JPH02298431A - Electric discharge machining device - Google Patents
Electric discharge machining deviceInfo
- Publication number
- JPH02298431A JPH02298431A JP11726689A JP11726689A JPH02298431A JP H02298431 A JPH02298431 A JP H02298431A JP 11726689 A JP11726689 A JP 11726689A JP 11726689 A JP11726689 A JP 11726689A JP H02298431 A JPH02298431 A JP H02298431A
- Authority
- JP
- Japan
- Prior art keywords
- machining
- surface plate
- table surface
- gap
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003754 machining Methods 0.000 title claims abstract description 88
- 238000007789 sealing Methods 0.000 claims abstract description 21
- 230000002093 peripheral effect Effects 0.000 claims abstract description 10
- 239000012530 fluid Substances 0.000 claims description 48
- 238000009760 electrical discharge machining Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 abstract description 10
- 238000012856 packing Methods 0.000 description 33
- 230000001105 regulatory effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 229920001973 fluoroelastomer Polymers 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、加工槽内の充満された加工液中にて電極とワ
ークの間に放電を発生させてワークの加工を行う放電加
工装置に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an electric discharge machining device that machins a workpiece by generating electric discharge between an electrode and a workpiece in a machining fluid filled in a machining tank. It is something.
［従来の技術］
第７図乃至第１０図は従来のこの種の放電加工装置を示
すものである。図において、（１）はベッド、（２）は
ベッド（１）上の一側に設置されたコラム、（３）はコ
ラム（２）上を図に示すＸ軸方向に移動するサドル、（
４〉はサドル（３）上を図に示すＹ軸方向に移動するラ
ム、（５）はラム（４）の先端に設置されたヘッド、（
６）はヘッド（５）の下端に設けられて図に示すＺ軸方
向に移動する電極取付定盤、（７）は電極取付定盤（６
）に取り付けられた電極、（８）は電極取付定盤（８）
の下方すなわち電極（７）の下方のベッド（１）上に設
置された加工槽である。[Prior Art] FIGS. 7 to 10 show a conventional electrical discharge machining apparatus of this type. In the figure, (1) is a bed, (2) is a column installed on one side above the bed (1), (3) is a saddle that moves above the column (2) in the X-axis direction shown in the figure, (
4> is a ram that moves on the saddle (3) in the Y-axis direction shown in the figure, (5) is a head installed at the tip of the ram (4), (
6) is an electrode mounting surface plate that is provided at the lower end of the head (5) and moves in the Z-axis direction shown in the figure, and (7) is an electrode mounting surface plate (6).
), (8) is the electrode mounting surface plate (8)
This is a processing tank installed on the bed (1) below the electrode (7).
しかして、加工槽（８）は、電極（７〉を囲み立設配置
された枠体（９）と、枠体（９）内に遊嵌されて該枠体
と共に加工槽（８）を形成するテーブル定盤（１０）と
、テーブル定盤（１０）の周縁部に形成した段部（ＬＯ
ａ）（第９図）に固定板（１１）及びねじ（１２）によ
り固定されて、常時、テ、−プル定盤（１０）の周縁部
と枠体内面との間の隙間を封塞するパツキン（１３）と
から形成されている。Thus, the processing tank (8) includes a frame (9) that is arranged upright surrounding the electrode (7), and is loosely fitted into the frame (9) to form the processing tank (8) together with the frame. a table surface plate (10), and a step (LO) formed on the peripheral edge of the table surface plate (10).
a) It is fixed to the fixing plate (11) and screws (12) (Fig. 9), and always closes the gap between the peripheral edge of the Te/Pull surface plate (10) and the inner surface of the frame body. It is formed from a packing (13).
また、加工槽（８）にはテーブル定盤（１０）を昇降さ
せるための昇降装置（図示せず）が備えられていて、テ
ーブル定盤（１０）を任意の位置で固定てきるようにな
っているとともに、テーブル定盤（１０）の−側部に縦
方向に貫通する加工液排出口（１４）が形成され（第１
０図）、加工液排出口（１４）が配管（１５）及び電磁
弁（１６）を介して加工液タンク（１７）に連通接続さ
れている。加工液タンク（１７）には加工液送給用のポ
ンプ（１８）から成る加工液供給装置が備えられており
、加工液タンク（１７）内から配管（１９）により加工
液を吸い上げ、これを配管（２０〉を介して加工槽（８
）内へ送給てきるようになっている。Further, the processing tank (8) is equipped with a lifting device (not shown) for raising and lowering the table surface plate (10), so that the table surface plate (10) can be fixed at any position. At the same time, a machining fluid discharge port (14) is formed in the negative side of the table surface plate (10) to penetrate in the vertical direction (a first
0), a machining fluid discharge port (14) is connected to a machining fluid tank (17) via a pipe (15) and a solenoid valve (16). The machining fluid tank (17) is equipped with a machining fluid supply device consisting of a pump (18) for supplying machining fluid, and the machining fluid is sucked up from inside the machining fluid tank (17) through piping (19). Processing tank (8) via piping (20)
).
このようなものにおいて、放電加工を行うには、まず昇
降装置を作動させてテーブル定盤（１０）を降下させ、
テーブル定盤（１０）上にワーク（２１）を取り付ける
。次いで、昇降装置によりテーブル定盤＜１０）を所定
位置まで上昇させ、位置固定する。その後、加工液供給
装置のポンプ（１８）を作動させて、加工液タンク（１
７）内の加工液を加工槽（８）内へ送給して充満させる
。この時、電磁弁（１６）は閉じており、加工液タンク
（１７）内の加工液が加工液タンク（１７）内へ還流す
ることはない。In order to perform electric discharge machining on such a machine, first operate the lifting device to lower the table surface plate (10),
The workpiece (21) is mounted on the table surface plate (10). Next, the table surface plate <10) is raised to a predetermined position by the lifting device and fixed in position. After that, the pump (18) of the machining fluid supply device is operated, and the machining fluid tank (18) is operated.
7) The machining fluid in the chamber is fed into the machining tank (8) to fill it. At this time, the solenoid valve (16) is closed, and the machining fluid in the machining fluid tank (17) does not flow back into the machining fluid tank (17).
加工槽（８）内への加工液の送給が完了すると、サドル
（３）及びラム（４）により電極（７）をＸ、 Ｙ方向
に移動させてワーク（２１）に対する水平方向の位置調
愁を行い、その後、電極取付定盤（６）により電極（７
）をＺ方向に移動させつつ、加工槽（８）内の充満され
た加工液中にて電極（７）とワーク（２１）の間に放電
を発生させてワーク（２１）の加工を行う。When the feeding of the machining fluid into the machining tank (8) is completed, the electrode (7) is moved in the X and Y directions by the saddle (3) and the ram (4) to adjust its position in the horizontal direction relative to the workpiece (21). After that, attach the electrode (7) using the electrode mounting surface plate (6).
) is moved in the Z direction, electric discharge is generated between the electrode (7) and the workpiece (21) in the machining liquid filled in the machining tank (8), and the workpiece (21) is machined.
ワーク（２１）の加工か完了し、加工槽（８）から加工
液を排出する時は、電磁弁（］６）を開き、加工槽（８
）と加工液タンク（１７）とを連通させる。加工槽（８
）と加工液タンク（１７）とは、第７図に示すように、
設置高さか異なるため、電磁弁（１６）を開けば高い側
に位置する加工槽（８）内の加工液は加工液排出口（１
４）から配管（１５）を通り加工液タンク（１７）内へ
還流する。When the machining of the workpiece (21) is completed and the machining fluid is to be discharged from the machining tank (8), open the solenoid valve (]6 and drain the machining fluid from the machining tank (8).
) and the machining fluid tank (17). Processing tank (8
) and the machining fluid tank (17), as shown in Figure 7.
Since the installation heights are different, when the solenoid valve (16) is opened, the machining fluid in the machining tank (8) located on the higher side will flow through the machining fluid outlet (1).
4), passes through the pipe (15), and flows back into the machining liquid tank (17).
［発明が解決しようとする課題］
従来の放電加工装置は、以上のように、加工槽（８）の
テーブル定盤（１０）と枠体（９）との間の隙間をパツ
キン（１３）にて常時封塞するようにしているのて、テ
ーブル定盤（１０）を昇降させる昇降装置には、テーブ
ル定盤（１０）やこれに載置されるワーク（２１）の重
量による荷重ばかりでなく、パツキン（１３）と枠体（
９）との摩擦による荷重をも上回る大きな駆動力を必要
とされ、装置が大型化せざるを得ないという問題かあっ
た。[Problems to be Solved by the Invention] As described above, the conventional electric discharge machining apparatus has the problem of filling the gap between the table surface plate (10) of the machining tank (8) and the frame body (9) with the packing (13). Therefore, the lifting device that raises and lowers the table surface plate (10) is not only subject to the load due to the weight of the table surface plate (10) and the workpiece (21) placed on it. , Patsukin (13) and frame (
9), which requires a large driving force that exceeds the load caused by the friction between the device and the device, resulting in an increase in the size of the device.
また、テーブル定盤（１０）が昇降する度にパツキン（
１３）が枠体（９）内面と擦れるため、パツキン（１３
）の寿命が短くなるという難点かあった。Also, each time the table surface plate (10) goes up and down, the packing (
13) rubs against the inner surface of the frame (9), so the packing (13)
) had the disadvantage of shortening its lifespan.
更に、加工槽（８）内のテーブル定盤（１０）周りかパ
ツキン（１３）によって常時封塞されているため、加工
槽（８）から加工液を排出するには、加工槽（８）の底
部であるテーブル定盤（１０）に別に加工液排出口（１
４）を穿設して、加工液排出口（１４）を配管（１５）
及び電磁弁（１６）により加工液タンク（１７）に連通
接続する必要があり、テーブル定盤（１０）の加工工数
か増え、構成が複雑となってコスト高を招くとともに、
可動部であるテーブル定盤（１ｏ）に配管（１５）及び
電磁弁（１６）を接続する関係で、配管の困難性やイ言
頼性の低下等の問題があった。Furthermore, since the area around the table surface plate (10) in the machining tank (8) is always blocked by the gasket (13), in order to drain the machining liquid from the machining tank (8), There is a separate machining fluid outlet (1) on the table surface plate (10) at the bottom.
4) and connect the machining fluid outlet (14) to the pipe (15).
It is necessary to communicate with the machining liquid tank (17) using a solenoid valve (16), which increases the number of man-hours required for machining the table surface plate (10), complicates the configuration, and increases costs.
Due to the connection of the piping (15) and the electromagnetic valve (16) to the table surface plate (1o), which is a movable part, there have been problems such as difficulty in piping and reduction in reliability.
−４一
本発明は斜上の点に鑑み、シンプルで信頼性が高く、製
造コストを安価に抑えることの可能な放電加工装置を得
ることを目的とする。-41 In view of the above-mentioned problem, it is an object of the present invention to provide a simple electric discharge machining device that is highly reliable and that can reduce manufacturing costs.
［課題を解決するための手段］
本発明に係る放電加工装置は、３次元方向に移動可能な
加工用電極の下方に立設配置された枠体と、この枠体内
に昇降可能に遊嵌されて該枠体と共に加工槽を形成する
テーブル定盤と、このテーブル定盤の周縁部と枠体内面
との間の隙間を開放可能に封塞する密封装置とを備え、
該密封装置の開放時には上記隙間か加工液排出口を形成
するよう構成したものである。[Means for Solving the Problems] An electrical discharge machining apparatus according to the present invention includes a frame body disposed vertically below a machining electrode movable in three dimensions, and a frame body loosely fitted in the frame body so as to be movable up and down. a table surface plate that forms a processing tank together with the frame; and a sealing device that releasably seals a gap between the peripheral edge of the table surface plate and the inner surface of the frame;
When the sealing device is opened, the gap forms a machining fluid discharge port.
［作 用］
本発明においては、密封装置か、テーブル定盤の昇降時
にはテーブル定盤周縁部と枠体内面との間の隙間を開放
し、その昇降動作をスムーズならしめるとともに、放電
加工時には」１記隙間を封塞し、テーブル定盤と枠体と
で加工槽を形成させ、放電加工後に加工液を排出する時
には上記隙間をを開放し、上記隙間を加工液ｔＩ＋出口
として機能させる。[Function] In the present invention, the sealing device opens the gap between the peripheral edge of the table surface plate and the inner surface of the frame when the table surface plate is raised and lowered, thereby making the raising and lowering movement smooth, and during electrical discharge machining. 1. The gap is sealed to form a machining tank with the table surface plate and the frame, and when the machining fluid is discharged after electrical discharge machining, the gap is opened and the gap functions as a machining fluid tI+ outlet.
［実施例］
以下、従来に相当する部分には同一符号を付して示す第
１図乃至第３図の一実施例について本発明を説明すると
、本実施例の放電加工装置は、テーブル定盤（１０）の
周縁部に、テーブル定盤（１０）と枠体（９）内面との
間の隙間を開放可能に封塞する密封装置（２２）を設置
し、密封装置（２２）の開放時には上記隙間か加工液排
出口（２３）として機能するように構成した点に特徴を
有している。[Embodiment] The present invention will be explained below with reference to an embodiment in FIGS. 1 to 3, in which parts corresponding to the conventional ones are denoted by the same reference numerals. A sealing device (22) that releasably seals the gap between the table surface plate (10) and the inner surface of the frame (9) is installed on the peripheral edge of (10), and when the sealing device (22) is opened, The feature is that the gap is configured to function as a machining fluid discharge port (23).
すなわち、密封装置（２２）は、第２図に示す如く、テ
ーブル定盤（１０）の周縁部に形成した段部（ｌｏａ）
にねしく１２）により固定されて一部が加工液排出口（
２３）内へ突出するパツキン規制板（２４）と、パツキ
ン規制板（２４）の加工液排出口（２３）内への突出部
（２４ａ）の下方に配置されかつテーブル定盤（１０）
に固定されたエアーシリンダ（２５）と、エアーシリン
ダ（２５）の各圧力室へエアーを給排するためのエアー
配管（２Ｂ） 、 （２７）と、パツキン規制板（２４
）の突出部（２４ａ）下面と対向するパツキン抑圧面（
２８ａ）を有しかつエアーシリンダ（２５）のピストン
ロッド（２９）先端に固定された断面り字状のパツキン
抑圧部材（２８）と、パツキン抑圧部材（２８〉のパツ
キン抑圧面（２８ａ）とパツキン規制板（２４）の突出
部（２４ａ）下面との間に配置されたニトリルゴム、フ
ッ素ゴム等から成るチューブ状パツキン（３ｏ）とから
形成されており、かつパツキン抑圧部材（２８）は、断
面り字状の一方の片（２８ｂ）がテーブル定盤（１，０
）の下部周縁に形成した段部（１０ｂ）に係止すること
により、その上限位置を規制されるように構成されてい
る。That is, as shown in FIG.
It is fixed by Nineku 12) and a part of the machining fluid discharge port (
23) A packing regulating plate (24) that protrudes inward, and a table surface plate (10) disposed below the protruding portion (24a) of the packing regulating plate (24) into the machining fluid discharge port (23).
An air cylinder (25) fixed to the air cylinder (25), air piping (2B), (27) for supplying and discharging air to each pressure chamber of the air cylinder (25), and a gasket regulating plate (24).
) facing the lower surface of the protruding part (24a)
A packing suppressing member (28) having an angular cross section and fixed to the tip of the piston rod (29) of the air cylinder (25), and a packing suppressing surface (28a) of the packing suppressing member (28>) and a packing suppressing member (28) having a It is formed of a tubular packing (3o) made of nitrile rubber, fluororubber, etc. arranged between the lower surface of the protrusion (24a) of the regulating plate (24), and the packing suppressing member (28) has a cross section. One of the curved pieces (28b) is attached to the table surface plate (1,0
) is configured such that its upper limit position is regulated by being engaged with a step (10b) formed on the lower peripheral edge of the holder.
また、加工液排出口（２３）下方のベッド（１）上には
、枠体（９）の形状に沿わせてベッドタンク（３１）が
設置されており、ベッドタンク（３１）は連通管（３２
）を介して加工液タンク（１７）に連通接続されている
。上述以外の１？１１成は従来と同様であり、その説明
は省略する。Moreover, a bed tank (31) is installed on the bed (1) below the machining fluid outlet (23) along the shape of the frame (9), and the bed tank (31) is connected to the communication pipe ( 32
) is connected to the machining fluid tank (17). The 1-11 configurations other than those described above are the same as those of the prior art, and their explanation will be omitted.
次に、上述構成を有する本実施例装置の動作について説
明する。まず、テーブル定盤（１ｏ）上にワーク（２１
）を取り付けるに際し、密封装置（２２）のエアーシリ
ンダ（２５）を作動させてピストンロッド（２９）を縮
退させ、パツキン抑圧部材（２８）を下降させてチュー
ブ状パツキン（３０）を解放する。これによって、チュ
ーブ状パツキン（３０）はその断面形状が非押圧時の円
形に復帰し、枠体（９）内面がら離れて枠体（９）内面
との間に隙間が発生する（第２図及び第３図（ａ）参照
）。枠体（９）内面からチューブ状パツキン（３０〉が
離れると、図示しない昇降装置によってテーブル定盤（
１０）を降下させる。Next, the operation of the apparatus of this embodiment having the above-described configuration will be explained. First, place the workpiece (21) on the table surface plate (1o).
), actuate the air cylinder (25) of the sealing device (22) to retract the piston rod (29), lower the packing suppressing member (28), and release the tubular packing (30). As a result, the cross-sectional shape of the tubular gasket (30) returns to the circular shape when it is not pressed, and the inner surface of the frame (9) separates from the inner surface of the frame (9), creating a gap between it and the inner surface of the frame (9) (Fig. 2). and FIG. 3(a)). When the tubular packing (30) is separated from the inner surface of the frame (9), the table surface plate (
10) is lowered.
この下降動作時、テーブル定盤（１ｏ）は枠体（９）内
をチューブ状パツキン（３ｏ）が接触することなくスム
ーズに下降し、所定位置にて停止する。この位置にて、
テーブル定盤（１０）Ｊ二にワーク（２１）を取り付け
る。During this lowering operation, the table surface plate (1o) descends smoothly within the frame (9) without contact with the tubular gasket (3o), and stops at a predetermined position. At this position,
Attach the workpiece (21) to the table surface plate (10) J2.
次いで、昇降装置によりテーブル定盤（１ｏ）を所定高
さ位置まで上昇させる。この上昇動作時、チューブ状パ
ツキン（３０）は枠体（９）内面から離れた状態にあり
、テーブル定盤（１０）は枠体（９）内をチューブ状パ
ツキン（３０）が接触することなくスムーズに上昇し、
所定位置にて停止し、位置固定される。その後、密封装
置（２２）のエアーシリンダ（２５）を作動させてピス
トンロッド（２９）を伸長させ、パツキン抑圧部材（２
８）を上昇させてチューブ状パツキン（３０）を圧縮す
る。これによって、チューブ状パツキン（３０）はその
断面形状が抑圧方向と直交する方向へ延びて楕円形とな
り（第３図（ｂ）参照）、枠体（９）内面と密着して枠
体（９）内面との間の隙間を封塞し、テーブル定盤（１
０）と枠体（９）とで加工槽（８）を形成させる。その
後、加工液供給装置のポンプ（１８）を作動させて、加
工液タンクク１７）内の加工液を加工槽（８）内へ送給
して充満させる。Next, the table surface plate (1o) is raised to a predetermined height position by the lifting device. During this upward movement, the tubular packing (30) is in a state away from the inner surface of the frame (9), and the table surface plate (10) moves inside the frame (9) without the tubular packing (30) coming into contact with the inner surface of the frame (9). rises smoothly,
It stops at a predetermined position and is fixed in position. Thereafter, the air cylinder (25) of the sealing device (22) is operated to extend the piston rod (29), and the seal suppressing member (2
8) to compress the tubular packing (30). As a result, the cross-sectional shape of the tubular packing (30) extends in the direction perpendicular to the suppressing direction and becomes an ellipse (see FIG. 3(b)), and comes into close contact with the inner surface of the frame (9). ) Seal the gap between the inner surface and the table surface plate (1
0) and the frame (9) form a processing tank (8). Thereafter, the pump (18) of the machining fluid supply device is operated to supply the machining fluid in the machining fluid tank 17) into the machining tank (8) to fill it.
加工槽（８）内に加工液が充満されると、ザドルク３）
及びラム（４）により電極（７）をＸ、Ｙ方向に移動さ
せてワーク（２１）に対する水平方向の位置調整を行い
、その後、電極取付定盤（６）により電極（７）を２方
向に移動させつつ、加工槽（８）内の充満された加工液
中にて電極（７）とワーク（２１）の間に放電を発生さ
せてワーク（２１）の加工を行う。When the machining tank (8) is filled with machining liquid, Zadruk 3)
Then, the electrode (7) is moved in the X and Y directions using the ram (4) to adjust its horizontal position relative to the workpiece (21), and then the electrode (7) is moved in two directions using the electrode mounting surface plate (6). While moving, electric discharge is generated between the electrode (7) and the workpiece (21) in the machining fluid filled in the machining tank (8), thereby machining the workpiece (21).
ワーク（２１）の加工が完了し、加工槽（８）から加工
液を排出する時は、密封装置（２２）のエアーシリンダ
（２５）を作動させてピストンロッド（２９〉を縮退さ
せ、パツキン抑圧部材（２８）を下降させてチューブ状
パツキン（３０）を解放する。これによって、チューブ
状パツキン（３０）はその断面形状が非押圧時の円形に
復帰し、枠体（９）内面から離れて枠体（９）内面との
間に隙間すなわち加工液排出口（２３）か形成され、加
工槽（８）内の加工液が加工液排出口（２３）から下方
のベッドタンク（３１）内へ排出される。そして、ベッ
ドタンク（３１）内へ排出された加工液は、連通管（３
２）を通り加工液タンク（１７）内へ還流する。ベッド
タンク（３１）内から加工液タンク（１７）内への加工
液の流れは、ベルヌーイの定理により各タンク内の水位
の高さが同一レベルに保たれることによって発生する流
れである。When machining of the workpiece (21) is completed and the machining liquid is to be discharged from the machining tank (8), the air cylinder (25) of the sealing device (22) is activated to retract the piston rod (29>) and suppress the gasket. The member (28) is lowered to release the tubular packing (30).As a result, the tubular packing (30) returns to its circular cross-sectional shape when not pressed, and is separated from the inner surface of the frame (9). A gap, ie, a machining fluid discharge port (23), is formed between the inner surface of the frame body (9) and the machining fluid in the machining tank (8) flows from the machining fluid discharge port (23) into the bed tank (31) below. The machining fluid discharged into the bed tank (31) is then discharged into the communication pipe (3
2) and flows back into the machining liquid tank (17). The flow of the machining fluid from the bed tank (31) into the machining fluid tank (17) is a flow that occurs when the water level in each tank is maintained at the same level according to Bernoulli's theorem.
このように、本実施例の放電加工装置は、テーブル定盤
（１０）と枠体（９）との間の隙間を封塞するためのチ
ューブ状パツキン（３０）を、テーブル定盤（１０）の
昇降動作時には枠体（９）内面から離すことができるの
で、テーブル定盤（１０）の昇降動作時にチューブ状パ
ツキン（３０）か枠体（９）内面と擦れることがなく、
その分テーブル定盤（１０）の昇降に必要な力を低減で
き、テーブル定盤（１０）を昇降させる昇降装置の小型
化が図れ、パツキンの寿命を延ばすことが可能となる。As described above, the electric discharge machining apparatus of this embodiment is configured to attach the tubular packing (30) for sealing the gap between the table surface plate (10) and the frame body (9) to the table surface plate (10). Since it can be separated from the inner surface of the frame (9) during the lifting and lowering operations of the table surface plate (10), the tube-shaped gasket (30) does not rub against the inner surface of the frame (9) during the lifting and lowering operations of the table surface plate (10).
The force required to raise and lower the table surface plate (10) can be reduced accordingly, the elevating device for raising and lowering the table surface plate (10) can be downsized, and the life of the packing can be extended.
また、テーブル定盤（１０）と枠体（９）との間の隙間
を加工液排出口（２３）として機能させることができる
ので、従来のようにテーブル定盤（１０）に加工液排出
口を穿設する必要かなく、そのための配管及び電磁弁も
不要となり、シンプルで信頼性が高く、製造コストを安
価に抑えることか可能となっている。In addition, since the gap between the table surface plate (10) and the frame body (9) can function as a machining fluid discharge port (23), the machining fluid discharge port is provided in the table surface plate (10) as in the conventional case. There is no need to drill holes, and there is no need for piping or solenoid valves, making it simple and reliable, making it possible to keep manufacturing costs low.
なお、上述実施例ではパツキンにチューブ状パツキン（
３０）を用いたものを示したが、これを第４図に示すよ
うな単泡のスポンジ状パツキン（３３）としても良く、
またその断面形状も円形に限らず、第５図及び第６図に
示すような弓形パツキン（３４）としても良（、いずれ
の場合でも上述実施例同様の作用効果を奏する。In addition, in the above-mentioned embodiment, the packing is a tube-shaped packing (
30), but it may also be used as a single-cell sponge-like packing (33) as shown in Fig. 4.
Further, its cross-sectional shape is not limited to a circular shape, but may also be an arcuate packing (34) as shown in FIGS. 5 and 6 (although in either case, the same effects as those of the above-mentioned embodiments can be achieved).
［発明の効果］
以上述べたように、本発明によれば、テーブル−１１一
定盤の周縁部と枠体内面との間に、これらの隙間を開放
可能に封塞する密封装置設けて、該密封装置の開放時に
は上記隙間が加工液排出口を形成するよう構成したので
、テーブル定盤の昇降に必要な力を低減できるとともに
、封塞部材の長寿命化が図れ、シンプルで信頼性が高く
、製造コストを安価に抑えることか可能となるという効
果がある。[Effects of the Invention] As described above, according to the present invention, a sealing device is provided between the peripheral edge of the constant plate of the table-11 and the inner surface of the frame body to releasably seal the gap between them. When the sealing device is opened, the above-mentioned gap forms a machining fluid discharge port, so the force required to raise and lower the table surface plate can be reduced, and the life of the sealing member can be extended, making it simple and highly reliable. This has the effect of making it possible to keep manufacturing costs low.
第１図は本発明に係る放電加工装置の一実施例の全体構
成を概略的に示す側面図、第２図はその要部を拡大して
示す断面図、第３図（ａ） 、 （ｂ）はいずれもパツ
キンの一例を示す断面図で、第３図（ａ）は非押圧状態
のパツキン形状を示す図、第３図（ｂ）は抑圧状態パツ
キン形状を示す図、第４図（ａ） 、 （ｂ）はいずれ
もパツキンの他の例を示す第３図（ａ） 、（ｂ）相当
図、第５図（ａ） 、 （ｂ）はいずれもパツキンの更
に他の例を示す第３図（ａ） 、 （ｂ）相当図、第６
図は第５図のパツキンの取付態様を示す第２図相当図、
第７図は従来の放電加工装置の全体構成を概略的に示す
第１図相当図、第８図は第７図の正面図、第９図はその
要部を拡大して示す第２図相当図、第１０図はその加工
液排出口部を拡大して示す断面図である。
図において、（７）は電極（加工用電極） 、（８）は
加工槽、（９）は枠体（９） 、（１０）はテーブル定
盤、（２２）は密封装置、（２３）は加工液排出口であ
る。
なお、各図中、同一符号は同−又は相当部分を示す。FIG. 1 is a side view schematically showing the overall configuration of an embodiment of the electrical discharge machining apparatus according to the present invention, FIG. 2 is a cross-sectional view showing an enlarged view of the main parts, and FIGS. ) are all cross-sectional views showing an example of the packing; FIG. 3(a) is a drawing showing the packing shape in an unpressed state, FIG. 3(b) is a drawing showing the packing shape in a suppressed state, and FIG. ) and (b) are equivalent views to FIGS. 3(a) and (b), which show other examples of packing, and FIGS. 5(a) and (b) show still other examples of packing. Figures 3 (a) and (b) equivalent diagrams, No. 6
The figure is a diagram equivalent to Figure 2 showing how the packing shown in Figure 5 is installed.
Figure 7 is a diagram equivalent to Figure 1 that schematically shows the overall configuration of a conventional electrical discharge machining device, Figure 8 is a front view of Figure 7, and Figure 9 is an enlarged view of the main parts of the equipment, equivalent to Figure 2. 10 are enlarged sectional views showing the machining fluid discharge port. In the figure, (7) is the electrode (processing electrode), (8) is the processing tank, (9) is the frame (9), (10) is the table surface plate, (22) is the sealing device, and (23) is the This is the machining fluid outlet. In each figure, the same reference numerals indicate the same or corresponding parts.
Claims (1)
れた枠体と、この枠体内に昇降可能に遊嵌されて該枠体
と共に加工槽を形成するテーブル定盤と、このテーブル
定盤の周縁部と枠体内面との間の隙間を開放可能に封塞
する密封装置とを備え、該密封装置の開放時には上記隙
間が加工液排出口を形成するよう構成したことを特徴と
する放電加工装置。A frame body disposed vertically below a processing electrode that is movable in three dimensions; a table surface plate that is loosely fitted in the frame body so as to be movable up and down, and forms a processing tank together with the frame body; A sealing device that releasably seals a gap between the peripheral edge of the board and the inner surface of the frame, and is configured such that when the sealing device is opened, the gap forms a machining fluid discharge port. Electrical discharge machining equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11726689A JPH02298431A (en) | 1989-05-12 | 1989-05-12 | Electric discharge machining device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11726689A JPH02298431A (en) | 1989-05-12 | 1989-05-12 | Electric discharge machining device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02298431A true JPH02298431A (en) | 1990-12-10 |
Family
ID=14707505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11726689A Pending JPH02298431A (en) | 1989-05-12 | 1989-05-12 | Electric discharge machining device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02298431A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19619009A1 (en) * | 1995-05-12 | 1996-11-14 | Charmilles Technologies | Electro-erosion device |
| JP2005159322A (en) * | 2003-10-31 | 2005-06-16 | Nikon Corp | Surface plate, stage apparatus, exposure device and exposing method |
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-
1989
- 1989-05-12 JP JP11726689A patent/JPH02298431A/en active Pending
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|---|---|---|---|---|
| DE19619009C2 (en) * | 1995-05-12 | 2000-08-31 | Charmilles Technologies | EDM machine |
| DE19619009A1 (en) * | 1995-05-12 | 1996-11-14 | Charmilles Technologies | Electro-erosion device |
| US9678437B2 (en) | 2003-04-09 | 2017-06-13 | Nikon Corporation | Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction |
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| JP2005159322A (en) * | 2003-10-31 | 2005-06-16 | Nikon Corp | Surface plate, stage apparatus, exposure device and exposing method |
| KR101152449B1 (en) * | 2003-10-31 | 2012-06-01 | 가부시키가이샤 니콘 | Exposure device, exposure method and method of device |
| US9885872B2 (en) | 2003-11-20 | 2018-02-06 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light |
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