JPH04157356A - Automatic fluid controlling apparatus - Google Patents

Abstract

PURPOSE:To analyze release solution and cleaning solution with a single apparatus by calculating measurement data from a fluid managing means and titration means by a calculation means and controlling these means by a control means based on an instruction from an input means. CONSTITUTION:Processing fluid from a processing tank is led to a processing fluid supply path 1 by a pump 3 and further led to an absorption meter 4 of a fluid managing means, absorbency of the processing fluid is measured and a degree of deterioration with respect to time is detected based on the results of the measurement. Then concentration of active ingredients in the processing fluid can be measured from potential change by titration by dioxidation- reduction ORP electrodes 20, 21 as titration analyzing sensors while paths A, B of a six-way solenoid valve 5 are changed over and standard solution desirably selected among reagent tubes 28, 31, 34 by an input means 104 is supplied. A control means 103 calculates 105 measurement data from the absorption meter 4 and a titration means 101 and displays the results on a CRT by an output means 106 as well as controls the respective means. Thus an automatic fluid managing apparatus comprises analysis control functions so that it can be applied for managing respective processes of resist releasing and cleaning.

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to an automatic liquid management device that can automatically detect the amount of components and deterioration of a processing liquid.

"Prior Art" Conventionally, stripping solution (processing liquid) used, for example, in semiconductor manufacturing processes, has been analyzed and managed by various methods. , automation of management has been carried out.

As an example of this type of automatic liquid management device, in the device previously proposed by the present inventor (Japanese Patent Application No. 2-9539), a stripping solution containing a mixture of sulfuric acid and hydrogen peroxide is sampled online using a pump or the like. Then, this sampled stripping solution is measured with an absorbance meter to control its degree of deterioration, and this stripping solution is supplied into a reaction cell in an analytical instrument.
Potentiometric titration analysis using an oxidation-reduction potential electrode is performed in this reaction cell to detect the concentration of the active ingredient in the stripping solution.

In such an analysis, a computer installed in the control unit controls the operation of equipment such as pumps and valves, and also determines the sulfuric acid concentration in the treated liquid based on the amount of the titrated reagent dripped into the reaction cell. , the hydrogen peroxide concentration was calculated, and the calculation results were output to a computer or printer.

[Problems to be Solved by the Invention] Incidentally, in the semiconductor manufacturing process described above, there is a cleaning process in addition to the Lennost stripping process, and in this cleaning process, a sulfuric acid-hydrogen peroxide aqueous treatment solution is mainly used as a stripping solution. In addition to this, hydrochloric acid-hydrogen peroxide-based treatment liquids and ammonia-hydrogen peroxide-based treatment liquids are used.

However, in the above automatic liquid management device, only one type of
That is, there is a dissatisfaction that normally only the stripping liquid can be managed, and therefore a separate liquid management device must be provided in order to also manage the processing liquid (cleaning liquid) used in the cleaning process.

The present invention has been made in view of the above circumstances, and its object is to provide an automatic liquid management device that can analyze stripping liquid and cleaning liquid on a stand.

"Means for Solving the Problems" The automatic liquid management device of the present invention includes a sampling means for sampling the processing liquid, a liquid state management means for detecting the degree of deterioration of the sampled processing liquid, and an effective component of the processing liquid. A titration means for calculating the amount from a potential change due to titration, a calculation means for calculating measurement data obtained from the liquid state management means and the titration means, a control means for controlling each of the above means, and a control means for this control means. The above-mentioned problem is solved by comprising an input means for giving various commands, and the control means has an analysis control function for analyzing a plurality of types of processing liquids.

"Function" According to the automatic liquid management device of the present invention, the control means has an analysis control function for analyzing the processing liquid arbitrarily selected by the input means from among three types of processing liquids. For example, this automatic liquid management device can be used to handle treatment liquids used in the resist stripping process and cleaning process in the semiconductor manufacturing process, that is, sulfuric acid-hydrogen peroxide-based treatment liquids, and hydrochloric acid-hydrogen peroxide-based treatment liquids.
It can be applied to the management of hydrogen peroxide-based and ammonia-hydrogen peroxide-based processing solutions.

"Embodiment" An embodiment of the present invention will be described with reference to FIGS. 1 to 6. Note that this embodiment is an example in which the present invention is applied to a management device for resist processing liquids (stripping liquid and cleaning liquid).

First, the general structure of the automatic liquid management apparatus will be described with reference to FIG. 1(A). In FIG. 1(A), reference numeral I indicates a processing liquid supply path through which the processing liquid is supplied from the processing tank along the illustrated path. Here, the processing liquid may be a sulfuric acid-hydrogen peroxide solution or a hydrochloric acid-based solution that removes and dissolves a resist made of novolak resin or the like on a semiconductor silicon wafer.
Examples include an aqueous hydrogen peroxide solution and an ammonia-hydrogen peroxide aqueous solution.

A cooler 2, a pump 3, an absorbance meter (liquid condition control means) 4, and a six-way solenoid valve 5 are sequentially arranged in this processing liquid supply path. Based on this configuration, the processing liquid from the processing tank is guided by the pump 3 to the processing liquid supply path 1, adjusted to a predetermined temperature by the cooler 2, and then further guided to the absorbance meter 4.

The absorbance of the processing liquid is measured by irradiating the absorbance meter 4 with a light beam of a certain wavelength, and the degree of deterioration of the processing liquid with respect to time is detected based on the measurement results obtained. Note that among the processing liquids passing through this absorbance 814, the stripping liquid is colored by dissolving the resist peeled off in the processing bath.

A six-way solenoid valve 5 disposed downstream of the absorbance meter 4 has one port 5a connected to the downstream side of the processing liquid supply path 1, and is connected to the path shown by the solid line in FIG. This automatically switches between route B and route A, which is normally route A.
It is set to take the following. Further, a sampling pipe 6 is provided at the port 5b and port 5e of the six-way solenoid valve 5 to connect them, and a sampling pipe 6 is provided at the port 5c for sending out the sample (processing liquid) in the sampling pipe 6. For example, a pressure feeding path 8 having a pump 7 disposed therein for pumping pure water is connected to the pump. Here, the amount of processing liquid stored inside the sampling pipe 6 is set to a predetermined amount, and is used for quantitative determination. Furthermore, a flow path 10 connected to the three-way solenoid valve 9 is connected to the port 5d of the six-way solenoid valve 5, and a flow path 12 connected to the three-way solenoid valve 11 is connected to the port 5r. The three-way solenoid valve 11 is connected to a return path 13 that connects to the processing tank (path shown) and a drain path 15 that connects to the drain tank 14, and with this configuration, the water is led out from the six-way solenoid valve 5. The processing liquid is returned to the processing tank or guided to the drain tank 14.

A first measurement path 16 and a second measurement path 17 are connected to the three-way solenoid valve IO, and the first measurement path 16 is connected to a first reaction cell 18 and the second measurement path 17 A second reaction cell 19 is disposed in each.

Each of these reaction cells 1849 has an ORP (redox potential) electrode 20 as a sensor for titration analysis.
．． 21, and discharge channels 22, 23 for discharging the sample after titration are further disposed at the bottom of the cell. The discharge passages 22 and 23 have solenoid valves 24 and 25 in each path.
A pump 26 is provided after these discharge passages 22 and 23 merge, and furthermore, this merging passage 27 merges with the L/ren passage 15. Here, the sample after titration in the reaction cell 18.19 is transferred to the solenoid valve 24.
．． 25 is opened and the drain passage 15 is forcibly guided by the pump 26. In addition, when draining by the pump 26, a liquid level sensor may be installed in the drain tank 14, and the timing of draining may be determined based on the signal from the liquid level sensor.

Furthermore, a first reagent tube 28 is provided in the first reaction cell 18.
A reagent branch pipe 30 and a third reagent pipe 31 are arranged in the second reaction cell 19 with their respective ends facing each other. It is set up. First reagent tube 28 and third reagent tube 31
, a titration pump 32a and a titration pump 32c are disposed in each of the pipes, and the reagent is transferred from the reagent bottle 33a and reagent bottle 33c disposed at the end thereof to the reaction by the titration pump 32a or the titration pump 32c. A fixed amount is supplied into the cell I8 or the reaction cell 19. The reagent branch pipes 29 and 30 each join at a three-way solenoid valve 33, and further communicate with the reagent bottle 33b via a second reagent pipe 35 connected to the three-way solenoid valve 34. Similarly to the other reagent tubes 28 and 31, the second reagent tube 34 supplies a fixed amount of the reagent in the reagent bottle 33 into the reaction cell 18 or 19 using the titration pump 32b. ing. The reagent bottle 33a contains, for example, potassium permanganate (K M no 4), the reagent bottle 33b contains sulfuric acid (1-1,5O4), and the reagent bottle 33c contains sodium hydroxide (NaOH). ) are accommodated respectively.

In the automatic liquid management device having such a configuration, the degree of deterioration of the processing liquid can be managed by measuring the absorbance of the processing liquid using the absorbance meter 4. Normally, by setting the six-way solenoid valve 5 in the path, the processing liquid after absorbance measurement is returned to the processing tank (path shown) via the sampling pipe 6, flow path 12, and return path 13, or the three-way solenoid valve 11
is led to the drain tank 14 through the drain path 15.

On the other hand, when measuring the concentration of acids or bases such as sulfuric acid, hydrochloric acid, ammonia, etc., or oxidizing agents such as hydrogen peroxide in the processing solution, switch to route B and inject the processing solution into the above-mentioned route. The processing liquid remaining in the Zumbling pipe 6 during circulation is pushed out by sending out pure water from the pressure passage 8 and guided to the flow passage IO.

Then, by appropriately switching the three-way solenoid valve 9, a certain amount of processing liquid is introduced into either of the reaction cells 18 and 19.

Here, in the reaction cell 18, a standard solution of potassium permanganate is supplied from the reagent bottle 32a, and a standard solution of sulfuric acid is supplied from the reagent bottle 32b, so that a potential corresponding to the amount of hydrogen peroxide in the processing liquid is supplied. 0R1) is measured by the electrode 20. That is, in this measurement, the change in redox potential due to the redox reaction between hydrogen peroxide and potassium permanganate is detected by the electrode 20.
The point at which the redox potential jumps is defined as the end point of the reaction, and the amount of reagent (potassium permanganate standard solution) dripped at this end point (data indicating this drip amount is output from the pump 32a to the control means 103 described later) From this, the concentration of hydrogen peroxide is calculated. Similarly, in the reaction cell 19, a standard solution of sulfuric acid or sulfur/lium hydroxide is supplied from the reagent bottle 32b or the reagent bottle 32c, so that the amount of ammonia in the treatment liquid or the amount of sulfuric acid or hydrochloric acid can be determined from the ORP electrode. Measured by 20.

After such a measurement is completed, the solenoid valve 24 or 25 is opened, and the treated liquid after the measurement flows into the confluence channel 27.
It is led to the drain tank 14 through.

In the above configuration, reference numeral 100 is shown in FIG. 1(A).
The configuration in the range shown in is used as a sampling means, and is designated by reference numeral 101.
The titration means has a configuration within the range shown below.

Further, in FIG. 1 (r3), the reference numeral 103 indicates a control means, and this control means 103 includes an input means 104 such as a keyboard, an absorbance meter 4 (liquid state management means), and a titration means +01. a calculation means 105 for calculating the measurement data obtained from the calculation means 105; and an output means 106 for displaying the operating status of the device, the processing status, and the measurement results by the calculation means 105 on a CRT (for example, similar to that shown in FIG. 1(A)). A system diagram is written on the display panel, and a display panel with lamps etc. is provided at locations corresponding to each component. 9. The control means 103 has a built-in molecule+7 control function 107 that analyzes the following processing means (1) based on the input data of the human power means 104,
and based on the control result of which processing means (1)), and by controlling this processing means (0))
- Based on the detection data of the detection means (Q), the operating status and processing status are displayed on the display panel 106.

The processing means (■)) include a cooler 2, a six-way solenoid valve 5, a three-way solenoid valve 11, and titration pumps 32a and 32b.
, 32c, solenoid valves 24, 25, pump 26, etc.
In addition, as the detection means (Q) in 0;
1 etc.

Next, the control contents of the automatic liquid management device stored in the control means 103 will be explained with reference to FIGS. 2 to 6.

FIG. 2 is a flowchart 1 for determining whether various measurement conditions regarding titration have been set. In addition,
1 step n'' in the specification corresponds to rsPnJ in FIG.

<Step I> The manual means 104 determines the type of processing liquid to be analyzed, that is, which of the sulfuric acid-hydrogen peroxide system, hydrochloric acid-hydrogen peroxide system, and ammonia-hydrogen peroxide system is to be analyzed. , the corresponding reagents are placed in reagent bottles 33a and 33b.
, 33c. Also, the amount of Zanobring (that is, the number of sampling times) of the processing liquid supplied to the reaction cells 18 and 19, and the titration pump 32a.

Measurement conditions such as drip m per drop of reagent dropped by 32b and 32c (= a, ; assumed to be a minute value),
Furthermore, selection conditions such as automatic analysis or manual analysis are set.

Step 2〉 Step 1 Automatically calculates the amount of water based on the conditions entered in Step 1.
Driving or manual analysis driving? If the answer is YES (in the case of automatic analysis), proceed to Step 3, and if the answer is No (in the case of manual analysis), proceed to Step 4.

<Step 3> In order to perform automatic analysis operation, proceed to step 5. Furthermore, if it is determined that continuous operation is occurring and the process returns in step 5, which will be described later, automatic analysis is performed.

(See Figure 4) Step 4> Perform manual analysis and proceed to step 8 after completion.

<Step 5> Determine whether or not to perform automatic analysis operation continuously, and select YE.
In the case of S (in the case of continuous operation), the process returns to step 3, and in the case of No (in the case of non-continuous operation, that is, in the case of discontinuous operation), the process proceeds to step 6.

Step 6> It is determined whether or not a waiting time is required. If YES, proceed to step 7; if NO, proceed to step 8.

<Step 7> Wait for a preset certain period of time, and then proceed to Step 3.

Step 8> Determine whether or not to stop the analysis. If YES (to stop), go to STOI); if NO, go back to step 1.

Next, the condition setting in step 1 in FIG. 2 will be explained with reference to FIG. 3. The flow shown in FIG. 3 is the analysis control function of the present invention. In addition, "Step 1-nJ" in the specification is rs P l in FIG.
Corresponds to nl.

<Step 11-> Determine whether there is only one type of processing liquid to be analyzed, and select YE.
For S (one type), snap 1-21-l
If the answer is NO, proceed to step I-6.Step 12) Type of treatment liquid, i.e. sulfuric acid-hydrogen peroxide system, hydrochloric acid-
Select and input either Hydrogen Oxide Water Bamboo or Anomonia-kun Hydrogen Oxide Water System D, and then proceed to step i according to the selected liquid type.
3 - Proceed to step 1-5 1゜Step I-6〉 Select whether there are 2 or 3 types of liquid to be analyzed, and if there are 2 types, further select f: Depending on the type of processing liquid. Then, the process proceeds to steps i7 to step 19, and in the case of three types, the process proceeds to step 110.

Step 1 - IO〉 - Select the three types listed above, step 11 + 11 liquid (C) Select the dividing order 1-7, and step 2 steps 111 to 11 according to the selected order.
Sweets 1).

Proceed to 1-16.

In addition, step 1-; 3 to step 15, step 1
-7~Steno゛f1-So, Su Nouno'' Ill~A function 16 In 16, the automatic part (n control g + content, each mo ``4]L・) step, f
H)') Inner A': 1) Titration pot 32a,
:Bb, drive 32c t/'(('l t51-・Try to output the bow.

Next, refer to FIG. 4(A) and CL().
(l-1 of step 3:'-i Uh',
, rI port 1 "In control content will be explained. Note that i step 3a11:' in specification 7<5 is I- in FIG.
! ; I-3, vs. Row 4, J1. Step 3a
l'> Set the hexagonal solenoid valve 5 to the path shown by the solid line in No. r', 'J (8), and 3) j Qi magnetic well 9 to -, 1, l as appropriate.
, 'j', L - While driving the grain knob 7, pure water is supplied from the pressure passage 8 into, for example, the first reaction cell 18,
Clean the inside of it.

Furthermore, by switching the three-way solenoid valve 9, the second reaction cell 19 is also cleaned in the same manner. Note that during this time, the processing liquid supplied from the processing liquid supply path 1 is guided to the flow path 12 side via the sampling pipe 6.

Step 3a2) The electromagnetic valve 24 is set to an open state and the pump 26 is driven to discharge the cleaning liquid in the reaction cell 18 to the drain tank 14 via the confluence passage 27. Further, the cleaning liquid in the reaction cell 19 is also discharged in the same manner.

Step 3a-3> Sampling a sample (treated liquid) for titration analysis. (
The flowchart shown in FIG. 5 will be described later with reference to 4. ) Step 3a-4> Perform titration analysis to determine the concentration of sulfuric acid and hydrogen peroxide, which are active ingredients, contained in the treatment liquid. , Step 3a-5 (described later with reference to the J-chart in FIG. 6)) Performs the same ejection operation as described in step 3a-2 of 1-1.

Step 3a-6>~<Step 3a-7>" Two-legged cleaning operation similar to step 3a-1~step 3a2,
Perform the ejection operation and return to the original main screen O-.

<Step 3a-8> Separately from steps 3a-1 to 3a7 above, the absorbance of the filtrated treatment liquid supplied from the treatment liquid supply path 1 is measured using an absorbance meter 4.
J- is automatically measured, and then 1jI! Detects the degree of deterioration of the liquid.

In addition, Figure 4 (I()) shows a flowchart for automatic analysis of treated liquids of hydrochloric acid-hydrogen peroxide system and ammonia-hydrogen peroxide system, and in each step, the fourth
The same operation as the corresponding step shown in FIG. 3A is performed.

Next, the "sampling" shown in steps 3a-3 and 3b3 will be explained with reference to the chart shown in FIG.
nJ corresponds to rss-nJ in FIG.

Step S-1> Set the six-way solenoid valve 5 to path A, and connect the sampling pipe 7.
A predetermined amount of the processing liquid filled in the sampling pipe 7 is passed through the flow path lO1 and the three-way solenoid valve 9 to the reaction cell +8 (19). supply to.

<Step S-2> The titration pump 32a (32b, 32c) is driven to discharge the titration liquid (standard Mulberry reagent) in an initially set amount. Here, the selection of the titration pops 33a to 33c is automatically made by the selections in steps 13 to 1-5, steps 13 to 1-9, and steps 1-11 to 1-16.

Step S-3> Measure the potential of the treatment liquid in the ORp z electrode 20 (21) and reaction cell 18 (19).

Step S-4> Based on the measurement result in step S-3, it is determined whether the potential is below the titration end potential. If YES, proceed to step S-5; if NO, proceed to step S-4. -Proceed to 6.

Step S-5> It is determined whether the amount of potential change measured in step S-3 is a small amount (that is, whether the amount of potential change set in advance is large or not), and if YES, step Proceed to S-7, and if NO, titration is continued at the initial set discharge amount.

Step S-6> According to the measurement result in step S-3, the potential at which the titration ends has been reached at the initial set discharge amount, so it is determined that analysis is not possible with the initial set discharge amount, and step S-3 The processing liquid in the reaction cell +8 (19) is discharged by the same operation.

Step S-7> Since the amount of potential change measured in step S-3 is small, the discharge volume of the titration pump 32a (32b, 32c) is increased to the optimum discharge volume, and the titration operation is performed. Continue.

Step S-8> After discharging the processing liquid in step S-6, the inside of the reaction cell 18 (+9) is cleaned by the same operation as in step 3a-1.

Step S-9> The reaction cell 18 (1
9) Drain the cleaning solution inside.

Step S-10> If the initial setting discharge amount of the titration pump 32a (32b, 32c) is 0.5 cc/time or more, step S-I
If not, proceed to step S-12.

<Step S-11> In the same manner as the sampling in step S-1, a predetermined 11 (i.e., ml determined by the volume of the sampling pipe 6) of the processing liquid is supplied once into the reaction cell 18 (+9). .

Step S-12> By the same operation as the sampling in step S-1,
A predetermined amount of treatment liquid is supplied into the reaction cell 1g (19) twice.

Step S-13> The discharge amount of the titration pump 32a (32b, 32c) is adjusted to the optimum discharge amount, and the titration operation is continued.

Step 5-14> The titration pump 32a (32b, 32c) discharges the titration liquid in an initial set amount.

Step S-15> The potential of the treatment liquid in the reaction cell 1g (19) is measured using the ORP electrode 20 (21).

Step 5-16> Based on the measurement result in step 5-15, it is determined whether the potential is below the titration end potential. If YES, the titration operation is continued; if NO, step 5-15 is determined. Proceed to step 17.

<Step S-17> Based on the measurement results in step 5-16, it was determined that the titration end potential was reached at the initial set discharge amount, so it was determined that analysis was not possible even with two samplings, and the same procedure as step 3a-2 was performed. The processing liquid in the reaction cell 18 (19) is discharged by the operation.

Step S-18> After discharging the processing liquid in step 5-17, the inside of reaction cell +8 (19) is cleaned by the same operation as step 38-1.

<Step 5-19> The reaction cell 18 (1
9) Drain the cleaning solution inside.

Step 5-20> By the same operation as step 5-12, a predetermined amount of processing liquid is supplied into the reaction cell l1l (19) by sampling twice.

Step S-21> Change the initial setting discharge rate of the titration pump 32a (32b, 32c) to the minimum discharge rate of 0.1 cc/time,
Perform titration work.

Next, the "analysis" shown in steps 3a-4 and 3b-4 will be explained with reference to the flowchart of FIG. Note that [Step A-nJ is the sixth step] in the specification.
Corresponds to rSA-nJ in the figure.

Step A-1> From the on P electrode +9 (20) to the reaction cell 18 (19
) is measured, and the measured value is set as Vo.

Step Δ-2> Titration is performed by driving the titration pump 32a (32b, 32c) and dropping the slogan reagent into the reaction cell 18 (19).

Note that the titration it at this time is 81 and the titration rate is 81.

Step A-3> The reaction cell 18 (19) is
) is measured, and the measured value is defined as vl.

Step A-4> Check whether the oxidation-reduction potential V detected in Step A-3 has reached the preset titration end potential.
In the case of S, the process proceeds to step A5, and in the case of NO, the process proceeds to steps Δ to 7.

Step A-5> As described in step A-4 or steps Δ-13 from 4 to Δ-13 described below, the oxidation-reduction potential ■ or ■
Titration pumps 32a to 32c when , reaches the end of titration.
Based on the output data, the dripping type of the reagent is calculated, and based on this, the sulfuric acid concentration, hydrogen peroxide concentration, hydrochloric acid concentration, and ammonia concentration in the treatment liquid are calculated.

Step A-6> The calculated value obtained in step A-5 is output to the display panel 105 and displayed.

Step A-7> Find the redox potential difference 1v, -v, 1, and if the value is minute m
, that is, determine whether it is smaller than a preset value,
If YES (the amount is very small), proceed to step A-8; if NO (that is, if it is larger than a preset value), proceed to step 8-0.

Step A-8> Since it is determined that the difference in redox potential of 1v+-vol is a very small amount, the process proceeds to step A-2 and repeats the operation.

<Step A-9> Change the titration amount by the titration pump 32a (32b, 32c) to a, or change the titration rate to S, and titrate again. However, if av<8. , s t<S
+

Step A-10> The oxidation-reduction potential within the reaction cell 18 (19) is measured using the ORP electrode 19 (20), and the measured value is defined as (1).

Step A-It> From the redox potential vt detected in Step 8-10, l
v, -v, 1> l v, -vol -(: ?JI determines whether it exists or not. If YES, proceed to step A-12; if NO, proceed to step Δ-13.

Step A-12>V, -Vt, and then return to Step A-9 to repeat the operation.

Step AiK > Determine whether the oxidation-reduction potential V detected in step A-10 has reached the preset titration end potential;
In the case of ES, the process proceeds to step A-5, and in the case of NO, the process proceeds to step A-14.

Step A-14> v,=V, and then return to step A-9 to repeat the operation.

In addition, in this apparatus, in order to sample three types of liquids, a switching valve may be installed and the valve may be switched according to the conditions of liquid selection.

In such an automatic liquid management device, control means +
03, corresponding to three types of processing liquids: the processing liquid selected from them by the input means 1θ4 is tlIT.
By being equipped with the control function 107, it is possible to control the 1st peeling process and cleaning-Iff' in the semiconductor advancement process.
, 1 treatment solution, 4-line I) Sulfuric acid-hydrogen peroxide aqueous treatment solution, hydrochloric acid-hydrogen peroxide solution, Lvia 7 mo? '
-Used for the management of hydrogen peroxide water-based treatment liquids, so one unit has the management functions of three units.
, In addition, as shown in the flowchart of [→J Printer] in Figure 5, assembly/printing is performed multiple times (2
IQI for minutes (1, -,')
+ to low 1" It is now possible to expand the analysis range, and further adjust the titration pops 33a, 233b and 3 according to the potential change.
7.1 so that the discharge amount of 3c can be changed, so 1v1
It is possible to shorten the fixed time. Also, the flowchart of “analysis” in Figure 0!・As shown in , the end point of titration analysis is determined based on the amount of change in potential and the absolute value of potential.
Since we have set 1 judgment J, 14, minute tli□ '\0
) (It is possible to increase the 1-ζ axis property and improve its stability.)

;Result of the Invention] As described above, in the automatic liquid management device of the present invention, the control means analyzes the processing liquid selected by manual means from among the three types of processing liquids. 4) By having a filtration analysis function], for example, the treatment solution for the Lennost stripping process and cleaning process in the ``1'' conductor manufacturing process, that is, the sulfuric acid-hydrogen peroxide aqueous treatment solution and the hydrochloric acid-peroxide treatment solution. It can be used for the management of hydrogen oxide aqueous rice and ammonia-hydrogen peroxide aqueous processing solutions, so one unit has the management functions of three machines.

(Since it is 7 Tarano, the versatility is increased, and it becomes F7 advantageous in terms of Red Jelly.

[Brief explanation of the drawing]

FIGS. 1(Δ) to 6 are diagrams showing one embodiment of the automatic liquid management device of the present invention, in which FIG. 1(A) is an overall schematic configuration diagram, and FIG. 1(I3) is a control device. 2 is a flowchart showing the main flow of this device, and FIG. 3 is a flowchart showing the analysis control function in the control means of the device.
~, Figure 4 (A) and Figure 4 (13) (showing the control contents of 1-shift automatic analysis) [Nonayat, Figure 5 does not show the control contents of sampling] [J-chart, Figure 6 is a J-chart showing the control details for minute 01. 4 Absorbance meter (liquid condition management means) +110 Sampling means 101 - Titration means +03 - Control 1 stage 10a - Input means 105... Calculation means 107 Analysis control function.

Claims (1)

[Scope of Claims] Sampling means for sampling a treatment liquid, liquid condition control means for detecting the degree of deterioration of the sampled treatment liquid, and determining the amount of active ingredients in the treatment liquid from changes in potential by titration. A titration means, a calculation means for calculating measurement data obtained from the liquid condition management means and the titration means, a control means for controlling each of the above means, and an input means for giving various commands to the control means. An automatic liquid management apparatus comprising: the control means having an analysis control function for analyzing a plurality of types of processing liquids.