JPH01282410A - Curved surface nature inspection device - Google Patents

Curved surface nature inspection device

Info

Publication number
JPH01282410A
JPH01282410A JP63112054A JP11205488A JPH01282410A JP H01282410 A JPH01282410 A JP H01282410A JP 63112054 A JP63112054 A JP 63112054A JP 11205488 A JP11205488 A JP 11205488A JP H01282410 A JPH01282410 A JP H01282410A
Authority
JP
Japan
Prior art keywords
light
curved surface
inspection
section
data file
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63112054A
Other languages
Japanese (ja)
Other versions
JPH061173B2 (en
Inventor
Shigeki Kobayashi
茂樹 小林
Yasuaki Tanimura
谷村 保明
Teruhisa Yotsuya
輝久 四ツ谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Priority to JP63112054A priority Critical patent/JPH061173B2/en
Priority to EP89905170A priority patent/EP0413817B1/en
Priority to AT89905170T priority patent/ATE135110T1/en
Priority to DE68929481T priority patent/DE68929481T2/en
Priority to DE68929062T priority patent/DE68929062T2/en
Priority to SG1996004112A priority patent/SG47736A1/en
Priority to SG1996003498A priority patent/SG66545A1/en
Priority to SG1996003459A priority patent/SG47652A1/en
Priority to AU35436/89A priority patent/AU3543689A/en
Priority to EP95113574A priority patent/EP0687901B1/en
Priority to EP95113579A priority patent/EP0685732B1/en
Priority to US07/601,722 priority patent/US5245671A/en
Priority to PCT/JP1989/000470 priority patent/WO1989011093A1/en
Priority to KR1019900700025A priority patent/KR920006031B1/en
Priority to DE68925901T priority patent/DE68925901T2/en
Publication of JPH01282410A publication Critical patent/JPH01282410A/en
Publication of JPH061173B2 publication Critical patent/JPH061173B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95684Patterns showing highly reflecting parts, e.g. metallic elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To achieve the automation in a solder inspection, by a method wherein red, green and blue light are generated separately from three ring-shaped light emitting bodies and the quantity of light is adjusted to emit white light when the light of each light emitting bodies is synthesized. CONSTITUTION:Red, green and blue lights radiated from light emitting bodies 28-30 are mixed and adjusted 31 in quantity of light in terms of hue to emit white light. Reflected light from a substrate 20S or 20T is converted into three primary color signals R, G and B with a color TV camera 32 to be supplied to a processing section 26. At this processing section 26, in a teaching mode, the signals R, G and B are processed for the positioning substrate 20S and red, green and blue hue patterns of a part 21S good in soldering condition are detected to prepare a criterion data file. In an inspection mode, the same operation is performed with a substrate 20T to be inspected to prepare a inspection data file of parts 21T. The inspection data file is compared with the criterion data file to judge the propriety of a soldered part automatically for the parts 21T.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 この発明は、表面の曲面性状が異なる方向に配向してい
る多数の曲面要素の集合より成る曲面体につき、各曲面
要素の配向性を検出するのに適用される曲面性状検査装
置に関連し、殊にこの発明は、基板上に実装された部品
につき、そのハンダ付は部分の形状などを検査するのに
好適な曲面性状検査装置に関する。
[Detailed Description of the Invention] <Industrial Application Field> The present invention detects the orientation of each curved surface element in a curved body consisting of a set of a large number of curved surface elements whose surface properties are oriented in different directions. In particular, the present invention relates to a curved surface property inspection apparatus suitable for inspecting the shape of a soldered part of a component mounted on a board.

〈従来の技術〉 多配向性曲面をもつ曲面体として、基板上に実装された
部品におけるハンダ付は部位の表面形状がその代表例に
挙げられる。従来このハンダ付は部位は、目視検査によ
り検査されており、ハンダ付は状態の良否、すなわちハ
ンダの有無。
<Prior Art> A typical example of soldering in a component mounted on a board as a curved body having a multi-oriented curved surface is the surface shape of the part. Conventionally, this soldering part is inspected by visual inspection, and the soldering is in good condition, that is, the presence or absence of solder.

量、溶解性、短絡、導通不良などがこの目視検査によっ
て判定されている。
This visual inspection determines the amount, solubility, short circuits, poor continuity, etc.

ところがこのような目視検査による方法では、検査ミス
の発生が避けられず、判定結果も検査する者によりまち
まちであり、また検査処理能力にも限界がある。
However, in such a visual inspection method, the occurrence of inspection errors is unavoidable, the judgment results vary depending on the person conducting the inspection, and there is a limit to the inspection processing capacity.

そこで近年、この種の検査を自動的に行うことができる
自動検査装置が各種提案されている。
Therefore, in recent years, various automatic inspection devices that can automatically perform this type of inspection have been proposed.

ところでハンダ付は部位の表面形状は、3次元の拡がり
をもつ立体形状であって、これを検査するには、3次元
の形状情報を検出できることが不可欠の条件となる。
By the way, the surface shape of a soldering part is a three-dimensional shape with three-dimensional expansion, and in order to inspect this, it is essential to be able to detect three-dimensional shape information.

第3図はこの条件を満たす自動検査装置の一例を示すも
のであり、レーザなどの光源から板状をなすスリット光
1を基板2上のハンダ付は部位へ照射している。このス
リット光1の照射により、ハンダ付は部位を含む基板2
の表面には、立体形状に沿って歪を受けた光切断線3が
生成されるもので、その光切断線3の反射光像を撮像装
置4で撮像して、そのt層像パターンの歪状態をチエツ
クすることにより、ハンダ付は部位の立体形状を検出す
る。
FIG. 3 shows an example of an automatic inspection device that satisfies this condition, in which a plate-shaped slit light 1 is irradiated from a light source such as a laser onto the soldering area on the board 2. By irradiating this slit light 1, soldering is performed on the board 2 including the parts.
A light section line 3 that is distorted along the three-dimensional shape is generated on the surface of the t-layer, and a reflected light image of the light section line 3 is captured by an imaging device 4 to detect the distortion of the T-layer image pattern. By checking the condition, the three-dimensional shape of the soldering part is detected.

ところがこの検査方法の場合、スリット光1が照射され
た部分の形状情報が得られるのみであって、それ以外の
部分の立体形状を把握することは困難である。しかもハ
ンダ付は部位の表面は、その配向方向が基板2の垂直方
向に対して不定であるため、光源と撮像装置4との組み
合わせが少なくとも4組以上は必要であり、これがため
装置が複雑化し、かつ高精度の組立作業が必要となり、
コスト高を招くなどの問題がある。
However, in the case of this inspection method, only the shape information of the portion irradiated with the slit light 1 is obtained, and it is difficult to grasp the three-dimensional shape of the other portions. Moreover, since the orientation direction of the surface of the soldering part is not fixed with respect to the vertical direction of the substrate 2, at least four combinations of light sources and imaging devices 4 are required, which makes the device complicated. , and requires high-precision assembly work.
There are problems such as high costs.

そこでこの種問題を解消した方法として、検査対象であ
る曲面体の表面へ入射角が異なる光を照射し、曲面体の
表面からの各反射光像を撮像して、それぞれの撮像パタ
ーンより曲面体の有する各曲面要素の配向性を検出する
という方法が存在する。この方法の原理は、3次元画像
情報検出のひとつである「アクティブ・センシング法」
に属するものである。すなわちこの方法は、一定のパタ
ーンをもった光束を検査対象に投光したとき、その検査
対象から得られる反射光束のパターンが検査対象の立体
的形状に対応して変形を受けることに着目したもので、
その変形パターンから検査対象の形状を推定するという
方法である。
Therefore, as a method to solve this kind of problem, the surface of the curved surface to be inspected is irradiated with light having different incident angles, and each reflected light image from the surface of the curved surface is imaged, and the curved surface is There is a method of detecting the orientation of each curved surface element. The principle of this method is the "active sensing method", which is a type of three-dimensional image information detection.
It belongs to In other words, this method focuses on the fact that when a light beam with a certain pattern is projected onto an inspection object, the pattern of the reflected light beam obtained from the inspection object undergoes deformation corresponding to the three-dimensional shape of the inspection object. in,
This method estimates the shape of the object to be inspected from the deformation pattern.

第4図は、この方法の原理説明図であり、投光装置5と
撮像装置6とから成る検出系と、検査対象である曲面体
7との位置関係を示している。
FIG. 4 is a diagram explaining the principle of this method, and shows the positional relationship between a detection system consisting of a light projection device 5 and an imaging device 6, and a curved object 7 to be inspected.

同図において、投光装置5より曲面体7の表面に対して
入射角iで光束8を投光すると、角度i’  (=i)
の反射光束9が真上に置かれた撮像装置6に入射して検
出される。これにより前記光束8で照明された曲面体7
の曲面要素は基準面lOに対してiの角度をなして配向
していることが検出されたことになる。従ってもし曲面
体7の表面性状が、ハンダ付は面のように異なる方向に
配向している多数の曲面要素から成るものであれば、入
射角が異なる複数の投光装置を用いて曲面体7の表面に
投光すれば、それぞれの入射角に対応する曲面要素の群
が撮像装置6により検出され、これにより曲面体7表面
の各曲面要素がそれぞれどんな配向をしているか、すな
わちハンダ付は部位の表面性状がどのようであるかを検
出できる。
In the figure, when the light beam 8 is projected from the light projector 5 onto the surface of the curved surface body 7 at an incident angle i, the angle i' (=i)
The reflected light beam 9 enters the imaging device 6 placed directly above and is detected. As a result, the curved surface 7 illuminated by the light beam 8
This means that it has been detected that the curved surface element of is oriented at an angle of i with respect to the reference plane lO. Therefore, if the surface texture of the curved surface body 7 is composed of a large number of curved surface elements oriented in different directions, such as a soldering surface, the curved surface body 7 can be When light is projected onto the surface of the curved body 7, groups of curved surface elements corresponding to each incident angle are detected by the imaging device 6, and from this, it is possible to determine the orientation of each curved surface element on the surface of the curved surface body 7, that is, whether soldering is performed or not. It is possible to detect what the surface texture of a site is like.

また投光装置5が、入射角がi+Δiからi−Δiまで
2Δiの幅をもつ光束8を投光するならば、その幅に対
応した幅を有する反射光束9が撮像装置6により検出さ
れることになる。
Furthermore, if the light projecting device 5 projects a light beam 8 having a width of 2Δi from an incident angle of i+Δi to i-Δi, a reflected light beam 9 having a width corresponding to the width will be detected by the imaging device 6. become.

すなわちこの場合は、基準面10となす傾斜角がi+Δ
iからi−Δiまでの幅の角度をもつ曲面要素が検出で
きることになる。
That is, in this case, the inclination angle with respect to the reference plane 10 is i+Δ
A curved surface element having an angle width from i to i-Δi can be detected.

さらに投光装置5が、第5図に示す如く、基準面10に
対して水平に設置されたリング状のものであれば、曲面
体7が基準面10に垂直な軸に対してどのような回転角
をもっていても、投光装置5と曲面体7との距離は一定
であり、曲面要素の回転角方向の配向性は消去されるの
で、基準面10となす傾斜角だけが検出されることにな
る。
Furthermore, if the projector 5 is of a ring shape installed horizontally with respect to the reference plane 10 as shown in FIG. Even if there is a rotation angle, the distance between the light projector 5 and the curved surface body 7 is constant, and the orientation of the curved surface element in the rotation angle direction is erased, so that only the inclination angle formed with the reference plane 10 is detected. become.

またこの第5図に示すように、投光装置5を曲面体7へ
の入射角が異なる複数のリング状発光体11,12.1
3をもって構成すれば、各発光体による光束14,15
.16の入射角に対応した配向をもつ曲面要素がそれだ
け詳細に検出できることは前述したとおりである。
Further, as shown in FIG.
3, the luminous flux 14, 15 from each light emitter
.. As described above, a curved surface element having an orientation corresponding to an angle of incidence of 16 can be detected in greater detail.

いま半径がr、、(ただしn =i、2.3 )の3個
のリング状の発光体11,12.13を基準面10に対
して高さh n  (n −1+2+3 )の位置に水
平に設置すれば、曲面体7への各光束14゜15.16
の入射角はそれぞれi、、(n=1.2゜3)となり、
曲面体7における傾斜角がそれぞれi、、である各曲面
要素を撮像装置6により検出することができる。このと
き各発光体11゜12.13から曲面体7の表面を経て
↑層像装置6に至る全光路長に比して曲面要素の大きさ
が十分に小さいので、次式により入射角、すなわち検出
しようとする曲面要素の傾斜角を定めればよい。
Now, three ring-shaped light emitters 11, 12, 13 with radius r, (where n = i, 2.3) are placed horizontally at a height h n (n -1+2+3) with respect to the reference plane 10. If installed at
The incident angles of are respectively i, , (n=1.2゜3),
Each curved surface element in the curved surface body 7 having an inclination angle of i can be detected by the imaging device 6. At this time, since the size of the curved surface element is sufficiently small compared to the total optical path length from each light emitting body 11° 12.13 to the ↑layer imager 6 via the surface of the curved surface body 7, the angle of incidence is determined by the following formula, What is necessary is to determine the inclination angle of the curved surface element to be detected.

上記の原理に基づきハンダ付は部位の外観を検査する方
法として、前記の各発光体11.12゜13に白色光源
を用いたものが提案されている(特開昭61−2936
57号)。この検査方法においては、ハンダ付は面に対
する入射角の異なる3個の発光体11,12.13によ
る反射光像を相互に識別するために、それぞれ発光体1
1゜12.13を時間的に異なったタイミングで点灯し
、また消灯している。
Based on the above principle, a method using a white light source for each of the light emitters 11, 12 and 13 has been proposed as a method for inspecting the appearance of soldering parts (Japanese Patent Laid-Open No. 61-2936
No. 57). In this inspection method, in order to mutually identify the reflected light images by the three light emitters 11, 12, and 13 having different incident angles with respect to the surface, the soldering
1°12.13 are turned on and off at different timings.

〈発明が解決しようとする問題点〉 しかしながらこのような方法では、異なる投光タイミン
グで得た各画像を貯蔵するためのメモリや、これら画像
を同一視野像として演算処理するための演算装置や、各
発光体を瞬間的に点灯動作させるための点灯装置などが
必要であり、技術面での煩雑さが多く、またそれがコス
ト面や信頼性の面で課題となっている。
<Problems to be Solved by the Invention> However, such a method requires a memory for storing each image obtained at different light projection timings, an arithmetic device for processing these images as a same visual field image, A lighting device or the like is required to instantaneously turn on each light emitting body, which is technically complex and poses problems in terms of cost and reliability.

そこでこのようなタイム・シェアリング方式の課題を一
挙に解消する方法として、ワイヤのような線状物体を検
査する装置として提案された方法が存在する(特開昭6
2−127617号)。この方法では、検査対象に対す
る入射角の異なる3個の発光体として、赤、緑、青の三
原色光源を用いており、検査対象からの赤色、緑色、青
色の各反射光像をカラーテレビカメラのような色相感知
型の撮像装置により同一タイミングで分離して検出する
ものである。
Therefore, as a method to solve the problems of such time-sharing methods all at once, there is a method proposed for an apparatus for inspecting linear objects such as wires (Japanese Patent Application Laid-open No. 6
2-127617). In this method, three primary color light sources of red, green, and blue are used as three light emitters with different angles of incidence on the inspection object, and the red, green, and blue reflected light images from the inspection object are captured by a color television camera. They are separated and detected at the same timing using a hue-sensing type imaging device such as this.

この方法をハンダ付は部位の自動検査装置に適用すると
、ハンダ付は部位の曲面性状を短時間で検出することは
理論上可能となるが、基板上の各部位に関する情報(例
えば部品番号、極性、カラーコードなど)や基板パター
ン情報(種々のマークなど)のような基板実装部品の自
動検査に不可欠な周辺情報を検出する工夫がなされてい
ないため、このままでは装置の実用化は到底困難である
If this method is applied to an automatic inspection device for soldering parts, it is theoretically possible to detect the curved surface properties of soldering parts in a short time, but information about each part on the board (e.g. part number, polarity, etc.) is theoretically possible. , color codes, etc.) and board pattern information (various marks, etc.), which is essential for automatic inspection of board-mounted components, has not been devised to detect peripheral information that is essential for automatic inspection of board-mounted components. .

この発明は、上記問題に着目してなされたもので、各発
光体の照射光を合成すると白色光となるように工夫する
ことにより、ハンダ付は部位などの曲面体の曲面性状を
短時間で検出でき、しかも実際の検査に不可欠な周辺情
報の検出をも可能とした新規な曲面性状検査装置を提供
することを目的とする。
This invention was made by focusing on the above problem, and by devising a way to combine the irradiated light from each light emitting body to produce white light, soldering can quickly change the curved surface properties of curved objects such as parts. It is an object of the present invention to provide a novel curved surface property inspection device that can detect and also detect peripheral information essential for actual inspection.

〈問題点を解決するための手段〉 上記目的を達成するため、この発明では、曲面体の表面
へ入射角が異なる赤色光、緑色光。
<Means for Solving the Problems> In order to achieve the above object, the present invention uses red light and green light that have different incident angles on the surface of a curved surface.

青色光を照射するための投光手段と、曲面体の表面から
の反射光像を各色相側に撮像するための撮像手段と、撮
像手段で得た撮像パターンより曲面体の有する各曲面要
素の性状を検出するための処理手段とで曲面性状検査装
置を構成している。そして前記投光手段は、赤色光、緑
色光、青色光をそれぞれ発生するリング状をなす3個の
発光体をもってなし、各発光体はそれぞれの光の合成に
より白色光となるような対波長発光エネルギー分布を有
すると共に、投光手段には各発光体による光を合成した
とき白色光となるように各発光体の光量を調整するため
の光量調節手段を接続している。
A light projecting means for irradiating blue light, an imaging means for capturing an image of reflected light from the surface of the curved surface on each hue side, and a method for determining each curved surface element of the curved surface from the imaging pattern obtained by the imaging means. A curved surface property inspection device is constituted by the processing means for detecting the property. The light projecting means includes three ring-shaped light emitters that generate red light, green light, and blue light, respectively, and each light emitter emits wavelength-paired light such that white light is produced by combining the respective lights. In addition to having an energy distribution, the light projecting means is connected to a light amount adjusting means for adjusting the light amount of each light emitting body so that when the light from each light emitting body is combined, it becomes white light.

〈作用〉 曲面体の表面に対し異なる入射角をもって各発光体から
赤色光、緑色光、青色光が照射されると、曲面体の表面
からの赤色、緑色、青色の各反射光像が撮像手段により
同時に分離して検出される。この場合に、各発光体によ
る赤色光。
<Function> When the surface of the curved body is irradiated with red light, green light, and blue light from each light emitting body at different incident angles, the red, green, and blue reflected light images from the surface of the curved body are captured by the imaging means. are simultaneously separated and detected. In this case, red light from each luminous body.

緑色光、青色光は合成されると白色光となるため、実装
部品のハンダ検査などでは、ハンダ付は部位の曲面性状
に関する情報に加えて、部品に関する情報のような周辺
情報も同時に検出されることになる。
When green light and blue light are combined, they become white light, so when inspecting solder on mounted components, in addition to information about the curved surface properties of soldered parts, peripheral information such as information about the parts is also detected at the same time. It turns out.

〈実施例〉 第1図は、この発明の一実施例にかかる基板検査装置の
概略構成を示している。
<Embodiment> FIG. 1 shows a schematic configuration of a board inspection apparatus according to an embodiment of the present invention.

図示例の基板検査装置は、位置決め基板2O3を撮像し
て得られた前記位置決め基板20S上にある各部品21
Sの検査領域のパラメータ(判定データ)と、被検査基
板20Tを撮像して得られた前記被検査基板2OT上に
ある各部品21Tの検査領域のパラメータ(被検査デー
タ)とを比較して、これらの各部品21Tが正しく実装
されかつハンダ付けされているかどうかを検査するため
のものであって、X軸テーブル部22.Y軸テーブル部
23.投光部24゜撮像部25.処理部26などをその
構成とじて含んでいる。
The illustrated example of the board inspection apparatus includes each component 21 on the positioning board 20S obtained by imaging the positioning board 2O3.
Comparing the parameters (determination data) of the inspection area of S with the parameters (inspection data) of the inspection area of each component 21T on the board 2OT to be inspected obtained by imaging the board 20T to be inspected, This is for inspecting whether each of these parts 21T is correctly mounted and soldered. Y-axis table section 23. Light projecting section 24° imaging section 25. The entire configuration includes a processing section 26 and the like.

X軸テーブル部22およびY軸テーブル部23は、それ
ぞれ処理部26からの制御信号に基づいて動作するモー
タ(図示せず)を備えており、これらモータの駆動によ
りX軸テーブル部22が撮像部25をX方向へ移動させ
、またY軸テーブル部23が基板2O3,20Tを支持
するコンベヤ27をY方向へ移動させる。
The X-axis table section 22 and the Y-axis table section 23 are each equipped with a motor (not shown) that operates based on a control signal from the processing section 26, and the drive of these motors causes the X-axis table section 22 to operate as an imaging section. 25 in the X direction, and the conveyor 27 on which the Y-axis table section 23 supports the substrates 2O3, 20T is moved in the Y direction.

これら基板203.20Tは、投光部24からの照射光
を受けつつ撮像部25により撮像される。
These substrates 203.20T are imaged by the imaging section 25 while receiving the irradiation light from the light projecting section 24.

投光部24は、処理部26からの制御信号に基づき赤色
光、緑色光、青色光をそれぞれ発生して検査対象へ異な
る入射角で照射するためのリング状の発光体28,29
.30を備えており、これら発光体28,29.30を
発した三原色光の混合した光により前記基板2O3,2
0’rを投光して、その反射光像を撮像部25で得て電
気信号に変換する。この実施例の場合、前記の各発光体
2B、29.30は白色光源に赤色。
The light projecting unit 24 includes ring-shaped light emitters 28 and 29 that respectively generate red light, green light, and blue light based on a control signal from the processing unit 26 and irradiate the object to be inspected at different incident angles.
.. 30, and the substrates 2O3, 2 are illuminated by the mixed light of the three primary colors emitted from these light emitters 28, 29, 30.
0'r is emitted, and an image of the reflected light is obtained by the imaging section 25 and converted into an electrical signal. In this embodiment, each of the light emitters 2B, 29.30 is a white light source and a red light source.

緑色、青色の各フィルタを被せた構造のものを用いてい
るが、三原色の各色相光を発生させるものであれば、こ
のような構成に限られないことは勿論である。
Although a structure in which green and blue filters are covered is used, it is of course not limited to such a structure as long as it generates light of each hue of the three primary colors.

またこの投光部24は、その照明下で基板2O3,2O
T上の部品に関する情報(部品番号、極性、カラーコー
ドなど)や基板パターン情報(種々のマークなど)を検
出することを可能となすため、各発光体28,29.3
0が発する各色相の光が混色されると完全な白色光とな
るような工夫を施しである。すなわち各発光体28,2
9.30は、混色により白色光となるような対波長発光
エネルギー分布を有する赤色光スペクトル、緑色光スペ
クトル、青色光スペクトルの光を発する発光体をもって
構成すると共に、各発光体28,29.30から照射さ
れた赤色光、緑色光、青色光が混色して白色光となるよ
うに、撮像コントローラ31により各色相光の光量の調
整を可能としている。
Moreover, this light projecting unit 24 illuminates the substrates 2O3 and 2O under its illumination.
In order to make it possible to detect information about the components on the T (part number, polarity, color code, etc.) and board pattern information (various marks, etc.),
It is designed so that when the light of each hue emitted by 0 is mixed, it becomes completely white light. That is, each light emitting body 28,2
9.30 is constituted by a light emitting body that emits light in a red light spectrum, a green light spectrum, and a blue light spectrum, each having a emission energy distribution with respect to wavelength such that white light is produced by color mixing, and each of the light emitters 28, 29.30 The imaging controller 31 is capable of adjusting the amount of light of each hue so that the red, green, and blue lights emitted from the light are mixed to form white light.

つぎに撮像部25は、前記投光部24の上方に位置させ
たカラーテレビカメラ32を備えており、前記基板20
Sまたは20Tからの反射光はこのカラーテレビカメラ
32によって三原色のカラー信号R,G、Bに変換され
て処理部26へ供給される。
Next, the imaging unit 25 includes a color television camera 32 located above the light projecting unit 24, and
The reflected light from S or 20T is converted into three primary color signals R, G, and B by this color television camera 32 and supplied to the processing section 26.

処理部26は、A/D変換部33.メモリ38゜ティー
チングテーブル355画像処理部34゜判定部36.X
、Yテーブルコントローラ37゜撮像コントローラ31
.CRT表示部41.プリンタ42.キーボード40.
フロッピディスク装置43.制御′11部(CPU)3
9などから構成されるもので、ティーチングモードのと
き、位置決め基板2O3についてのカラー信号R9G、
Bを処理しハンダ付は状態が良好な各部品213の所定
領域につき赤色、緑色、青色の各色相パターンを検出し
て判定データファイルを作成し、また検査モードのとき
、被検査基板20Tについてのカラー信号R,G、Bを
処理し基板上の各部品21Tの所定領域につき同様の各
色相パターンを検出して被検査データファイルを作成す
る。そしてこの被検査データファイルと前記判定データ
ファイルとを比較して、この比較結果から被検査基板2
OT上の所定の部品21Tにつきハンダ付は部分の良、
不良を自動的に判定する。
The processing section 26 includes an A/D conversion section 33. Memory 38° Teaching table 355 Image processing section 34° Judgment section 36. X
, Y table controller 37° imaging controller 31
.. CRT display section 41. Printer 42. Keyboard 40.
Floppy disk device 43. Control '11 section (CPU) 3
9, etc., and when in the teaching mode, the color signal R9G for the positioning board 2O3,
A judgment data file is created by detecting red, green, and blue hue patterns in a predetermined area of each component 213 that has been processed and soldering is in good condition. The color signals R, G, and B are processed to detect similar hue patterns in predetermined areas of each component 21T on the board to create a data file to be inspected. Then, this inspection data file and the judgment data file are compared, and based on the comparison result, the inspection target board 2 is
For the specified part 21T on the OT, the soldering is good.
Automatically determines defects.

第2図は、ハンダ付けが良好であるとき、部品が欠落し
ているとき、ハンダ不足の状態にあるときのそれぞれハ
ンダ44の断面形態と、各場合の撮像パターン、赤色パ
ターン、緑色パターン、青色パターンとの関係を一覧表
で示したものであり、いずれか色相パターン間には明確
な差異が現われるため、部品の有無やハンダ付けの良否
が判定できることになる。
Figure 2 shows the cross-sectional form of the solder 44 when the soldering is good, when a component is missing, and when there is insufficient solder, and the imaging patterns in each case: a red pattern, a green pattern, and a blue pattern. It shows the relationship with the patterns in a list, and since there are clear differences between any hue patterns, it is possible to judge the presence or absence of parts and the quality of soldering.

第1図に戻って、A/D変換部33は前記撮像部25か
らカラー信号R,G、Bが供給されたときに、これをア
ナログ・ディジタル変換して制御部39へ出力する。メ
モリ38はRAMなどを備え、制御部39の作業エリア
として使われる。@像処理部34は制御部39を介して
供給された画像データを画像処理して前記被検査データ
ファイルや判定データファイルを作成し、これらを制御
部39や判定部36へ供給する。
Returning to FIG. 1, when the A/D conversion section 33 is supplied with the color signals R, G, and B from the imaging section 25, the A/D conversion section 33 converts the color signals from analog to digital and outputs them to the control section 39. The memory 38 includes a RAM and the like, and is used as a work area for the control section 39. @The image processing section 34 performs image processing on the image data supplied via the control section 39 to create the above-mentioned inspected data file and judgment data file, and supplies these to the control section 39 and the judgment section 36.

ティーチングテーブル35はティーチング時に制御部3
9から判定データファイルが供給されたとき、これを記
憶し、また検査時に制御部39が転送要求を出力したと
き、この要求に応じて判定データファイルを読み出して
、これを制御部39や判定部36などへ供給する。
The teaching table 35 is connected to the control unit 3 during teaching.
When the judgment data file is supplied from the control unit 9, it is stored, and when the control unit 39 outputs a transfer request during inspection, the judgment data file is read out in response to this request and sent to the control unit 39 and the judgment unit. 36 etc.

判定部36は、検査時に制御部39から供給された判定
データファイルと、前記画像処理部34から転送された
被検査データファイルとを比較して、その被検査基板2
0Tにつきハンダ付は状態の良否を判定し、その判定結
果を制御部39へ出力する。
The determination unit 36 compares the determination data file supplied from the control unit 39 at the time of inspection with the data file to be inspected transferred from the image processing unit 34, and determines the quality of the board 2 to be inspected.
At 0T, it is determined whether the soldering condition is good or bad, and the determination result is output to the control section 39.

撮像コントローラ31は、制御部39と投光部24およ
び撮像部25とを接続するインターフェースなどを備え
、制御部39の出力に基づき投光部24の各発光体2B
、29.30の光量を調整したり、撮像部25のカラー
テレビカメラ32の各色相光出力の相互バランスを保つ
などの制御を行う。
The imaging controller 31 includes an interface for connecting the control section 39 with the light projecting section 24 and the imaging section 25, and controls each light emitting body 2B of the light projecting section 24 based on the output of the control section 39.
, 29 and 30, and maintains mutual balance between the hue light outputs of the color television camera 32 of the imaging section 25.

X、Yテーブルコントローラ37は制御部39と前記X
軸テーブル部22およびY軸テーブル部23とを接続す
るインターフェースなどを備え、制御部39の出力に基
づきX軸テーブル部22およびY軸テーブル部23を制
御する。
The X, Y table controller 37 includes a control section 39 and the
It includes an interface for connecting the axis table section 22 and the Y-axis table section 23, and controls the X-axis table section 22 and the Y-axis table section 23 based on the output of the control section 39.

CR7表示部41はブラウン管(CRT)を備え、制御
部39から画像データ、判定結果、キー人力データなど
が供給されたとき、これを画面上に表示する。プリンタ
42は制御部39から判定結果などが供給されたとき、
これを予め決められた書式(フォーマット)でプリント
アウトする。キーボード40は操作情報や位置決め基板
203に関するデータ、この位置決め基板20S上の部
品213に関するデータなどを入力するのに必要な各種
キーを備えており、このキーボード40から入力された
情報やデータなどは制御1部39へ供給される。
The CR7 display section 41 is equipped with a cathode ray tube (CRT), and when image data, judgment results, key manual data, etc. are supplied from the control section 39, they are displayed on the screen. When the printer 42 is supplied with the determination result etc. from the control unit 39,
This is printed out in a predetermined format. The keyboard 40 is equipped with various keys necessary for inputting operation information, data regarding the positioning board 203, data regarding the parts 213 on the positioning board 20S, etc., and the information and data entered from the keyboard 40 are controlled. 1 part 39 is supplied.

制?al1部39は、マイクロプロセッサなどを備えて
おり、つぎに述べる手順に沿って動作する。
Regulation? The al1 unit 39 includes a microprocessor and the like, and operates according to the following procedure.

まず新たな被検査基板20Tを検査するときには、制御
部39は、ティーチングを実行するために装置各部を制
御して投光部24や撮像部25をオンし、また撮像条件
やデータの処理条件を整える。つぎにY軸テーブル部2
3上に位置決め基板2O3がセットされると、制御部3
9はX軸テーブル部22およびY軸テーブル部23を制
御して位置決め基板203を位置出しした後、撮像部2
5に位置決め基板20Sを撮像させる。この撮像動作で
得られた三原色のカラー信号R,G、BはA/D変換部
33でA/D変換され、その変換結果はメモリ38にリ
アルタイムで記憶される。
First, when inspecting a new substrate to be inspected 20T, the control section 39 controls each section of the apparatus to execute teaching, turns on the light projecting section 24 and the imaging section 25, and also sets the imaging conditions and data processing conditions. Arrange. Next, Y-axis table section 2
When the positioning board 2O3 is set on the controller 3, the controller 3
9 controls the X-axis table section 22 and the Y-axis table section 23 to position the positioning board 203, and then moves the imaging section 2
5 to image the positioning board 20S. The three primary color signals R, G, and B obtained by this imaging operation are A/D converted by an A/D converter 33, and the conversion results are stored in a memory 38 in real time.

ついで制御部39は、前記メモリ38より各色相に対応
する画像データを画像処理部34へ転送させ、この画像
処理部34にて各色相の画像データを各色相側の適当な
しきい値で2値化するなどして、赤色、緑色、青色のパ
ターンを検出する。また制御部39は、画像処理部34
を制御し、各部品21Sの撮像パターンにつき各部分(
電極など)の明度をチエツクするなどして各部品21S
の電極の位置や極性マークの位置などを識別させる。
Next, the control section 39 causes the image data corresponding to each hue to be transferred from the memory 38 to the image processing section 34, and the image processing section 34 converts the image data of each hue into binary values using an appropriate threshold value on each hue side. to detect red, green, and blue patterns. Further, the control unit 39 controls the image processing unit 34
is controlled, and each part (
Check the brightness of each part 21S (electrodes, etc.)
Identify the position of the electrode and the position of the polarity mark.

この後制御部39は、前記の各色相パターンと前記の識
別結果とに基づいて、被検査基板20Tを検査するのに
必要な判定データファイルを作成し、これをティーチン
グテーブル35に記憶させた後、ティーチングを終了す
る。
Thereafter, the control unit 39 creates a determination data file necessary for inspecting the board to be inspected 20T based on each of the hue patterns and the identification results, stores this in the teaching table 35, and then , end teaching.

つぎに検査モードに移行すると、制御部39はティーチ
ングテーブル35やキーボード40からその日の日付デ
ータや、被検査基板20TのIDナンバ(識別番号)を
取り込むとともに、ティーチングテーブル35から判定
データファイルを読み出して、これを判定部36に供給
する。
Next, when shifting to the inspection mode, the control unit 39 takes in the date data of the day and the ID number (identification number) of the board to be inspected 20T from the teaching table 35 and the keyboard 40, and reads out the judgment data file from the teaching table 35. , and supplies this to the determination section 36.

この後、制御部39は、撮像条件やデータの処理条件を
整えた後、Y軸テーブル部23上に被検査基板20Tが
セットされたかどうかをチエツクする。
Thereafter, the control section 39 checks whether the substrate to be inspected 20T is set on the Y-axis table section 23 after adjusting the imaging conditions and data processing conditions.

もしセットされておれば、制御部39は前記と同様、画
像処理部34にて各色相パターンの検出および電極や極
性マークの識別を順次行わせた後、各色相パターンと前
記の識別結果とに基づき被検査データファイルを作成す
る。ついで制御部39は、前記被検査データファイルを
判定部36に転送させ、この被検査データファイルと前
記判定データファイルとを比較させて、被検査基板2O
T上の所定の部品21Tにつきハンダ付けの良否を判定
させると共に、この判定結果をCRT表示部41やプリ
ンタ42に供給して、これらを表示させ、またプリント
アウトさせる。
If set, the control unit 39 causes the image processing unit 34 to sequentially detect each hue pattern and identify the electrodes and polarity marks, as described above, and then compares each hue pattern with the above identification results. Create a data file to be inspected based on this. Next, the control unit 39 transfers the inspection data file to the determination unit 36, compares the inspection data file with the determination data file, and compares the inspection target data file with the determination data file.
The quality of the soldering is determined for a predetermined component 21T on the T, and the determination results are supplied to the CRT display section 41 and printer 42 to be displayed and printed out.

〈発明の効果〉 この発明は上記の如(、曲面体の表面に対し異なる入射
角をもってリング状の各発光体から赤色光、緑色光、青
色光を照射して、曲面体の表面からの反射光像を各色相
側に同時に得るよう構成したから、各色相パターンを用
いて曲面体の性状を短時間で検出でき、しかも各発光体
による赤色光、緑色光、青色光が合成されると白色光と
なるような構成であるから、実装部品のハンダ検査にお
いて必要不可欠な周辺情報の検出も可能であり、ハンダ
検査の自動化を実現するなど、発明目的を達成した顕著
な効果を奏する。
<Effects of the Invention> The present invention is as described above (i.e., red light, green light, and blue light are emitted from each ring-shaped light emitter at different incident angles to the surface of a curved surface, and the reflection from the surface of the curved surface is reflected from the surface of the curved surface). Since the configuration allows optical images to be obtained simultaneously on each hue side, the properties of the curved surface can be detected in a short time using each hue pattern, and when the red, green, and blue light from each light emitter is combined, white light is generated. Since it is configured to emit light, it is also possible to detect peripheral information that is essential for solder inspection of mounted components, and achieves the remarkable effect of achieving the purpose of the invention, such as realizing automation of solder inspection.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例にかかる基板検査装置の全
体構成を示す説明図、第2図はハンダ付は状態の良否と
パターンとの関係を示す説明図、第3図は従来のハンダ
付は状態の自動検査装置を示す原理説明図、第4図およ
び第5図はこの発明の原理を示す原理説明図である。 24・・・・投光部    25・・・・撮像部26・
・・・処理部    28,29.30・・・・発光体
31・・・・撮像コントローラ
FIG. 1 is an explanatory diagram showing the overall configuration of a board inspection apparatus according to an embodiment of the present invention, FIG. 2 is an explanatory diagram showing the relationship between the soldering condition and the pattern, and FIG. 3 is an explanatory diagram showing the relationship between the soldering condition and the pattern. Attached is a diagram for explaining the principle of an automatic state inspection device, and FIGS. 4 and 5 are diagrams for explaining the principle of the present invention. 24... Light projecting section 25... Imaging section 26.
... Processing unit 28, 29. 30 ... Light emitter 31 ... Imaging controller

Claims (1)

【特許請求の範囲】 曲面体の表面へ入射角が異なる赤色光,緑色光,青色光
を照射するための投光手段と、曲面体の表面からの反射
光像を各色相別に撮像するための撮像手段と、撮像手段
で得た撮像パターンより曲面体の有する各曲面要素の性
状を検出するための処理手段とから成る曲面性状検査装
置であって、 前記投光手段は、赤色光,緑色光,青色光をそれぞれ発
生するリング状をなす3個の発光体より成り、各発光体
はそれぞれの光の合成により白色光となるような対波長
発光エネルギー分布を有すると共に、投光手段には各発
光体による光を合成したとき白色光となるように各発光
体の光量を調整するための光量調節手段が接続されて成
る曲面性状検査装置。
[Claims] Light projecting means for irradiating the surface of a curved body with red light, green light, and blue light having different incident angles, and a means for capturing reflected light images from the surface of the curved body for each hue. A curved surface property inspection device comprising an imaging means and a processing means for detecting the properties of each curved surface element of a curved surface body from an imaging pattern obtained by the imaging means, wherein the light projecting means emits red light and green light. , three ring-shaped light emitters each emitting blue light, and each light emitter has a luminous energy distribution with respect to wavelength such that white light is produced by combining the light from each light emitter. A curved surface property inspection device connected to a light quantity adjusting means for adjusting the light quantity of each light emitter so that the light from the light emitters becomes white light when combined.
JP63112054A 1988-05-09 1988-05-09 Curved property inspection device Expired - Lifetime JPH061173B2 (en)

Priority Applications (15)

Application Number Priority Date Filing Date Title
JP63112054A JPH061173B2 (en) 1988-05-09 1988-05-09 Curved property inspection device
EP89905170A EP0413817B1 (en) 1988-05-09 1989-05-02 Substrate examining apparatus
AT89905170T ATE135110T1 (en) 1988-05-09 1989-05-02 SUBSTRATE TESTING DEVICE
DE68929481T DE68929481T2 (en) 1988-05-09 1989-05-02 Device and method for displaying the results of a printed circuit board test
DE68929062T DE68929062T2 (en) 1988-05-09 1989-05-02 Device for testing printed circuit boards
SG1996004112A SG47736A1 (en) 1988-05-09 1989-05-02 Printed circuit board inspecting apparatus
SG1996003498A SG66545A1 (en) 1988-05-09 1989-05-02 Apparatus for inspecting printed circuit boards and the like and method of operating the same
SG1996003459A SG47652A1 (en) 1988-05-09 1989-05-02 Apparatus for and method of displaying results of printed circuit board inspection
AU35436/89A AU3543689A (en) 1988-05-09 1989-05-02 Substrate examining apparatus and method of operating same
EP95113574A EP0687901B1 (en) 1988-05-09 1989-05-02 Apparatus for and method of displaying results of printed circuit board inspection
EP95113579A EP0685732B1 (en) 1988-05-09 1989-05-02 Printed circuit board inspecting apparatus
US07/601,722 US5245671A (en) 1988-05-09 1989-05-02 Apparatus for inspecting printed circuit boards and the like, and method of operating same
PCT/JP1989/000470 WO1989011093A1 (en) 1988-05-09 1989-05-02 Substrate examining apparatus and method of operating same
KR1019900700025A KR920006031B1 (en) 1988-05-09 1989-05-02 Substrate examining apparatus and method of operating same
DE68925901T DE68925901T2 (en) 1988-05-09 1989-05-02 SUBSTRATE TEST DEVICE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63112054A JPH061173B2 (en) 1988-05-09 1988-05-09 Curved property inspection device

Publications (2)

Publication Number Publication Date
JPH01282410A true JPH01282410A (en) 1989-11-14
JPH061173B2 JPH061173B2 (en) 1994-01-05

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Family Applications (1)

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JP63112054A Expired - Lifetime JPH061173B2 (en) 1988-05-09 1988-05-09 Curved property inspection device

Country Status (1)

Country Link
JP (1) JPH061173B2 (en)

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JPH0737955A (en) * 1993-07-21 1995-02-07 Nec Corp Automatic visual inspection machine for bonding wire
WO1996038709A1 (en) * 1995-05-31 1996-12-05 Omron Corporation Object observation apparatus and method
KR20030024615A (en) * 2001-09-18 2003-03-26 가부시키가이샤 도쿄 웰드 Method and apparatus for examining appearance of chip component
JP2006047290A (en) * 2004-06-30 2006-02-16 Omron Corp Image generation method for board inspection, board inspecting device and illumination device for board inspection
US7062080B2 (en) 2001-11-26 2006-06-13 Omron Corporation Method of inspecting curved surface and device for inspecting printed circuit board
US7177033B2 (en) 2002-03-11 2007-02-13 Mitutoyo Corporation Image processing type of measuring device, lighting system for the same, lighting system control method, lighting system control program, and a recording medium with the lighting system control program recorded therein
JP2007192623A (en) * 2006-01-18 2007-08-02 Tani Electronics Corp Device and method for inspecting cream solder printed state of printed circuit board
US7394084B2 (en) 2004-06-30 2008-07-01 Omron Corporation Method of generating image and illumination device for inspecting substrate
US8077307B2 (en) 2008-04-09 2011-12-13 Orbotech Ltd. Illumination system for optical inspection
JP2011252866A (en) * 2010-06-03 2011-12-15 Ihi Corp Three-dimensional shape measuring apparatus, three-dimensional shape measuring additional apparatus, and three-dimensional shape measuring method
JP2014089095A (en) * 2012-10-30 2014-05-15 Fujitsu Ltd Moving body posture detection method, moving body posture detection device and component assembling device
TWI761651B (en) * 2018-12-28 2022-04-21 聯策科技股份有限公司 Optical inspection system and method with high information

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JP3551188B2 (en) 2002-01-10 2004-08-04 オムロン株式会社 Surface condition inspection method and substrate inspection device
JP5108827B2 (en) * 2009-04-28 2012-12-26 ヴィスコ・テクノロジーズ株式会社 Shape inspection apparatus and shape inspection program
JP5065329B2 (en) * 2009-05-12 2012-10-31 ヴィスコ・テクノロジーズ株式会社 Shape inspection apparatus and shape inspection program
JP2015152585A (en) * 2014-02-19 2015-08-24 小林 茂樹 Shape measurement device and shape inspection device for metallic surface
JP6954142B2 (en) 2018-01-17 2021-10-27 オムロン株式会社 Image inspection equipment and lighting equipment

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JPS59153108A (en) * 1983-02-22 1984-09-01 Matsushita Electric Ind Co Ltd Method for checking defects on surface of mirror body
JPS61293657A (en) * 1985-06-21 1986-12-24 Matsushita Electric Works Ltd Method for inspecting soldering appearance
JPS62127617A (en) * 1985-11-29 1987-06-09 Fujitsu Ltd Inspecting instrument for linear body

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JPS59153108A (en) * 1983-02-22 1984-09-01 Matsushita Electric Ind Co Ltd Method for checking defects on surface of mirror body
JPS61293657A (en) * 1985-06-21 1986-12-24 Matsushita Electric Works Ltd Method for inspecting soldering appearance
JPS62127617A (en) * 1985-11-29 1987-06-09 Fujitsu Ltd Inspecting instrument for linear body

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0737955A (en) * 1993-07-21 1995-02-07 Nec Corp Automatic visual inspection machine for bonding wire
WO1996038709A1 (en) * 1995-05-31 1996-12-05 Omron Corporation Object observation apparatus and method
KR20030024615A (en) * 2001-09-18 2003-03-26 가부시키가이샤 도쿄 웰드 Method and apparatus for examining appearance of chip component
US7062080B2 (en) 2001-11-26 2006-06-13 Omron Corporation Method of inspecting curved surface and device for inspecting printed circuit board
DE10310595B4 (en) * 2002-03-11 2015-12-10 Mitutoyo Corp. Measuring device with image processing, illumination system therefor, method for controlling the illumination system, control program for the illumination system and storage medium with the programs stored thereon for controlling the illumination system
US7177033B2 (en) 2002-03-11 2007-02-13 Mitutoyo Corporation Image processing type of measuring device, lighting system for the same, lighting system control method, lighting system control program, and a recording medium with the lighting system control program recorded therein
JP2006047290A (en) * 2004-06-30 2006-02-16 Omron Corp Image generation method for board inspection, board inspecting device and illumination device for board inspection
US7394084B2 (en) 2004-06-30 2008-07-01 Omron Corporation Method of generating image and illumination device for inspecting substrate
JP2007192623A (en) * 2006-01-18 2007-08-02 Tani Electronics Corp Device and method for inspecting cream solder printed state of printed circuit board
US8077307B2 (en) 2008-04-09 2011-12-13 Orbotech Ltd. Illumination system for optical inspection
JP2011252866A (en) * 2010-06-03 2011-12-15 Ihi Corp Three-dimensional shape measuring apparatus, three-dimensional shape measuring additional apparatus, and three-dimensional shape measuring method
JP2014089095A (en) * 2012-10-30 2014-05-15 Fujitsu Ltd Moving body posture detection method, moving body posture detection device and component assembling device
TWI761651B (en) * 2018-12-28 2022-04-21 聯策科技股份有限公司 Optical inspection system and method with high information

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