JPH03113337A - Accelerometer integrated type pressure sensor - Google Patents
Accelerometer integrated type pressure sensorInfo
- Publication number
- JPH03113337A JPH03113337A JP25260289A JP25260289A JPH03113337A JP H03113337 A JPH03113337 A JP H03113337A JP 25260289 A JP25260289 A JP 25260289A JP 25260289 A JP25260289 A JP 25260289A JP H03113337 A JPH03113337 A JP H03113337A
- Authority
- JP
- Japan
- Prior art keywords
- cantilever
- diaphragm
- gauge
- pressure sensor
- acceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims abstract description 29
- 230000001133 acceleration Effects 0.000 claims abstract description 21
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000003921 oil Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、測定する圧力が作用するダイアフラムの変位
を圧力検出用ゲージで検出する圧力センサに関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a pressure sensor that uses a pressure detection gauge to detect displacement of a diaphragm on which a pressure to be measured acts.
（従来の技術）
従来の圧力センサにおいて、温度センサのついているも
のはあったが、加速度センサがついているものはなかっ
た。(Prior Art) Some conventional pressure sensors have a temperature sensor, but none have an acceleration sensor.
（発明が解決しようとする課題）
しかし、パイプラインには地震検知用などの為に、加速
度検出計が取り付けられることがある。(Problem to be Solved by the Invention) However, an acceleration detector is sometimes attached to a pipeline for purposes such as earthquake detection.
本発明は上記問題点に鑑みてなされたもので、その目的
は、圧力センサに加速度計を設け、別途取り付けていた
加速度計を不要にする加速度計−体形圧力センサを提供
することにある。The present invention has been made in view of the above-mentioned problems, and its object is to provide an accelerometer-body-shaped pressure sensor that includes an accelerometer in the pressure sensor and eliminates the need for a separately attached accelerometer.
（課題を解決するための手段）
上記課題を解決する本発明は、測定する圧力が作用する
ダイアフラムの変位を圧力検出用ゲージで検出する圧力
センサにおいて、前記ダイアフラムに連設されたカンチ
レバーと、該カンチレバーの固定端部に設けられた加速
度検出用ゲージとを設け、圧力センサに作用する加速度
と振動数とを検出するものである。(Means for Solving the Problems) The present invention solves the above problems in a pressure sensor that uses a pressure detection gauge to detect the displacement of a diaphragm on which a pressure to be measured acts. An acceleration detection gauge provided at the fixed end of the cantilever is provided to detect the acceleration and vibration frequency acting on the pressure sensor.
（作用）
本発明の加速度計一体形圧力センサにおいて、ダイアフ
ラムに作用する測定しようとする圧力は圧力検出用ゲー
ジにて、測定される。(Function) In the accelerometer-integrated pressure sensor of the present invention, the pressure to be measured acting on the diaphragm is measured by a pressure detection gauge.
次に、本体に作用する加速度とその振動数は、ダイアフ
ラムに連設されたカンチレバーの固定端に設けられた加
速度検出用ゲージによって、検出される。）
（実施例）
次に図面を用いて本発明の一実施例を説明する。Next, the acceleration acting on the main body and its frequency are detected by an acceleration detection gauge provided at the fixed end of the cantilever connected to the diaphragm. ) (Example) Next, an example of the present invention will be described using the drawings.
第１図は本発明の一実施例を説明する斜視図、第２図は
第１図における断面図、第３図は第１図における上面図
、第４図は周波数と振動力との関係を説明する図、第５
図は本実施例の加速度検出用ゲージの出力と時間との関
係を説明する図、第６図は他の実施例を説明する要部断
面図、第７図は更に他の実施例を説明する断面図である
。FIG. 1 is a perspective view illustrating an embodiment of the present invention, FIG. 2 is a cross-sectional view of FIG. 1, FIG. 3 is a top view of FIG. 1, and FIG. 4 shows the relationship between frequency and vibration force. Diagram to explain, 5th
The figure is a diagram explaining the relationship between the output of the acceleration detection gauge of this embodiment and time, FIG. 6 is a cross-sectional view of a main part explaining another embodiment, and FIG. 7 is a diagram explaining still another embodiment. FIG.
第１図乃至第３図において、１はガラスベース、２はガ
ラスベース１上に例えば陽極接合されたシリコン（Ｓｌ
）で作られた検出部材である。この検出部材は異方性エ
ツチングにより形成されたダイアフラム部３と、ダイア
フラム部３に連設されるカンチレバ一部４とから構成さ
れている。また、ガラスベース１にはダイアフラム部３
の裏面側に基準圧力を導入する基準圧導入口１ａが設け
られている。In FIGS. 1 to 3, 1 is a glass base, 2 is a silicon (Sil) bonded to the glass base 1, for example.
) is a detection member made of This detection member is composed of a diaphragm part 3 formed by anisotropic etching and a cantilever part 4 connected to the diaphragm part 3. In addition, the glass base 1 has a diaphragm section 3.
A reference pressure introduction port 1a for introducing reference pressure is provided on the back side of the.
また、カンチレバ一部４の自由端部（先端部）４ａには
、振幅が大きくなるように、おもり５が低融点ガラス等
を介して接合されている。更に、ガラスベース１のカン
チレバ一対向面にはカンチレバ一部４の自由端部４ａが
自由振動可能なように段差１ｂが形成されている。Further, a weight 5 is bonded to the free end portion (tip portion) 4a of the cantilever portion 4 via a low melting point glass or the like so as to increase the amplitude. Furthermore, a step 1b is formed on the surface of the glass base 1 facing the cantilever so that the free end 4a of the cantilever part 4 can freely vibrate.
一方、検出部材２のダイアフラム部３の表面には、ピエ
ゾ抵抗素子の圧力検出用ゲージ６が、検出部材２のカン
チレバ一部４の固定部４ｂの表面には、ピエゾ抵抗素子
の加速度検出用ゲージ（せン新形ゲージ）７が同じウェ
ハプロセスで設けられている。加速度検出用ゲージ７を
固定端部４ｂに設けた理由は、カンチレバ一部４の振動
による応力が最大となる位置であるからである。On the other hand, a pressure detection gauge 6 of a piezoresistive element is mounted on the surface of the diaphragm part 3 of the detection member 2, and an acceleration detection gauge 6 of the piezoresistive element is mounted on the surface of the fixed part 4b of the cantilever part 4 of the detection member 2. (new type gauge) 7 is provided in the same wafer process. The reason why the acceleration detection gauge 7 is provided at the fixed end 4b is that this is the position where the stress due to vibration of the cantilever part 4 is maximum.
次に、上記構成の作動を説明する。検出部材２の幅をす
１段さ１ｂの深さをｄ、カンチレバ一部４の長さを１．
カンチレバ一部４の厚さをｔ、おもりの質量をＷとする
（第２図及び第３図参照）。Next, the operation of the above configuration will be explained. The width of the detection member 2 is d, the depth of one step 1b is d, and the length of the cantilever part 4 is 1.
Let the thickness of the cantilever part 4 be t, and the mass of the weight be W (see FIGS. 2 and 3).
圧力検出は従来の公知の圧力センサと同じなのでその説
明は省略する。Since pressure detection is the same as that of a conventional well-known pressure sensor, its explanation will be omitted.
第２図において、カンチレバ一部４の固有振動数ｒｎは
、
ｆｎ＝Ａ／（２π） ・（１／ ｊ！ ’ ） Ｆ１１
フ「−（１）で表せ、周波数ｆｎに対する振動力Ｓは第
４図に示すようなり、振動力Ｓは第４図に示すようにな
る。In Fig. 2, the natural frequency rn of the cantilever part 4 is fn=A/(2π) ・(1/ j! ') F11
The vibration force S with respect to the frequency fn is as shown in FIG. 4, and the vibration force S is as shown in FIG.
ただし、Ｅ；ヤング率（Ｋｇｆ’／ ｌｌｌｍ２）１：
断面２次モーメント（龍４）
２；重力加速度（龍／５２）
Ｓ、 ：（αｖ） ／ｇ
α：加速度
Ａ；定数
第４図に示すように、ｒ ＜ （２／３）ｒｎの範囲で
は、Ｓ＝ Ｓ。−αｖ／ｇ
であり、この振動力Ｓがカンチレバ一部４の自由端部４
ａに作用する。However, E; Young's modulus (Kgf'/llm2) 1:
Second moment of area (Ryu 4) 2; Gravitational acceleration (Ryu/52) S, : (αv) /g α: Acceleration A; constant As shown in Figure 4, in the range r < (2/3) rn , S=S. −αv/g, and this vibration force S is applied to the free end 4 of the cantilever part 4.
It acts on a.
振動力Ｓにより、カンチレバ一部４の固定端部４ｂでは
、振動力Ｓによる曲げモーメントＸによる応力σが発生
し、加速度検出用ゲージ７には応力σに比例する電気信
号が発生する。Due to the vibration force S, a stress σ due to the bending moment X caused by the vibration force S is generated at the fixed end portion 4b of the cantilever part 4, and an electric signal proportional to the stress σ is generated in the acceleration detection gauge 7.
Ｍ−ｊ）−８−ｊ）αｖ／ｇ
ａ ＝Ｍ／Ｉ ・ｔ／２−（ｔＮ Ｖ）バ２１ｇ）・ａ
−（２）この応力σの検出は、本実施例においては
、せん新形ゲージで検出している。せん新形ゲージの重
力Ｖは、せん断力をτとすると、
Ｖ−τ■σ工α
となる。M-j)-8-j) αv/ga = M/I ・t/2-(tN V) 21g)・a
-(2) In this embodiment, this stress σ is detected using a new type gauge. The gravity V of the new shear gauge is expressed as: V-τ■σ-α, where τ is the shear force.
周波数ｒ、小出力は、第５図に示すように振動波形で、
サインカーブに近似しており、電気回路でそのピークを
検出することで、加速度αの大きさを検出することがで
き、また、この振動波形の周波数を検出することで、圧
力センサに作用する周波数「を知ることができる。The frequency r and small output are vibration waveforms as shown in Figure 5.
It approximates a sine curve, and by detecting its peak with an electric circuit, the magnitude of acceleration α can be detected. Also, by detecting the frequency of this vibration waveform, the frequency acting on the pressure sensor can be determined. ``You can know.
そして、本実施例の加速度計一体形圧力センサの感度を
上げるためには（２）式より、次式を得る。In order to increase the sensitivity of the accelerometer-integrated pressure sensor of this embodiment, the following equation is obtained from equation (2).
！−ｂｔ３ ／１２より、
σ・（６ｊＷ） ／ （ｂｔ２ｇ ） α ・・
・（３）ここで、ｂ＝５ ｍｍ、ｔ−０，０２ｎ＋＋ｅ
、ｌ＝５ｍｍ、ｗ−１ｇ−１０−’ｋｇとすると、
σ≠（６・５・ｌ・１０−３）／ （５・０．０２２）
・（α／ｇ）≠１５０ （Ｇ−α／ｇ）
この場合、検出に必要な最小応力はσ！８；０．０２ｋ
ｇ１ＩＩ１１２であり、σの許容値は約２０Ｋｇ／ｍｍ
’なので、加速度の測定範囲は０．００２Ｇ〜１．３Ｇ
程度となる。! -bt3 /12, σ・(6jW) / (bt2g) α・・
・(3) Here, b=5 mm, t-0,02n++e
, l=5mm, w-1g-10-'kg, σ≠(6・5・l・10−3)/ (5・0.022)
・(α/g)≠150 (G-α/g) In this case, the minimum stress required for detection is σ! 8;0.02k
g1II112, and the allowable value of σ is approximately 20Kg/mm
' Therefore, the acceleration measurement range is 0.002G to 1.3G
It will be about.
また、ｔ−０、０２ｍｍ 、おもり５を設けずに、自由
端部（先端部）の自重のみとし、ａ＝ｌ ｕ、ｃ−０，
５ｍ＋＊とし、自由端部の自重Ｖ′、比重量を２．４
Ｘｌ０−６とすると、
ｖ ’ ＃ｌＸ０．５Ｘ５Ｘ２．４ＸＩＯ−６となり、
σ’＝；０．０９Ｇ
てあり、測定範囲は０．２〜２００Ｇ程度となる。Also, t-0, 02mm, without providing the weight 5, only the free end (tip)'s own weight, a=lu, c-0,
5m+*, the free end's own weight V', and the specific weight are 2.4
When Xl0-6, v'#lX0.5X5X2.4XIO-6,σ'=;0.09G, and the measurement range is about 0.2 to 200G.
上記構成によれば、圧力センサに加速度計を設けたこと
により、別途加速度計を取り付けることが不要となる。According to the above configuration, since the pressure sensor is provided with an accelerometer, it becomes unnecessary to separately attach an accelerometer.
なお、本発明は上記実施例に限定するものでない。例え
ば、第６図に示すように、過大加速度によるカンチレバ
一部４の破損を防止するために、カンチレバ一部４の上
部にガラス等のストッパ１１を陽極接合等を用いて、取
り付けてもよい。Note that the present invention is not limited to the above embodiments. For example, as shown in FIG. 6, in order to prevent damage to the cantilever part 4 due to excessive acceleration, a stopper 11 made of glass or the like may be attached to the upper part of the cantilever part 4 using anodic bonding or the like.
また、ぜん新形ゲージでなく、ブリッジ構成した通常形
ゲージでもよい。Moreover, instead of a completely new type of gauge, a normal type gauge with a bridge configuration may be used.
そして、Ｓｉチップ上に回路をゲージと共に形成した所
謂集積形センサとしてもよい。It may also be a so-called integrated sensor in which a circuit is formed together with a gauge on a Si chip.
更に、第７図に示すように、オイル中等におかれる場合
は、オイルの粘性による振動の減衰を防止するために、
検出部材２上に測定圧導入口１２ａが穿設された測定圧
導入プレート１２を設け、被測定液体であるオイルがダ
イアフラム部３のみに作用する様にしてもよい。Furthermore, as shown in Figure 7, when placed in oil, etc., in order to prevent vibration damping due to the viscosity of the oil,
A measurement pressure introduction plate 12 having a measurement pressure introduction port 12a formed therein may be provided on the detection member 2 so that oil, which is the liquid to be measured, acts only on the diaphragm portion 3.
（発明の効果）
以上述べたように本発明によれば、圧力センサに加速度
計を設けたことにより、別途取り付けが必要な加速度計
の取り付けを不要にする加速度計一体形圧力センサを実
現できる。(Effects of the Invention) As described above, according to the present invention, by providing the pressure sensor with an accelerometer, it is possible to realize an accelerometer-integrated pressure sensor that eliminates the need to attach an accelerometer that requires separate attachment.
第１図は本発明の一実施例を説明する斜視図、第２図は
第１図における断面図、
第３図は第１図における上面図、
第４図は周波数と振動力との関係を説明する図、第５図
は本実施例の加速度検出用ゲージの出方と時間との関係
を説明する図
第６図は他の実施例を説明する要部断面図、第７図は更
に他の実施例を説明する断面図である。
これらの図において、
１・・・ガラスベース ２・・・検出部材３・・・
ダイアフラム部
４・・・カンチレバ一部 ４ａ・・・自由端部４ｂ・
・・固定端部 ５・・・おもり６・・・圧力検
出用ゲージ
７・・・加速度検出用ゲージ
１１・・・ストッパ
１２・・・測定圧導入プレートFig. 1 is a perspective view illustrating an embodiment of the present invention, Fig. 2 is a sectional view of Fig. 1, Fig. 3 is a top view of Fig. 1, and Fig. 4 shows the relationship between frequency and vibration force. FIG. 5 is a diagram for explaining the relationship between the appearance of the acceleration detection gauge and time in this embodiment. FIG. 6 is a cross-sectional view of main parts for explaining another embodiment, and FIG. 7 is a diagram for explaining another embodiment. It is a sectional view explaining an example. In these figures, 1...Glass base 2...Detection member 3...
Diaphragm part 4... Cantilever part 4a... Free end part 4b.
・Fixed end 5 ・Weight 6 ・Pressure detection gauge 7 ・Acceleration detection gauge 11 ・Stopper 12 ・Measurement pressure introduction plate
Claims (1)
力検出用ゲージ（６）で検出する圧力センサにおいて、 前記ダイアフラム（３）に連設されたカンチレバー（４
）と、 該カンチレバー（４）の固定端部（４ｂ）に設けられた
加速度検出用ゲージ（７）とを設け、圧力センサに作用
する加速度と振動数とを検出することを特徴とする加速
度計一体形圧力センサ。[Claims] A pressure sensor that detects the displacement of a diaphragm (3) on which a pressure to be measured acts, using a pressure detection gauge (6), comprising: a cantilever (4) connected to the diaphragm (3);
), and an acceleration detection gauge (7) provided on the fixed end (4b) of the cantilever (4), and detects the acceleration and vibration frequency acting on the pressure sensor. Integrated pressure sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25260289A JPH03113337A (en) | 1989-09-28 | 1989-09-28 | Accelerometer integrated type pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25260289A JPH03113337A (en) | 1989-09-28 | 1989-09-28 | Accelerometer integrated type pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03113337A true JPH03113337A (en) | 1991-05-14 |
Family
ID=17239649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25260289A Pending JPH03113337A (en) | 1989-09-28 | 1989-09-28 | Accelerometer integrated type pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03113337A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001215160A (en) * | 2000-02-01 | 2001-08-10 | Nagano Keiki Co Ltd | Dynamic physical quantity converter |
| JP2002532721A (en) * | 1998-12-11 | 2002-10-02 | サゲム ソシエテ アノニム | Tire acceleration detector in powered vehicles |
| JP2007114205A (en) * | 2006-11-06 | 2007-05-10 | Hitachi Ltd | Tire-monitoring sensor |
| JP2007178385A (en) * | 2005-12-28 | 2007-07-12 | Kyocera Kinseki Corp | Composite sensor |
| US7647832B2 (en) * | 2005-11-22 | 2010-01-19 | Robert Bosch Gmbh | Micromechanical device and method for producing a micromechanical device |
| US8384316B2 (en) | 2005-06-27 | 2013-02-26 | Coactive Drive Corporation | Synchronized vibration device for haptic feedback |
| US8981682B2 (en) | 2005-06-27 | 2015-03-17 | Coactive Drive Corporation | Asymmetric and general vibration waveforms from multiple synchronized vibration actuators |
| US9459632B2 (en) | 2005-06-27 | 2016-10-04 | Coactive Drive Corporation | Synchronized array of vibration actuators in a network topology |
| US9764357B2 (en) | 2005-06-27 | 2017-09-19 | General Vibration Corporation | Synchronized array of vibration actuators in an integrated module |
| CN110068418A (en) * | 2019-03-21 | 2019-07-30 | 慧石（上海）测控科技有限公司 | A kind of pressure that can be worked in vibration environment and acceleration Multifunction Sensor |
| US11203041B2 (en) | 2005-06-27 | 2021-12-21 | General Vibration Corporation | Haptic game controller with dual linear vibration actuators |
-
1989
- 1989-09-28 JP JP25260289A patent/JPH03113337A/en active Pending
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002532721A (en) * | 1998-12-11 | 2002-10-02 | サゲム ソシエテ アノニム | Tire acceleration detector in powered vehicles |
| JP2001215160A (en) * | 2000-02-01 | 2001-08-10 | Nagano Keiki Co Ltd | Dynamic physical quantity converter |
| US10507493B2 (en) | 2005-06-27 | 2019-12-17 | General Vibration Corporation | Synchronized array of vibration actuators in an integrated module |
| US9764357B2 (en) | 2005-06-27 | 2017-09-19 | General Vibration Corporation | Synchronized array of vibration actuators in an integrated module |
| US11707765B2 (en) | 2005-06-27 | 2023-07-25 | Sony Interactive Entertainment LLC | Game controller with vibration accuators |
| US8384316B2 (en) | 2005-06-27 | 2013-02-26 | Coactive Drive Corporation | Synchronized vibration device for haptic feedback |
| US8390218B2 (en) | 2005-06-27 | 2013-03-05 | Coactive Drive Corporation | Synchronized vibration device for haptic feedback |
| US8981682B2 (en) | 2005-06-27 | 2015-03-17 | Coactive Drive Corporation | Asymmetric and general vibration waveforms from multiple synchronized vibration actuators |
| US9459632B2 (en) | 2005-06-27 | 2016-10-04 | Coactive Drive Corporation | Synchronized array of vibration actuators in a network topology |
| US11203041B2 (en) | 2005-06-27 | 2021-12-21 | General Vibration Corporation | Haptic game controller with dual linear vibration actuators |
| US10226792B2 (en) | 2005-06-27 | 2019-03-12 | General Vibration Corporation | Synchronized array of vibration actuators in an integrated module |
| US10843229B2 (en) | 2005-06-27 | 2020-11-24 | General Vibration Corporation | Synchronized array of vibration actuators in an integrated module |
| US7647832B2 (en) * | 2005-11-22 | 2010-01-19 | Robert Bosch Gmbh | Micromechanical device and method for producing a micromechanical device |
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