JPH01288802A - Light guide and its production - Google Patents
Light guide and its productionInfo
- Publication number
- JPH01288802A JPH01288802A JP63118073A JP11807388A JPH01288802A JP H01288802 A JPH01288802 A JP H01288802A JP 63118073 A JP63118073 A JP 63118073A JP 11807388 A JP11807388 A JP 11807388A JP H01288802 A JPH01288802 A JP H01288802A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- mode field
- optical waveguide
- light guide
- shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 230000003287 optical effect Effects 0.000 claims abstract description 95
- 230000008021 deposition Effects 0.000 claims abstract description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000010453 quartz Substances 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 13
- 239000002019 doping agent Substances 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 239000013307 optical fiber Substances 0.000 abstract description 24
- 239000010419 fine particle Substances 0.000 abstract description 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 238000000151 deposition Methods 0.000 description 14
- 238000010168 coupling process Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005253 cladding Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000012792 core layer Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、光源、受光素子等の能動的光部品と光ファイ
バ等の受動的光部品を接続する光導波路の結合方法に関
する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a method for coupling an optical waveguide between an active optical component such as a light source or a light receiving element and a passive optical component such as an optical fiber.
（従来の技術）
一般に、光通信システムは、光を導波する光ファイバ、
光導波路等の受動的光部品と、光源、受光素子、光スィ
ッチ等の能動的光部品とから構成されている。従って、
受動的光部品と能動的光部品を接続する技術は、光通信
システムを構成する上で必要不可欠である。ここで、能
動的光部品は一般的に半導体デバイスが用いられ、電気
的信号と光信号との相互の変換能力を持たせている。受
動的光部品は石英ガラス、プラスチック、多成分ガラス
等が用いられており、低損失で光を導波させることが重
要である。(Prior Art) Generally, an optical communication system uses an optical fiber that guides light.
It consists of passive optical components such as optical waveguides and active optical components such as light sources, light receiving elements, and optical switches. Therefore,
Technology for connecting passive optical components and active optical components is essential for constructing optical communication systems. Here, a semiconductor device is generally used as the active optical component, and has the ability to mutually convert electrical signals and optical signals. Passive optical components are made of quartz glass, plastic, multi-component glass, etc., and it is important to guide light with low loss.
また、これら能動的光部品と受動的光部品を接続する技
術は現在のところ以下に述べるように３つある。つまり
、光源と光ファイバの接続例で説明すると、第９図に示
すように、光ファイバ２０と光源２１をそのまま形状等
を変えずに突き合わせる直接結合方法、第１０図に示す
ように、光ファイバ２０と光源２１との間にセルフォッ
クレンズ２２を挿入し、これにより光源２１からの光を
集束させて光ファイバ２０に入射させる個別レンズ結合
方法、及び、第１１図に示すように、光ファイバの端面
の形状を加工し、レンズのような集束能力を持たせた先
球光ファイバ２３として光源２１と接続するファイバー
レンズ結合方法である。Furthermore, there are currently three techniques for connecting these active optical components and passive optical components, as described below. That is, to explain an example of connection between a light source and an optical fiber, as shown in FIG. 9, there is a direct coupling method in which the optical fiber 20 and the light source 21 are butted together without changing their shape, etc., and as shown in FIG. As shown in FIG. This is a fiber-lens coupling method in which the shape of the end face of the fiber is processed to connect it to the light source 21 as a tipped optical fiber 23 that has a lens-like focusing ability.
（発明が解決しようとする課題）
しかしながら、従来の光導波路の結合方法において、従
来の直接結合方法は以下の理由により接続ロスが約１０
ｄＢと大きいという問題点がある。(Problem to be Solved by the Invention) However, in the conventional optical waveguide coupling method, the conventional direct coupling method has a connection loss of about 10% due to the following reasons.
There is a problem that it is as large as dB.
つまり、光ファイバ、光導波路等の受動的光部品は伝搬
する光パワーの分布がガウス型でモードフィールド径が
約１０ＩＩ１１の円である。一方、能動的光部品は半導
体の製造上及び駆動回路の性質上の理由により第１２図
に示すようにモードフィールドは楕円形であり、短径が
約１μｍ、長径が約５μｍとなる０両光部品のモードフ
ィールドの違い（形状、大きさ）により両者の接続ロス
は１０ｄＢ程度となってしまう。また、レンズを介した
個別レンズ結合方法は、光学系が複雑となるために、組
立作業性、コストの点で問題点があり、更に、ファイバ
ーレンズ結合方法ではファイバ端面のレンズ加工はレン
ズ径がファイバ外径によって制限され自由に選べない上
に、楕円形のモードフィールドには対応出来ないという
問題点があった。That is, in passive optical components such as optical fibers and optical waveguides, the distribution of propagating optical power is Gaussian, and the mode field diameter is a circle with a diameter of about 10II11. On the other hand, active optical components have an elliptical mode field with a short axis of about 1 μm and a long axis of about 5 μm, as shown in Figure 12, due to semiconductor manufacturing and the properties of the drive circuit. Due to the difference in mode field (shape, size) of the parts, the connection loss between the two ends up being about 10 dB. In addition, the method of combining individual lenses via lenses has problems in terms of assembly workability and cost because the optical system becomes complicated.Furthermore, in the fiber lens combining method, the lens diameter is limited when processing the lens on the end face of the fiber. There are problems in that it cannot be freely selected because it is limited by the outer diameter of the fiber, and it cannot support an elliptical mode field.
本発明は、上記事情に鑑みてなされたものであり、受動
的光部品と能動的光部品の接続を低接続損失で行う光導
波路及びその製造方法を提供することを目的とする。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an optical waveguide that connects a passive optical component and an active optical component with low connection loss, and a method for manufacturing the same.
（課題を解決するための手段）
上記目的を達成するために、本発明によれば、その両端
面に結合される光部品のモードフィールド形状と一致し
たモードフィールド形状を夫々の端面に有し、その内部
でモードフィールドが連続的に変化して両端面のモード
フィールドが連続している光導波路が提供され、また、
光を導波する受動的光部品と、光電変換能力を有する能
動的光部品との間に、夫々のコアが一致するように光導
波路を介挿し密着して、前記受動的光部品と前記能動的
光部品とを結合して成る光導波路結合体が提供され、更
に、光導波路を石英により形成し、そのコア径、コア形
状及び屈折率の変化を火炎堆積中の堆積パターン、ドー
パント種類、濃度を変えて構成する光導波路の製造方法
が提供される。(Means for Solving the Problems) In order to achieve the above object, according to the present invention, each end face has a mode field shape that matches the mode field shape of an optical component coupled to both end faces thereof, An optical waveguide is provided in which the mode field changes continuously within the optical waveguide so that the mode fields at both end faces are continuous, and
An optical waveguide is inserted between a passive optical component that guides light and an active optical component that has a photoelectric conversion ability so that their respective cores match, and the optical waveguide is brought into close contact with the passive optical component and the active optical component. An optical waveguide assembly is provided in which the optical waveguide is formed of quartz, and the core diameter, core shape, and refractive index changes are determined by the deposition pattern, dopant type, and concentration during flame deposition. A method of manufacturing an optical waveguide configured by changing the structure is provided.
（作用）
モードフィールド形状が異なる光部品の結合を、両端の
モードフィールドが接続しようとする各光部品のモード
フィールドと一致している光導波路を両者の間に介挿し
て行い、低接続損失で光部品を結合する。(Function) Optical components with different mode field shapes are coupled by inserting an optical waveguide between them whose mode fields at both ends match the mode field of each optical component to be connected, resulting in low connection loss. Combine optical components.
（実施例）
以下、本発明の実施例を添付図面に基づいて詳細に説明
する。(Example) Hereinafter, an example of the present invention will be described in detail based on the accompanying drawings.
第１図は本発明の光導波路の一実施例を示す断面図であ
り、第２図は第１図の光導波路の上面図である０本発明
では、受動的光部品と能動的光部品との間に両光部品の
モードフィールド形状に一致したモードフィールド形状
を両端面に持ち、かつこの両端面のモードフィールド形
状を連続的に変化させた光導波路２を挿入することで、
受動的光部品と能動的光部品との接続を低損失で行うこ
とができる光導波路を提供するものである。第１図は受
動的光部品１が光ファイバであり、能動的光部品３が発
光ダイオ−・ドであり、そして光導波路２が石英系光導
波路とした実施例である。光ファイバ１と発光ダイオー
ド３の間に光導波路２が介挿され、夫々の光が導波する
コア部分が位置的に一致するように配置されている。ま
た、これらの接続部及び発光ダイオード素子３の温度変
化を極力避けるために、光ファイバ１、光導波路２及び
発光ダイオード３をヒートシンク７上にセットしている
。FIG. 1 is a sectional view showing an embodiment of the optical waveguide of the present invention, and FIG. 2 is a top view of the optical waveguide of FIG. By inserting an optical waveguide 2 between which has a mode field shape on both end faces that matches the mode field shape of both optical components, and whose mode field shape on both end faces is continuously changed,
The present invention provides an optical waveguide that can connect passive optical components and active optical components with low loss. FIG. 1 shows an embodiment in which the passive optical component 1 is an optical fiber, the active optical component 3 is a light emitting diode, and the optical waveguide 2 is a quartz optical waveguide. An optical waveguide 2 is interposed between the optical fiber 1 and the light emitting diode 3, and is arranged so that the core portions through which the respective lights are guided are coincident in position. In addition, the optical fiber 1, the optical waveguide 2, and the light emitting diode 3 are set on a heat sink 7 in order to avoid temperature changes in these connecting parts and the light emitting diode element 3 as much as possible.
尚、光ファイバ１は円形であるのでヒートシンク７上に
適当な固定治具８を用意して光ファイバ１を固定してお
り、光導波路２及び発光ダイオード３は接着剤等でヒー
トシンク７上に固定している。ここで、光ファイバ１及
び発光ダイオード３は夫々通常用いられている光ファイ
バ及び光源素子である。光導波路２は光ファイバ１と光
導波路２との間及び光導波路２と発光ダイオード３との
間でモードフィールドのミスマツチがないようにコア径
、屈折率値を一致させ、これを光導波路２内で連続的に
変化させている。Since the optical fiber 1 is circular, a suitable fixing jig 8 is prepared on the heat sink 7 to fix the optical fiber 1, and the optical waveguide 2 and the light emitting diode 3 are fixed on the heat sink 7 with adhesive or the like. are doing. Here, the optical fiber 1 and the light emitting diode 3 are a commonly used optical fiber and a light source element, respectively. The optical waveguide 2 has the same core diameter and refractive index value so that there is no mode field mismatch between the optical fiber 1 and the optical waveguide 2 and between the optical waveguide 2 and the light emitting diode 3. is continuously changed.
次に、本発明の光導波路の製造方法について説明する。Next, a method for manufacturing an optical waveguide according to the present invention will be explained.
火炎堆積法の概略は第７図のように例えばシリコンＳｔ
等の基板４上に、Ｈｚ、Ｏｚによるフレームに例えば、
３ ｉＣＩ ４ 、 Ｔ ｉＣＩ ａなど等の原料を導
入して形成されるガラス微粒子を堆積するものであり、
バーナー１０の移動径路を変えることでつまり移動ピッ
チを疎密にすることにより堆積量を変化させ任意の厚さ
とし、また原料の温度、量を変えることで任意の屈折率
を有する光導波路が作成可能である。具体的な製造方法
の手順は以下のようである。The outline of the flame deposition method is shown in Fig. 7, for example, using silicon St.
For example, on the board 4 of
3. Glass fine particles formed by introducing raw materials such as iCI 4 and TiCI a are deposited,
By changing the moving path of the burner 10, that is, by making the moving pitch more or less dense, the amount of deposition can be changed to achieve an arbitrary thickness, and by changing the temperature and amount of raw materials, it is possible to create an optical waveguide with an arbitrary refractive index. be. The specific steps of the manufacturing method are as follows.
（１） 基板４上に、第８図のような堆積パターンで
ＳｉＯ□微粒子を堆積させる。第８図の上部が第１図の
左側となる。これにより、クラッド１２ｂが形成される
。(1) SiO□ fine particles are deposited on the substrate 4 in a deposition pattern as shown in FIG. The upper part of FIG. 8 is the left side of FIG. This forms the cladding 12b.
（２）その上にＳｉＯ□とこのＳｉＯ□より屈折率が高
くなる材料例えばＴ ｉ Ｏｚを添加した層を、第８図
の堆積パターンと上下が逆のパターンつまり上が密、下
が粗で堆積させる。また、この堆積中、ＳｔＯ□に添加
する材料の濃度、量を徐々に高めてゆき、光ファイバ１
と光導波路２との間及び光導波路２と発光ダイオード３
との間でモードフィールドのミスマツチが起こらない屈
折率、コア幅を形成する。これにより、コア層２ａが形
成される。(2) On top of that, a layer doped with SiO□ and a material with a higher refractive index than SiO□, for example, TiOz, is deposited in a pattern that is upside down from the deposition pattern in Figure 8, that is, the top is dense and the bottom is coarse. deposit Also, during this deposition, the concentration and amount of the material added to StO□ are gradually increased, and the optical fiber 1
and the optical waveguide 2 and between the optical waveguide 2 and the light emitting diode 3
The refractive index and core width are determined such that mode field mismatch does not occur between the two. Thereby, the core layer 2a is formed.
（３）以上の手順により形成されたものを適当な温度で
加熱し、透明ガラス化する。(3) The material formed by the above procedure is heated at an appropriate temperature to make it transparent vitrified.
（４）コア層２ａを半導体素子の作成などで使用されて
いるエツチング技術を用いてエツチング処理し、第２図
の光導波路２のようなコア径を有するコア２ａを作成す
る。(4) The core layer 2a is etched using an etching technique used in the production of semiconductor devices to produce a core 2a having a core diameter similar to that of the optical waveguide 2 shown in FIG.
（５）その上に手順（１）と同様の堆積パターンでＳｔ
Ｏ□を堆積させてクラッド層２ｂ’ を形成する。(5) On top of that, apply St.
A cladding layer 2b' is formed by depositing O□.
（６） このようにして形成されたものを再度ガラス
化する。(6) The material thus formed is vitrified again.
本発明では、光ファイバ１、光導波路２及び発光ダイオ
ード３を固定する固定方法は、第１図の方法に限られる
ものではなく、ヒートシンク７上に光ファイバ１、光導
波路２、発光ダイオード３の固定治具をつけてもよい、
また、光導波路２に光ファイバｌ及び発光ダイオード３
を挿入しであるいは光ファイバ１及び発光ダイオード３
に光導波路２を挿入して固定してもよい、ヒートシンク
７は必要がなければ除いてもよい、能動的光部品と受動
的光部品を突き合わせる際に、光ファイバｌと光導波路
２との接続面及び先導波器２と発光ダイオード３との接
続面は必要に応じて屈折率が路間等なマツチングオイル
等を浸してもよい、先導波器２の形状は光ファイバ１と
発光ダイオード３のモードフィールド形状が一致し、光
導波路２内でこのモードフィールドが連続的に変化する
ものであれば任意の形状でよい。In the present invention, the method of fixing the optical fiber 1, the optical waveguide 2, and the light emitting diode 3 is not limited to the method shown in FIG. A fixing jig may be attached.
In addition, an optical fiber l and a light emitting diode 3 are connected to the optical waveguide 2.
or by inserting optical fiber 1 and light emitting diode 3
The optical waveguide 2 may be inserted and fixed in the heat sink 7. The heat sink 7 may be removed if it is not necessary. The connection surface and the connection surface between the waveguide device 2 and the light emitting diode 3 may be soaked with matching oil or the like having a refractive index between the optical fibers 1 and the light emitting diode 3, if necessary. Any shape may be used as long as the mode field shapes of the optical waveguides 3 and 3 match and this mode field changes continuously within the optical waveguide 2.
また、光導波路２の製造方法において、コア幅つまりコ
アの高さ方向の厚さを変える方法は、必ずしも第８図の
堆積パターンに限られず、使用する装置の性能に応じて
任意のパターンとすることができる。必要であれば複数
回堆積させることもできる。同様に、コア屈折率を変え
る方法は必ずしも１種類のドーパントの濃度、量を変え
る方法に限られず、例えば、屈折率を下げる場合には屈
折率を下げるＢｚ Ｏ，、Ｆ等の材料を更に添加しても
よく、逆に屈折率を上げる場合には屈折率を上げるＰよ
Ｏｓ、Ｇｅ０ｔ等の材料を添加してもよい。In addition, in the method of manufacturing the optical waveguide 2, the method of changing the core width, that is, the thickness of the core in the height direction is not necessarily limited to the deposition pattern shown in FIG. 8, but any pattern may be used depending on the performance of the equipment used. be able to. Multiple depositions can be performed if necessary. Similarly, the method of changing the core refractive index is not necessarily limited to changing the concentration or amount of one type of dopant; for example, when lowering the refractive index, it is possible to further add materials such as Bz O, F, etc. that lower the refractive index. On the other hand, in order to increase the refractive index, materials such as P, Os, Ge0t, etc. that increase the refractive index may be added.
（発明の効果）
以上説明したように、本発明によれば、その両端面に結
合される光部品のモードフィールド形状と一致したモー
ドフィールド形状を夫々の端面に有しその内部でモード
フィールドが連続的に変化して両端面のモードフィール
ドが連続していることにより、また、光を導波する受動
的光部品と、光電変換能力を有する能動的部品との間に
、夫々のコアが一致するように光導波路を介挿し密着し
て、前記受動的光部品と前記能動的光部品とを結合して
成ることにより、更に、光導波路を石英により形成し、
そのコア径、コア形状及び屈折率の変化を火炎堆積中の
堆積パターン、ドーパント種類、濃度を変えて構成する
ことにより、従来の受動的光部品と能動的光部品の接続
損失の主な原因であったモードフィールドのミスマツチ
がなくせるために、能動的光部品と受動的光部品とを低
接続損失で接続できるという効果が得られる。(Effects of the Invention) As explained above, according to the present invention, each end face has a mode field shape that matches the mode field shape of the optical component coupled to both end faces, and the mode field is continuous inside the end face. The continuous mode fields on both end faces change the optical density, and the cores of the passive optical components that guide light and the active components that have photoelectric conversion ability match. Further, the optical waveguide is formed of quartz by interposing an optical waveguide and bringing the passive optical component and the active optical component into close contact with each other.
By configuring the core diameter, core shape, and refractive index by changing the deposition pattern, dopant type, and concentration during flame deposition, it is possible to eliminate the main cause of connection loss between conventional passive and active optical components. Since mismatches in mode fields can be eliminated, it is possible to connect active optical components and passive optical components with low connection loss.
第１図は本発明の光導波路の一実施例を示す断面図、第
２図は第１図の光導波路の上面図、第３図、第４図、第
５図及び第６図は夫々第２図の断面ＩＩＩ −ＩＩＩ
、 ＩＶ−ＴＶ、、Ｖ−Ｖ及びＶｌ−νＩの断面図、第
７図は火炎堆積法の概略説明図、第８図は堆積パターン
を示す図、第９図、第１０図及び第１１図は夫々従来の
発光ダイオードと光ファイバの結合方法を例示する図、
第１２図は発光ダイオードのフィールドパターンを説明
する斜視図である。
１・・・光ファイバ、２・・・光導波路、３・・・発光
ダイオード、４・・・基板、７・・・ヒートシンク、８
・・・光フアイバ固定用治具、１０・・・バーナ、１１
・・・ダクト。FIG. 1 is a sectional view showing an embodiment of the optical waveguide of the present invention, FIG. 2 is a top view of the optical waveguide shown in FIG. 1, and FIGS. Cross section III-III in Figure 2
, IV-TV, , V-V and Vl-νI cross-sectional diagrams, FIG. 7 is a schematic explanatory diagram of the flame deposition method, FIG. 8 is a diagram showing the deposition pattern, FIGS. 9, 10, and 11. are diagrams illustrating a conventional method of coupling a light emitting diode and an optical fiber, respectively.
FIG. 12 is a perspective view illustrating a field pattern of a light emitting diode. DESCRIPTION OF SYMBOLS 1... Optical fiber, 2... Optical waveguide, 3... Light emitting diode, 4... Substrate, 7... Heat sink, 8
... Optical fiber fixing jig, 10... Burner, 11
···duct.
Claims (3)
ド形状と一致したモードフィールド形状を夫々の端面に
有し、その内部でモードフィールドが連続的に変化して
両端面のモードフィールドが連続していることを特徴と
する光導波路。(1) Each end face has a mode field shape that matches the mode field shape of the optical component coupled to both end faces, and the mode field changes continuously within the end face, so that the mode field on both end faces is continuous. An optical waveguide characterized by:
する能動的部品との間に、夫々のコアが一致するように
光導波路を介挿し密着して、前記受動的光部品と前記能
動的光部品とを結合して成ることを特徴とする光導波路
結合体。(2) An optical waveguide is inserted between a passive optical component that guides light and an active component that has a photoelectric conversion ability so that their respective cores are aligned, and the optical waveguide is brought into close contact with the passive optical component. An optical waveguide combination body, characterized in that it is formed by combining the above-mentioned active optical component.
形状及び屈折率の変化を火炎堆積中の堆積パターン、ド
ーパント種類、濃度を変えて構成することを特徴とする
光導波路の製造方法。(3) A method for manufacturing an optical waveguide, characterized in that the optical waveguide is formed of quartz, and its core diameter, core shape, and refractive index are changed by changing the deposition pattern, dopant type, and concentration during flame deposition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63118073A JPH01288802A (en) | 1988-05-17 | 1988-05-17 | Light guide and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63118073A JPH01288802A (en) | 1988-05-17 | 1988-05-17 | Light guide and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01288802A true JPH01288802A (en) | 1989-11-21 |
Family
ID=14727333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63118073A Pending JPH01288802A (en) | 1988-05-17 | 1988-05-17 | Light guide and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01288802A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05134151A (en) * | 1991-11-15 | 1993-05-28 | Sharp Corp | Optically coupled optical device |
| JPH05323139A (en) * | 1992-05-20 | 1993-12-07 | Nippon Telegr & Teleph Corp <Ntt> | Optical coupling device |
| WO1997047998A1 (en) * | 1996-06-14 | 1997-12-18 | Hitachi, Ltd. | Optical waveguide and optical device |
| JP2005331967A (en) * | 2005-06-24 | 2005-12-02 | Fujitsu Ltd | Optical coupling apparatus |
| JP2007079225A (en) * | 2005-09-15 | 2007-03-29 | Nippon Telegr & Teleph Corp <Ntt> | Connecting method of wavelength conversion element and connecting member |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58179350U (en) * | 1982-05-24 | 1983-11-30 | 松下電器産業株式会社 | Ceiling inspection device in bus unit |
| JPS60175662A (en) * | 1984-02-23 | 1985-09-09 | 松下電器産業株式会社 | Equipment unit such as bath unit |
-
1988
- 1988-05-17 JP JP63118073A patent/JPH01288802A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58179350U (en) * | 1982-05-24 | 1983-11-30 | 松下電器産業株式会社 | Ceiling inspection device in bus unit |
| JPS60175662A (en) * | 1984-02-23 | 1985-09-09 | 松下電器産業株式会社 | Equipment unit such as bath unit |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05134151A (en) * | 1991-11-15 | 1993-05-28 | Sharp Corp | Optically coupled optical device |
| JPH05323139A (en) * | 1992-05-20 | 1993-12-07 | Nippon Telegr & Teleph Corp <Ntt> | Optical coupling device |
| WO1997047998A1 (en) * | 1996-06-14 | 1997-12-18 | Hitachi, Ltd. | Optical waveguide and optical device |
| JP2005331967A (en) * | 2005-06-24 | 2005-12-02 | Fujitsu Ltd | Optical coupling apparatus |
| JP2007079225A (en) * | 2005-09-15 | 2007-03-29 | Nippon Telegr & Teleph Corp <Ntt> | Connecting method of wavelength conversion element and connecting member |
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