JPH0293385A - Lsi tester - Google Patents

Abstract

PURPOSE:To enhance not only test accuracy and but also the quality of a product by wiring a sense line and a force line in a separated state up to this side of a change-over circuit so as not to receive the effect of the impedance of a power supply line. CONSTITUTION:A change-over circuit 7 is provided around an IC socket 12 and consists of power supply distribution patterns and a plurality of switches, and the output thereof is connected to each terminal of the socket 12 by wiring. The connection and change-over of a testing power source are performed by altering a pin inserting position. The insertion of pins is performed at the time of the change-over of a kind by preliminarily teaching the position coordinates of a socket inserting each of the pins at every kind to the robot and the change- over of a kind can be automated. The output of a power supply 5 for a sample is connected to the position of the power supply distribution patterns 11 provided in the vicinity of an object to be tested by wiring in such a state that a sense line 8-1 and a force line 8-2 are separated and, therefore, sufficient voltage accuracy can be obtained at the position of the power supply terminal of the object to be tested.

Description

[Detailed Description of the Invention] [Industrial Field of Application] The present invention relates to LSI package testing, and in particular to
The present invention relates to an LSI test device suitable for improving and automating switching operations for testing LSIs.

[Conventional technology]

The number of semi-custom LSI products, such as Gate Play and Standard Cell, has increased to a huge number, and is expected to continue to increase as LSIs become larger and products become more differentiated. On the other hand, the testing equipment used to test these things has become very expensive as testing speeds have increased and the number of bins has increased.
- There is a strong demand for a model to be able to test as many types of LSI as possible. In LSI testing, it is necessary to connect the sample power supply and test circuit inside the test equipment to the terminals of the DUT, but in general, the functions of the terminals differ depending on the type of LSI, so it is necessary to connect the test equipment Create an individual connection device for the connection between the terminals of the test object and the terminals of the device under test.
Either they are replaced when changing the type, or as described in Japanese Patent Application Laid-Open No. 60-58666, additional wiring is performed on the connecting device without having to replace it. There was also a method of supplying sample power through a test circuit within the test apparatus itself, but the impedance of the signal line was large and the voltage accuracy was not sufficient.

[Problem that the invention seeks to solve]

In the above conventional technology, in LSI testing, the connection between the sample power supply of the test equipment main body and the power supply terminal of the DUT is made on the test jig through a socket into which the sample power line from the test equipment main body and the DUT are inserted. This is done by wiring the power supply terminals with wires. For this reason, if the position of the power terminal of the DUT is different, the wiring must be slightly rewired or the necessary number of pre-wired jigs must be created and replaced. There were problems such as the need for different products, the time required for replacement work, and poor contact caused by attachment. In order to eliminate this problem, there is a method in which the driver in each pin electronics in the test equipment itself is used as a power supply for the sample, and is supplied to any terminal of the DUT, but the impedance of the signal line is large and the terminal of the DUT is The voltage accuracy at the position was insufficient.

An object of the present invention is to easily switch the connection of the sample power source even when the position of the power terminal of the test object is different, without reducing the voltage of the sample power source at the terminal position of the test object.

[Failure to solve the problem]

The above purpose is to install a small switching circuit near the DUT on the connection device, and to separate the sense line and force line before the switching circuit so that they are not affected by the impedance of the power line. It is very achievable.

[Effect]

As for the output of the sample power supply, the sense line and force line are wired separately from the main body of the test device to just before the changeover switch on the connection device, so the voltage drop due to impedance between them can be ignored. Therefore, the voltage drop depends only on the impedance from the point where the sense line and force line are shorted to the terminal of the test object.

Since the switching circuit is composed of small switches, the distance to the terminals of the test object is short, and impedance can be kept low. Therefore, power can be supplied to the test object with high accuracy. In addition, the switching circuit consists of multiple switches, and their outputs are connected to each terminal of the DUT, so if you close the switch connected to the power terminal of the DUT, the power supply for the sample can be connected to the DUT. Can be supplied to the test object.

〔Example〕

Hereinafter, an embodiment of the present invention will be explained with reference to FIG.

The main equipment in LSI testing is the test equipment main body 1. control device 2. This is the connection device 3. The test is carried out by the test program in the control device 2, the test conditions are set in the test device main body 1, and the measurement start command is issued.
Supply power to the device, apply measurement signals, and perform measurements. Since any signal (depending on the test program) can be input or output from each pin electronics 6 of the test device main body, even if the type of signal from the device under test 4 changes, the test program can be switched. Especially in this device, the sample power supply 5
can be connected to any terminal of the DUT 4 by the sample power switching circuit 7 on the connecting device s. For this reason,
Even if the position of the power terminal of the test object 4 changes, the product type can be changed by switching the sample power connection switch.

FIG. 2 is a schematic plan view showing one embodiment of the connecting device. A switching circuit 7 is provided around the IC socket 12. The switching circuit includes a power distribution pattern 11 and a plurality of switches), and its output is wired to each terminal of the IC socket 12. Therefore, by closing the switch located at the power terminal of the test object, the sample power supply of the test apparatus main body and the power terminal of the test object are connected. In this embodiment, in order to arrange the switching circuit 7 as close as possible to the IC socket 12, a small pin insertion type switch is used. Therefore,
Connection switching of the sample power source can be achieved by changing the pin insertion position. The pins can be inserted manually, but
If the robot memorizes the positional coordinates of the socket into which the pin is inserted for each type in advance, and the robot inserts the pin when changing the type, it is possible to automate the type change. The output of the sample power supply 5 is the 110th power distribution pattern installed near the test object! -1, sense line 8-
1 force line 8-2 is separated and wired,
Sufficient voltage accuracy can be obtained at the location of the power supply terminal of the device under test. The signal line 9 is the I of the pin insertion type switch 10.
Since it is wired to the C socket side, it is always connected to each terminal of the RC socket. For this reason, the signal line connected to the power supply terminal of the device under test is set to an unused state within the test equipment (by the test program).

FIG. 3 shows a cross-sectional view of the embodiment of the switch in FIG. The switch is composed of a pin insertion socket main body 13 and a pin contact piece 15, and the switch is made up of a pin insertion socket body 13 and a pin contact piece 15.
) Two pin contact pieces 15 can be electrically connected. In FIG. 2, one contact piece is connected to the power supply pattern 11, and the other contact piece is connected to the signal line 9 and the wiring line of the IC socket 12.

〔Effect of the invention〕

According to the present invention, the connection relationship between the test device and the power terminal of the test object can be arbitrarily switched without reducing the voltage accuracy, so (1) the test accuracy is high and the quality of the product is improved (2) the connection device (3) Improved reliability of testing equipment by reducing the number of replacements (3) Automating the switching of connected devices in high-mix, low-volume production has the effect of improving production efficiency and preventing an increase in personnel.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing a configuration example of an LSI test device according to an embodiment of the present invention, FIG. 2 is an explanatory diagram of an embodiment of the connection device shown in FIG. 1, and FIG. FIG. 3 is a cross-sectional view of a pin insertion type switch section provided in FIG. DESCRIPTION OF SYMBOLS 1... Test apparatus main body, 2... Control device, 3... Connection device, 4... Test object, 5... Power source for sample, 6...
...Pin electronics, 7...Switching circuit, 8-
1... Sample power supply sense line, 8-2... Sample power supply force line, 9... Signal line, 10...
Switch, 11... Sample power distribution pattern, 12.
...IC socket, 13...pin insertion socket body,
14... Contact pin, 15... Pin contact piece.

Claims (1)

[Claims] 1. For power supply, signal application, and signal measurement between the test equipment main body, the DUT, and the sample power supply of the test equipment main body and the pin electronics card for the DUT. In a test device consisting of a connection device that connects the test device main body and the device under test, a switching circuit is provided on the connection device that can connect the sample power source from the test device main body to any terminal of the device under test, and the LSI An LSI testing device characterized by eliminating the need to replace the connecting device even if the position of the power terminal differs depending on the product.