JPH01303079A - Electrostatic adsorbing plate having flexible plug-in terminal - Google Patents

Abstract

PURPOSE:To set a power feeding terminal to be a plug-in type flexible-thin-one and simplify a composition, by projecting the end section of an adsorbing layer by a specified width, and by fitting the power source of both positive and negative poles at the end section integrally. CONSTITUTION:An electrostatic adsorbing plate 2 is composed of an electrode layer 11 placed between an insulating layer 4 and an adsorbing layer 12. The electrode layer 11 is composed of a set of electrodes 6, 8 arranged in pectinate shapes. Current is fed to the electrodes 6.8 from a spigot terminal 16 via a switch 24 and a connector 22 through an electrode 14. The end section of the adsorbing layer 12 is projected and a terminal end 18 is formed. According to it, the electrodes 6, 8 are projected by the roughly same dimension as that of said terminal end 18 and are set to be an electrode terminal 20, and both ones are fitted by a bonding means or the like, and the plug-in terminal 16 is completed.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an improvement of an electrostatic chuck plate, and more particularly to an electrostatic chuck plate having a plug-in power supply section and a flexible plug-in terminal having a flexible structure. .

[Conventional technology]

In the conventional electrostatic chuck plate, as shown in FIG. 7, when forming terminals for power supply, conductive wires 131 and 132 are made to penetrate through the insulating base layer 104 and protrude from the bottom surface, respectively, to form terminals 133 and 134. and connect electric wires 126 and 127 to this.
was connected and power was supplied.

This is because the conventional electrostatic adsorption plate 102 is extremely thick. That is, the conventional adsorption layer 112 has a thickness XO of 0.5 degrees, and the thickness of the insulating base layer 104 has a thickness YO of 1.5 degrees.

[Problem that the invention seeks to solve]

Since the power supply terminal of the conventional electrostatic chucking plate is constructed as described above, the entire electrostatic chucking plate is extremely thick, which is inconvenient not only in terms of use but also in manufacturing. Furthermore, it is not easy to form the power terminals, resulting in high costs. Another drawback is that it is not easy to remove the power wires.

[Purpose of the invention]

Therefore, the purpose of this invention is to improve the above-mentioned drawbacks, to make it easy to attach and detach the electric wire for power supply, and to insert it. An object of the present invention is to obtain an electrostatic adsorption plate having a highly reliable flexible plug-in terminal that can be used with a connector.

[Failure to solve the problem]

In order to achieve this object, the present invention is characterized in that the end of the adsorption layer protrudes by a predetermined width, and a power source with both positive and negative polarities is integrally attached to the end of the rod.

[Effect]

According to the configuration of the present invention, the power supply terminal is a plug-in type terminal and is flexible, resulting in an extremely simple and thin configuration, and because of its simplicity, there are few failures and the reliability of the entire device is high.

〔Example〕

Next, embodiments of the present invention will be described in detail based on the drawings.

1 to 6 show embodiments of this invention. In the figure, reference numeral 2 denotes an electrostatic adsorption plate, which includes an insulating base layer 4, a set of electrodes 6.8 arranged in a comb-like shape, each of which receives positive and negative charges (=1) when energized; As shown in FIG. 1.2, an adsorption layer 12 which is dielectrically induced by a set of electrodes 6.8 and which attracts and holds an object to be adsorbed 10 by electrostatic attraction force is sequentially laminated 7 as shown in FIG. 1.2.

The electrostatic adsorption plate 2 supplies DC power to the dark blue electrodes 8 to apply positive and negative charges to them, respectively. This −IYjl electrode 6.8 makes the adsorption layer]2 dielectric, so the adsorbed object]
0, a charge of a polarity different from that of each electrode 6.8 is generated by electrostatic induction at a portion of the object 1iJ opposing each of the electrodes 6.8. As a result, the adsorbed object 1
An electrostatic attractive force acts between the raw U and the charges on each electrode 6.8, and the object 10 is attracted and held on the surface of the adsorption layer 12.

In this invention, the electrode 6.8 of the electrostatic adsorption plate 2
Electrode 14 and dielectric for power supply (flexible insertion for connection with φ6.8, 77◇:111 child) 6
was formed.

In other words, the end of the adsorption layer 12 has a width of, for example, ]5II+1 culm,
As shown in FIG. 1, the terminal end 18, which has a length of about 50 mm and protrudes from -H, is first formed by forming the eye of the adsorption layer 12. Next, the electrode 6.8 is ◇:I for iAi 'J'.
! Electrode end 7-20 protrudes by approximately the same dimension as I8.
Then, the two are attached by adhesive means or the like to complete the plug-in terminal 16. At this time, the electrode terminal 20 is exposed on the back surface of the adsorption layer 12 to enable electrical connection.

The materials for the adsorption layer 2 are polyester resin, vinyl chloride resin, and synthetic resin such as acrylic resin with conductive additives added to form a sheet.
Demonstrates a dielectric constant and resistance value of 1Jl.

Further, a connector 22 is provided on the power source 14 side via a switch 24 in order to receive the plug-in terminal] 6 and achieve electrical connection. In addition, in FIG. 5, 26 is an electrode.

In other words, the inventor of the present invention discovered and confirmed that the volume resistivity of the adsorption layer 12 can be made higher than the conventional value and that it can perform a good function. It becomes possible to make the size XN as thin as 02~Q, 3+n, and it becomes possible to form a plug-in terminal]6, and it becomes possible to have flexibility.
A connection method using the connector 24 has become possible.

In this example, G; 1, thickness Y of the insulating base layer 4
N is about 0.2 to 051111.

Furthermore, since the volume resistivity of adsorption layer 2 is as mentioned above,
As shown in the third figure, if the flat plate gap A, which is the adjacent gap between the electrodes 6.8, is about 3 m+i, electrical insulation can be maintained, and the terminal gap B between the plug-in terminals 16 is about 5 m+i. It was recognized that the thickness of the fin was sufficient, and in combination with the above-mentioned adsorption layer 2, it became possible to make a connection using a plug-in terminal and a connector.

In other words, conventionally, the adsorption layer 12 has a resistance value of 1011 to 1.
Using a material with a resistance of 0.09 Ω as a monthly charge and a material with a resistance higher than that as the adsorption layer 12 was not used because it would drastically reduce the adsorption force. Therefore, if the IE of the adsorption layer 12 itself is extremely thick (0,
5 or more), and the production of a flexible plug-in 5III like the one of this invention was unimaginable.

However, in this invention, as the interest rate of the adsorption layer]0
It was found that it was possible to use a material with a resistance value of 12 to 1013 Ω・cm, so the thickness of the adsorption layer was set to 0.2 to Q.
, 3+n, sufficient safety can be maintained, making it possible to realize a flexible plug-in terminal.

However, as described above, in this invention, the plug-in terminal 16
As shown in FIG.
It is now possible to direct the device 180 degrees or by twisting it in the desired direction, increasing the degree of freedom in installation and making the electrostatic adsorption holding device itself extremely compact.

Furthermore, the structure of the plug-in terminal 16 and connector 24 itself is extremely easy to manufacture and has a small number of parts, resulting in low manufacturing costs, fewer failures, and extremely high reliability.

[Brief explanation of the drawing]

1 to 6 show embodiments of the present invention, FIG. 1 is an assembled perspective view showing the structure of the electrostatic chuck plate, FIG. 2 is a plan view of the electrostatic chuck plate, and FIG. 3 is a diagram of the plug-in terminal. 40 is an enlarged plan view, No. 40 is a cross-sectional plane opening of the connector, and FIG. 5.6 is a cross-sectional side view for explaining the flexibility of the plug-in terminal. FIG. 7 is a cross-sectional side view showing the electrical connection state of a conventional electrostatic chuck plate. (Explanation of numbers) In H, 2 is an electrostatic adsorption plate, ・4 is an insulating base layer, 6.8
is an electrode, 12 is an adsorption layer, 14 is a power supply, 16 is a plug terminal,
22 is a connector.

Claims (1)

[Claims] 1. An electrostatic adsorption plate having a flexible insertion terminal, characterized in that the end of the adsorption layer protrudes by a predetermined width, and a power source with both positive and negative polarities is integrally attached to this end.