JPH03191849A - Surface-defect inspecting apparatus - Google Patents

Abstract

PURPOSE:To shorten the time of inspection and to make it possible to control the result of inspection accurately by detecting the recognition of identification characters and the presence or absence of defects at the same time based on the components from an identification character region and divided components other than the character region. CONSTITUTION:A work 5 on a rotary mounting stage 3 is continuously scanned with laser light 17 from a scanning part 1 starting from the center of the work toward the outer surface. The mounting stage 3 is rotated at a specified angular speed, and the entire surface of the work 5 is scanned in one rotation. In the reflected light in this scanning, the component of an identification character region 16 and the component of a surface-defect inspecting region 19 are included. A dividing part 7 divides the components. The recognition of identification characters and the inspection of the state of surface defects are performed at the approximately same time in a character-data processing part 9 and a surface-data processing part 11. Thereafter, the images as the results of the respective processings are processed in a control computer 13. The data wherein correspondence of 1:1 is obtained are transmitted into an upper computer 15 with the identification-character recognition data as an index.

Description

Detailed Description of the Invention [Objective of the Invention] (Industrial Field of Application) The present invention is directed to an inspection method for detecting an image on the surface of an object to be inspected, such as an optical disk, which has an identification character area in which characters for identification are written. The present invention relates to a surface defect inspection device that inspects defect conditions.

(Prior Art) In the surface defect inspection of an object to be inspected, such as an optical disk, which has an identification character area in which characters for identification are written, the surface inspection is of course carried out using identification for tracking and management of inspection data. It is also necessary to identify characters. For this reason, conventionally, a system configuration as shown in FIG. 3 has been used. That is, with this system configuration,
Character reading station 101 for recognizing identification characters
and a surface defect detection station 103 for performing defect inspection. The character reading station 101 extracts the workpiece [07] to be inspected from the storage cassette 105 and reads the printed identification characters 109 onto the illumination lamp 11.
1 and a CCD camera 113, this data is recognized by a character data processing section 115, and the data is transmitted to a host computer 117. Further, the surface defect detection station 103 places the workpiece 107 after character recognition on a rotary stage 119, and the surface defect detection unit 12
A surface defect data processing unit 125 detects the presence or absence of defects based on the reflected light of the laser beam 123 and transmits the data to the host computer 117. Then, in the host computer 117, the individually transmitted identification character data and defect detection data are stored in a state in which they are associated with the identification characters, in other words, the defect detection data is stored for each workpiece. It does the processing.

(Problems to be Solved by the Invention) However, in the system configuration described above, reading of identification characters and surface defect inspection are performed separately, which takes a long processing time, and also causes tracking errors in surface defect inspection data for each workpiece. may occur. Furthermore, since the workpiece is moved by the conveyance device many times, scratches are likely to occur.

The present invention has been made in view of the above, and an object of the present invention is to provide a surface defect inspection apparatus that can shorten inspection processing time and accurately manage inspection results.

[Structure of the Invention] (Means for Solving the Problems) In order to achieve the above object, the present invention provides an apparatus for inspecting defect status on the surface of an inspected object having an identification character area in which characters for identification are written. The invention comprises a scanning means for scanning the surface of the object to be inspected with a laser beam and detecting the reflected light, and a dividing means for dividing the detected reflected light into a component from the identification character area and a component other than the identification character area. The object of the present invention is to recognize the identification character and detect the presence/absence of a defect using each of the components, and to output the defect status in correspondence with the recognized identification character.

(Function) In the surface defect inspection device according to the present invention, a laser beam is scanned over the surface of an object to be inspected having an identification character area in which characters for identification are written, and the reflected light is detected from the identification character area. It is divided into components and other components, and each divided component is used to simultaneously recognize the identification character and detect the presence or absence of a defect, and output the defect status in correspondence with the recognized identification character. ing.

(Example) Hereinafter, the present invention will be explained in detail using the drawings.

FIG. 1 is a diagram showing the configuration of a surface defect inspection apparatus according to an embodiment of the present invention. In Fig. 1, 1 is a rotating stage 3.
This is a scanning section that scans the upper workpiece 5 with a laser beam 17 and detects the reflected light.

7 shows the workpiece 5 regarding the reflected light signal from the scanning section 1.
is divided into identification character area components and non-identification character area components, and outputs the former to a character data processing section 9 for recognizing identification characters, and outputs the latter to a surface defect data processing section 11 for detecting surface defect conditions. This is the division section to output. Also,
13 is a control computer that performs necessary image processing based on the processing results from the character data processing section 9 and the surface defect data processing section 11; 15 is a control computer that receives the results from the control computer 13 and records the surface defect status of the inspected workpiece; This is a host computer that performs processing, etc.

Next, the operation of this embodiment will be explained. Here, a case will be described in which the work 5 is a disk-shaped object, such as an optical disk, which has an identification character area 16 on its inner periphery as shown in FIG.

The scanning unit 1 continuously scans the workpiece 5 on the rotating stage 3 with a laser beam 17 from the center 0 toward the outer circumference as shown in FIG. On the other hand, since the rotary stage 3 rotates at a predetermined angular velocity, the entire surface of the tool 25 can be scanned in one rotation. The reflected light in such scanning includes a component of the identification character area 16 and a component other than the identification character area 16.
That is, it includes the components of the surface defect inspection area 19.

However, since it is known that the identification character area 16 exists at a predetermined position on the inner circumference of the workpiece 5, when the laser beam 17 is continuously scanned from the workpiece center 0 toward the outer circumference as described above, each scan The reflected light component in the initial scanning area 21 is from the identification character area 16, and the reflected light component in the subsequent scanning area 23 can be divided by 17 from that from the surface defect inspection area 19.

For this reason, the dividing section 7 divides the reflected light signal from the scanning section] and outputs the respective components to the character data processing section 9 and the surface defect data processing section 11.

The character data processing unit 9 and the surface defect data processing unit 11 perform recognition processing for identification characters and processing for inspecting surface defect conditions, respectively, using the reflected light components supplied with lj. Both processes are performed substantially simultaneously.

Thereafter, the respective processing results are output to the control 3i calculator 13, where various image processing is performed. At this time, the surface defect inspection data and the identification character recognition data have a one-to-one correspondence. At the end of various processes, the data is transmitted to the upper-level computer 15 using the identification character recognition data as an index.

Therefore, according to this embodiment, since the identification characters can be identified at the same time as the surface defect inspection of the workpiece, the processing time can be shortened compared to the conventional method, and the occurrence of defects on the workpiece due to transportation can be prevented. Using the characters as an index,
Inspection data can be tracked and managed.

In this example, the workpiece is described as being disk-shaped, but the workpiece is not limited to this as long as the area in which the identification characters are written is determined in advance. There may be.

[Effects of the Invention] As explained below, according to the present invention, a laser beam is scanned over the surface of an object to be inspected having an identification character area in which characters for identification are written, and the reflected light is used to scan the identification character area. and other components, and each divided component is used to simultaneously recognize the identification character and detect the presence or absence of a defect, and output the defect status in correspondence with the recognized identification character. Therefore, the inspection processing time can be shortened and inspection results can be managed accurately.

[Brief explanation of drawings]

FIG. 1 is a diagram showing the configuration of an embodiment of the present invention, FIG. 2 is a diagram for explaining the operation of the embodiment, and FIG. 3 is a diagram showing a conventional example. 1.Scanning section '3...Rotary stage 5...Work 7.Dividing section 9..Character data processing section 11 Surface defect data processing section 13..Control computer 15...L rank = 1 computer 16 ...Identification character area 17・One laser beam・Surface defect inspection area 21...Initial scanning area 23...Scanning area

Claims (1)

[Claims] In an apparatus for inspecting a defect situation on the surface of an object to be inspected having an identification character area in which characters for identification are written, a scanning means for scanning a laser beam on the surface of the object to be inspected and detecting reflected light; A dividing means divides the reflected light into components from the identification character area and other components, and each divided component is used to recognize the identification character and detect the presence or absence of defects. 1. A surface defect inspection device comprising: processing means for outputting defect status in correspondence with each other.