JPH03505104A - Plasma treatment method and plasmatron - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] Plasma treatment method and plasmatron field of invention The present invention relates to plasma technology, more specifically, plasma processing method and plasmatron. The invention relates to a spray-coated coating, preferably using a refractory powder. ating), particle spheroidization treatment, powder surface finishing and product plasma - Can be used for chemical processing.

Conventional technology A carrier that generates a plasma jet and is fed through a cylindrical duct It involves introducing into the plasma jet the material powder to be atomized by the gas. In this technology, the plasma spraying method Known (FR, B.

202600B).

The plasmatron carrying out the method is of conventional design, i.e. it is The powder consists of an anode and a cathode formed by a plasma A cylindrical duct is provided in the anode for feeding into the jet (F R, B, 2026006).

One drawback of this method and the plasmatron that implements it is that the plasmatron The distribution of powder across its cross section in the jet is non-uniform. to this This reduces undesirable effects such as non-uniform melting and acceleration of powder in the plasma. This leads to low reproducibility of the properties of the subsequently sprayed coating.

Therefore, recently, process components such as powders have been transferred to an annular slot surrounding the plasma stream. into the plasma stream along the cut and at an angle to the flow direction. Plasma processing methods are increasingly being used (ELS , ^, 4080550), in some plasmatrons (FR,B, 2376580゜SU, ^, 503601), the annular slot is connected to the cathode. In other cases, the annular slot is located between the anode and the nozzle-type aperture. between the node and the nozzle located after it, i.e. the voltage of the plasma jet. located in a deenergized region (US, ^, 3071678), In the latter case, the electrical area and processing of the plasmatron The areas are isolated from each other.

That can be liked. Because the powder-carrying gas is sensitive to the electrical properties of the arc. This is because it does not have any significant effect.

All of the above plasma processing methods that use the delivery of processing components along an annular slot and and the corresponding plasmatron, in which the processed components are distributed over the cross-section of the plasma jet. Although uniformly distributed, the gas-dynamic and thermodynamic It suffers from the disadvantage that the distribution of properties is never uniform. As a result Therefore, the powder in the peripheral region of the plasma jet is less than the powder in the axial region. It is heated and accelerated to a certain extent. This allows processed products, e.g. This results in a deterioration of the properties of the plasma sprayed coating.

Plasma jet – laminar or turbulent jet depending on required processing parameters The process components and carrier gas are transferred to the plasma jet. plasma and heating along an annular slot surrounding the cut. After the streams of components have merged, a focusing gas is introduced into the homogeneous flow of the plasma. , a plasma processing method that focuses the plasma jet with processing components (SU, ^, 656669) does not have any of the drawbacks mentioned above, in this case the processing (along with the carrier gas) and focusing components perpendicular to the direction of jet motion. or at an angle.

A plasmatron designed to implement this method consists of a cathode and a nozzle. type anode, followed by an anode placed in the direction of the plasma jet. (SO, ^, 65686 9), the surfaces of adjacent nozzles facing each other are relative to the plasmatron axis. make a right angle or the same angle. Nozzle immediately following the anode An annular slot between the plasma jet and the carrier gas allows the processing components to be An annular slot between adjacent nozzles located after the anode The kit is designed to supply focusing gas. Therefore, processing ingredients are The annular slot for supplying gas and the annular slot for supplying focusing gas are flat. lines, or rather they make the same angle as the plasmatron axis. ing.

Based on the plasma jet with focused processing components, the cross-sectional area of the jet decreases, and its components are more concise, i.e. along that path, but It moves slightly and improves the properties of products manufactured by plasma treatment. sell.

However, these improved properties make the plasma jet and thus the plasma An explanation for this phenomenon is only possible with an increase in Matron's power. Do the following.

In the method performed using the plasmatron of SU, ^, 656669, , the focusing of the processing component is complete at the point when the component has already merged with the plasma jet. This is achieved when the components are sufficiently accelerated in the jet to obtain high velocities.

Therefore, in order to focus the machining component, i.e. change the direction of its velocity vector This requires a significant gas-dynamic action of the focusing gas on the plasma jet. It will be done. In other words, the flow rate of the focusing gas is sufficiently high and the plasma generating gas field is should be able to match the current situation.

However, this is due to the cooling of the plasma jet.

wn) and may result in significant temperature and velocity gradients across its cross-section. increase the plasma jet power to prevent this from occurring. must be met. However, the increased power of the plasmatron has changed the fabrication process. Power consumption for carrying out (i.e. power consumption per product to be processed) , e.g. electric current per unit area in the case of plasma or plasma-chemical coatings. power consumption).

Summary of the invention The present invention provides a focusing gas for focusing processing components. However, without essentially cooling the plasma jet, i.e. its aerodynamic and thermodynamic properties, thereby increasing the plasmatron power Plasma such that high performance plasma processing can be obtained without the need to increase It attempts to provide a processing method and plasmatron.

This problem generates a plasma jet and surrounds the plasma jet. Supplying processing components along with a carrier gas to a plasma jet along an annular slot , and focusing the processed components in the plasma jet with a focusing gas (f According to the present invention, in a plasma processing method including a focusing gas into the region where the plasma jet merges with the carrier gas flow containing the processing components. This is solved by providing that.

In the merged region of processing components and plasma jet, this component flow has not yet achieved the high speeds obtained as a result of interaction with the jet. It was. Therefore, in order to focus the processing components, i.e. the processing components in this region To change the velocity vector of the focusing gas to the jet, an even smaller gas dynamic action is required, thus the plasma of Stl,^,656669 As in trons, focusing occurs downstream along the plasma jet. A smaller flow rate of this gas is required if the Supply with low flow rate The focused focusing gas has no effect on the gas-thermodynamic properties of the plasma jet. Therefore, the proposed method uses a constant electric current of the plasma jet. We are looking forward to using higher quality plasma processing in the future.

If the plasma jet is a laminar flow, the processing components are introduced into the plasma jet. The average velocity of the carrier gas v2 and the average velocity of the focusing gas v in the region are: Preferably given by: ρ2V2”=　(55~83)ρ+V+2/　(90-α)2゜p-5Vx2= (0,03~0.1)p IVI” (in the above formula, ρ3.ρ7.ρ is the processing Plasma, carrier gas and and the average density of the focusing gas, ■ is the flow of the plasma jet at the point of introduction of processing components into the plasma jet. is the average speed, α is the angle (in degrees) formed by the machining components introduced with the plasma jet. ) is, ) If the plasma jet is turbulent, introduce processing components into the plasma jet. The average velocity V of the carrier gas and the average velocity V of the focusing gas at a location are given by the following formula: Preferably given by: 110-(1,2~1.8)10-"(90-α)2ρ3Vs2-(0 ,91~1.43) 10-', o IVl'' If the plasma jet is laminar flow Carrier gas velocity and focusing gas both when the flow is turbulent and when it is turbulent. The above relational expression, which enables appropriate selection of speed, has been experimentally determined by the present inventors. The determination is based on the fact that the machining component from the focused plasma jet axis is was based on the minimum deviation of the processing component path at a constant angle into the path.

The processed components are placed at an angle of 20° to 40° to the axis of the plasma jet in the flow direction of the plasma jet. Preferably, the paths of the processing components are fed at an angle, which Minimum deflection from the plasma jet axis, i.e. allowing for its optimal straw bundle .

The above problem can also be solved by combining an annular output electrode with two coaxially arranged nozzles. an annular slot which serves as a duct for the supply of processing ingredients; is provided between the output electrode and the first nozzle and for supplying the focusing gas. an annular slot forming a duct for the first and second nozzles; According to the present invention, the plasmatron is located opposite to the output electrode. The surface of the first nozzle and the surface of the first nozzle facing the second nozzle are in a cylindrical region located between the outlet opening of the electrode and the inlet opening of the second nozzle. The diameter of this cylindrical area forms a certain angle with the apex of the second nozzle. by providing a plasmatron such that the diameter of the inlet opening is equal to the diameter of the inlet opening of It is also solved.

The surface of the first nozzle following the output electrode is in contact with the outlet opening of the output electrode and the input of the second nozzle. Based on the fact that it makes a certain angle with its apex in the area between the mouth opening Therefore, the mutual alignment of the processing component supply duct and the focusing gas supply duct is providing a focusing gas supply into the merging region of the gas stream carrying the jet and processing components; is achieved as follows. Thus, the proposed method has all the above advantages of the method. Properly executed, it is equally applicable to Matron's proposed design.

The opposing surfaces of the exit electrode and the first nozzle have a cone angle ranging from 40° to 80'. The conical surface of the output @pole is preferably conical in shape and has a conical surface of the first nozzle. Preferably surrounded by a conical surface, this provides an optimal concentration of processing components. bring a bunch.

The present invention will be further described in detail with reference to preferred embodiments thereof with reference to the accompanying drawings. Show by

Brief description of the drawing Figures 1a, 1b and 16 show carrier gas and focusing according to the method of the invention. Figure 2 shows a possible method of supplying the processing gas for processing components during a plasma jet. The velocity head ratio of plasma jet and carrier gas in the region of introduction into , and the inflow angle of processing components. velocity head of the plasma jet and focusing gas in the region of introduction into the jet; Figure 4 shows the relationship between the ratio and the inflow angle of the processed components. The proposed plasmatron has a longitudinal section, and Figure 5 shows the output section of the proposed plasmatron with a trapezoidal longitudinal section of the generation nozzle. It shows.

BEST MODE FOR CARRYING OUT THE INVENTION The proposed plasma processing method is realized as follows. Pump the plasma generating gas 6 arcs and plasma generating gas that are supplied to the lasmatron and blow the arc As a result of the interaction between The carrier gas is then mixed with the process components such as powders to be sprayed. The plasma jet is supplied along an annular slot surrounding the plasma jet. plastic A focusing gas is introduced into the merged region of the Zumajet and powder carrying gas stream. In this case The co-region is an annular region extending around the periphery of the plasma jet. For focusing Gas is introduced into this region through the annular slot and jet surrounding the plasma jet. through individual ducts with outlet openings located around the Now, the focusing gas is at a certain angle and perpendicular to the plasma jet. May be introduced at both corners. If the plasma jet is turbulent, the carrier gas The water may equally be fed either at an angle or perpendicular to the jet. Often, and if the jet is laminar, the carrier should be at right angles to the plasma jet. It is not desirable to introduce Yagas. This point will be explained below. deer However, in any case, the focusing gas is a combination of jet and powder carrying gas. The carrier gas and straw bundle gas must be constantly supplied to the Possible ways of supplying the power are shown in Figures 1a, 1b and 16, where The plasma jet is designated by 1 and the carrier gas is designated by reference numeral 2 along with the processing components. , the focusing gas is denoted by 3 and the powder particles (processing component) are denoted by 4. There is. Direction of movement of plasma jet and carrier gas flow and focusing gas flow are indicated by the respective arrows.

In the case of plasma-chemical surface treatments, steam-gas mixtures serve as processing components. Vapors of chemically active substances inside. On the other hand, chemically active substances are gases. In some cases, it functions as both a carrier gas and a processing component. plasma treatment In all cases except the last mentioned, the carrier gas and The focusing gases may have the same composition.

The focusing gas 3 directs the powder away from the periphery of the plasma jet into its axial region. forcing, oriented coaxially along jet 1 and applied to the surface to be treated. A non-uniform flow 5 is formed. Combination of plasma jet 1 and carrier gas flow 2 In the parallel region, the velocity of the powder particles 4 introduced by this gas is still comparable. Since the target is small, any significant gas-dynamic effect on the portion of the focusing gas 3 is For the displacement of the powder 4 towards the axis of the jet 1 is not required and the plasma radiation A low flow rate is chosen to avoid appreciable changes in the gas-thermodynamic properties of Jet 1. The resulting plasma jet 1 may be completely cooled by not being cooled. And powder particles 4 are produced which can be uniformly melted and even more uniformly accelerated, which With better quality of covering and relatively small power of plasma jet than Provides high power utilization.

When introducing the focusing gas 3 into the combined region of the plasma jet 1 and the powder 4, powder particle path diverging angle rgence angle) β is relatively small because the powder moves at the tip. stomach. The value of this angle β is given by the inflow angle α for introducing the powder into the plasma jet 1. and plasma treatment process conditions, that is, plasma jet 1 in the area where powder is not introduced. , depending on the velocity heads of the carrier gas 2 and the focusing gas 3. Each inflow angle For α, under optimal operating conditions, a certain minimum powder path is generated after the powder is focused. It was experimentally found that a dispersion angle β exists.

Figure 2 shows the ratio of ρ+V+”/ρ2v,′ to ensure the minimum value of the angle β and the powder The experimental relationship of the leapfrog to the inlet angle α introduced into the mudget is shown. here where ρ1 and ρ are the plasma and carriers in the region where no powder is introduced, respectively. is the density of the gas, and vI and ■2 are the plasma density in this region, respectively. is the average velocity of the madget and carrier gas. The term ρ1v,' is the plasma denotes the velocity head of the jet and ρ2v22 is the velocity head of the carrier gas. be. The relationship of FIG. 2 has been obtained for powder materials with various densities. child The plot points of these relationships correspond to powder materials such as =6,7−that Density 2.4 g/cm’ for turbulent and laminar plasma jets, respectively. 8,9-respectively, the turbulent flow of the plasma jet and In the case of laminar flow, a cobalt base metal with a density of 7.4 g/c-3, 10.0-respectively, In the case of turbulent and laminar flow of the plasma jet, a colan with a density of 3.9 g/Cm dam; and 12.13-turbulent and laminar fields of plasma jet, respectively. In this case, the intermetallic compound nickel-aluminum system has a density of 6.2 g/cva'.

Curve 14 is the boundary of ρ, V, 2/ρ2v2′ ratio for plasma jet turbulence. and curve 15 is the limit for this ratio for laminar flow of the plasma jet. It is a value. The boundary value of the parameter is determined by the powder particles moving in the plasma jet after focusing. For a child, the minimum path divergence angle β means the value that can be achieved within its limits. Ru.

As can be seen from FIG. 2, curves 14 and 15 are parabolas. turbulent plasma For the motion of the jet, (curve 14), the proportionality constant of the parabola is 1.2X10 -2 (upper parabola) and 1.8X10-2 (lower parabola). For Mudgett laminar flow, the proportionality constant of the upper parabola 14 is 55, and In the case of the downward parabola 15, it is 83. Therefore, powder plasma jet In the case of turbulent flow, the carrier gas velocity in the introduction region of is requested to be selected.

If the plasma jet is laminar, the area where the powder is introduced into the plasma jet is The carrier gas velocity should be such that it satisfies the following relationship:

ρ, V22-(55-83)ρIVI”/(90-α)2 is shown by the latter equation. If the plasma jet is laminar, the angle α must be other than 90°, as shown in in this case, the velocity head or carrier gas velocity is null. This is because it will reach its limit.

Figure 3 shows how to ensure the minimum angle β in the powder introduction area 1), ■12// ) iV*2 (ρff, L o and p-L' LL soh soh of the focusing gas The ratio of density, its velocity and its velocity head during the plasma jet of the powder It shows the relationship found experimentally between the inflow angle α introduced into the the relationship Plot points 6-13 correspond to the same powder material shown in FIG. ing. @16 corresponds to the turbulence of the plasma jet, and line 17 corresponds to its Compatible with laminar flow. As can be seen from Figure 3, the ρ1V+2/ρ,■,2 ratio is It does not depend on the angle α, it depends on the pattern of the plasma jet flow. That's it. If the jet is turbulent, the line 16 will reflect the plasma in the powder introduction region. Give a boundary value for the velocity head ratio between the magget and the focusing gas.

These lines have proportionality constants of 0.91 (upper line 16) and 1.43 (lower line) determined by. Therefore, if the plasma jet is turbulent, after focusing The minimum powder path divergence angle β is determined by the following relationship between the focusing gas velocity in the powder introduction region and obtained when the equation is chosen to satisfy the equation.

p3V)2=(0,91~1.43)10-27')+vL'jet is laminar, between the plasma jet and the focusing gas in the powder introduction region. The boundary value of the velocity head ratio of is shown by line 17, with a proportionality constant of 0.03 (upper 17) and 0.1 (lower line 17), in other words, the plasma If the jet is laminar, the focusing gas velocity v in the powder introduction region is /:)s ’b” = (0,03~0.1) f) 1vI2, the focusing The later minimum powder path divergence angle β is provided.

Therefore, the operating conditions of the plasma treatment process ρ+V+"/ρ2v, 2 and ρ+N' The selection of +”/ρ,■,2 depends on the inflow angle α from the powder to the plasma jet and its determined by the flow pattern.

For the proposed method, the relationship between the operating conditions shown in Figures 2 and 3 is universal. Yes, i.e. their upper and lower boundaries depend on the density of the material being sprayed It is noted that it does not. If that were not the case, then in Figure 2 Plots 14 and 15 in Figure 3 and plots 16 and 17 in Figure 3 are , it will pass through the point corresponding to the maximum or minimum density.

After focusing, the minimum path divergence angle β for the powder moving in the plasma jet is , 20' to 40°. is found in Here, the angle β is in the range of 2 to 3 degrees. Angle α is the limit outside, the angle β increases to 12·˜13°. As a result, the powder By controlling the angle of introduction into the plasma jet, the degree of focusing of the powder can be controlled. It is possible to change the degree. It varies in the shape and dimensions of the surface being treated. Therefore, it is of great importance in the implementation of plasma processing.

The proposed plasmatron consists of a cathode 18 (Fig. 4), an inlet nozzle 19, and an internal voltage. Pole insert 20, nozzle-shaped anode 21 serving as output electrode, generation nozzle 2 2 and an outlet nozzle 23, all coaxially aligned. each other The surfaces of the anode 21 and generation nozzle 22 facing each other are conical. , and has a cone angle γ ranging from 40 to 80°. In this case, the generated nozzle The conical surface of the tube 22 surrounds the conical surface of the anode 21. i.e. , the conical surface of the anode 21 is convex, while the conical surface of the nozzle 22 is concave. be. formed by the conical surface of the anode 21 and the generating nozzle 22; With a cone angle γ selected within the limits of ~80°, the machining component is plasma jetted The optimum conditions for introducing the processing components into the plasma, i.e., avoiding cooling of the plasma and Ensures a minimum flow rate of the transported gas as well as its maximum concentration in the axial region of the jet be done.

Between the conical surfaces of the anode 21 and the generating nozzle 22 facing each other , an annular slot 24 is provided. This slot allows processing components to be plasma-treated. It is useful as a duct for introducing it into the laboratory. occurrences facing each other The surfaces of the nozzle 2Z and the outlet nozzle 23 are flat, and there is an annular slot between them. A duct 27 is provided, which is a duct for supplying focusing gas. cyclic su Lot 24 communicates with equipment such as a powder scale (not shown) and The annular slot 25 communicates with a focusing gas source (not shown).

According to the invention, the surface 26 of the generation nozzle 22 facing the anode 21 is Forms a constant angle δ with the surface 27 of the generating nozzle 22 facing the outlet nozzle 23. to be accomplished. The apex 28 of this angle δ is located between the outlet opening of the anode 21 and the outlet nozzle 23. within a cylindrical region located between the inlet opening of the Focusing gas, plasma It is necessary to feed into the region of the merger of the jet and the gas stream carrying the processing components.

Referring to FIG. 4, the plasmatron assembly, namely the anode 21 and output The mouth nozzles 23 have the same inner diameter, which is made of refractory powder material (aluminum oxide). zirconium, zirconium oxide, etc.) and plasma chemistry. preferred for surface treatment, in this case comprising a vertex 28 of angle δ The diameter of the cylindrical region is equal to the inner diameter of the anode 21 and the outlet nozzle 23. On the other hand, if the inner diameter of the outlet nozzle 23 exceeds the inner diameter of the anode 21, this cylindrical region has a diameter equal to the inner diameter of the outlet nozzle 23, i.e. the diameter of its inlet opening. It is possible. This is because the cross-sectional dimension of the plasma jet is This is because it is precisely the inner diameter of the outlet nozzle 23 that determines. anode and An improvement in the design with different inner diameters of the outlet nozzle allows the use of low melting point powder materials (e.g. tin). may prove suitable when dealing with coatings such as zinc, zinc, etc.).

FIG. 5 shows a proposed plasma controller in which the generating nozzle 22 has a different shape. This shows the output section of the engine. In the plasmatron shown in Figure 4, the nozzle The surfaces 26 and 27 of 22 intersect, so that the vertex of the angle δ In the plasmatron shown in FIG. 5, the nozzle 22 is a cylindrical region. It has a shaped inner surface 29 and intersects at surfaces 26 and 27. rather than an extension of them.

In this case, the apex 28 of the angle δ is the exit opening of the anode 21 and the nozzle. within the cylindrical area defined by the inlet opening of the tube 23. In other words, the fourth In the specific example of the invention, the generating nozzle 22 has a triangular longitudinal section, and as shown in FIG. In the specific example, the longitudinal section is trapezoidal.

The height of the cylindrical inner surface 29 of the generation nozzle 22 depends on the operating conditions of the plasmatron. It is noted that it can be determined. Therefore, if the plasma flow is turbulent, the anode The diameter of the exit opening of the door 21 is small (4-8 m5) and the position of the apex 28 of the angle In order to secure the position within the cylindrical area described above, the height of the surface 29 of the nozzle 22 must also be adjusted. It must also be very slightly small or zero (this corresponds to Figure 4). corresponding), if the plasma is laminar, a larger inner diameter of the anode 21 is preferred. (7 to 20 m+s), in this case, the height of the cylindrical inner surface 29 of the nozzle 22 may increase.

Other embodiments of the proposed plasmatron are also possible. For example, with a focusing gas The annular feeding slot 25 is at an angle to the plasmatron axis. The mutual positions of slots 24 and 25 are as shown in FIG. 1c. This is the same as shown in the schematic diagram.

The plasmatron operates as follows.

An arc is blown between the cathode 18 (FIG. 4) and the anode 21 and a homogeneous plate is formed. After the lasma jet is generated at the exit of the anode 21, the focusing gas is passed through the annular slot. 25 and a carrier gas for processing components such as powders is supplied through the annular stream. Supply through lot 24. Plasma generation gas, carrier gas and focusing gas The direction of supply of gas is indicated by the respective arrows in FIG. plaz 0 to simultaneously carry out the introduction of the powder in the axial region of the magget and its focusing The surfaces 26 and 27 of the generation nozzle 22 intersect at an angle δ, the apex of which is the anode. 21 and the inlet opening of the outlet nozzle 23 so that the powder At the very moment of merging with Zumajet, i.e. the powder is Focusing of the powder takes place when it has not yet been accelerated. In this case, powder In order to change the direction of the final motion, i.e. the powder moves in the axial region of the plasma jet. In order for the focusing gas to be focused within the is also not required, therefore the flow rate of this gas is set to a low level so that the Cooling of the lasma jet is avoided. The overall inhomogeneous jet is focused. Contrary to the known plasmatron of SU, ^, 856669, the proposed plasma In TRON, the powder is focused in the jet, but the effect on it is ignored. It's fine. This not only allows an excellent coating to be obtained, but also a high Processing component utilization is obtained, which subsequently increases the useful life of Plasmatron and processing The risk of overheating the product being used is eliminated.

A specific example embodying the proposed plasma processing method is given below: Example 1 titanium oxide〉′ using a plasmatron with the following design specifications and operating conditions. Sprayed with powder coating (Netco 102) 7'-: Angle γ, 60° length of the arched duct (distance between the cathode and the anode inlet opening), 35 am angle δ, 600 Plasma generation gas, air Plasmatron power, 30kHz powder spray particle size, 20-30IJm Spraying distance, 140 am Thickness of the coating to be sprayed, 0. 35 + u + A coating was obtained exhibiting the following properties: adhesion, 70-898Pa porosity, less than 1% powder utilization was 85%.

Literature (“Gazotermicheskie pokrytia iz por oshkovykb mate-riaiov"Referenee Book , Yu, S., Borisov et al., 1987゜Naukov a Dumka, Kiev, p. From the data available in 359), Adhesion of 3102 results in a coating porosity of over 1% and an adhesion strength of 138 Pa. brought about.

Example 2 Using a plasmatron with the design specifications shown in Example 1, the following operations were carried out: Under these conditions, corundum powder was sprayed.

Plasmatron power, 15 kl? Plasma generation gas, air Velocity head ratio between plasma jet and focusing gas ρl■12/ρsV*2. 75 Velocity head ratio between plasma jet and carrier gas ρ+’/+2/ I) 2V2”, 44 Powder path divergence angle β after focusing, 3° Powder particle size, 20-401Ill Spraying distance, 120 vam Thickness of the coating to be sprayed, 0.35 +uw A coating was obtained with the following properties: adhesion; 30-508Pa porosity, less than 1.5% The powder utilization was 82% and the efficiency of the spraying process was 3 kg/hour. the Therefore, the specific power consumption of the process was 5 kill hours/kg.

Literature (+Cazotermieheskie pokrytia iz por oshkovykh waterialov” Reference Book , Yu, S., Borisov et al., 1987. Naukov a Dumka, Kiev, p, 333. Table 5.7) As shown above, when corundum is sprayed into air plasma with natural gas, The power required to achieve efficiencies close to that of , for argon-hydrogen plasma, its power is in the range of 32-35 kHz, In the case of nitrogen plasma using a Metco (ETCO) device, the power is 50 kW. be. Here, the sprayed coating exhibits the following properties: 10-30 MP Adhesive strength of a, porosity of 2-5%.

Example 3 Plasma-chemical surface treatment of chrome steel products with primary design specifications and operating conditions. It was carried out using a plasmatron: angle γ, 70° Plasma generation gas, carrier gas and focusing gas, Argon Processing ingredients, Metal-organic vapor plasmatron power, 1 2kNO+V+2/ρ3Vl” ratio, 75ρ, v+”/ρ, v22 ratio , 44 The resulting coating had the following properties: Material, 2. lJm thick silicon carbide porosity, 0% Micro hardness, 1400~16008Pa processing output range is 3~ It was 10 m+m2/sec.

Industrial applicability The present invention preferably includes thermal spray coating using refractory powder, particle spheroidization treatment, powder surface It can be used for finishing as well as for plasma-chemical treatment of products.

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Claims (1)

[Claims] 1. Generate a plasma jet (1) and place the processing component (4) in it as a carrier. along with the gas (2) along the annular slot surrounding the plasma jet (1). and is heated in the plasma jet (1) by the focusing gas (3). A plasma processing method comprising a step of focusing a chemical component (4), the method comprising a focusing gas. (3) is a carrier gas stream ( 2) A plasma processing method characterized by being introduced into the merged area with. 2. When the plasma jet (1) is a laminar flow, the processing gas (4) is the average velocity V2 of the carrier gas (2) in the region of introduction into the cut (1) and The average velocity V3 of the focusing gas (3) is ρ2V22=(55~83)ρ1V12/(90-α)2ρ3V32=(0.0 3 to 0.1) ρ1V12 (However, in the formula, ρ1, ρ2, ρ3 are processed components Plasma, carrier gas, and focusing gas in the region of introduction into the Mudget , and V1 is the average density of each of the is the average speed of the jet, α is the angle (degrees) at which the processed components are introduced into the plasma jet) The plasma processing method according to claim 1, characterized in that it is provided by: 3. If the plasma jet (1) is turbulent, the processing component (4) is the average velocity V2 of the carrier gas (2) in the region of introduction into the cut (1) and The average velocity V3 of the focusing gas (3) is ρ2V22=ρ1V12/(110-(1.2~1.8)102890-α)2 ) ρ3V32 = (0.91 to 1.43) 10-2ρ1V12 (however, in the formula, ρ1 , ρ2, ρ3 are the plasma values in the region where processing components are introduced into the plasma jet. V1 is the average density of the carrier gas, carrier gas, and focusing gas, and V1 is the average density of the is the average velocity of the plasma jet in the region where the components are introduced, α is the angle at which the processed components are introduced into the plasma jet). The plasma processing method according to claim 1, characterized in that: 4. Processing component (4) is attached to the axis of the plasma jet (1) in the downstream direction. The plastic according to claim 1, characterized in that it is supplied at an angle of 20 to 40 degrees with respect to the Lasma treatment method. 5. an annular output electrode (21) followed by a pair of nozzles arranged in coaxial relationship; (22, 23), forming a duct for supplying processing components A slot (24) is provided in the output electrode (21) and the first nozzle (22). and an annular slot (25) forming a duct for supplying the focusing gas. , a plasma plate provided between the first nozzle (22) and the second nozzle (23). the surface of the first nozzle (22) facing the output electrode (21) ( 26) and the surface (27) of the first nozzle (22) facing the second nozzle (23). ) forms a certain angle, and its apex (28) is connected to the exit opening of the output electrode (21). in a cylindrical region located between the inlet opening of the second nozzle (23); characterized in that the diameter of the cylindrical region is equal to the diameter of the inlet opening of the second nozzle (23) Plasmatron. 6. The opposing surfaces of the output electrode (21) and the first nozzle (22) are conical, and With a cone angle of ~80°, the conical surface of the output electrode (21) is connected to the first nozzle (22 ) is surrounded within a conical surface of the plasma according to claim 5. Matron.