, chipping was likely to occur at the edges on the entrance and exit sides of the hole, and the accuracy and quality of drilling did not satisfy the function of the part. These problems are also common to the sandblasting method, and have been a bottleneck in its use as parts for precision devices. Also, especially 0.
When machining a small hole of about 5 rm, the rigidity of the ultrasonic machining tool is low (ultrasonic vibration does not work effectively on machining, and the machining force cannot be increased, so the machining speed is 11IffI/
gIa or less, resulting in low processing efficiency. Even in the case of the sandblasting method, the abrasive grains blown by the air jet enter the fine holes ((to become 1 r
The processing speed was approximately tm/si.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

以上述べたように従来技術によってガラス板に穴明は加
工をする際に穴明は精度が悪い・加工速度が遅いという
問題点を有していた。本発明の目的とするところは高精
度高品質の細穴を効率的に加工可能な加工方法を提供す
る事である。
As described above, when drilling holes in a glass plate using the prior art, there have been problems in that the drilling accuracy is poor and the processing speed is slow. An object of the present invention is to provide a processing method that can efficiently process small holes with high precision and high quality.

〔課題を解決するための手段〕[Means to solve the problem]

本発明のガラス板の穴明は方法は、ガラス板に非貫通穴
を熱プレス成形法によって形成した後、前記非貫通穴形
成面と反対面に生ずる突起部を研削加工または研磨加工
により除去して貫通穴を加工する事を特徴とする。
The method for forming holes in a glass plate according to the present invention includes forming non-through holes in a glass plate by hot press molding, and then removing protrusions that are formed on the surface opposite to the surface on which the non-through holes are formed by grinding or polishing. It is characterized by machining through holes.

〔実施例〕〔Example〕

以下図面を用いて本発明の実施例について説明する。第
1図は本発明の実施例を工程順に示したものである。ガ
ラス板1は熱プレス成形をする為に予備加熱を行う。加
熱する温度はガラス材料によって異なるが通常は屈伏点
(js )温度付近である。例えばガラス板の材質がB
K7の場合で650℃である。次に第1図Ch)に示す
ように500〜400℃に加熱保温した金型内でプレス
成形するシこの時に細穴4は非貫通穴となっており上型
2によって成形される。成形によって非貫通穴からはみ
だしたガラスは下型3に設けられた空間に流動して突起
5として成形される。熱プレス成形によって貫通穴を加
工しない理由は、ガラスの熱プレス成形が高温下で行わ
れている為上型2に形成したコアピン60強度が低い上
に被成形材料の粘性が高く一発で貫通穴を加工する事が
困難な為である。本発明の実施例のように成形自体を閉
塞せずに実施する事により成形抵抗を減少させる事が可
能となり細穴の加工も可能となった。第1図(C)はこ
のようにして非貫通穴と突起部を形成したガラス板を示
している。本例の場合の細穴4の深さはガラス板1の厚
さより若干法(加工する。これは後工程で突起5を除去
して貫通穴を得る為である。次に第1図(d)のよ5に
ガラス板1を研削治具8の表面に固定ワックス9を用い
て固定した後ロータリー研削盤のワークテーブル10に
セットし研削砥石7によって突起部5を研削除去する。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an embodiment of the present invention in the order of steps. The glass plate 1 is preheated for hot press molding. The heating temperature varies depending on the glass material, but is usually around the yield point (js) temperature. For example, the material of the glass plate is B
In the case of K7, it is 650°C. Next, as shown in FIG. 1 Ch), when press molding is carried out in a mold heated and kept at 500 to 400 DEG C., the narrow holes 4 become non-through holes and are molded by the upper mold 2. The glass that protrudes from the non-through hole during molding flows into the space provided in the lower mold 3 and is molded into the protrusion 5. The reason why through-holes are not formed by hot press molding is that hot press molding of glass is performed at high temperatures, so the strength of the core pin 60 formed in the upper mold 2 is low, and the viscosity of the material to be molded is high, making it difficult to penetrate in one shot. This is because it is difficult to machine holes. By performing the molding itself without blocking it as in the embodiments of the present invention, it is possible to reduce the molding resistance and it is also possible to process small holes. FIG. 1(C) shows a glass plate in which non-through holes and protrusions are formed in this manner. In this example, the depth of the small hole 4 is slightly smaller than the thickness of the glass plate 1. This is to remove the protrusion 5 in the later process to obtain a through hole. ) After fixing the glass plate 1 to the surface of the grinding jig 8 using fixing wax 9, the glass plate 1 is set on the work table 10 of a rotary grinder, and the protrusion 5 is ground off using the grinding wheel 7.

第1図(−)は以上の加工工程を経て細穴加工を終了し
たガラス板である。
FIG. 1 (-) shows a glass plate that has undergone the above-mentioned processing steps to form small holes.

以上の本発明実施例の如き加工方法で加工・された細穴
の精度や品質は以下のよ5に高品質であった。厚み11
111のガラス板にφ0.5 wxの細穴を加工した例
の場合穴径精度はテーパーを含めて1%以下に収まって
いる。また穴の内面の面粗度についても金型コアピンに
鏡面加工を施す事によりRmaIO45μ展程度の面粗
さが得られている。穴開口部エツジのチッピングについ
ては突起除去に使用する砥石選択と加工条件を適切に選
択する事により実用上問題のないレベルに収める事がで
きる。
The accuracy and quality of the small holes processed by the processing method as in the above-described embodiments of the present invention were of high quality as shown in 5 below. Thickness 11
In the case of an example in which a small hole of φ0.5 wx was formed in a No. 111 glass plate, the hole diameter accuracy, including the taper, was within 1%. Furthermore, the surface roughness of the inner surface of the hole is approximately RmaIO45μ by mirror-finishing the mold core pin. The chipping of the hole opening edge can be kept to a level that does not pose a practical problem by appropriately selecting the grindstone used for removing the protrusion and the processing conditions.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、ガラス板に高精度で高品質の細穴を効
率的に加工する事ができ、プリンター用のインクジェッ
トヘッドノズル板や医療用マイクロポンプの基板などの
精密デバイス用部品を安価に安定的に生産する事が可能
となる。
According to the present invention, it is possible to efficiently machine high-precision, high-quality small holes in a glass plate, and parts for precision devices such as inkjet head nozzle plates for printers and substrates for medical micropumps can be manufactured at low cost. Stable production becomes possible.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(α)〜(1)は本発明実施例の加工工程を示す
断面図。 1・・・・・・・・・ガラス板 2・・・・・・・・・上 型 5・・・・・・・・・下 型 4・・・・・・・・・細 穴 5・・−・・・・・・突 起 6・−−・・・・・コアピン 7・・−・・・・・・研削砥石 8・・・・−・・・・研削治具 9−−・−・・・・・固定ワックス
FIGS. 1(α) to 1(1) are cross-sectional views showing processing steps in an embodiment of the present invention. 1...Glass plate 2...Top Mold 5...Bottom Mold 4...Small hole 5.・−・・・・Protrusion 6・−−・・Core pin 7・・・Grinding whetstone 8・・・・・Grinding jig 9−−・−・・・Fixed wax

Claims (1)

【特許請求の範囲】[Claims] ガラス板に非貫通穴を熱プレス成形法によって形成した
後、前記非貫通穴形成面と反対面に生ずる突起部を研削
加工または研磨加工により除去して貫通穴を加工する事
を特徴とするガラス板の穴明け方法。
A glass characterized in that a non-through hole is formed in a glass plate by a hot press molding method, and then a protrusion formed on a surface opposite to the surface on which the non-through hole is formed is removed by grinding or polishing to form a through hole. How to drill holes in a board.
JP29042190A 1990-10-26 1990-10-26 Method for boring glass plate Pending JPH04164835A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29042190A JPH04164835A (en) 1990-10-26 1990-10-26 Method for boring glass plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29042190A JPH04164835A (en) 1990-10-26 1990-10-26 Method for boring glass plate

Publications (1)

Publication Number Publication Date
JPH04164835A true JPH04164835A (en) 1992-06-10

Family

ID=17755815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29042190A Pending JPH04164835A (en) 1990-10-26 1990-10-26 Method for boring glass plate

Country Status (1)

Country Link
JP (1) JPH04164835A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10147648A1 (en) * 2001-09-27 2003-04-17 Berliner Glas Kgaa Production of a passage in a glass pane comprises placing the pane on a negative mold having a recess, pressing and/or drawing the part of the pane lying over the recess of the negative mold, and removing a part of the recess
DE10351718A1 (en) * 2003-10-31 2005-06-16 Schott Ag Method for producing a knobbed plate from a glass or a glass ceramic, plate produced therewith and tool used therefor
WO2012074952A1 (en) * 2010-11-30 2012-06-07 Corning Incorporated Methods of forming a glass wiring board substrate
JP2018177632A (en) * 2017-04-04 2018-11-15 Agc株式会社 Processed member manufacturing method, plate-like member and opening member

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10147648A1 (en) * 2001-09-27 2003-04-17 Berliner Glas Kgaa Production of a passage in a glass pane comprises placing the pane on a negative mold having a recess, pressing and/or drawing the part of the pane lying over the recess of the negative mold, and removing a part of the recess
DE10147648B4 (en) * 2001-09-27 2007-08-23 Berliner Glas Kgaa Method for forming apertures in a glass pane.
DE10351718A1 (en) * 2003-10-31 2005-06-16 Schott Ag Method for producing a knobbed plate from a glass or a glass ceramic, plate produced therewith and tool used therefor
WO2012074952A1 (en) * 2010-11-30 2012-06-07 Corning Incorporated Methods of forming a glass wiring board substrate
CN103237768A (en) * 2010-11-30 2013-08-07 康宁股份有限公司 Methods of forming a glass wiring board substrate
JP2018177632A (en) * 2017-04-04 2018-11-15 Agc株式会社 Processed member manufacturing method, plate-like member and opening member

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