JPH02307080A - Liquid-cooled bt device - Google Patents

Liquid-cooled bt device

Info

Publication number
JPH02307080A
JPH02307080A JP1129153A JP12915389A JPH02307080A JP H02307080 A JPH02307080 A JP H02307080A JP 1129153 A JP1129153 A JP 1129153A JP 12915389 A JP12915389 A JP 12915389A JP H02307080 A JPH02307080 A JP H02307080A
Authority
JP
Japan
Prior art keywords
cooling liquid
printed board
liquid
filter
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1129153A
Other languages
Japanese (ja)
Inventor
Makoto Ishizawa
真 石澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1129153A priority Critical patent/JPH02307080A/en
Publication of JPH02307080A publication Critical patent/JPH02307080A/en
Pending legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PURPOSE:To hold cooling liquid invariably clean while the device is in operation by circulating the cooling liquid which contacts an IC and fitting a filter in its circulation path. CONSTITUTION:A BT printed board 1 where the IC is mounted is fitted to an elevator 2 and moved up and down by a winch 3; when the printed board 1 is elevated, a door 4 is opened to take the printed board 1 in and out and when the printed board is lowered, the printed board is dipped in the cooling liquid filling a BT layer 5 and the IC mounted on the printed board 1 is supplied with electric power from a BT power source 6 through a cable 7 to perform BT operation. The cooling liquid flows to the filter 14 from a pump 13 to have its contamination removed, exists from a blowout port 8 to fill the BT tank 5, and then flows in an overflow tank 9 to enter the pump 13 again through a drain port 10. Consequently, the cooling liquid can be held invariably clean.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はICの信頼性評価用の液冷BT装置に関し、特
に循環中の冷却用液体のフィルター機能を備えた液冷B
T装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a liquid-cooled BT device for evaluating the reliability of ICs, and particularly to a liquid-cooled BT device with a filter function for cooling liquid that is being circulated.
Regarding the T device.

〔従来の技術〕[Conventional technology]

従来、この種の液冷BT装置は、冷却用液体として炭素
及びフッ素を主成分とする高分子化合物(例えば、3M
社製、商品名フロリナート)を使用し、約50〜150
°C内の任意温度に調節されたこの冷却用液体中に、B
Tプリント板に実装したIC等を浸漬してバーンインを
行うようになっている。しかし、冷却用液体の汚染を除
去し、清浄度を回復させることを稼働中に行う手段は設
けられていなかった。
Conventionally, this type of liquid-cooled BT device uses a polymer compound mainly composed of carbon and fluorine (for example, 3M
About 50 to 150
In this cooling liquid adjusted to any temperature within °C, B
Burn-in is performed by immersing ICs and the like mounted on a T-printed board. However, no means were provided for decontaminating the cooling liquid and restoring its cleanliness during operation.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上述した従来の液冷BT装置は、汚れの付着したICや
BTプリント板を投入するなどして、冷却用液体が汚染
された場合、投入中のICへの2次汚染が避けられず、
一度汚染されてしまった冷却用液体の清浄度を回復させ
るには、液冷BT装置から冷却用液体を回収し、再生作
業を行うしか方法がないという欠点がある。
In the conventional liquid-cooled BT device described above, if the cooling liquid becomes contaminated by, for example, inserting a dirty IC or BT printed board, secondary contamination of the IC being introduced cannot be avoided.
There is a drawback in that the only way to restore the cleanliness of the cooling liquid once it has been contaminated is to recover the cooling liquid from the liquid-cooled BT device and perform a regeneration operation.

〔課題を解決するための手段〕[Means to solve the problem]

本発明は、循環する冷却用液体にICを浸漬しバーンイ
ンを行う液冷BT装置において、前記冷却用液体の循環
経路中に冷却用液体を清浄化するフィルターを取り付け
た液冷BT装置である。
The present invention is a liquid-cooled BT device that performs burn-in by immersing an IC in a circulating cooling liquid, in which a filter for cleaning the cooling liquid is installed in a circulation path of the cooling liquid.

〔実施例〕〔Example〕

第1図は本発明の第1の実施例の縦断面図である。 FIG. 1 is a longitudinal sectional view of a first embodiment of the invention.

ICが実装されたBTプリント板1はエレベータ−2に
取り付けられ、装置本体の頂面に設けられたウィンチ3
により上下に移動できるようになっており、上にある状
態で扉4を開けてBTプリント板1の出し入れ作業を行
ない、下にある状態で87層5に満たされた冷却用液体
中に浸漬し、BT電源6からケーブル7を介してBTプ
リント板1に実装されたICに電源を供給しBTを行う
The BT printed board 1 on which the IC is mounted is attached to the elevator 2, and the winch 3 provided on the top surface of the device body
The BT printed board 1 can be moved up and down when it is in the upper position by opening the door 4 to take in and take out the BT printed board 1, and when it is in the lower position it is immersed in the cooling liquid filled in the 87 layer 5. , BT is performed by supplying power from the BT power supply 6 to the IC mounted on the BT printed board 1 via the cable 7.

冷却用液体はポンプ13よりフィルター14に流れ込み
、汚染を除去されたのち吹き出し口8から出て、BT槽
5を満たした後オーバーフロ一槽9へ流れ込み、ドレイ
ン口10を通り液温調節用のヒーター11および冷却器
12を通り、再びポンプ13へ入る0本実施例で使用す
るフィルターは、通常、各種液体に使用されているフィ
ルターならば特に差し使えなく使用できる。第2図は本
発明の第2の実施例の縦断面図である。
The cooling liquid flows into the filter 14 from the pump 13, and after removing contamination, exits from the outlet 8, fills the BT tank 5, flows into the overflow tank 9, passes through the drain port 10, and is used for temperature adjustment. It passes through the heater 11 and cooler 12 and enters the pump 13 again. The filter used in this embodiment can be any filter that is normally used for various liquids. FIG. 2 is a longitudinal sectional view of a second embodiment of the invention.

ICが実装されたBTプリント板1は装置本体の扉4に
取り付けられ、扉4を横方向に開けな状態でBTプリン
ト板1の出し入れ作業を行ない、扉4を閉めた状態でB
T電源5からケーブル7を介してBTプリント板1に実
装されたICに電源供給しBTを行う。
The BT printed board 1 on which the IC is mounted is attached to the door 4 of the main body of the device, and the BT printed board 1 is inserted and removed without opening the door 4 laterally, and when the door 4 is closed, the BT printed board 1 is attached to the door 4 of the device body.
BT is performed by supplying power from the T power supply 5 to the IC mounted on the BT printed board 1 via the cable 7.

冷却用液体はポンプ13よりフィルター14に流れ込み
、汚染を除去されたのちノズル15から噴射され、IC
を冷却したのちドレイン口10を通り、液温調節用のヒ
ーター11および冷却器12を通り、再びポンプ13へ
入る。この実施例では、噴射式のため、冷却用液体の流
量が少なくてよく、またICに付着した汚れをBT中に
取り去る効果が大きいという利点がある。
The cooling liquid flows into the filter 14 from the pump 13, and after removing contamination, it is injected from the nozzle 15 to the IC.
After cooling, the liquid passes through the drain port 10, passes through the heater 11 and cooler 12 for adjusting the liquid temperature, and enters the pump 13 again. In this embodiment, since it is an injection type, the flow rate of the cooling liquid may be small, and there are advantages in that it is highly effective in removing dirt adhering to the IC during BT.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は、ICと接触する冷却用液
体を循環させ、なおかつ循環経路中にフィルターを取り
付けることにより、装置稼働中の冷却用液体を常に清浄
な状態に保つことができ、冷却用液体の汚れによるIC
への2次汚染を防止し、なおかつ投入前のICに付着し
ていた汚れさえも、BTを行うことにより除去すること
が可能であるという効果がある。
As explained above, the present invention circulates the cooling liquid that comes into contact with the IC, and by installing a filter in the circulation path, the cooling liquid can be kept clean at all times during the operation of the device. IC due to contamination of liquid
BT has the effect of preventing secondary contamination of the IC, and even removing dirt that had adhered to the IC before it was inserted.

図面の簡単な説明 第1図は本発明の第1の実施例の縦断面図、第2図は本
発明の第2の実施例の縦断面図である。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a longitudinal sectional view of a first embodiment of the invention, and FIG. 2 is a longitudinal sectional view of a second embodiment of the invention.

1・・・BTプリント板、2・・・エレベータ−13・
・・ウィンチ、4・・・扉、5・・・BT槽、6・・・
BT電源、7・・・ケーブル、8・・・吹き出し口、9
・・・オーバーフロ一槽、10・・・ドレイン口、11
・・・ヒーター、12・・・冷却器、13・・・ポンプ
、14・・・フィルター、15・・・ノズル。
1...BT printed board, 2...Elevator-13.
...Winch, 4...Door, 5...BT tank, 6...
BT power supply, 7... cable, 8... air outlet, 9
...Overflow tank, 10...Drain port, 11
... Heater, 12 ... Cooler, 13 ... Pump, 14 ... Filter, 15 ... Nozzle.

Claims (1)

【特許請求の範囲】[Claims] 循環する冷却用液体にICを浸漬しバーンインを行う液
冷BT装置において、前記冷却用液体の循環経路中に冷
却用液体を清浄化するフィルターを取り付けたことを特
徴とする液冷BT装置。
A liquid-cooled BT device in which an IC is immersed in a circulating cooling liquid to perform burn-in, characterized in that a filter for cleaning the cooling liquid is installed in a circulation path of the cooling liquid.
JP1129153A 1989-05-22 1989-05-22 Liquid-cooled bt device Pending JPH02307080A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1129153A JPH02307080A (en) 1989-05-22 1989-05-22 Liquid-cooled bt device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1129153A JPH02307080A (en) 1989-05-22 1989-05-22 Liquid-cooled bt device

Publications (1)

Publication Number Publication Date
JPH02307080A true JPH02307080A (en) 1990-12-20

Family

ID=15002455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1129153A Pending JPH02307080A (en) 1989-05-22 1989-05-22 Liquid-cooled bt device

Country Status (1)

Country Link
JP (1) JPH02307080A (en)

Cited By (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8208115B2 (en) * 2007-11-16 2012-06-26 Manufacturing Resources International, Inc. Fluid cooled display
US9801305B2 (en) 2008-03-03 2017-10-24 Manufacturing Resources International, Inc. Heat exchanger for an electronic display
US9797588B2 (en) 2008-03-03 2017-10-24 Manufacturing Resources International, Inc. Expanded heat sink for electronic displays
US9835893B2 (en) 2008-03-03 2017-12-05 Manufacturing Resources International, Inc. Heat exchanger for back to back electronics displays
US9894800B2 (en) 2008-03-03 2018-02-13 Manufacturing Resources International, Inc. Constricted convection cooling system for an electronic display
US10080316B2 (en) 2009-11-13 2018-09-18 Manufacturing Resources International, Inc. Electronic display assembly having thermal cooling plate and optional convective air cooling loop
US10088702B2 (en) 2013-07-08 2018-10-02 Manufacturing Resources International, Inc. Figure eight closed loop cooling system for electronic display
US10194564B2 (en) 2014-04-30 2019-01-29 Manufacturing Resources International, Inc. Back to back electronic display assembly
US10212845B2 (en) 2014-03-11 2019-02-19 Manufacturing Resources International, Inc. Hybrid rear cover and mounting bracket for electronic display
US10278311B2 (en) 2015-02-17 2019-04-30 Manufacturing Resources International, Inc. Perimeter ventilation system
US10314212B2 (en) 2008-12-18 2019-06-04 Manufacturing Resources International, Inc. System for cooling an electronic image assembly with circulating gas and ambient gas
US10398066B2 (en) 2017-04-27 2019-08-27 Manufacturing Resources International, Inc. System and method for preventing display bowing
US10420257B2 (en) 2008-03-26 2019-09-17 Manufacturing Resources International, Inc. System and method for maintaining a consistent temperature gradient across an electronic display
US10485113B2 (en) 2017-04-27 2019-11-19 Manufacturing Resources International, Inc. Field serviceable and replaceable display
US10524397B2 (en) 2013-03-15 2019-12-31 Manufacturing Resources International, Inc. Heat exchanger assembly for an electronic display
US10524384B2 (en) 2013-03-15 2019-12-31 Manufacturing Resources International, Inc. Cooling assembly for an electronic display
US10559965B2 (en) 2017-09-21 2020-02-11 Manufacturing Resources International, Inc. Display assembly having multiple charging ports
US10660245B2 (en) 2012-10-16 2020-05-19 Manufacturing Resources International, Inc. Back pan cooling assembly for electronic display
US10795413B1 (en) 2019-04-03 2020-10-06 Manufacturing Resources International, Inc. Electronic display assembly with a channel for ambient air in an access panel
US10820445B2 (en) 2016-03-04 2020-10-27 Manufacturing Resources International, Inc. Cooling system for double sided display assembly
US10827656B2 (en) 2008-12-18 2020-11-03 Manufacturing Resources International, Inc. System for cooling an electronic image assembly with circulating gas and ambient gas
US11019735B2 (en) 2018-07-30 2021-05-25 Manufacturing Resources International, Inc. Housing assembly for an integrated display unit
US11096317B2 (en) 2019-02-26 2021-08-17 Manufacturing Resources International, Inc. Display assembly with loopback cooling
US11470749B2 (en) 2020-10-23 2022-10-11 Manufacturing Resources International, Inc. Forced air cooling for display assemblies using centrifugal fans
US11477923B2 (en) 2020-10-02 2022-10-18 Manufacturing Resources International, Inc. Field customizable airflow system for a communications box
US11744054B2 (en) 2021-08-23 2023-08-29 Manufacturing Resources International, Inc. Fan unit for providing improved airflow within display assemblies
US11762231B2 (en) 2021-08-23 2023-09-19 Manufacturing Resources International, Inc. Display assemblies inducing turbulent flow
US11778757B2 (en) 2020-10-23 2023-10-03 Manufacturing Resources International, Inc. Display assemblies incorporating electric vehicle charging equipment
US11919393B2 (en) 2021-08-23 2024-03-05 Manufacturing Resources International, Inc. Display assemblies inducing relatively turbulent flow and integrating electric vehicle charging equipment
US11968813B2 (en) 2021-11-23 2024-04-23 Manufacturing Resources International, Inc. Display assembly with divided interior space
US11966263B2 (en) 2021-07-28 2024-04-23 Manufacturing Resources International, Inc. Display assemblies for providing compressive forces at electronic display layers

Citations (3)

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Publication number Priority date Publication date Assignee Title
JPS59162465A (en) * 1983-03-07 1984-09-13 Hitachi Micro Comput Eng Ltd Tester
JPS62277734A (en) * 1986-05-26 1987-12-02 Nec Corp Washing method for semiconductor substrate
JPS63305906A (en) * 1987-06-05 1988-12-13 Matsushita Electric Works Ltd Circulation filter of hot water

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162465A (en) * 1983-03-07 1984-09-13 Hitachi Micro Comput Eng Ltd Tester
JPS62277734A (en) * 1986-05-26 1987-12-02 Nec Corp Washing method for semiconductor substrate
JPS63305906A (en) * 1987-06-05 1988-12-13 Matsushita Electric Works Ltd Circulation filter of hot water

Cited By (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8208115B2 (en) * 2007-11-16 2012-06-26 Manufacturing Resources International, Inc. Fluid cooled display
US9801305B2 (en) 2008-03-03 2017-10-24 Manufacturing Resources International, Inc. Heat exchanger for an electronic display
US9797588B2 (en) 2008-03-03 2017-10-24 Manufacturing Resources International, Inc. Expanded heat sink for electronic displays
US9835893B2 (en) 2008-03-03 2017-12-05 Manufacturing Resources International, Inc. Heat exchanger for back to back electronics displays
US9894800B2 (en) 2008-03-03 2018-02-13 Manufacturing Resources International, Inc. Constricted convection cooling system for an electronic display
US10506740B2 (en) 2008-03-03 2019-12-10 Manufacturing Resources International, Inc. Electronic display with cooling
US10506738B2 (en) 2008-03-03 2019-12-10 Manufacturing Resources International, Inc. Constricted convection cooling for an electronic display
US11540418B2 (en) 2008-03-03 2022-12-27 Manufacturing Resources International, Inc. Electronic display with cooling
US10721836B2 (en) 2008-03-03 2020-07-21 Manufacturing Resources International, Inc. Electronic display with cooling
US11013142B2 (en) 2008-03-03 2021-05-18 Manufacturing Resources International, Inc. Electronic display with cooling
US10420257B2 (en) 2008-03-26 2019-09-17 Manufacturing Resources International, Inc. System and method for maintaining a consistent temperature gradient across an electronic display
US10314212B2 (en) 2008-12-18 2019-06-04 Manufacturing Resources International, Inc. System for cooling an electronic image assembly with circulating gas and ambient gas
US10827656B2 (en) 2008-12-18 2020-11-03 Manufacturing Resources International, Inc. System for cooling an electronic image assembly with circulating gas and ambient gas
US11191193B2 (en) 2008-12-18 2021-11-30 Manufacturing Resources International, Inc. System for cooling an electronic image assembly with circulating gas and ambient gas
US10736245B2 (en) 2009-11-13 2020-08-04 Manufacturing Resources International, Inc. Electronic display assembly with combined conductive and convective cooling
US10080316B2 (en) 2009-11-13 2018-09-18 Manufacturing Resources International, Inc. Electronic display assembly having thermal cooling plate and optional convective air cooling loop
US10660245B2 (en) 2012-10-16 2020-05-19 Manufacturing Resources International, Inc. Back pan cooling assembly for electronic display
US10524397B2 (en) 2013-03-15 2019-12-31 Manufacturing Resources International, Inc. Heat exchanger assembly for an electronic display
US10524384B2 (en) 2013-03-15 2019-12-31 Manufacturing Resources International, Inc. Cooling assembly for an electronic display
US10359659B2 (en) 2013-07-08 2019-07-23 Manufactruing Resources Internatonal, Inc. Cooling system for electronic display
US10088702B2 (en) 2013-07-08 2018-10-02 Manufacturing Resources International, Inc. Figure eight closed loop cooling system for electronic display
US10212845B2 (en) 2014-03-11 2019-02-19 Manufacturing Resources International, Inc. Hybrid rear cover and mounting bracket for electronic display
US10194564B2 (en) 2014-04-30 2019-01-29 Manufacturing Resources International, Inc. Back to back electronic display assembly
US10687446B2 (en) 2014-04-30 2020-06-16 Manufacturing Resources International, Inc. Back to back electronic display assembly
US10973156B2 (en) 2014-04-30 2021-04-06 Manufacturing Resources International, Inc. Dual electronic display assembly
US10548247B2 (en) 2015-02-17 2020-01-28 Manufacturing Resources International, Inc. Perimeter ventilation system
US10278311B2 (en) 2015-02-17 2019-04-30 Manufacturing Resources International, Inc. Perimeter ventilation system
US11744036B2 (en) 2016-03-04 2023-08-29 Manufacturing Resources International, Inc. Cooling system for double sided display assembly
US10820445B2 (en) 2016-03-04 2020-10-27 Manufacturing Resources International, Inc. Cooling system for double sided display assembly
US10398066B2 (en) 2017-04-27 2019-08-27 Manufacturing Resources International, Inc. System and method for preventing display bowing
US10499516B2 (en) 2017-04-27 2019-12-03 Manufacturing Resources International, Inc. Field serviceable and replaceable assembly
US10757844B2 (en) 2017-04-27 2020-08-25 Manufacturing Resources International, Inc. System and method for reducing or combating display bowing
US10925174B2 (en) 2017-04-27 2021-02-16 Manufacturing Resources International, Inc. Field serviceable and replaceable assembly
US10716224B2 (en) 2017-04-27 2020-07-14 Manufacturing Resources International, Inc. Field serviceable and replaceable assembly
US10624218B2 (en) 2017-04-27 2020-04-14 Manufacturing Resources International, Inc. Field serviceable and replaceable display assembly
US11934054B2 (en) 2017-04-27 2024-03-19 Manufacturing Resources International, Inc. Field serviceable and replaceable assembly
US11032923B2 (en) 2017-04-27 2021-06-08 Manufacturing Resources International, Inc. Field serviceable display assembly
US11822171B2 (en) 2017-04-27 2023-11-21 Manufacturing Resources International, Inc. Field serviceable and replaceable assembly
US10485113B2 (en) 2017-04-27 2019-11-19 Manufacturing Resources International, Inc. Field serviceable and replaceable display
US10559965B2 (en) 2017-09-21 2020-02-11 Manufacturing Resources International, Inc. Display assembly having multiple charging ports
US11019735B2 (en) 2018-07-30 2021-05-25 Manufacturing Resources International, Inc. Housing assembly for an integrated display unit
US11889636B2 (en) 2018-07-30 2024-01-30 Manufacturing Resources International, Inc. Housing assembly for an integrated display unit
US11617287B2 (en) 2019-02-26 2023-03-28 Manufacturing Resources International, Inc. Display assembly with loopback cooling
US11096317B2 (en) 2019-02-26 2021-08-17 Manufacturing Resources International, Inc. Display assembly with loopback cooling
US10795413B1 (en) 2019-04-03 2020-10-06 Manufacturing Resources International, Inc. Electronic display assembly with a channel for ambient air in an access panel
US11507141B2 (en) 2019-04-03 2022-11-22 Manufacturing Resources International, Inc. Electronic display assembly with a channel for ambient air in an access panel
US11989059B2 (en) 2019-04-03 2024-05-21 Manufacturing Resources International, Inc. Electronic display assembly with a channel for ambient air in an access panel
US11477923B2 (en) 2020-10-02 2022-10-18 Manufacturing Resources International, Inc. Field customizable airflow system for a communications box
US11470749B2 (en) 2020-10-23 2022-10-11 Manufacturing Resources International, Inc. Forced air cooling for display assemblies using centrifugal fans
US11778757B2 (en) 2020-10-23 2023-10-03 Manufacturing Resources International, Inc. Display assemblies incorporating electric vehicle charging equipment
US11966263B2 (en) 2021-07-28 2024-04-23 Manufacturing Resources International, Inc. Display assemblies for providing compressive forces at electronic display layers
US11744054B2 (en) 2021-08-23 2023-08-29 Manufacturing Resources International, Inc. Fan unit for providing improved airflow within display assemblies
US11762231B2 (en) 2021-08-23 2023-09-19 Manufacturing Resources International, Inc. Display assemblies inducing turbulent flow
US11919393B2 (en) 2021-08-23 2024-03-05 Manufacturing Resources International, Inc. Display assemblies inducing relatively turbulent flow and integrating electric vehicle charging equipment
US11968813B2 (en) 2021-11-23 2024-04-23 Manufacturing Resources International, Inc. Display assembly with divided interior space

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