JPH03286835A - Method of decorating molded object - Google Patents

Method of decorating molded object

Info

Publication number
JPH03286835A
JPH03286835A JP2088656A JP8865690A JPH03286835A JP H03286835 A JPH03286835 A JP H03286835A JP 2088656 A JP2088656 A JP 2088656A JP 8865690 A JP8865690 A JP 8865690A JP H03286835 A JPH03286835 A JP H03286835A
Authority
JP
Japan
Prior art keywords
mold
skin
sheet material
skin material
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2088656A
Other languages
Japanese (ja)
Inventor
Shigeki Sato
茂樹 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Plast Co Ltd
Original Assignee
Nihon Plast Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Plast Co Ltd filed Critical Nihon Plast Co Ltd
Priority to JP2088656A priority Critical patent/JPH03286835A/en
Publication of JPH03286835A publication Critical patent/JPH03286835A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C51/00Shaping by thermoforming, i.e. shaping sheets or sheet like preforms after heating, e.g. shaping sheets in matched moulds or by deep-drawing; Apparatus therefor
    • B29C51/16Lining or labelling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2009/00Layered products

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
  • Laminated Bodies (AREA)
  • Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)

Abstract

PURPOSE:To prevent the air from being entrapped between a core and a skin by a method in which the space between a receiving holder and the skin is closed in the state where the skin is not brought in contact with the core, and said closed space therebetween is kept in vacuum condition. CONSTITUTION:In the state where the top force 33 which vacuum-molds sheet material 42 is held in the vacuum condition as it is, the bottom force 22b on which the surface of the bace plate 23 is coated with an adhesive layer is raised by the cylinder 21 for raising and lowering, and the raising process is stopped immediately before the rear surface of the sheet material 42 is brought in contact with the base plate 23. Then, a closed space (air tight chamber) is formed around the bottom force 22b by an elastic seal member 44, a box 22a, a keeping holder 41 and a seal member 42. While the vacuum condition of a top force 33 is kept, inner space 24 is allowed to communicate with vacuum source, whereby the air tight chamber of the bottom force is also kept in vacuum condition. The bottom force 22b is further raised, whereby the rear surface of the sheet material 42 is caused to adhere to the upper surface of the base plate 23. Further, the vacuum condition of the top force 33 is switched to pressurized state by a switching valve 36, and while the adhesion of the sheet 42 to the base plate 23 is heightened by air pressure, the mold release from the top force 33 is contrived.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明は、芯材の表面に接着層を介して表皮材を貼着す
る成形品の加飾方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Field of Application) The present invention relates to a method for decorating a molded article, in which a skin material is attached to the surface of a core material via an adhesive layer.

(従来の技術) 従来、芯材(以下、基板と言う)の表面に接着層を介し
て表皮材(以下、シート材と言う)を貼着する場合、下
向きの成形用型(以下、上型と言う)にてシート材を成
形し、この上型に対向する受け台(以下、下型と言う)
を上昇させ、この下型上の基板をシート材の裏面に圧着
するようにしている。
(Prior art) Conventionally, when attaching a skin material (hereinafter referred to as sheet material) to the surface of a core material (hereinafter referred to as substrate) via an adhesive layer, a downward molding mold (hereinafter referred to as upper mold) is used. The sheet material is formed using a holder (hereinafter referred to as the "lower mold") that faces the upper mold.
is raised, and the substrate on this lower die is pressed onto the back surface of the sheet material.

(発明が解決しようとする課題) この従来の方法は、基板の表面にシート材を密着させる
場合、特に基板がソリッドタイプの場合は、シート材と
基板との間に巻込まれた空気が抜けず、成形品の表面に
膨んだ箇所が発生する問題がある。この膨みをなくすた
めには、ソリッド基板に多数の通気穴を設けて前記巻込
み空気を除去する方法があるが、各通気穴間の間隔を非
常に小さく設定しないと通気穴間にて膨みが発生する。
(Problem to be Solved by the Invention) This conventional method does not allow air trapped between the sheet material and the substrate to escape when the sheet material is brought into close contact with the surface of the substrate, especially when the substrate is a solid type. , there is a problem that bulges occur on the surface of the molded product. In order to eliminate this bulge, there is a method to remove the entrained air by providing a large number of ventilation holes in the solid board, but unless the interval between each ventilation hole is set very small, the expansion will occur between the ventilation holes. The problem occurs.

本発明は、このような点に鑑みなされたものであり、ソ
リッドタイプの芯材であっても表皮材との間に空気が巻
込まれるおそれを防止できるとともに、芯材の表面に表
皮材を良好に密着できる成形品加飾方法を提供すること
を目的とするものである。
The present invention has been made in view of these points, and it is possible to prevent the risk of air being trapped between the core material and the skin material even if it is a solid type core material, and to form a surface material that is well coated on the surface of the core material. The purpose of this invention is to provide a method for decorating molded products that can be closely attached to molded products.

〔発明の構成〕[Structure of the invention]

(課題を解決するための手段) 本発明は、芯材23の表面に接着層を介して表皮材42
を貼着する成形品の加飾方法において、受け台22に芯
材23をセットし、受け台22に対向して配置された成
形用型33と芯材23との間に加熱軟化された表皮材4
2を張設する工程と、表皮材42と成形用型33とを接
触させて真空吸引することにより、成形用型33に表皮
材42を吸着する工程と、表皮材42と芯材23とを接
しない状態で受け台22と表皮材42との間の空間を密
閉して、その間の密閉空間を真空状態とする工程と、成
形用型33に対する表皮材42の吸着を解除する工程と
からなる加飾方法である。
(Means for Solving the Problems) The present invention provides a method for attaching a skin material 42 to a surface of a core material 23 via an adhesive layer.
In the method for decorating a molded product, a core material 23 is set on a pedestal 22, and a heated and softened skin is placed between the core material 23 and a molding die 33 placed opposite to the pedestal 22. Material 4
2, a step of adsorbing the skin material 42 to the molding mold 33 by bringing the skin material 42 and the molding mold 33 into contact and applying vacuum suction, and a step of adsorbing the skin material 42 and the core material 23 to the molding mold 33. It consists of a step of sealing the space between the pedestal 22 and the skin material 42 in a state where they are not in contact with each other and creating a vacuum state in the sealed space between them, and a step of releasing the adsorption of the skin material 42 to the mold 33. It is a decoration method.

(作用) 本発明は、成形用型33と受け台22の芯材23との間
に表皮材42を配置し、加熱軟化されたこの表皮材42
を成形用型33に吸引して形状を作った後、芯材23と
表皮材42とを接触する手前まで近付け、表皮材42と
受け台22との間に設けられた密閉空間の空気を抜取り
、芯材23と表皮材42との間の空気をなくし、この芯
材23と表皮材42とを密着させることにより、芯材2
3と表皮材42との間への空気の巻込みをなくす。
(Function) In the present invention, a skin material 42 is arranged between the mold 33 and the core material 23 of the pedestal 22, and the skin material 42 is heated and softened.
After creating a shape by sucking it into the mold 33, the core material 23 and the skin material 42 are brought close to touching each other, and the air in the sealed space provided between the skin material 42 and the holder 22 is removed. By eliminating air between the core material 23 and the skin material 42 and bringing the core material 23 and the skin material 42 into close contact, the core material 2
3 and the skin material 42 is eliminated.

(実施例) 以下、本発明を図面に示される実施例を参照して詳細に
説明する。
(Examples) Hereinafter, the present invention will be described in detail with reference to examples shown in the drawings.

第1図に示されるように、下側の機枠11に支柱12を
介して上側の機枠13が一体に設けられている。
As shown in FIG. 1, an upper machine frame 13 is integrally provided with a lower machine frame 11 via a support 12. As shown in FIG.

下側の機枠11には、上下動用シリンダ21を介して受
け台22の下側部を構成するボックス22!が設けられ
、このボックス22!の上面に受け台22の上側部を構
成する下型22bがポーラス素材によって設けられ、こ
の下型22bの上面に芯材としてのソリッド基板23が
載置されている。この基板23は、金属板および樹脂板
のどちらでもよく、例えば自動車内装部品のピラーガー
ニッシュ等として使用されるものである。ボックス22
2の内空部24は、管路25中のバルブ26を経て真空
源に連通される。
A box 22 that constitutes the lower side of a cradle 22 is attached to the lower machine frame 11 via a vertical movement cylinder 21! is provided, and this box 22! A lower mold 22b constituting the upper side of the pedestal 22 is provided on the upper surface using a porous material, and a solid substrate 23 as a core material is placed on the upper surface of the lower mold 22b. This substrate 23 may be either a metal plate or a resin plate, and is used, for example, as a pillar garnish for automobile interior parts. box 22
The inner cavity 24 of 2 is communicated with a vacuum source via a valve 26 in a conduit 25.

さらに、ボックス22Mの上面部には下型22bのポー
ラス素材内孔を経て外部と通気可能の通気孔27が穿設
されている。
Further, a ventilation hole 27 is provided in the upper surface of the box 22M to allow ventilation to the outside through the inner hole of the porous material of the lower die 22b.

前記上側の機枠13には、上下動用シリンダ31を介し
て型枠32が設けられ、この型枠32の下部内に成形用
型としての上型33がポーラス素材によって設けられて
いる。型枠32の上部には内空部34が形成され、この
内空部34は管路35および切替バルブ36等を経て真
空源と空圧源とに選択的に連通される。さらに、内空部
34の下側には上型33のポーラス素材内孔を経て外部
と通気可能の通気孔37が穿設されている。
A mold 32 is provided on the upper machine frame 13 via a vertically moving cylinder 31, and an upper mold 33 as a molding mold is provided in the lower part of the mold 32 using a porous material. An inner space 34 is formed in the upper part of the formwork 32, and this inner space 34 is selectively communicated with a vacuum source and an air pressure source via a conduit 35, a switching valve 36, and the like. Further, a vent hole 37 is provided below the inner cavity 34 to allow ventilation to the outside through the inner hole of the porous material of the upper die 33.

また、前記下型22bと上型33との間には、保持台4
1が配置され、この保持台41の上面に表皮材としての
発泡層付シート材42が保持されている。
Further, between the lower mold 22b and the upper mold 33, a holding table 4 is provided.
1 is arranged, and a sheet material 42 with a foam layer as a skin material is held on the upper surface of this holding table 41.

このシート材42としては、pvc、発泡pvc。This sheet material 42 is made of PVC or foamed PVC.

PP、発泡PP、PE、ABS等の非通気性の樹脂、ま
たはこれらのシート材42の裏面に発泡層43を積層し
たものを使用する。この発泡層43はなくてもよい。ま
た、保持台41の下面には弾性シール材44が一体的に
嵌着されている。
Non-breathable resin such as PP, foamed PP, PE, ABS, etc., or a foamed layer 43 laminated on the back side of these sheet materials 42 is used. This foam layer 43 may be omitted. Further, an elastic sealing material 44 is integrally fitted to the lower surface of the holding base 41.

次に、第2図乃至第4図を参照して第1図に示された装
置による成形方法を説明する。
Next, a molding method using the apparatus shown in FIG. 1 will be explained with reference to FIGS. 2 to 4.

第2図に示されるように、加熱され軟化したシート材4
2に対し、上型33が上下動用シリンダ31により下降
し、保持台41との間でシート材42を挟んで固定した
後、内空部34を真空源に連通して上型33を真空にし
、シート材42を吸上げて上型33の形状に成形する。
As shown in FIG. 2, the heated and softened sheet material 4
In contrast to 2, the upper mold 33 is lowered by the vertical movement cylinder 31 and fixed with the sheet material 42 sandwiched between it and the holding table 41, and then the inner space 34 is communicated with a vacuum source to evacuate the upper mold 33. , the sheet material 42 is sucked up and molded into the shape of the upper die 33.

それから、第3図に示されるように、シート材42を真
空成形した上型33をそのままの真空状態に保ったまま
、表面に接着層を塗布した基板23を載せた下型22b
を上下動用シリンダ21により上昇させ、シート材42
の裏面と基板23とが接触する直前で上昇を止める。こ
のとき、下型22bとともに受け台22を構成するボッ
クス22aの上面が、シート材保持台41の下面に設け
られた弾性シール材44を圧縮し、この弾性シール材4
4とボックス22aと保持台41とシート材42とによ
って下型22bの周囲に密閉された空間(気密室)が形
成されるので、上型33の真空状態を維持しながら、内
空部24を真空源に連通してこの下型部分の気密室も真
空状態とする。そして、この真空中で下型22bをさら
に上昇させ、シート材42の裏面と基板23の上面とを
密着させ、介在する接着層により接着する。この場合、
シート材42と基板23とを、「膨れ」の要因となる空
気がない状態で密着できる。
Then, as shown in FIG. 3, while keeping the upper mold 33 in which the sheet material 42 has been vacuum-formed in the same vacuum state, the lower mold 22b on which the substrate 23 with the adhesive layer coated on the surface is placed is placed.
is raised by the vertical movement cylinder 21, and the sheet material 42
The rise is stopped immediately before the back surface of the substrate 23 comes into contact with the substrate 23. At this time, the upper surface of the box 22a that constitutes the pedestal 22 together with the lower die 22b compresses the elastic sealing material 44 provided on the lower surface of the sheet material holding pedestal 41, and this elastic sealing material 4
4, the box 22a, the holding table 41, and the sheet material 42 form a sealed space (airtight chamber) around the lower mold 22b. The airtight chamber of this lower mold part is also brought into a vacuum state by communicating with a vacuum source. Then, the lower mold 22b is further raised in this vacuum, and the back surface of the sheet material 42 and the upper surface of the substrate 23 are brought into close contact with each other and bonded by the intervening adhesive layer. in this case,
The sheet material 42 and the substrate 23 can be brought into close contact with each other without air being a cause of "bulge".

さらに、第4図に示されるように、上型33の真空状態
を切替バルブ36により加圧状態に切替え、空圧により
シート材42の基板23への密着を高めるとともに、上
型33からの離型を図る。この加圧切替と、基板23よ
りもやや小さい下型22bの形状とにより、f型22b
より突出した基板23の周縁部の裏側へ容易にシート材
42を巻込むことが可能である。また、上記のように積
極的に加圧状態とせずに、大気圧状態に戻すだけでもよ
い。
Furthermore, as shown in FIG. 4, the vacuum state of the upper mold 33 is switched to a pressurized state by the switching valve 36, and the air pressure increases the adhesion of the sheet material 42 to the substrate 23, and also separates it from the upper mold 33. Plan the pattern. Due to this pressure switching and the shape of the lower die 22b that is slightly smaller than the substrate 23, the f-type 22b
It is possible to easily wind the sheet material 42 onto the back side of the more protruding peripheral edge of the substrate 23. Further, instead of actively pressurizing as described above, it is sufficient to simply return to the atmospheric pressure state.

以上の実施例は本発明の一例を示すもので、本発明はこ
の実施例に限定されるものでないことは言うまでもない
。以下に、図示された実施例と異なる変形例を説明する
It goes without saying that the above embodiments show only examples of the present invention, and that the present invention is not limited to these embodiments. Modifications different from the illustrated embodiment will be described below.

図示実施例では、上型33および下型22bを上下動す
るようにしたが、上型33を定位置に固定し、保持台4
1を上下動自在に設け、この保持台41と上型33との
間でシート材42を挟む構造としてもよいし、さらには
、下型22bを固定し、上型33および保持台41を上
下動自在に設けることで、上型33が下降してシート成
形を行った後に、この上型33と共に保持台41を下型
方向に下げることにより同様な効果を得ることが可能で
ある。
In the illustrated embodiment, the upper mold 33 and the lower mold 22b are moved up and down, but the upper mold 33 is fixed at a fixed position and the holding base 4
1 can be moved up and down, and the sheet material 42 can be sandwiched between the holding stand 41 and the upper mold 33. Alternatively, the lower mold 22b can be fixed and the upper mold 33 and the holding stand 41 can be moved up and down. By providing it movably, the same effect can be obtained by lowering the holding table 41 together with the upper mold 33 toward the lower mold after the upper mold 33 has been lowered to form a sheet.

また、上型33内に加熱手段を埋設して、シート材42
の冷却を防止するようにしてもよい。
In addition, a heating means is embedded in the upper mold 33 and the sheet material 42 is
It may also be possible to prevent the cooling of the

さらに、下型22bおよび上型33は、ポーラス素材だ
けでなく、多数の通気穴を設けたソリッド素材でもよい
Furthermore, the lower mold 22b and the upper mold 33 may be made of not only a porous material but also a solid material provided with a large number of ventilation holes.

下型のボックス22a も、切替バルブを介し真空源と
空圧源とに選択的に連通できるようにしてもよい。その
場合、第3図に示されるように下型22bを上昇して、
この下型22bの周囲の気密室を真空状態とする前に、
−時的に内空部24を空圧源に連通して下型22bの周
囲空間を加圧状態とし、シート材42を上型33に押付
けることにより、上型33に設けられたシボ等をシート
材42に写し取るようにしてもよい。
The lower mold box 22a may also be configured to be able to selectively communicate with a vacuum source and an air pressure source via a switching valve. In that case, the lower mold 22b is raised as shown in FIG.
Before making the airtight chamber around the lower mold 22b into a vacuum state,
- By temporarily communicating the inner space 24 with an air pressure source to pressurize the space around the lower mold 22b and pressing the sheet material 42 against the upper mold 33, the grains etc. provided on the upper mold 33 can be removed. may be copied onto the sheet material 42.

最後に、シート材42は、上型33と対向する位置の保
持台41上で保持するだけでなく、上型33から独立し
たシート保持機構によって保持するようにしてもよい。
Finally, the sheet material 42 may not only be held on the holding base 41 at a position facing the upper die 33, but may also be held by a sheet holding mechanism independent from the upper die 33.

〔発明の効果〕〔Effect of the invention〕

以上のように、本発明によれば、表皮材と芯材とを接し
ない状態で受け台と表皮材との間の空間を密閉して、そ
の間の密閉空間を真空状態とするようにしたから、ソリ
ッドタイプの芯材に表皮材を被覆する場合であっても、
芯材に通気穴を設けることなく、芯材と表皮材との間へ
の空気巻込を防止できる。さらに、芯材の表面に凹凸が
あっても、芯材と表皮材とを真空状態で密着させるため
、芯材の表面形状そのままに表皮材を密着できる。また
、芯材の縁部裏面へも表皮材をたやすく巻込むことがで
きる。
As described above, according to the present invention, the space between the pedestal and the skin material is sealed without the skin material and the core material being in contact with each other, and the sealed space therebetween is made into a vacuum state. , even when covering a solid type core material with a skin material,
Air entrainment between the core material and the skin material can be prevented without providing ventilation holes in the core material. Furthermore, even if the surface of the core material is uneven, since the core material and the skin material are brought into close contact with each other in a vacuum state, the skin material can be brought into close contact with the surface shape of the core material. Further, the skin material can be easily wrapped around the back side of the edge of the core material.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の成形品加飾方法に使用される装置の断
面図、第2図、第3図および第4図はその方法の手順を
示す断面図である。 22・・受け台、23・・芯材としての基板、33・成
形用型としての上型、412・・表皮材としてのシート
材。 」−口」
FIG. 1 is a cross-sectional view of an apparatus used in the molded product decorating method of the present invention, and FIGS. 2, 3, and 4 are cross-sectional views showing the steps of the method. 22... cradle, 23... substrate as a core material, 33. upper die as a mold for molding, 412... sheet material as a skin material. ”-mouth”

Claims (1)

【特許請求の範囲】[Claims] (1)芯材の表面に接着層を介して表皮材を貼着する成
形品の加飾方法において、 受け台に芯材をセットし、受け台に対向して配置された
成形用型と芯材との間に加熱軟化された表皮材を張設す
る工程と、 表皮材と成形用型とを接触させて真空吸引することによ
り、成形用型に表皮材を吸着する工程と、 表皮材と芯材とを接しない状態で受け台と表皮材との間
の空間を密閉して、その間の密閉空間を真空状態とする
工程と、 成形用型に対する表皮材の吸着を解除する工程と からなることを特徴とする成形品の加飾方法。
(1) In a method for decorating molded products in which a skin material is attached to the surface of a core material via an adhesive layer, the core material is set on a pedestal, and a mold and core are placed opposite the pedestal. a step of stretching a heat-softened skin material between the skin material and the mold, a step of adsorbing the skin material to the mold by bringing the skin material into contact with the mold and applying vacuum suction; The process consists of a process of sealing the space between the pedestal and the skin material without contacting the core material, and creating a vacuum state in the sealed space between them, and a process of releasing the adsorption of the skin material to the mold. A method for decorating a molded product characterized by:
JP2088656A 1990-04-03 1990-04-03 Method of decorating molded object Pending JPH03286835A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2088656A JPH03286835A (en) 1990-04-03 1990-04-03 Method of decorating molded object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2088656A JPH03286835A (en) 1990-04-03 1990-04-03 Method of decorating molded object

Publications (1)

Publication Number Publication Date
JPH03286835A true JPH03286835A (en) 1991-12-17

Family

ID=13948867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2088656A Pending JPH03286835A (en) 1990-04-03 1990-04-03 Method of decorating molded object

Country Status (1)

Country Link
JP (1) JPH03286835A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995020838A1 (en) * 1994-01-31 1995-08-03 Applied Materials, Inc. Electrostatic chuck with conformal insulator film
US5729423A (en) * 1994-01-31 1998-03-17 Applied Materials, Inc. Puncture resistant electrostatic chuck
US5801915A (en) * 1994-01-31 1998-09-01 Applied Materials, Inc. Electrostatic chuck having a unidirectionally conducting coupler layer
US6278600B1 (en) 1994-01-31 2001-08-21 Applied Materials, Inc. Electrostatic chuck with improved temperature control and puncture resistance
US6598559B1 (en) 2000-03-24 2003-07-29 Applied Materials, Inc. Temperature controlled chamber
JP2012218231A (en) * 2011-04-06 2012-11-12 Toyota Motor East Japan Inc Method for manufacturing product with skin material
JP2018069651A (en) * 2016-11-01 2018-05-10 株式会社イノアックコーポレーション Production method of interior material for vehicle

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995020838A1 (en) * 1994-01-31 1995-08-03 Applied Materials, Inc. Electrostatic chuck with conformal insulator film
US5729423A (en) * 1994-01-31 1998-03-17 Applied Materials, Inc. Puncture resistant electrostatic chuck
US5745331A (en) * 1994-01-31 1998-04-28 Applied Materials, Inc. Electrostatic chuck with conformal insulator film
US5753132A (en) * 1994-01-31 1998-05-19 Applied Materials, Inc. Method of making electrostatic chuck with conformal insulator film
US5801915A (en) * 1994-01-31 1998-09-01 Applied Materials, Inc. Electrostatic chuck having a unidirectionally conducting coupler layer
US5986875A (en) * 1994-01-31 1999-11-16 Applied Materials, Inc. Puncture resistant electrostatic chuck
US6278600B1 (en) 1994-01-31 2001-08-21 Applied Materials, Inc. Electrostatic chuck with improved temperature control and puncture resistance
US6598559B1 (en) 2000-03-24 2003-07-29 Applied Materials, Inc. Temperature controlled chamber
JP2012218231A (en) * 2011-04-06 2012-11-12 Toyota Motor East Japan Inc Method for manufacturing product with skin material
JP2018069651A (en) * 2016-11-01 2018-05-10 株式会社イノアックコーポレーション Production method of interior material for vehicle

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