JPH04126068U - diaphragm valve - Google Patents

Abstract

(57) [Summary] [Purpose] To enable minute flow rate adjustment in a diaphragm valve that opens and closes a flow path using an elastically deformable diaphragm. [Structure] An inner valve seat is provided in the flow path inside the valve seat where the diaphragm touches. A protruding valve body is formed on the diaphragm so as to engage with the inner valve seat. By deforming the diaphragm using air pressure, the gap between the inner valve seat and the protruding valve body is changed, thereby adjusting the flow rate.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention uses an elastically deformable diaphragm to open and close the flow path. Regarding diaphragm valves.

0002

[Conventional technology]

Diaphragm valves use air pressure to deform the diaphragm, creating a flat contact surface. Since the flow path is opened and closed by pressing against the valve seat, the fluid flows out all at once. It is suitable for use when suddenly stopping this flow or discharging a large amount. However, it cannot be said to be optimal for controlling minute flow rates.

0003 On the other hand, valves such as needle valves are suitably used to adjust microflow; This type of valve has a screw mechanism on the valve stem, which makes it difficult to control quickly. It is difficult to use, and the operability is not good.

0004

[Problem to be solved by the idea]

In view of these circumstances, the present invention is designed to allow minute flow adjustments by controlling air pressure, etc. The purpose is to provide a diaphragm valve with good operability.

[0005]

[Means of problem solving]

According to the present invention, the inner valve seat is attached to the inner wall of the inner flow path of the valve seat where the diaphragm comes into contact. A protruding valve body is formed on the contact surface of the diaphragm so as to engage with the inner valve seat. A diaphragm valve is provided which achieves the above objectives.

[0006]

【Example】

The diaphragm valve of the present invention can be used in various ways, as shown in the figure. Embodiments can open and close the channel and allow water-saving streams to flow through the channel when needed. This figure shows an example in which the present invention is applied to a one-way water-saving valve. This way The Unaichi water-saving valve is, for example, a valve that controls pure water used in semiconductor manufacturing processes. used for. In other words, in semiconductor manufacturing, valves that open and close pure water channels, A throttle valve installed in a bypass path separate from the flow path controls the overall flow and closes the flow path. Even in the event of a blockage, the flow may be controlled to allow a small amount of water to flow down. If a valve that opens and closes the passage and a throttle valve are installed in separate passages, stagnation will occur in a part of the passage. As a result, there is a risk that pure water may become contaminated and cannot be supplied in a clean state. there were. According to the one-way water-saving valve shown in the figure, the opening and closing of the flow path and the control of the water-saving flow are performed in one flow. It can be done on the road.

[0007] In the figure, the valve body (1) has a flow path (2) leading from one end to the other end. , the flow path (2) opens laterally inside the valve body, and a valve seat (3) is formed at the open end. has been completed. A main body (4) is fitted on the valve seat side, and the main body (4) and the valve are connected. The main body (1) is fastened with screws (not shown). umbrella-shaped diaphragm The valve body (5) having the valve body (5) is made of an elastic material and is provided so as to be able to come into contact with and separate from the valve seat (3). and the peripheral edge (6) is sandwiched between the main body (4) and the valve body (1), A valve stem (8) is fixed to the central boss portion (7).

[0008] An inner valve seat (9) is formed on the inner wall of the flow path (2) following the valve seat (3). . In the figure, the inner valve seat (9) has a conical shape, but it has a concave spherical shape, etc. It can also be done.

[0009] The contact surface of the diaphragm to the valve seat (3) engages with the inner valve seat (9). A protruding valve body (10) is formed. At the base of the protruding valve body (10) is the valve seat (3). A flat surface (11) (Fig. 2) that comes into contact with is formed, but if the flat surface is not provided (Figure 3).

0010 The above valve body, main body, valve disc, etc. are made of appropriate heat-resistant and chemical-resistant materials. For example, in the figure, the main body (4) is made of polyvinyl chloride, and the valve body (5) is made of polyvinyl chloride. is polytetrafluoroethylene, and the valve body (1) is polypropylene, preferably is made of fluororesin such as polyvinylidene fluoride (PVDF).

[0011] The other end of the valve shaft (8) is slidably fitted into the inner cylinder portion (12) of the main body. A matching piston (13) is installed. Larger than the inner diameter of the inner cylinder part (12) The spring retainer (15) slidably fitted to the outer cylinder part (14) of the diameter and the above-mentioned piston A spring (17) is installed between the tongue (13) via a washer (16). The piston (13) and the valve body (5) are urged toward the valve seat (3) by the pressure force.

0012 A stopper (20) is provided on the outside of the spring retainer (15) with retaining rings (18) and (19). is fixed. The spindle (21) is screwed to the stopper (20), and The spindle (21) moves forward and backward in the axial direction by rotating its rear end. The spindle ( 21) is sealed with collars (22), (23), packing (24) and cap nut (25). has been done.

[0013] In addition, the above valve stem, piston, spring retainer, and stopper are each applicable. An O-ring (26) is provided at the appropriate position. The O-ring (27) installed at the base of the valve stem (8) , when the valve stem moves away from the valve seat, it hits the inner wall (28) of the main body, causing the valve stem to Regulate movement.

[0014] Air or other working fluid can be introduced into the sides of the piston (13) and spring retainer (15). Ports (31) and (32) are formed in the main body (4) through joints (29) and (30) so that the main body (4) can Also, there is a space between the piston (13) and the spring retainer (15) and between the valve body (5). Ports (33) and (34) are formed to open on the rear surface, and fittings (35) and (36) are installed on each port. It is written.

[0015] A nut (37) and a cap (38) are screwed to the rear of the main body (4).

[0016] Therefore, when the spindle (21) is displaced, the valve releases the spring retainer (15). , the position of the valve body (5) via the spring (17), piston (13) and valve shaft (8). can be adjusted relative to the valve seat (3). Also, each of the above ports (31) and (32) When appropriate air is allowed to flow in from the above spring retainer (15), piston (13), etc., the upper The position of the valve body (5) in contact with the valve seat (3) (closed position) and the position away from it (open position) can be displaced to

[0017] The valve described above can be used in various ways. For example, if the spindle (21) Displace the spring retainer (15) in the direction of the seat (3), and press the spring retainer (15) against the inner end of the outer cylinder part (14). Move the spring to a position where it contacts the step (39) formed in the spring, and apply a compressive force to the spring. child When , the compressive force of the spring is greater than the pressure of the fluid such as pure water flowing into the flow path. If the setting is made so that the valve body (5) is pushed up by the pure water pressure, the valve body (5) will not be pushed up. The above ports (31), (33), and (34) are freely open via each joint, and the port (32) has an electromagnetic port. Connect the valve. Then, when the solenoid valve is operated to supply air to the above port (32), the piston (13) is displaced, the valve body (5) is separated from the valve seat (3), and the flow path (2) is fully opened. be done. Also, when air is not supplied to the port (32), the flow path is closed by the spring. It will be completely closed. In this way, it can be used as a fully open-fully closed valve.

[0018] In addition, to use it as a water-saving flow - fully open valve, rotate the spindle (21) to open the spring. Change the position of the presser foot (15) to balance the compression force of the spring (17) and the pressure of pure water. Determine the amount of water in the throttling flow when saving water by using , connect the port (32) to the solenoid valve. Then operate the solenoid valve to the port (32) When air is supplied, the valve body (5) moves to fully open the flow path. When air is not supplied to the port (32), the valve body (5) is substantially closed. position, but adjust the spring (17) and pure water pressure to the desired balance as described above. Since it is knotted, the water-saving flow flows down from between the valve body (5) and the valve seat, allowing it to be used as a water-saving valve. can. At this time, change the gap between the inner valve seat (9) and the protruding valve body (10). The flow rate can be finely adjusted, allowing the optimal water-saving flow to flow (see Figure 4). (see).

[0019] Also, remove the springs shown in Figure 1 and remove the piston (13) and spring holder. By connecting (15) with an appropriate connecting rod, it can be used in the following manner.

[0020] For example, move the spindle (21) back so that it does not contact the spring retainer (15). If the air is allowed to flow in from the port (32), the valve body (5) will move to the left in the figure. The channel opens. By letting air flow in from port (31), the flow path can be completely closed. .

[0021] Also, adjust the spindle (21) to connect the piston (13), valve body (5), etc. with pure water. Balance the pressure, determine the flow rate when throttling, and operate the solenoid valve in this state. If air is supplied to the port (32), the protruding valve body (10) will open as shown above. A finely adjusted water-saving flow can be made to flow down between the valve seat and the inner valve seat (9). So When air is supplied to the port (31), the piston (13) and the valve body ( 5) move against pure water pressure, completely closing the flow path, and can be used as a water-saving flow - fully closed valve. Ru.

[0022] Note that the spring holder (15) is omitted and the spring (17) is attached to the piston (1). 3) and the stopper (20), and the end of the spindle (21) and the piston position the spindle (21) so that the tip of the spindle (21) faces the rear of the piston (13). It can also be provided so that it exists at the same location. In this way, the valve body (5) can be moved. The amount of movement is set within the range where the rear portion of the piston (13) comes into contact with the tip of the spindle (21). The water can be regulated within a certain range, and the water-saving flow can be allowed to flow within this range.

[0023] Furthermore, air is constantly supplied to the port (32) as shown in Figure 1. If you do this, the flow path will be fully opened, but air will also be supplied to the above port (31). Since the area of the spring retainer (15) is wider than that of the piston (13), The pressing force of the spring retainer (15) is greater than that of the piston (13). , the valve body (5) is pressed against the valve seat (3), and the flow path is completely closed. In addition, when the power is not energized, If you adjust the spindle (21) above to balance the pure water pressure and the valve body, the above will be satisfied. A finely adjusted water-saving flow can be caused to flow down using the side valve seat (9) and the protruding valve body (10). In this way, it can be used as a fully open-fully closed valve controlled by air pressure. Ru.

[0024] Also, the spindle (21) can be rotated even when air is not supplied to ports (31) and (32). , if you balance the pressure of the spring (17) and pure water and determine the amount of water saved, you can As shown below, the protruding valve body (10) and inner valve seat (9) allow finely adjusted water-saving flow to flow down. I can do that. Then, supply air to port (32) and not to port (31). When controlled in this way, the valve body (5) separates from the valve seat, fully opens the flow path, and returns to the port (31). When air is supplied but not supplied to the port (32), the flow path is completely closed.

[0025] As mentioned above, the above embodiment shows that the diaphragm valve of the present invention is applied to a one-way water-saving valve. Although we have described examples in which the invention was used, the invention can also be applied to various other diaphragm valves. can do.

[0026]

[Effect of the idea]

The present invention is constructed as described above, and has a diaphragm that can adjust minute flow rates. A ram valve is provided.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing an embodiment of the present invention.

FIG. 2 is a sectional view of a valve body.

FIG. 3 is a sectional view showing another embodiment of the valve body.

FIG. 4 is an enlarged cross-sectional view of a portion of the device in a state where fluid is flowing down.

[Explanation of symbols]

1 Valve body 2 Flow path 3 Valve seat 4 Main body 5 Valve body 9 Inner valve seat 10 Protruding valve body

Claims (1)

[Scope of utility model registration request] 1. A diaphragm valve that opens and closes a flow path by abutting an elastic diaphragm against a valve seat formed at an open end of a flow path, wherein an inner valve seat is formed on an inner wall of the flow path following the open end. A diaphragm valve characterized in that a protruding valve body is formed on a contact surface of the diaphragm so as to engage with the inner valve seat.