JPH01297716A - Optical coordinate input device - Google Patents

Abstract

PURPOSE:To heighten insufficient light transmittancy and to surely detect light information by providing a micro hole or pit with light transmittancy at an arbitrary position on a layer. CONSTITUTION:A glass substrate 6 on one side plane of which an ITO film is coated is used, and the ITO of the surface of the plane is formed as a single resistance layer 3, and an amorphous silicon layer 2 is accumulated on the layer by using a CVD method, and furthermore, the ITO film 1 is filmed on the silicon layer 2 by a sputtering method, which forms a resistance layer on the other side. Next, a photoresist is provided, and a pattern which becomes the hole to transmit light is formed, and the hole is formed by a dry etching method. And an electrode 1 can be formed by applying the vapor-deposition of Al on a device precursor forming the hole.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention relates to a coordinate input device used in a coordinate input device, and particularly to an optical coordinate input device.

(Conventional technique @) A coordinate input device is useful as a peripheral device for an information processing device such as a computer in order to input image data, two-dimensional coordinate data, etc. into the information processing device such as a computer. Devices using various methods and various elements have been developed.

For example, (A) an electromagnetic induction method in which a magnetic field is applied to orthogonal wire-shaped electrodes, and the generated signals are read and coordinates are detected; (B) pressure is applied to one electrode of a pair of orthogonal wire-shaped electrodes, and the Touch panel method that detects the position by making contact with the other electrode (C) Human-powered light is detected using a silicon photodiode, etc., and the input light is shunted by an integrated surface resistance layer to detect the position of the input light. Non-scanning method (non-scanning position sensor) (D) 7 LED rays and light receiving element array are combined in a matrix,
There are photoelectric types that detect the position by blocking light, etc. Other methods include electrostatic induction method and ultrasonic method.

(Problems to be Solved by the Invention) The conventional coordinate system (element, system) described above has various problems. In the method (A), in order to improve the resolution of position detection, it is necessary to increase the density of two sets of orthogonal wire-shaped electrodes, which complicates the structure and increases cost.

Furthermore, since a magnetic field is used, there are other problems such as the fact that it does not adversely affect other peripheral parts, such as magnetic recording media. (
In methods B) and (D), in order to improve the resolution, the density of wire-like electrode pairs and arrays must be increased, resulting in a problem that the structure becomes complicated.

In method (C), when inputting information indirectly, for example, when inputting information into an element, there is a problem that the input light may be difficult to pass through, resulting in inaccurate input. There is.

(Means for Solving the Problems) The present invention prevents the complexity of the structure due to higher resolution, which is a problem in manual coordinate systems, and increases the light transmission of the element itself, thereby ensuring accurate input of input information. is a possible coordinate input element.

That is, the present invention uses a photodiode made of silicon or the like, and divides the input light by a surface resistance layer integrated with the diode, and divides the optical output current from the photodiode by the surface resistance layer. In an optical coordinate human-powered device for detecting position, a large number of holes or holes through which light passes are formed at arbitrary positions in a layer (forming a surface) of the device so as to be substantially parallel to input light. This is an optical coordinate human power device characterized by the following.

An example of the present invention is shown in FIG. 1. Since the detection of the same element uses light, each layer is formed as a thin film so as to be transparent or semi-transparent, or the material used and the required precision are In some cases, the light transmittance may not be sufficient to control the amount of light, and the formation of the device is subject to many restrictions. In such a case, as shown in FIG. 2, the insufficient light transmittance can be improved by making a minute light transmitting hole or hole at any position in the layer, which is an essential requirement of the present invention. Accurate optical information can be detected and input without sacrificing performance. The hole or aperture formed at any position in the element of the present invention may have any shape, the position thereof may be selected as necessary, and the size thereof is not particularly limited.

The size of the pores or holes is preferably 5 μm to 500 μm in representative diameter (converted to a diameter of a circle). In addition, the position of the hole or hole may be determined depending on the element to be formed, as well as the required precision and performance. It may be provided only in the layer portion.

In the optical coordinate input device using the optical coordinate input element of the present invention, means are added as necessary to reduce disturbance noise by modulating the incident light or providing an optical filter in the light receiving section of the device. You may. Furthermore, a processing circuit such as an output current amplification amplifier may be added if necessary. Furthermore, if necessary, the device of the present invention may be combined with a liquid crystal or other display device.

(Example) Zero Example 1゜ A glass substrate with ITO film formed on one side was used, and the I
TO is a single-sided resistance layer, and this layer is 2) Iy 7
77.71J':l,; layer. The VD method is used to deposit 7 layers, and then I'T is deposited on the amorphous silicon layer.
0 film was formed by a sputtering method to serve as the other resistance layer. Next, a photoresist was provided to form a pattern of holes through which light could pass, and the holes were formed by dry etching. Electrodes were formed by vacuum evaporating A and Q onto the element precursor in which the holes were formed. FIG. 1 shows the basic configuration of this device. The holes at this time were circular holes with a diameter of 40 μm, and were formed almost uniformly so that the number or distribution of the holes with respect to the plane perpendicular to the stacking direction of the stack of the device was 50% of the transmittance of the device. . Sensing area (detection range)
The area was 100 m x 100 mm. The incident light uses a light emitting diode with a center wavelength of 660 μl and a frequency of 5
Modulated at KHz. The output signal from the element is output to a computer as numerical data through an analog calculation circuit and an A/D converter. FIG. 3 shows a block diagram including external electronic circuits.

Coordinates were input under the above conditions using the element, but
A high resolution of 0.5 membranes was obtained.

(Effect of the invention) In a non-scanning coordinate input device (non-scanning type position sensor) using a flat plate diode, it is possible to achieve high resolution by simplifying the device, or by using the device of the present invention, and further improve image information. Using the element of the present invention, it becomes very possible to input coordinates quickly by tracing.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram of an example of the structure of the element of the present invention, and shows an outline of the holes or the arrangement of the holes. FIG. 3 is a schematic diagram of an example of blocks when performing coordinate manual operation using the same element. Patent applicant: Toyobo Co., Ltd. Q - (Y') Rii Q Procedural amendment (method) 1. Display of the case 1986 Patent Application No. 1290!30 2, Name of the invention Optical coordinate input device 3, Things to be corrected Relationship to the case Patent applicant 2-2-8 Dojimahama, Kita-ku, Osaka City 1988 August 3rd (Delivery port: August 30th, 1988) 5. Subject of amendment: ``Brief description of drawings in the specification column J'' 6. Contents of amendment: ``Diagram 2 Insert "."

Claims (1)

[Claims] (1) In an optical coordinate input element that detects the position of input light by using a photodiode and branching the optical output current through a surface resistance layer, a hole or hole that allows light to pass through any position in the layer of the element What is claimed is: 1. An optical coordinate input element characterized in that a large number of elements are formed so as to be substantially parallel to input light.