JPH02211705A - Piezoelectric oscillator - Google Patents

Piezoelectric oscillator

Info

Publication number
JPH02211705A
JPH02211705A JP3164389A JP3164389A JPH02211705A JP H02211705 A JPH02211705 A JP H02211705A JP 3164389 A JP3164389 A JP 3164389A JP 3164389 A JP3164389 A JP 3164389A JP H02211705 A JPH02211705 A JP H02211705A
Authority
JP
Japan
Prior art keywords
integrated circuit
lead frame
base body
plate surface
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3164389A
Other languages
Japanese (ja)
Inventor
Kozo Ono
公三 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP3164389A priority Critical patent/JPH02211705A/en
Publication of JPH02211705A publication Critical patent/JPH02211705A/en
Pending legal-status Critical Current

Links

Landscapes

  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To reduce cost and to obtain high reliability by using glass for a base body to surely seal up it and equalizing the outside shape to that of a semiconductor integrated circuit. CONSTITUTION:A shell-shaped glass base body 12 is formed on one side plate surface of a lead frame 11, and holding pieces 13 are cut and raised and are projected from the bottom of the base body 12 to hold a piezoelectric piece 14, and electrodes are led out, and the aperture of the base body 12 is closed with a cover body 15 to airtightly seal up the piezoelectric piece 14, and an integrated circuit is arranged on the other side plate surface of the lead frame 11, thus constituting an oscillating circuit. The base body 12 and the integrated circuit are molded into one body by a molding material 19. Consequently, the piezoelectric piece 14 is surely sealed up, and the outside periphery is molded with a resin to obtain the same outside shape as the IC. Thus, an inexpensive and high-reliability quartz oscillator is obtained.

Description

【発明の詳細な説明】 (発明の技術分野) 本発明は、モールドパッケージの、いわゆるデュアルイ
ンライン型の集積回路素子と同じ外形形状にすることが
可能でしかも高信頼性を得られる圧電発振器に関する。
DETAILED DESCRIPTION OF THE INVENTION (Technical Field of the Invention) The present invention relates to a piezoelectric oscillator that can have the same external shape as a so-called dual-in-line integrated circuit element in a mold package and that can provide high reliability.

(発明の技術的背景とその問題点) 近時、種々の電子機器等では集積回路素子(以。(Technical background of the invention and its problems) Recently, integrated circuit elements (hereinafter referred to as "integrated circuit elements") are used in various electronic devices.

下ICという)を大量に使用するために、このようなI
Cと同一の外形形状であれは部品の管理も容易で、試験
、組立等に自動器を導入することも、比較的容易に行え
る利点がある。
In order to use a large amount of
If it has the same external shape as C, it is easy to manage the parts, and it has the advantage that it is relatively easy to introduce automatic equipment for testing, assembly, etc.

このため従来、独自の容器に収納することが行われてい
た水晶発振器等の圧電発振器にあっても上記ICと同一
容器に収納したものが望まれている。
For this reason, it is desired that piezoelectric oscillators such as crystal oscillators, which have conventionally been housed in their own containers, be housed in the same container as the IC.

第3図は従来の、いわゆるデュアルインライン型のパッ
ケージを用いた水晶発振器の一例を示す断面図である。
FIG. 3 is a sectional view showing an example of a conventional crystal oscillator using a so-called dual in-line package.

すなわち、リードフレーム1の上面に半導体チップ2を
装着して金属細線3等でワーヤボンディングを行って電
気的に配線する。
That is, the semiconductor chip 2 is mounted on the upper surface of the lead frame 1 and electrically wired by wire bonding with thin metal wires 3 or the like.

そして、このリードフレームlの上、下面を一体にモー
ルド樹脂でモールドして下面に中空部4を有する容器5
を形成する。
Then, the upper and lower surfaces of this lead frame l are integrally molded with molding resin to form a container 5 having a hollow portion 4 on the lower surface.
form.

そして、板面に電極を形成し、所定の共振周波数に調整
した水晶片6を上記容器5の中空部4に配設する。この
水晶片6は、上記リードフレームlの下面に設けた保持
部7によって保持するとともにその電極を電気的に導出
して発振回路を構成する。
Then, electrodes are formed on the plate surface, and a crystal piece 6 adjusted to a predetermined resonance frequency is placed in the hollow part 4 of the container 5. This crystal piece 6 is held by a holding part 7 provided on the lower surface of the lead frame l, and its electrodes are electrically led out to form an oscillation circuit.

そして、上記中空部3に金属製のキャップ8をかぶせて
封止した後、ここにモールド材9を充填して気密性を高
めるようにしている。
After the hollow part 3 is covered with a metal cap 8 and sealed, a molding material 9 is filled in the hollow part 3 to improve airtightness.

しかしながらこのような発振器に用いる水晶片は、その
板面に銀、アルミニウム等からなる電極を形成している
。一方、モールド製の容器5は耐湿性が低く、容易に湿
気が浸入する欠点がある。
However, the crystal piece used in such an oscillator has electrodes made of silver, aluminum, etc. formed on its plate surface. On the other hand, the molded container 5 has low moisture resistance and has the disadvantage that moisture easily penetrates into the container 5.

このため第3図に示すような構造の水晶発振器では湿気
等が容器の中空部に浸入して水晶片の電極に付着し、あ
るいは電極材料を変質させると周波数の安定性を保つこ
とができない。
Therefore, in a crystal oscillator having a structure as shown in FIG. 3, frequency stability cannot be maintained if moisture or the like enters the hollow part of the container and adheres to the electrodes of the crystal piece, or if the electrode material is altered.

しかして第3図に示すような従来の発振器ではモールド
材とリードフレームとの境界面の気密を保つことが困難
で湿気等の浸入によって周波数の変化、まれには発振停
止等を生じ信頼性の低い問題があった。
However, in conventional oscillators as shown in Figure 3, it is difficult to maintain airtightness at the interface between the mold material and the lead frame, and the intrusion of moisture causes frequency changes and, in rare cases, oscillation stops, resulting in reliability problems. There was a low problem.

(発明の目的) 本発明は、上記の事情に鑑みてなされたもので、水晶片
を確実に封止することができそれによって高信頼性を得
られ、しかも外周を樹脂モールドすることによってIC
と同一外形形状とすることが可能で安価で信頼性の高い
水晶発振器を提供することを目的とするものである。
(Object of the Invention) The present invention has been made in view of the above circumstances, and it is possible to reliably seal the crystal piece, thereby obtaining high reliability, and furthermore, by molding the outer periphery with resin, the IC
The purpose of this invention is to provide an inexpensive and highly reliable crystal oscillator that can have the same external shape as the oscillator.

(発明の概要) 本発明はリードフレームの一側板面にシェル状のガラス
製の基体を形成するとともに保持片を切り起こして基体
の底部から突出させて圧電片を保持するとともに電極を
導出し、この基体の開口を蓋体で寒いで上記圧電片を気
密に封止し、リードフレームの他側板面に集積回路を配
設して発振回路を構成して上記基体および集積回路を一
体にモールド材でモールドしたことを特徴とするもので
ある。
(Summary of the Invention) The present invention includes forming a shell-shaped glass base on one side plate surface of a lead frame, and cutting and raising a holding piece to protrude from the bottom of the base to hold a piezoelectric piece and lead out an electrode. The piezoelectric piece is hermetically sealed in the opening of the base with a lid, an integrated circuit is arranged on the other side of the lead frame to form an oscillation circuit, and the base and the integrated circuit are molded together. It is characterized by being molded with.

(実施例) 以下、本発明の一実施例を第1図に示す断面図を参照し
て詳細に説明する。
(Example) Hereinafter, an example of the present invention will be described in detail with reference to the sectional view shown in FIG.

図中、11はリードフレームで、4270イ、コバール
、銅等の薄板を所定のパターン形状に加工したものであ
る。そして、このリードフレーム11の一例板面にはシ
ェル状のガラス製の基体12を形成している。また基体
12を成形する際にリードフレーム11の所定部位を切
り起こして保持片13を形成し上記基体12の底面に突
出するようにしている。
In the figure, 11 is a lead frame, which is made of a thin plate of 4270 mm, Kovar, copper, etc., and processed into a predetermined pattern shape. A shell-shaped base body 12 made of glass is formed on an example plate surface of this lead frame 11. Further, when molding the base body 12, a predetermined portion of the lead frame 11 is cut and raised to form a holding piece 13, which protrudes from the bottom surface of the base body 12.

モして14は板面に電極を形成し所定の共振周波数に調
整した水晶片で、上記保持片13によって保持するとと
もに、その板面の電極を電気的に導出するようにしてい
る。
Furthermore, reference numeral 14 is a crystal piece having electrodes formed on its plate surface and adjusted to a predetermined resonance frequency, which is held by the holding piece 13 and the electrodes on the plate surface are electrically led out.

そして、上記基体12の間口にコバールガラス等からな
るガラス製の蓋体15を低融点ガラス16で溶着して気
密に封止する。なお蓋体I5を透明な構成としておけば
、たとえばレーザ光線等の高エネルギビームを用いて、
これを水晶片14の電極面に照射することによって、水
晶片14を封止した状態で周波数の微調整を行うことが
できる。
Then, a glass cover 15 made of Kovar glass or the like is welded to the frontage of the base body 12 with a low melting point glass 16 to airtightly seal it. Note that if the lid body I5 has a transparent structure, for example, using a high energy beam such as a laser beam,
By irradiating the electrode surface of the crystal blank 14 with this, fine adjustment of the frequency can be performed while the crystal blank 14 is sealed.

そして、リードフレーム11の他側板面に集積口路チッ
プ17を取着し、金属細線18を用いてワイヤボンディ
ングして電気的な接続を行い発振回路を構成する。
Then, an integrated circuit chip 17 is attached to the other side plate surface of the lead frame 11, and electrical connection is made by wire bonding using a thin metal wire 18 to form an oscillation circuit.

そして、上記リードフレーム11の両側板面の中央部を
モールド材19で一体にモールドして外形形状を、たと
えばデュアルインライン型の集積回路と同じ形状に成形
する。
Then, the center portions of both side plate surfaces of the lead frame 11 are integrally molded with a molding material 19 to form the outer shape into the same shape as, for example, a dual in-line type integrated circuit.

このようにすれば、デュアルインライン型の集積回路と
同じ外形形状であり、いわゆる半導体集積回路と同様に
扱うことができるので自動検査装置、自動組立装置等を
容易に使用することができる。しかも水晶片はガラス製
の容器に気密に封止しているので湿気の浸入する恐れも
なく、耐熱性も良好で高信頼性を保つことができる。そ
してガラスからなる基体は、溶融したガラスを鋳型に注
入して固化させることにより容易に所望の形状に成形す
ることができ、比較的コストも安価で大量゛生産に適し
発振器全体の価格を安価にできる利点がある。
In this way, it has the same external shape as a dual in-line integrated circuit and can be handled in the same manner as a so-called semiconductor integrated circuit, so automatic inspection equipment, automatic assembly equipment, etc. can be easily used. Moreover, since the crystal piece is hermetically sealed in a glass container, there is no risk of moisture intrusion, and it has good heat resistance and can maintain high reliability. The base made of glass can be easily formed into a desired shape by pouring molten glass into a mold and solidifying it, making it relatively inexpensive and suitable for mass production, reducing the price of the entire oscillator. There are advantages that can be achieved.

なお、本発明は上記実施例に限定されるものではなく、
たとえば第2図に示すように、たとえば金属製の蓋体を
用いるようにしてもよい。
Note that the present invention is not limited to the above embodiments,
For example, as shown in FIG. 2, a metal lid may be used.

すなわち、基体12の開口に金属製のリング20を固着
してここに金属製の板状の蓋体21をシーム溶接等で溶
着するようにしてもよい。
That is, a metal ring 20 may be fixed to the opening of the base 12, and a metal plate-shaped lid 21 may be welded thereto by seam welding or the like.

またこの溶接の際に誘導加熱等を用いるようにしてもよ
い。
Further, induction heating or the like may be used during this welding.

さらに圧電片としては、ニオブ酸すチュウム、タンタル
酸すチュウム等のセラミック共振子を用いることもでき
る。
Further, as the piezoelectric piece, a ceramic resonator made of niobium oxide, tantalum oxide, or the like can also be used.

(発明の効果) 以上詳述したように、本発明によれば基体にガラスを用
いて耐熱性が良好で、かつ確実な封止を行え、しかも外
形形状を半導体集積回路と同じにすることが可能で大量
生産に適し、コストの安価な圧電発振器を提供すること
ができる。
(Effects of the Invention) As described in detail above, according to the present invention, it is possible to use glass for the substrate, which has good heat resistance and reliable sealing, and which can have the same external shape as a semiconductor integrated circuit. It is possible to provide a piezoelectric oscillator that is possible, suitable for mass production, and inexpensive.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す側断面図、第2図は本
発明の他の実施例を示す側断面図、第3図は従来の圧電
発振器の一例を示ず側断面図である。 11  ・ 12 ・ 13 ・ 14 ・ 15争 19 φ リードフレーム 基体 保持片 圧電片 蓋体 集積回路チップ モールド材
FIG. 1 is a side sectional view showing one embodiment of the present invention, FIG. 2 is a side sectional view showing another embodiment of the present invention, and FIG. 3 is a side sectional view showing an example of a conventional piezoelectric oscillator. be. 11 ・ 12 ・ 13 ・ 14 ・ 15 19 φ Lead frame base holding piece piezoelectric piece lid integrated circuit chip molding material

Claims (1)

【特許請求の範囲】  リードフレームの一側板面にシェル状に成形したガラ
ス製の基体と、 上記リードフレームから切り起こし上記基体内の底部か
ら突出する保持片と、 この保持片に保持され板面に形成した電極を導出される
圧電片と、 上記基体の開口を塞ぎ上記圧電片を気密に封止する蓋体
と、 上記リードフレームの他側板面に配設した発振回路を構
成する集積回路と、 上記基体および集積回路を一体にモールドするモールド
材と、 を具備することを特徴とする圧電発振器。
[Scope of Claims] A glass base formed into a shell shape on one side plate surface of a lead frame, a holding piece cut out from the lead frame and protruding from the bottom of the base, and a plate surface held by the holding piece. a piezoelectric piece from which an electrode formed on the piezoelectric piece is led out; a lid body that closes the opening of the base body and hermetically seals the piezoelectric piece; and an integrated circuit that constitutes an oscillation circuit that is disposed on the other side plate surface of the lead frame. A piezoelectric oscillator comprising: a molding material for integrally molding the base and the integrated circuit;
JP3164389A 1989-02-10 1989-02-10 Piezoelectric oscillator Pending JPH02211705A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3164389A JPH02211705A (en) 1989-02-10 1989-02-10 Piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3164389A JPH02211705A (en) 1989-02-10 1989-02-10 Piezoelectric oscillator

Publications (1)

Publication Number Publication Date
JPH02211705A true JPH02211705A (en) 1990-08-23

Family

ID=12336888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3164389A Pending JPH02211705A (en) 1989-02-10 1989-02-10 Piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JPH02211705A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03109426U (en) * 1989-11-08 1991-11-11
EP1489736A3 (en) * 2003-06-16 2006-02-01 Seiko Epson Corporation Piezoelectric oscillator, manufacturing method therefor, mobile phone apparatus using piezoelectric oscillator, and electronic apparatus using piezoelectric oscillator
JP2008035383A (en) * 2006-07-31 2008-02-14 Epson Toyocom Corp Piezoelectric device and manufacturing method of piezoelectric device
JP2019125796A (en) * 2019-02-27 2019-07-25 ラピスセミコンダクタ株式会社 Method of manufacturing semiconductor device
US10622944B2 (en) 2012-04-27 2020-04-14 Lapis Semiconductor Co., Ltd. Semiconductor device and measurement device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03109426U (en) * 1989-11-08 1991-11-11
EP1489736A3 (en) * 2003-06-16 2006-02-01 Seiko Epson Corporation Piezoelectric oscillator, manufacturing method therefor, mobile phone apparatus using piezoelectric oscillator, and electronic apparatus using piezoelectric oscillator
US7218036B2 (en) 2003-06-16 2007-05-15 Seiko Epson Corporation Piezoelectric oscillator, manufacturing method therefor, mobile phone apparatus using piezoelectric oscillator, and electronic apparatus using piezoelectric oscillator
JP2008035383A (en) * 2006-07-31 2008-02-14 Epson Toyocom Corp Piezoelectric device and manufacturing method of piezoelectric device
US10622944B2 (en) 2012-04-27 2020-04-14 Lapis Semiconductor Co., Ltd. Semiconductor device and measurement device
JP2019125796A (en) * 2019-02-27 2019-07-25 ラピスセミコンダクタ株式会社 Method of manufacturing semiconductor device

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